CN1255696C - Light uniformization microprojector device - Google Patents
Light uniformization microprojector device Download PDFInfo
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- CN1255696C CN1255696C CN 03100907 CN03100907A CN1255696C CN 1255696 C CN1255696 C CN 1255696C CN 03100907 CN03100907 CN 03100907 CN 03100907 A CN03100907 A CN 03100907A CN 1255696 C CN1255696 C CN 1255696C
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Abstract
The present invention relates to a micro-imaging device for homogenizing light. A light diffracting unit is mainly arranged between an incident light source and a light splitting unit to make incident light provided by the incident light source become homogenized incident light which irradiates a sample in a large area through the light splitting unit. Light signals excited by the sample transmit the light splitting unit and subsequently transmit a light filter, and a unit retrieved by an image receives and obtains a sample image.
Description
Technical field
The invention relates to a kind of area image (Global Image) device, refer to a kind of micro-imaging device of light uniformization especially, it may be used on many fields, for example: the fluorescent system of area image formula or the Raman system of area image formula.
Background technology
When the chemical constitution impurity of inspected object and defective, general optical image mode can't be observed, must be by chemical image technology.The electronic energy rank (Electronic State) or vibrational level (Vibration State) spectrum that promptly utilize the laser excitation sample to be measured obtain the chemical bonded refractory information of sample.And in the spot scan of chemical image technology (Point Scan), line sweep (Line Scan) and three kinds of method for measurement of area image (Global Imaging), under the situation that optical energy density (W/cm 2) is fixed, speed of orientation with area image is the fastest, is scope with the capture of array detector because can be directly with the large tracts of land of optical illumination, do not need scanning samples or incident beam, can obtain the chemical image of two dimension, the superiority on the measurement speed is arranged.
But because of incident light is Gaussian beam (Gaussian Beam), beam cross section have central authorities by force, weak inhomogeneous characteristic (as shown in Figure 1) on every side, cause the chemical image that is ejected to have serious unevenness, very easily cause the erroneous judgement of sample concentration identification, for example: the spectral response of Fig. 2 show sample A and sample C also is not equal to the spectral response of sample B, thereby limited the development of area image, press for the new method that can solve this problem of non-uniform.
Known chemical image measurement system, have three kinds of modes to overcome the inhomogeneous caused problem of laser light: (1) utilizes light to pass through Si Nieer (Snell) refraction law of medium interface, the part of laser beam cross section central authorities light intensity is dispersed in medium soon, and the part of light beam light surround power is dispersed in medium slowly.After light breaks away from medium, promptly obtain the uniform flat-top of light intensity (Flat-Top) light beam, actual element such as Powell Lens.But because this element grinding is difficult for, can only makes the element of two dimension, thereby only laser light can be modified to the uniform line light source, purposes is limited in the chemical image capturing range of line sweep, and can't be applied in the area image.
(2) utilize central authorities' decay strong, the special light decay optical filter (NaturalDensity Filter) that decay on every side is weak, make laser light by after become the form of Flat-Top.Though this design may be used on the chemical image spectroscopic system of area image form, but the damaging thresholding of element is low, and the heat that the meeting absorbing light is brought, purposes are limited in the fluorescent chemistry image system of low laser power illumination, can't be applied to the raman chemical image system of high laser power illumination.
(3) utilize Gaussian beam beam incident optical hologram (Holographic Optical Element), the conoscope image of recorded Gaussian beam of this sheet and Flat-Top, and can restore the light beam that obtains Flat-Top.But the energy conversion efficiency that is subject to element is low, and damaging thresholding is low, so situation about being applied in the chemical image system is unsatisfactory.Take a broad view of above method, all can't effectively be applied in the All Ranges image system,
Summary of the invention
Fundamental purpose of the present invention is that a kind of micro-imaging device of light uniformization is being provided, so that can overcome the uneven problem of the caused area image of laser gaussian beam, significantly increasing the practicality of area image, and set up the quick and distortionless chemical image microscope equipment of an innovation.
Secondary objective of the present invention is that a kind of micro-imaging device of light uniformization is being provided, so as can one easy to manufacture, volume is little, can anti-high power and can reach high-energy conversion efficiency.
For reaching above-mentioned purpose, the micro-imaging device of a kind of light uniformization of the present invention is characterized in that, mainly comprises:
One incident light source provides an incident light;
One x-ray diffraction unit is to receive this incident light, and makes this incident light become a homogenising incident light;
One spectrophotometric unit is this homogenising incident light of reflection, and makes this homogenising incident light shine equally product, and for exciting a light signal by this sample, this light signal also can penetrate this spectrophotometric unit; And
One image acquisition unit is to receive the light signal that penetrates this spectrophotometric unit, to obtain the image of this sample.
Wherein, the surface of this x-ray diffraction unit is the smooth and continuous face, and its center thickness is less than all edge thickness.
Wherein, the form of this x-ray diffraction unit is for stepped.
Wherein, this incident light is a Gaussian beam, and this x-ray diffraction unit is to make this incident light become the incident light of a flat-top shape waveform.
It also comprises a wavelengthtunable filter unit, and this wavelengthtunable filter unit is between this spectrophotometric unit and this image acquisition unit, to select the detecting image of different wave length.
Wherein, this wavelengthtunable filter unit is liquid crystal wavelength-tunable light filter or acousto-optic wavelength-tunable light filter.
It comprises that also one expands Shu Danyuan, and this expands Shu Danyuan between this x-ray diffraction unit and this spectrophotometric unit, handles this homogenising incident light is expanded bundle.
It also comprises an object lens, and this object lens is between this spectrophotometric unit and this at least one sample, to transmit this detecting image and to change enlargement ratio.
Wherein, the material of this x-ray diffraction unit is the material that visible or infrared light can penetrate.
Wherein, the material of this x-ray diffraction unit is quartz, acryl or silicon.
It also wraps an optical filter, and this optical filter detects this incident light to avoid this image acquisition unit between this spectrophotometric unit and this wavelengthtunable filter unit.
Wherein, this optical filter is a high-pass filter.
It also comprises an imaging mirror, and this imaging mirror images in this image acquisition unit for this imaging mirror with this detecting image between this wavelengthtunable filter unit and this image acquisition unit.
Wherein, this image acquisition unit is that charge coupled cell detector, image are strengthened charge coupled cell detector, light diode array detector or pick-up tube.
Because the present invention constructs novelty, can provide on the industry and utilize, and truly have the enhancement effect, so apply for patent of invention in accordance with the law.
Description of drawings
For further specifying particular content of the present invention, below in conjunction with embodiment and accompanying drawing the present invention is done a detailed description, wherein:
Fig. 1 is the illumination of known region image microscope equipment and the synoptic diagram of chemical image.
Fig. 2 is the resulting sample spectra response diagram of known region image microscope equipment.
Fig. 3 is the micro-imaging device synoptic diagram of a preferred embodiment of the present invention.
Fig. 4 is the x-ray diffraction cell schematics of a preferred embodiment of the present invention.
Fig. 5 is the resulting chemical striograph of the micro-imaging device of a preferred embodiment of the present invention.
Fig. 6 is the spectral response figure of the resultant sample of micro-imaging device of a preferred embodiment of the present invention.
Embodiment
Relevant preferred embodiment of the present invention, be to be illustrated with detecting polystyrene microsphere (Polystyrenemicro-sphere), please be with reference to the synoptic diagram of Fig. 1 demonstration, it mainly is made up of members such as incident light source 1, x-ray diffraction unit 2, expansion Shu Danyuan 3, spectrophotometric unit 4, object lens 5, optical filter 6, wavelengthtunable optical filter 7, imaging mirror 8, image acquisition unit 9, sample 10 and specimen holders 11.
In present embodiment, incident light source 1 can be any light source, is preferably light emitting diode (LED), and the best is laser diode (LD).X-ray diffraction unit 2 is to be the diffraction element, and its material can be the material that any visible wavelength or infrared light wavelength can penetrate, and be preferably quartz (Quartz), acryl (PMMA) or silicon (Si), and x-ray diffraction unit 2 designs according to the scalar diffraction theory.Sample 10 is to be polystyrene microsphere in present embodiment.Spectrophotometric unit 4 is preferably dichroic mirror.Optical filter 6 is preferably high-pass filter.Wavelengthtunable optical filter 7 is preferably acousto-optic modulation light filter (AOTF), and the best is a liquid crystal wavelength-tunable light filter (LCTF).Image acquisition unit 9 is preferably charge coupled cell (CCD) detector or other array detector unit, for example: image strengthen charge coupled cell detector (ICCD), light diode array detector (photodiode array, PDA) or pick-up tube (vidicon).
Incident light source 1 emitted laser, its waveform is shown in A 1.This laser beam incident diffraction unit 2, because the surface of x-ray diffraction unit 2 is the smooth and continuous face, example as Fig. 4, x-ray diffraction element center thickness is less than all edge thickness, makes the light of each position, incident light cross section, the path difference of the element that passes through, the energy that forms destructive and constructive interference behind element is redistributed, and becoming a homogenising incident light, its waveform shape is to be flat-top (Flat-Top) shape, shown in A2.The entity synoptic diagram of Fig. 4 display light diffraction unit 2.Certainly, differ and be decided to be smooth and continuous and the thick form in thin next door, the center of reaching in 2 surfaces, x-ray diffraction unit, and it also can be designed to other patterns, for example: stepped.
The homogenising incident light is incident in and expands Shu Danyuan 3, to become a light beam of slightly dispersing, then, and the sample 10 through spectrophotometric unit 4 reflexes to object lens 5 on the irradiation specimen holder 11, this sample comprises the polystyrene microsphere of A, B and C three isoconcentrations.After the homogenising incident light irradiation that sample 10 is slightly spread, will inspire chemical image, back-scattered light is collected by object lens 5, and imports spectrophotometric unit 4 and optical filter 6.Optical filter 6 places purpose herein, is to avoid incident light to penetrate imaging mirror 8 and received by image acquisition unit 9, causes the damage of image acquisition unit 9 or the interference of signal.
The chemical image that penetrates optical filter 6 will reenter penetrates wavelengthtunable optical filter 7.Wavelengthtunable optical filter 7 adopts LCTF in present embodiment, it can utilize bias voltage to change this crystal polarization, with logical (Bandpass) centre wavelength of quick change band.For example: can set centre wavelength and be 510nm, 520nm, 530nm ..., different wave length such as 600nm, to filter out the chemical signal of video signal of each different wave length.After chemical image passes through wavelengthtunable optical filter 7, to be imaged on the image acquisition unit 9 through imaging mirror 8, and obtain a uniform chemical image, as shown in Figure 5, be in the visual field sample 10 central samples (B) locate and on every side sample (A and C) to locate spectral response all identical, as shown in Figure 6, promptly on the sample 10 everywhere spectral response all identical.
By above explanation as can be known, the present invention is mainly behind incident light source emission laser beam, earlier through an x-ray diffraction unit, so that become the homogenising incident light of a flat-top originally for the laser light of Gaussian beam, then see through the sample on spectrophotometric unit and the object lens irradiation specimen holder again, sample will evoke chemical image after by light beam irradiates and be collected by object lens, pass through a spectrophotometric unit and a wavelengthtunable filter unit again, be imaged on the image acquisition unit by the imaging mirror at last, by the image acquisition unit pick-up image.This design can overcome the uneven problem of the caused area image of laser gaussian beam, significantly increasing the practicality of area image, and sets up the quick and distortionless chemical image microscope equipment of an innovation.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.
Claims (14)
1. the micro-imaging device of a light uniformization is characterized in that, mainly comprises:
One incident light source provides an incident light;
One x-ray diffraction unit is to receive this incident light, and makes this incident light become a homogenising incident light;
One spectrophotometric unit is this homogenising incident light of reflection, and makes this homogenising incident light shine equally product, and for exciting a light signal by this sample, this light signal also can penetrate this spectrophotometric unit; And
One image acquisition unit is to receive the light signal that penetrates this spectrophotometric unit, to obtain the image of this sample.
2. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, wherein, the surface of this x-ray diffraction unit is the smooth and continuous face, and its center thickness is less than all edge thickness.
3. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, wherein, the form of this x-ray diffraction unit is for stepped.
4. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, wherein, this incident light is a Gaussian beam, and this x-ray diffraction unit is to make this incident light become the incident light of a flat-top shape waveform.
5. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, it also comprises a wavelengthtunable filter unit, and this wavelengthtunable filter unit is between this spectrophotometric unit and this image acquisition unit, to select the detecting image of different wave length.
6. the micro-imaging device of light uniformization as claimed in claim 5 is characterized in that, wherein, this wavelengthtunable filter unit is liquid crystal wavelength-tunable light filter or acousto-optic wavelength-tunable light filter.
7. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, it comprises that also one expands Shu Danyuan, and this expands Shu Danyuan between this x-ray diffraction unit and this spectrophotometric unit, handles this homogenising incident light is expanded bundle.
8. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, it also comprises an object lens, and this object lens is between this spectrophotometric unit and this at least one sample, to transmit this detecting image and to change enlargement ratio.
9. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, wherein, the material of this x-ray diffraction unit is the material that visible or infrared light can penetrate.
10. the micro-imaging device of light uniformization as claimed in claim 9 is characterized in that, wherein, the material of this x-ray diffraction unit is quartz, acryl or silicon.
11. the micro-imaging device of light uniformization as claimed in claim 10 is characterized in that it also wraps an optical filter, this optical filter detects this incident light to avoid this image acquisition unit between this spectrophotometric unit and this wavelengthtunable filter unit.
12. the micro-imaging device of light uniformization as claimed in claim 5 is characterized in that, wherein, this optical filter is a high-pass filter.
13. the micro-imaging device of light uniformization as claimed in claim 5, it is characterized in that, it also comprises an imaging mirror, and this imaging mirror images in this image acquisition unit for this imaging mirror with this detecting image between this wavelengthtunable filter unit and this image acquisition unit.
14. the micro-imaging device of light uniformization as claimed in claim 1 is characterized in that, wherein, this image acquisition unit is that charge coupled cell detector, image are strengthened charge coupled cell detector, light diode array detector or pick-up tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03100907 CN1255696C (en) | 2003-01-02 | 2003-01-02 | Light uniformization microprojector device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03100907 CN1255696C (en) | 2003-01-02 | 2003-01-02 | Light uniformization microprojector device |
Publications (2)
| Publication Number | Publication Date |
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| CN1515923A CN1515923A (en) | 2004-07-28 |
| CN1255696C true CN1255696C (en) | 2006-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 03100907 Expired - Fee Related CN1255696C (en) | 2003-01-02 | 2003-01-02 | Light uniformization microprojector device |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102122054B (en) * | 2010-01-12 | 2012-10-10 | 财团法人工业技术研究院 | Focusing method and device |
| CN104034709A (en) * | 2014-06-06 | 2014-09-10 | 中国科学院长春光学精密机械与物理研究所 | Optical system of fluoroanalyzer |
| US9625695B2 (en) * | 2014-06-20 | 2017-04-18 | Agilent Technologies, Inc. | Magnifying assembly for an infrared microscope |
| WO2018202270A1 (en) * | 2017-05-04 | 2018-11-08 | Nkt Photonics A/S | Light system for supplying light |
| CN109143562B (en) * | 2018-09-12 | 2020-12-15 | 苏州大学 | Variable light sheet lighting system based on zooming principle |
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Granted publication date: 20060510 Termination date: 20190102 |