CN1442677A - Micro integration method-amber cavity array optical spectrum detector - Google Patents

Micro integration method-amber cavity array optical spectrum detector Download PDF

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Publication number
CN1442677A
CN1442677A CN 03117658 CN03117658A CN1442677A CN 1442677 A CN1442677 A CN 1442677A CN 03117658 CN03117658 CN 03117658 CN 03117658 A CN03117658 A CN 03117658A CN 1442677 A CN1442677 A CN 1442677A
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Prior art keywords
array
fabry
perot cavity
cavity array
miniature
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CN 03117658
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CN1314949C (en
Inventor
陈刚
温志渝
温中泉
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Chongqing University
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Chongqing University
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Abstract

An integrated spectral detector with miniature Fabry-Perot cavity array has lighting system, photoelectric detector array and miniature Fabry-Perot cavity array between them. Said Fabry-Perot cavity array is composed of the cavities and the reflecting membranes coated on both sides. Each cavity length is correspondent to a particular wavelength. The parallel light beams pass through said cavity array to generate relative electric spectrum signals on the photoelectric detector array. After computer processing, a spectrogram is obtained. Its advantages are high light flux, sensitivity and resolution, small size and low cost.

Description

Micro integrated Fabry-Perot cavity array spectral detector
Technical field
The invention belongs to the spectrometric instrument technical field, particularly relate to a kind of micro integrated Fabry-Perot cavity array spectral detector.
Background technology
In the prior art, though disclosed micro spectral analytic system has structurally been carried out some bigger improvement in recent years, but all fail really to realize Sensorised, and the micro spectrometer of existing practicability still adopts grating beam splitting, this has limited the utilization of luminous energy greatly, and detector is had higher requirement.U.S. Northestern Univertsity also is engaged in the research of miniature interference type spectral instrument, but it adopts index glass scanning, and this makes control become complicated, and can be subjected to extraneous vibration effect.
Summary of the invention
The objective of the invention is deficiency, provide a kind of and have that high light flux, high sensitivity, high-resolution, volume are very little, integrability, micro integrated Fabry-Perot cavity array spectral detector that cost is low at the existence of prior art.
Purpose of the present invention comes to be realized by the following technical programs:
Micro integrated Fabry-Perot cavity array spectral detector comprises illuminator and photodetector array, is provided with miniature Fabry-Perot cavity array between illuminator and photodetector array.The reflectance coating that miniature Fabry-Perot cavity array is plated by cavity and both sides constitutes, and each Fabry-Perot cavity body is that the required chamber of the light wave of each self-corresponding a certain specific wavelength is long, and photodetector array and miniature Fabry-Perot cavity array are integrated.
Described illuminator is made up of incident optical and lenticule, and lenticule forms parallel beam just in time by after the miniature Fabry-Perot cavity array filtering thereafter, reaches at last on the photoelectronic detecting array behind the miniature Fabry-Perot cavity array, thereby finishes detection to spectral signal.
Micro integrated Fabry-Perot cavity array spectral detector provided by the invention can carry out real-time spectral signal collection, characteristics such as it has that high light flux, high sensitivity, high-resolution, volume are very little, no-movable part, integrability, cost are low are the desirable devices that carries out low light level spectrum signal input.Can be widely used in various fields such as biological chemistry, clinical medicine, legal medical expert's criminal investigation, environmental science, modern field operations and national defence.
Description of drawings
Fig. 1 is a basic structure synoptic diagram of the present invention;
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is further described:
Among the figure: 1, incident optical 2, lenticule 3, anti-reflection film 4, reflectance coating 5, cavity 6, reflectance coating 7, photodetector array
As shown in Figure 1, micro integrated Fabry-Perot cavity array spectral detector provided by the invention forms miniature Fabry-Perot cavity array by anti-reflection film 3, reflectance coating 4, cavity 5 and reflectance coating 6, the length of each Fabry-Perot cavity has determined the center of its permeable wavelength, the reflectance coating reflectivity has determined the width of light passband, each Fabry-Perot cavity can only see through the light wave of a certain particular range wavelength, thereby forms the different narrow band optical filter of a series of centre wavelengths.Optical fiber 1 is the luminous energy input element of whole detector, it is the lenticule 2 of collimating effect together thereafter, it behind the lenticule a miniature Fabry-Perot cavity array that constitutes by anti-reflection film 3, reflectance coating 4, cavity 5 and reflectance coating 6, be a photodetector array 7 behind Fabry-Perot cavity array, integrated with miniature Fabry-Perot cavity array.
Light process lenticule 2 by incident optical 1 incident, form parallel beam, above-mentioned parallel beam forms corresponding spectrum electric signal through amber-chamber array on photodetector array 7, on the photoelectronic detecting array spectrum electric signal correspondence of diverse location the intensity of different optical wavelength, this spectrum electric signal can be transformed into corresponding spectrum spectrogram through computing machine.
Making of the present invention is to utilize the semiconductor fine process technology that miniature Fabry-Perot cavity array and photodetector array etc. are integrated on same chip, and the volume of resulting total system has only centimeter square.

Claims (3)

1, a kind of micro integrated Fabry-Perot cavity array spectral detector, comprise illuminator and photodetector array, it is characterized in that between illuminator and photodetector array, being provided with miniature Fabry-Perot cavity array, reflectance coating (4) and (6) that miniature Fabry-Perot cavity array is plated by cavity (5) and both sides constitute, it is long that each Fabry-Perot cavity body has the required chamber of the light wave of each self-corresponding a certain specific wavelength, and photodetector array and miniature Fabry-Perot cavity array are integrated.
2, micro integrated Fabry-Perot cavity array spectral detector according to claim 1, it is characterized in that illuminator is made up of incident optical (1) and lenticule (2), lenticule (2) forms parallel beam just in time by after the miniature Fabry-Perot cavity array filtering thereafter, reach at last on the photoelectronic detecting array behind the miniature Fabry-Perot cavity array, thereby finish detection spectral signal.
3, micro integrated Fabry-Perot cavity array spectral detector according to claim 1 and 2, it is characterized in that on the miniature Fabry-Perot cavity array be coated with anti-reflection film (3) on the reflectance coating that plates (4).
CNB031176585A 2003-04-09 2003-04-09 Micro integration method-amber cavity array optical spectrum detector Expired - Fee Related CN1314949C (en)

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CNB031176585A CN1314949C (en) 2003-04-09 2003-04-09 Micro integration method-amber cavity array optical spectrum detector

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Application Number Priority Date Filing Date Title
CNB031176585A CN1314949C (en) 2003-04-09 2003-04-09 Micro integration method-amber cavity array optical spectrum detector

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CN1442677A true CN1442677A (en) 2003-09-17
CN1314949C CN1314949C (en) 2007-05-09

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100405029C (en) * 2003-12-09 2008-07-23 重庆大学 Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector
CN102680104A (en) * 2012-05-25 2012-09-19 吉林大学 Chromascope based on fiber Fabry-Perot miniature cavity
CN102741671A (en) * 2009-11-30 2012-10-17 Imec公司 Integrated circuit for spectral imaging system
CN103308168A (en) * 2013-06-28 2013-09-18 中国科学院光电技术研究所 Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering
CN105571717A (en) * 2014-10-30 2016-05-11 英飞凌科技股份有限公司 Spectrometer, method for manufacturing a spectrometer,, and method for operating a spectrometer
CN106352982A (en) * 2016-08-29 2017-01-25 上海交通大学 High-resolution miniature spectrometer
CN106596421A (en) * 2016-11-21 2017-04-26 清华大学 Fabry-Perot interferometric wide spectrum frequency-selecting collection device of spatial light modulator
CN106768324A (en) * 2016-11-17 2017-05-31 天津津航技术物理研究所 A kind of light spectrum image-forming microsensor
CN109477758A (en) * 2016-06-30 2019-03-15 国家航空与空间研究事务局 Fourier transformation multichannel optical spectrum imaging device
US11450698B2 (en) 2015-12-29 2022-09-20 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
TWI794145B (en) * 2015-10-28 2023-03-01 美商加州太平洋生物科學公司 Arrays of optical devices comprising integrated bandpass filters

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017326A (en) * 1983-07-08 1985-01-29 Fujitsu Ltd Optical fiber fabry-perot interferometer
US4822998A (en) * 1986-05-15 1989-04-18 Minolta Camera Kabushiki Kaisha Spectral sensor with interference filter
JPH05149788A (en) * 1991-11-27 1993-06-15 Yokogawa Electric Corp Micro fabry-perot resonator
DE4431412C1 (en) * 1994-08-24 1996-03-14 William Newton Device for performing spectroscopic measurements
US6323987B1 (en) * 1999-05-14 2001-11-27 Agere Systems Optoelectronics Guardian Corp. Controlled multi-wavelength etalon

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100405029C (en) * 2003-12-09 2008-07-23 重庆大学 Minitype integrated variable refractive index Fa-Pa cavity spectrographic detector
CN102741671B (en) * 2009-11-30 2016-07-06 Imec公司 Integrated circuit for spectrum imaging system
CN102741671A (en) * 2009-11-30 2012-10-17 Imec公司 Integrated circuit for spectral imaging system
CN102680104A (en) * 2012-05-25 2012-09-19 吉林大学 Chromascope based on fiber Fabry-Perot miniature cavity
CN103308168A (en) * 2013-06-28 2013-09-18 中国科学院光电技术研究所 Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering
CN103308168B (en) * 2013-06-28 2015-07-08 中国科学院光电技术研究所 Spectral resolution enhancement method based on Fabry-Perot cavity scanning filtering
US10247604B2 (en) 2014-10-30 2019-04-02 Infineon Technologies Ag Spectrometer, method for manufacturing a spectrometer, and method for operating a spectrometer
CN105571717A (en) * 2014-10-30 2016-05-11 英飞凌科技股份有限公司 Spectrometer, method for manufacturing a spectrometer,, and method for operating a spectrometer
CN105571717B (en) * 2014-10-30 2019-06-14 英飞凌科技股份有限公司 The operating method of spectrometer, the manufacturing method of spectrometer and spectrometer
TWI794145B (en) * 2015-10-28 2023-03-01 美商加州太平洋生物科學公司 Arrays of optical devices comprising integrated bandpass filters
US11450698B2 (en) 2015-12-29 2022-09-20 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
CN109477758A (en) * 2016-06-30 2019-03-15 国家航空与空间研究事务局 Fourier transformation multichannel optical spectrum imaging device
CN106352982A (en) * 2016-08-29 2017-01-25 上海交通大学 High-resolution miniature spectrometer
CN106352982B (en) * 2016-08-29 2018-12-18 上海交通大学 Miniature high resolution spectrometer
CN106768324A (en) * 2016-11-17 2017-05-31 天津津航技术物理研究所 A kind of light spectrum image-forming microsensor
CN106596421A (en) * 2016-11-21 2017-04-26 清华大学 Fabry-Perot interferometric wide spectrum frequency-selecting collection device of spatial light modulator

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