CN1299958A - MIniature piezoelectric resonant sensor array chip - Google Patents
MIniature piezoelectric resonant sensor array chip Download PDFInfo
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- CN1299958A CN1299958A CN 99117440 CN99117440A CN1299958A CN 1299958 A CN1299958 A CN 1299958A CN 99117440 CN99117440 CN 99117440 CN 99117440 A CN99117440 A CN 99117440A CN 1299958 A CN1299958 A CN 1299958A
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Abstract
THe present invention relates to an integrated miniature piezoelectric resonance sensor array chip. Said array chip contains at least two piezoelectric resonant diaphragms and microelectrodes on the upper side surface of them, and is characterized by that they have a shared insulating substrate, on the substrate the shared base electrode is connected with undersurface of the above-mentioned every piezoelectric resonant diaphragm. Said invention can be used for analyzing and detecting micro and supermicro physical quantity, chemical quantity and biological quantity.
Description
The present invention relates to piezoelectric sensor array, particularly a kind of chip of integrated micro piezoelectric resonant sensor array.
Piezoelectric resonant sensor is made of piezoelectric resonant sensor chip and the external resonant circuit of electrode thereof.Piezoelectric vibration piece and surperficial electrode thereof that the piezoelectric resonant sensor chip is made by piezoelectric constitute.The piezoelectric resonant sensor signal is that resonance frequency is passed through frequency detection circuit or the frequency counting instrument obtains.Piezoelectric resonant sensor interacts with surrounding enviroment in its resonant process, can comprise that quality, viscoelasticity, dielectric or rheological characteristics etc. are made to the physical property of sensor surface and surrounding medium to reply and be converted to the device change of resonance frequency.Single piezoelectric resonant sensor can only obtain the information of a relevant composition of checked object, proterties, adopt a plurality of piezoelectric resonant sensors to constitute the multidimensional letter trouble that sensor array can obtain the relevant composition of checked object, proterties simultaneously, obtain the description comprehensive, dynamic, real-time or on the throne of object, or can once measure a plurality of checked objects, be used for the analyzing and testing in fields such as chemistry, biology, pharmacy, clinical medicine and environmental science.
Existing piezoelectric resonant sensor array chip, as Chinese patent CN1139202A, technology on January 1st, 1997 disclosed " the piezoelectric vibration formula sensor array that can distribute arbitrarily ", many group conductive materials are laid in employing on positive and negative two surfaces of a piezoelectric, constitute the piezoelectric sensor array chip of en-block construction, when the alternating share of conductive material forms independent oscillator when being circumscribed with oscillatory circuit, when extraneous parameter acts on this zone, its oscillation frequency changes, and send the vibration frequency-modulated wave, thereby deterministic force to the four sides, the size and the position of sensing amounts such as displacement.Each sensor chip of this piezoelectric sensor array chip all needs external one corresponding independently oscillatory circuit, its vibration frequency-modulated wave needs to receive through a plurality of transducers, and need amplitude and phase detecting circuit to carry out determining of each oscillator sensing amount, sensor circuit and detect very complicated.Secondly, because each piezoelectric sensor chip of this array chip constitutes en-block construction mutually in succession, the sensor signal that its each chip is produced is to have interference serious, that be difficult to eliminate between frequency-modulated wave.Therefore, this piezoelectric sensor array chip, its sensitivity and precision are very limited, and are difficult to further improve, and can not satisfy the needs that microanalysis detects.
But the purpose of this invention is to provide a kind of integrated a plurality of independently sensor chips, the hypersensitive that can obtain a plurality of sensing amounts simultaneously, high precision, easily detection, anti-interference prepared in batches, MIniature piezoelectric resonant sensor array chip that cost is low.
The present invention adopt with a plurality of independently, miniature, piezoelectric vibration piece that the two sides is covered with electrode, be fixed on the insulating substrate, each piezoelectric vibration piece and substrate electrodes in contact are as the shared base electrode of piezoelectric resonant sensor array chip, as the working electrode of each piezoelectric resonant sensor chip, its integral body constitutes MIniature piezoelectric resonant sensor array chip to the microelectrode in each piezoelectric vibration piece outside respectively.
MIniature piezoelectric resonant sensor array chip of the present invention (referring to accompanying drawing), comprise at least two piezoelectric vibration pieces (2) and upside thereof the microelectrode (4) on unilateral, it is characterized in that having the substrate (1) of a shared insulation, unilateral the joining of downside of shared base electrode (3) and above-mentioned each piezoelectric vibration piece arranged on substrate.
Identical n limit sheet shape, identical n limit sheet shape, said n 〉=3 of being of the sheet shape of said substrate (1) and base electrode (3) of being of the sheet shape of above-mentioned piezoelectric vibration piece (2) and microelectrode (4).
Above-mentioned piezoelectric vibration piece (2) can be quartz crystal slice or piezoelectric ceramic piece or piezoelectric polyvinylidene fluoride film.Above-mentioned microelectrode (4) and base electrode (3) can be golden film or silverskin or aluminium film, and above-mentioned substrate (1) can be silicon chip or glass sheet or phenolics sheet or polyvinyl chloride (PVC) sheets or polyvinyl fluoride sheet or organic glass sheet.
The unilateral area of the upside of above-mentioned piezoelectric vibration piece (2) is 10
-6～1mm
2
The external resonant circuit of microelectrode on each miniature piezoelectric resonance piece surface just can be formed separately independently miniature resonance type sensor, and its integral body just can constitute the miniature resonance type sensor array.By detecting each microsensor change of resonance frequency, can be dynamically, in real time or at physics, chemistry or the biological parameter of corresponding each working electrode surface of position-finding and surrounding medium thereof.
Said structure of the present invention makes it have following obvious advantage and remarkable result.
At first, the present invention becomes separately independently sensor array chip with each piezoelectric resonant sensor chipset, does not have interference between each sensor; And can in sensor array, set a reference sensor that stays out of checked object, the resonance frequency of work and reference sensor can be by the lower difference frequency output of a difference channel (thousands of hertz following), adding upper frequency itself is digital signal, and sensor signal is easy to fast and high-acruracy survey and processing.
Secondly, the unilateral area of the upside of piezo-electric resonance type sensing chip of the present invention is 10
-6～1mm
2, and become microminiaturization, though the resonating device microminiaturization, thus can reduce the thickness of piezo-electric resonance type sensing chip greatly, the ultra-high frequency (megahertz up to a hundred) that makes its resonance can reach common resonance piece can't to realize; Because the sensitivity of piezoelectric resonant sensor increases with its resonance frequency and improves, therefore, this sensor chip is higher than existing technical merit far away to the sensitivity of sensing amount.
In addition, the preparation technology of integrated miniature piezoelectric sensor array chip is good, can make in enormous quantities, and with low cost.
In sum, the integrated a plurality of sensor chips of the present invention, but have hypersensitive, high precision, easily detection, anti-interference prepared in batches, the low cost and other advantages that can obtain a plurality of sensing amounts simultaneously.
This sensor array chip is applicable to the analyzing and testing of trace and ultramicron physical quantity, chemistry amount and biomass.
Below, with embodiment and accompanying drawing thereof the present invention is further described again.
Brief description of drawings.
Fig. 1 is the structural representation of a kind of MIniature piezoelectric resonant sensor array chip of the present invention.
Fig. 2 is the MIniature piezoelectric resonant sensing detection schematic block circuit diagram with this sensor array chip formation of Fig. 1.
Embodiment 1
A kind of MIniature piezoelectric resonant sensor array chip of the present invention, as shown in Figure 1.Constitute by substrate, base electrode, piezoelectric vibration piece, microelectrode.
Above-mentioned substrate 1 is selected glass for use, also can select silicon or insulating material such as phenolics or Polyvinylchloride or polyvinyl fluoride or organic glass for use, makes n limit sheet body, and n 〉=3 are counted on the limit, promptly can be polygons such as triangle, quadrilateral, pentagon.
Above-mentioned piezoelectric vibration piece 2 is selected quartz crystal for use, also can select piezoelectrics such as piezoelectric ceramics or piezoelectric polyvinylidene fluoride film for use.
Above-mentioned base electrode 3 and microelectrode 4 are selected gold copper-base alloy for use, also can select silver or aluminum.
Present embodiment, the piezoelectric vibration piece chemistry milling of the quartz crystal materials of AT cut type is thick to 10um, and behind the thick golden film of two sides vacuum evaporation 200nm, thermocompression bonding is made chip on the substrate of glass sheet material.On chip, utilize common Micrometer-Nanometer Processing Technology to make miniature quartz crystal-resonance sensor array chip then.Concrete steps are as follows:
1, behind coating sensitization breast on the light glass plate, sensitive emulsion is exposed into designed array pattern, make mask with the laser-light write machine;
2, behind coating photoresist on the above-mentioned chip of making, mask is aimed at chip and contact photoetching machine exposes to photoresist again;
Behind the photoresist flush away that 3, will expose, erode the golden film and the quartz at the selected position of chip successively with common chemical method, make the MIniature piezoelectric resonant sensor array chip that the miniature quartz crystal-resonance sensor chip by a plurality of mutual isolation constitutes.The Gold plated Layer of bonding face of doing the quartz crystal downside of piezoelectric vibration piece and substrate as the shared base electrode of each miniature quartz crystal-resonance sensor chip, is promptly made ground-electrode.The Gold plated Layer of each quartz crystal upper side is each miniature quartz crystal-resonance sensor chip microelectrode separately.
The piezoelectric vibration piece of above-mentioned each miniature quartz crystal-resonance sensor chip is identical with the sheet shape of microelectrode, can make n limit sheet shape, and n 〉=3 are counted on the limit, promptly can be polygons such as triangle, quadrilateral, pentagon.The present embodiment piezoelectric vibration piece adopts quadrilateral, and the unilateral area of its upside is 10
-6～1mm
2Thereby become miniature chip.
Use present embodiment, shown in Fig. 2 block diagram, with this MIniature piezoelectric resonant sensor array chip 5, be installed on the common bearing 6 of pin of the pin of microelectrode 4 of each miniature quartz crystal-resonance sensor chip and shared base electrode 3, base electrode ground connection wherein, microelectrode surface sealing in the microelectrode, as the external common reference resonant circuit 9 of the contrast electrode that does not contact with checked object, all the other microelectrodes link to each other with common indication resonant circuit 8 through common channel selection circuit 7, indication and reference resonant frequency signal are through the difference frequency signal input common frequency counting circuit 11 of common difference channel 10 with both, obtain the difference of the relative reference transducing signal of indication transducing signal, checked object is detected with this.
Claims (4)
1, MIniature piezoelectric resonant sensor array chip, comprise at least two piezoelectric vibration pieces (2) and upside thereof the microelectrode (4) on unilateral, it is characterized in that having the substrate (1) of a shared insulation, unilateral the joining of downside of shared base electrode (3) and above-mentioned each piezoelectric vibration piece arranged on substrate.
2, MIniature piezoelectric resonant sensor array chip according to claim 1, the identical n of being of the sheet shape limit sheet shape that it is characterized in that said piezoelectric vibration piece (2) and microelectrode (4), identical n limit sheet shape, said n 〉=3 of being of the sheet shape of said substrate (1) and base electrode (3).
3, MIniature piezoelectric resonant sensor array chip according to claim 1, it is characterized in that said piezoelectric vibration piece (2) is quartz crystal slice or piezoelectric ceramic piece or piezoelectric polyvinylidene fluoride film, said microelectrode (4) and base electrode (3) are golden film or silverskin or aluminium film, and said substrate (1) is silicon chip or glass sheet or phenolics sheet or polyvinyl chloride (PVC) sheets or polyvinyl fluoride sheet or organic glass sheet.
4, MIniature piezoelectric resonant sensor array chip according to claim 3 is characterized in that the unilateral area of upside of said piezoelectric vibration piece (2) is 10
-6～1mm
2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99117440 CN1299958A (en) | 1999-12-10 | 1999-12-10 | MIniature piezoelectric resonant sensor array chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 99117440 CN1299958A (en) | 1999-12-10 | 1999-12-10 | MIniature piezoelectric resonant sensor array chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1299958A true CN1299958A (en) | 2001-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99117440 Pending CN1299958A (en) | 1999-12-10 | 1999-12-10 | MIniature piezoelectric resonant sensor array chip |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004011944A1 (en) * | 2002-07-31 | 2004-02-05 | Beijing Entry-Exit Inspection And Quarantine Bureau Of The People's Republic Of China | A piezoelectric bio-chip for detecting pathogen of mad cow disease and thereon preparation |
| CN100547396C (en) * | 2007-05-08 | 2009-10-07 | 中国科学院上海微***与信息技术研究所 | A kind of silicon based piezoelectricity thin film sensor and method for making that is applied to biological little quality testing |
| CN1964581B (en) * | 2005-11-11 | 2011-06-22 | 中国科学院声学研究所 | A silicon micro piezoelectric sensor chip with split series electrode and its manufacture method |
| CN104977353A (en) * | 2014-04-14 | 2015-10-14 | 德克萨斯仪器股份有限公司 | Sensor Array Chip With Piezoelectric Transducer Including Inkjet Forming Method |
| CN107345829A (en) * | 2017-06-12 | 2017-11-14 | 杭州光铭光电科技有限公司 | A kind of monolithic array formula quartz crystal microbalance sensor and preparation method thereof |
| CN110907681A (en) * | 2019-11-18 | 2020-03-24 | 南京理工大学 | Differential resonant voltage sensor compounded by quartz tuning fork and piezoelectric bimorph |
-
1999
- 1999-12-10 CN CN 99117440 patent/CN1299958A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004011944A1 (en) * | 2002-07-31 | 2004-02-05 | Beijing Entry-Exit Inspection And Quarantine Bureau Of The People's Republic Of China | A piezoelectric bio-chip for detecting pathogen of mad cow disease and thereon preparation |
| CN1964581B (en) * | 2005-11-11 | 2011-06-22 | 中国科学院声学研究所 | A silicon micro piezoelectric sensor chip with split series electrode and its manufacture method |
| CN100547396C (en) * | 2007-05-08 | 2009-10-07 | 中国科学院上海微***与信息技术研究所 | A kind of silicon based piezoelectricity thin film sensor and method for making that is applied to biological little quality testing |
| CN104977353A (en) * | 2014-04-14 | 2015-10-14 | 德克萨斯仪器股份有限公司 | Sensor Array Chip With Piezoelectric Transducer Including Inkjet Forming Method |
| CN107345829A (en) * | 2017-06-12 | 2017-11-14 | 杭州光铭光电科技有限公司 | A kind of monolithic array formula quartz crystal microbalance sensor and preparation method thereof |
| CN110907681A (en) * | 2019-11-18 | 2020-03-24 | 南京理工大学 | Differential resonant voltage sensor compounded by quartz tuning fork and piezoelectric bimorph |
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