CN1257772A - Vernier robot with decoupled parallel three freedoms and three-axle structure - Google Patents
Vernier robot with decoupled parallel three freedoms and three-axle structure Download PDFInfo
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- CN1257772A CN1257772A CN 00100198 CN00100198A CN1257772A CN 1257772 A CN1257772 A CN 1257772A CN 00100198 CN00100198 CN 00100198 CN 00100198 A CN00100198 A CN 00100198A CN 1257772 A CN1257772 A CN 1257772A
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Abstract
A vernier robot with three-freedom three-axle structure features that the moving table is linked to fixed table via 3 connecting-rods, the 3 connecting-rods are linked to moving table via elastic Hooke's hinges on 3 mutually vertical planes and to the elastic moving sets on 3 mutually vertical panels of fixed table via 3 elastic Hooke's hinges, and each elastic moving set is connected to a microdisplacement driver. Said robot can realize decoupled 3D micromovement with high resolution and without friction and gap, its structure is compact.
Description
The invention belongs to the advanced manufacturing technology field, particularly a kind of vernier robot with decoupled parallel three freedoms and three-axle structure.
The jiggle robot of realizing accurate operation just is being subjected to people's growing interest along with going deep into of micrometer/nanometer engineering, utilize the alternative actual motion pair of flexible (or claiming elasticity) hinge to make the parallel-connection structure jiggle robot not only eliminate the gap that conventional kinematic pair had, friction, backlash phenomenon, and give full play of intrinsic quality characteristics such as the high rigidity of parallel institution, high accuracy.
At the initial stage in the sixties, Ellis proposes to use parallel institution as the fine motion manipulator, and is applied in biotechnology and the microsurgery.In order to improve precision, Magnani and Pernette have studied the elastic construction form (being flexible hinge) of revolute pair, moving sets, Hooke's hinge and ball pivot.Stoughton and Tanikawa realize the chopsticks operational movement with two six-degree-of-freedom parallel connection mechanisms; Hara and Hemini studying plane Three Degree Of Freedom and six-freedom micro displacement robot; The six-freedom parallel micromanipulator of Hudgens and Tesar research; Lee proposes space three-freedom jiggle robot structure; The Parikian research scheme of Delta parallel institution as the pure mobile jiggle robot in space.
At home, Tsing-Hua University has developed micro displacement workbench; " Chinese journal of scientific instrument " NO.1,1996 reports, Harbin Institute of Technology has developed Stewart platform structure six-freedom parallel jiggle robot; At application number is to disclose " parallel decoupling structure six-dimensional force and torque sensor " in 99119320.2,99102421.4 and 99121020.4 patent documents and " having sextuple power of elastic hinge and torque sensor " reaches " six-freedom parallel decoupling-structure jogging robot ".
Although many scholar's research parallel micromotions robot is arranged both at home and abroad, but the subject matter that these achievements in research and patented technology exist is the complex structure that has, the demarcation difficulty that has, the mobile decoupling difficulty that has does not have Three Degree Of Freedom three-axis structure decoupling parallel micromotion mechanism especially as yet.
The objective of the invention is to overcome weak point of the prior art and a kind of vernier robot with decoupled parallel three freedoms and three-axle structure is provided.
Technical solution of the present invention is as follows:
The structure of vernier robot with decoupled parallel three freedoms and three-axle structure is made up of three connecting rods of motion workbench, fixed station, connection motion workbench and fixed station.Motion workbench is connected with fixed station by three connecting rods, three connecting rods are the elasticity Hooke's hinges that is distributed on three orthogonal planes of motion workbench with being connected of motion workbench, three connecting rods are connected with the resilient movement on being distributed in orthogonal three panels of fixed station is secondary by three elasticity Hooke's hinges respectively, and each resilient movement pair is connecting a micro-displacement driver.
The present invention compared with prior art has following advantage:
Jiggle robot of the present invention has mobile decoupling, simple and compact for structure, advantage such as algorithm is simple, and it is little mobile to realize not having friction, no gap and high-resolution three-dimensional decoupling zero.The proposition of this jiggle robot has the meaning of particular importance in the advanced manufacturing technology field, it has wide and tangible application prospect and actual application value at accurate operation and processing, nano-scale manufacturing, micro displacement workbench, integrated circuit manufacturing, biology and fields such as genetic engineering, microsurgery.
The drawing of accompanying drawing is described as follows:
Fig. 1 is a vernier robot with decoupled parallel three freedoms and three-axle structure structural representation of the present invention.
Below in conjunction with accompanying drawing the embodiment of the invention is described in further detail:
The structure of vernier robot with decoupled parallel three freedoms and three-axle structure as shown in Figure 1, form fixed station by three orthogonal base plates (1), side plate (11), backboard (10), motion workbench (4) is connected with base plate (1), side plate (11), the backboard (10) of fixed station respectively by three connecting rods (18), (16), (6).Three connecting rods (18), (16), (6) a end is connecting three the elasticity Hooke's hinges (17) that are distributed on (4) three mutual vertical planes of motion workbench respectively, (12), (5), three connecting rods (18), (16), (6) the other end is connecting three elasticity Hooke's hinges (19) respectively, (15), (7), its three elasticity Hooke's hinges (19), (15), (7) connecting respectively and be distributed in the orthogonal base plate of fixed station (1), side plate (11), three resilient movement pairs (3) on the backboard (10), (14), (8), resilient movement pair (3), (14), (8) connecting three piezoelectric micro-displacement actuators (2) respectively, (13), (9).
Jiggle robot of the present invention is integrated, and motion workbench, three mutually perpendicular planes of fixed station, three connecting rods and elasticity Hooke's hinge thereof, resilient movement pair are one.Motion workbench (4) is realized moving along three decoupler shafts of X, Y, Z are little by the piezoelectric micro-displacement actuator (2), (13), (9) driving three resilient movement pairs (3), (14), (8) that are distributed on three orthogonal planes of fixed station (1), (11), (10).
Claims (1)
1, a kind of vernier robot with decoupled parallel three freedoms and three-axle structure, form by fixed station, motion workbench, the connecting rod that is connected and fixed platform and motion workbench, it is characterized in that: motion workbench is connected with fixed station by three connecting rods, three connecting rods are the elasticity Hooke's hinges that is distributed on three orthogonal planes of motion workbench with being connected of motion workbench, three connecting rods are connected with the resilient movement on being distributed in orthogonal three panels of fixed station is secondary by three elasticity Hooke's hinges respectively, and each resilient movement pair is connecting a micro-displacement driver.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00100198 CN1092097C (en) | 2000-01-17 | 2000-01-17 | Vernier robot with decoupled parallel three freedoms and three-axle structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00100198 CN1092097C (en) | 2000-01-17 | 2000-01-17 | Vernier robot with decoupled parallel three freedoms and three-axle structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1257772A true CN1257772A (en) | 2000-06-28 |
| CN1092097C CN1092097C (en) | 2002-10-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00100198 Expired - Fee Related CN1092097C (en) | 2000-01-17 | 2000-01-17 | Vernier robot with decoupled parallel three freedoms and three-axle structure |
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| Country | Link |
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| CN (1) | CN1092097C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101934521A (en) * | 2010-09-07 | 2011-01-05 | 上海工程技术大学 | Decoupled tri-rotation parallel mechanism |
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102705661A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional no-coupling micro displacement workbench fixed by driver |
| CN103900478A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Plane motion measuring device and method |
| CN106082116A (en) * | 2016-08-24 | 2016-11-09 | 广东工业大学 | Micro-nano technology equipment and process operation device thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100451434C (en) * | 2007-01-26 | 2009-01-14 | 清华大学 | Moving-decoupling space three-freedom connection-in-parallel mechanism |
-
2000
- 2000-01-17 CN CN 00100198 patent/CN1092097C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101934521A (en) * | 2010-09-07 | 2011-01-05 | 上海工程技术大学 | Decoupled tri-rotation parallel mechanism |
| CN101934521B (en) * | 2010-09-07 | 2011-08-17 | 上海工程技术大学 | Decoupled tri-rotation parallel mechanism |
| CN102009358A (en) * | 2010-11-05 | 2011-04-13 | 山东理工大学 | Annular elastic pair-containing three-degrees-of-freedom micro operating table |
| CN102705661A (en) * | 2012-05-29 | 2012-10-03 | 合肥工业大学 | Three-dimensional no-coupling micro displacement workbench fixed by driver |
| CN102705661B (en) * | 2012-05-29 | 2013-11-06 | 合肥工业大学 | Three-dimensional no-coupling micro displacement workbench fixed by driver |
| CN103900478A (en) * | 2012-12-28 | 2014-07-02 | 上海微电子装备有限公司 | Plane motion measuring device and method |
| CN103900478B (en) * | 2012-12-28 | 2017-06-27 | 上海微电子装备有限公司 | A kind of measurement of in-plane motion device and method |
| CN106082116A (en) * | 2016-08-24 | 2016-11-09 | 广东工业大学 | Micro-nano technology equipment and process operation device thereof |
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| Publication number | Publication date |
|---|---|
| CN1092097C (en) | 2002-10-09 |
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