CN1393691A - Electronic microscope with high time resolution - Google Patents
Electronic microscope with high time resolution Download PDFInfo
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- CN1393691A CN1393691A CN 02120820 CN02120820A CN1393691A CN 1393691 A CN1393691 A CN 1393691A CN 02120820 CN02120820 CN 02120820 CN 02120820 A CN02120820 A CN 02120820A CN 1393691 A CN1393691 A CN 1393691A
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- time resolution
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- high time
- control assembly
- electron microscope
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Abstract
An electronic microscope with high temp resolution is composed of ultrashort-pulse laser device, vacuum target chamber, optical focusing element, target element, electronic light diaphragm or electronic beam energy spectrum controller, specimen supporter regualtor ,and image receiver. The laser pulses act on the target to generate high-energy electronic beam pulses which are modulated and then act on the specimen to be tested to generate images to be received by the image receiver. Its advantages are high resolutions of space and time, high energy of electronic beam, and high versatility.
Description
Technical field
The present invention relates to a kind of structure determination of material, testing tool that laser plasma is used of relating to, refer to a kind of electron microscope especially with high time resolution.
Background technology
In recent years, ultrafast process research has produced significant impact in many fields such as physics, chemistry and biologies, becomes a new feature of current scientific research.Ultrafast process generally was meant in nanosecond (10
-9Second) the interior behavior that occurs of following time scale.As superconductor electron transfer, chemical bond formation etc. all at nanosecond～femtosecond (10
-9～10
-15) between.Current, the technical development of the scientific research in fields such as physics, biological and chemical and material, genetic engineering and medicine and other fields, all purpose instrument of a kind of high time resolutions of needs (having ultrafast temporal characteristics).
It is a kind of high spatial resolution instrument commonly used that electron microscope is called for short Electronic Speculum.It utilizes the Bragg diffraction principle work of electronics, passes diffraction pattern behind the sample by the research electron beam, or the reflective device of electron beam after by the sample reflection, the internal structural information of study sample indirectly.Electron microscope has higher spatial resolution than optical microscope, can reach the molecular scale magnitude.But traditional Electronic Speculum is not investigated temporal characteristics in principle with regard to principle of work, even adopt electronic shutter equal time control device to transform Electronic Speculum, temporal resolution also is difficult to reach nanosecond (10
-9Second) following (document 1:O.Bostanjoglo, R.Elschner, Z.Mao, T.Nink, M.Weingartner/Ultramicroscopy 81 (2000) p141～147).This be because: according to sampling thheorem, the high time resolution of Electronic Speculum equals the twice of its work beam pulse width; The tradition Electronic Speculum adopts negative electrode accelerated mode generation work electron beam usually, and its electron beam is continuous, so beam pulse can only be produced by the way of restraint such as electronic shutters; Because the influence of machinery inertial or electric property, these the way of restraint are difficult to reach nanosecond (10
-9Second) below, thereby the temporal resolution of traditional Electronic Speculum also just can't reach nanosecond (10
-9Second) below, obviously can't satisfy nanosecond～femtosecond (10
-9～10
-15Second) the research requirement of the ultrafast process of magnitude.
Present ultrashort pulse light laser plasma technique can provide the electron beam of enough high energy, and transmit direction (document 2:T.J.Liang, J.Zhangetc., Phy.Rev.E, 57 (1998) R3746) that can controlling electron beam; Can also carry out power spectrum to it and separate (document 3: Chen Liming, Zhang Jie etc., Acta Physica Sinica (2000) 592).This electron beam pulsewidth only is a subpicosecond (10
-13Second) magnitude, have ultrafast temporal characteristics, be good ultrafast electron beam source.The high time resolution Electronic Speculum that has ultrafast temporal characteristics for construction has been established technical foundation.
Summary of the invention
The objective of the invention is to utilize the high time resolution feature of femtosecond laser plasma technology, combine with traditional electron microscopy by the femtosecond laser plasma technology, the Superfast time resolution ability is introduced electron microscopy, on the basis of traditional Electronic Speculum high spatial resolution, construction has the high time resolution Electronic Speculum of ultrafast temporal characteristics, make this high precision instrument for testing device commonly used of Electronic Speculum possess the ability of research ultrafast process, be present physics, chemistry, the ultrafast process research in biology forward position, and new material, the technological development in field such as genetic engineering and new medicine provides new research means and new all purpose instrument.
Purpose of the present invention can realize by following measure:
A kind of electron microscope with high time resolution comprises ultrashort pulse laser, vacuum target chamber, light focusing element, target parts, electronics diaphragm or electron beam power spectrum control assembly, sample support adjusting parts, image receiving-member; In vacuum target chamber or outside be provided with ultrashort pulse laser, in vacuum target chamber, establish light focusing element on the light path of the ultrashort laser pulse that laser instrument produces, be provided with the target parts at the focus place of light focusing element; Target surface normal direction at the target parts is provided with electronics diaphragm or electron beam power spectrum control assembly; On electronics diaphragm or electron beam power spectrum control assembly outgoing electron passage, establish sample support and regulate parts, after sample support is regulated parts, be provided with the image receiving-member.
Described electronics diaphragm also replaces with the edge of a knife.
Described electron beam power spectrum control assembly is made up of the incident control assembly of magnetic deflection field and incident end thereof and the outgoing control assembly of exit end.
Described incident control assembly is made up of direction and position control mechanism and collimating aperture/aperture stop.
Described magnetic deflection field cavity inner wall is provided with light absorption part, or the magnetic deflection field cavity inner wall directly is made as low reflecting surface.
Described outgoing control assembly is selected from a kind of in aperture stop, the edge of a knife
Between described laser instrument and target parts, also be provided with and transfer the target drone structure.
Between described target parts and electronics diaphragm/electron beam power spectrum control assembly, also be provided with the electromagnetic lens element.
Between described sample support adjusting parts and image receiving-member, also be provided with the electronic imaging parts.
Described image receiving-member is selected from least a among film, video screen and the CCD.
The invention has the advantages that:
The present invention has inherited the high spatial resolution of traditional Electronic Speculum, has the ability of research molecular scale phenomenon; Utilize the high time resolution feature of femtosecond laser plasma technology simultaneously, ultrashort pulse laser is combined with traditional electron microscopy, thereby the Superfast time resolution ability is introduced electron microscopy, on the basis of traditional Electronic Speculum high spatial resolution, construction has the high time resolution Electronic Speculum of ultrafast temporal characteristics, makes Electronic Speculum can reach femtosecond～psec (10
-15Second～10
-12Second) time resolution of level, beam energy is higher than traditional Electronic Speculum; Thereby make this high precision instrument for testing device commonly used of Electronic Speculum possess research ultrafast (10
-9Second following) ability of process, its highly versatile can be the ultrafast process research in present physics, chemistry, biology forward position, and the technological development in fields such as new material, genetic engineering and new medicine, and new research means and new all purpose instrument are provided.
Description of drawings
Fig. 1 is a transmission electron microscope structural representation of the present invention
Fig. 2 is a reflection Electronic Speculum structural representation of the present invention
Embodiment
The present invention also will be described in further detail embodiment in conjunction with the accompanying drawings:
Embodiment 1:
With reference to Fig. 1, be the transmission electron microscope of high time resolution of the present invention, comprise ultrashort pulse laser 1, accent target drone structure 2, laser incidence window 3, vacuum target chamber 4, light focusing element 5, target parts 6, incident control assembly 7, magnetic deflection field 8, light absorption part 9, outgoing control assembly 10, sample support adjusting parts 11, electronic imaging parts 12, image receiving-member 13, vacuum pump 14, vacuum meter 15 etc.; Wherein laser instrument 1 is titanium-doped sapphire (Ti:Sapphire) solid state laser, output wavelength 820nm, repetition frequency 10Hz, pulse
Halfwidth 150fs,
Monopulse output energy 5.3mJ
The femto-second laser pulse that ultrashort pulse laser 1 penetrates is after transferring 2 adjustment of target drone structure, enter vacuum target chamber 4 by laser entrance window 3, after focusing on through light focusing element 5 again, with the target of correct position, angle and polarization state bombardment metal solid target parts 6, the target matter of described target parts 6 is metallic aluminium; Target surface laser incident angle 45 degree; Focusing on back laser focal spot diameter is micron dimension.After the high energy electron beam pulse that the bombardment target produces collimates through incident collimating aperture 7, enter deflection focusing in the magnetic deflection field 8, carry out power spectrum by it and separate and to form the monoenergetic electrons pulse, absorbed by light absorption part 9, can not influence the subsequent process of electron beam patterning with the scattering laser of the coaxial incident of electron beam.Outgoing aperture stop 10 is in precalculated position controlling electron beam outgoing, determine indexs such as its energy, unipotency, beam diameter, the electron beam of outgoing shines sample support and regulates on the transmission sample of parts 11, Bragg diffraction takes place, form test pattern, after 12 imagings of electronic imaging parts, receive by film 13.Film can be studied test result after washing.
Described vacuum pump 14 is used for vacuumizing.Vacuum meter 15 is used to monitor vacuum tightness.
Embodiment 2:
With reference to Fig. 2 is high time resolution reflection Electronic Speculum, and wherein the testing sample on the sample support adjusting parts 11 is the reflection sample, and incident control assembly 7 adopts aperture stops limit bundle; The target of target parts 6 adopts cluster; Being provided with the electromagnetic lens element between target parts 6 and the electron beam power spectrum control assembly focuses on electronics; Image receiving-member 13 is video screen and CCD, and all the other structures are identical with transmission electron microscope Fig. 1, only according to the requirement of test reflection sample image receiving-member 13 is located at the pattern imaging place of electron beam after the reflection of reflection testing sample.
Embodiment 3:
Make the high time resolution transmission electron microscope by Fig. 1.Adopt the miniaturization femto-second laser; Laser instrument 1 is placed in the target chamber 4; Cancellation laser entrance window 3; Laser instrument 1 is fixed with target parts 6 relative positions, presets laser polarization state; The target of target parts 6 adopts metal; Directly do low anti-processing of material surface at magnetic deflection field 8 inwalls of monoenergetic electron beam generation part.All the other are a kind of designs of miniaturization with embodiment 1.
Embodiment 4:
Press embodiment 3 and make transmission electron microscope, the target of target parts 6 adopts non-metal solid; The outgoing control assembly 10 employing activity edges of a knife; Enough far away apart from imaging (to the about 20cm of monocrystalline silicon); Image receiving-member 13 adopts video screen, and electron diffraction pattern is radiated on the video screen, Direct observation.All the other structures are with example 3.
Embodiment 5:
Embodiment 6:
Make the high time resolution transmission electron microscope by Fig. 1, adopt miniaturization High Power Femtosecond Laser device; Laser instrument 1 is placed in the target chamber 4; Incident control assembly 7 adopts the incident collimating aperture; The target of target parts 6 adopts cluster; Being provided with the electromagnetic lens element between target parts 6 and the electron beam power spectrum control assembly focuses on electronics; Outgoing control assembly 10 adopts aperture stop; 12 imagings of electronic imaging parts are set behind the outgoing control assembly 10; The multiple mode of image receiving-member 13 comprehensive employings is accepted means as image: carry out real-time regulated with video screen; Doing high precision with film forever gathers; Connect integrated data processing and the preservation that realization monitoring in real time and various uses were gathered, analyze or transmitted to computing machine with CCD, the lattice information after handling as direct output; Multi-screen is exported multiple information; Crosslinked with network technology and other detection process, more fully study in real time; And utilize multiple information format and multiple recording mode preservation information etc.This is a kind of comparatively comprehensively design.
Principle of work of the present invention is as follows:
The electron beam generation mechanism: utilize the target of ultra-short pulse laser bombardment target parts 6, produce the suprathermal electron pulse, as the work electron beam, its pulsewidth is less than psec (10
-13Second) magnitude.
The acquisition of monoenergetic electron beam: utilize the deflection characteristic of electronics in magnetic deflection field 8, use of the electronics separation of semicircle focusing principle, thereby obtain monoenergetic electron beam with different-energy.
Test pattern produces and gathers: utilize existing Electronic Speculum image-forming principle, when electron beam passes sample transmission or sample reflex time, electronics and testing sample interact, produce Bragg diffraction, form test pattern, through after the imaging, use multiple means logging test results such as film or CCD.
Claims (10)
1, a kind of electron microscope with high time resolution comprises ultrashort pulse laser (1), vacuum target chamber (4), light focusing element (5), target parts (6), electronics diaphragm or electron beam power spectrum control assembly (8), sample support adjusting parts (11), image receiving-member (13); It is characterized in that in vacuum target chamber (4) or outside be provided with ultrashort pulse laser (1), in vacuum target chamber (4), establish light focusing element (5) on the light path of the ultrashort laser pulse that laser instrument (1) produces, be provided with target parts (6) at the focus place of light focusing element (5); Target surface normal direction at target parts (6) is provided with electronics diaphragm or electron beam power spectrum control assembly; On electronics diaphragm or electron beam power spectrum control assembly outgoing electron passage, establish sample support and regulate parts (11), after sample support is regulated parts (11), be provided with image receiving-member (13).
2, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that described electronics diaphragm also replaces with the edge of a knife.
3, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that described electron beam power spectrum control assembly is made up of the incident control assembly (7) of magnetic deflection field (8) and incident end thereof and the outgoing control assembly (10) of exit end.
4, a kind of electron microscope with high time resolution as claimed in claim 3 is characterized in that described incident control assembly (7) is made up of direction and position control mechanism and collimating aperture/aperture stop.
5, a kind of electron microscope with high time resolution as claimed in claim 3 is characterized in that described magnetic deflection field (8) cavity inner wall is provided with light absorption part (9), or magnetic deflection field (8) cavity inner wall directly is made as low reflecting surface.
6, a kind of electron microscope with high time resolution as claimed in claim 3 is characterized in that described outgoing control assembly (10) is selected from a kind of in aperture stop, the edge of a knife
7, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that also being provided with accent target drone structure (2) between laser instrument (1) and target parts (6).
8, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that also being provided with the electromagnetic lens element between target parts (6) and electronics diaphragm/electron beam power spectrum control assembly.
9, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that also being provided with electronic imaging parts (12) between sample support adjusting parts (11) and image receiving-member (13).
10, a kind of electron microscope with high time resolution as claimed in claim 1 is characterized in that described image receiving-member (13) is selected from least a among film, video screen and the CCD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021208204A CN100399014C (en) | 2001-06-29 | 2002-06-03 | Electronic microscope with high time resolution |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN01119916 | 2001-06-29 | ||
| CN01119916.4 | 2001-06-29 | ||
| CNB021208204A CN100399014C (en) | 2001-06-29 | 2002-06-03 | Electronic microscope with high time resolution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1393691A true CN1393691A (en) | 2003-01-29 |
| CN100399014C CN100399014C (en) | 2008-07-02 |
Family
ID=25740419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021208204A Expired - Fee Related CN100399014C (en) | 2001-06-29 | 2002-06-03 | Electronic microscope with high time resolution |
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| Country | Link |
|---|---|
| CN (1) | CN100399014C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105143866A (en) * | 2013-02-20 | 2015-12-09 | B-纳米股份有限公司 | Scanning electron microscope |
| CN106847662A (en) * | 2017-01-16 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Based on the ultrafast electric diffraction apparatus that laser plasma drives |
| CN107062037A (en) * | 2017-05-12 | 2017-08-18 | 中国科学院苏州生物医学工程技术研究所 | Portable illuminator |
| CN107123584A (en) * | 2016-02-24 | 2017-09-01 | Fei 公司 | The research trends sample behavior in charged particle microscope |
| CN111694046A (en) * | 2020-07-24 | 2020-09-22 | 中国工程物理研究院核物理与化学研究所 | Single-energy gamma device |
| CN113543447A (en) * | 2020-04-13 | 2021-10-22 | 中国科学院上海光学精密机械研究所 | Neutron beam generating device based on laser accelerator |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4651220A (en) * | 1984-10-12 | 1987-03-17 | Fuji Photo Film Co., Ltd. | Method of recording and reproducing images produced by an electron microscope |
| JPH0630235B2 (en) * | 1985-06-11 | 1994-04-20 | 浜松ホトニクス株式会社 | High-time resolution electron microscope device |
| JP3422045B2 (en) * | 1993-06-21 | 2003-06-30 | 株式会社日立製作所 | Electron microscope for measuring composition and lattice strain and its observation method |
| US6246652B1 (en) * | 1997-12-05 | 2001-06-12 | Hitachi, Ltd. | Device using sensor for small rotation angle |
| CN2560091Y (en) * | 2001-06-29 | 2003-07-09 | 中国科学院物理研究所 | Electronic microscope with high time resolution |
-
2002
- 2002-06-03 CN CNB021208204A patent/CN100399014C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105143866A (en) * | 2013-02-20 | 2015-12-09 | B-纳米股份有限公司 | Scanning electron microscope |
| CN107123584A (en) * | 2016-02-24 | 2017-09-01 | Fei 公司 | The research trends sample behavior in charged particle microscope |
| US10340113B2 (en) | 2016-02-24 | 2019-07-02 | Fei Company | Studying dynamic specimen behavior in a charged-particle microscope |
| CN106847662A (en) * | 2017-01-16 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Based on the ultrafast electric diffraction apparatus that laser plasma drives |
| CN107062037A (en) * | 2017-05-12 | 2017-08-18 | 中国科学院苏州生物医学工程技术研究所 | Portable illuminator |
| CN113543447A (en) * | 2020-04-13 | 2021-10-22 | 中国科学院上海光学精密机械研究所 | Neutron beam generating device based on laser accelerator |
| CN111694046A (en) * | 2020-07-24 | 2020-09-22 | 中国工程物理研究院核物理与化学研究所 | Single-energy gamma device |
| CN111694046B (en) * | 2020-07-24 | 2022-06-07 | 中国工程物理研究院核物理与化学研究所 | Single-energy gamma device |
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| Publication number | Publication date |
|---|---|
| CN100399014C (en) | 2008-07-02 |
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Granted publication date: 20080702 Termination date: 20140603 |