CN1424609A - Two dimension rotary rigid connected micro-adjustable precisive reflecting lens support - Google Patents

Two dimension rotary rigid connected micro-adjustable precisive reflecting lens support Download PDF

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Publication number
CN1424609A
CN1424609A CN 02155047 CN02155047A CN1424609A CN 1424609 A CN1424609 A CN 1424609A CN 02155047 CN02155047 CN 02155047 CN 02155047 A CN02155047 A CN 02155047A CN 1424609 A CN1424609 A CN 1424609A
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CN
China
Prior art keywords
mirror holder
load
adjusting gear
pad
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 02155047
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Chinese (zh)
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CN1186666C (en
Inventor
朱键强
刘志刚
王聪瑜
汤更秀
王国兴
庞向阳
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Shanghai Institute of Optics and Fine Mechanics of CAS
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CNB021550476A priority Critical patent/CN1186666C/en
Publication of CN1424609A publication Critical patent/CN1424609A/en
Application granted granted Critical
Publication of CN1186666C publication Critical patent/CN1186666C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

A precision micro-adjustable reflector frame in 2-D rigid rotating linkage is characterized in that it comprises a frame adjusting plate, a frame supporting plate, two adjusting devices with rotating shafts, a fixed adjsuting device and two auxiliary unloading devices, that said framke adjusting plate and frame supporting plate are connected and parallel with each other suing adjusting devices with rotating shaft positioned diagonally on the corners and a fixed adjusting device positioned at a corner on the other diagonal, that the centric line of the fixed adjusting device is perpendicular to the joining line between the centers of the adjusting device with rotating shaft and the fixed adjusting device, and the auxiliary unloaidng devices are positioned symmetrically between the frame adjusting plate and the frame supporting plate, connecting the frame adjusting plate and the frame supporting plate with each other by screws.

Description

The two dimension rotational stiffness connects fine setting true mirror frame
Technical field:
The present invention is that two-dimentional rotational stiffness connects fine setting true mirror frame.Be mainly used in the adjusting mechanism of precision optics and precision optical machinery.As heavy caliber, the heavy load servo reflector in the light path adjustment.
Background technology:
Rotate in the servo reflector frame in the large-scale two dimension of tradition, one-piece construction is the gyro structure, adjusting portion is divided into the precise ball screw pair, supporting part is the supporting of cross spring plank, by driving the spiral stretching spring of the low rigidity of ball wire bar pair pulling, the reactive torque that the moment of torsion that produces and the cross spring plank flexible support of high rigidity produce balances each other, thereby realizes high-precision rotation adjustment.The a pair of combination of ball wire bar pair and cross spring plank can only be used to realize the one dimension adjustment.Multidimensional rotates to adjust needs many combinations to ball wire bar pair and cross spring plank to realize.This class adjustment rack has been applied to during light path in No. 2, the refreshing light device adjusts.(referring to document: the report of laser 12# experimental provision (LF12) development work).The element of above-mentioned adjustment rack is many, complex structure, and manufacturing accuracy requires high, and assembling adjustment is difficult for, and the size of adjustment rack is huge, particularly high to the processing request of cross spring plank simultaneously.Be not suitable for those integrated level height, regulate the little occasion in space.
Summary of the invention:
The technical problem to be solved in the present invention is to overcome above-mentioned the deficiencies in the prior art, provides a kind of two-dimentional rotational stiffness to connect fine setting true mirror frame, should have simple in structure, process and assemble convenience, good stability, cheap, modular characteristics.
Technical solution of the present invention is as follows: a kind of two-dimentional rotational stiffness connects fine setting true mirror frame, it is characterized in that it comprises mirror holder adjustment plate, the mirror holder back up pad, the adjusting gear of two bands rotating shaft, fixedly adjusting gear and two auxiliary relief arrangements, described mirror holder is adjusted the plate fixedly adjusting gear that utilization is distributed in the adjusting gear of band rotating shaft at diagonal angle and one jiao at another diagonal angle with the mirror holder back up pad and is linked to each other and make it and be parallel to each other, fixedly the line of centres of the adjusting gear of the center line of adjusting gear and band rotating shaft and fixing adjusting gear is vertical mutually, and auxiliary relief arrangement is adjusted between plate and the mirror holder back up pad and is symmetrically distributed in both sides at mirror holder, mirror holder is adjusted plate and the mirror holder back up pad interconnects by screw.Mirror holder is adjusted the middle part of plate and mirror holder back up pad and has been dug a rectangular through-hole.The screw mandrel of the adjusting gear of band rotating shaft is equipped with self-aligning ball bearing with the end that mirror holder adjustment plate links to each other, this self-aligning ball bearing is by the axial location of screw and bearing baffle assurance screw mandrel, and the screw mandrel that is equipped with self-aligning ball bearing makes it be fixed on mirror holder by bearing plate and adjusts in bearing mounting hole of plate; The end that screw mandrel links to each other with the mirror holder back up pad is furnished with the feed screw nut of band rotation axis, and this feed screw nut's pivot center should be with the adjusting gear of corresponding band rotating shaft, fixedly the center line of adjusting gear is vertical.Fixedly adjusting gear does not have rotation axis with the different feed screw nuts of being of the adjusting gear of band rotating shaft, carries out with the mirror holder back up pad to cooperate installation.Auxiliary relief arrangement is by the first off-load web joint, the second off-load web joint, the first off-load ball rod, the second off-load ball rod, off-load connector and off-load regulating sleeve are formed, its annexation is: the bulb of the first off-load ball rod is installed in the bulb pit of the first off-load web joint, the other end links to each other with the off-load connector, the bulb of the second off-load ball rod is installed on the off-load connector, screw thread one end links to each other with the off-load regulating sleeve, the off-load regulating sleeve is threaded with the second off-load ball rod by the taper hole of the second off-load web joint, and the first off-load web joint is adjusted on the plate at mirror holder by screw retention, and the second off-load web joint is connected with the mirror holder back up pad by screw.The diameter of the mounting hole of the bearing shell of mirror holder back up pad should be than feed screw nut's diameter big 2~3mm.
Advantage of the present invention: this two-dimentional rotational stiffness connects the simple in structure of fine setting true mirror frame, element is few, and is lower to the requirement of making and assemble, and is suitable for array combination, be convenient to produce in batches, therefore can enhance productivity and reduce the cost of reflector mount greatly.Simultaneously because the general structure modularization of reflector mount, can satisfy those and require to regulate limited space and regulate occasion more than the light path.In addition, the load that reflector mount bore all waits these stiff members to bear by regulating adjusting gear 3,4 and auxiliary relief arrangement 5, has both improved the load capacity of reflector mount, has increased the stability of reflector mount again.Therefore adjust in the trim at large-scale optics and have great superiority and promotional value.
Description of drawings:
Fig. 1 looks synoptic diagram for the master that the present invention's two dimension rotational stiffness connects fine setting true mirror frame
Fig. 2 is the A-A cross-sectional schematic of Fig. 1
Fig. 3 is the B-B cross-sectional schematic of Fig. 1
Fig. 4 is the partial schematic sectional view of Fig. 1
Fig. 5 looks synoptic diagram for the right side that the present invention's two dimension rotational stiffness connects the adjusting gear 3 of fine setting true mirror frame band rotating shaft
Fig. 6 for the present invention two dimension rotational stiffness connect fine setting true mirror frame fixedly the master of adjusting gear 4 look synoptic diagram
Fig. 7 looks synoptic diagram for the master that the present invention's two dimension rotational stiffness connects the auxiliary relief arrangement 5 of fine setting true mirror frame
Embodiment:
See also Fig. 1, Fig. 2 and Fig. 3 earlier, this shows, the present invention two dimension rotational stiffness connects fine setting true mirror frame and mainly comprises five elements, and mirror holder is adjusted the adjusting gear 3 of plate 1, mirror holder back up pad 2, band rotating shaft, fixedly adjusting gear 4 and auxiliary relief arrangement 5.Mirror holder is adjusted plate 1 and adjusting gear 3, fixedly adjusting gear 4 connections of mirror holder back up pad 2 by being with rotating shaft, and it is parallel to each other.Wherein adjusting gear 3 numbers with rotating shaft are 2, being distributed in mirror holder adjusts on two angles of plate 1 and mirror holder back up pad 2, and become diagonal line to arrange, fixedly adjusting gear 4 also is positioned at mirror holder and adjusts on the angle of plate 1 and mirror holder back up pad 2, and fixedly the center of adjusting gear 4 is vertical mutually with the line at center separately of two adjusting gears 3 of being with rotating shaft on being distributed in diagonal line.Auxiliary relief arrangement 5 is positioned at the centre that mirror holder is adjusted plate 1 and mirror holder back up pad 2, and is symmetrically distributed in both sides, is connecting mirror holder and is adjusting plate 1 and mirror holder back up pad 2.There is a rectangular through-hole at the middle part that mirror holder is adjusted plate 1 and mirror holder back up pad 2, has both alleviated the weight of reflector mount, and when the utility model is used for the light path adjustment, helps the sample detecting of light beam.
Structure such as Fig. 4 of the adjusting gear 3 of said band rotating shaft, shown in Figure 5.Screw mandrel No. 50 steel of 301 employings or made such as GCr15 or T10, the back grinding of quenching forms, and the diameter of screw mandrel is decided according to the load of reflector mount, and the pitch of screw mandrel is determined according to regulating required resolution.When adopting motor-driven, available ball screw substitutes.Screw mandrel 301 is equipped with self-aligning ball bearing 1000 types (GB281-84) 302 with the end that mirror holder adjustment plate 1 links to each other, and self-aligning ball bearing 302 is by screw 304, and bearing baffle 303 has guaranteed its axial location on screw mandrel 301.The screw mandrel 301 that is equipped with self-aligning ball bearing 302 makes in its bearing mounting hole that is fixed on mirror holder adjustable plate 1 by bearing plate 305.The end that screw mandrel 301 links to each other with mirror holder back up pad 2 is furnished with the feed screw nut 306 who has rotation axis, and feed screw nut 306 is installed in the mirror holder back up pad 2 by bearing shell 307, to guarantee the line of centres vertical of feed screw nut 306 rotation axis axis and corresponding adjusting adjusting gear 3,4 during installation.The minor rotation of screw mandrel 301 in the time of just being implemented in 1 rotation of mirror holder adjustment plate by self-aligning ball bearing 302 with the feed screw nut 306 who has rotation axis like this.In addition, in order not hinder the minor rotation of screw mandrel 301, the diameter of the bearing shell mounting hole of mirror holder back up pad 2 should be than feed screw nut 306 diameter big 2-3mm.
The structure of said fixedly adjusting gear 4 as shown in Figure 6, its agent structure is basic identical with the adjusting gear 3 of band rotating shaft, unique difference is the fixedly feed screw nut 401 of adjusting gear 4, and this feed screw nut 401 does not have rotation axis, and with mirror holder back up pad 2 for cooperating installation.
In order to improve the load capacity of reflector mount, utilize auxiliary relief arrangement 5 to bear a part of load.The structure of auxiliary relief arrangement 5 as shown in Figure 7.This installs by the first off-load web joint, 501, the second off-load web joints, 506, the first off-load ball rods, 502, the second off-load ball rods 504, off-load connector 503, and off-load regulating sleeve 505 these six parts are formed.Bulb one end of the first off-load ball rod 502 is installed in the bulb pit of the first off-load web joint 501, and the other end then links to each other with off-load connector 503.Bulb one end of the second off-load ball rod 504 is installed on the off-load connector 503, and screw thread one end then links to each other with off-load regulating sleeve 505.Off-load regulating sleeve 505 is threaded with the second off-load ball rod 504 by the taper hole of the second off-load web joint 506.The tapering of the taper hole of the second off-load web joint 506 is to adjust the motion that is produced when plate 1 is realized rotating adjusting in order not hinder off-load regulating sleeve 505 at mirror holder.The first off-load web joint 501 is fixed in mirror holder by screw 507 to be adjusted on the plate 1, and the second off-load web joint 506 then is connected with mirror holder back up pad 2 by screw 508.
The setting range that the two dimension of this emission mirror holder is rotated is ± 2mrad to adjust precision and be not less than 3 μ rad.The good stability of this reflector mount, mirror holder stability is not less than 3 μ rad/2hr, be far superior to the stability indicator of existing device, and the cost of this reflector mount only is that conventional large-scale two dimension is rotated 1/10 of reflector mount in the prior art, so the present invention has very high promotional value and use value.

Claims (6)

1. a two-dimentional rotational stiffness connects fine setting true mirror frame, it is characterized in that it comprises mirror holder adjustment plate (1), mirror holder back up pad (2), the adjusting gear (3) of two bands rotating shaft, fixedly adjusting gear (4) and two auxiliary relief arrangements (5), described mirror holder is adjusted fixedly adjusting gear (4) that plate (1) and mirror holder back up pad (2) utilization be distributed in the adjusting gear (3) of band rotating shaft at diagonal angle and one jiao at another diagonal angle and is linked to each other and make it and be parallel to each other, fixedly the line of centres of the adjusting gear (3) of the center line of adjusting gear (4) and band rotating shaft and fixing adjusting gear (4) is vertical mutually, and auxiliary relief arrangement (5) is positioned at mirror holder and adjusts between plate (1) and the mirror holder back up pad (2) and be symmetrically distributed in both sides, mirror holder is adjusted plate (1) and mirror holder back up pad (2) interconnects by screw.
2. two-dimentional rotational stiffness according to claim 1 connects fine setting true mirror frame, it is characterized in that a rectangular through-hole (101,201) has been dug at the middle part of described mirror holder adjustment plate (1) and mirror holder back up pad (2).
3. two-dimentional rotational stiffness according to claim 1 connects fine setting true mirror frame, the screw mandrel (301) that it is characterized in that the adjusting gear (3) of described band rotating shaft is equipped with self-aligning ball bearing (302) with the end that mirror holder adjustment plate (1) links to each other, this self-aligning ball bearing (302) is by the axial location of screw (304) and bearing baffle (303) assurance screw mandrel (301), and the screw mandrel (301) that is equipped with self-aligning ball bearing (302) makes it be fixed on mirror holder by bearing plate (305) and adjusts in bearing mounting hole of plate (1); The end that screw mandrel (301) links to each other with mirror holder back up pad (2) is furnished with the feed screw nut (306) of band rotation axis, and this feed screw nut's (306) pivot center should be with the adjusting gear (3) of corresponding band rotating shaft, fixedly the center line of adjusting gear (4) is vertical.
4. two-dimentional rotational stiffness according to claim 3 connects fine setting true mirror frame, it is characterized in that described fixedly adjusting gear (4) does not have rotation axis with the different feed screw nuts of being (401) of the adjusting gear (3) of band rotating shaft, carry out with mirror holder back up pad (2) to cooperate installation.
5. two-dimentional rotational stiffness according to claim 1 connects fine setting true mirror frame, it is characterized in that described auxiliary relief arrangement (5) is by the first off-load web joint (501), the second off-load web joint (506), the first off-load ball rod (502), the second off-load ball rod (504), off-load connector (503) and off-load regulating sleeve (505) are formed, its annexation is: the bulb of the first off-load ball rod (502) is installed in the bulb pit of the first off-load web joint (501), the other end links to each other with off-load connector (503), the bulb of the second off-load ball rod (504) is installed on the off-load connector (503), screw thread one end links to each other with off-load regulating sleeve (505), off-load regulating sleeve (505) is threaded with the second off-load ball rod (504) by the taper hole of the second off-load web joint (506), the first off-load web joint (501) is fixed on mirror holder by screw (507) and adjusts on the plate (1), and the second off-load web joint (506) is connected with mirror holder back up pad (2) by screw (508).
6. two-dimentional rotational stiffness according to claim 3 connects fine setting true mirror frame, it is characterized in that the diameter of mounting hole of the bearing shell (307) of described mirror holder back up pad (2) should be than feed screw nut's (306) the big 2~3mm of diameter.
CNB021550476A 2002-12-20 2002-12-20 Two dimension rotary rigid connected micro-adjustable precisive reflecting lens support Expired - Fee Related CN1186666C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB021550476A CN1186666C (en) 2002-12-20 2002-12-20 Two dimension rotary rigid connected micro-adjustable precisive reflecting lens support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB021550476A CN1186666C (en) 2002-12-20 2002-12-20 Two dimension rotary rigid connected micro-adjustable precisive reflecting lens support

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Publication Number Publication Date
CN1424609A true CN1424609A (en) 2003-06-18
CN1186666C CN1186666C (en) 2005-01-26

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373197C (en) * 2005-10-27 2008-03-05 中国科学院上海光学精密机械研究所 Regulating frame of space filter lens
CN100529828C (en) * 2007-06-05 2009-08-19 中国科学院国家天文台南京天文光学技术研究所 Elastic element based three freedom degree precision movement support device
CN102615567A (en) * 2012-04-16 2012-08-01 中国科学院上海光学精密机械研究所 Clamp and clamping method for large-diameter plane optical element
CN102928947A (en) * 2012-11-07 2013-02-13 中国科学院长春光学精密机械与物理研究所 Bracing structure free of central blocking and made of composite materials for large-caliber optical double sided mirror
CN104597578A (en) * 2014-12-17 2015-05-06 中国科学院上海光学精密机械研究所 Centering universal regulating mechanism for optical element
CN114932760A (en) * 2021-02-04 2022-08-23 卡西欧计算机株式会社 Adjusting mechanism and printing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100378508C (en) * 2006-04-12 2008-04-02 中国科学院上海光学精密机械研究所 Frame type two-dimensional high precision adjusting rack

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373197C (en) * 2005-10-27 2008-03-05 中国科学院上海光学精密机械研究所 Regulating frame of space filter lens
CN100529828C (en) * 2007-06-05 2009-08-19 中国科学院国家天文台南京天文光学技术研究所 Elastic element based three freedom degree precision movement support device
CN102615567A (en) * 2012-04-16 2012-08-01 中国科学院上海光学精密机械研究所 Clamp and clamping method for large-diameter plane optical element
CN102928947A (en) * 2012-11-07 2013-02-13 中国科学院长春光学精密机械与物理研究所 Bracing structure free of central blocking and made of composite materials for large-caliber optical double sided mirror
CN104597578A (en) * 2014-12-17 2015-05-06 中国科学院上海光学精密机械研究所 Centering universal regulating mechanism for optical element
CN114932760A (en) * 2021-02-04 2022-08-23 卡西欧计算机株式会社 Adjusting mechanism and printing device
CN114932760B (en) * 2021-02-04 2024-03-19 卡西欧计算机株式会社 Adjustment mechanism and printing device

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Granted publication date: 20050126

Termination date: 20111220