CN1415927A - Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon - Google Patents
Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon Download PDFInfo
- Publication number
- CN1415927A CN1415927A CN 02137784 CN02137784A CN1415927A CN 1415927 A CN1415927 A CN 1415927A CN 02137784 CN02137784 CN 02137784 CN 02137784 A CN02137784 A CN 02137784A CN 1415927 A CN1415927 A CN 1415927A
- Authority
- CN
- China
- Prior art keywords
- spout
- ball
- top board
- stationary nozzle
- sprocket wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Silicon Compounds (AREA)
Abstract
A variable section area inlet device of polysilicon hydrogen reduction oven relates to semiconductor polysilicon hydrogen reduction oven nozzle structure characterizing in a nozzle fixed with over bottom wall sleeve by a rotary nozzle, a central hole and a fan hole are at its top, a fixed nozzle with same number shape, dimension and position, the places connecting the rotary nozzle with the fixed nozzle, bottom wall and top pressure plate are mounted with top rolling ball, middle ball and bottom ball. China wheel matched on the rotary nozzle is connected with a server motor with a gearbox outside of the oven bottom wall via two sealed axles, enabling to automatically rotate the rotary nozzle to adjust section area of inlet timely.
Description
Technical field
The present invention relates to the air inlet device of hydrogen reduction furnace for polysilicon.
Technical background
In the production of semi-conducting material polysilicon, must earlier silicon rod be set in hydrogen reduction furnace, adopt trichlorosilane or silicon tetrachloride hydrogen reduction to make the product polysilicon then.The initial diameter of this silicon rod is very thin, is generally Φ 5-10mm, and through hydrogen reduction, silicon deposits on silicon rod, and the final diameter of silicon rod is increasing, the thickest Φ 200mm that reached.
At present, in the semi-conducting material production of polysilicon, the sectional area of the air inlet of the hydrogen reduction furnace of employing is a constant cross-sectional area.This air inlet is a kind of internal and external casing formula structure, and inner sleeve is the gas outlet, and outer tube is an air inlet.The sectional area of air inlet is changeless, changes the production technology of less little productive rate so can only be applicable to mass flow.In big productive rate technology, enter the mass flow in the stove, require passing in time that tens of times variation is arranged, if still adopt the air inlet of constant cross-sectional area then the mass flow linear velocity of air inlet also has tens of times variation, will make silicon rod diameter and temperature very inhomogeneous like this, too high even the fusing (is waste product by quality standard) of local temperature, the halfway blowing out of will having to.Temperature is crossed to hang down and will be caused silicon rod layering (being time waste product by quality standard), and both all have a strong impact on the quality and the productive rate of product, make decrease in yield.
In order to obtain best production efficiency, must adopt the production technology of permanent deposit thickness, promptly when the diameter chap of polysilicon deposition, require to enter the interior also corresponding increasing of material of stove.For example when silicon rod grows to Φ 200mm, required material is about 40 times when initial, and productive rate just can uprise like this.And in order to make silicon rod both guarantee in deposition process that material constantly increased, the uniformity that keeps diameter and temperature again, must guarantee in stove, to keep the linear rate of flow of the best, Tai Gao or too lowly all will cause the inhomogeneous of silicon rod diameter and temperature from the material of air inlet ejection.
Summary of the invention
Purpose of the present invention is exactly a kind of inlet, outlet separation that designs at above-mentioned technical disadvantages and the transformable device of sectional area of air inlet.Specifically be that gas outlet and air inlet are separated, the gas outlet is arranged in around the silicon rod, air inlet can be by actual needs, in time adjust the sectional area size, make when advancing the variation of stove material, mass flow linear velocity by its ejection remains the best, and satisfies the needs of the silicon rod diameter that increases gradually, thereby has obtained the optimised process state and make the polysilicon of high-quality and high yield.
In order to achieve the above object, the present invention is design like this.The air inlet device of hydrogen reduction furnace is connected with mother tubes such as trichlorosilane or silicon tetrachlorides by one, and the stationary nozzle that is solidified as a whole by brace rod and lower cover and furnace hearth wall, and be enclosed within the stationary nozzle outside can be on request the rotation spout of speed rotation form.Have a centre bore on the top end face of stationary nozzle, the centre bore periphery evenly has 6 scallop holes, the fixing position of stationary nozzle and furnace hearth wall is provided with the bracing ring of a band groove, in this groove ball is housed down, by following ball the bottom and the stationary nozzle that rotate spout is rotationally connected.Have centre bore and the scallop hole all the same on the top end face of rotation spout with quantity, shape, size and the position of stationary nozzle, and the central lines of two centre bores.The periphery of rotating the spout top end face is provided with to recessed flanging, and this flanging forms groove with rotating spout, and middle ball is housed in the groove, by middle ball rotation spout and furnace hearth wall is rotationally connected.On the top of rotation spout and the furnace hearth wall top board is housed, has groove on the contact-making surface of top board and rotation spout, ball is housed in the groove, make the stability of rotation that rotates spout.Top board and furnace hearth wall contact position are solidified as a whole top board and furnace wall by the top board set bolt.So, rotate the upper and lower and top of spout ball all be housed, make rotate spout rotation freely.Have sprocket on the excircle of rotation spout bottom, be furnished with sprocket wheel on the sprocket, and the sprocket wheel mid point is fixed on the rotation spout, and the slewing area of setting sprocket wheel is 30 degree by the sprocket wheel set bolt.Two ends at sprocket wheel, 2 seal covers that are provided with by the furnace wall and two seal shafts in the sealing ring, the servomotor that have gearbox outer with stove is connected, when servomotor rotates, driving the rotation spout by sprocket wheel slowly rotates, the scallop hole of initial rotation spout and the scallop hole of stationary nozzle stagger fully, have only centre bore to overlap, at this moment the sectional area minimum.Along with the rotation of rotating spout, two scallop hole intersection are ascending,
After overlap fully, so formed the long-pending air inlet device of variable cross section.
Advantage of the present invention is as follows:
Since the rotation spout that the present invention is rotatable by one of the outer covering of stationary nozzle and its, the top has hole identical with stationary nozzle and centre bore overlap all the time form, so can stably regulate the sectional area of spout by technological requirement, so just controlled the linear velocity of mass flow effectively, guarantee the uniformity of silicon rod growth, also guaranteed the high finished product rate of product polysilicon.
2. because the rotation of the long-pending adjusting in nozzle exit of the present invention by servomotor, the anglec of rotation of spout is rotated in control, and servomotor is by the PID controller, the signal that provides according to the mass flow sensor, through the operational amplifier computing, compare the result with the rotational angle that rotates spout, decide rotating speed, so can in time stably regulate the sectional area of spout, the automaticity height.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is A-A of the present invention
1-A
2-A
3-A
4-A cutaway view
Fig. 3 the present invention installs and uses schematic diagram
Fig. 4 is for rotating spout rotation controlling party block diagram
The specific embodiment
Below in conjunction with accompanying drawing the present invention is elaborated
See also Fig. 1, Fig. 2 and Fig. 3.Gas outlet 20 separates with air inlet device of the present invention.The present invention is made up of stationary nozzle 1, the furnace hearth wall 4 that plays ball 2, sprocket wheel set bolt 3, band cooling water jecket, middle ball 5, last ball 6, top board 7, top board set bolt 8, rotation spout 9, centre bore 10, scallop hole 11, sprocket wheel 12, seal shaft 13, sealing ring 14, seal cover 15, hold-down bolt 16, brace rod 17, lower cover 18 and bracing ring 19.
Be with the rotation spout 9 of speed rotation that can be on request in the outside of stationary nozzle 1.The bottom of stationary nozzle 1 is connected with mother tubes such as trichlorosilane or silicon tetrachlorides.Have a centre bore 10 on the top end face of stationary nozzle 1, centre bore 10 peripheries evenly have 6 scallop holes 11.Affixed between stationary nozzle 1 and the furnace hearth wall 4 with 4-8 root brace rod 17.Be provided with the bracing ring 19 of a band groove on brace rod 17 tops of the periphery of stationary nozzle 1, ball 2 is housed down in this groove, the bottom and the stationary nozzle 1 of rotation spout 9 are rotationally connected by ball 2 down.In brace rod 17 bottoms lower cover 18 is housed, stationary nozzle 1 and furnace hearth wall 4 is solidified as a whole with hold-down bolt 16.The top of the rotation spout 9 that stationary nozzle 1 outside is with has centre bore 10 and the scallop hole 11 all the same with quantity, shape, size, the position of stationary nozzle 1, and the central lines of two centre bores 10.The periphery of rotation spout 9 top end faces is provided with downward flanging, and this flanging forms grooves with rotating spout 9, and ball 5 in being equipped with in the groove makes rotation spout 9 be rotationally connected with furnace hearth wall 4 by middle ball 5.On the top of rotating spout 9 and the furnace hearth wall 4 top board 7 is housed, with rotate the top board 7 that spout 9 contacts on have groove, ball 6 is housed in the groove, the stability of rotation of rotation spout 9 is not skidded off.Top board 7 passes through top board set bolt 8 with furnace hearth wall 4 contact positions, and top board 7 and furnace hearth wall 4 are solidified as a whole.So, ball all is equipped with at bottom, top and the top of rotating spout 9, makes the rotation of rotating spout 9 free and relaxed.Rotate on the excircle of spout 9 bottoms and have sprocket, be furnished with sprocket wheel 12 on the sprocket, and by sprocket wheel set bolt 3 mid point of sprocket wheel 12 is fixed on and rotates on the spout 9, and be 30 degree by the slewing area that technological requirement is set sprocket wheel 12.After the two ends of sprocket wheel 12 13, two seal shafts 13 of fixedly connected two seal shafts passed the sealing ring 14 of the high-temperature resistant rubber that is equipped with in 2 affixed on the furnace hearth wall 4 seal covers 15 respectively, the servomotor that have gearbox outer with stove was connected.When servomotor rotates, rotate spout 9 by sprocket wheel 12 drives and slowly rotate, initial, rotate the scallop hole 11 of spout 9 and the scallop hole 11 of stationary nozzle 1 and stagger fully, have only centre bore 10 to overlap, at this moment the sectional area minimum of air inlet.Along with the rotation of rotating spout 9, two scallop hole 11 intersection are ascending, overlap fully at last, at this moment the sectional area maximum of air inlet.So formed the long-pending air inlet device of variable cross section of the present invention.
What Fig. 4 represented is to rotate spout 9 rotation controlling party block diagrams, and when the traffic requirement of air inlet material increased, flow sensor sent signal for respectively stationary nozzle 1 and operational amplifier.Stationary nozzle 1 and rotation spout 9 enter the relative angle meter that rotates spout and stationary nozzle together, carry out rotational angle relatively, obtain to rotate the rotational angle of spout 9 simultaneously by the relative angle meter that rotates spout and stationary nozzle, rotate the rotational angle of spout for the input of PID controller.Flow sensor through the operational amplifier computing, sends instructions to the PID controller air inlet material input operational amplifier.At last, just can accurately stably regulate the servomotor running by the PID controller, rotation spout 9 is rotated on request, regulate the air inlet sectional area to satisfy the requirement of hydrogen reduction technology, so just controlled the linear velocity of mass flow effectively, guarantee the uniformity of silicon rod growth, also guarantee to obtain very high yield rate.
Claims (1)
1. the air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon is characterized in that: be made up of stationary nozzle (1), time ball (2), sprocket wheel set bolt (3), furnace hearth wall (4), middle ball (5), last ball (6), top board (7), top board set bolt (8), rotation spout (9), centre bore (10), scallop hole (11), sprocket wheel (12), seal shaft (13), sealing ring (14), seal cover (15), hold-down bolt (16), brace rod (17), lower cover (18), bracing ring (19); Stationary nozzle (1) is solidified as a whole by lower cover (18), brace rod (17) and hold-down bolt (16) and furnace hearth wall (4); Have a centre bore (10) and 6 scallop holes (11) on the top end face of stationary nozzle (1), stationary nozzle (1) periphery is provided with the bracing ring (19) of band groove, and ball (2) is housed down in this groove, and the outside of stationary nozzle (1) is with rotates spout (9); The top of rotating spout (9) has and stationary nozzle (1) quantity, shape, size, all the same centre bore (10) and the scallop hole (11) in position, and the central lines of two centre bores (10); The periphery of rotating spout (9) top end face is provided with downward flanging, and this flanging forms groove with rotating spout (9), and middle ball (5) is housed in the groove; On the top of rotation spout (9) and the furnace hearth wall (4) top board (7) is housed, top board has groove on (7), ball (6) is housed in the groove, and top board (7) is solidified as a whole top board (7) and furnace hearth wall (4) by top board set bolt (8) with furnace hearth wall (4) contact position; Have sprocket on the excircle of rotation spout (9) bottom, is furnished with sprocket wheel (12) on the sprocket, and by sprocket wheel set bolt (3) mid point of sprocket wheel (12) is fixed on and rotates on the spout (9), at fixedly connected two seal shafts in the two ends of sprocket wheel (12) (13), after two seal shafts (13) passed 2 seal covers (15) and sealing ring (14) that furnace hearth wall (4) is provided with respectively, the servomotor that have gearbox outer with stove was connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137784 CN1261732C (en) | 2002-11-01 | 2002-11-01 | Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137784 CN1261732C (en) | 2002-11-01 | 2002-11-01 | Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1415927A true CN1415927A (en) | 2003-05-07 |
| CN1261732C CN1261732C (en) | 2006-06-28 |
Family
ID=4749117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02137784 Expired - Fee Related CN1261732C (en) | 2002-11-01 | 2002-11-01 | Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1261732C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100425532C (en) * | 2005-12-13 | 2008-10-15 | 上海华虹Nec电子有限公司 | Nozzle of polycrystalline-silicon furnace |
| CN101419469B (en) * | 2008-12-04 | 2010-06-02 | 上海森和投资有限公司 | PLC automatically controlled polysilicon reducing furnace air supply system |
| CN103349926A (en) * | 2013-05-31 | 2013-10-16 | 济南华信自动化工程有限公司 | Fully-automatic proportioning bin |
| CN103349925A (en) * | 2013-05-31 | 2013-10-16 | 济南华信自动化工程有限公司 | Switchable gas proportioning bin |
| CN105586631A (en) * | 2016-02-03 | 2016-05-18 | 中国电子科技集团公司第十六研究所 | Oxygen extension device for flame-fusion-process sapphire sintering machine and oxygen extension method of oxygen extension device |
| CN106271109A (en) * | 2016-09-22 | 2017-01-04 | 东莞市联洲知识产权运营管理有限公司 | A kind of circuit board cutting positioning fixture of structure optimization |
| CN109399641A (en) * | 2018-12-25 | 2019-03-01 | 亚洲硅业（青海）有限公司 | A kind of chassis of reducing furnace device that feed flow rate is variable |
-
2002
- 2002-11-01 CN CN 02137784 patent/CN1261732C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100425532C (en) * | 2005-12-13 | 2008-10-15 | 上海华虹Nec电子有限公司 | Nozzle of polycrystalline-silicon furnace |
| CN101419469B (en) * | 2008-12-04 | 2010-06-02 | 上海森和投资有限公司 | PLC automatically controlled polysilicon reducing furnace air supply system |
| CN103349926A (en) * | 2013-05-31 | 2013-10-16 | 济南华信自动化工程有限公司 | Fully-automatic proportioning bin |
| CN103349925A (en) * | 2013-05-31 | 2013-10-16 | 济南华信自动化工程有限公司 | Switchable gas proportioning bin |
| CN105586631A (en) * | 2016-02-03 | 2016-05-18 | 中国电子科技集团公司第十六研究所 | Oxygen extension device for flame-fusion-process sapphire sintering machine and oxygen extension method of oxygen extension device |
| CN105586631B (en) * | 2016-02-03 | 2018-03-20 | 中国电子科技集团公司第十六研究所 | The expansion oxygen device and its expansion oxygen method of a kind of flame melt method sapphire sintering machine |
| CN106271109A (en) * | 2016-09-22 | 2017-01-04 | 东莞市联洲知识产权运营管理有限公司 | A kind of circuit board cutting positioning fixture of structure optimization |
| CN109399641A (en) * | 2018-12-25 | 2019-03-01 | 亚洲硅业（青海）有限公司 | A kind of chassis of reducing furnace device that feed flow rate is variable |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1261732C (en) | 2006-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1261732C (en) | Air inlet set with variable sectional area of hydrogen reduction furnace for polysilicon | |
| CN109666804B (en) | purification crystallization device of ultra-high purity aluminum | |
| CN109680159B (en) | Purifying and crystallizing method for ultra-high purity aluminum | |
| CN106075950B (en) | A kind of dual drive cross_flow rotating packed bed | |
| CN101898248A (en) | Production method of superfine aluminum powder for solar energy electric plate | |
| CN108771945A (en) | A kind of packed tower for waste gas purification | |
| CN202430110U (en) | Device for controlling forming temperature field of plate glass | |
| CN114592235B (en) | Single crystal furnace for integrated circuit production | |
| CN206988546U (en) | A kind of novel signal gate valve | |
| CN203091749U (en) | Preparation device for ultrathin solder powder | |
| CN107555779A (en) | A kind of low Intelligent optical fiber preform manufacturing apparatus of cost using VAD methods | |
| US5634593A (en) | Apparatus for scanning a stream of atomized particles having externally adjustable and programmable gas routing | |
| CN2564245Y (en) | Auto-temp. controlled ultragravity reactor | |
| CN108434791A (en) | A kind of efficient volatilization tower inner member | |
| CN103588207B (en) | Furnace gas medium forced circulation type polycrystalline silicon reduction furnace | |
| CN213913674U (en) | A change wax device for low molecular weight polyethylene production | |
| CN210512591U (en) | Dynamic material level adjusting device for rotary kiln | |
| US11874156B2 (en) | Precision measurement device | |
| CN204275559U (en) | A kind of inclination crystallization apparatus of segmented adjustable angle | |
| CN108421834B (en) | A kind of cooling device of the hollow round copper pipe of planetary rolling | |
| CN220026118U (en) | Thin film evaporator | |
| US2251726A (en) | Method of manufacture of foliated glass | |
| CN208394795U (en) | Graphene production device | |
| CN109811142B (en) | Control method of ultra-high purity aluminum purification and crystallization device | |
| CN205519659U (en) | Control system of shot production specification |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |