CN1428188A - Dielectric layer discharging device for treating perfluoride and its module - Google Patents
Dielectric layer discharging device for treating perfluoride and its module Download PDFInfo
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- CN1428188A CN1428188A CN 01144829 CN01144829A CN1428188A CN 1428188 A CN1428188 A CN 1428188A CN 01144829 CN01144829 CN 01144829 CN 01144829 A CN01144829 A CN 01144829A CN 1428188 A CN1428188 A CN 1428188A
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- dielectric layer
- electric discharge
- perfluorochemical
- discharge device
- layer electric
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
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Abstract
The present invention relates to a dielectric layer discharge equipment for treating perfluorine compound and its module. Its dielectric layer discharge equipment includes an external cover, a first tubulr dielectric layer placed in the external cover, a second tubular dielectric layer placed in the first dielectric layer and at least an electrode placed in the external cover. First cooling gas channel is formed between the external cover and first tubular dielectric layer, and a pefluorine compound channel is formed between first and second tubular dielectric layers, and the interior of the second tubula dielectric layer is a second cooling gas channel. When the voltage applied to electrode is higher than collapse voltage, the high-energy electrons in the perfluorine compound channel can make pefluorine compound free or dissociate, and can completely remove the perfluorine compound.
Description
Technical field
The present invention relates to a kind of electric discharge device, especially a kind of dielectric layer electric discharge device and a kind of module of being formed by a plurality of dielectric layer electric discharge devices that is used to handle perfluorochemical.
Background technology
From the United Nations in 1992 by " climate change outline pact " afterwards, reducing the discharge capacity of greenhouse gases builds consensus internationally.According to the protocol that the capital of a country meeting is passed through, various countries should reach the reduction target of agreement in the past in 2010 according to the difference of industrialization degree, and the greenhouse gases that should cut down comprises CO2, CH4, NO, HFC, reaches PFCs (perfluorochemical) etc.Perfluorochemical is the processing procedure raw material of semiconductor and opto-electronics, comprises CF4, C2F6, NF3, SF6, CHF3 etc.The U.S., Japan and European semiconductor association all formally promise will the perfluorochemical discharge capacity be cut down to 90% of nineteen ninety-five at preceding in 2010, Taiwan SIA (TSIA) also must cut down the perfluorochemical discharge capacity to 90% of 1998 annual emissions at preceding in 2010.Therefore, carrying out the reduction of perfluorochemical discharge capacity is absolute necessary measure.
The United States Patent (USP) 5 of M.Kang, describe a kind of plasma reaction chamber in 387,775, adopt a tabular ceramic layer as dielectric layer, and with conducting liquid as earth electrode, utilize this conducting liquid to remove hydrofluoric acid and the hydrochloric acid that is produced behind the plasma reaction simultaneously.
Describe a kind of ozone and reactant gas in the United States Patent (USP) 5,637,279 of M.M.Besen and D.K.Smith and produce chamber and system thereof, adopt the plasma reaction chamber of welding forming, and cooling passage is arranged, utilize the cooling fluid cooling electrode.But this plasma reaction chamber modularity.
People's such as X.Zhang United States Patent (USP) 5,932,180 is a United States Patent (USP) 5,637,279 continuity, and its characteristics are the metal surface of plate electrode through reprocessing, and contain tungsten.
Describe a kind of high efficiency ozone generation device in the United States Patent (USP) 6,007,785 of H.T.Liou, the influent stream gas pressure operates in below the 1atm.
Describe a kind of processing procedure and device that greenhouse gases is transformed in people's such as A.Bill the United States Patent (USP) 6,045,761, adopt the cupric dielectric layer, and coat electrode surface.
Describe a kind of discharge reactor and uses thereof in the United States Patent (USP) 6,045,761 of B.Eliasson and U.Kogelschatz, adopt the cellular dielectric layer, pore surface coating metal oxide is promoted the chemical reaction in the hole ionic medium attitude.
Describe a kind of dielectric layer discharge system in people's such as R.R.Ruan the United States Patent (USP) 6,146,599 and decompose the method for poisoning compound in the fluid, adopt modular dielectric layer discharge system.
People's such as J.Shilon United States Patent (USP) 6, describe a kind of modularity dielectric layer electric discharge device that is used for pollutant removal in 245,299, each dielectric layer discharge cavity has independently power system, the gas that desire the is handled dielectric layer discharge cavity of flowing through earlier, time dielectric layer discharge cavity of flowing through again.The service voltage of each dielectric layer discharge cavity be 300 volts between 100 kilovolts, the ac frequency of supply is between 10 KHz to 3 MHzs.Each dielectric layer discharge cavity adopts inside and outside dielectric layer, and forms the spacing that gas can pass through, and further forms plasma state in spacing.The material of dielectric layer is aluminium oxide or quartz.
Summary of the invention
The object of the present invention is to provide a kind of dielectric layer electric discharge device and module of novelty, it utilizes dielectric layer plasma discharging principle to handle perfluorochemical.
Another object of the present invention is to provide a kind of and can resist hydrofluoric acid or fluorine gas corrosion, and the dielectric layer electric discharge device that is easy to assemble.
Another purpose of the present invention is to provide a kind of module of being made up of a plurality of dielectric layer electric discharge devices, and it can enlarge the processing capacity arbitrarily according to the perfluorochemical flow.
Dielectric layer electric discharge device of the present invention comprises that an outer cover, one first tubular dielectric layer are arranged in the outer cover, one second tubular dielectric layer is arranged in the first tubular dielectric layer and at least one electrode is arranged in the outer cover.Between the outer cover and the first tubular dielectric layer, form one first cooled gas path, between first and second tubular dielectric layer, form a perfluorochemical passage, and be one second cooled gas path in the second tubular dielectric layer.When the voltage that puts on electrode was higher than a breakdown voltage, the high energy electron in the perfluorochemical passage can make perfluorochemical free or dissociate, and then be removed.First and second tubular dielectric layer is an earthenware, can resist perfluorochemical and transform the back hydrofluoric acid that is produced or the corrosion of fluorine gas, and first and second cooled gas path is used to introduce refrigerating gas to cool off this electrode.
Dielectric layer electric discharge device module of the present invention then is made up of a plurality of above-mentioned dielectric layer electric discharge devices, and it can enlarge the processing capacity arbitrarily according to the perfluorochemical flow.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly also cooperates appended graphic elaborating.
Description of drawings
Fig. 1 is the schematic diagram according to dielectric layer electric discharge device of the present invention;
Fig. 2 is the schematic perspective view according to dielectric layer electric discharge device module of the present invention;
Fig. 3 is the schematic diagram of gas distribution assembly of the present invention;
Fig. 4 is the schematic diagram of gas collection assembly of the present invention;
Fig. 5 is for two dielectric layer electric discharge devices being the glide path of example when refrigerating gas of the present invention series connection is described;
Fig. 6 is for two dielectric layer electric discharge devices being the glide path of example when illustrating that refrigerating gas of the present invention is in parallel;
Fig. 7 demonstration is handled perfluorochemical NF3 with dielectric layer electric discharge device module of the present invention, and utilizes the resulting result of FTIR measurement technology.：1、1′- 2- 3- 4- 6-7- 8- 9- 10- 11- 12-12a- 13- 14- 14a- 15- 16-16a- 18- 20- 22- 24- 26-O26a-O 28-O 28a-O 30-O 30a-O 32-O34-O 36- 38- 38a- 40- 40a- 42-42a- 44- 100- 101- 200-300-
The specific embodiment
Now cooperate graphic explanation preferred embodiment of the present invention.
Fig. 1 is the schematic diagram according to dielectric layer electric discharge device of the present invention.As shown in Figure 1, each parts that dielectric layer electric discharge device of the present invention is adopted all can utilize traditional process technology to make, and is easy to assembling and replacing, and then the reduction manufacturing time.Dielectric layer electric discharge device 1 of the present invention roughly is in the concentric circles mode two layers of tubular dielectric layer 4,6 to be set in tubular outer cover 10, so outer cover 10 and outside form a cooled gas path between the dielectric layer 6, between inside and outside dielectric layer 4,6, form a perfluorocompound gases passage, and also be cooled gas path in inner-dielectric-ayer 4.The outside of dielectric layer 6 is arranged with the external electrode 8 of strip outside, and be provided with the interior electrode 2 of tubulose at the inner surface of inner-dielectric-ayer 4, can make perfluorocompound gases collapse (Breakdown) between inside and outside dielectric layer 4,6 free and become plasma during energising, use and remove perfluorochemical.In this preferred embodiment, inside and outside dielectric layer 4,6 is two concentric ceramic pipes (for example purity is greater than 95% aluminium oxide), can resist perfluorochemical and transform the hydrofluoric acid that the back produced or the corrosion of fluorine gas.Dielectric layer electric discharge device of the present invention further describes as follows:
(1) perfluorocompound gases passage: contain the processing procedure tail gas of perfluorochemical, import dielectric layer electric discharge device 1, after the ion plasma that is produced in inside and outside dielectric layer 4,6 spacings, derive via opening 42a again by opening 42.
(2) cooled gas path: refrigerating gas imports the dielectric layer electric discharge device via opening 38, after cooling external electrode 8, is derived by opening 38a.Opening 38a is connected in opening 40 with an exterior line (not shown), and the refrigerating gas that opening 38a can be derived imports opening 40, and with electrode 2 in cooling off, last refrigerating gas is derived by opening 40a.
The number of assembling steps of dielectric layer electric discharge device of the present invention is as follows:
(1) the outer dielectric layer 6 that will coat external electrode 8 in advance is connected with lower cover 20.
(2) insert O type ring 26, and utilize fixed muffle 12 to make O type ring 26 produce distortion, reach airtight effect.
(3) O type ring 34 is inserted an O type annular groove of lower cover 20, conductive component 18 is installed, the inside end of conductive component 18 has a structure (not shown), can produce distortion because of tightening make O type ring 34, reaches airtight effect.
(4) inside end of conductive component 18 has a structure (not shown) in addition, is suitable for connecting lead 36, and then conductive component 18 and external electrode 8 are interconnected.The outer end of conductive component 18 has a structure (not shown), is easy to be connected with outer lead.
(5) O type ring 30 is inserted an O type annular groove of lower cover 20, connect outer cover 10 and lower cover 20, and make O type ring 30 produce distortion, reach airtight effect.
(6) centring element 22 that will contain O type ring 30a is connected with outer cover 10.
(7) O type ring 26a is inserted an O type annular groove on the centring element 22, and utilize fixed muffle 12a to make O type ring 26a produce distortion, reach airtight effect.
(8) O type ring 32 is inserted an O type annular groove on the centring element 22, utilize screw to connect loam cake 24 and outer cover 10, this screw can make O type ring 30a produce with O type ring 32 to be out of shape, to reach airtight effect simultaneously.
(9) insert inner-dielectric-ayer 4.
(10) insert O type ring 28 and 28a, and utilize fixed muffle 14 and 14a respectively, make O type ring 28 and 28a produce distortion, reach airtight effect.
(11) erection joint 16 is slided to prevent inner-dielectric-ayer 4 with 16a.Electrode 2 had airtight effect simultaneously to the appropriate location in joint 16a can fix.
(12) outer end of electrode 2 can be installed a structure (not shown) in the tubulose, is suitable for being connected with outer lead.
Dielectric layer electric discharge device of the present invention be except can reaching airtight purpose, and can utilize the precision of machining, makes between the inside and outside dielectric layer apart from having uniform thickness, to promote the effect of even discharge.In addition, dielectric layer electric discharge device of the present invention has isolated each other two gas passages (being perfluorocompound gases passage, cooled gas path), the design of each gas passage one-in-and-one-out, can make a plurality of dielectric layer electric discharge devices when common use (that is module state), be easier to connect gas passage each other.Further describe as follows:
Fig. 2 is the schematic perspective view according to dielectric layer electric discharge device module of the present invention, wherein dispenses most connecting line, and is too bad and can't read to avoid drawing.As shown in Figure 2, dielectric layer electric discharge device module comprise framework, an insulation protection cover 3, one first dividing plate 7, a second partition 9, one the 3rd dividing plate 11, formed by base 13 and pillar 15 be installed on high-tension electricity power distribution assembly 100, on this first dividing plate 7 be installed on gas distribution assembly 200, on this second partition 9 be installed on the 3rd dividing plate 11 gas collection assembly 300 and a plurality of pass second partition 9 and by the dielectric layer electric discharge device 1,1 of the 3rd dividing plate 11 supports ' ....
High-tension electricity power distribution assembly 100 be parallel to by lead 101 aforesaid dielectric layer electric discharge device 1,1 ' ... (be connected in electrode 2), in addition, utilize outer lead will corresponding to dielectric layer electric discharge device 1,1 ' ... each conductive component 18, be connected in individually on the 3rd dividing plate 11 as earth terminal, provide by this to produce the required energy of plasma.
See also Fig. 3, gas distribution assembly 200 be parallel to aforesaid dielectric layer electric discharge device 1,1 ' ... (being the opening 42 that is connected in the dielectric layer electric discharge device), with the perfluorocompound gases uniform distribution give each dielectric layer electric discharge device 1,1 ' ....
See also Fig. 4, gas collection assembly 300 be parallel to aforesaid dielectric layer electric discharge device 1,1 ' ... (being the opening 42a that is connected in the dielectric layer electric discharge device), the product after will perfluorocompound gases transforming is collected the back and is discharged.
On the other hand, the glide path of refrigerating gas, can utilize each dielectric layer electric discharge device 1,1 of series/parallel ' ... mode implement.See also Fig. 5, Fig. 5 system is with two dielectric layer electric discharge devices 1,1 ' be the embodiment of example explanation series connection, the glide path system of refrigerating gas is according to arrow A, B, C, D, E, F, G, H, I, the order of J is advanced, so first dielectric layer electric discharge device 1 for connecting, be to cool off external electrode (being arranged on the outside of outer dielectric layer 6) earlier, electrode (being arranged on the inside of inner-dielectric-ayer 4) in cooling off again, for second dielectric layer electric discharge device 1 of series connection ', then be electrode in the cooling earlier (be arranged on inner-dielectric-ayer 4 ' inside), at cooling external electrode (dielectric layer 6 outside being arranged on ' outside).The 3rd dielectric layer electric discharge device of series connection is identical with first, and the 4th identical with second, and the rest may be inferred by analogy.In addition, see also Fig. 6, Fig. 6 system is with two dielectric layer electric discharge devices 1,1 ' be the embodiment of example explanation parallel connection, refrigerating gas simultaneously by arrow A ', J ' enter dielectric layer electric discharge device 1,1 ', and individually according to arrow A ', the order of B ', C ', D ', E ' and J ', I ', H ', G ', F ' advances, cool off external electrode, electrode in the cooling more simultaneously earlier.When selecting the series/parallel refrigerating gas, must depend on the number of dielectric layer electric discharge device, and actual cooling effect.
Number of assembling steps and other features of dielectric layer electric discharge device module of the present invention are described below:
(1) base 13 and pillar 15 are connected with welding manner, strengthen the intensity of framework.On the base and reserve assembly hole, be convenient to module and be connected with other system.The size of framework is by the maximum number decision that contains the dielectric layer electric discharge device in the module.
(2) utilize bolt that the 3rd dividing plate 11 is fixed on the pillar 15.Have first installing hole that is predetermined number on the 3rd dividing plate 11, be suitable for linking with the protuberance 44 of Fig. 1.Each installing port is other all an aperture, is suitable for the other end of the outer lead of fixedly connected conductive component 18, that is the 3rd dividing plate 11 is except having support function, and has grounding function, can make the earthing potential of entire module identical.The centre of the 3rd dividing plate 11 has an opening, is suitable for installing gas collection assembly 300.The air inlet number of gas collection assembly 300 is identical with the first installing port number, if do not connect the dielectric layer electric discharge device, and can be distinctly with the air inlet locking.
(3) utilize bolt that second partition 9 is fixed on the pillar 15.Have second installing port that is predetermined number on the second partition 9, the size of second installing port is identical with the external dimensions of dielectric layer electric discharge device.Second partition 9 has the support of reinforcement and stable function.The centre of second partition 9 has an opening, is suitable for installing gas distribution assembly 200.The gas outlet number of gas distribution assembly 200 is identical with the second installing port number, if do not connect the dielectric layer electric discharge device, and can be distinctly with the gas outlet locking.
(4) first dividing plates 7 have and the same number of recess of dielectric layer electric discharge device and opening, are suitable for installing and fixing first dividing plate 7 on dielectric layer electric discharge device module.First dividing plate 7 is made by insulating materials.This high-tension electricity power distribution assembly 100 is installed in the centre of first dividing plate 7.High-tension electricity power distribution assembly 100 is adopted one and is advanced to have more configuration, and outer lead can be connected with the electric power entry site of high-tension electricity power distribution assembly 100 by the wire guide on the insulation cover 3.High-tension electricity power distribution assembly 100 contains a ceramic substrate (not shown), can block cause thermal damage first dividing plate 7 that high-tension electricity power distribution assembly 100 is produced, and have the function of heavy insulation.
(5) insulation cover 3 has the function of insulation protection.
See also Fig. 7, Fig. 7 shows and to handle perfluorochemical NF3 with dielectric layer electric discharge device module of the present invention, and utilizes the resulting result of FTIR measurement technology, can prove that dielectric layer electric discharge device module of the present invention can effectively remove perfluorochemical.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; anyly have the knack of this skill person; without departing from the spirit and scope of the present invention; still can do a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (13)
1. dielectric layer electric discharge device that is used to handle perfluorochemical is characterized in that: comprising:
One outer cover;
One first tubular dielectric layer is arranged in this outer cover, makes to form one first cooled gas path between this outer cover and this first tubular dielectric layer;
One second tubular dielectric layer is arranged in this first tubular dielectric layer, making to form a perfluorochemical passage to introduce perfluorocompound gases between this first and second tubular dielectric layer, is that one second cooled gas path is connected with this first cooled gas path simultaneously in this second tubular dielectric layer;
At least one electrode is arranged in this outer cover, the time provides energy to make this perfluorocompound gases collapse free and become plasma in energising;
This first and second cooled gas path is used to introduce refrigerating gas to cool off this electrode.
2. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 1 is characterized in that: this first and second tubular dielectric layer is concentric pipe.
3. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 1 is characterized in that: the material of this first and second tubular dielectric layer is pottery.
4. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 3 is characterized in that: the material of this first and second tubular dielectric layer is an aluminium oxide.
5. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 4, it is characterized in that: the purity of this aluminium oxide is greater than 95%.
6. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 1 is characterized in that: it comprises that one first electrode is arranged on the outside of this first tubular dielectric layer and the inside that one second electrode is arranged on this second tubular dielectric layer.
7. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 6 is characterized in that: this first electrode is strip and the winding outside at this first tubular dielectric layer.
8. the dielectric layer electric discharge device that is used to handle perfluorochemical as claimed in claim 6 is characterized in that: this second electrode is the inside that tubulose is arranged on this second tubular dielectric layer.
9. dielectric layer electric discharge device module that is used to handle perfluorochemical is characterized in that: comprising:
A plurality of dielectric layer electric discharge devices, each dielectric layer electric discharge device has at least one perfluorochemical passage, at least one electrode is arranged on by this perfluorochemical passage and at least one cooled gas path is arranged on by this electrode, the perfluorochemical passage of above-mentioned each dielectric layer electric discharge device is connected with each other logical, and the cooled gas path of above-mentioned each dielectric layer electric discharge device is connected with each other logical;
One perfluorocompound gases introducing device is connected in a wherein perfluorochemical passage at least, and introduces perfluorocompound gases;
One refrigerating gas introducing device is connected in a wherein cooled gas path at least, and introduces refrigerating gas.
10. the dielectric layer electric discharge device module that is used to handle perfluorochemical as claimed in claim 9 is characterized in that: more comprise a high-tension electricity power distribution assembly, connect the electrode of each dielectric layer electric discharge device, to provide electric power to each electrode.
11. the dielectric layer electric discharge device module that is used to handle perfluorochemical as claimed in claim 9, it is characterized in that: this perfluorocompound gases introducing device is parallel to the perfluorochemical passage that connects each dielectric layer electric discharge device, is used for perfluorocompound gases is distributed these perfluorochemical passages of introducing simultaneously.
12. the dielectric layer electric discharge device module that is used to handle perfluorochemical as claimed in claim 9, it is characterized in that: it comprises that more a perfluorocompound gases ejector is parallel to the perfluorochemical passage that connects each dielectric layer electric discharge device, is used for perfluorocompound gases is drawn these perfluorochemical passages simultaneously.
13. the dielectric layer electric discharge device module that is used to handle perfluorochemical as claimed in claim 9 is characterized in that: above-mentioned cooled gas path is to be connected in the series/parallel mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01144829 CN1428188A (en) | 2001-12-27 | 2001-12-27 | Dielectric layer discharging device for treating perfluoride and its module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01144829 CN1428188A (en) | 2001-12-27 | 2001-12-27 | Dielectric layer discharging device for treating perfluoride and its module |
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| Publication Number | Publication Date |
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| CN1428188A true CN1428188A (en) | 2003-07-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 01144829 Pending CN1428188A (en) | 2001-12-27 | 2001-12-27 | Dielectric layer discharging device for treating perfluoride and its module |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102333412A (en) * | 2011-09-08 | 2012-01-25 | 陈固明 | High-energy multi-state low-temperature ionizer |
| CN102505447A (en) * | 2011-09-27 | 2012-06-20 | 东华大学 | Device and method for continuously processing fiber surface by atmospheric low temperature radio frequency plasma |
-
2001
- 2001-12-27 CN CN 01144829 patent/CN1428188A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102333412A (en) * | 2011-09-08 | 2012-01-25 | 陈固明 | High-energy multi-state low-temperature ionizer |
| CN102505447A (en) * | 2011-09-27 | 2012-06-20 | 东华大学 | Device and method for continuously processing fiber surface by atmospheric low temperature radio frequency plasma |
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