CN1269517A - Three-dimensional profile measuring method and equipment with optical fiber panel and confocal microscope - Google Patents
Three-dimensional profile measuring method and equipment with optical fiber panel and confocal microscope Download PDFInfo
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- CN1269517A CN1269517A CN 00113793 CN00113793A CN1269517A CN 1269517 A CN1269517 A CN 1269517A CN 00113793 CN00113793 CN 00113793 CN 00113793 A CN00113793 A CN 00113793A CN 1269517 A CN1269517 A CN 1269517A
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Abstract
By making beam-extending collimated light source illuminate on its right-side prism, using oblique plane of the prism to make light source illuminate on the beam splitter under the prism and making the light source pass through confocal microscopic system under the beam splitter to focus on the measured body scanned along the optical axis direction of lens system, and making the reflecting light pass through the original path and return on the beam splitter and utilizing its prism system and using its light collecting system to input it into computer image information process system, so that it can automatically obtain three-dimensional form data of surface of measured body. It possesses the advantages of high signal-noise ratio, high sensitivity, simple structure and low cost, etc..
Description
The present invention relates to photoelectric detection technology field, further relate to the method and apparatus that the digitizing three-dimensional appearance is measured automatically.
Confocal microscope is the advanced testing tool in production run and the biomedicine.This is determined by its high precision, high sensitivity.It with other the photoelectricity method for three-dimensional measurement as: synchronous scanning method, space encoding method, structured light method, phase-shift method, fourier transform method etc. are compared its irreplaceable characteristics: its do not thrown light on restriction of shade, can survey equally for the abrupt change object; It also can survey the object of scattering surface, and is suitable equally to mirror article; More valuable is the three-dimensional tomography that can be used for biological cell, DNA gene etc. with this instrument.Its depth resolution can be from several microns to tens nanometers according to the numerical aperture difference of institute's employing object lens.The basic thought that confocal imaging is measured is to allow light focus on the testee surface by a pin hole and through two-way confocal light path, the light that returns from body surface reflection (scattering) is also along same optical path and enter pin hole again, have only the luminous energy that returns from strict image planes so all by pin hole, the light that returns on other non-image planes is by strong inhibition.The height that is in the focal position on the object is as benchmark, can record on the object All Ranges thus with respect to the height of this benchmark, thereby obtains the three-dimensional profile data of this object.This early stage quasi-instrument can only be measured a point at every turn, and the whole audience that will survey object like this is with the expensive time.So develop the scheme of multiple measurement of full field afterwards successively.
In recent years, along with the develop rapidly of science and technology, the confocal micro-measurement technology causes the great attention of domestic and international industry member, medical circle, national defence field and scientists more.Many developed countries all recognize its vital role, all it is detected as precision and the medical science detection range in the important technology content studied, comprise from the qualitative observation to the quantitative test, from the light channel structure to the error analysis, from data acquisition to processing etc.Can be divided into according to each sampled point with regard to concrete grammar: single-point machinery or optical scanning way, the arrangement of multiple spot pin hole or rotating disk scan mode, employing integrated optical element whole audience mode etc.Business-like application at present comprises pathological diagnosis, metal or ceramic plated layer detection, the semi-conductor chip of clinical medicine inner ear, cornea, the quality testing in the integrated circuit production process etc., just be devoted to the online detection applied research of printed circuit board (PCB) as the people such as Mistuhiro of Japan, the Paul.W Fieguth of the U.S. attempts to adopt more high-precision confocal system to measure mirror article etc.China's three-dimensional measurement mainly concentrates on the profile measurement of big-and-middle-sized object, and precision at micron to the research of the confocal measuring technique of nanometer also seldom.
Effect a kind of scheme best and application prospect possibility maximum be the multi-beam confocal microscope that microlens array panel and pinhole array panel are formed at present.Adopt the advantage of this integrated optical device, can maximally utilise luminous energy first; Second can be separated into a branch of collimated light tens thousand of even hundreds thousand of light pencils, realize whole audience parallel measurement thus, reach the purpose of measuring at a high speed.But there is important shortcoming in it: the manufacture difficulty height of (1) this miniature integrated optical device, and the machine debugging of instrument requires very tight, thus the production cost height; (2) surface reflection of above-mentioned device is stronger, makes the signal to noise ratio (S/N ratio) of the flashlight that collects low, has reduced measuring accuracy; (3) in order to reduce above-mentioned reflected light, in the light path system of this system, increased some special optical devices, not only increased cost, the luminous energy of more can decaying significantly; (4) the measurement sensitivity of instrument is fixed, and can't adjust the sensitivity of instrument at different measurands.
The objective of the invention is to above-mentioned shortcoming at microlens array or pinhole array confocal microscope, propose a kind of fibre faceplate confocal microscope and measured the method and apparatus of 3 d shape, can realize that parallel confocal measures, have characteristics such as simple in structure, high precision, high s/n ratio.
The inventive system comprises a beam-expanding collimation light source, configuration one light beam dispenser before former configuration one prism of beam-expanding collimation light source, the prism inclined-plane reflected light, configuration one confocal microscopic system before the light of light beam dispenser outgoing, place testee before the light of confocal microscope system outgoing, testee is placed on the platform of short transverse scanning system, and platform is connected with Computerized image processing system.The place ahead that sees through the light of prism along the confocal microscope system optical axis direction disposes an opto-collection system, and opto-collection system is connected with Computerized image processing system.Said beam-expanding collimation light source comprises a light source, the light hurdle that disposes between two lens that are arranged in order before the light source and two lens; Said light beam dispenser is a fibre faceplate; Said confocal microscope system comprises two lens, disposes the light hurdle between two lens.Said opto-collection system comprises light hurdle, CCD target surface and the ccd video camera between two lens and two lens.
Method of the present invention is, allow the beam-expanding collimation light source impinge upon on its right side prism, by the prism inclined-plane with light source irradiation to the light beam dispenser of prism below, confocal microscope system through the dispenser below focuses on along on the testee of lens system optical axis scanning direction again, its reflected light turns back on the light beam dispenser through former road again, by the input of the opto-collection system on it computer picture information handling system, can try to achieve the three-dimensional appearance data on testee surface by prism system thus automatically.
The designed this fibre faceplate of the present invention can be divided into a branch of collimated light tens thousand of even hundreds thousand of light pencils equally, reaches lenticule---pinhole array device identical functions.Essence of the present invention is: (1) is found will can substitute lenticule and pinhole array assembling device fully with the characteristic of circular cone light output after optical fiber has the input of oblique incidence directional light; (2) find that above-mentioned light cone is a kind of thin-walled light cone, so under identical numerical aperture condition, measuring sensitivity can increase substantially; (3) designed prism can be separated flashlight and be extracted; (4) designed angled end-face fibre faceplate can be got rid of the influence of the specular light of device to detection signal light fully; (5) provide free adjustment to measure the foundation of sensitivity.
The invention will be further described below in conjunction with accompanying drawing:
Fig. 1 is the principle schematic of optical fiber confocal microscopy mirror system;
Fig. 2 is the optical fiber arrangements mode of fibre faceplate;
Fig. 3 is the profile kind of fibre faceplate;
Fig. 4 is the end pattern of fibre faceplate;
Fig. 5 is the parameter of optical fiber;
Fig. 6 is the processing of fiber end face;
Fig. 7 is optical fiber input, output facula shape;
Fig. 8 is for returning the output light cone;
Fig. 9 is the separation of returning output light;
Figure 10 is the rectification of returning the output light direction;
Figure 11 is input, output and the catoptrical direction of angled end-face and horizontal end face optical fiber;
Figure 12 is the separation of tapered plane optical fiber output light;
Figure 13 exports one of correction solution of light direction for tapered plane optical fiber;
Figure 14 is two of the correction solution of tapered plane optical fiber output light direction;
Figure 15 is the direction of tapered plane optical fiber output light without rectification.
Fig. 1 is an optical system schematic diagram of the present invention.Monochrome or quasi-monochromatic source 1 shine prism 5 after lens 2, light hurdle 3 and lens 4 expand bundle and collimation, as long as to the incident angle on the inclined-plane 6 of prism 5 greater than critical angle, incident light is just by total reflection, irradiation fibre faceplate 7 back output N * N restraint conical hot spot, through confocal microscope system (lens 8, light hurdle 9, lens 10) focus on testee surface 11.The light that reflects from object plane 11 incides fibre faceplate 7 through same light path again, returns the conical hot spot of output through fibre faceplate 7 again, and mat prism 5 separates this flashlight and upwards output with 12, focuses on CCD target surface 16 through lens 13, light hurdle 14, lens 15.CCD gamma camera 17 is imported Computerized image processing system 18 with vision signal, just can record the focusing light intensity on the object plane as calculated.If object plane 11 moves up and down (scanning), and continuous acquisition focusing intensity signal, then can draw out " displacement---a light intensity " curve, its approximate theoretical expression is:
K is a wave number in I (Z)=[sinkz (1-cos θ)/kz (1-cos θ] formula, and sin θ is numerical aperture (NA), and z is the height of measured point focal point, and I (z) is the light intensity corresponding to highly for z the time.
Corresponding to the position of light intensity peak, be the object plane height and position when focusing on.Owing to comprise N*N root optical fiber in the fibre faceplate 7,, reach the purpose that 3 d shape is measured at a high speed so in above-mentioned scanning process, can measure the height of N * N point on the object plane 11 simultaneously.Make workpiece do scanning up and down by vertical height mobile platform 20, platform 20 is driven by driver 19, and by computer control.
Said system proposed by the invention has solved series of key techniques:
1. the structure of fibre faceplate, parameter and manufacture method;
2. the rule that feeds back of optical fiber beam expansion and signal;
3. the catoptrical supression technology of fibre faceplate;
4. the separation of feedback signal light and extractive technique;
5. improve the new way of measuring sensitivity and precision.
Above-mentioned gordian technique will be set forth in conjunction with Fig. 2 to Figure 15.
Fig. 2-Fig. 6 shows the structure of the fibre faceplate that the present invention proposes.Fig. 2 shows that the arrangement mode of optical fiber can have three classes: dislocation arrangement 21, arranged 22 and free arrangement 23.The arranged mode can make the luminous point matrix of output signal light and the CCD pixel of video camera aim at one by one in theory, can improve measuring accuracy in right amount.But be actually and really realize.The fibre faceplate of free arrangement, though manufacturing is more convenient, but fiber distribution density is low and irregular.The advantage that dislocation is arranged is that fiber distribution density is the highest, and the optical fiber arrangements technical maturity.So the present invention preferentially adopts dislocation to arrange.The shape of fibre faceplate except that square, the shape of circle 24, sexangle 25, octagon 26 or other all curves and the rectilinear(-al) that can also represent as Fig. 3.Because fibre faceplate is very expensive, so but should make full use of its working range.The surperficial majority of measured workpiece is square, so what fibre faceplate was done squarely should be preferred option.The both ends of the surface of fibre faceplate can be parallel, shown in Fig. 4 (a); Also uneven, also be that one of them end face is vertical with optical fiber, another end face then with the optical fiber out of plumb, shown in Fig. 4 (b).For fear of of the influence of fiber end face reflected light, should preferentially adopt the fibre faceplate of inclined end face to measuring.
The concrete size of optical fiber need be looked Measurement Resolution, measuring accuracy, survey area, instrument volume, fibre faceplate manufacturing process, and supporting parameter of optical system and deciding.The diameter d of fiber cores 29 can be between 6 microns to 30 microns, and the external diameter of optical fibre packages coating 30 can be between 8 microns to 180 microns, and optical fiber spacing p can be between 20 microns to 180 microns.Too small optical fiber core diameter d can make optical energy loss excessive; Otherwise excessive core diameter d then requires optical fiber spacing p also big, causes resolution reduction or fibre faceplate oversize.Optical fiber spacing p both can be decided (bonding agent 31 very thin thickness of this moment) by the outer diameter D of optical fibre packages coating 30, shown in Fig. 5 (a); Also can decide (the optical fibre packages coating 30 of this moment is very thin) by the thickness of the cementing agent between optical fiber 31, shown in Fig. 5 (b).The former is easier to realize on technology, so the present invention preferentially adopts this scheme.Fig. 6 shows in order to improve the leaded light efficient of optical fiber, can plate anti-reflection film 32 on fibre faceplate 33.
Among Fig. 7 (a), a branch of directional light 34a is with the upper surface of β angle irradiation optical fiber 35a, and just to export with β at the other end of optical fiber 35a be cone apex angle, be the coniform light field 36a of thin-walled (hereinafter to be referred as " light cone ") of thickness with fibre diameter d.Under the condition of incident angle β less than Optical Fiber Numerical Aperture, incident angle β is big more, and cone apex angle 2 β of output light are also big more; Vice versa, respectively shown in Fig. 7 (a) and 7 (b).The analytical approach of Fig. 7 (b) is identical with Fig. 7 (a), so do not repeat.
Among Fig. 8, light cone 36c focuses on testee surface 11a by imaging len 37a, and it is reflected again and through the defeated back into optical fibers 35c of original optical path, exports this Returning beam from the top of optical fiber 35c, it is the thin-walled light cone 39a that turns around, and the incident light 34c of its sidewall and light source is tangent.If do not take special measure, then light source 38a will block a part to the light cone 39a that returns (in fact being exactly useful flashlight), shown in Fig. 8 (a), or most of, as Fig. 8 (b), thereby can't normally extract signal.The analytical approach of Fig. 8 (b) is identical with Fig. 8 (a), so do not repeat.
Fig. 9 shows: the present invention adopts prism 5a that input light 40a is separated fully with output light cone 43a/43b, thereby can collect signal light cone 43a/43b easily.Its principle is such: incident light 40a projects the inclined-plane of prism 5a with the direction that equals critical angle α, and is totally reflected to the end face of optical fiber 35e by this inclined-plane; On the other hand, when the thin-walled light cone that returns output from this end face projects the inclined-plane of prism 5a, owing to incident angle all sees through less than critical angle α.Wherein only have a light pencil and incident beam 40a overlapping, it is slatterned by the inclined-plane reflected back light source of prism 5a.Furtherly, if incident light 40a projects the inclined-plane of prism 5a with the direction greater than critical angle α, when then the thin-walled light cone 43a/43b that returns output from the end face of optical fiber 5a projects the inclined-plane of prism 5a, most of or most signal light cone 43a/43b can see through prism 5a and be gathered and import computing machine, and only fraction or minimum part are reflexed to light source by the inclined-plane of prism 5a and slattern.
Therefore as long as incident light 40a to be equal to or greater than the inclined-plane that critical angle α projects prism 5a, can be totally reflected to optical fiber 5a, and light cone drift angle 2 β of output can regulate arbitrarily.According to the confocal microscope principle, 2 β are big more for above-mentioned light cone drift angle (being numerical aperture), and it is high more then to measure sensitivity; Vice versa.So the present invention adopts fibre faceplate as core devices, can reach the purpose that sensitivity is measured in any change.Existing other scheme all can't be accomplished
According to another principle of confocal microscope, the light distribution characteristic of light cone end face 36 (seeing Fig. 7, Fig. 8) also can influence measurement sensitivity, and the paraxial region optical intensity density is concentrated more, and it is low more then to measure sensitivity; Otherwise, then high more.Light cone of the present invention is the thin-walled light cone, and luminous energy all concentrates on circumference area, so measurement sensitivity is high especially.This be undoubtedly other scheme incomparable outstanding advantage.
Fig. 9 also as can be known, axis 42 outbound courses of signal light cone 43a/43b are because of being subjected to the refraction secundly on prism 5a inclined-plane, this is unfavorable for the structural design of the optical system of acquired signal light cone.The present invention has increased a right-angle prism 12a, and as shown in figure 10, the direction of the axis 44 of signal light cone 45a/45b is corrected parallelly with shaft axis of optic fibre.So, the primary optical axis of optical system just can all be in vertical direction, thereby is convenient to design and manufacturing.
There are a common issue with in existing microlens array or pinhole array confocal microscope, and promptly the surface reflection of lenticule or pin hole device is strong, must increase special optical system and reduce catoptrical influence and improve signal to noise ratio (S/N ratio).This has not only increased the complicacy of system and the loss of luminous energy, and can't thoroughly eliminate the influence of this reflected light to measuring accuracy.The present invention then takes following specific process to solve reflected light issues.As shown in figure 11: when light source 46 incides the end face of optical fiber 35g with the α angle, if this end face surface level 47, then the surface reflection light direction is 48b, and in fact it be mingled in the side of signal light cone 48a/48b, and signal to noise ratio (S/N ratio) is reduced; And when fiber end face inclination γ angle to 51, the reflected light direction just deflect into 52 and aforementioned catoptrical angle be δ, thereby this reflected light 52 is thoroughly separated with signal light cone 48a/48b.
The sin φ of δ=sin[(n1/n0)]-sin[(n1/n0) sin (γ+φ)]-α wherein n1 and n0 be respectively the refractive index of fiber-optic core material and air, φ is the light cone semiapex angle in fibre core.
Can also find another very important phenomenon from Figure 11: be under the condition of surface level 47 at fiber end face, return the axis unanimity of the light cone main shaft 49 of output with optical fiber 35g from optical fiber; And be under the condition of dip plane 51 at fiber end face, 54 on the light cone main shaft that returns output from optical fiber is deflection θ to the right, thereby more away from reflected light 52.
θ＝(β+ε-2γ)/2
Wherein β is the incident angle of 50 pairs of optical fiber angled end-faces 51 of light source, and ε is the angle of the normal of light cone left side edge 53b and optical fiber angled end-face 51.
This shows that as long as fiber end face pitch angle γ is enough big, then do not need any special optical system or other measure, reflected light 52 just can thoroughly be rejected to outside the signal light cone 53a/53b, increases substantially the signal to noise ratio (S/N ratio) of measurement.
Under the situation of fiber end face,, can adopt similar methods with Fig. 9 for signal light cone 53c/53d is separated for inclination.As shown in figure 12: prism 5c separates light cone 53c/53d with incident light 55, but the serious right avertence of light cone main shaft 54a.In order to correct the light cone direction, the prism 5d that can adopt bottom surface as shown in figure 13 to tilt, or the prism 12b of employing top surface inclination as shown in figure 14,54b is remedied to parallel with the shaft axis of optic fibre direction output light cone main shaft.So, signal light cone 53e/53f or 53g/53h just can be by the collection optical systems of vertical layout, and such apparatus structure design and manufacturing are all more convenient.Otherwise, if still press the such method of Figure 10, the direction that adopts two right-angle prisms (as 5f among Figure 15 and 12d) then can't correct light cone main shaft 54.
Can find out from the above principle of the present invention of illustrating, method and apparatus: the present invention has series of advantages with respect to other confocal microscope three-dimensional profile measuring technique:
(1) more effectively eliminates reverberation to the interference of flashlight, increase substantially signal to noise ratio;
(2) under same numerical aperture condition, measurement sensitivity is much higher;
(3) measurement sensitivity and certainty of measurement are adjustable;
(4) devating prism, polarizer and the λ of omission needs in order to reduce surface reflection/4
Optical device such as wave plate not only simplify the structure, and can reduce luminous energy and decrease
Mistake reaches more than four times;
(5) device of optical system few, install and adjust easy, maintenance easily, whole system
Cause this lower.
The present invention is the same with pinhole array device scheme, most of incident light barred, and only about 1/20 luminous energy is utilized by panel, and this is the major defect with respect to microlens array panel scheme.But owing to developing rapidly of semiconductor light-source, low cost high powered solid light source constantly occurs, so above-mentioned shortcoming can not cause substantial difficulty.From another point of view, the present invention needn't increase additional optical components for the surface reflection of eliminating optical device, thereby has avoided a large amount of optical energy loss, can be compensated thus.
Claims (16)
1. the fibre faceplate confocal microscope is measured the method for 3 d shape, it is characterized in that, allow the beam-expanding collimation light source impinge upon on its right side prism, by the prism inclined-plane with light source irradiation to the light beam dispenser of prism below, confocal microscope system through the dispenser below focuses on along on the testee of lens system optical axis scanning direction again, its reflected light turns back on the light beam dispenser through former road again, by the input of the opto-collection system on it computer picture information handling system, can try to achieve the three-dimensional appearance data on testee surface by prism system thus automatically.
2. method according to claim 1 is characterized in that, the incident angle on said prism inclined-plane is equal to or greater than critical angle.
3. method according to claim 1, it is characterized in that, under the situation of fiber end face for inclination, for signal light cone (53c/53d) is separated, can adopt the prism (5d) of bottom surface inclination or the prism (12b) of top surface inclination, be remedied to output awl main shaft (54b) parallel with the shaft axis of optic fibre direction.
4. method according to claim 1 is characterized in that, the sectional area of the collimated light of said beam-expanding collimation light source output is equal to or greater than the sectional area of fibre faceplate.
5. method according to claim 1, it is characterized in that, the parallel beam of light source (1) through expanding bundle and collimation reflexed to fibre faceplate (7) by the inclined-plane of prism (5) (6) and cut apart with expansion by it restraints into N * N thin-walled light cone, utilize confocal microscopy mirror system (8) again, (9), (10) focus on testee surface (11), the light that reflects from surface (11) enters fibre faceplate (7) along former road, see through prism (5) and (12) and confocal microscopy mirror system (13), (14), (15) focus on the CCD target surface (16), the TV signal input Computerized image processing system (18) of CCD gamma camera (17), displacement platform (20) makes testee make vertical scan motion up and down, thereby just can record the three-dimensional appearance data of object.
6. method according to claim 1 is characterized in that, the light that reflexes to fibre faceplate should be less than or equal to the numerical aperture of optical fiber to the incident angle of fibre faceplate, and meets the desired numerical aperture of optical fiber output light cone.
7. the fibre faceplate confocal microscope is measured the device of 3 d shape, comprise a beam-expanding collimation light source, it is characterized in that, former configuration one prism of beam-expanding collimation light source, configuration one light beam dispenser before the prism inclined-plane reflected light, configuration one confocal microscopic system before the light of light beam dispenser outgoing, place testee before the light of confocal microscope system outgoing, testee is placed on the platform of short transverse scanning system, platform is connected with Computerized image processing system, the place ahead that sees through the light of prism along the confocal microscope system optical axis direction disposes an opto-collection system, and opto-collection system is connected with Computerized image processing system.
8. device according to claim 7 is characterized in that: said light beam dispenser is a fibre faceplate.
9. according to claim 7,8 described devices, it is characterized in that said fibre faceplate is square, polygonal, curve closed curve shape or any and straight line combination shape.
10. according to claim 7,8 described devices, it is characterized in that the arrangement mode of said fibre faceplate is dislocation arrangement, arranged or free arrangement.
11., it is characterized in that the core diameter d of optical fiber is 6 microns-30 microns according to claim 7,8 described devices; Clad (30) outer diameter D is 8 microns-180 microns; Optical fiber spacing p is 20 microns-180 microns; Cementing agent (31) is full of all spaces between optical fiber; The numerical aperture of optical fiber is greater than 0.05; The number of fibers that a fibre faceplate (7) comprises is more than 10,000.
12. according to claim 7,8 described devices, it is characterized in that, be coated with anti-reflection film on the said fibre faceplate.
13., it is characterized in that said prism can be coated with semi-transparent semi-reflecting film according to claim 7,8 described devices.
14. according to claim 7,8 described devices, it is characterized in that, bottom surface and surface level as the prism among Figure 13 (5d) have angle, the corner dimension of the corner dimension of inclined-plane (6d) the same level face of prism (5d) and the bottom surface same level face of prism (5d), should guarantee to meet pre-provisioning request from the light cone drift angle of optical fiber output, the end face of prism (12b) is a level, should be parallel and keeps certain clearance in the inclined-plane of the inclined-plane of prism (12b) and prism (5d).
15. according to claim 7,8 described devices, it is characterized in that, the bottom surface of prism (5e) also can be a level, the end face of prism (12c) then tilts, the corner dimension of the inclined-plane same level face of prism (5e) should guarantee to meet pre-provisioning request from the light cone drift angle of optical fiber output, and prism (5e) is identical with prism (12b) with the further feature and the prism (5d) of prism (12c).
16. according to claim 7,8 described devices, it is characterized in that the end face of the bottom surface of prism (5) and prism (12) also can be a level, promptly all is right-angle prism, but the axis (54d) of the signal light cone (53i/53j) of this moment tilts, and signal acquiring system is inevitable also to tilt.
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