CN1377462A - Detection of inclusions in glass - Google Patents
Detection of inclusions in glass Download PDFInfo
- Publication number
- CN1377462A CN1377462A CN00813573A CN00813573A CN1377462A CN 1377462 A CN1377462 A CN 1377462A CN 00813573 A CN00813573 A CN 00813573A CN 00813573 A CN00813573 A CN 00813573A CN 1377462 A CN1377462 A CN 1377462A
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- snotter
- glass
- scattering
- laser
- detected
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
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- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Light (34, 34a) from one or more lasers (32, 32a) is scanned across a sheet of glass (2). Light is directly incident on inclusions in the glass (2), and indirectly via reflection from the back surface of the glass. Light (38) scattered from an inclusion thus provides at least two scattering signals to a sensor (18), which may be analysed to determine the location, size and depth of the inclusion. Detected inclusions may be revisited and classified, into smooth scatterers such as bubbles and rough scatterers such as material defects, via a camera which records the pattern of scattered laser radiation. Nickel sulphide inclusions can be further classified via spectroscopic analysis. Modulation of the laser beams (34, 34a) improves accuracy and provides a timing mark for the scattered light.
Description
The present invention relates to detect the method and apparatus of snotter in the glass plate, particularly nickel sulfide (NiS) snotter.The invention still further relates to method and apparatus to detected snotter classification.
Background of invention
For many years, the relevant issues of snotter are known in the glass.Particularly, know have the heat of nickel sulfide snotter to strengthen or full tempered glass plate meeting spontaneous breaking in the last thirty years already.In brief, the appearance of nickel sulfide snotter can cause the fragmentation of glass.Unfortunately, these snotteres are extremely difficult gets rid of from manufacture process.They also are very difficult to detect.This causes potential unsafe glass to be used in the buildings.
The detection of nickel sulfide snotter and classification have confirmed it is very difficult problem.Develop the hot-dip process that keeps manufacturing glass at high temperature already.This theory is that nearly all glass that comprises the snotter that can cause that nature breaks can break in hot-dip process.This has been proved to be incorrect, and, many buildingss that built up are arranged now, using the glass that suffers spontaneous breaking owing to the effect of nickel sulfide snotter.In fact, glass is not because of being broken by the detected nickel sulfide snotter of hot-dip process, and the existing record of many examples that falls down from multi-story structure.
Propose many methods already, be used for discerning the nickel sulfide snotter of glass.One of them sees No. the 4697082nd, United States Patent (USP) (this patent transfers FlachglasAktiengesellschaft).This Flachglas patent disclosure a kind of disposal route, the flying spot (f that produces with laser; Y light spot) shines glass, detect the fault in material of glass.Detect and analyze snotter produced in the glass forward and light scattering backward.After in case glass is installed in the buildings, detect forward and light scattering backward generally just infeasible.The method that needs a kind of single side (normally outside).
United States Patent (USP) No. 5459330 (this patent transfers Thomaon-CSF) discloses other method.This patent has been described a kind of device, and the continuous transversal plane of irradiation glass plate also uses camera to come the optical radiation of detection of reflected.Produce two lines from being reflected in the image of the forward and backward surface of glass, these two lines define snotter may be positioned at wherein border.Be in bright spot between these two lines and be detected as snotter in the glass.Yet this device can not be discerned the character of snotter, neither be suitable for the device of on-the-spot scanning buildings upper glass.
The device that another kind is used to detect glass flaws is disclosed in No. the 4597665th, United States Patent (USP) (this patent transfers Tencor Instruments).The same with the device of described Flachglas, this Tencor measurement device glass plate is the laser beam of plane reflection up and down.In great majority were used, the both sides that detector are placed on tested glass were unpractical.
Summary of the invention
Purpose of the present invention provides a kind of method and apparatus, is used for detecting the glass snotter.
Another object of the present invention provides a kind of method and apparatus, is used for the detected snotter of glass is classified.
By following description, other purpose promptly can be apparent.
Summary of the invention
(although it may not be a scheme unique or that practical use is the widest) the invention belongs to a kind of device that detects snotter in the glass in a kind of scheme, comprising:
One or more laser instruments send one or more coherent radiation beams, point to glass with one or more known angles;
Be used for detecting device by the radiation of glass snotter scattering;
The device that is used for scanning coherent light beam across glass; With
Be used to write down the device of scattering snotter position.
Described device can further comprise the device that is used for the snotter classification.This device that is used for the snotter classification is suitable for comprising camera, and record is from the laser emission figure of the snotter institute scattering of detection.The described device that is used to classify has comprised that difference demonstrates the device of non-NiS snotter figure.
The described device that is used to classify further comprises the classification device, is used for definitely the NiS snotter that detects being sorted out.This classification device is suitable for certain spectral device, analyzes the optical radiation from the snotter scattering, and by spectral signature the optical radiation of scattering is sorted out.
In further scheme, the invention belongs to a kind of method that detects snotter in the glass, may further comprise the steps:
Glass surface is pointed in laser emission;
At scanning laser radiation on glass;
The radiation of detection snotter scattering from glass;
The coordinate of record snotter.
Correspondingly, described method also further may further comprise the steps: detect first of the first laser radiation beam scattering and detect optical radiation; Detect second of the second laser radiation beam scattering and detect optical radiation; And only detect optical radiation and second and detect under the isolated in a known way situation of optical radiation the coordinate of record snotter first.
Brief Description Of Drawings
Below describe the preferred embodiment of the invention with reference to the accompanying drawings, in the described accompanying drawing:
Fig. 1 is the schematic representation of apparatus that is used for detecting the glass snotter;
Fig. 2 is the side schematic view of the first embodiment detecting unit;
Fig. 3 is the side schematic view of the second embodiment detecting unit;
Fig. 4 is the side schematic view of taxon;
Fig. 5 is a synoptic diagram, and the light radiation patterns of smooth snotter emission is shown;
Fig. 6 is a synoptic diagram, and the light radiation patterns of coarse snotter emission is shown;
Fig. 7 is a synoptic diagram, and another view of the light radiation patterns of smooth snotter emission is shown;
Fig. 8 is the synoptic diagram in conjunction with the detector head of Fig. 2 detecting unit;
Fig. 9 is the synoptic diagram in conjunction with the detector head of Fig. 3 detecting unit;
Figure 10 is a time plot, and the method that detects the snotter size and the degree of depth is shown.
Preferred implementation describes in detail
Referring to Fig. 1, this synoptic diagram illustrates the device 1 that is used for detecting glass plate 2 snotteres.Device 1 comprises detector head 3, can scan on the zone of glass plate 2.In described preferred embodiment, detector head 3 is equipped with a plurality of detecting units, as detecting unit 4.Can the on-the-spot glass plate 2 that scans on buildings or the production line.
The mechanical framework 5 usefulness compacting aluminium of described device are made, and are in light weight and certain intensity arranged.This framework is made suitable size, to match with tested glass plate.Be appreciated that glass plate manufactures countless versions different size and shape.Therefore, mechanical framework must have certain adjustability, so that be suitable for different situations.Use vacuum cup 5a that framework 5 is fixed tightly on the windowpane 2.
Traverse rod 6 and detector head 3 can move in vertical rail 9 upper edge Y directions.Permanent torque motor 10 driving belts 11, thereby mobile traverse rod 6.Scrambler on the belt 11 provides positional information, combines with the information of stepper motor, calculates detector head 3 and be in the coordinate of indulging any position in the moving range on the rail 9 in detector head 3 movings range and at traverse rod 6 on traverse rod 6.Supporting rail 12 provides rigidity for framework 5.
Referring now to Fig. 2, the detector head 3 of first embodiment comprises at least one detecting unit 4, and this detecting unit comprises the laser assembly 13 that sends coherent radiation beam.A kind of suitable laser instrument is the semiconductor laser that operates in 635nm, the about 20mW of power.Be that following description is convenient, with laser modulation on given frequency, as 455Hz.It should be understood that particular laser is not most important for described device, and just choosing matches with described concrete application.
Detecting unit 4 also comprises a sensor 17 and sensor electronics instrument 18 at least, measures the optical radiation of any snotter institute scattering in the glass.Silicon photoelectric diode is suitable sensor, though also have other appropriate device, as be coupled to collecting fiber device (fibreopticcollector), CCD camera, video and the sensor array of photomultiplier.
The optical radiation 19 of scattering is gathered by object lens 20 and focusing lens 21. Lens 20,21 optical radiation with scattering are imaged on the sensor 17.If incoming laser beam is a line, can select to use the cylindrical lens (not shown) so that the optical radiation of scattering focuses on any of sensor.Snotter in the glass plays the effect of point source scatterer basically, and optical imaging system can be imaged on this scatterer on the described sensor well.
As can see from Figure 2, reflection 22 (from front surfaces 24 of glass 2) and reflection 23 (from the rear surfaces 25 of glass 2) are not gathered by lens 20,21.In addition, the scattering of front surface 24 and rear surface 24 is not imaged on the sensor 17 by optical system for collecting.Though collected some surface scattering, the optical physics device has filtered the optical radiation from forward and backward surface reflection or scattering from the space.Therefore, the signal that obtains from sensor electronics instrument 18 is mainly produced by the optical radiation of vitreum inscattering.
More specifically as described below, each snotter can produce two signals.A signal produces when this snotter of laser beam 16 direct irradiations.Another signal 25 is reflected and folded light beam produces when shining this snotter from the rear surface in this laser beam.Two signals occurring confirms snotter to occur in vitreum rather than on front or rear surface.In addition, these two signals must be estimated numerical value (time or distance) at interval, with record scatterer position.This standard helps avoid the error result that the unusual signal that produced by the strong scattering body on the glass pane surface causes.
A kind of method of judging the snotter size and the degree of depth below is described.
The configuration on how much, also used various wave filters, comprised that notch filter is to reduce bias light to improve the signal to noise ratio (S/N ratio) of detector head.
Prism 15 next-door neighbour's glass surfaces are placed.Prism 15 with spring load, and can move between outer baffle block on the support 28 26 and internal stop 27 in detector cell 4.This structure is guaranteed the main body of prism 15 with respect to detector head 3 internal detector unit 4, always is in known location.As described below, detector head 3 is rolled on the front surface of glass 2.Therefore, laser beam 16 is always known with respect to the position of glass 2, so can accurately write down the coordinate of the snotter that causes scattering in the glass.
As mentioned above, this laser instrument is adjustable, and optimized frequency is at 455Hz.Regulate the optical radiation that laser instrument makes it possible to the synchronous detection scattering, and reduce the influence of bias light.In addition, sweep velocity is perhaps also non-constant on whole scanning area, therefore, needs independent markers, is used for determining the size and the degree of depth.To described in detail below in conjunction with Figure 10 on the one hand this.
Fig. 3 illustrates the detector cell 30 of another optional embodiment.With the main difference of first embodiment be that two laser instrument housings 31,31a are arranged.Each housing is equipped with laser instrument 32,32a and corresponding focusing lens 33, 33a.Laser beam 34,34a point to glass plate 2 by adjustable mirror 35,35a.
Different with first embodiment, optical element is fixed in the detecting unit 30 (except that being used to regulate the element of mirror 35,35a), and unit 30 is carried by spring, thereby maintenance approaches glass surface.Compare with first embodiment, this has simplified the structure of detecting unit.
In second embodiment, laser beam 34,34a backpropagation each other.When detector head 3 scans across glass plate 2 surfaces, any snotter will produce scattering from first laser beam 34 (and subsequently from another laser beam 34a).This scattered signal with combine the described forescatering of Fig. 2 and scattered signal is similar backward, but these two signals roughly are same magnitudes.In Fig. 2 embodiment, scattered signal is a lot of a little less than than forescatering signal backward.Based on this, preferred second embodiment.
As for first embodiment, only the interval of expectation, the position of just writing down scatterer are arranged detecting two signals.The interval of this expectation can be in the certain stepping amount of stepper motor, perhaps in the regular hour section, depends on the sweep velocity of detector head.
In second embodiment, each laser beam is transferred in different frequencies, as laser beam 34 at 455Hz and laser beam 34a at 370Hz, can be convenient to some application.So electronic device 18 can be configured to distinguish signal, thereby promptly provide extra size to distinguish, with the snotter position and the character of accurate record detection from each laser instrument.For example, two snotter each intervals that are present in the glass equal laser beam arrive snotter apart from the time, first embodiment just can not correctly be distinguished these two snotteres.This is because second scattered signal can be the scattering backward from first snotter, also can be the forescatering from second snotter.Yet, the signal that frequency discrimination can the district office be accepted system.
The synoptic diagram of Fig. 3 illustrates laser beam 34,34a backpropagation each other, and meets in glass back.It should be understood that this is not a kind of basic structure.Each laser beam can different angles be pointed to glass, but the record of the snotter position calculation that detects needs adjustment, with corresponding geometrical construction.
Similarly, laser beam 34,34a can equal angular point to glass plate, separate slightly but be arranged in the back side.Though Fig. 2 and Fig. 3 illustrate the optical radiation of optical system for collecting collection from special some institutes scattering, be appreciated that this only is signal, in fact the optical system for collecting collection is from any optical radiation of optical system visual field inscattering.
The inventor recognizes that can to make two-laser adjacent, and coherent optical radiation is pointed to glass.This is not a kind of preferred version.
On the contrary, coarse scatterer is the constructive interference figure of generation rule not, and produces figure as shown in Figure 6.Can see among Fig. 6, the blackening that has speck that constructive interference causes and destructive interference to cause, but do not show the regular frequency band that expression has specular reflector.Therefore, can use video image that the snotter that detects is divided into smooth scatterer class or coarse scatterer class.Since the NiS coarse texture in the known glass, therefore, any detected snotter such as generation rule interferogram, can get rid of is the NiS snotter.
Be appreciated that in some instances and will use camera, to catch the snotter of broad visual field.This can cause producing the snotter imaging in mode shown in Figure 7.Information content essence is identical, but performance is different.
Snotter for further classification and Detection can use spectral technique.Described spectral technique relates to the spectral analysis of scattered light radiation, according to spectral signature snotter is sorted out.For example, scattered light radiation may have a kind of special Raman scattering signal, and this classifies as NiS with snotter.Alternatively, can use different classification heads, comprise that emission is in the laser instrument of the optical radiation of blue light spectral coverage, and the fluorescigenic spectrometer of measuring N iS.
For increasing the efficient of scanning glass plate, several detecting units and taxon can be installed in the single detector head.Fig. 8 illustrates a kind of front view of typical detector head.Detector head 3 comprises three detecting units 4 and two taxons 40.Can also see roller 41 among Fig. 8, this roller rolls on glass surface, makes the position of the relative glass of detector head keep constant, and no matter the flaw of glass surface.
Fig. 9 illustrates the detector head 39 that is used for second embodiment, and it is slightly different with detector head 3, has considered second laser instrument in the detecting unit 30.This detector head comprises three detecting units and two taxons.Four rolling 42 relative glass support detector head 39.
During operation, detector head 3 is advanced along directions X, and to scan a 10mm on glass rectangular for each scanning element, subsequently, scanning next rectangular before, moving along y-axis shift.Find that described preferred embodiment can reach every square metre of sweep velocity of 2.5 minutes.
As mentioned above, record detects the coordinate of snotter in glass.Be not all snotteres all be NiS.In fact, in a typical glass plate, detected snotter has only very that small scale is NiS.After glass was scanned, detector head turned back to all and is detected the coordinate of snotter and with taxon snotter is classified.
Under the production line situation, but fixed frame passes through the glass plate on the conveyer under framework.The data that obtain can combine with the cutting operation of glass, to optimize cutting, remove NiS snotter known or that suspect.The operation and the above-mentioned applications similar of device.
When examined glass has been installed on the buildings,, need extra dimensional parameters for the needs that accurately write down.Usually, described device installs to and is used for carrying out from the outside the existing equipment that outward appearance is safeguarded.So, promptly can window numbering or other suitable parameter position of writing down this outward appearance service equipment.
Because the laser light radiation is regulated, therefore, base in the time of just may using laser pulse is from estimating the size and the degree of depth of snotter available from the signal of scattered light radiation.Be appreciated that first embodiment of single laser instrument, perhaps second embodiment of twin-laser detects two signals for each snotter, as shown in figure 10.Main scattered signal 50 can be detected when the inswept snotter of first laser beam.Continue with scanning, second laser beam or laser beam from the reflection at the back side by the scattering of snotter institute, thereby provide time scattered signal 51.The mistiming Δ t of main scattered signal 50 and time scattered signal 51 has indicated the snotter degree of depth.The time that time scattered signal 51 produces after main scattered signal 50, depend on the sweep velocity of detector head 3,39.
As shown in figure 10, each scattered signal has width Delta w.The deration of signal, or the number of scattering laser pulse have more specifically provided the indication of snotter size.For given sweep velocity, big snotter is than the little more laser pulse of snotter scattering.Suppose that pulse rate is known, and the carriage gait of march is known, calculate with the snotter size that is equal to the scattering pulse number be the part simple thing.
As can be seen, can detect the snotter of size with described device more than or equal to 50 μ m.In addition, these snotteres can be divided into non-NiS class or opposite accurately.
Described device is convenient at the enterprising line operate of ordinary individual's computing machine.Personal computer provides signal, to stop or starter motor, opens and closes laser instrument, and the coordinate that writes down detected snotter.These functions also can be realized by nonshared control unit.
The purpose of this instructions all is to describe the present invention in the whole text, rather than limits the invention to arbitrary particular combinations of each feature.
Claims (16)
1. device that is used for detecting the glass snotter comprises:
One or more laser instruments with one or more known angles, send the coherent radiation beam of one or more sensing glass;
Be used for detecting the device of the optical radiation of glass snotter institute scattering;
Be used for scanning the device of described coherent light beam across glass;
Be used to write down the device of scattering snotter position.
2. device as claimed in claim 1 comprises two laser instruments, and described two laser instruments are positioned at the both sides of described device, is used for detecting the optical radiation of glass snotter institute scattering, and described two laser instruments point to glass with coherent radiation beam, makes its backpropagation.
3. device as claimed in claim 1 further comprises the device that is used for detected snotter classification.
4. device as claimed in claim 1 further comprises the device that is used for the classification of detected snotter, and the wherein said device that is used to classify comprises camera, writes down the laser emission figure of detected snotter institute scattering.
5. device as claimed in claim 1, further comprise the device that is used for detected snotter classification, wherein said being used for comprises camera (this camera record detects the laser emission figure of snotter institute scattering) with the device of detected snotter classification, and the device (it is not NiS that this figure is indicated certain snotter) of differentiating figure.
6. device as claimed in claim 1, further comprise the device that is used for detected snotter classification, the described device that is used to classify comprises continuous wave laser (this continuous wave laser sends the coherent radiation beam that direct detection goes out snotter) and camera (this camera record detects the laser emission figure of snotter institute scattering).
7. device as claimed in claim 1 further comprises the classification device, is used for the snotter that detects to NiS is sorted out.
8. device as claimed in claim 7, wherein said classification device is a spectral device, analyzes the optical radiation of snotter scattering, and according to spectral signature the optical radiation of scattering is sorted out.
9. device as claimed in claim 1, wherein said one or more laser instruments can be transferred to a given frequency.
10. device as claimed in claim 1 wherein has two laser instruments, yet is transferred to known different frequency respectively.
11. a method that detects snotter in the glass comprises step:
Laser emission is pointed to the surface of glass;
Optical radiation on the scanning glass;
Detect the optical radiation of snotter scattering in the glass;
Write down the coordinate of detected snotter.
12. as the method for claim 11, the step of the optical radiation of wherein said detection snotter scattering comprises:
Detect first of the first laser radiation beam scattering and detect optical radiation;
Detect second of the second laser radiation beam scattering and detect optical radiation;
Only detect optical radiation and described second and detect optical radiation when spaced apart in a known way, the coordinate of record snotter described first.
13. as the method for claim 12, wherein said second light beam is the reflection of described first light beam.
14., further comprise step as the method for claim 11:
Observe detected snotter with camera;
According to the laser emission figure of detected snotter scattering, and this snotter is classified.
15., further comprise step as the method for claim 11:
Observe detected snotter with camera;
According to the laser emission figure of detected snotter scattering, and this snotter is classified;
Distinguish the snotter that is not NiS.
16. as the method for claim 11, further comprise step: spectral analysis is carried out in the laser emission to detected snotter scattering; The snotter that will be identified as NiS according to spectral characteristic is sorted out.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPQ2622A AUPQ262299A0 (en) | 1999-09-02 | 1999-09-02 | Detection of inclusions in glass |
AUPQ2622 | 1999-09-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1377462A true CN1377462A (en) | 2002-10-30 |
Family
ID=3816792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN00813573A Pending CN1377462A (en) | 1999-09-02 | 2000-09-01 | Detection of inclusions in glass |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1210586A4 (en) |
JP (1) | JP2003508786A (en) |
CN (1) | CN1377462A (en) |
AU (1) | AUPQ262299A0 (en) |
CA (1) | CA2384005A1 (en) |
HK (1) | HK1049042A1 (en) |
WO (1) | WO2001018532A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101449151B (en) * | 2006-03-29 | 2011-06-29 | 皮尔金顿集团有限公司 | Glazing inspection |
CN101790679B (en) * | 2007-09-04 | 2012-05-09 | 旭硝子株式会社 | Method and device for detecting micro foreign matter within transparent plate |
CN111712473A (en) * | 2018-03-07 | 2020-09-25 | 佳殿玻璃有限公司 | Method and system for detecting inclusions in float glass based on wavelength analysis |
CN116835863A (en) * | 2023-07-14 | 2023-10-03 | 连云港双石特种玻璃有限公司 | Processing equipment capable of accurately controlling thickness of special glass and application method thereof |
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US7142295B2 (en) * | 2003-03-05 | 2006-11-28 | Corning Incorporated | Inspection of transparent substrates for defects |
DE102004005019A1 (en) * | 2004-01-30 | 2005-08-18 | Isra Glass Vision Gmbh | Method for determining the depth of a defect in a glass ribbon |
WO2006029536A1 (en) * | 2004-09-17 | 2006-03-23 | De.Vice Scientific Incorporated | Optical inspection of flat media using direct image technology |
DE102013002602B4 (en) | 2013-02-15 | 2022-05-05 | Hegla Boraident Gmbh & Co. Kg | Method and device for detecting particles in glass |
DE102013107215B3 (en) | 2013-07-09 | 2014-10-09 | Heraeus Quarzglas Gmbh & Co. Kg | Method for producing a mirror substrate blank made of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank |
US10481097B1 (en) * | 2018-10-01 | 2019-11-19 | Guardian Glass, LLC | Method and system for detecting inclusions in float glass based on spectral reflectance analysis |
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1999
- 1999-09-02 AU AUPQ2622A patent/AUPQ262299A0/en not_active Abandoned
-
2000
- 2000-09-01 WO PCT/AU2000/001032 patent/WO2001018532A1/en not_active Application Discontinuation
- 2000-09-01 CA CA002384005A patent/CA2384005A1/en not_active Abandoned
- 2000-09-01 CN CN00813573A patent/CN1377462A/en active Pending
- 2000-09-01 JP JP2001522071A patent/JP2003508786A/en active Pending
- 2000-09-01 EP EP00958046A patent/EP1210586A4/en not_active Withdrawn
-
2002
- 2002-12-05 HK HK02108878.8A patent/HK1049042A1/en unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101449151B (en) * | 2006-03-29 | 2011-06-29 | 皮尔金顿集团有限公司 | Glazing inspection |
CN101790679B (en) * | 2007-09-04 | 2012-05-09 | 旭硝子株式会社 | Method and device for detecting micro foreign matter within transparent plate |
CN111712473A (en) * | 2018-03-07 | 2020-09-25 | 佳殿玻璃有限公司 | Method and system for detecting inclusions in float glass based on wavelength analysis |
CN111712473B (en) * | 2018-03-07 | 2022-02-25 | 佳殿玻璃有限公司 | Method and system for detecting inclusions in float glass based on wavelength analysis |
CN116835863A (en) * | 2023-07-14 | 2023-10-03 | 连云港双石特种玻璃有限公司 | Processing equipment capable of accurately controlling thickness of special glass and application method thereof |
CN116835863B (en) * | 2023-07-14 | 2023-12-12 | 连云港双石特种玻璃有限公司 | Processing equipment capable of accurately controlling thickness of special glass and application method thereof |
Also Published As
Publication number | Publication date |
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WO2001018532A1 (en) | 2001-03-15 |
CA2384005A1 (en) | 2001-03-15 |
EP1210586A4 (en) | 2002-12-04 |
JP2003508786A (en) | 2003-03-04 |
AUPQ262299A0 (en) | 1999-09-23 |
HK1049042A1 (en) | 2003-04-25 |
EP1210586A1 (en) | 2002-06-05 |
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