CN1415385A - Array chip of minitype needles for administration through skin and its preparation method - Google Patents
Array chip of minitype needles for administration through skin and its preparation method Download PDFInfo
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- CN1415385A CN1415385A CN 01131398 CN01131398A CN1415385A CN 1415385 A CN1415385 A CN 1415385A CN 01131398 CN01131398 CN 01131398 CN 01131398 A CN01131398 A CN 01131398A CN 1415385 A CN1415385 A CN 1415385A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0023—Drug applicators using microneedles
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
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- Anesthesiology (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
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- Media Introduction/Drainage Providing Device (AREA)
Abstract
A miniature needle array sheet for endermism uses the stainless steel sheet or Ti-alloy sheet as its substrate, and is prepared by "mask explosure-corrosion method" or "die impression method" to form miniature needle array and minipore array. The medicine comes into skin via said minipore array.
Description
Technical field
The invention belongs to medium is imported intravital apparatus, relate to a kind of array chip of minitype needles and manufacture method that is used for administration through skin.
Background technology
Array chip of minitype needles provided by the invention is a kind of new therapeutic appliance.
Take tablet and in human body the direct injection medicine be the most frequently used medication, medicine directly is penetrated into intravital mode by skin adopts also very extensive.For example when surgical wound is treated, can directly liquid medicine be coated in the skin surface of wound tissue, liquid medicine infiltrates skin, by subcutaneous tissue is absorbed.Adhesive plaster also is a kind of simple and easy to do transdermal characteristic medication, uses existing long history in Chinese medicine, and is rather remarkable to the curative effect of some diseases.In order to increase the permeability of medicine, be aided with the method for heating sometimes, the modern has invented ultrasonic method and magnetic pasting method or the like again.
The administering mode that the demand for development of newtype drug is preferably, administration through skin are a kind of attractive methods.Traditional administering modes such as oral and injection to some biotechnology make protein-based, DNA is basic and other treatment chemical compound is unaccommodated, and the method for administration through skin had both been avoided oral drugs because the hypofunction that gastrointestinal tract causes and the first passage effect (first-pass effects) of liver, the pain and the inconvenience that do not have intravenous injection to cause again, and it can control medicine-feeding rate continuously.
Although implement administering mode by dermal osmosis many advantages are arranged, this administering mode also is severely limited because of the hypotonicity of skin, and most drug can not be passed skin to treat required corresponding speed.Anatomy proves that people's skin is divided into three layers: ragged edge is a horny layer, and next coming in order are great-hearted epidermal area and skin corium.Cuticle thickness is 10-15 μ m, is xenobiotic matter.Following active epidermal area thickness is 50-100 μ m, comprises cell alive and nerve, but does not have blood vessel.Xia Mian skin corium is the main body of skin again, includes living cells, nerve and blood vessel.Obviously, the horny layer of ragged edge is the major obstacle that medicine transmits.
At Journal of pharmaceutical Science (vol.87, No.8,1998) magazine, author Sebastien Henry etc. has delivered one piece of article, exercise question is: A Novel Approach toTransdermal Drug Delivery, this article have introduced a kind of method of making microneedle array of integrated circuit technology on silicon wafer.Manufacture process is: substrate selects for use＜and 100〉orientation silicon wafer, utilize the CD-sputter on wafer, to deposit the chromium layer of about 1000 dusts behind the cleaning, drying earlier, repaste covers one deck photoresist in the above again.Lay a photomask then on photoresist, the figure on the mask is circle speckle array, and spacing is 150 μ m between the round speckle of array, and the circle spot diameter is 80 μ m.Utilize the optical mask exposure machine that substrate is exposed, after the development, removed the part that photoresist is exposed, stay the desired just round speckle array pattern of photoresist on the chromium layer.Next, wafer is immersed the chromium etching liquid, remove that to stay behind the chromium layer that is exposed to the open air on the silicon wafer surface be the chromium circle speckle array pattern that is covered with photoresist.The wafer that will have figure then carries out etching in reactive ion etching machine, the part of being protected by chrome mask remains, and forms micropin.Etching proceeds to chrome mask because of till undercutting comes off, and what stay is exactly sharp-pointed silicon microneedle array, as shown in Figure 1.The about 150 μ m of the length of the micropin of on silicon wafer 10, making 11, syringe needle 12 very sharp-pointed (radius of curvature can less than 1 μ).Because the hair and the fold of skin, the horny layer that micropin can only transdermal and not reaching and the nerve and the blood vessel of skin depths, thus there is not pain, but percutaneous medicine-feeding rate is then penetrated enhancing greatly because of horny layer by micropin.Test shows that micropin has good intensity, can not fracture in skin.Show that by result of the test calcein (calcein) has great difference to the epidermis of experiment on the permeability of inserting and do not insert microneedle array, because the insertion of micropin makes calcein strengthen about four orders of magnitude to the permeability of skin to human body skin.
Consider that from practical standpoint there are some defectives in above-mentioned technology.At first the technical process of Zhi Zaoing is complicated, and need be with some relatively more expensive integrated circuit special equipments, and (for example reactive ion etching machine etc.) finishes.Next is that to make the price of material silicon wafer of micropin more expensive, and the cost of product is increased.The more important thing is, on function, use this microneedle array after wearing out skin surface, it must be removed and just can carry out administration operation, reason is to support the silicon chip densification of micropin and the imporosity is sequestered on the skin, and medicine can not be passed through.And owing to the regeneration capacity and the reasons such as elasticity and motion extruding of skin, the hole that punctures can very fast obstruction, thereby reduces administering effect.
Summary of the invention
The purpose of this invention is to provide a kind of is the array chip of minitype needles of substrate sheet with rustless steel or titanium alloy, generates microwell array on substrate sheet in the moulding micro pin array, can improve the efficient and the effect of administration through skin during use; Another object of the present invention provides the method for making array chip of minitype needles of the present invention, and this manufacture method is finished with existing technological equipment, has reduced manufacturing cost.
Array chip of minitype needles of the present invention, its main body comprises continuous microneedle array and substrate sheet two parts, and microneedle array is erected on the substrate sheet, and substrate sheet adopts rustless steel or titanium alloy thin slice, microneedle array forms microwell array naturally on the substrate sheet after erectting on the substrate sheet.
Single microneedle on the substrate sheet of array chip of minitype needles of the present invention is jib shape substantially, and the micropore that stays on the substrate sheet is triangular in shape, and the microneedle of jib shape links to each other on substrate sheet with a base with leg-of-mutton micropore.
On the array chip of minitype needles, microneedle and micropore are neatly arranged on substrate sheet regularly in length and breadth, from the micropore of substrate sheet horizontally-arranged, the summit that intersect on adjacent two micropore trianglees two isosceles limits towards on the contrary; That is: if the order summit that be the micropore triangle two isosceles limits of odd number crossing on a horizontal line, then these leg-of-mutton bases are on another horizontal line.
The about 100 μ m of the thickness of the substrate sheet of array chip of minitype needles of the present invention, the about 10cm * 10cm of the area of main part.The angle that the length of jib shape microneedle or highly be about 120 μ m, two isosceles limits intersect the place, summit is 10 °～30 °.The density that microneedle is arranged on substrate sheet is about 500/cm
2
For easy to use, array chip of minitype needles of the present invention can be pasted by the medical proof fabric with good air permeability at its back side.Micropin during use on the array chip thrusts skin, and the reuse adhesive plaster remains on the skin array chip.
The manufacture method of array chip of minitype needles of the present invention has two kinds, for sake of convenience, is referred to as " mask exposure etch " and " mould indentation method " respectively.Two kinds of methods are all easy than Sebastin Henry etc. makes microneedle array with integrated circuit technology on silicon chip method.Below narrate two kinds of methods of the present invention respectively.
One. the mask exposure etch
Carry out according to the following steps:
(1) substrate sheet is got the raw materials ready, and adopts rustless steel or titanium alloy thin slice or strip to make substrate sheet, and the about 100 μ m of its thickness are cut into square or the roughly the same rectangle of area of the about 10cm * 10cm of area.At first the substrate sheet stock is flattened, carry out twin polishing then, clean up at last and drying.
(2) gluing, the two-sided thin layer (liquid or dry film) that is coated with positive photoresist of the substrate sheet behind cleaning-drying is dried and post bake.
(3) system mask, the mask egative film generates the microneedle array figure with glass or thin film on the mask egative film.Should make each the microneedle graph outline on the mask is printing opacity.
(4) exposure is implemented the single or double exposure to the stainless steel-based egative film that applies positive-working photoresist, and the microneedle array graph transfer printing on the mask is to photoresist.
(5) develop, the rustless steel of mask graph printing opacity place correspondence is exposed out.
(6) corrosion has only exposed substrate sheet partly to be corroded, and remainder is protected by resist film.Finally on substrate sheet, form and have certain corrosion depth and the corresponding concavity figure of mask graph, its intensity reduction.
(7) molding of microneedle array, small-sized because of microneedle adopts special processing technique to realize, and as the gas jet, methods such as water jet or explosive forming form microneedle array in the vertical direction with substrate sheet.For preventing the substrate sheet distortion, when the microneedle array molding, support with a hole piece under the substrate sheet.
(8) etch polishing after the microneedle array molding, carries out etch polishing one time again, can make the microneedle needle body become comparatively smooth, and syringe needle is more sharp-pointed.
Two. the mould indentation method
Carry out according to the following steps:
(1) substrate sheet is got the raw materials ready, and adopts rustless steel or titanium alloy thin slice or strip to make substrate sheet, and the about 100 μ m of its thickness are cut into square or the roughly the same rectangle of area of the about 10cm * 10cm of area.At first the substrate sheet stock is launched, carry out twin polishing then, clean up at last and drying.
(2) make the punch mould
1. the pressure head of the mould steel of long * wide * high approximately 5cm * 5cm * 5cm size as pressing mold selected in blanking for use, and six faces of pressure head need carry out polish, polish.One of them face is carried out polishing, clean up, this face is decided to be the work surface of pressure head.
2. gluing is coated with thin layer (liquid or dry film) with positive photoresist with the pressure head work surface, dries and post bake.
3. make mask, the mask egative film is glass or thin film, generates the microneedle array figure on the mask.Array pattern is similar to the figure in the aforementioned mask exposure etch, just when mask is made, graph data is reversed, and each the microneedle graph outline that generates on mask like this is lighttight.
4. exposure exposes to the pressure head work surface that applies positive-working photoresist, and the microneedle array figure on the mask is transferred on the photoresist.
5. develop, the mould steel of mask graph printing opacity place correspondence is exposed out, and the contour line of microneedle array is protected by dry-film resist.
6. the corrosion of pressure head work surface has only the mould steel of exposed section to be corroded.Because the microneedle array contour line is protected by resist film, has finally formed the micro-protrusions array on the pressure head work surface, the edge of these micro-protrusions is bladed.
(3) impression carries out on forcing press.Extrude the impression of microneedle array figure with pressure head bladed figure on the substrate sheet for preparing, impression place intensity reduces.
(4) microneedle array molding and etch polishing.Small-sized because of microneedle, molding adopts special processing technique to realize, and as the gas jet, methods such as water jet or explosive forming form microneedle array in the vertical direction with substrate sheet.For preventing the substrate sheet distortion, when the microneedle array molding, support with a hole piece under the substrate sheet.After the microneedle array molding, carry out etch polishing again one time, can make the microneedle needle body become comparatively smooth, syringe needle is more sharp-pointed.
Array chip of minitype needles of the present invention compared with prior art has many advantages.When using the array chip of minitype needles of this form, can be as required with array chip attached on the skin, microneedle is transdermal immediately, medicine infiltrates in the body with certain speed constantly by the micropore with the microneedle bottom.
The present invention selects for use rustless steel or titanium alloy to make substrate sheet, can with biological bulk phase compatibility, can not have side effects during use.
Array chip of minitype needles provided by the invention designs and makes easy, can realize with easy equipment and process, is easy to produce in batches.
Description of drawings
Fig. 1 is people such as Sebastin Henry utilize the microneedle array that integrated circuit technology makes on silicon wafer a enlarged drawing.
Fig. 2 is the single micropin figure on the microneedle array mask of the present invention.
Fig. 3 is a microneedle array mask graph sketch map of the present invention.
Fig. 4 is the microneedle array sketch map that the present invention makes on stainless steel-based egative film.
Fig. 5 is the supported hole piece of using when the microneedle array molding.
The specific embodiment
Embodiment 1: the design of array chip of minitype needles
At first design single microneedle planar graph, as showing, figure 20 is an isoceles triangle shape as Fig. 2, its vertical acute angle 23 about 30 degree, and vertical line (height) H is about 300 μ m.Triangle two stringcourses such as grade 21 are identical with the width W of 22 lines, get about 20 μ m, and the length on base 26 is about 160 μ m, but does not seal, but respectively be the long line segments of about 20 μ m by the inside base line segment 24 and 25 in two summits, the line segment width is wide identical with triangle two isosceles sidelines.Such design be guarantee when graph transfer printing after substrate sheet, through developing, corrosive liquid is that corrode in the zone of W to width only, can produce vulnerable area on the substrate sheet after corrosion, the intensity reduction, this is the key of microneedle molding.
On the basis of single microneedle planar graph design, the mask graph of the microneedle array of design as shown in Figure 3.On mask egative film 30, single figure is carried out well-regulated arrangement, make summit that two isosceles limits of adjacent two microneedle plane triangles intersect towards on the contrary, the spacing between the triangle is identical with leg-of-mutton base length, and pattern density is about 500/cm2.
Embodiment 2: make array chip of minitype needles with mask exposure etch technology, carry out according to the following steps.
(1) gets the raw materials ready, select for use the thick stainless sheet steel of the about 100 μ m of thickness to make substrate sheet, be cut into the square of 10cm * 10cm size.Substrate sheet is flattened and carry out twin polishing, clean and dry with ultrasonic waves for cleaning in cleaning solution at last.
(2) gluing is coated with the positive photoresist with AZ1350 with substrate sheet is two-sided, and glue is thick to be 500nm, and baking is about 30 minutes under 120C, carries out drying and post bake.
(3) system mask, mask adopts the steaming chromium glass plate that scribbles positive glue, exposes the microneedle array figure that designs with electron beam exposure apparatus on mask, and the development etching.Before the exposure, when array pattern was carried out data transaction, should make each the microneedle graph outline on the mask that electron beam exposure apparatus finally makes was printing opacity.
(4) exposure places the mask that makes on the substrate sheet that scribbles the AZ1350 photoresist, carries out contact or projection exposure with ultraviolet light source, and the microneedle array figure on the mask is transferred on the photoresist.
(5) develop, adopt and the supporting NaOH developing liquid developing of AZ1350 positive photoresist, solution level is 6 ‰.The pairing rustless steel of microneedle profile just exposes out.
(6) corrosion will be corroded in the liquor ferri trichloridi that to be placed on about 55 ℃ of concentration be 38 grams per liters of the substrate sheet after developing.Have only the pairing rustless steel of profile of microneedle to be corroded, the substrate sheet remainder is protected by resist film, has formed recessed microneedle contour line at last on substrate sheet.During corrosion, make the degree of depth of contour line be not less than 2/3 of substrate sheet thickness.
(7) the water jet machining method is adopted in microneedle array molding, and making water is working media.Because the triangular array planar graph a little less than having formed the thin edge that is corroded on the substrate sheet, under the percussion of jet beam, separate with the matrix of substrate sheet on these triangle two isosceles limits, and the 3rd limit can be in weakness bending, but its root still links to each other with substrate, forms the perpendicular microneedle that is the jib shape 41 arrays in plane with substrate sheet 40 at last.When the triangle bending forms microneedle, corresponding triangle micropore 42 arrays have been formed on the substrate sheet naturally.Fig. 4 is the array chip of minitype needles sketch map.When using water jet machining, substrate sheet supports with a hole piece, prevents the substrate sheet distortion.The hole piece as shown in Figure 5, the supporting module of this shape processing is fairly simple, just processes the hole of arranging according to certain rules 51 on a thicker flat board 50 and gets final product.Hole can be used as water jet earial drainage usefulness, and the muscle 52 between the hole is used for the support base sheet.The pressure of water jet can be regulated, and generally is controlled at 10kg/cm
2About expulsion pressure, triangle isosceles cincture profile is separated and the 3rd Edge Bend gets final product with matrix.
(8) etch polishing places liquor ferri trichloridi to polish the array chip of minitype needles of making, and makes the microneedle needle body become smooth, and syringe needle is more sharp-pointed.
Embodiment 3: make array chip of minitype needles with the mould indentation method, carry out according to the following steps.
(1) gets the raw materials ready, undertaken by the step among the embodiment 2 (1).
(2) make the punch mould.
1. the pressure head of the mould steel of long * wide * high about 5cm * 5cm * 5cm size as pressing mold selected in blanking for use, and six faces of pressure head need carry out polish, polish.One of them face is carried out polishing, clean up, this face is decided to be the work surface of pressure head.
2. gluing is coated with the positive photoresist with AZ1350 with burnishing surface, and thickness is 500nm, and baking is about 30 minutes under temperature 120C, carries out drying and post bake.
3. make mask, identical with step (3) among the embodiment 2, just when array pattern is carried out data transaction, opposite with step (3) exposure data, make that promptly each the microneedle graph outline on the mask that electron beam exposure apparatus finally makes is lighttight.
4. exposure, identical with step (4) among the embodiment 2.
5. develop, identical with step (5) among the embodiment 2.
6. corrosion will be corroded in the liquor ferri trichloridi that to be placed on about 55 ℃ of concentration be 38 grams per liters of the pressure head work surface after developing.Because the microneedle array contour line protected by resist film, just formed the microneedle contour line array that convex projection, edge are bladed on the last pressure head work surface, the height of bladed projection is not less than 120 μ m.
(3) impression is implemented the segmentation extruding with the pressure head work surface to the substrate sheet of having got ready on forcing press, make depth of cup be not less than 2/3 of substrate sheet thickness.Substrate sheet is marched forward to one section then, and pressure head is implemented extruding again.The mould that this mould indentation method is made is that pressure head can use repeatedly.
(4) microneedle array molding and polishing, identical with (7) and (8) step among the embodiment 2.
After array chip of minitype needles was made, pasted with the medical proof fabric of good air permeability at its back side, also can make the array chip frame in adhesive plaster.During application, adhesive plaster together is attached on the skin together with array chip of minitype needles.
Claims (9)
1. array chip of minitype needles, its main body comprises continuous microneedle array and substrate sheet two parts, and microneedle array is erected on the substrate sheet, it is characterized in that substrate sheet is rustless steel or titanium alloy thin slice, microneedle array forms microwell array naturally on the substrate sheet after erectting on the substrate sheet.
2. array chip of minitype needles according to claim 1 is characterized in that one microneedle is jib shape substantially on the substrate sheet, and micropore is triangular in shape, and the microneedle of jib shape links to each other on substrate sheet with a base with leg-of-mutton micropore.
3. array chip of minitype needles according to claim 1 and 2 is characterized in that the neatly arrangement in length and breadth regularly on substrate sheet of microneedle and micropore; Micropore from the substrate sheet horizontally-arranged, the summit that intersect on adjacent two micropore trianglees two isosceles limits towards on the contrary, that is: if the order summit that be the micropore triangle two isosceles limits of odd number crossing on a horizontal line, then these leg-of-mutton bases are on another horizontal line.
4. array chip of minitype needles according to claim 1 and 2 is characterized in that the about 100 μ m of thickness of substrate sheet, the about 10cm * 10cm of the area of main part, and the density that microneedle is arranged on substrate sheet is about 500/cm
2
5. array chip of minitype needles according to claim 1 and 2 is characterized in that the back side of substrate sheet is pasted with the medical proof fabric of good air permeability.
6. array chip of minitype needles according to claim 1 and 2 is characterized in that the height of microneedle or length are about 150 μ m, about 15 degree of vertical acute angle～35 degree.
7. the manufacture method of an array chip of minitype needles is characterized in that substrate sheet is rustless steel or titanium alloy thin slice, the about 100 μ m of thickness, and rectangle or square, the about 10cm * 10cm of area, make microneedle array according to the following steps:
(1) substrate sheet is got the raw materials ready, and adopts rustless steel or titanium alloy thin slice or strip to make substrate sheet, and the about 100 μ m of its thickness are cut into square or the roughly the same rectangle of area of the about 10cm * 10cm of area; At first the substrate sheet stock is flattened, carry out twin polishing then, clean up at last and drying;
(2) gluing, the two-sided thin layer (liquid or dry film) that is coated with positive photoresist of the substrate sheet behind cleaning-drying is dried and post bake;
(3) system mask, the mask egative film is glass or thin film, generates the microneedle array figure on the mask egative film, should make each the microneedle graph outline on the mask is printing opacity;
(4) exposure is implemented the single or double exposure to the stainless steel-based egative film that applies positive-working photoresist, and the microneedle array graph transfer printing on the mask is to photoresist;
(5) develop, the rustless steel of mask graph printing opacity place correspondence is exposed out;
(6) corrosion has only exposed substrate sheet partly to be corroded, and remainder is protected by resist film, finally forms to have certain corrosion depth and the corresponding concavity figure of mask graph on substrate sheet, and its intensity reduces;
(7) molding of microneedle array, small-sized because of microneedle adopts special processing technique to realize, and as the gas jet, methods such as water jet or explosive forming form microneedle array in the vertical direction with substrate sheet; For preventing the substrate sheet distortion, when the microneedle array molding, support with a hole piece under the substrate sheet;
(8) etch polishing after the microneedle array molding, carries out etch polishing one time again, can make the microneedle needle body become comparatively smooth, and syringe needle is more sharp-pointed.
8. the manufacture method of an array chip of minitype needles is characterized in that substrate sheet is rustless steel or titanium alloy thin slice, the about 100 μ m of thickness, and rectangle or square, the about 10cm * 10cm of area, make microneedle array according to the following steps:
(1) substrate sheet is got the raw materials ready, and adopts rustless steel or titanium alloy thin slice or strip to make substrate sheet, the about 100 μ m of its thickness, be cut into square or the roughly the same rectangle of area of the about 10cm * 10cm of area, at first the substrate sheet stock is launched, carry out twin polishing then, clean up at last and drying;
(2) make the punch mould
1. the pressure head of the mould steel of long * wide * high approximately 5cm * 5cm * 5cm size as pressing mold selected in blanking for use, and six faces of pressure head need carry out polish, polish; One of them face is carried out polishing, clean up, this face is decided to be the work surface of pressure head;
2. gluing is coated with thin layer (liquid or dry film) with positive photoresist with the pressure head work surface, dries and post bake;
3. make mask, the mask egative film is glass or thin film, generates the microneedle array figure on the mask; Array pattern is similar to the figure in the aforementioned mask exposure etch, just when mask is made, graph data is reversed, and each the microneedle graph outline that generates on mask like this is lighttight;
4. exposure exposes to the pressure head work surface that applies positive-working photoresist, and the microneedle array figure on the mask is transferred on the photoresist;
5. develop, the outer pairing mould steel of mask graph printing opacity is exposed out, and the contour line of microneedle array is protected by dry-film resist;
6. the corrosion of pressure head work surface has only the mould steel of exposed section to be corroded.Because the microneedle array contour line is protected by resist film, has finally formed the micro-protrusions array on the pressure head work surface, the edge of these miniature projections is bladed;
(3) impression carries out on forcing press.Extrude the impression of microneedle array figure with pressure head bladed figure on the substrate sheet for preparing, impression place intensity reduces;
(4) microneedle array molding and etch polishing, small-sized because of microneedle, molding adopts special processing technique to realize, and as the gas jet, methods such as water jet or explosive forming are forming microneedle array with the substrate sheet vertical direction; For preventing the substrate sheet distortion, when the microneedle array molding, support with a hole piece under the substrate sheet; After the microneedle array molding, carry out etch polishing again one time, can make the microneedle needle body become comparatively smooth, syringe needle is more sharp-pointed.
9. according to the manufacture method of claim 7 or 8 described array chip of minitype needles, when it is characterized in that the microneedle array molding, used hole piece is to process the hole of arranging by rule on a thicker flat board; Hole is as water jet earial drainage usefulness, and the muscle between the hole is used for the support base sheet.
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| CNB011313986A CN100387318C (en) | 2001-10-31 | 2001-10-31 | Array chip of minitype needles for administration through skin and its preparation method |
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| CNB011313986A CN100387318C (en) | 2001-10-31 | 2001-10-31 | Array chip of minitype needles for administration through skin and its preparation method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100402107C (en) * | 2004-03-31 | 2008-07-16 | 中国科学院理化技术研究所 | Metal micro-needle array chip and preparation method and application thereof |
| CN100478040C (en) * | 2003-11-10 | 2009-04-15 | 新加坡科技研究局 | Microneedles and microneedle fabrication |
| CN102358015A (en) * | 2004-12-07 | 2012-02-22 | 3M创新有限公司 | Method of molding a microneedle |
| CN103263727A (en) * | 2013-05-22 | 2013-08-28 | 清华大学 | Metal microneedle array, percutaneous medicine feeding paster, Dermaroller and microneedle electrode array |
| WO2013131215A1 (en) | 2012-03-06 | 2013-09-12 | 中国科学院理化技术研究所 | Polymer micro-needle array chip, preparation process and use thereof |
| US8663176B2 (en) | 2005-12-14 | 2014-03-04 | Ariana Holdings Pty Ltd | Chemical applicator |
| CN106470597A (en) * | 2014-07-09 | 2017-03-01 | 高通股份有限公司 | There are the integrated circuit modules of lead frame microneedle |
| CN114849053A (en) * | 2022-05-20 | 2022-08-05 | 优微（珠海）生物科技有限公司 | Plane microneedle, microneedle sticker, vertical shape and manufacturing equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5611806A (en) * | 1994-05-23 | 1997-03-18 | Samsung Electro-Mechanics Co., Ltd. | Skin perforating device for transdermal medication |
| US5928207A (en) * | 1997-06-30 | 1999-07-27 | The Regents Of The University Of California | Microneedle with isotropically etched tip, and method of fabricating such a device |
| CN2448382Y (en) * | 2000-11-27 | 2001-09-19 | 沈绍凤 | Conic miniature trauma needle |
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2001
- 2001-10-31 CN CNB011313986A patent/CN100387318C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100478040C (en) * | 2003-11-10 | 2009-04-15 | 新加坡科技研究局 | Microneedles and microneedle fabrication |
| CN100402107C (en) * | 2004-03-31 | 2008-07-16 | 中国科学院理化技术研究所 | Metal micro-needle array chip and preparation method and application thereof |
| CN102358015A (en) * | 2004-12-07 | 2012-02-22 | 3M创新有限公司 | Method of molding a microneedle |
| US8663176B2 (en) | 2005-12-14 | 2014-03-04 | Ariana Holdings Pty Ltd | Chemical applicator |
| WO2013131215A1 (en) | 2012-03-06 | 2013-09-12 | 中国科学院理化技术研究所 | Polymer micro-needle array chip, preparation process and use thereof |
| CN103263727A (en) * | 2013-05-22 | 2013-08-28 | 清华大学 | Metal microneedle array, percutaneous medicine feeding paster, Dermaroller and microneedle electrode array |
| CN106470597A (en) * | 2014-07-09 | 2017-03-01 | 高通股份有限公司 | There are the integrated circuit modules of lead frame microneedle |
| CN114849053A (en) * | 2022-05-20 | 2022-08-05 | 优微（珠海）生物科技有限公司 | Plane microneedle, microneedle sticker, vertical shape and manufacturing equipment |
| CN114849053B (en) * | 2022-05-20 | 2023-01-06 | 优微（珠海）生物科技有限公司 | Planar microneedle, microneedle sticker, vertical shape and manufacturing equipment |
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