CN1276804C

CN1276804C - Improvements in drying and cleaning objects using controlled aerosols and gases

Info

Publication number: CN1276804C
Application number: CNB998170127A
Authority: CN
Inventors: 加里·W·费雷尔
Original assignee: Individual
Current assignee: Lam Research AG
Priority date: 1999-10-12
Filing date: 1999-10-12
Publication date: 2006-09-27
Anticipated expiration: 2019-10-12
Also published as: JP2003517917A; CN1398206A; EP1235653A1; KR100604458B1; KR20020068034A; WO2001026830A1; AU1110400A

Abstract

The present invention relates to a method and a device for cleaning and/or drying a wetted or polluted object in a production process. The object is immersed in flushing liquid (27) in a closed chamber (11); aerosol granules (39) of selected liquid are introduced to the upper part of the surface (29) of the flushing liquid; a thin film (30) is formed on the surface. When the flushing liquid is slowly discharged, some aerosol granules fall on the exposed surfaces (14A, 14B, 14C) of the object, and the flushing liquid residue on the exposed surfaces is displaced and removed via a 'chemical scraping brush' effect. By the process, the impurity on the surfaces is simultaneously removed. When the flushing liquid is discharged from the chamber, chamber pressure is kept in a value equal to or near external pressure. Inert gas flow is used for providing aerosol granules with smaller sizes and/or wider dispersion in the chamber. Continuous filtration and flow division filtration (159, 161, 175) are used for removing most of impurity in the selected liquid. A liquid deflector causes the primary flow direction of the selected liquid to be changed to an auxiliary filter to remove most of the 'peak' of impurity particles appearing at the time that a system begins to start. An improved surface used for generating the aerosol granules is provided.

Description

Use controlled aerosol and gas to come the improvement of dry and cleaning objects

Technical field

The present invention relates to use the aerosol that generates by sound wave or ultrasonic unit and come dry and cleaning manufacturing object, comprise the improvement of electronic component.

Background technology

The made object of operation that comprises using liquid and other fluid needs its parts are carried out dry up hill and dale before manufacturing process proceeds.For example, in the manufacturing of integrated circuit, doping, photomask often need be used particular fluid stage in etching and the passivating process, removes liquid residue before the next stage operation.These liquid residue dry and to remove must be completely, but Utopian dry run should finish in short relatively time interval, and the energy of consumes least and chemical substance are finished dry run.

Some workmans have been found that with being heated or overheated gas comes drying part, comprise the method for integrated circuit.These methods adopt and are heated or overheated gas, or the straight beam radiation comes the drying objects surface; Perhaps they use a ultrasonic beam to remove the impurity of body surface with the mode that an activity chemistry groove combines, or apply a material of expecting to body surface.These methods are complicated, need operation at high temperature usually, often need the processing time of a few minutes, and often need to adopt the locular wall with special repellence to be used for process chamber.

People are needed to be a kind of be used for method and relevant apparatus dry and cleaning manufacture process object, it at room temperature works good and simple, its effect is completely really, without any significant residue, it can be finished being as short as in time of one minute, indoor the carrying out that it can be made by any material almost at a locular wall, and it only needs to use very small amount of drier, minimum simultaneously energy consumption, particularly heat energy.Ideal situation is, this processing procedure all is achievable in a wide temperature range, and can change in proportion easily and be applicable to any size surface.

Summary of the invention

The present invention has satisfied these needs.By using a spot of low surface tension liquid to add that (can select) use a kind of cleaning agent capable of circulation simply, the invention provides a kind of method of drying and/or cleaning objects and the improvement of relevant apparatus.In one embodiment, the dry object of is immersed in the flushing liquor in the chamber, for example water.The flushing liquor surface coverage a for example unusual film of isopropyl alcohol (" IPA ") of the selected liquid of a kind of low surface tension, and its aerosol that is generated by sound wave or a small gangs of selected liquid of ultrasonic vibration forms.Other suitable liquid comprises ethanol, methyl alcohol, oxolane, acetone, perflexane, hexane and ether.Film is along with the needs continuous supplementation, and the flushing liquor that covers the drying objects of wanting is simultaneously discharged lentamente.Along with the discharge of flushing liquor and film, selected liquid is contactant surface and remove the residue that anhydrates by following one " chemical squeegeeing " process that will discuss temporarily.Selectable, after the chamber is drained, with a kind of heat or environment temperature under cleaning solution, Gan Zao N for example ₂, CO or CO ₂Gas carries out an extra chamber to object and purifies or dry run.Selectable, when flushing liquor was discharged in the chamber, constant pressure maintained and is close to or higher than outside pressure.

In first improved, the make-up gas stream of two-forty made the expansion of selected liquid can be controlled, and generated and have the aerosol diameter that reduces and " mist " of improved drying and/or cleaning action.

In second improvement, have the aerosol diameter that reduces and the mist of improved drying and/or cleaning action through the generation that combines with a baffle of the make-up gas stream of control, baffle is used to catch heavier selected liquid particulate (aerocolloidal those particulates that for example, have diameter＞10 μ m).

In the 3rd improvement, selected liquid circulates constantly and filters to remove diameter continuously basically greater than a set point value, as all impurity of 0.05 μ m.

In the 4th improvement, adopting a flashboard on the selected liquid induction system to suppress or to eliminate the contaminant particles " peak value " that occurs in the start-up period in conveying device substantially.

In the 5th improvement, provide one to adopt an inert particle to form the improved aerosol particle generation system on surface, it can improve the aerosol that the aerosol diameter is controlled and generated many more minor diameters.

Can change the processing parameter of handling with control and comprise the vibration frequency that generates aerosol particle by selected liquid, one representational aerosol particle diameter, the selected liquid of the transfer rate of selected liquid and conveying is to generate the temperature of aerosol particle, the temperature of the dry liquid of used (if there is), and the selection of used selected liquid and dry liquid (if there is).

It is the indoor object that 10-20 rises with drying at volume that the present invention only needs few selected liquid to 1-2 milliliter (ml), and if desired, the volume of chamber can be littler or bigger.This method has several benefits.At first, this processing or near carrying out under the room temperature, energy consumption seldom and does not need to use and is heated or overheated liquid or gas comes dry.The second, this handles the very small amount of selected liquid of use in a big volume flush liquid (10-20 liter), and the mixing energy of flushing liquor and selected liquid is normally finished and without the specified handler that needs deleterious material like this.The 3rd, can use the selected liquid of multiple cheapness.The 4th, indoor residual flushing liquor steam reduced to minimum after the coverlay of the selected liquid of use made discharge opeing.The 5th, this processing is easy to increase in proportion or reduce, and without any the change of the substance on the device.The 6th, the major diameter impurity of those not chemical cohesives at body surface has been removed in this processing.

Description of drawings

Fig. 1 has represented the appropriate device in realization one embodiment of the present of invention, and wherein object is immersed in the flushing liquor in the chamber;

Fig. 2 A, 2B, 2C and 2D are the schematic diagram that is suitable for the aerocolloidal vibrating nozzle of generation of the present invention's use;

Fig. 2 E is suitable for the inert gas inflation pressure time history plot that Fig. 2 D device adopts;

Fig. 3 has represented to discharge in the chamber among Fig. 1 of partial flushing liquid and has installed;

Fig. 4 is the flow chart of an embodiment of this method;

Fig. 5 is the schematic diagram that is used for the continuous filter unit of a selected liquid according to the present invention;

Fig. 6 is the schematic diagram that can produce the flap arrangement that induction system uses with an aerosol according to the present invention;

Fig. 7 is the schematic diagram according to aerosol generation device of the present invention.

The specific embodiment

Fig. 1 has represented to help realizing an embodiment of device 10 of the present invention.Sealing chamber 11 is limited by shell 12 and has a support (selectable) in order to supporting

object

13A, and 13B, 13C etc. want dry object.With

object

13A, 13B, 13C put into and shift out chamber 11 via movable, hinged or other exercisable inlet 15, and this inlet 15 is the part of shell 12.When inlet 15 was closed or meshed, the chamber just was closed, and preferably adopts air hermetic, optionally removed indoor any residual gas simultaneously.First passage mouth 21 and corresponding first valve 23 are connected on the shell 12 and with a water source 25 or other suitable flushing liquor 27 and are connected,

object

13A, and 13B, 13C are immersed in this water or the flushing liquor at first.Second channel mouth 31 and corresponding second valve 33 be connected on the shell 12 and with the selected liquid source 35 of a selected dry liquid or fluid 37 (" selected liquid "), for example the pressure pressurized canister that maintains 5-50psi is connected, be somebody's turn to do selected dry liquid or fluid and be mainly used to drying

objects

13A, 13B, 13C.

Third channel mouth 41 that can be identical with the first passage mouth 21 and first valve 23 and corresponding the 3rd valve 43 are connected on the shell 12 and are connected with first liquid or fluid tank or other first suitable discharge opeing receiver 45, and this first discharge opeing receiver 45 is used for receiving and eject flushing liquor 27 and the absorbed selected liquid 37 in chamber 11.Four-way road junction 51 that can be identical with the second channel mouth 31 and second valve 33 and corresponding the 4th valve 53 are connected on the shell 12 and are connected with second liquid or fluid tank or other second suitable pumping equipment 55, and this second pumping equipment 55 is used for receiving and eject selected liquid 37 in chamber 11 and the aerosol drops 39 in the selected liquid.

Originally, with

object

13A, 13B, 13C is placed on the support or box (not shown) in the chamber 11, close or mesh inlet 15, the chamber has and equals or a little higher than atmospheric pressure, and flushing liquor 27 imports indoorly via the first passage mouth 21 and first valve 23 then, and object is immersed in the flushing liquor fully like this.Then first valve 23 cuts out.Optionally,

object

13A, 13B, 13C can be partially immersed in 27 li of flushing liquors, and the part of body surface just is exposed to the top that flushing liquor appears the surface like this.

Then a small gangs of selected liquid 37 flows through second channel mouth 31 and second valve 33 and is received by the sound wave or the ultrasonic nozzle 63 of a Piezoelectric Driving 61 and vibration, this sound wave or ultrasonic nozzle 63 are with a selected frequency f vibration, f is positioned at scope 10KHz≤f≤10, in the 000KHz, preferably be positioned at narrower range 20KHz≤f≤100KHz.Driving head 61 links to each other with a frequency generator 64 and is driven by it, and this frequency generator 64 preferably is positioned at chamber 11 outside also permissions and selects a vibration frequency f in indicating range.When selected liquid 37 arrives vibrating nozzle 63, nozzle begins vibration, will select liquid and be converted into many aerosol drops 39, and aerosol drops inlet chamber 11 and having occupied also is not rinsed liquid 27 and fills and be not soaked with object 13A in the chamber, 13B, the top 11U's of 13C is most of or whole.

Fig. 2 A has represented to be used for a suitable drive head 61A and the vibrating nozzle 63A of device shown in Figure 1.Vibrating nozzle 63A preferably is formed with the open tubular column 65A of diameter d (post) ≈ 200 μ m within it, and selected liquid 37 (being decorated with cross-hauling) flows via open tubular column.Then vibrating nozzle " is shaken off " droplet 39 of selecting liquid 37, chamber 11 parts that it forms the aerosol drops of substantial cylindrical shape and enters the flushing liquor top.

Fig. 2 B has represented driving head 61B and the vibrating nozzle 63B that another is suitable, comprises an elongated hollow post 65B in it, and selected liquid 37 flows via this open tubular column 65B.One shell 67B is around nozzle 63B and with circle heat or cold inert gas 69B guiding aerosol drops 39, aerosol drops with in conical or other shape inlet chamber that needs to quicken aerosol drops in whole indoor distribution.Also can adopt many other combinations of driving head/vibrating nozzle here.

We have found that adopting a higher frequency f to be easy to produce has the aerosol drops 39 of less average diameter d (on average).For the vibration frequency of scope in 20KHz≤f≤100KHz, the scope of our estimated average aerosol drops diameter is 10 μ m≤d (on average)≤50 μ m.Mean droplet diameter can change by diameter d (film) that changes fenestra 66 and the vibration frequency that changes vibrating nozzle 63A or 63B.

Selected liquid 37 should be not and

object

13A, and 13B, the wall of 13C and chamber 11 react and should have one and compare fully low surface tension with the surface tension of flushing liquor.Suitable selected liquid comprises isopropyl alcohol, ethanol, methyl alcohol, oxolane, acetone, perflexane, hexane and ether, and many other low surface tension liquid and fluids.Adopt the selected liquid of any conduct in these materials not need to provide the locular wall of making by special corrosion resistant material.

Selected liquid can be kept at than the pressure of the high 5-50psi of atmospheric pressure in the selected liquid source 35 so that carry and suppress a small amount of volatilization of selected liquid, otherwise volatilization can naturally-occurring.Best flushing liquor deionized water has a surface tension σ=73dynes/cm 20 ℃ of T ≈, organic molecule is such as methyl alcohol, ethanol, isopropyl alcohol, n-hexane and ether have the surface tension of scope at 17dynes/cm≤σ≤23dynes/cm during in T=20 ℃, so at room temperature σ (selected liquid)＜＜σ (flushing liquor).

Preferably adopt here and be in or near the selected liquid 37 of room temperature.Adopt the selected liquid 37 of higher temperature to reduce the surface tension of flushing liquor 27 with respect to the surface tension of selected liquid 37, thus the chemical squeegeeing effect that hinders this process to rely on.

Aerosol particle is the molecule of a group or the selected liquid 37 of a pile, and it does not experience the phase transformation that changes vapor form into.Therefore, provide by vibrating nozzle, changing the selected liquid 37 of a gram into aerosol drops 39 energy needed E (aerosol) (is 1.6 watts for a typical sonic head, or under the flow velocity of 2ml/min less than 100Joules/gm) is far smaller than and is used for heating and one gram is selected liquid 37 changes the needed vaporization energy E of its steam form (vaporization) into.We estimate that ratio E (aerosol)/E (vaporization) is less than 2%.The generation of aerosol particle can be adopted a quite high temperature in room temperature or near carrying out under the room temperature in this process, for example T=60-200 ℃, both there is no need also inadvisable.Aerosol particle is formed in the sealing chamber with the energy consumption less than 2 joules of per seconds.In addition, only need the selected liquid 37 of smallest number, be low to moderate 1-5ml, come the several object 13A in the

hothouse

11,13B, 13C.

Aerosol drops 39 moves to chamber 11, and many in these drop on the exposed surface 29 (preferably stably) of flushing liquor 27 becomes the film 30 with a variable thickness h (aerosol).The time that estimating to form this film 30 needs is 40-60 second.To diffuse in the flushing liquor 27 with the part in the aerosol drops 39 that film 30 combines, like this if replenish this film with extra aerosol drops, film 30 will disappear rapidly and fully.Preferably, regulate the volume flow dose rate r (selected liquid) of selected liquid 37 relative vibrating nozzles 63, thereby the speed that aerosol drops 39 is combined with film 30 is enough selected thickness h (aerosol) to keep or to increase one of film soon.The preferable range of film thickness h (aerosol) is 0.5mm≤h (aerosol)≤5mm, but can increase this thickness by increasing volume flow dose rate r (selected liquid).Has about 900cm for one ²The exposure () room surface 11 that is used for flushing liquor 27 of area, volume flow dose rate r (selected liquid)=selected liquid 37 of r2=per minute 1-5ml is just enough.Usually, volume flow dose rate r2=1-2ml/min is just enough high.For the semiconductor wafer of diameter 10-20cm, be approximately 20-40 second with needed time of discharge rate emptying chamber of 5mm/sec.Therefore, in forming the film and the process in the needed time interval of emptying chamber (60-100 second), considerably less selected liquid 37 is absorbed or diffuses in the flushing liquor 27.

Owing to use so few selected liquid 37 in handling, selected liquid source 35 can have a relatively little volume, and is little as 20-25ml, and selected simultaneously liquid source 35 can place apart from the chamber 11 positions quite far away, as 1-4 rice.This has strengthened the security of handling, and employed selected liquid has one and hangs down ignition point or it can cause a blast in this processings.

Under the treatment temperature of room temperature preferably, the equilibrium vapour pressure coefficient of selected liquid during based on this temperature, very small amount of selected liquid 37 can the natures vaporization.This vaporization part can be relatively still less in the chamber 11 that seals when room temperature, and the vaporization of selected liquid 37 simultaneously partly can promptly reach the aerosol of selecting liquid 37 with liquid film and partly reach balance.Employing can produce selected liquid 37 with medium higher equilibrium vapour pressure coefficient and more selected liquid steam far above the treatment temperature of room temperature.Naturally the useful part of dry run is not thought in the vaporization of the selected liquid 37 of this fraction.

Behind the film 30 that generates an aerosol drops on the surface 29 of flushing liquor 27, this may need 40-60 second, via third channel mouth 41 and the 3rd valve 43 lentamente with flushing liquor 27 in chamber 11 drains into Drainage tank 45.Accommodate 10-20 for one and rise for the chamber of flushing liquor 27, emptying flushing liquor 27 is estimated to need 20-40 second.The preferable range of discharge rate r (discharge) is that the height of flushing liquor 27 in the per second chamber 11 reduces 3-10mm, is a suitable discharge rate for this process r (discharge)=5mm/sec.Discharge opeing is carried out lentamente to maintain the film 30 of the selected liquid 37 on the flushing liquor exposed surface 29.Along with the carrying out that flushing liquor 27 is discharged, the selected liquid 37 of shallow bid flows through vibrating nozzle 63 and generates aerosol drops 39 continuously.The volume flow dose rate r of selected liquid 37 (selected liquid) can heighten or turn down along with the carrying out of discharging flushing liquor 27 (and absorbed aerosol drops 39).

Fig. 2 C represents improved ultrasonic driving apparatus, and its conveying is used to clean and/or the selected liquid of drying objects, 117 and 119 when room temperature (for example, IPA) of aerosol form.First passes liquidus 101 carries first end of selected liquid to one axial chamber 105 from a selected liquid source 103, axial chamber is limited by the ultrasonic nozzle 107 of a near cylindrical, this ultrasonic nozzle is to be positioned at a selected frequency range, and as 10KHz≤f≤10, the frequency f in the 000KHz is vibrated.Nozzle 107 is driven by a ultrasonic wave driving head 109 that can comprise several current-carrying coils.Along with the alternation repeatedly of the direction of the winding current, can comprise that the nozzle 107 of a piezoelectric begins to vibrate also " to shake off " the little aerosol particle of selecting liquid under the alternation effect of coil current.

Device comprises that also second passes liquidus 111 among Fig. 2 C, and it is supplied with by an inert gas source 113 and deliver a gas to an inert gas plenum chamber 114, and at the inflation locular wall 115 that has an aperture 116 near the second end place of axial chamber 105.Pass liquidus 111 and be preferably under about room temperature flow rate conveying with 2-10 Liter Per Minute (LPM) as N ₂Or the inert gas of CO is to plenum chamber 114.Part or all inert gas is selected the direction ejection of (outwards) with one at 116 places, plenum chamber hole in plenum chamber 114, thereby produces the expansion stream 117 that a local total gas pressure that reduces causes selecting the liquid aerosol particle.If there is not inert gas flow to overcharge plenum openings 116, selected liquid aerosol particle 119 then only occurs, and only below nozzle 107 second ends, reach middle section around nozzle shaft AA.Add the inert gas flow through plenum chamber hole 116, aerosol particle is just at " bevel angle " θ bigger when not having inert gas to exist _{C, C}Interior flowing.

Fig. 2 D also represents improved ultrasonic driving apparatus, and its conveying is used to clean and/or the selected liquid of drying objects, 137 and 139 of aerosol form.First passes liquidus 121, one selected liquid sources 123, an axial chamber 125 that is limited by the ultrasonic nozzle 127 of a near cylindrical, one ultrasonic wave driving head 129, the second passes liquidus 131, one inert gas sources 133, one inert gas plenum chamber, 134, one inflation locular walls 135, and the corresponding component 101 that installs among plenum chamber hole 136 and Fig. 2 C, 103,105,107,109,111,113,114,115, and 116 play identical purposes.Embodiment shown in Fig. 2 D has relevant " bevel angle " θ bigger when not having inert gas to exist with generation _{C, D}Aerosol particle 137.

In Fig. 2 D, inert gas is pressed with the inflation of rough unanimity continuously, or with one of the variation of approximate period property inflation pressure p (inflation is pressed) ejection in plenum chamber hole 136 between a minimum pressure values and a maximum pressure value in time shown in Fig. 2 E.Pressure oscillation has produced the inert gas pressure ripple 141 that has around the related pressure gradient in plenum chamber hole 136.This pressure wave 141 makes the aerosol particle 117 away from nozzle 127 middle sections be separated into littler colony, thereby generates littler aerosol particle and at a wideer relevant bevel angle θ _{C, D}In expand outwardly.Its middle section that is generated will keep their bigger grain diameter near the aerosol particle 139 of the axle of nozzle 127 and be positioned at one or more interior baffles of nozzle 127 lower end middle sections or absorber 141 and 143 is caught.The selected liquid aerosol particle 139 of being caught by grain baffle 141 and 143 drains in the storagetank 144, can be recycled if wish.Embodiment shown in Fig. 2 D has more relevant bevel angle θ with generation _{C, D}And the aerosol particle 137 of less average particle diameter, because trending towards being parallel to one or more the baffles 141 and 143 that nozzle shaft AA moved and trended towards being placed on central authorities, larger-diameter aerosol particle catches.

Among Fig. 3 along with flushing liquor 27 is discharged in chamber 11,

object

13A, 13B, the surperficial 14A of 13C, 14B, 14C little by little are exposed to the top of exposing flushing liquor surface 29 and coverlay 30, and the aerosol drops 39 in the top 11U of chamber drops on exposed surface 14A simultaneously, 14B is on the 14C, as shown in Figure 3.The part of the film 30 of selected liquid 37 also drops on

body surface

14A, 14B, and on the expose portion of 14C, and not along with flushing liquor 27 moves towards third channel mouth 41.Selected liquid 37 makes it have the surface tension σ littler than the surface tension σ (flushing liquor) of flushing liquor 27 (selected liquid) through selecting.If flushing liquor 27 is a water, then at room temperature corresponding surface tension is σ (flushing liquor)=73dynes/cm.In this case, selected liquid 37 can be isopropyl alcohol (" IPA ") or ethanol or methyl alcohol, its at room temperature surface tension be respectively σ=21.7dynes/cm, 22.6dynes/cm, and 22.8dynes/cm.Selected liquid 37 wants it adopting the ability that all has replacement or dissolving flushing liquor under any treatment temperature also through selecting.Here can adopt room temperature (T=20 ℃), even lower temperature.This processing also can be worked under higher a little temperature satisfactorily.

Along with

body surface

14A, 14B, the expose portion of 14C receives the aerosol drops 39 of selected liquid 37, has formed the new film 16A of selected liquid 37 or aerosol drops 39 on these expose portions, 16B, 16C.Along with flushing liquor 27 continues to discharge in chamber 11, and after being emptied completely, at film 16A, 16B, selected liquid 37 among the 16C has replaced most of or has remained in body surface 14A fully, 14B, the flushing liquor 27 on the 14C expose portion, this mainly be because selected liquid 37 surface tension σ (selected liquid) be far smaller than the surface tension σ (flushing liquor) of flushing liquor 27.The flushing liquor 27 that chosen liquid replaces is along

object

13A, and 13B, the exposed surface 14A of 13C, 14B, 14C flow down and drain with indoor most of flushing liquors 27.At

object

13A, 13B, the exposed surface 14A of 13C, 14B, the selected liquid 37 of the last formation of 14C film also flows down along these surfaces and drains with most of flushing liquors 27.The film 16A of selected liquid 37,16B, 16C just as " chemical squeegeeing " from

object

13A, 13B, the exposed surface 14A of 13C, 14B removes flushing liquor 27 and selected liquid 37 on the 14C.

This is to objects ' exposed

surfaces

14A, 14B, and the chemical squeegeeing of 14C also has another benefit.This processing is not only dry, and body surface has also been removed most bigger contaminant particles on these surfaces, as long as these contaminant particles do not have chemical bonding to body surfaces.We have checked some naked silicon faces before applying the chemical squeegeeing processing, find to have on these surfaces many diameters to be at least the contaminant particles of 0.3 μ m, shown in (2) hurdle in the table 1.Then we apply chemical squeegeeing and handle, and have checked the same surface after chemical squeegeeing is finished dealing with, and find to have reduced in the finish dealing with quantity of rear impurity particulate of chemical squeegeeing, shown in (3) hurdle in the table 1.These results represent that only chemical squeegeeing has just been removed the contaminant particles of the diameter of 12-100% greater than 0.3 μ m, remove and how much depend on its size.

Table 1. chemical squeegeeing is removed big contaminant particles

Particle size	Before the chemical squeegeeing	Behind the chemical squeegeeing
Particle size	Before the chemical squeegeeing	Behind the chemical squeegeeing	0.329-0.517μm 0.518-0.810 0.811-1.270 1.271-1.990 1.991-3.130 3.131-4.910	8 7 7 3 6 6	7 2 2 1 1 0

All discharging and object 13A in chamber 11 near flushing

liquor

27,13B, the surperficial 14A of 13C when 14B, 14C expose fully, closes the second channel mouth 31 and second valve 33, closes vibrating nozzle 63, and opens four-way road junction 51 and the 4th valve 53.Follow residual selected liquid 37, aerosol drops 39, flushing liquor 27, and any steam of flushing liquor and the generation of selected liquid is removed in chamber 11 via four-way road junction 51.This section processes may need 10-20 second again.If but wished the sustainable longer time interval with from film 16A, 16B would remove residual selected liquid 37 and any residual flushing liquor 27 fully in 16C and the chamber 11.To

object

13A, 13B, the dry of 13C just thoroughly finished now.

Optionally, the drying nitrogen N of heat or room temperature ₂, carbon monoxide CO, carbon dioxide CO ₂Or other inert gas can import chamber 11 to purge chamber 11 and/or to remove

object

13A, 13B, 13C exposed

surface

14A, 14B, any residuals on the 14C via five-way road junction 71 and corresponding the 5th valve 73.Chamber 11 is received from one and purges gas tank 75 and the hot blow scavenging that comes, and sweep gas shifts out via can be respectively identical with five-way road junction 71 and corresponding the 5th valve 73 the 6th passway 81 and corresponding the 6th valve 83.The one useless gas tank 85 that purges receives from the hot blow scavenging in the chamber 11 to recycle, to handle or to dispose.If being included, this part processing may need 30-60 second again.

Fig. 4 is for representing the flow chart of the operating procedure that one embodiment of the invention is taked.In the step 91, the object 13A that will be dried and/or clean, 13B, 13C puts into indoor, then close chamber.In the step 93, flushing liquor 27 is imported into indoor with part or (best) complete submerged objects.In the step 95,, on the exposed surface of flushing liquor, form and maintain the film of the selected liquid of one deck simultaneously in the aerosol drops of the selected liquid 37 of indoor formation.In the step 97, in the chamber, discharge flushing liquor 27 and any absorbed selected liquid 37 lentamente and be exposed in the aerosol drops, and on body surface, form the film of selected liquid with body surface the most at last; Optionally, keep constant pressure in being close to or higher than ambient air pressure.In the step 99, the film of selected liquid carries out chemical squeegeeing to remove any residual flushing liquor 27 and residual selected liquid 37 and contaminant particles on body surface on the body surface.In the step 101 (optionally), in the chamber, remove any residual selected liquid 37 and flushing liquor 27.In the step 103 (optionally), a sweep gas through the chamber in the chamber, to remove any residual gas and/or liquid particle.The object that has been dried now and/or has cleaned can shift out in the chamber or can further handle in the chamber.

No matter how many discharge rate r1 selects, and shifting out of flushing liquor 27 will be in indoor generation part vacuum in the chamber 11, and this vacuum can be by not alleviated at the indoor a small amount of selected liquid that is received from driving head 61 and vibrating nozzle 63 fully.If chamber 11 is absolutely gas-tights, then seldom or do not have ambient atmos along with the generation of vacuum in the inlet chamber.But many chambers are not absolutely gas-tights; In this case, the ambient atmos of a right quantity may be in this gas has one or more contaminant particles meeting inlet chambers, and these contaminant particles can drop on selected

object

13A, 13B, and the exposed surface 14A of 13C, 14B is on the 14C.This situation is in the test of disclosed step and device here some, but is not to have observed in all.

With reference to Fig. 3, optionally provide a complete inertia place of gas 122 as N ₂, CO or CO ₂A storagetank 121, it is communicated with chamber 11 liquid.Inert gas 122 in the storagetank 121 is through a passway 123 and a corresponding valve and pressure control device 125 and inlet chamber 11.This valve and pressure control device 125 sensing chamber 11 are interior along with flushing liquor 27 is discharged and the change pressure of generation by passage 41 and valve 43 in the chamber.In response to this change pressure, valve and pressure control device 125 allow sufficient inert gas 122 in inert gas storagetank 121 inlet chambers constant pressure is maintained a pressure p ≈ p (external world), wherein p (external world) is approximately equal to outdoor local pressure, or a higher pressure.If the chamber is not an absolutely gas-tight, the best a little higher than local external pressure p of the constant pressure p here (external world) is so that some inert gases 122 are easy to shift out the inflow that enters the external world and hinder ambient atmos in chamber 11.Optionally, the pressure p that keeps in the chamber 11 can be lower than p (external world) slightly, may hang down as 0.8p (external world), still can hinder gas in extraneous inlet chamber.All in chamber 11, discharge and selected object 13A at flushing

liquor

27,13B, the surperficial 14A of 13C, 14B, after 14C bone dry and/or the cleaning, can be before the next step of handling selected object carries out from indoor inert gas 122 to the one inert gas storagetanks 127 of removing.

Selectable, if 11 discharge rate r1 controls very goodly from the chamber with flushing liquor 27, valve and pressure control device 125 just there is no need the internal pressure of sensing chamber 11.In this method, valve and pressure control device 125 allow inert gas 122 to flow out from inert gas storagetank 121 with a programme controlled volume flow dose rate r3, wherein along with flushing liquor 27 is discharged in the chamber, r3 can keep the internal pressure p ≈ p (external world) of chamber 11 or be higher than P (external world).

The temperature T of inert gas 122 preferably equals or near the temperature of flushing liquor, the temperature of flushing liquor is generally room temperature or is somewhat colder or warmer than room temperature.Purge gas reservoir 75 also can be used as inert gas storagetank 121, needs to comprise valve and pressure control device 125 simultaneously.

Fig. 5 represents improved flow filtration device, its objective is to make selected liquid (IPA or other) and the impurity relative separation of size greater than a relative minor diameter.One selected liquid (for example, IPA or other) leave in the SL storagetank 151 and pass liquidus 153 and be attracted along first, by first check-valves 155, this constant volume filling pump has the volume flow dose rate that is preferably under the room temperature in the scope 1-10LPM under the effect of a positive displacement pump 157.Selected liquid in first line 153 is through first filter 159, this first filter 159 preferably has the hole of many diameters in scope 0.1-0.2 μ m, then through second filter 161, this second filter 161 preferably has the hole (preferable ≈ 0.05 μ m) of many diameters in scope 0.2-0.1 μ m.First filter 159 is removed in the selected liquid diameter greater than the majority or all dirt particulate of the first filter hole diameter.Second filter 161 is removed in the selected liquid diameter and has more particularly been removed diameter all remaining contaminant particles greater than the first filter hole diameter greater than the majority or all dirt particulate of the second filter hole diameter.Selectable, can leave out in first and

second filters

159 and 161.

Then selected liquid passes to first line and second along first line 153 and passes liquidus 165 and the 3rd and pass the crossing node 163 of liquidus 167.Selected liquid in second line 165 is got back to SL storagetank 151 through second check-valves 169.Selected liquid in the three-way 167 is through the 3rd check-valves 171 (a best needle valve), again through having the 3rd filter 175 in the hole (preferable ≈ 0.05 μ m) of many diameters in scope 0.02-0.1 μ m.Then one filtered the selected liquid that SL storagetank 179 receives in the three-way 167, this has filtered SL storagetank 179 is by by the inert gas supercharging in the inert gas line 181 of an inert gas source 183 supplies, and this inert gas source 183 can be deposited N ₂, CO or other suitable inert gas.Selected liquid after then filtering for three times through a vibration head and nozzle 185 with a cleaning and/or a dry object.Optionally, SL storagetank 151 has a pressure sensor and adjuster 187, and this pressure sensor and adjuster 187 are kept approximate constant pressure in this storagetank by pressure feedback.

In three filters 159,161 and 175 each all is preferably a track etching polycarbonate filter.First and

second passes liquidus

153 and 165 and is preferably the polyfluortetraethylene pipe of interior diameter in scope 0.125-0.25mm.The 3rd passes liquidus 167 is preferably the polyfluortetraethylene pipe of interior diameter in scope 0.1-0.2mm.

Open and the 3rd check-valves 171 when closing when second check-valves 169, selected liquid is through first and

second filter

159 and 161, and is mobile in first and

second passes liquidus

153 and 165, and get back to SL storagetank 151.When second check-valves 169 cuts out and the 3rd check-valves 171 when opening, selected liquid is fully through the first, and second and third filter 159,161 and 175 passes in the

liquidus

153 and 167 the first and the 3rd and to flow, and passes through nozzle 185.Whenever at least second and third check-valves 169 and one of 171 is opened, and filter operation just can not stop like this, and selected liquid is fully continuously through two or three filter circulation.Most of contaminant particles in the selected liquid are removed in first line-second line liquid route.Other contaminant particles if present, is removed in first line-three-way liquid route, and this route is selected part with further filtration as one in the selected liquid of removing along separate routes after filtration.

Fig. 6 indication device is used for suppressing or eliminating one " peak value " contaminant particles that is occurred when start static back in the reasonable time selecting liquid (SL) conveying device through a section.A SL storagetank 191 is given via a SL liquidus 193 feed flows in one SL source 195.This SL storagetank 191 is also by an inert gas supercharging, and inert gas source 199 is supplied with this inert gas via an inert gas line 197.The SL storagetank has a nozzle or other liquid output 201 is used for a cleaning and/or a dry object so that SL carries with a controllable speed.Liquid stream baffle 203 adjacent nozzles 201 with an open section 205 and an opaque section 207 are provided with and can move on transverse to the conventional direction of SL stream under the effect of the manual or automatic baffle of a motor or other travel mechanism 209.Change SL liquid after the direction before getting back to SL source 195 through one or more SL filters 208.Baffle 203 is worked in the mode that is similar to focal-plane shutter effect in the camera, and preferably by the material of a relative inertness for example Gore-Tex make.Can use other any liquid redirection device with the SL of guiding initial number through one (especially) thus the SL filter is removed most or whole in the peak value contaminant particles that occurs when system's initial start.

When the SL conveying device, SL storagetank 191 is its parts, when starting after in the reasonable time not using one section, is the initial SL stream that disturbs and alter course, and the opaque section of baffle 203 is placed facing to nozzle 201.Initially may have the contaminant particles more than usual quantity among the SL that (system starting back instant) flows, it may be in SL conveying device (SL storagetank, SL pipeline, etc.) inner accumulated in formerly the quiescent phase.Selected liquid in this initial SL stream preferably alters course through an independent fluid filter system (expression among Fig. 6) to remove in the liquid contaminant particles more than usual quantity.After selected time interval, it can be as short as several seconds and can grow to again 60-120 second, and baffle 203 is moving laterally under the effect of travel mechanism 209 that the open section 207 that makes baffle 203 places from nozzle 201 on the normal path of the SL that comes stream.In this point, make SL flow through from SL storagetank 191 that nozzle 201 and normal channel are used to clean with conveying and/or the SL of a dry object.

Fig. 7 represents improved apparatus for aerosol creation.From the selected liquid (SL) of a SL storagetank 213 drip more greatly 211 by one or many pass liquidus 215 and carry and drop on the exposed surface of a suitable entity receiver 217.Passing liquidus 215 preferably provides the SL flow rate of 0.1-10ml/min.The size that SL drips can arrive the degree that the SL surface tension allows for a short time, can strengthen if perhaps wish.Preferably a kind of chemical inert material of entity receiver 217, for example silicon nitride (Si ₃N ₄), nitrogen silane (Si _xN _yH _z) or other any suitable material.On one side of entity receiver 217 or bottom contiguous one piezoelectricity (PZT) crystal 2 19 is arranged.This PZT crystal 2 19 drives by two or more electrode 221A and 221B electricity, and this two or more electrode is driven by an alternating voltage device 223 in turn.Preferably, alternating voltage device 223 provides scope at 20-5, and the alternating voltage of one or more frequencies between 000KHz is preferable between scope 20-750KHz.

When PZT crystal 2 19 expanded in response to the alternating voltage that is applied and shrinks, entity receiver 217 is vibration just, the deposited drop of SL211 is split into many diameters be preferably in less (aerosol) grain 225 in the scope 1-50 μ m.These less aerosol particles 225 are sloughed or are left from entity receiver 217, are used for cleaning and/or drying objects subsequently.Along with the increase of PZT crystal 2 19 driving frequency f, the average diameter of the aerosol particle that this device generated will reduce.

Claims

1. be used to carry out the device of drying objects and cleaning objects, this device is characterised in that:

One is used to receive and hold the sealing chamber of the selected object of wanting dry, that this sealing chamber has is one openable, will select the passage that sealing chamber was put into or shifted out to object, sealing chamber has the first passage mouth that is communicated with flushing liquor source liquid, this first passage mouth carry have a selected capillary flushing liquor to the sealing chamber will select partly or entirely being immersed in the flushing liquor of object, and sealing chamber has the second channel mouth, and this second channel mouth allows flushing liquor to flow out sealing chamber with the volumetric flow rate r1 in the first selected volume flow scope;

One vibrating nozzle, have a nozzle-axis and have and be communicated with to receive the third channel mouth of selected liquid with sealing chamber liquid, selected liquid has the surface tension littler than the surface tension of flushing liquor, wherein vibrating nozzle receives selected liquid with the volumetric flow rate r2 in the second selected volume flow scope and vibrates so that selected liquid forms aerosol particle in sealing chamber, wherein, when flushing liquor is discharged from sealing chamber, form the selected liquid film of one deck by the aerosol particle on the exposed surface that is deposited in selected object, the flushing liquor on the exposed surface of the selected object of the selected liquid film displacement of this layer;

One flow diversion apparatus, has a baffle, this baffle is arranged in the described sealing chamber and leaves described vibrating nozzle and be parallel to the particle that described nozzle-axis is advanced with reception, when the described device that is used to carry out drying objects and cleaning objects during through the static back starting in one period, this flow diversion apparatus makes all mobile changed courses of described selected liquid in a time interval of selecting, and allows described selected liquid unhinderedly mobile in the back at interval in seclected time; And

Receive and filter the filter of the described selected liquid that from flow diversion apparatus, comes.

2. device as claimed in claim 1, further comprise an inert gas source, be provided for importing inert gas, thereby make described aerosol particle with relative to described vibrating nozzle axle, described aerosol particle does not move increasing angles away from described vibrating nozzle when having inert gas near described vibrating nozzle and one or more selected direction.

3. device as claimed in claim 2 is further characterized in that described inert gas source has a pressure regulator, and it makes inert gas import near described vibrating nozzle with controllable, a time dependent air pressure.

4. device as claimed in claim 3 is further characterized in that described time dependent air pressure had periodically the time.

5. device as claimed in claim 1, be further characterized in that described vibrating nozzle with at least in scope 10KHz≤f≤10, the frequency f vibration in the 000KHz.

6. device as claimed in claim 5 is characterized in that described frequency f is through selecting so that at least one described aerosol particle has the diameter d of scope in 10 μ m≤d≤50 μ m.

7. device as claimed in claim 5 is further characterized in that described vibrating nozzle is with the vibration of the frequency f in scope 20KHz≤f≤100KHz at least.

8. device as claimed in claim 1, be further characterized in that described selected liquid fully not with described selected object generation chemical reaction.

9. device as claimed in claim 1 is characterized in that the interior described flow rate r1 of the described first selected scope is through selecting, so that the degree of depth of described flushing liquor reduces with the flow rate between 3mm/sec to 10mm/sec in the described sealing chamber.

10. device as claimed in claim 1 is characterized in that the described flow rate r2 in the described second selected scope is positioned at scope 1ml/min≤r2≤5ml/min.

11. device as claimed in claim 1 is characterized in that described selected liquid is received in the sealing chamber with the pressure of scope in 5psi≤p≤50psi.

12. device as claimed in claim 1 is further characterized in that the source of a described selected liquid, it is connected with described vibrating nozzle and places described sealing chamber outside.

13. device as claimed in claim 12 is further characterized in that the described source of described selected liquid places apart from least one meter of described sealing chamber.

14. device as claimed in claim 12 is characterized in that the described source of described selected liquid holds the described selected liquid of the volume V that is not more than 25ml.

15. device as claimed in claim 1 is further characterized in that plenum chamber, it is positioned at described sealing chamber and contiguous described vibrating nozzle.

16. device as claimed in claim 15, be further characterized in that described plenum chamber is communicated with a pressurization gas source fluid, and having a means for guiding gas, the pressurization gas that is used to lead is so that described aerosol particle changes direction when described vibrating nozzle moves apart.

17. device as claimed in claim 1 is further characterized in that the phase-state change that all described aerosol particles all form and do not pass through described selected liquid in described sealing chamber.

18. device as claimed in claim 1 is further characterized in that described aerosol particle forms with the energy consumption that is less than 2 joules of per seconds in described sealing chamber.

19. device as claimed in claim 1 is further characterized in that:

One is subjected to the hot inert gas case;

Four-way road junction in the described sealing chamber, it is connected with the described hot inert gas case that is subjected to, and it allows inert gas to enter described sealing chamber from the described hot inert gas case that is subjected to; And

Five-way road junction in can the described sealing chamber consistent with the four-way road junction, it allows the inert gas in the described sealing chamber to discharge from described sealing chamber.

20. device as claimed in claim 1 is further characterized in that:

The second complete inert gas storagetank;

Four-way road junction in the described sealing chamber, it is connected with this storagetank, and it allows gas to enter described sealing chamber from this storagetank;

Five-way road junction in can the described sealing chamber consistent with the four-way road junction, it allows the inert gas in the described sealing chamber to discharge from described sealing chamber; And

Valve and pressure control device, it is connected with described storagetank, be used for when described flushing liquor when described sealing chamber is discharged, allow and the control inert gas enters described sealing chamber and the total gas pressure kept in the described sealing chamber is close to or higher than ambient pressure.

21. device as claimed in claim 1 is further characterized in that:

The storagetank of one described selected liquid; And

First sedimeter, it is connected with selected liquid storagetank and running fully continuously, with remove the contaminant particles in the described selected liquid and make majority or all described selected liquid after filtration, be back to selected liquid storagetank, described sedimeter is communicated with described vibrating nozzle fluid.

22. device as claimed in claim 21 is further characterized in that:

Second sedimeter, it is connected with described first sedimeter, further filters with the selected part that receives the selected liquid after the described filtration and to the described liquid that receives, and described second sedimeter is communicated with described vibrating nozzle fluid; And

Receive second storagetank of described liquid from second sedimeter, at least one supplies with described selected liquid to described vibrating nozzle in the wherein said first selected liquid storagetank and the second selected liquid storagetank.

23. device as claimed in claim 1 is characterized in that further being characterized as of described vibrating nozzle:

Selected solid material piece with a surface, this surface receive at least one described selected liquid and vibration to generate the aerosol particle of described selected liquid, wherein should selected solid material piece are a kind of in silicon nitride and the nitrogen silane; And

One piezo-electric crystal, it links to each other in abutting connection with setting and with an alternate voltage source to produce vibration in this selected solid material piece with the solid material piece of selecting.

24. a method that is used to carry out drying objects and cleaning objects the method is characterized in that:

Will be placed in the sealing chamber by dry selected object;

Allow the selected capillary flushing liquor that has of sufficient amount to enter sealing chamber so that selected object partly or entirely is immersed in the flushing liquor;

With a volumetric flow rate r2 who is positioned at the second selected volume flow scope one selected liquid is introduced sealing chamber, this selected liquid has the surface tension lower than flushing liquor surface tension;

In sealing chamber, form aerosol particle by making selected liquid pass vibrating nozzle;

Make a part of aerosol particle on the exposed surface of flushing liquor, form the selected liquid film of one deck;

Discharge flushing liquor with the self-styled closed chamber of a volumetric flow rate r1 in the first selected volume flow scope, on the exposed surface of selected object, form the selected liquid film of one deck by the aerosol particle on the exposed surface that is deposited in selected object;

Make the flushing liquor on the selected objects ' exposed surfaces of selected liquid film displacement;

When the device that is used to carry out drying objects and cleaning objects during, in selected time interval, make all mobile changed courses of described selected liquid through the static back starting in one period;

Filtration is through the described selected liquid of changed course; And

Described selected liquid is unhinderedly flowed after at interval and be used for forming described aerosol particle in seclected time.

25. method as claimed in claim 24, be further characterized in that with an inert gas from one or more direction lead described aerosol particle so that described aerosol particle described indoor with relative to preferential direction, the increasing angles that moves of described aerosol particle does not move apart from this preferential direction when having inert gas source.

26. method as claimed in claim 24 is further characterized in that and removes at least one the described aerosol particle that moves on described indoor described preferential direction.

27. method as claimed in claim 25 is further characterized in that and introduces described inert gas under controllable, a time dependent air pressure.

28. method as claimed in claim 27 is further characterized in that to change described time dependent air pressure to produce the air pressure of a pair of time cycle property.

29. method as claimed in claim 24, the described selected liquid that is further characterized in that wherein forms the described process of described aerosol particle passes through described vibrating nozzle, and this vibrating nozzle is with scope 10KHz≤f≤10, and the selected frequency f in the 000KHz is vibrated.

30. method as claimed in claim 29 is further characterized in that and selects described frequency f in scope 20KHz≤f≤100KHz.

31. method as claimed in claim 29 is further characterized in that and selects described frequency f to make the diameter d of at least one described aerosol particle in scope 10 μ m≤d≤50 μ m.

32. method as claimed in claim 24, be further characterized in that select described selected liquid make its fully not with described selected object generation chemical reaction.

33. method as claimed in claim 24 is further characterized in that and selects described flow rate r1 so that the degree of depth of the described flushing liquor in described sealing chamber reduces with the flow rate between the 3mm/sec to 10mm/sec.

34. method as claimed in claim 24 is further characterized in that in described second selected scope 1ml/min≤r2≤5ml/min and selects described flow rate r2.

35. method as claimed in claim 24 is further characterized in that the phase-state change of not passing through described selected liquid in described sealing chamber forms whole described aerosol particles.

36. method as claimed in claim 24 is further characterized in that in the described sealing chamber to form described aerosol particle with the energy consumption that is less than 2 joules of per seconds.

37. method as claimed in claim 24 is further characterized in that after described flushing liquor is discharged from described sealing chamber, removes all gas in described sealing chamber.

38. method as claimed in claim 37 is further characterized in that after described flushing liquor is discharged in described sealing chamber, makes the selected sweep gas of being heated through described sealing chamber.

39. method as claimed in claim 24 is further characterized in that:

When described flushing liquor is discharged in described sealing chamber, allow a selected alternative gas to enter described sealing chamber; And

When described flushing liquor is discharged in described sealing chamber, control this selected alternative gas and enter the speed of described sealing chamber so that described indoor total gas pressure is close to or higher than ambient pressure.

40. method as claimed in claim 24, be further characterized in that and filter the described selected liquid that in storagetank, receives continuously removing the contaminant particles in the described selected liquid, and make majority or all described selected liquid after filtration, be back to this storagetank that is used for described selected liquid.

41. method as claimed in claim 40 is further characterized in that:

Receive a selected part of the selected liquid after the described filtration and the described liquid that receives is further filtered; And

Adopt described selected part to form described aerosol particle through the described filtered fluid after further filtering.