CN1257799C - Spraying process and equipment for producing color filter - Google Patents
Spraying process and equipment for producing color filter Download PDFInfo
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- CN1257799C CN1257799C CN 01131158 CN01131158A CN1257799C CN 1257799 C CN1257799 C CN 1257799C CN 01131158 CN01131158 CN 01131158 CN 01131158 A CN01131158 A CN 01131158A CN 1257799 C CN1257799 C CN 1257799C
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Abstract
The present invention relates to a spraying manufacturing method and equipment for a color filter. The equipment is provided with an ink jet head assembly, a motion platform, a jet flow assembly, an optical detection system and a control system, wherein the motion platform can bear the base plate of the color filter and can move relative to the ink jet head assembly; the optical detection system provides the instant positioning function, so the ink jet head assembly can correctly position desired ink droplets and can spray the desired ink droplets on the base plate, and then, the ink droplets are homogenized by the jet flow assembly. The design of an ordinary ink sucking layer is omitted, and the accuracy and the diffusion uniformity of the ink droplet spray are greatly improved.
Description
Technical field
The present invention relates to a kind of colour filter spraying autofrettage and equipment, be used to make colour filter, particularly relate to a kind of have can proofread and correct the location immediately and directly ink droplet is sprayed at colour filter spraying autofrettage and equipment on the colour filtering chip basic board.
Background technology
Colour filter mainly has the purposes of three aspects, and the firstth, be applied to image sensor, such as charge-coupled device (CCD); The secondth, be applied to linear sensor, such as the crystal shutter; Hou is to be applied on the display, such as the LCD (LCD) of alternating expression, super alternating expression thin film transistor (TFT).Along with the growth of these product demands, the demand of colour filter also increases thereupon, and therefore, the reduction of colour filter manufacturing cost has also become instant problem.
The manufacturing step summary of traditional colour filter has four kinds, no matter be equally all to need suitable complicated step in colouring, cleaning, drying or etching or the like, so will reduce manufacturing cost, has certain difficulty really.In order further to reduce cost, major technology breaks through the appearance that is to spray autofrettage, the spraying autofrettage mainly is in the pit that the direct spray colouration of ink droplet is formed by the black template on colour filtering chip basic board, the colour filter of different types has different color spray cloth pattern, generally with RGB (R, G, B) three looks as a basic unit.The spraying autofrettage is with respect to other semiconductor making methods, and its equipment and manufacturing cost can reduce significantly.
But correspondingly, the spraying autofrettage must be located quite accurate position, ink droplet accurately can be sprayed on the preposition, and in addition, the diffusion uniformity of ink droplet in pit is not good, can cause the white defective between pit.At these problems, the scheme of some solutions has been proposed, summary in fact, mostly be the setting that utilizes ink absorbing layer, that is to say in the pit of colour filtering chip basic board, be provided with ink absorbing layer, ink droplet is arranged (size and the position that comprise ink droplet) in special mode to spray, utilize the high diffusibility of ink absorbing layer that it is diffused into the zone of wanting again, and utilize the mode of optical correction location, accurate localization more is provided.
But still there are many problems to be solved that have in these methods, and at first, the design of ink absorbing layer increases cost and operation, and ink droplet sees through ink absorbing layer diffusion Hou, easily produce white defective or cause colour mixture between pit, and have a strong impact on the product quality of colour filter.In addition, aspect the location, it is to utilize analog signal to resolve that optics is proofreaied and correct the location immediately, and the light quantity distribution (position of crest or trough etc.) of the light of the narrow slit effect by pit is just differentiated the position of required spraying.But light quantity distribution can cause the skew of crest or wave trough position because of the relative position error between light source and sensing element, thereby can't reach accurate differentiation.In addition, sensing element and ink gun are integrally manufactured, and except that the cost costliness, ink gun can't clean (the stained sensing element of meeting) when blocking, and the spray orifice utilization rate of ink gun is low, all is the shortcoming that prior art can't overcome.
Summary of the invention
For addressing the above problem, the purpose of this invention is to provide a kind of colour filter spraying autofrettage and equipment, instant correction location can be provided, make that the ink droplet spraying is more accurate, and ink droplet is painted on the colour filtering chip basic board, omit the design of existing ink absorbing layer, thereby can reduce manufacturing cost significantly.
For achieving the above object, the invention provides a kind of colour filter spraying equipment, include:
One ink gun assembly has at least one spray orifice, and every kind of color has ink gun separately, in order to spraying ink droplet on the colour filtering chip basic board;
One motion platform in order to carrying described colour filtering chip basic board, and makes described colour filtering chip basic board move with respect to described ink gun assembly;
This equipment also comprises:
One jet flow assembly is positioned at described ink gun assembly one side, is made the ink droplet homogenising in order to the colour filtering chip basic board after the spraying blows;
One optical detection system, in order to detect the relative position of described colour filtering chip basic board and described spray orifice, this optical detection system comprises:
First optical module in order to detect described colour filtering chip basic board position, carries out thick contraposition to described colour filtering chip basic board; With
Second optical module in order to according to the light transmission capacity that is seen through described colour filtering chip basic board by the light source that is positioned at described colour filtering chip basic board below, detects the relativity shift position of described spray orifice and described ink droplet spraying profile immediately; And
One control system is in order to control described ink gun assembly, described motion platform, described jet flow assembly and described optical detection system.
According to above-mentioned colour filter spraying equipment, described jet flow assembly and described ink gun assembly are integrated in one.
According to above-mentioned colour filter spraying equipment, described first optical module is a charge-coupled image sensor.
According to above-mentioned colour filter spraying equipment, described second optical module is a linear charge-coupled device.
According to above-mentioned colour filter spraying equipment, described ink droplet spraying profile is the edge track of spraying frame.
According to above-mentioned colour filter spraying equipment, the black template that described spraying frame is a two dimensional form.
According to above-mentioned colour filter spraying equipment, the spray orifice of described jet flow assembly is the spray orifice type.
According to above-mentioned colour filter spraying equipment, the spray orifice of described jet flow assembly is a slit-type.
According to above-mentioned colour filter spraying equipment, described jet flow assembly also includes a heating system in order to adding hot-air, and is blowing simultaneously with the ink droplet drying.
The present invention also provides a kind of colour filter spraying autofrettage, includes the following step at least:
Colour filtering chip basic board and spray orifice are located;
Utilize first optical module to detect described colour filtering chip basic board position, described colour filtering chip basic board is carried out thick contraposition; And utilize second optical module, according to the light transmission capacity that sees through described colour filtering chip basic board by the light source that is positioned at described colour filtering chip basic board below, with the relativity shift position of described spray orifice of instant correction and ink droplet spraying profile;
The spraying ink droplet; And
Air blowing is with described ink droplet homogenising.
According to above-mentioned colour filter spraying autofrettage, described ink droplet spraying profile is the edge track of template spraying frame.
According to above-mentioned colour filter spraying autofrettage, the black template that described spraying frame is a two dimensional form.
According to above-mentioned colour filter spraying autofrettage, the step of described spraying ink droplet is directly ink droplet to be sprayed on the described colour filtering chip basic board.
According to above-mentioned colour filter spraying autofrettage, described air blowing also includes the step of dry this ink droplet with the step of described ink droplet homogenising.
The colour filter spraying manufacturing equipment disclosed according to the present invention is provided with ink gun assembly, motion platform, jet flow assembly, optical detection system and control system, motion platform is in order to the carrying colour filtering chip basic board, black template on the substrate forms the spraying frame, and ink supply is dripped and is sprayed at wherein.Detect the relative position that sprays frame, colour filtering chip basic board and ink gun assembly by the optical detection system, and the relative position between instant correction filter substrate and ink gun spray orifice, to realize accurate spraying; And the light source of optical detection system places under the colour filtering chip basic board, directly detects the light transmission capacity that sees through substrate, and the analog signal conversion of detecting element (as CCD) becomes data signal to differentiate the center of spraying frame, has improved the accuracy of proofreading and correct; And ink droplet is painted on the colour filtering chip basic board, utilizes the jet flow assembly that the ink droplet of spraying is blown again, makes in its scope that is evenly distributed in the spraying frame, and ink absorbing layer need not be set.
According to colour filter spraying autofrettage of the present invention and equipment, because ink absorbing layer need not be set, thus can reduce manufacturing cost, and the mode of utilizing jet flow to blow can make ink droplet homogenising more; Because the optical detection system is by the direct printing opacity below colour filtering chip basic board of light source, thereby can not produce because of generally reflecting the error that causes; Because instant detection and location are adopted in the optical detection location, and all locate immediately, more increase the accuracy of spraying when every row spray; In addition, because optical detection adopts digitized detection, the analog crest that does not have a prior art is shifted with trough and causes the phenomenon of error; Because optical detection system and ink gun assembly form split version, be easy to carry out the cleaning of ink gun; Because jet flow is blown when making the ink droplet homogenising, but heated air stream, thus can accelerate the dry speed of the ink droplet universe.
For making purpose of the present invention, architectural feature and function thereof that further understanding be arranged, describe the specific embodiment of the present invention in detail below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is the outward appearance perspective diagram according to colour filter spraying manufacturing equipment of the present invention;
Fig. 2 is the flow chart of steps according to colour filter spraying autofrettage of the present invention;
Fig. 3 a, 3b are the first embodiment schematic diagrames according to the detection spraying frame position of colour filter spraying autofrettage of the present invention;
Fig. 4 a, 4b are the second embodiment schematic diagrames according to the detection spraying frame position of colour filter spraying autofrettage of the present invention;
Fig. 5 constitutes block diagram according to the jet flow assembly that look equipment is made in colour filter spraying of the present invention;
Fig. 6 a~6c is the schematic diagram of expression according to the ink droplet air blowing homogenising of colour filter spraying autofrettage of the present invention;
Fig. 7 is the air-flow distribution schematic diagram according to the jet flow of colour filter spraying autofrettage of the present invention; And
Fig. 8 a, 8b are the schematic diagram of expression according to the spray orifice shape of the jet flow assembly of colour filter spraying manufacturing equipment of the present invention.
The specific embodiment
As shown in Figure 1, the colour filter spraying manufacturing equipment disclosed according to the present invention is provided with ink gun assembly 11, motion platform 16, jet flow assembly 12, optical detection system and control system, ink gun assembly 11 has at least one spray orifice, and each color has ink gun (in general including blue (B) three looks of red (R) green (G)) separately, in order to substrate 17 is sprayed ink droplet of all kinds; Can be above the motion platform 16 in order to bearing substrate 17, for ink gun assembly 11 spraying ink droplets, and have the bracing frame 14 settle ink gun assembly 11 freely in order to move, by CD-ROM drive motor 15 and with the 11 corresponding motions of making three directions of X-Y-θ of ink gun assembly.
The optical detection system includes first optical module 13 and second optical module 10, in order to the relative position relation between the spray orifice that detects substrate 17 and ink gun assembly 11; First optical module 13 for example can be a charge-coupled image sensor (area CCD) in order to detect the position of substrate 17.And second optical module 10 is used for detecting the relativity shift position (back detailed description) of the spray orifice and the ink droplet spraying profile of ink gun assembly 11, for example can be a linear charge-coupled device element (linear CCD), that is to say, first optical module 13 provides preliminary positioning correcting, utilizes second optical module 10 that instant location and precise positioning are provided again.
Jet flow assembly 12 is in order to be blown and made its homogenising being sprayed on ink droplet on the substrate 17, and with reference to Fig. 5, jet flow assembly 12 includes air pressure supply 51, filter 52, pressure-regulating valve 53 and nozzle 54.Air pressure supply 51 is in order to providing the required air pressure of blowing, and by filter 52 air filtered, and comprises the filtration of air plankton, drying of moisture or the like, avoids the air pollution ink droplet; Pressure-regulating valve 53 is in order to regulate required air pressure, and Hou is sprayed air-flow by nozzle 54.Control system includes the action of all unit such as ink gun assembly 11, motion platform 16, jet flow assembly 12 and optical detection system in order to control, can be similar control system (not shown) such as a computer system.
Below describe operation steps in detail according to colour filter spraying autofrettage of the present invention, as shown in Figure 2, at first the initialization colour filter sprays manufacturing equipment (step 101), then utilize 13 pairs of substrates of first optical module 17 to carry out thick contraposition (step 102), just the spraying area summary of substrate 17 is positioned to the spray orifice below of ink gun assembly 11, utilize the color that is predetermined to be tried spray (step 103) again, the examination spray is will go up the examination spray with reference to the blank examination spray zone that the indication spray orifice moves on the substrate 17 earlier, and adjust the relative position and the angle (step 104) of ink gun, with reference to the Hou of indication spray orifice corresponding to the color examination spray of substrate 17 all sprayings, the color that detects its color and model by first optical module 13 compares, and whether the situation that detects the examination ink droplets normally can accept (step 105), if take place unusual, then re-execute step 103 and step 104 (, may need to change or the cleaning ink gun) if be ink droplet color mistake or undesired.
Wherein about the correction of ink gun with respect to substrate 17 positions and angle, with reference to Fig. 3 a, utilize second optical module 10 to detect and judged that through the light transmission capacity of substrate 17 this light source can be a spot light or a backlight (first optical module 13 also can utilize identical design) by the light source (not shown) of substrate 17 belows.During differentiation, convert light transmission capacity to data signal and judge, for example say, surpass the signal of a certain light transmission capacity, then be set at 1 (zone that needs to spray color in the spraying frame), and be lower than the signal of this light transmission capacity, then be set at 0 (spraying edge edge).The light of light source is appeared by substrate 17 belows, the position lights of spraying frame 32 can't see through, the spraying district then can see through, the detection signal of second optical module, 10 different times is T11, T12, T13 and T14, because the specification of spraying frame 32 is fixed, if surpass a certain critical value (for example for surpassing 60%) so can set the ratio of the signal 0 in detecting track in advance, then for frame (T11) and next frame (promptly the next one is above the position of critical value) of spraying frame 32 (T13) between, be spraying district 33, wherein spray the black template that frame 32 can be a two dimensional form; Utilize remaining to detect the deviation angle that track T12, T13 differentiate spraying frame 32 again.Shown in Fig. 3 b, be the signal that second optical module 10 receives, black part is divided into 0 (just light transmission capacity is lower than standard value), by the position of the signal 0 of differentiating both T12, T13, then can determine the crooked situation of spraying frame 32.Shown in Fig. 4 a, 4b, if spraying frame 32 has angular deflection, then can learn by detecting the signal that is read among track T12, the T13, and can relend by control system control CD-ROM drive motor 15 and adjust correction by time interval, motor speed, the physical size size of each optical detection primitive representative of optical system and the angle that the signal deviation post calculates skew of two tracks.Certainly, a spraying frame 32 does not limit and only has 4 detection tracks.
Proofread and correct and tried spray and confirmed Hou, then spray (step 106), ink droplet is sprayed in the spraying district 33, then utilize jet flow assembly 12 to blow, ink droplet is shakeout homogenizing (step 107), with reference to Fig. 6 a~6c, ink droplet 56 is painted on the substrate 17, then utilizes to blow with nozzle 54 ink droplet 56 is shakeout homogenising.About the power that air blows out, consult Fig. 7, F=ρ U2B, wherein F acts on the active force of substrate 17 perpendicular to the surface, ρ is an atmospheric density, and U is an air velocity, and B is a discharge area, so, can obtain suitably required blast, utilize pressure-regulating valve 53 to provide again and get final product via calculation Design.Simultaneously, jet flow assembly 12 also can increase by a heater, and can blow out hot-air, when shakeouing ink droplet 56, has the effect of accelerating dry ink droplet 56.
Then, whether differentiate and to be a kind of color of Hou (step 108), until all colours all spray finish till, and each spraying all utilizes second optical module 10 to be proofreaied and correct, and timely correction adjustment is provided, and can obtains best accuracy.Wherein, jet flow assembly 12 and ink gun assembly 11 can integrate, with reference to Fig. 8 a, 8b, have ink-jet spray orifice 62 and jet flow spray orifice 63 on the ink gun 61, in spraying ink droplet Hou, can provide the effect of shakeouing the homogenizing ink droplet with Hou, and jet flow spray orifice 63 can be designed to spray orifice type or slit-type etc., all have identical effect.
The above only is the present invention's preferred embodiment wherein, is not to be used for limiting practical range of the present invention; All equalizations of being done according to claims scope of the present invention change and remodeling, are protection domain of the present invention and contain.
Claims (14)
1. colour filter spraying equipment, it includes:
One ink gun assembly has at least one spray orifice, and every kind of color has ink gun separately, in order to spraying ink droplet on the colour filtering chip basic board;
One motion platform in order to carrying described colour filtering chip basic board, and makes described colour filtering chip basic board move with respect to described ink gun assembly;
It is characterized in that this equipment also comprises:
One jet flow assembly is positioned at described ink gun assembly one side, is made the ink droplet homogenising in order to the colour filtering chip basic board after the spraying blows;
One optical detection system, in order to detect the relative position of described colour filtering chip basic board and described spray orifice, this optical detection system comprises:
First optical module in order to detect described colour filtering chip basic board position, carries out thick contraposition to described colour filtering chip basic board; With
Second optical module in order to according to the light transmission capacity that is seen through described colour filtering chip basic board by the light source that is positioned at described colour filtering chip basic board below, detects the relativity shift position of described spray orifice and described ink droplet spraying profile immediately; And
One control system is in order to control described ink gun assembly, described motion platform, described jet flow assembly and described optical detection system.
2. as the colour filter spraying equipment of claim 1 record, it is characterized in that described jet flow assembly and described ink gun assembly are integrated in one.
3. as the colour filter spraying equipment of claim 1 record, it is characterized in that described first optical module is a charge-coupled image sensor.
4. as the colour filter spraying equipment of claim 1 record, it is characterized in that described second optical module is a linear charge-coupled device.
5. as the colour filter spraying equipment of claim 1 record, it is characterized in that the edge track of described ink droplet spraying profile for the spraying frame.
6. as the colour filter spraying equipment of claim 5 record, it is characterized in that the black template that described spraying frame is a two dimensional form.
7. as the colour filter spraying equipment of claim 1 record, the spray orifice that it is characterized in that described jet flow assembly is the spray orifice type.
8. as the colour filter spraying equipment of claim 1 record, the spray orifice that it is characterized in that described jet flow assembly is a slit-type.
9. as the colour filter spraying equipment of claim 1 record, it is characterized in that described jet flow assembly also includes a heating system in order to adding hot-air, and blowing simultaneously with the ink droplet drying.
10. a colour filter sprays autofrettage, it is characterized in that including at least the following step:
Colour filtering chip basic board and spray orifice are located;
Utilize first optical module to detect described colour filtering chip basic board position, described colour filtering chip basic board is carried out thick contraposition; And utilize second optical module, according to the light transmission capacity that sees through described colour filtering chip basic board by the light source that is positioned at described colour filtering chip basic board below, with the relativity shift position of described spray orifice of instant correction and ink droplet spraying profile;
The spraying ink droplet; And
Air blowing is with described ink droplet homogenising.
11., it is characterized in that described ink droplet spraying profile is the edge track of template spraying frame as the colour filter spraying autofrettage of claim 10 record.
12. the colour filter spraying autofrettage as claim 11 record is characterized in that the black template that described spraying frame is a two dimensional form.
13., it is characterized in that the step of described spraying ink droplet, be directly ink droplet to be sprayed on the described colour filtering chip basic board as the colour filter spraying autofrettage of claim 10 record.
14. the colour filter spraying autofrettage as claim 10 record is characterized in that the step of described air blowing with described ink droplet homogenising, also includes the step of dry this ink droplet.
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CN 01131158 CN1257799C (en) | 2001-09-05 | 2001-09-05 | Spraying process and equipment for producing color filter |
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CN 01131158 CN1257799C (en) | 2001-09-05 | 2001-09-05 | Spraying process and equipment for producing color filter |
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CN1403211A CN1403211A (en) | 2003-03-19 |
CN1257799C true CN1257799C (en) | 2006-05-31 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101229712B (en) * | 2007-01-23 | 2010-09-15 | 中华映管股份有限公司 | Ink-jet apparatus and method |
Families Citing this family (7)
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JP4474870B2 (en) * | 2003-08-27 | 2010-06-09 | セイコーエプソン株式会社 | Droplet visual recognition method, droplet discharge head inspection device, and droplet discharge device |
JP4105613B2 (en) * | 2003-09-04 | 2008-06-25 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
KR20060047348A (en) * | 2004-05-11 | 2006-05-18 | 세이코 엡슨 가부시키가이샤 | Droplet ejecting apparatus, electro-optic device, electronic apparatus, and droplet ejecting method |
TWI289108B (en) | 2005-12-29 | 2007-11-01 | Ind Tech Res Inst | Micro-droplet injection apparatus and the injecting process using the same |
JP2011164402A (en) * | 2010-02-10 | 2011-08-25 | Shin-Etsu Chemical Co Ltd | Method for manufacturing pellicle |
TWI392635B (en) * | 2010-11-26 | 2013-04-11 | Ind Tech Res Inst | Web swing alignment apparatus and method |
CN111375514A (en) * | 2020-04-28 | 2020-07-07 | 江苏上达电子有限公司 | Precise edge-pasting spraying device suitable for COF substrate and using method thereof |
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2001
- 2001-09-05 CN CN 01131158 patent/CN1257799C/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101229712B (en) * | 2007-01-23 | 2010-09-15 | 中华映管股份有限公司 | Ink-jet apparatus and method |
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