CN1300562C - Model parameter calibrating and nontinear correcting method of piezoelectric actuator in scanning probe microscope - Google Patents
Model parameter calibrating and nontinear correcting method of piezoelectric actuator in scanning probe microscope Download PDFInfo
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Abstract
The present invention relates to a method for the parameter calibration and the non-linear correction of a piezoelectric actuator in a scanning probe microscopy. The method provided by the present invention comprises: (1) scanning the sample of a standard optical grating to obtain the SPM image of the standard optical grating; (2) utilizing model parameter calibration software of the piezoelectric actuator to obtain the model parameter of the piezoelectric actuator; (3) carrying out data conversion before non-linear on-line correction; (4) carrying out non-linear correction in an on-line way. The present invention is based on the model parameter calibration software of the piezoelectric actuator of the SPM image of the standard optical grating sample to obtain the model parameter of the piezoelectric actuator and carry out the non-linear correction of the piezoelectric actuator. The characteristic twist of the SPM image is eliminated, and the complicated degree of the calibration of an SPM product is greatly reduced.
Description
Technical Field
The invention relates to a piezoelectric actuator model parameter calibration and nonlinear correction method in a Scanning Probe Microscope (SPM).
Background
SPM series products utilize different phase interactions of probes and samples to detect physical and chemical properties of surfaces or interfaces on a nanometer scale. The requirement of controlling the needle point to scan on the surface of a sample with high precision is difficult to achieve by using common mechanical control. The piezoelectric actuator (PZT for short) has the advantages of high precision, high response speed, good controllability and the like, thereby becoming a popular choice for micro-displacement actuators. The SPM uses the inverse piezoelectric effect of PZT as a piezoelectric scanner (actuator) in the x, y, and z directions. When the applied voltage is small, the amount of deformation of the PZT is in a linear relationship with the applied voltage. In the x and y directions, triangular waveform driving voltages with different frequencies are applied in a certain sequence, so that the probe performs raster motion on the surface of the sample to realize scanning. Meanwhile, a closed-loop control strategy is adopted to ensure that the needle point-sample height is constant, the relative fluctuation height on the grating track point on the surface of the sample can be calculated through the voltage value added on the z-direction driver, and a scanning image reflecting the surface appearance of the sample can be obtained on a screen after computer reconstruction.
However, due to the influence of factors such as the piezoelectric material, the manufacturing process, and the polarization direction of the piezoelectric electrode, the input-output of the actual PZT piezoelectric scanner can be approximated to linear characteristics only in a small range, and generally exhibits nonlinear characteristics such as hysteresis and creep. In SPM applications, especially in the wide-range scanning mode, the nonlinearity of the inverse piezoelectric effect of the piezoelectric scanner is significantly enhanced. If the non-linearity cannot be corrected well, distortion of image features is inevitably caused.
In many documents, the relationship between the scanning coordinate system and the spatial coordinate system is analyzed, and the SPM image data is post-processed, that is, an Offline processing method (Offline Process) is used to implement PZT nonlinear correction. However, since the SPM image distortion is related not only to the PZT input-output characteristics but also to the sample characteristics and the orthogonality of the x and y axes, the image post-processing becomes extremely complicated. Therefore, in order to avoid the disadvantage, the method only relates to the PZT input-output characteristic, and is independent of other factors, and it is more convenient and reasonable to adjust the voltage applied to the x and y direction piezoelectric drivers to compensate the nonlinearity by modifying the driving voltage generating mechanism of the piezoelectric scanner, namely, the Online processing method (Online Process) is adopted to carry out the nonlinearity correction in real time.
The characteristics of a scanning driver in a scanning tunnel microscope are improved, and the like (Wangbuaju, Zhanda Biao. Xuanbei university school, 2001, 30(2)) utilizes an open-loop compensation method to obtain PZT input-output data through an off-line experiment and establish a nonlinear compensation equation. The control data for ensuring the linear output of the PZT is compiled into a table, and the singlechip checks the table to obtain the correction control data to complete the nonlinear compensation. In addition, Digital Instruments in the united states superimposes an exponentially decaying compensation signal on the PZT drive voltage of the triangular waveform to obtain an approximately linear displacement output. And the x-direction piezoelectric actuator and the y-direction piezoelectric actuator drive the probe to reciprocate on the surface of the tested sample under the excitation of high-frequency and high-intensity periodic voltage, and the piezoelectric actuator shows obvious hysteresis nonlinearity (particularly when large-range scanning is carried out). However, the above methods do not take this into consideration, and therefore it is difficult to further improve the linearity.
Disclosure of Invention
The invention aims to provide a method for calibrating parameters and performing nonlinear correction on a piezoelectric actuator model in a scanning probe microscope, which is used for realizing the nonlinear correction on the piezoelectric actuator in the scanning probe microscope and eliminating the characteristic distortion of an SPM (scanning pulse sequence) image.
In order to achieve the purpose, the invention aims to obtain the input (namely driving voltage) and output (namely deformation quantity) sequences of the piezoelectric actuators in the x and y directions based on the SPM image data of the standard grating sample so as to establish a model of the piezoelectric actuators. According to the SPM scanning mechanism, when the piezoelectric actuator in the x direction moves from left to right (namely the driving voltage is from low to high), the height information of the sample is collected and transmitted to an upper computer for imaging, and when the piezoelectric actuator moves in the opposite direction, the height information of the sample is not collected, and only the probe is returned; when the y-direction piezoelectric actuator moves from top to bottom (namely the driving voltage is from low to high) and from bottom to top, the height information of the sample is collected and transmitted to an upper computer for imaging. Therefore, from the SPM image of the standard sample, we can only indirectly obtain the output displacement data of the x-direction piezoelectric actuator from left to right, and the y-direction piezoelectric actuator from top to bottom and from bottom to top, but cannot obtain the output displacement data of the x-direction piezoelectric actuator from right to left. Therefore, the piezoelectric actuators in the x direction and the y direction are different in model structure selection, the piezoelectric actuator in the x direction adopts a polynomial model, and the piezoelectric actuator in the y direction adopts a hysteresis nonlinear model based on the linear superposition of basic hysteresis operators. Aiming at different model descriptions, the invention provides a corresponding nonlinear correction method of a piezoelectric actuator.
The technical scheme adopted by the invention is as follows: a piezoelectric actuator model parameter calibration and nonlinear correction method in a scanning probe microscope is characterized by comprising the following concrete implementation steps:
a. acquiring a Scanning Probe Microscope (SPM) image of a one-dimensional or two-dimensional standard grating sample by using a SPM to be calibrated;
b. obtaining the model parameters of the piezoelectric actuator by utilizing the model parameter calibration software of the piezoelectric actuator, comprising the following steps:
a) reading an SPM image file of a one-dimensional or two-dimensional standard sample, and acquiring image scanning parameters so as to calculate the input of the piezoelectric actuator in the x and y directions in the scanning process, namely a driving voltage sequence;
b) selecting a row or a column in the one-dimensional standard grating image or a light grid point of the two-dimensional standard grating image by means of mouse operation;
c) according to the physical distance between two adjacent stripes of the one-dimensional standard grating or the physical distance between two adjacent grid points of the two-dimensional standard grating input by a user, software executes operation to obtain the output of the piezoelectric actuator in the x and y directions, namely a deformation quantity sequence;
d) based on the obtained input, i.e. driving voltage and output, i.e. deformation quantity sequence, of the x-and y-direction piezoelectric actuator and its model structure, the model structure is: the piezoelectric actuator in the x direction adopts a polynomial, the piezoelectric actuator in the y direction adopts a hysteresis nonlinear model, then the piezoelectric actuator models in the x direction and the y direction are respectively established by adopting a least square method and a self-adaptive range DNA soft computing method, and model parameters are stored in a file adjust.
c. Based on the piezoelectric actuator model in the x and y directions, the data conversion before nonlinear online correction is realized, and the steps are as follows:
a) reading the file adjust.bin by upper computer software, and obtaining model parameters of the piezoelectric actuator in the x direction and the y direction;
b) substituting the current scanning range set by the user into the piezoelectric actuator model in the x direction and the y direction, and calculating the actual driving piezoelectric output range in the x direction and the y direction;
c) reading the scanning frequency f and the sampling period ET, adopting a point number p parameter, and respectively calculating the actual control steps in the x direction and the y direction, wherein the calculation formula is as follows: sdspx+＝1/(2*f*ET)＝106/(32*f)，Sdspx-＝0，
Sdspy+＝Sdspx+*2*p，Sdspy-＝0；
d) Calculating the upper and lower limits of the scanning voltage in the x and y directions output by the DSP;
e) carrying out digital system conversion on two groups of model parameters, namely the model parameters of the piezoelectric actuator in the x and y directions, and downloading the model parameters to a DSP controller;
the following three steps are executed in the DSP, the nonlinear correction is realized on line, and the steps are as follows:
(a) reading the initial scanning voltage xscan (0) and yscan (0) in the x and y directions and outputting the initial scanning voltage xscan (0) and the yscan (0) to a piezoelectric actuator;
(b) reading the model parameters;
(c) and respectively calculating the stepping driving voltage increment xscan (n) and yscan (n) of the next step in the x direction and the y direction according to the obtained model parameters, and then outputting the stepping driving voltage increment xscan (n) and yscan (n) to a voltage execution mechanism to drive the probe to do two-dimensional motion on the surface of the sample. And (c) circularly executing the steps (b) to (c) until the whole scanning process is completed.
The method for acquiring the output deformation quantity of the piezoelectric actuator in the x and y directions by the piezoelectric actuator model calibration software comprises the following steps:
d. and carrying out thresholding on the height information data Z of the rows or columns:
if Z > HTHRESHOLDThen Z ═ Z
Otherwise, Z is 0;
e. setting an integration boundary: for each section of the points with the height information continuously not being 0, the x or y coordinate of the first point is an integration lower bound a or c, and the x or y coordinate of the last point is an integration upper bound b or d;
c. determining the plane coordinates of the feature points: and determining the plane coordinates (x, y) of the characteristic points by using a gravity center method, wherein,
d. determining a physical displacement sequence of the piezoelectric actuator in the x or y direction, and selecting two lines of data of a one-dimensional standard grating SPM image, wherein the vertical coordinates of the two lines of data are N1 and N2 respectively; through the first four steps, namely step a-step d, N1 and N2 are obtained and recorded as L, and the included angle between the grating stripe in the image and the horizontal direction is α, so that the distance between two adjacent feature points of N2 rows is L/sin (α), wherein α is arctg (abs ((N1-N2)/(x)2i-x1i) ); taking the center of the image as the origin of coordinates, the x-direction physical displacement sequence can be obtained; similarly, a y-direction physical displacement sequence may be obtained; or the following steps:
a) for each characteristic point of the two-dimensional standard grating SPM image, taking the approximate coordinate of the characteristic point displayed on the right side of the SPM image as the center of a circle, and making a circle with the radius r, wherein r satisfies the following conditions:
0.25d＜r＜0.5d
d is the plane distance between two adjacent characteristic points;
b) determining the feature point plane coordinates x, y:
c) acquiring a physical displacement sequence of the piezoelectric actuator in the x and y directions:
acquiring a physical displacement sequence of the piezoelectric actuator in the x direction: let the plane coordinates of the grating grid points be { (x)k，yk)}k＝1 K，
(a) Two adjacent grid points (x)k，yk)，(xk+1，yk+1) Fitting a straight line with an angle α with the x-axis, α ═ arctg (| (y)k+1-yk)/(xk+1-xk)|)；
(b) The physical displacement of two adjacent grid points is known and is denoted as L, and the projection distance on the x-axis is Lk、xk+1The pitch of (d);
(c) repeating (a) - (b) to obtain a distance between a series of adjacent location points on the x-axis; the image center is taken as the origin of coordinates, and the physical displacement sequence of the piezoelectric actuator in the x direction can be obtained;
and obtaining the physical displacement sequence of the piezoelectric actuator in the y direction by the same steps and similar methods.
Compared with the prior art, the invention has the following obvious outstanding characteristics and obvious advantages: the invention relates to a piezoelectric actuator model parameter calibration software based on a standard grating sample SPM image, which is used for obtaining a piezoelectric actuator model parameter and providing a piezoelectric actuator nonlinear correction method in a scanning probe microscope to eliminate SPM image characteristic distortion. The method provided by the invention greatly reduces the complexity of calibrating the SPM product.
Drawings
FIG. 1 is a view of a scanning probe microscope.
FIG. 2a x, y-direction PZT drive voltage waveform.
Figure 2b shows the probe in raster motion in the x and y planes.
Fig. 3 is a distorted 12um two-dimensional standard grating SPM image.
Fig. 4 shows a data measurement system interface based on a one-dimensional standard grating SPM image.
FIG. 5 is a data measurement system interface based on a two-dimensional standard grating SPM image.
FIG. 6 is a schematic diagram of the basic hysteresis operator.
FIG. 7 is a flow chart of hysteresis reflux.
FIG. 8 is a flow chart of the y-direction piezo actuator hysteresis nonlinearity correction.
Fig. 9 is a flow chart of nonlinear correction parameter transmission control.
FIG. 10 is a flow chart of DSP controller online calibration.
The specific implementation mode is as follows:
a preferred embodiment of the present invention is: referring to fig. 1, the apparatus using the piezoelectric actuator model parameter calibration and nonlinear correction method in the scanning probe microscope comprises an SPM head 1 above an anti-seismic stage 4, the SPM head 1 is composed of a probe 6 and a piezoelectric ceramic tube 8 above a sample 5 on the anti-seismic stage 4, and a detection device 7, and is characterized in that the output of the detection device 7 is connected with the input of a controller 2, the output of the controller 2 is connected with the piezoelectric ceramic tube 8, and the controller 2 is connected with a computer.
Referring to fig. 1, 2 and 3, the piezoelectric ceramic tube 8 drives the probe 6 to make three-dimensional motion on the surface of the sample 5 to be measured. A high speed signal processor DSP in the controller 2 generates drive voltages 9, 10, 11, 12 for the x, y direction piezo scanner to control the probe to move 13 in two dimensions in the x, y direction over the sample surface. Meanwhile, the detection device 7 detects physical quantities such as tunnel current or atomic force (determined according to different SPM products), adopts a closed-loop control strategy, and is driven by a z-direction piezoelectric actuator to ensure that the needle point-sample height is constant, so that the relative fluctuation height on the grating track point of the sample surface can be calculated through the voltage value added to the z-direction driver, and an SPM image 14 reflecting the surface topography of the sample can be obtained on a screen through reconstruction by the upper computer 3.
The method for calibrating the parameters and nonlinear correction of the piezoelectric actuator model in the scanning probe microscope comprises the following steps:
piezoelectric actuator model parameter calibration software
In order to obtain the model parameters of the piezoelectric actuator in the x and y directions, a set of piezoelectric actuator model parameter calibration software is developed in the patent. The software is based on an SPM image data matrix of a one-dimensional and two-dimensional standard grating sample { (i, j, z (i, j)) }i，j＝1 NAnd image scanning parameters are obtained, and input-output data of the piezoelectric actuator are obtained, so that an x-direction piezoelectric actuator model and a y-direction piezoelectric actuator model are established for nonlinear and non-orthogonal error correction, and a foundation is laid for accurate calibration of the SPM.
The driving voltage sequence can be calculated according to the image scanning parameters (scanning range, piezoelectric sensitivity, scanning angle, offset displacement, etc.), and how to obtain the physical displacement output of the x and y piezoelectric actuators based on the SPM image data of the one-dimensional and two-dimensional standard grating samples is described below.
Referring to fig. 4, a data measurement system interface based on a one-dimensional standard grating SPM image. As the mouse is moved across the image display area 15, the outline of the row and column in which the mouse is located will be displayed in real time on the row outline 16 and column outline 17 to assist the user in selecting the row and column image data characterizing the piezoelectric actuator. The user can select the first row and the second row (or the first column and the second column) by pressing the "Shift + left mouse button" and the "Shift + right mouse button" (or the "Ctrl + left mouse button" and the "Ctrl + right mouse button") in the image display area 15, and the selected row number or column number is displayed in the areas 23, 25, 27, and 29. The areas 18-21 show the outline of the selected row or column and the user can set the height threshold by clicking on the left mouse button, with the set height threshold being shown in areas 24, 26, 28 and 30. Clicking on button 22, the software executes algorithm 1, described below, to calibrate the x, y piezo actuators.
Algorithm 1
1. Thresholding the height information data z of the row or column
If z＞HTHRESHOLD，Then z＝z；
Else z＝0.
2. Setting integration boundaries
For each segment of the points with the height information continuously not being 0, the x or y coordinate of the first point is the lower integral bound a or c, and the x or y coordinate of the last point is the upper integral bound b or d.
3. Feature point plane coordinate determination
And determining the plane coordinates (x, y) of the characteristic points by using a gravity center method. Wherein,
4. determining x (or y) direction piezoelectric actuator physical displacement sequence
The ordinate of the selected two lines of image data is N1 and N2, respectively. Acquiring a characteristic point coordinate point sequence (x) of N1 and N2 rows through the first four steps1i)、(x2i) 1, N. The distance between two adjacent grating stripes is known and is marked as L. The angle between the grating stripe in the image and the horizontal direction is alpha. Therefore, the distance between two adjacent feature points in the N2 row is L/sin (α), where α is arctg (abs ((N1-N2)/(x)2i-x1i))). With the center of the image as the origin of coordinates, the x-direction physical displacement sequence (Si) can be obtained. Similarly, a y-direction physical displacement sequence may be obtained.
Referring to fig. 5, a data measurement system interface based on a two-dimensional standard grating SPM image. A two-dimensional standard raster SPM image is imported through the menu "file" 32, and the image is displayed in the area 31. The user selects grid points on the raster stripes representing the x or y piezo actuators on the image by pressing the "Shift + left mouse button", the x, y coordinates of the grid points being displayed in the areas 33, 34. Clicking on button 36 or 37, the software executes algorithm 2 described below to calibrate the x or y piezo actuator. Clicking on button 35 clears the coordinate display areas 33, 34 in preparation for selection of a grid point on the raster stripe representing the y or x piezo actuator.
Algorithm 2
Step1. for each feature point, a circle of radius r is drawn with its approximate coordinates shown at 33, 34 as the center. Wherein r satisfies
0.25d＜r＜0.5d
Wherein d is the plane distance between two adjacent characteristic points
Step2. determining feature point plane coordinates (x, y)
Step3, acquiring a physical displacement sequence of the piezoelectric actuator in the x or y direction
Take the example of obtaining input-output data for an x-direction piezoelectric actuator. Let the plane coordinates of the grating grid points be { (x)k，yk)}k＝1 K。
I) Two adjacent grid points (x)k，yk)，(xk+1，yk+1) Fitting a straight line with an angle α with the x-axis, α ═ arctg (| (y)k+1-yk)/(xk+1-xk)|)。
II), the physical displacement of two adjacent grid points is known and is denoted as L. Then, the projection distance on the x-axis is l.cos (α), i.e. two location points x on the x-axisk、xk+1The pitch of (2).
III), repeat I), II), the spacing of a series of adjacent location points on the x-axis is obtained. And taking the center of the image as the origin of coordinates, and obtaining the physical displacement sequence of the piezoelectric actuator in the x direction. Similarly, a y-direction piezoelectric actuator physical displacement sequence may be obtained.
And establishing an x or y direction piezoelectric actuator model based on the obtained data driving voltage-physical displacement sequence.
The x-direction piezoelectric actuator model adopts a segmented polynomial structure. The model parameters are obtained by a least squares method. Let model be S (v) ═ Fx(v) Where v is the voltage and S is the displacement. Thereby obtaining a piezoelectric sensitivity S' (v) ═ Fx′(v)。
The y-direction piezoelectric actuator model adopts a hysteresis nonlinear structure.
FIG. 6 is a diagram of a physical model of a basic hysteresis operator. In fig. 6a, C is a cylindrical piston tube with a length r and P is the piston. Both can be moved in one direction, wherein the piston is the driver and the piston tube is the driven device. The position of the piston is represented by the coordinate x of the point A, and the position of the piston tube is represented by the coordinate eta of the point BrCharacterization, FIG. 6b shows x and ηrThe backstepping branch relationship between them.
The basic hysteresis operator is:
ηr(t)＝Pr[x(t)，ηr(t0)，x(t0)].
the operator is characterized by a threshold r, an initial state pair (eta)r(t0)，x(t0) Determining the output η corresponding to the input x (t)r(t) of (d). To accurately model complex hysteresis nonlinearities, it is necessary to superimpose a plurality of signals with different thresholds riLinear operator of
Model parameters are obtained by a self-adaptive range DNA (ARDNA for short) soft computing method (yellow element, Liuhui, Feizui. piezoelectric actuator hysteresis nonlinear soft computing modeling in a scanning probe microscope and real-time compensation thereof. electronic microscopy report 2003, 4).
Second, nonlinear correction method for piezoelectric actuator
The purpose of the piezoelectric actuator nonlinearity correction is to make its output displacement linear. FIG. 7 is a flow chart of the hysteresis counter flow. The module 38 is implemented using an incremental PID control algorithm, with Hit [ ]41 being a hysteresis iteration model and Href [ ]42 being a reference model. In the figure, ys (k)44 is reference displacement, x (k)40 is the excitation voltage corresponding to the output ys (k)44 of the piezoelectric actuator, and xi (k)39 is an approximate value of x (k) 40. When the difference between the output ymi (k)43 of the iterative model Hit [ ]41 under excitation of xi (k)39 and the reference displacement ys (k)44 is sufficiently small, the iterative procedure ends; otherwise, the offset is eliminated by the incremental unit feedback PID controller 38. In the calculation of x (k)40, the state of each hysteresis operator in the iterative model changes, and in order to ensure that the output of the piezoelectric actuator always tracks the reference displacement under the excitation of the current voltage x (k)40, the iterative model needs to be updated by the state of the reference model.
FIG. 8 is a schematic diagram of the hysteresis nonlinear compensation of the y-piezo actuator. And the hysteresis inverse model iterative program is realized on line by a high-speed DSP controller in the lower computer. The DSP obtains the scanning range and the number of sampling points in each line set by a user of the upper computer through a communication interface, so that the step displacement step is calculated, the step driving voltage increment is generated by a hysteresis inverse model, and the obtained driving voltage ensures that the displacement output of the y piezoelectric actuator is linear.
Fig. 9 is a nonlinear correction parameter transmission control flowchart. The numerical system conversion work before the parameters are downloaded to the DSP controller is mainly finished:
and step1, completing the calibration of the model parameters of the piezoelectric actuator, and writing the obtained model parameters into a file adjust. The upper computer software firstly searches the file and reads the model parameters of the piezoelectric actuator in the x direction and the y direction into 45;
step2. then calculate the maximum scan range 46;
step3, calculating the actual driving voltage output ranges in the x direction and the y direction according to the current scanning conditions set by the user;
and step4, reading parameters of the scanning frequency f, the sampling period ET and the number p of sampling points, and calculating the actual control steps 48 in the x direction and the y direction. The calculation formula is as follows:
Sdspx+＝1/(2*f*ET)＝106/(32*f)，Sdspy-＝0，Sdspy+＝Sdspx+*2*p；Sdspy-＝0
step5, calculating X, Y direction scanning voltage upper and lower limits 49 output by the DSP;
and step6, performing digital system conversion 50 on the two groups of model parameters, namely the model parameters of the piezoelectric actuator in the x direction and the y direction, and downloading 51.
FIG. 10 is a flow chart of DSP controller online calibration. The following four steps are executed in the DSP, and nonlinear correction is realized on line:
step1, reading an initial scanning voltage xscan (0) in 52 x and y directions, outputting the yscan (0) to a piezoelectric actuator, and positioning the initial scanning position of the probe;
step2. read model parameters 53;
step3, respectively calculating stepping driving voltage increment xstep (n)55 and ystep (n)57 of the next step in the x direction and the y direction according to the obtained model parameters;
step4, calculating driving voltages 56 and 58 of the piezoelectric actuator in the x direction and the y direction respectively, wherein xscan (n) ═ xscan (n-1) + xstep (n); yscan (n) ═ yscan (n-1) + ystep (n). And then the signal is output to a piezoelectric actuator to drive the probe to do two-dimensional motion on the surface of the sample. And (5) circularly executing Step2-Step4 until the whole scanning process is completed.
Since the x-direction piezoelectric actuator model and the y-direction piezoelectric actuator model adopt different structures, methods for calculating the stepping driving voltage xstep and ystep are respectively introduced.
x-direction piezoelectric actuator: assuming the step displacement is step and the current driving voltage v, the next step voltage increment is xstep (n) step/Fx' (v) wherein Fx(v)、Fx' (v) are the x-direction piezoelectric actuator polynomial model and its derivative function (i.e., the piezoelectric sensitivity equation), respectively.
The piezoelectric actuator hysteresis model in the y direction has memorability, and the derivative thereof, namely the piezoelectric sensitivity equation, is difficult to analyze and give, the patent constructs the inverse model thereof by designing a unit feedback controller, and the piezoelectric actuator is connected with the inverse model thereof in series, and the inverse model acquires the step driving voltage ystep corresponding to the reference displacement, thereby ensuring that the displacement output of the piezoelectric actuator is linear and realizing the hysteresis nonlinear real-time compensation (yellow element, Liuhui, Fisher-Sharp. the piezoelectric actuator hysteresis nonlinear soft computing modeling and the real-time compensation thereof in a scanning probe microscope. the electron microscopy reports, 2003, 4).
Claims (2)
1. A piezoelectric actuator model parameter calibration and nonlinear correction method in a scanning probe microscope is characterized by comprising the following concrete implementation steps:
a. acquiring a Scanning Probe Microscope (SPM) image of a one-dimensional or two-dimensional standard grating sample by using a SPM to be calibrated;
b. obtaining the model parameters of the piezoelectric actuator by utilizing the model parameter calibration software of the piezoelectric actuator, comprising the following steps:
a) reading an SPM image file of a one-dimensional or two-dimensional standard sample, and acquiring image scanning parameters so as to calculate the input of the piezoelectric actuator in the x and y directions in the scanning process, namely a driving voltage sequence;
b) selecting a row or a column in the one-dimensional standard grating image or a light grid point of the two-dimensional standard grating image by means of mouse operation;
c) according to the physical distance between two adjacent stripes of the one-dimensional standard grating or the physical distance between two adjacent grid points of the two-dimensional standard grating input by a user, software executes operation to obtain the output of the piezoelectric actuator in the x and y directions, namely a deformation quantity sequence;
d) based on the obtained input, i.e. driving voltage sequence and output, i.e. deformation quantity sequence, of the x-direction and y-direction piezoelectric actuators and model structures thereof, the model structures are as follows: the piezoelectric actuator in the x direction adopts a polynomial, the piezoelectric actuator in the y direction adopts a hysteresis nonlinear model, then the piezoelectric actuator models in the x direction and the y direction are respectively established by adopting a least square method and a self-adaptive range DNA soft computing method, and model parameters are stored in a file adjust.
c. Based on the piezoelectric actuator model in the x and y directions, the data conversion before nonlinear online correction is realized, and the steps are as follows:
a) reading the file adjust.bin by upper computer software, and obtaining model parameters of the piezoelectric actuator in the x direction and the y direction;
b) substituting the current scanning range set by the user into the piezoelectric actuator model in the x direction and the y direction, and calculating the actual driving piezoelectric output range in the x direction and the y direction;
c) reading the scanning frequency f and the sampling period ET, adopting a point number p parameter, and respectively calculating the actual control steps in the x direction and the y direction, wherein the calculation formula is as follows: sdspx+＝1/(2*f*ET)＝106/(32*f)，Sdspx-＝0，Sdspy+＝Sdspx+*2*p，Sdspy-＝0；
d) Calculating the upper and lower limits of the scanning voltage in the x and y directions output by the DSP;
e) carrying out digital system conversion on two groups of model parameters, namely the model parameters of the piezoelectric actuator in the x and y directions, and downloading the model parameters to a DSP controller;
the following three steps are executed in the DSP, the nonlinear correction is realized on line, and the steps are as follows:
(a) reading the initial scanning voltage xscan (0) and yscan (0) in the x and y directions and outputting the initial scanning voltage xscan (0) and the yscan (0) to a piezoelectric actuator;
(b) reading the model parameters;
(c) respectively calculating the stepping driving voltage increment xscan (n) and yscan (n) of the next step in the x direction and the y direction according to the obtained model parameters, and then outputting the stepping driving voltage increment xscan (n) and yscan (n) to a voltage execution mechanism to drive the probe to do two-dimensional motion on the surface of the sample; and (c) circularly executing the steps (b) to (c) until the whole scanning process is completed.
2. The method for calibrating the parameters and correcting the nonlinearity of the piezoelectric actuator model in the scanning probe microscope according to claim 1, wherein the method for the piezoelectric actuator model calibration software to perform the operation to obtain the output deformation of the piezoelectric actuator in the x and y directions comprises the following steps:
a. and carrying out thresholding on the height information data Z of the rows or columns:
if Z > HTHRESHOLDThen Z ═ Z
Otherwise, Z is 0;
b. setting an integration boundary: for each section of the points with the height information continuously not being 0, the x or y coordinate of the first point is an integration lower bound a or c, and the x or y coordinate of the last point is an integration upper bound b or d;
c. determining the plane coordinates of the feature points: and determining the plane coordinates x and y of the characteristic points by using a gravity center method, wherein,
d. determining a physical displacement sequence of the piezoelectric actuator in the x or y direction, and selecting two lines of data of a one-dimensional standard grating SPM image, wherein the vertical coordinates of the two lines of data are N1 and N2 respectively; through the first four steps, namely step a-step d, obtaining N1, N2 as L, where the angle between the grating stripe in the image and the horizontal direction is α, and thus the distance between two adjacent feature points in N2 rows is L/sin (α), where α is arctg (abs ((N1-N2)/(x)2i-x1i) ); taking the center of the image as the origin of coordinates, the x-direction physical displacement sequence can be obtained; similarly, a y-direction physical displacement sequence may be obtained;
or the following steps:
a) for each characteristic point of the two-dimensional standard grating SPM image, taking the approximate coordinate of the characteristic point displayed on the right side of the SPM image as the center of a circle, and making a circle with the radius r, wherein r satisfies the following conditions:
0.25d＜r＜0.5d
d is the plane distance between two adjacent characteristic points;
b) determining the feature point plane coordinates x, y:
c) acquiring a physical displacement sequence of the piezoelectric actuator in the x and y directions:
acquiring a physical displacement sequence of the piezoelectric actuator in the x direction: let the plane coordinates of the grating grid points be { (x)k，yk)}k＝1 K，
(a) Two adjacent grid points (x)k，yk)，(xk+1，yk+1) Fitting a straight line having an angle α with the x-axis, α ═ α rctg (| (y)k+1-yk)/(xk+1-xk)|)；
(b) The physical displacement of two adjacent grid points is known and is denoted as L, and the projection distance on the x-axis is Lk、xk+1The pitch of (d);
(c) repeating (a) - (b) to obtain a distance between a series of adjacent location points on the x-axis; the image center is taken as the origin of coordinates, and the physical displacement sequence of the piezoelectric actuator in the x direction can be obtained;
and obtaining the physical displacement sequence of the piezoelectric actuator in the y direction by the same steps and similar methods.
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| CN101324429B (en) * | 2008-07-11 | 2011-03-30 | 中国科学院电工研究所 | High precision measurement method of scanning probe microscope |
| CN102486477A (en) * | 2010-12-04 | 2012-06-06 | 中国科学院沈阳自动化研究所 | Model-based hysteresis feed-forward correction method of piezoelectric ceramic scanner |
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| JP6631647B2 (en) * | 2018-03-08 | 2020-01-15 | 株式会社島津製作所 | Scanning probe microscope and surface image correction method |
| CN110082568B (en) * | 2019-04-28 | 2022-03-04 | 广州大学 | Scanning electrochemical microscope and correction method thereof |
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| CN115096756B (en) * | 2022-07-27 | 2022-11-22 | 浙江双元科技股份有限公司 | Self-calibration surface density detector and calibration method thereof |
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