CN1445052A - Super accurate fine motion work platform with function of restraining vibration. - Google Patents
Super accurate fine motion work platform with function of restraining vibration. Download PDFInfo
- Publication number
- CN1445052A CN1445052A CN 03116451 CN03116451A CN1445052A CN 1445052 A CN1445052 A CN 1445052A CN 03116451 CN03116451 CN 03116451 CN 03116451 A CN03116451 A CN 03116451A CN 1445052 A CN1445052 A CN 1445052A
- Authority
- CN
- China
- Prior art keywords
- groove
- direct
- emulsus
- driver
- workbench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000452 restraining effect Effects 0.000 title 1
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims description 24
- 241001656951 Protheca Species 0.000 claims description 23
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 5
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000013016 damping Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000005764 inhibitory process Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002490 cerebral effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Images
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
An ultra-precise micro-motion working platform with vibration damping function is disclosed. The through slots are made on a metal plate in X and Y directions to form a Y-direction platform. Other through slots are made on the metal plate in said Y-direction platform in X and Y directions to form X-direction platform. A pair of piezoelectric drivers are symmetrically installed to X-direction and Y-direction platforms respectively. Its advantages are high precision, no guide gap, high location resolution, and high vibration suppressing effect.
Description
Technical field
The present invention relates to ultraprecise location, vibration-repressing device, but be a kind of ultra-precise micro displacement workbench with the function of shaking.
Background technology
High precision and high-resolution precision micro-worktable system occupy extremely important status in sophisticated industry production in modern age and scientific research field.It is the key link that directly influences precision, ultra precision cutting level of processing, precision measurement level and VLSI (very large scale integrated circuit) production level.From the seventies later stage, microelectric technique develops to large scale integrated circuit (LSI) and VLSI (very large scale integrated circuit) (VLSI) direction, raising along with integrated level, lines are miniaturization more and more, the live width of CPU has narrowed down to 0.13um at present, process equipment (as pattern generator, step and repeat camera, litho machine, electron beam and X ray and checkout equipment thereof etc.) is correspondingly had higher requirement, the bearing accuracy that requires these equipment is 1/3～1/5 of a live width, promptly nano level precision.In the manufacturing of precision optics equipment, as with the parabolic mirror of the direct turning large-scale astronomical telescope of diamond bit the time, require to process the surface that geometric accuracy is higher than 1/10 optical wavelength, promptly error in geometrical form is less than 0.05um.In the research of biological, engineering in medicine, need pair cell to move, separate, make up, dna molecular is stretched and is fixed on the barrier film, protein molecule is operated and film former structure or the like.These all need to adopt the micro-displacement work table that can make rapid movement of superhigh precision.Along with science and technology development, more other field also more and more presses for the fine motion system, for example, and cerebral surgery operation, fiber alignment, microfabrication, microrobot assembling etc.Nanometer technology is considered to the scientific and technological forward position of 21 century, as the nanometer positioning technology of one of gordian technique with about the development of each subject nanometer technology.And the core of nanometer positioning technology also can realize the micro displacement workbench of precision micro-displacement just.But from the vibration isolation aspect that shakes, the modes used of great majority are to add a basis to worktable now, and this basis has certain vibration isolating effect, isolates for to external world the interference of system, makes worktable be in the metastable environment.But the instrument and meter main body on the worktable is when work, such as motion of topworks etc., more or less can produce vibration, this kind undesired signal can the precision to total system exert an influence in inside, and sort signal can not be eliminated by the method for above-mentioned used basic vibration isolation, so necessaryly on intrasystem workbench, increase a vibration-repressing device that is used to eliminate self undesired signal, thereby but obtain the exquisite system that the hi-Fix of real meaning shakes.
Summary of the invention
But the object of the present invention is to provide a kind of ultra-precise micro displacement workbench with the function of shaking, is that guide rail transmits the displacement that piezoelectric actuator produces with the flexible hinge, makes this workbench have bearing accuracy height, characteristic that inhibition of vibration is good.
It comprises the technical solution used in the present invention:
1) on the Y on metal plate both sides direction, has a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, on the directions X on metal plate both sides respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, and be interconnected, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four Y to flexible hinge arm and eight Y to flexible hinge, also have groove in the middle of two groups of emulsus direct through groove of directions X, two Y put Y respectively to driver protheca and back cover to the front and rear part of piezoelectric actuator, the top of protheca withstands on Y in the driver locating slot, put fixingly after the screw of Y in driver pretension screw withstands on being contained in, form Y to workbench;
2) be positioned at Y and on the directions X on the metal plate both sides of workbench, have a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, on the Y on metal plate both sides direction respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, and be interconnected, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four X to flexible hinge arm and eight X to flexible hinge, also have groove in the middle of two groups of emulsus direct through groove of Y direction, two X put X respectively to driver protheca and back cover to the front and rear part of piezoelectric actuator, the top of protheca withstands on X in the driver locating slot, put fixingly after the screw of X in driver pretension screw withstands on being contained in, form X to workbench.
Said protheca is that both sides become 120 ° of triangle prothecas that the middle part hollows out; The back cover hollows out for the middle part, and the bottom is the cylindrical back cover on plane.
The thickness of metal plate is 15-25mm; Material is aluminium sheet or copper coin.
The present invention compares the beneficial effect that has with background technology:
1) this kind structure has higher natural frequency, makes that the Frequency Response of structure is better, and X, Y are respectively 180,230 and 260Hz to single order, second order, the three rank natural frequencys of workbench;
2) each piezoelectric actuator is all joined and protheca and back cover, respectively by pretension screw pretension, do not have the gap after the installation, and the locating slot that the driving force that driver is produced is passed through 120 ° of front ends can conveniently be installed fully along the positive dirction effect simultaneously.
3) having adopted flexible hinge is displacement output guide rail, X is embedded in Y to workbench and forms mosaic texture among workbench, add that each is driven by two relative piezoelectric actuators on X, the Y bidimensional, realize the dual drive form, one of them is used for the location, but another is used for shaking, and has improved bearing accuracy greatly, can reach nano-precision;
4) because used piezoelectric actuator has higher response speed, make that this structure step response is fast, step response time is about 0.1 second;
5) adopt that two piezoelectric actuators drive on the relative direction, adopt closed-loop control, make the structure inhibition of vibration good,, can be reduced to original below 5% the undesired signal of general small magnitude;
The present invention can be used for the cut location of high precision, superhigh precision, but the shaking of pattern generator, step and repeat camera, litho machine, electron beam and precision instrument and equipments such as X ray and checkout equipment thereof, vibration damping.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the workbench structural representation that piezoelectric actuator is not installed;
Fig. 3 is the A-A cut-open view of Fig. 2;
Fig. 4 is a flexible hinge protheca structural representation;
Fig. 5 is a flexible hinge Rear-cover structure synoptic diagram;
Fig. 6 is a principle of work synoptic diagram of the present invention.Among the figure:
1 platform frame, 2 platforms install screw 3Y to flexible hinge arm 4Y to flexible hinge
5Y to workbench 6X to flexible hinge 7X to flexible hinge arm 8X to workbench
9 displacement output stage fixing threaded hole 10X to driver protheca 11X to the driver locating slot
12X overlaps 14X to driver pretension screw to piezoelectric actuator 13X behind driver
15Y to driver locating slot 16Y to driver protheca 17Y to piezoelectric actuator
But 18Y behind driver, overlap 19Y to driver pretension screw 20X to the driver that shakes
But 21Y is to driver 22 displacement transducers 23 vibration-measuring sensors that shake
A, a ' secondary instrument b, b ' A/D analog to digital converter c, c ' D/A digital to analog converter
D computing machine e driving power
Embodiment
As shown in Figure 1, 2, 3, the present invention includes:
1) on the Y direction on metal plate 1 both sides, has a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, on the directions X on metal plate both sides respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, and be interconnected, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four Y to flexible hinge arm 3 and eight Y to flexible hinge 4, also have groove in the middle of two groups of emulsus direct through groove of directions X, two Y put Y respectively to driver protheca 16 and back cover 18 to the front and rear part of piezoelectric actuator 17, the top of protheca 16 withstands on Y in driver locating slot 15, fix with being contained in to overlap on 18 after the screw of Y in driver pretension screw 19 withstands on, form Y to workbench 5;
2) be positioned at Y and on the directions X on metal plate 1 both sides of workbench 5, have a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, and be interconnected, on the Y on metal plate both sides direction respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four X to flexible hinge arm 7 and eight X to flexible hinge 6, also have groove in the middle of two groups of emulsus direct through groove of Y direction, two X put X respectively to driver protheca 10 and back cover 13 to the front and rear part of piezoelectric actuator 12, the top of protheca 10 withstands on X in driver locating slot 11, fix with being contained in to overlap on 13 after the screw of X in driver pretension screw 14 withstands on, form X to workbench 8.On workbench 8, have displacement output stage fixing threaded hole 9 at X.
Protheca shown in Fig. 4,5 is that both sides become 120 ° of triangle prothecas that the middle part hollows out; The back cover is the cylindrical back cover on plane for the bottom.
The present invention processes groove by line cutting technology on a metal matrix material, form whole device at groove place formation elastic support with matrix processing back remainder, promptly adopts the guide rail form of flexible hinge.Entire mechanism guarantees strict center symmetry in process, reduced the influence of mismachining tolerance to guide-localization precision and inhibition of vibration to a certain extent, and mechanism is insensitive to environmental error.It is a kind of compound parallel four-bar structure, has guiding accuracy height, no gap, guide rail positioning resolution height, machining precision and is easy to guarantee, does not need advantages such as assembling.
Principle of work and part function below in conjunction with 1,6 pairs of these devices of accompanying drawing are described in detail.
Be screwed in the pretension screw of driver pretension screw 14,19, can regulate X, Y the initial driving power of pressing to piezoelectric actuator 12,17.When system starts working, displacement transducer 22 detect X to, Y is to the displacement of output, change into the correspondent voltage amount by secondary instrument a, this voltage is sampled respectively by A/D analog to digital converter b with computing machine d, the initial setting shift value that requires with task compares, compare by certain control algolithm (being generally pid control algorithm commonly used) again, computing, draw the correspondent voltage value, through D/A digital to analog converter c and driving power e this signal is transferred to X respectively, Y to piezoelectric actuator 12,17, make two piezoelectric actuators 12,17 make corresponding displacement output, and travelling table positions.Piezoelectric actuator 12,17 is under the effect of pretightning force, the displacement of output is had no loss ground send workbench 5,8 to along positive dirction by driver protheca 10,16, workbench 5,8 is supported by group flexible hinge 6,4 respectively, under the effect of power, flexible hinge 6,4 places are subjected to bending stress, produce corresponding angular, corresponding flexible hinge arm 7,3 converts this angular displacement to displacement that the counterparty makes progress, makes the worktable action of corresponding dimension.With flexible hinge as displacement transmitted guide rail, have no gap, do not have friction, advantage such as exempt to lubricate, do not generate heat, add good structural symmetry, make the displacement energy of piezoelectric actuator 12,17 outputs change into the displacement output of final platform, and can guarantee the resolution of total system with very high precision.
Simultaneously, vibration-measuring sensor 23 detects X to, the Y vibratory output to carry-out bit, change into the correspondent voltage amount by secondary instrument a ', this voltage is sampled respectively by A/D analog to digital converter b ' with computing machine d, again by certain control algolithm compare, computing, draw the correspondent voltage value, through D/A digital to analog converter c ' and driving power e this signal be transferred to respectively X, Y to piezoelectric actuator 20,21, make two piezoelectric actuators 20,21 make corresponding displacement output, but travelling table carry out shaking.
Claims (3)
1. but ultra-precise micro displacement workbench with the function of shaking is characterized in that:
1) on the Y direction on metal plate (1) both sides, has a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, on the directions X on metal plate both sides respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, and be interconnected, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four Y to flexible hinge arm (3) and eight Y to flexible hinge (4), also have groove in the middle of two groups of emulsus direct through groove of directions X, two Y put Y respectively to driver protheca (16) and back cover (18) to the front and rear part of piezoelectric actuator (17), the top of protheca (16) withstands on Y in driver locating slot (15), withstand on back cover (18) and go up fixingly with being contained in the screw of Y in driver pretension screw (19), form Y to workbench (5);
2) be positioned at Y and on the directions X on metal plate (1) both sides of workbench (5), have a spacious shaped as frame direct through groove of symmetry in opposite directions, two minor faces of two spacious shaped as frame direct through groove have two respectively to projecting inward emulsus direct through groove, on the Y on metal plate both sides direction respectively symmetry to have two be one group the two groups emulsus direct through groove that outwards protrude, and be interconnected, corresponding with two of two spacious shaped as frame direct through groove two minor faces respectively to projecting inward emulsus direct through groove, form respectively four X to flexible hinge arm (7) and eight X to flexible hinge (6), also have groove in the middle of two groups of emulsus direct through groove of Y direction, two X put X respectively to driver protheca (10) and back cover (13) to the front and rear part of piezoelectric actuator (17), the top of protheca (10) withstands on X in driver locating slot (11), withstand on back cover (13) and go up fixingly with being contained in the screw of X in driver pretension screw (14), form X to workbench (8).
2. but according to claims 1 described a kind of ultra-precise micro displacement workbench with the function of shaking, it is characterized in that: said protheca is that both sides become 120 ° of triangle prothecas that the middle part hollows out; The back cover hollows out for the middle part, and the bottom is the cylindrical back cover on plane.
3. but according to claims 1 described a kind of ultra-precise micro displacement workbench with the function of shaking, it is characterized in that: the thickness of metal plate (1) is 15-25mm; Material is aluminium sheet or copper coin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03116451 CN1202937C (en) | 2003-04-14 | 2003-04-14 | Super accurate fine motion work platform with function of restraining vibration. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03116451 CN1202937C (en) | 2003-04-14 | 2003-04-14 | Super accurate fine motion work platform with function of restraining vibration. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1445052A true CN1445052A (en) | 2003-10-01 |
| CN1202937C CN1202937C (en) | 2005-05-25 |
Family
ID=27814874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03116451 Expired - Fee Related CN1202937C (en) | 2003-04-14 | 2003-04-14 | Super accurate fine motion work platform with function of restraining vibration. |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1202937C (en) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100376361C (en) * | 2005-01-11 | 2008-03-26 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN100535765C (en) * | 2007-12-28 | 2009-09-02 | 上海微电子装备有限公司 | 6-freedom micro-motion platform capable of isolating exterior vibration |
| CN100565712C (en) * | 2007-10-18 | 2009-12-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of non extensible guide precision displacement platform |
| CN102162500A (en) * | 2011-03-11 | 2011-08-24 | 华中科技大学 | Precision active vibration absorption device |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102320193A (en) * | 2011-08-17 | 2012-01-18 | 华南理工大学 | Motion deviation compensation device and method for eliminating gap of parallel platform mechanisms |
| CN102497129A (en) * | 2011-12-06 | 2012-06-13 | 浙江大学 | Multi-degree-of-freedom micromanipulator driven by multi-polarization mode piezoelectric actuator |
| CN102508359A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Two-dimensional plane adjusting device of movable mirror |
| CN102581828A (en) * | 2012-02-10 | 2012-07-18 | 合肥工业大学 | Two-dimensional micro-displacement worktable without coupled motion |
| CN103192279A (en) * | 2013-03-11 | 2013-07-10 | 东莞华中科技大学制造工程研究院 | Two-dimension decoupling motion platform |
| CN103323163A (en) * | 2013-06-14 | 2013-09-25 | 中国科学院自动化研究所 | Active compensating vibration restraining system based on force feedback |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN103929093A (en) * | 2014-04-24 | 2014-07-16 | 长春工业大学 | Disc type piezoelectric meshing motor for radial vibration of piezoelectric actuator and excitation method of disc type piezoelectric meshing motor |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN104985609A (en) * | 2015-06-11 | 2015-10-21 | 佛山市南海区广工大数控装备协同创新研究院 | Intelligent vibration compensation mechanical arm, robot and vibration measurement method of intelligent vibration compensation mechanical arm |
| CN105020314A (en) * | 2014-04-25 | 2015-11-04 | 上海微电子装备有限公司 | Double-degree-of-freedom active vibration reducing device and control method |
| CN105666503A (en) * | 2016-04-15 | 2016-06-15 | 京东方科技集团股份有限公司 | Carrying tray for conveying robot and conveying robot |
| CN105666162A (en) * | 2016-03-15 | 2016-06-15 | 南京航空航天大学 | Macro and micro dual-driving precise wedged feeding worktable and motion generation method |
| KR101864718B1 (en) * | 2016-10-28 | 2018-07-13 | 한국생산기술연구원 | A vibration decreasing apparatus with flexure mechanism device for reducing load of machine and a method for decreasing vibration |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101197197B (en) * | 2007-12-26 | 2010-06-16 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN101424879B (en) * | 2008-12-12 | 2010-10-13 | 厦门大学 | Resistance straining feedback type closed-loop two-dimension flexible hinge work bench |
-
2003
- 2003-04-14 CN CN 03116451 patent/CN1202937C/en not_active Expired - Fee Related
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100376361C (en) * | 2005-01-11 | 2008-03-26 | 同济大学 | Small two-dimensional de-coupling platforms |
| CN100565712C (en) * | 2007-10-18 | 2009-12-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of non extensible guide precision displacement platform |
| CN100535765C (en) * | 2007-12-28 | 2009-09-02 | 上海微电子装备有限公司 | 6-freedom micro-motion platform capable of isolating exterior vibration |
| CN102182899A (en) * | 2011-03-07 | 2011-09-14 | 中国矿业大学 | Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof |
| CN102162500A (en) * | 2011-03-11 | 2011-08-24 | 华中科技大学 | Precision active vibration absorption device |
| CN102162500B (en) * | 2011-03-11 | 2012-05-23 | 华中科技大学 | Precision active vibration absorption device |
| CN102320193A (en) * | 2011-08-17 | 2012-01-18 | 华南理工大学 | Motion deviation compensation device and method for eliminating gap of parallel platform mechanisms |
| CN102508359A (en) * | 2011-11-03 | 2012-06-20 | 中国科学院光电技术研究所 | Two-dimensional plane adjusting device of movable mirror |
| CN102497129B (en) * | 2011-12-06 | 2014-06-04 | 浙江大学 | Multi-degree-of-freedom micromanipulator driven by multi-polarization mode piezoelectric actuator |
| CN102497129A (en) * | 2011-12-06 | 2012-06-13 | 浙江大学 | Multi-degree-of-freedom micromanipulator driven by multi-polarization mode piezoelectric actuator |
| CN102581828B (en) * | 2012-02-10 | 2014-06-25 | 合肥工业大学 | Two-dimensional micro-displacement worktable without coupled motion |
| CN102581828A (en) * | 2012-02-10 | 2012-07-18 | 合肥工业大学 | Two-dimensional micro-displacement worktable without coupled motion |
| CN103192279A (en) * | 2013-03-11 | 2013-07-10 | 东莞华中科技大学制造工程研究院 | Two-dimension decoupling motion platform |
| CN103323163A (en) * | 2013-06-14 | 2013-09-25 | 中国科学院自动化研究所 | Active compensating vibration restraining system based on force feedback |
| CN103323163B (en) * | 2013-06-14 | 2015-11-04 | 中国科学院自动化研究所 | A kind of Active Compensation based on force feedback presses down vibrating system |
| CN103912766A (en) * | 2014-03-28 | 2014-07-09 | 南京航空航天大学 | Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move |
| CN103912766B (en) * | 2014-03-28 | 2015-10-28 | 南京航空航天大学 | Planar three freedom piezoelectric drive platform and motion driving method thereof |
| CN103929093A (en) * | 2014-04-24 | 2014-07-16 | 长春工业大学 | Disc type piezoelectric meshing motor for radial vibration of piezoelectric actuator and excitation method of disc type piezoelectric meshing motor |
| CN105020314A (en) * | 2014-04-25 | 2015-11-04 | 上海微电子装备有限公司 | Double-degree-of-freedom active vibration reducing device and control method |
| CN103990998B (en) * | 2014-05-20 | 2017-01-25 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN103990998A (en) * | 2014-05-20 | 2014-08-20 | 广东工业大学 | Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle |
| CN104985609A (en) * | 2015-06-11 | 2015-10-21 | 佛山市南海区广工大数控装备协同创新研究院 | Intelligent vibration compensation mechanical arm, robot and vibration measurement method of intelligent vibration compensation mechanical arm |
| CN105666162A (en) * | 2016-03-15 | 2016-06-15 | 南京航空航天大学 | Macro and micro dual-driving precise wedged feeding worktable and motion generation method |
| CN105666162B (en) * | 2016-03-15 | 2017-12-15 | 南京航空航天大学 | The accurate wedge-shaped Feed table of macro-micro dual-drive and motion production method |
| CN105666503A (en) * | 2016-04-15 | 2016-06-15 | 京东方科技集团股份有限公司 | Carrying tray for conveying robot and conveying robot |
| KR101864718B1 (en) * | 2016-10-28 | 2018-07-13 | 한국생산기술연구원 | A vibration decreasing apparatus with flexure mechanism device for reducing load of machine and a method for decreasing vibration |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1202937C (en) | 2005-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1202937C (en) | Super accurate fine motion work platform with function of restraining vibration. | |
| CN2621876Y (en) | Twe-D superprecision positioning, damping vernier working platform based on piezoelectric driver | |
| Polit et al. | Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing | |
| US7707907B2 (en) | Planar parallel mechanism and method | |
| Tian et al. | A flexure-based five-bar mechanism for micro/nano manipulation | |
| CN106195556B (en) | A kind of XY θ plane three-freedom precision positioning platforms | |
| KR100396020B1 (en) | Ultra-precision positioning system | |
| Wu et al. | A six-DOF prismatic-spherical-spherical parallel compliant nanopositioner | |
| Zhang et al. | Design and assessment of a 6-DOF micro/nanopositioning system | |
| CN1166554C (en) | Miniature manipulate with piezoelectric-type flexible drive and adjustable range | |
| CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
| Polit et al. | Design of high-bandwidth high-precision flexure-based nanopositioning modules | |
| CN101038208A (en) | Six-axial micro-exciter system | |
| CN109079552A (en) | A kind of three axis cutter servo devices based on compliant parallel mechanism | |
| Sollapur et al. | Design and experimental testing of XY flexure mechanism | |
| Alici et al. | Kinematics and stiffness analyses of a flexure-jointed planar micromanipulation system for a decoupled compliant motion | |
| Li et al. | Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss | |
| KR100675331B1 (en) | Nano dimensional driving manipulator with four degree of freedoms | |
| CN101000807A (en) | Precision positioning desk based on planar motor and super-magnetostrictive drive | |
| CN201000769Y (en) | Precision positioning flat base based on plane electric motor and ultra-magnetostriction driver | |
| US10663040B2 (en) | Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance | |
| Liao et al. | A New Flexure-based Parallel Laser Deflection Device for MicroLED Repair | |
| JP2001237299A (en) | Positioning device | |
| Wang et al. | On the design of a 3-PRRR spatial parallel compliant mechanism | |
| CN116343901B (en) | Three-degree-of-freedom micro-motion platform and working method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |