CN1298537C - Spray-nozzle piece and making process thereof - Google Patents
Spray-nozzle piece and making process thereof Download PDFInfo
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- CN1298537C CN1298537C CNB021403562A CN02140356A CN1298537C CN 1298537 C CN1298537 C CN 1298537C CN B021403562 A CNB021403562 A CN B021403562A CN 02140356 A CN02140356 A CN 02140356A CN 1298537 C CN1298537 C CN 1298537C
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Abstract
The present invention relates to a spray nozzle sheet and a manufacture procedure thereof. The spray orifice sheet is manufactured on an ink-jet print head. First, a patternized first spray orifice layer is formed on an ink cavity layer of the ink-jet print head; the first spray orifice layer is provided with at least one first opening; the surface of the orifice wall of the first opening is hydrophilized. The method for spray nozzle sheet comprises: hydrophilic materials are used as materials of the first spray orifice layer or the surface of the orifice wall of the hydrophilized first opening. Subsequently, a patternized second spray orifice layer is formed on the first spray orifice layer; the second spray orifice layer is provided with at least one second opening which is communicated with the first opening; the surface of the orifice wall of the second opening is aqueously exclusive. The method for the spray nozzle sheet comprises aqueously exclusive materials are used as materials of the second spray orifice layer or the surface of the orifice wall of the aqueously exclusive second opening. Finally, the first spray orifice layer and the second spray orifice layer from the spray orifice sheet; the first opening and the second opening form a spray orifice. The surfaces of the orifice walls of the first opening and the second opening can be divided into hydrophilic zones and aqueously exclusive zones.
Description
Technical field
The present invention relates to a kind of spray nozzle sheet and processing procedure thereof, relate in particular to a kind of spray nozzle sheet and processing procedure thereof that is used for ink-jet printing head.
Background technology
The operation principle of inkjet printing mainly can be divided into thermal bubble type (thermal bubble) and piezoelectric type (piezoelectric) two major types.The Thermal Bubble Ink-jet Printer printing technique is to utilize heating component (heater) that the ink transient heating is gasified, thereby generation high pressure bubble promotes ink, and penetrate and form ink droplet (droplet) from spray orifice (nozzle), the piezoelectric ink jet printing technique then is to utilize piezoelectric ceramics (piezoelectric ceramic) because of applying the corresponding generation of voltage deformation, produce high pressure in order to squeezeout ink and promote ink, and penetrate and the formation ink droplet from spray orifice.Yet, no matter be the thermal bubble type or the inkjet technology of piezoelectric type, all be to utilize instantaneous pressure to promote squeezeout ink, make the formed ink droplet of ink penetrate via the spray orifice of spray nozzle sheet (Nozzle Plate).
Existing spray nozzle sheet is generally the metal spray nozzle sheet, for example nickel spray nozzle sheet (Ni Nozzle Plate).Because the surface of metal spray nozzle sheet is good hydrophilicity (hydrophilic), just the surface and water between contact angle (Contact angle) less than 90 the degree situations under, its surface is considered as being hydrophily, also therefore, when the part ink formed ink droplet from the spray orifice ejaculation, following three kinds of situations very likely can take place:
When (1) forming the ink droplet ejection when ink disengaging spray orifice, the tail end of ink droplet makes the ink droplet of ejection will depart from originally predetermined direct of travel under the traction of the terminal periphery of the hole wall that is subjected to spray orifice, thereby produces the tiltedly phenomenon of spray;
When (2) forming the ink droplet ejection when ink disengaging spray orifice, the tail end of ink droplet is under the traction of the terminal periphery of the hole wall that is subjected to the spray orifice end, trail after main ink droplet forming a plurality of littler ink droplets in addition, thereby on paper, form satellite point, just around main ink dot around many little ink dots;
When (3) forming the ink droplet ejection when ink disengaging spray orifice, the ink droplet tail end is under the traction of the hole wall periphery that is subjected to the spray orifice end, its section will produce the profile profile of similar crescent (meniscus), make ink droplet after breaking away from spray orifice, to coat a bubble and become a hollow ink droplet, thereby on paper, form the ring-type ink dot.
Above-mentioned phenomenons such as oblique spray, satellite point and ring-type ink dot take place for fear of ink droplet in prior art, must carry out repellency (hydrophobic) on spray nozzle sheet handles, desire to make and scold the effect of aquation to reach optimization, scold the contact angle after the aquation must reach a certain particular value (being generally 90～110 degree), and the hole wall surface of spray orifice also must scold aquation to handle to a certain specific degree of depth.Yet, scolded aquation for the hole wall surface that makes spray orifice and reached a certain specific degree of depth, often must see through complicated processing procedure, fill or the like as light shield covering or sacrifice layer, as United States Patent (USP) the 5th, 502, No. 470, the 5th, 759, No. 421, the 6th, 016, No. 601 and the 6th, shown in No. 126269, so will expend a large amount of processing procedure times and cost.
Summary of the invention
The objective of the invention is to propose a kind of spray nozzle sheet and processing procedure thereof, mainly utilize thick film, and reach hydrophiling and scold the purpose of aquation, in order to reduce the processing procedure cost of spray nozzle sheet via easy processing procedure as spray nozzle sheet.
Based on above-mentioned purpose of the present invention, the present invention proposes a kind of spray nozzle sheet and processing procedure thereof, be applicable to the processing procedure of an ink-jet printing head, in order to make spray nozzle sheet on ink-jet printing head, at first on the layer of black chamber, form first ejection layer of patterning, and first ejection layer has one first opening, and make the hole wall surface of the opening of winning be hydrophily, its method is with the material of hydrophilic material as first ejection layer, makes the hole wall surface of first opening be hydrophily.Then, on first ejection layer, form second ejection layer of patterning, and second ejection layer has one second opening, and make the hole wall surface of second opening be repellency, its method is with the material of repellency material as second ejection layer, makes the hole wall surface of second opening be repellency.At last, first ejection layer and second ejection layer constitute spray nozzle sheet jointly, and first opening and second opening then constitute spray orifice jointly.
In addition, the present invention more can constitute the black chamber layer and the spray nozzle sheet of ink-jet printing head equally with the above-mentioned double-deck hydrophily and the structure of repellency, and utilizes the mode of oppositely developing, and forms the spray orifice of preferable section profile profile on spray nozzle sheet.
Description of drawings
Figure 1A is applied to the section flow chart that a piezoelectric ink jet prints head for the spray nozzle sheet and the processing procedure thereof of the first embodiment of the present invention;
Figure 1B is applied to the section flow chart that a piezoelectric ink jet prints head for the spray nozzle sheet and the processing procedure thereof of the first embodiment of the present invention;
Fig. 2 A is the spray nozzle sheet of the second embodiment of the present invention and the section flow chart that processing procedure is applied to Thermal Bubble Ink-jet Printer seal head thereof;
Fig. 2 B is the spray nozzle sheet of the second embodiment of the present invention and the section flow chart that processing procedure is applied to Thermal Bubble Ink-jet Printer seal head thereof;
Fig. 3 A is the section flow chart of a kind of Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention;
Fig. 3 B is the section flow chart of a kind of Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention;
Fig. 3 C is the section flow chart of a kind of Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention;
Fig. 3 D is the section flow chart of a kind of Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention.
The specific embodiment
Please be the spray nozzle sheet and the processing procedure thereof of the first embodiment of the present invention in regular turn with reference to Figure 1A～1B, it is applied to the section flow chart of piezoelectric ink jet seal head.
Shown in Figure 1A, the bottom surface of substrate (substrate) 110 disposes a piezoelectric element (PZT element) 120, it is by top electrode (upper electrode layer) 122, piezoelectric layer (piezoelectric layer) 124,126 compositions of bottom electrode (lower electrode layer), when utilizing top electrode 122 and bottom electrode 126 to apply voltages to piezoelectric layer 124, piezoelectric layer 124 produces immediate set with correspondence, in order to the power resources of squeezeout ink to be provided, this moment, 110 of substrates were as a vibration level (vibrating layer), in order to the media that transmits as vibration.In addition, then dispose a black chamber layer 130 of patterning at the end face of substrate 110, in order to an inking chamber 132 to be provided, its position is corresponding to the position of piezoelectric element 120.It should be noted that piezoelectric element 120 also can be positioned at the end face of substrate 110 equally with black chamber layer 130, and make piezoelectric element 120 be contained in the inking chamber 132 of black chamber layer 130.
For the spray nozzle sheet 160 with Figure 1B is produced on the piezoelectric ink jet seal 100, shown in Figure 1A, at first form first ejection layer 140 of patterning on the black chamber layer 130 of piezoelectric ink jet seal 100, and first ejection layer 140 has first opening 142, it communicates with inking chamber 132.Wherein, the material of first ejection layer 140 can be the sensing optical activity material, for example dry film (dry film), epoxy resin (epoxy), phenol resin (novolak), acrylate (acrylate), polyimides (polyimide) or polyamide (polyamide) etc., so can on black chamber layer 130, form a sensing optical activity material earlier, follow mode with exposure (Photography), develop (Development), on the sensing optical activity material, form first opening 142, and finish the making of first ejection layer 140.It should be noted that, can utilize the mode of reverse development, developer solution is injected in the inking chamber 132, and make the direction of developer solution according to arrow, flow to the end face of first ejection layer 140 from the bottom surface of first ejection layer 140, so can make the section profile of first opening 142 be horn-like or trapezoidal approximately.
Then shown in Figure 1B, after forming first ejection layer 140 of patterning on the black chamber layer 130, then second ejection layer 150 of formation patterning on first ejection layer 140, and second ejection layer 150 of patterning also has at least one second opening 152, and it communicates with first opening 142.Wherein the material of second ejection layer 150 can be the sensing optical activity material, for example dry film or spin-on glasses, so can on first ejection layer 140, form a sensing optical activity material earlier, follow mode with exposure imaging, on the sensing optical activity material, form second opening 152, and finish the making of second ejection layer 150.If with spin-on glasses during as the material of second ejection layer 150, can utilize the spin coating (spin coating) or the modes such as (spray) of sprinkling, be formed on first ejection layer 140 that does not form first opening 142 as yet spin-on glasses is comprehensive, and after solidifying and form second ejection layer 150, then form first opening 142 and second opening 152 again.It should be noted that, can utilize the mode of reverse development equally, developer solution is injected in the inking chamber 132, and make the direction of developer solution according to arrow, flow to the end face of second ejection layer 150 via first opening 142, so can make the section profile of second opening 152 be horn-like or trapezoidal approximately.At last, second ejection layer 150 and first ejection layer 140 will constitute the structure of spray nozzle sheet 160 jointly, the then common structure that constitutes spray orifice 162 of first opening 142 and second opening 152, and have horn-like or trapezoidal section profile.
Shown in Figure 1A, the hole wall surface of first opening 142 must be hydrophily, so the material of first ejection layer 140 can be selected hydrophilic material for use, for example contains the material of soap base, makes the hole wall surface of the opening 142 of winning be hydrophily.In addition, also can utilize the mode of chemical bonded refractory, top layer molecular binding hydrophilic group with first ejection layer 140, soap base etc. for example, or in the mode of dip coated (dip coating), surface in first ejection layer 140 forms one deck hydrophily thin layer (not illustrating), for example to contain the interfacial agent of soap base, forms a hydrophily thin layer on the surface of first ejection layer 140.
Shown in Figure 1B, hole wall surface compared to first opening 142 is hydrophily, the hole wall surface of second opening then must be repellency, so the material of second ejection layer 150 can be selected for use to contain and scold water base material, the material that for example contains the Teflon base maybe can be selected dry film or the spin-on glasses material as second ejection layer 150 for use.In addition, also can utilize the mode of chemical bonded refractory, scold the top layer molecular binding of second ejection layer 150 water base, for example Teflon base or carbon tetrafluoride (CF4) etc., or, form one deck repellency thin layer (not illustrating) on the surface of second ejection layer 150 in the mode of dip coated, for example be the material of dip coated with the Teflon, on the surface of second ejection layer 150, form a repellency thin layer.
In addition, shown in Figure 1A, can be after forming first ejection layer 140 and first opening 142, utilize the mode of spraying spin-on glasses to be formed at the surface of first ejection layer 140, in order to as a non-wettable film, its effect is as second ejection layer 150 of 1B figure, and the part spin-on glasses will attach the inwall at first opening 142, can lose the mode of Jiao (defocus) this moment, exposed portion is positioned at the spin-on glasses of the upper end inwall of first opening 142, and unexposed portion is positioned at the spin-on glasses of the lower end inwall of first opening 142, so after unexposed spin-on glasses is developed, the spin-on glasses that can keep the inner upper end of first opening 142, and remove the spin-on glasses of the interior lower end of first opening 142, make the upper end inwall of the opening 142 of winning have repellency, the lower end inwall of first opening 142 is possess hydrophilic property then.Therefore, can utilize first ejection layer 140 and first opening 142, the mode of burnt exposure spin-on glasses is sprayed and is lost in collocation, forms a non-wettable film at the upper surface of first ejection layer 140 and the upper end inwall of first opening 142, and need not form second ejection layer 150.
The spray nozzle sheet of the first embodiment of the present invention and processing procedure thereof can be applicable to the processing procedure of an ink-jet printing head, particularly piezoelectric ink jet prints the processing procedure of head, in order to make spray nozzle sheet on ink-jet printing head, first ejection layer that at first forms patterning is on the layer of black chamber, and first ejection layer has one first opening, and make the hole wall surface of the opening of winning be hydrophily, its method comprises with the material of hydrophilic material as first ejection layer, or the hole wall surface of hydrophiling first opening, all can make the hole wall surface of first opening be hydrophily.Then, on first ejection layer, form second ejection layer of patterning, and second ejection layer has one second opening, and make the hole wall surface of second opening be repellency, its method comprises with the material of repellency material as second ejection layer, or scold the hole wall surface of aquation second opening, all can make the hole wall surface of second opening be repellency.At last, first ejection layer and the second spray orifice series of strata constitute spray nozzle sheet jointly, and first opening and second opening then constitute spray orifice jointly.
From the above, the first embodiment of the present invention can utilize double-deck ejection layer to constitute the structure of spray nozzle sheet, and utilize the difference that is hydrophily or repellency on the material of each ejection layer, or carried out surface hydrophilic afterwards or scolded the processing of aquation, make the hole wall surface of spray orifice can be divided into a hydrophilic region and a repellency zone, so can utilize simple processing procedure to make the jet orifice structure of single spray nozzle sheet while possess hydrophilic property and repellency.
Second embodiment
Please refer to Fig. 2 A, 2B, it is the spray nozzle sheet and the processing procedure thereof of the second embodiment of the present invention, is applied to the section flow chart of Thermal Bubble Ink-jet Printer seal head.Second embodiment and first embodiment different be in, the spray nozzle sheet of second embodiment and processing procedure thereof are applied to make a spray nozzle sheet at Thermal Bubble Ink-jet Printer seal head.
Shown in Fig. 2 A, chip 210 has an ink road 212, it runs through the two sides of chip 210, heating component 220 then is disposed on the chip 210, and black chamber layer 230 also be disposed at chip 210 on, and having an inking chamber 232, its position is corresponding to the position of heating component 220, and communicates with ink road 212.Shown in 2A figure, on black chamber layer 230, form one first ejection layer 240 of patterning earlier, and first ejection layer 240 has one first opening 242, it communicates with inking chamber 232.It should be noted that, can utilize the mode of reverse development, with developer solution inject via ink road 212 inking chamber 232 in, and make the direction of developer solution according to arrow, flow to the end face of first ejection layer 240 from the bottom surface of first ejection layer 240, can make so that the section profile of first opening 242 is rough to be horn-like or trapezoidal.Because the hydrophilization methods of the hole wall surface of first opening 242 has narration at first embodiment, so no longer repeat to give unnecessary details in this.
Shown in 2B figure, then on first ejection layer 240, form one second ejection layer 250 of patterning, and second ejection layer 250 has one second opening 242, it communicates with first opening 242.It should be noted that, can utilize the mode of reverse development equally, with developer solution inject inking chamber 232 in, and make the direction of developer solution according to arrow, flow to the end face of second ejection layer 240 via first opening 242, so can make the section profile of second opening 252 be horn-like or trapezoidal approximately.Similarly, because the aquation method of scolding of the hole wall surface of second opening 252 also has narration at first embodiment, so no longer repeat to give unnecessary details in this.At last, second ejection layer 250 and first ejection layer 240 will constitute the structure of spray nozzle sheet 260 jointly, the then common structure that constitutes spray orifice 262 of first opening 242 and second opening 252, and have horn-like or trapezoidal section profile.
The spray nozzle sheet of the second embodiment of the present invention and processing procedure thereof can be applicable to the processing procedure of an ink-jet printing head, and particularly Thermal Bubble Ink-jet Printer is printed the processing procedure of head, in order to make spray nozzle sheet on ink-jet printing head.The second embodiment of the present invention utilizes double-deck ejection layer to constitute the structure of spray nozzle sheet equally in addition, and utilize the difference of possess hydrophilic property on the material of each ejection layer or repellency, or carried out surface hydrophilic afterwards or scolded the processing of aquation, make the hole wall surface of spray orifice can be divided into a hydrophilic region and a repellency zone, so can utilize simple processing procedure to make the jet orifice structure of single spray nozzle sheet while possess hydrophilic property and repellency.
The 3rd embodiment
Please in regular turn with reference to figure 3A～3D, it is the section flow chart of a kind of Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention.Different with second embodiment is, the 3rd embodiment utilizes the spray nozzle sheet of hydrophilic black chamber layer and repellency to constitute the part-structure that Thermal Bubble Ink-jet Printer is printed head, and select the material of sensing optical activity thick film for use, and utilize the mode of oppositely developing to form the spray orifice of preferable section profile profile as spray nozzle sheet.
As shown in Figure 3A, chip 310 has an ink road 312, and it runs through the two sides of chip 310, and heating component 320 then is configured on the chip 310.At first form a black chamber layer 330 on chip 310, the material of its China and Mexico's chamber layer 330 for example be the sensing optical activity material, then shown in Fig. 3 B, and mode that can exposure imaging, and patterning China ink chamber layer 330 and formation inking chamber 332.
Shown in Fig. 3 C, then on the black chamber of patterning layer 330, form a sensing optical activity thick film 340, and the position of the spray orifice 342 of corresponding 3D figure, exposed portion sensing optical activity thick film 340, then shown in 3D figure, direction according to arrow, developer solution is flowed into inking chamber 332 via ink road 312, make the exposed portion of developing liquid developing sensing optical activity thick film 340, and formation spray orifice 342, it runs through the two sides of sensing optical activity thick film 340, and have an ink input 342a and an ink output 342b, the aperture of its ink inside input 342a is greater than the aperture of ink output 342b, and then makes spray orifice 342 have similar profile of falling truncate pyramid, helps to stablize the emission direction of ink droplet.
Similarly, in order to allow ink can constantly be supplemented in the inking chamber 332, sidewall that must hydrophiling inking chamber 332, and please refer to the method for hydrophiling first ejection layer 140 of first embodiment about the mode of hydrophiling inking chamber 332 is with so that the sidewall surfaces of inking chamber 332 is hydrophily.In addition, in order to allow ink droplet when breaking away from spray orifice 342 ejaculations, be not vulnerable to the traction of the terminal periphery of hole wall of spray orifice 342, just do not allow ink droplet be subjected to the traction of the periphery of ink output 342b, must scold aquation sensing optical activity thick film 340, particularly scold the inner wall surface of aquation spray orifice 342, similarly, scold the method for aquation sensing optical activity thick film 340 to use so that the inner wall surface of spray orifice 342 is repellency with reference to the method for scolding aquation second ejection layer 150 of first embodiment.
The processing procedure of the Thermal Bubble Ink-jet Printer seal head of the third embodiment of the present invention, particularly the mode with reverse development forms the spray orifice with preferable section profile profile, helps to stablize the ejaculation direction of ink droplet.In addition, also can utilize the spray nozzle sheet of hydrophilic inking chamber and repellency to constitute the part primary structure that Thermal Bubble Ink-jet Printer is printed head, making ink be drawn easily causes within the inking chamber, and when ink droplet when spray orifice penetrates, with the traction of the terminal periphery of the hole wall that is difficult for making ink droplet be subjected to spray orifice, and along the stable ejection of original direct of travel.
In sum, the present invention utilizes double-deck ejection layer to form the spray nozzle sheet of ink-jet printing head, and by selecting hydrophily or repellency material, or utilize hydrophiling or scold the processing of aquation, make the hole wall surface of the spray orifice on the spray nozzle sheet can be divided into the repellency zone of the hydrophilic region and the back segment hole wall of leading portion hole wall.In addition, the present invention constitutes the black chamber layer and the spray nozzle sheet of Thermal Bubble Ink-jet Printer seal head more with the above-mentioned double-deck hydrophily and the structure of repellency, ink is caused easier drawing in the inking chamber, and ink droplet will be more accurate also from the direction that spray orifice penetrates.
The above is preferred embodiment of the present invention and design, this embodiment and design only illustrate, be not to be used to limit the scope of the invention, all with the technological means that is equal to or any distortion in the scope that claim was contained, all do not break away from interest field of the present invention and category thereof.
Graphic sign explanation
100: piezoelectric ink jet seal 110: substrate
120: piezoelectric element 122: top electrode
124: piezoelectric layer 126: bottom electrode
130: black chamber layer 132: inking chamber
142: the first openings of 140: the first ejection layer
152: the second openings of 150: the second ejection layer
160: spray nozzle sheet 162: spray orifice
200: Thermal Bubble Ink-jet Printer seal 210: chip
220: heating component 230: black chamber layer
232: 240: the first ejection layer of inking chamber
250: the second ejection layer of 242: the first openings
Opening 260 in 252: the second: spray nozzle sheet
262: spray orifice
300: Thermal Bubble Ink-jet Printer seal 310: chip
320: heating component 330: black chamber layer
332: inking chamber 340: the sensing optical activity thick film
342: spray orifice 342a: the ink input
342b: ink output
Claims (10)
1. a spray nozzle sheet is applicable to be configured on the ink-jet printing head, it is characterized in that, described spray nozzle sheet is made of first ejection layer and second ejection layer;
Described first ejection layer be disposed on the described ink-jet printing head, and described first ejection layer has at least one first opening;
Described second ejection layer be disposed on described first ejection layer, and described second ejection layer has at least one second opening, communicates with described first opening.
Described first ejection layer is made by hydrophilic material, makes the hole wall surface of the opening of winning be hydrophily, and described second ejection layer is made by the repellency material, makes the hole wall surface of second opening be repellency.
2. spray nozzle sheet as claimed in claim 1, it is further characterized in that the material of described first ejection layer comprises that the optically active polymer material is revolved in sense, optically active polymer material or metal material are revolved in non-sense.
3. spray nozzle sheet as claimed in claim 1, it is further characterized in that the material of described second ejection layer comprises that the optically active polymer material is revolved in sense, optically active polymer material, metal or pottery are revolved in non-sense.
4. spray nozzle sheet processing procedure is applicable to the processing procedure of an ink-jet printing head, to it is characterized in that described spray nozzle sheet processing procedure comprises the following steps: at least in order to make a spray nozzle sheet on described ink-jet printing head
Form one first ejection layer of patterning on described ink-jet printing head, described first ejection layer is made by hydrophilic material, and wherein said first ejection layer has one first opening, and the hole wall surface of described first opening is hydrophily;
On described first ejection layer, form one second ejection layer of patterning, described second ejection layer is made by the repellency material, wherein said second ejection layer has one second opening, and it communicates with described first opening, and the hole wall surface of described second opening is repellency.
5. as spray nozzle sheet processing procedure as described in the claim 4, it is characterized in that it comprises following processing procedure:
On the layer of black chamber, form first ejection layer with pressing, spin coating or spray pattern.
6. as spray nozzle sheet processing procedure as described in the claim 4, it is characterized in that it comprises following processing procedure:
On first ejection layer, form second ejection layer with pressing, spin coating, sprinkling or physical property vapour deposition mode;
7. as spray nozzle sheet processing procedure as described in the claim 6, it is characterized in that it comprises following processing procedure:
The last second ejection layer material on first ejection layer, it is a sensitization repellency macromolecular material; On the second ejection layer material, expose, processing procedure such as baking, development; Form second ejection layer of patterning, wherein said second ejection layer has one second opening.
8. spray nozzle sheet processing procedure as claimed in claim 7, it is further characterized in that described sensitization repellency macromolecular material comprises spin-on glasses.
9. as spray nozzle sheet processing procedure as described in the claim 6, it is characterized in that it comprises following processing procedure:
The last second ejection layer material on first ejection layer, it is non-sensitization repellency macromolecular material or metal, ceramic material; The optical activity material is revolved in sense on modes such as pressing on the second ejection layer material, spin coating or sprinkling again, after expose, processing procedure such as baking, development, again the second ejection layer material is formed second ejection layer of patterning with etch process, the optical activity material is revolved in the sense that remove on the second ejection layer material with etching, impregnating processing procedure the back, and wherein said second ejection layer has one second opening.
10. spray nozzle sheet processing procedure as claimed in claim 4, it is further characterized in that, forms first ejection layer of patterning on ink-jet printing head with etching method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021403562A CN1298537C (en) | 2002-06-27 | 2002-06-27 | Spray-nozzle piece and making process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021403562A CN1298537C (en) | 2002-06-27 | 2002-06-27 | Spray-nozzle piece and making process thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN1465481A CN1465481A (en) | 2004-01-07 |
| CN1298537C true CN1298537C (en) | 2007-02-07 |
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| CNB021403562A Expired - Fee Related CN1298537C (en) | 2002-06-27 | 2002-06-27 | Spray-nozzle piece and making process thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102642404B (en) * | 2006-12-01 | 2015-10-28 | 富士胶卷迪马蒂克斯股份有限公司 | Non-wetting coating on fluid ejector |
| CN105599452A (en) * | 2016-03-03 | 2016-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Multilayer material orifice structure and printer |
| CN108501532B (en) * | 2018-04-09 | 2020-02-14 | 京东方科技集团股份有限公司 | Ink jet print head, printer, nozzle assembly of printer and manufacturing method thereof |
| CN113059912B (en) * | 2021-03-25 | 2022-09-13 | 苏州印科杰特半导体科技有限公司 | Multilayer polymer ink-jet chamber capable of preventing ink from overflowing and manufacturing process thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5502470A (en) * | 1991-02-04 | 1996-03-26 | Seiko Epson Corporation | Ink jet recording head and process for producing the same |
| US5759421A (en) * | 1993-10-29 | 1998-06-02 | Seiko Epson Corporation | Nozzle plate for ink jet printer and method of manufacturing said nozzle plate |
| US6016601A (en) * | 1991-03-28 | 2000-01-25 | Seiko Epson Corporation | Method of preparing the nozzle plate |
| CN1078537C (en) * | 1996-01-23 | 2002-01-30 | 精工爱普生株式会社 | Ink jet printer head, method of manufacturing the same, and ink |
-
2002
- 2002-06-27 CN CNB021403562A patent/CN1298537C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5502470A (en) * | 1991-02-04 | 1996-03-26 | Seiko Epson Corporation | Ink jet recording head and process for producing the same |
| US6016601A (en) * | 1991-03-28 | 2000-01-25 | Seiko Epson Corporation | Method of preparing the nozzle plate |
| US5759421A (en) * | 1993-10-29 | 1998-06-02 | Seiko Epson Corporation | Nozzle plate for ink jet printer and method of manufacturing said nozzle plate |
| US6126269A (en) * | 1993-10-29 | 2000-10-03 | Seiko Epson Corporation | Nozzle plate for ink jet printer and method of manufacturing said nozzle plate |
| CN1078537C (en) * | 1996-01-23 | 2002-01-30 | 精工爱普生株式会社 | Ink jet printer head, method of manufacturing the same, and ink |
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| CN1465481A (en) | 2004-01-07 |
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