CN1308656C - Apparatus for measuring parallelity of laser beam - Google Patents
Apparatus for measuring parallelity of laser beam Download PDFInfo
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- CN1308656C CN1308656C CNB2005100287360A CN200510028736A CN1308656C CN 1308656 C CN1308656 C CN 1308656C CN B2005100287360 A CNB2005100287360 A CN B2005100287360A CN 200510028736 A CN200510028736 A CN 200510028736A CN 1308656 C CN1308656 C CN 1308656C
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Abstract
The present invention relates to an apparatus for measuring the parallelity of laser beams. The present invention adopts a detected light beam, a diaphragm, a convergent lens, a semi-transparent and semi-reflecting mirror, two column lenses, two four-quadrant detectors and a computer to form the measuring apparatus, wherein the convergent lens, the semi-transparent and semi-reflecting mirror, the two column lenses and the two four-quadrant detectors form a light beam parallelity detector. The apparatus is based on the image diffusion focusing error detection to detect the parallelity of light beams, and adopts the differential method to eliminate detection error caused by the off-axis of incidence light, the present invention can own arbitrary sensitivity and linear ranges by designing an optical system, and is especially suitable for measuring small caliber with high quality and laser beams with small divergence angle and rotary symmetry.
Description
Technical field
The invention belongs to laser technology, is a kind of device of measuring laser beam collimation.Be mainly used in the measurement of the angle of divergence of the detection of the laser beam divergent angle behind the collimation and small divergence angle, rotational symmetric laser beam.
Background technology
The laser collimator of the right alignment of measurement big machinery mesopore, axle system and the linearity on plane, flatness, the depth of parallelism, laser range finder, in laser atmospheric surveillance and the wireless light communication, all need the collimated laser light light beam, the collimation of laser beam has very big influence to the performance of surveying instrument, communication quality etc.Therefore, the detection range of application of collimation parallelity of laser beam is bigger.The collimated laser beam collimation is weighed by the far-field divergence angle of light beam.
Measuring the collimated laser beam collimation at present mainly realizes by interference technique.Tested light beam is divided into two-beam, produces in an appropriate location then and interferes, if incident beam is a directional light, then the interference fringe of Chan Shenging is the vertical bar line or does not have striped.This method accuracy of measurement is higher.But also there is following defective:
1) interferometer costs an arm and a leg;
2) volume of general interferometer is bigger, uses inconvenient;
3) vibrations are bigger to measuring influence;
4) angular range that can measure is less.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiency of above-mentioned technology formerly, and a kind of device of measuring laser beam collimation is provided, and it can be fast, measuring laser beam collimation easily.
Basic design of the present invention is:
The present invention is based on the Astigmatism methord focusing error and surveys the measurement of carrying out parallel beam, constitutes the parallel beam detecting device by assembling object lens, semi-transparent semi-reflecting lens, two post lens and two 4 quadrant detectors.And adopt differential method to eliminate because the detecting error that incident light causes from axle.
Technical solution of the present invention is as follows:
A kind of device of measuring laser beam collimation, its formation is: be provided with diaphragm, convergent lens, semi-transparent semi-reflecting lens, the first post lens, first 4 quadrant detector successively with optical axis ground, reflected light direction at described semi-transparent semi-reflecting lens, be the second post lens, second 4 quadrant detector successively promptly perpendicular to described optical axis direction, the described first post lens and the second post lens are symmetrical about the light splitting surface of described semi-transparent semi-reflecting lens, and the signal output part of described first 4 quadrant detector and second 4 quadrant detector links to each other with input end and computer;
The astigmatism direction of the branch slot of described first 4 quadrant detector and the described first post lens is at 45, the astigmatism direction of the branch slot of described second 4 quadrant detector and the described second post lens is at 45, hot spot is corresponding with the minor axis of hot spot on second 4 quadrant detector at the major axis on first 4 quadrant detector, and hot spot is corresponding with the major axis of hot spot on second 4 quadrant detector at the minor axis on first 4 quadrant detector;
Utilize the method for the measurement device parallel beam of described measuring beam collimation, comprise the following steps:
1. with the optical axis alignment of apparatus of the present invention light beam to be measured, make light beam to be measured along optical axis incident;
2. starter gear is measured automatically, by Computer Processing, obtains error signal
In the formula: A
1, A
2, A
3, A
4Be respectively the area of the hot spot of four quadrants that impinge upon first 4 quadrant detector; B
1, B
2, B
3, B
4Be respectively the area of the hot spot of four quadrants that impinge upon second 4 quadrant detector;
In linear zone, the relation of H and angle of divergence θ can be expressed as the θ into H=K, and wherein, K is and the focal length of detector gain, convergent lens, the relevant coefficient of focal length of post lens.
Described convergent lens, the first post lens and the second post lens are achromat.
The present invention has following advantage with respect to prior art:
1. cheap;
2. the instrument volume is little, measures quick, easy;
3. measuring accuracy depends primarily on the machining precision and the assembly precision of each optical element, and vibration influence is less;
4. can be by design optical system---the distance between focal length, convergent lens and the post lens of selection convergent lens and post lens, the position of 4 quadrant detector, to have any sensitivity and the range of linearity; Especially it is high-quality small-bore to be fit to measurement, the laser beam with rotational symmetry of small divergence angle.
5. convergent lens and post lens all can be made the achromat in the certain limit, promptly all can use when the incident of different wave length light beam and need not adjust light path.
Description of drawings
Fig. 1 is the structural representation of measuring laser beam collimation device embodiment of the present invention.
Fig. 2 is the vertical view of second 4 quadrant detector 8 among Fig. 1.
Fig. 3 is the right side view of first 4 quadrant detector 7 among Fig. 1.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
See also Fig. 1 earlier, Fig. 1 is the structural representation of the device embodiment of measuring laser beam collimation of the present invention.As seen from the figure, the formation of the device of measuring laser beam collimation of the present invention is: be provided with diaphragm 2 successively with optical axis ground, convergent lens 3, semi-transparent semi-reflecting lens 4, the first post lens 5, first 4 quadrant detector 7, reflected light direction at described semi-transparent semi-reflecting lens 4, be the second post lens 6 successively promptly perpendicular to described optical axis direction, second 4 quadrant detector 8, the described first post lens 5 and the second post lens 6 are symmetrical about the light splitting surface of described semi-transparent semi-reflecting lens 4, and the signal output part of described first 4 quadrant detector 7 and second 4 quadrant detector 8 links to each other with the input end of computing machine 9.The astigmatism direction of the branch slot of described first 4 quadrant detector 7 and the described first post lens 5 is at 45, the astigmatism direction of the branch slot of described second 4 quadrant detector 8 and the described second post lens 6 is at 45, hot spot is corresponding with the minor axis of hot spot on second 4 quadrant detector 8 at the major axis on first 4 quadrant detector 7, and hot spot is corresponding with the major axis of hot spot on second 4 quadrant detector 8 at the minor axis on first 4 quadrant detector 7.Described convergent lens 3, the first post lens 5 and the second post lens 6 are achromat.
Utilize the method for the measurement device parallel beam of measuring laser beam collimation of the present invention, comprise the following steps:
1. with the optical axis alignment of apparatus of the present invention light beam to be measured, make light beam to be measured along optical axis incident;
2. starter gear is measured automatically, by Computer Processing, obtains error signal
In the formula: A
1, A
2, A
3, A
4Be respectively the area of the hot spot of four quadrants 701,702,703,704 that impinge upon first 4 quadrant detector 7, referring to Fig. 3;
B
1, B
2, B
3, B
4Be respectively the area of the hot spot of four quadrants 801,802,803,804 that impinge upon second 4 quadrant detector 8, referring to Fig. 2;
The relation of H and angle of divergence θ can be expressed as the θ into H=K in linear zone, and wherein, K is and the focal length of detector gain, convergent lens, the relevant coefficient of focal length of post lens.
The course of work of the present invention is as follows:
Tested light beam 1 makes incident beam become convergent beam through passing through convergent lens 3 behind the diaphragm 2 again; This convergent beam 50% through inciding after semi-transparent semi-reflecting lens 4 transmissions on the first post lens 5, on the astigmatism direction of the first post lens 5, produce astigmatism; Other 50% incides on the second post lens 6 after semi-transparent semi-reflecting lens 4 reflections, through producing astigmatism behind the second post lens 6 on the astigmatism direction of the second post lens 6.The optical axis coincidence of the optical axis of the first post lens 5 and convergent lens 3, the position of the first post lens 5, the second post lens 6 is about the light splitting surface symmetry of semi-transparent semi-reflecting lens 4.
The modes of emplacement of described post lens and 4 quadrant detector makes, the major axis of hot spot on corresponding second 4 quadrant detector 8 of the minor axis on first 4 quadrant detector 7, the minor axis of hot spot on corresponding second 4 quadrant detector 8 of the major axis on first 4 quadrant detector 7.So just can promptly eliminate the error of tested light beam when axle, can not influence the sensitivity of the error signal that obtains at last again, because respective quadrants is subtracted each other to angle.
First 4 quadrant detector 7, second 4 quadrant detector 8 that is placed on correct position receives the light beam that sees through the first post lens 5, the second post lens 6 respectively, and convert it to electric signal carry out the current-voltage conversion, through sending into the angle of divergence that can obtain incident beam 1 after computing machine 9 carries out a series of computings after the preposition amplification.Weigh the collimation of light beam with the angle of divergence of light beam.
The area of hot spot that impinges upon four quadrants 701,702,703,704 of first 4 quadrant detector 7 is respectively A
1, A
2, A
3, A
4, the area of hot spot that impinges upon four quadrants 801,802,803,804 of second 4 quadrant detector 8 is respectively B
1, B
2, B
3, B
4The error signal that the electric signal of first 4 quadrant detector 7,8 outputs of second 4 quadrant detector obtains after plus-minus, normalization computing:
The relation of H and angle of divergence θ can be expressed as the θ into H=K in linear zone
Wherein, K is and the focal length of detector gain, convergent lens, the relevant coefficients such as focal length of post lens.H is directly proportional with the angle of divergence of tested light beam in linear zone, for requiring more accurate measurement, can directly be drawn the angle of divergence of tested light beam again by the error signal that obtains by demarcating.
In the present embodiment, the aperture of diaphragm 2 is D=8mm; The focal length of convergent lens 3 is 20.2mm; The focal length of the first post lens 5, the second post lens 6 is 1000mm; Distance between the distance between first 4 quadrant detector 7 and the first post lens 5 and second 4 quadrant detector 8 and the second post lens 6 is 20mm; The length of side of first 4 quadrant detector 7, second 4 quadrant detector, 8 single quadrants is 0.08mm; Incident optical power is 5mW; The maximum angle of divergence that can survey is 2mrad.
H is directly proportional with incident optical power, and the gained error signal is carried out normalization: divided by incident optical power, get H0.
The corresponding relation of H0 value and angle of divergence θ such as following table:
| The angle of divergence (rad) | 0 | 0.000 2 | 0.000 4 | 0.000 6 | 0.000 8 | 0.001 0 | 0.001 2 |
| H0 after the normalization | 0 | 0.031 7 | 0.062 8 | 0.092 7 | 0.121 1 | 0.147 6 | 0.172 0 |
| Beam divergence angle (rad) | 0 | 0.00002 | 0.00004 | 0.00006 | 0.00008 |
| H0 after the normalization | 0 | 0.0032 | 0.0064 | 0.0095 | 0.0127 |
Claims (2)
1, a kind of device of measuring laser beam collimation, be characterised in that its formation is: be provided with diaphragm (2) successively with optical axis ground, convergent lens (3), semi-transparent semi-reflecting lens (4), the first post lens (5), first 4 quadrant detector (7), reflected light direction at described semi-transparent semi-reflecting lens (4), be the second post lens (6) successively promptly perpendicular to described optical axis direction, second 4 quadrant detector (8), the described first post lens (5) and the second post lens (6) are symmetrical about the light splitting surface of described semi-transparent semi-reflecting lens (4), and the signal output part of described first 4 quadrant detector (7) and second 4 quadrant detector (8) links to each other with the input end of computing machine (9);
The astigmatism direction of the branch slot of described first 4 quadrant detector (7) and the described first post lens (5) is at 45, the astigmatism direction of the branch slot of described second 4 quadrant detector (8) and the described second post lens (6) is at 45, hot spot is corresponding with the minor axis of hot spot on second 4 quadrant detector (8) at the major axis on first 4 quadrant detector (7), and hot spot is corresponding with the major axis of hot spot on second 4 quadrant detector (8) at the minor axis on first 4 quadrant detector (7);
Utilize the method for the measurement device parallel beam of described measuring laser beam collimation, comprise the following steps:
1. with the optical axis alignment of apparatus of the present invention light beam to be measured, make light beam to be measured along optical axis incident;
2. starter gear is measured automatically, by Computer Processing, obtains error signal
In the formula: A
1, A
2, A
3, A
4Be respectively the area of the hot spot of four quadrants (701) of impinging upon first 4 quadrant detector (7), (702), (703), (704);
B
1, B
2, B
3, B
4Be respectively the area of the hot spot of four quadrants (801) of impinging upon second 4 quadrant detector (8), (802), (803), (804);
The relation of H and angle of divergence θ can be expressed as the θ into H=K in linear zone, and wherein, K is and the focal length of detector gain, convergent lens, the relevant coefficient of focal length of post lens.
2, the device of measuring laser beam collimation according to claim 1 is characterized in that described convergent lens (3), the first post lens (5) and the second post lens (6) are achromat.
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|---|---|---|---|
| CNB2005100287360A CN1308656C (en) | 2005-08-12 | 2005-08-12 | Apparatus for measuring parallelity of laser beam |
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|---|---|---|---|
| CNB2005100287360A CN1308656C (en) | 2005-08-12 | 2005-08-12 | Apparatus for measuring parallelity of laser beam |
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| CN1308656C true CN1308656C (en) | 2007-04-04 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101793508A (en) * | 2010-03-23 | 2010-08-04 | 长春理工大学 | Device for measuring parallelism of transmission shaft and receiving shaft of laser distance measuring equipment based on focal plane scanning |
| TWI472712B (en) * | 2012-12-07 | 2015-02-11 | Univ Nat Formosa | Vertical and parallelism detection system and its detection method |
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|---|---|---|---|---|
| CN101261119B (en) * | 2008-05-06 | 2012-01-04 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Light beam parallelism and collimating fault checking method |
| CN101718534B (en) * | 2009-12-22 | 2011-01-19 | 中国科学院长春光学精密机械与物理研究所 | Parallelism detector for optical axis of multi-optical system |
| CN102914373A (en) * | 2012-11-20 | 2013-02-06 | 天津理工大学 | Hartmann wave-front sensor based on micro-cylindrical lens array |
| CN103575239B (en) * | 2013-11-15 | 2016-03-23 | 南京信息工程大学 | Light beam parallelism pick-up unit and method |
| CN103822593B (en) * | 2014-03-17 | 2017-03-22 | 沈阳飞机工业（集团）有限公司 | Device and method for measuring deviation from cylindrical form of inner hole of large-size pipe fitting |
| CN104154882B (en) * | 2014-07-10 | 2017-06-13 | 哈尔滨工业大学 | Dual-beam device for detecting parallelism and method based on differential confocal measurement |
| CN106872754B (en) * | 2017-01-24 | 2019-06-07 | 福州大学 | The linear optics current sensor and detection method realized based on 4 quadrant detector |
| CN108375453B (en) * | 2018-04-27 | 2024-04-12 | 中国科学院西安光学精密机械研究所 | Vertical adjustment system and method for X-ray focusing lens |
| CN111812620B (en) * | 2020-07-03 | 2023-05-02 | 山东省科学院海洋仪器仪表研究所 | Laser radar transmitting optical axis and receiving optical axis calibration method |
| CN113959372A (en) * | 2021-10-25 | 2022-01-21 | 中国航空工业集团公司北京长城计量测试技术研究所 | High-sensitivity auto-collimation two-dimensional photoelectric angle measuring device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052734A (en) * | 1989-12-21 | 1991-07-03 | 清华大学 | Laser parallel degree and verticality measuring instrument and measuring method thereof |
| US5430539A (en) * | 1990-03-21 | 1995-07-04 | Pruftechnik Dieter Busch Ag | Method and arrangement for checking alignment of body axes for parallelism |
| CN1624421A (en) * | 2003-12-01 | 2005-06-08 | 富士能株式会社 | Depth of parallelism measuring method |
-
2005
- 2005-08-12 CN CNB2005100287360A patent/CN1308656C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1052734A (en) * | 1989-12-21 | 1991-07-03 | 清华大学 | Laser parallel degree and verticality measuring instrument and measuring method thereof |
| US5430539A (en) * | 1990-03-21 | 1995-07-04 | Pruftechnik Dieter Busch Ag | Method and arrangement for checking alignment of body axes for parallelism |
| CN1624421A (en) * | 2003-12-01 | 2005-06-08 | 富士能株式会社 | Depth of parallelism measuring method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101793508A (en) * | 2010-03-23 | 2010-08-04 | 长春理工大学 | Device for measuring parallelism of transmission shaft and receiving shaft of laser distance measuring equipment based on focal plane scanning |
| TWI472712B (en) * | 2012-12-07 | 2015-02-11 | Univ Nat Formosa | Vertical and parallelism detection system and its detection method |
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| CN1731085A (en) | 2006-02-08 |
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