CN1247954C - Tilt adjustment equipment, loop clamping equipment, interferometer for the above equipment - Google Patents
Tilt adjustment equipment, loop clamping equipment, interferometer for the above equipment Download PDFInfo
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- CN1247954C CN1247954C CNB031412130A CN03141213A CN1247954C CN 1247954 C CN1247954 C CN 1247954C CN B031412130 A CNB031412130 A CN B031412130A CN 03141213 A CN03141213 A CN 03141213A CN 1247954 C CN1247954 C CN 1247954C
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- tilt adjustment
- rod
- lasso
- ball bearing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
- G02B6/3863—Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using polishing techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
In an inclination adjusting apparatus comprising two base members opposing each other, an adjusting screw for relatively inclining the two base members with respect to each other is rotatably threaded into and held by one of the two base members while projecting a leading end part from the one base member toward the other base member. The other base member is provided with a sphere-bearing surface opposing the leading end part of the adjustment screw. A rigid spherical member is held between the adjustment screw and the sphere-bearing surface.
Description
Related application
The application requires herein as with reference to Japanese patent application Nos.2002-167126 that submits on June 7th, 2002 that introduces and the right of priority of 2002-167731.
Technical field
The present invention relates to a kind of tilt adjustment device, for example be used for when the shape of the lasso leading section that is contained in optical plugs with micro-interference instrument apparatus (being also referred to as " in relating to microscope equipment ") analysis etc. the inclination of the lasso that remains on a precalculated position, object lens front is regulated; And the micro-interference device that this tilt adjustment device is housed.
The invention still further relates to a kind of loop clamping, be used for when shape of the lasso leading section that is contained in optical plugs with the microinterferometer device analysis etc., lasso being remained on the loop clamping in a precalculated position, object lens front; And the micro-interference device that this clamping device is housed.
Background technology
Recently, researched and developed the optical fiber that is used for optical communication well.As an example of this optical fiber, known a kind of core that comprises that an external diameter is about 10 microns; Be arranged on the coating that core outer periphery and external diameter are about 125 microns; Optical fiber also is equipped with a lasso, and this lasso is arranged on an one connection end, is used for optical fiber is connected with another optical fiber.
Lasso is a cylindrical parts that constitutes an optics unitor, and this optics unitor is used to keep the end with fixed fiber, thereby optical fiber is connected with another optical fiber.After with cementing agent etc. an optical fiber being inserted and being fastened to the external diameter core of lasso, the front end of lasso is polished into a minute surface, thereby can be coupled to each other by two optical fiber of each lasso maintenance when the front end face of two lassos presses each other.
Be polished into plane that is orthogonal to optical axial or the plane that tilts to intersect with optical axial although known front end face with lasso, but notice has been guided into such lasso recently, its front end face is subjected to PC (physics contact) polishing to obtain the convex surface spherical form, makes the front end face can be because the pressure that the front end face of lasso is pressed each other and elastic deformation.
In order to reduce the light loss when optical fiber is coupled to each other, JIS has stipulated multiple high precision specification.For the lasso of PC polishing, stipulated the specification of 6 micron number magnitudes, as the scale error of the radius of the radian of front end face, and the summit of the spherical front end face of lasso and the offset error between the fiber core center.
Such situation is arranged, and wherein the micro-interference instrument apparatus is used to detect the lasso of being produced and whether meets this specification.The micro-interference instrument apparatus has been configured to make the carrying phase information such as the surface configuration of small sample and the object light and the reference ray of index distribution to interfere mutually, multiaspect is observed the interference fringe that obtains like this, and the shape and the variation of measurement and analysis interference fringe, thereby the phase information of acquisition sample.
When detecting the lasso of being produced, need a tilt adjustment device that is used to regulate the relative tilt between micro-interference instrument apparatus and the lasso optical axial with this micro-interference instrument apparatus.
Conventional known this tilt adjustment device is a kind of like this, comprise two seat elements, they can relative to each other tilt as fulcrum with their support unit toward each other, and an adjusting screw(rod), and the front end face of this adjusting screw(rod) forms a convex surface spherical surface.This adjusting screw(rod) rotatably is screwed in one of them seat element and by its maintenance, front end face stretches to another seat element simultaneously., rotate this adjustings surface and the change extension elongation, thereby regulate two relative tilts between the seat element when being positioned at the area supported sliding contact of base opposite side at front end face.
But, in this conventional tilt adjustment device, can there be following point because the front end face of adjusting screw(rod) forms the convex surface spherical surface.That is to say that when the misalignment adjusting screw(rod) axis of the convex surface spherical surface that is positioned at the adjusting screw(rod) front end, the diameter center ring of convex surface spherical surface rotates around adjusting screw(rod) when adjusting screw(rod) rotates.When the area supported formation that is positioned at the seat element opposite side that contacts with this convex surface spherical surface had the groove in V-arrangement cross section, it was limited in the slip of convex surface spherical surface only at (groove an extends) predetermined direction.Therefore, when adjusting screw(rod) rotates, can apply a power and area supported is pressed into a direction that is substantially normal to this predetermined direction.This power can make two seat elements relative to each other be offset, thereby tilt adjustment is had a negative impact.
The convex surface spherical surface is little of usually making the relative position side-play amount between above-mentioned two seat elements seem to keep very little at the offset of adjusting screw(rod) front end.But when the time with the shape of above-mentioned microinterferometer measurement device lasso, even taking place, small offset all can greatly influence measurement when adjustment collar tilts, because must the lasso leading section be remained on precalculated position, object lens front of micro-interference instrument apparatus with high precision.
On the other hand, when detecting the lasso of being produced with this micro-interference instrument apparatus, the lasso that needs a clamping device will detect with the high position precision remains on precalculated position, object lens front of micro-interference instrument apparatus.Because lasso is contained in the tube element that constitutes optical plugs usually, loop clamping is suitable for clamping lasso under the state in being contained in such tube element.
Figure 13 represents a conventional example of this loop clamping.Figure 13 is the cut-open view that is in the conventional clamping device under the maintainance set round attitude.Lasso 420 shown in Figure 13 keeps and the end of a fastening not shown optical fiber, is contained in simultaneously in the tube element of a formation optical plugs 400.Clamping device 500 comprises that one is used for being arranged to the converter 520 that can move with respect to supporting member 510 and one from 510, one of the supporting members of one side bearing lasso 420 and is used to suppress converter 520 so that the mobile latter's press element 530.
It is relative with supporting member 510 that converter 520 is striden lasso 420, mobile between the clamping off-position that can separate at the clip position that contact with lasso 420 opposite sides with this side simultaneously.Press element 530 comprises the screw shaft 531 and the rod element 532 that is used for around its axis C rotary screw axle 531 that mesh with the threaded hole 511 that is formed in the supporting member 510; And be configured under the upper surface state of contact of spherical front end face of screw shaft 531 and converter 520 compacting converter 520 downwards.
In clamping device 500, the converter of being suppressed by press element 530 520 moves to clip position from the clamping off-position, presses the opposite side of lasso 420, thereby can enough supporting members 510 and converter 520 supporting lassos 420.
The problem of the conventional clamping device 500 shown in Figure 13 is as follows.That is to say that though the leading section that is contained in the lasso 420 in the tube element 410 stretches out from the front end of tube element 410, extension elongation is shorter usually.Though supporting member 510 and converter 520 parts extend in the tube element 410 with the chuck edge of fastening lasso 420, the line of action of force (C is consistent with axis) that passes the compacting point P of press element 530 is positioned at the front end outside of tube element 410.Therefore, line of action of force can depart from lasso 420 zones (zone between Figure 13 mid point S and T) by supporting member 510 supportings.When press element 530 was suppressed converter 520 in this state, converter 520 can (direction of clockwise direction rotation converter 520 in Figure 13) reverse, and made to be difficult to stably or to keep lasso 420 with high precision with a predetermined attitude.
When astatically lasso being remained in the loop clamping that is used for the micro-interference instrument apparatus, lasso can be changed its position therebetween in observation, thereby measurement and analysis are had a negative impact.When lasso does not keep with predetermined attitude, can not finish high-acruracy survey and analysis.
Summary of the invention
In view of these environment, an object of the present invention is to provide a kind of tilt adjustment device, it can finish tilt adjustment with high precision, limit two seat elements simultaneously and relative to each other change their position, and the micro-interference instrument apparatus that can stably measure and analyze the small sample that need carry out tilt adjustment.
Another object of the present invention provides a kind of loop clamping, and it can remain on a precalculated position with the lasso that is contained in the tube element that constitutes optic splice reliably; And a micro-interference instrument apparatus, it can stably measure and analyze the lasso that is contained in this tube element.
For achieving the above object, the invention provides a kind of tilt adjustment device, comprise two seat elements respect to one another, a support unit, being used to support above-mentioned two seat elements can relative to each other tilt above-mentioned two seat elements, with adjusting parts, be used for as fulcrum above-mentioned two seat elements relative to each other being tilted with above-mentioned support unit; Above-mentioned adjusting parts comprise: an adjusting screw(rod), this adjusting screw(rod) rotatably is screwed among in above-mentioned two seat elements one and by its maintenance, stretch out a leading section from an above-mentioned seat element towards another seat element simultaneously, the leading section of this adjusting screw(rod) forms the convex surface spherical surface; A ball bearing surface, this ball bearing surface is arranged in another seat element, thereby relative with the front end face of above-mentioned adjusting screw(rod); One is arranged on the above-mentioned front end face of above-mentioned adjusting screw(rod) and the rigidity ball type device between the above-mentioned ball bearing surface; A holding element is used for above-mentioned ball type device is remained on a position that contacts with above-mentioned ball bearing surface with above-mentioned front end face; The above-mentioned screw rod of rotation under above-mentioned ball type device and above-mentioned front end face and above-mentioned ball bearing surface state of contact, thus above-mentioned adjusting screw(rod) changed from the above-mentioned length that seat element stretches out, thus regulate the relative tilt between above-mentioned two seat elements.
Above-mentioned holding element can have a hole, and the internal diameter in this hole is less than the diameter of above-mentioned ball type device, and can be arranged between above-mentioned front end face and the above-mentioned ball bearing surface, above-mentioned ball type device is stretched out from above-mentioned bore portion, thereby keep above-mentioned ball type device.
This tilt adjustment device also can comprise a pushing member, is used for towards promoting above-mentioned two seat elements each other.
Regulating parts for two can be arranged on each position that the mutually orthogonal directions that extend out from above-mentioned support unit are separated from each other, the surperficial plane that contacts with above-mentioned ball type device that forms of the above-mentioned ball bearing of one of them above-mentioned adjusting parts, another above-mentioned ball bearing surface of regulating in parts forms the upwardly extending groove in side that has the V-arrangement cross section and regulate parts and above-mentioned support unit in connection this another.
The invention provides a kind of interferometer that is used to observe interference fringe, interference fringe is to obtain by the object light of the phase information of carrying sample and with reference to the interference between the light, the above-mentioned interference instrument apparatus comprises according to tilt adjustment device of the present invention, and the power supply in a main casing, control box and interferometer main system, wherein said tilt adjustment device is arranged on the header board that constitutes main casing.
This micro-interference instrument apparatus also can comprise a clamping device that is used for above-mentioned sample is remained on a precalculated position, with a clamping device keeper that is used to keep above-mentioned clamping device, above-mentioned clamping device is supported by above-mentioned tilt adjustment device by above-mentioned clamping device keeper, and the lateral attitude of above-mentioned clamping device is regulated by above-mentioned tilt adjustment device.
The invention provides a kind of loop clamping that is used to keep lasso, this lasso is contained in the tube element that constitutes optical plugs, above-mentioned loop clamping comprises: a supporting member, this supporting member have one and are used for from first supporting slice of the above-mentioned lasso of a side bearing; Converter with one second supporting slice, this converter is arranged to stride by the above-mentioned lasso of above-mentioned first supporting slice supporting relative with above-mentioned first supporting slice, and is mobile between the clamping off-position that can separate at the clip position that contacts with the opposite side of above-mentioned lasso with this opposite side simultaneously; And a press element, be used to suppress above-mentioned converter and mobile above-mentioned second supporting slice; The outside that wherein above-mentioned first and second supporting slices are configured as along the axis of above-mentioned lasso from the front end of aforementioned tube linear element extends to inside; Wherein above-mentioned converter comprises a pressure receiving sheet, and this pressure receiving sheet extends and to step up a sidewall sections stating tube element relative with above-mentioned second supporting slice; Wherein above-mentioned press element is configured as, when under the compacting point of above-mentioned press element and above-mentioned pressure receiving sheet state of contact when above-mentioned lasso is suppressed above-mentioned pressure receiving sheet, above-mentioned second supporting slice moves to above-mentioned clip position from above-mentioned clamping off-position, thereby above-mentioned lasso and above-mentioned first and second supporting slices are kept together, when above-mentioned compacting discharged, above-mentioned first and second supporting slices stopped to keep above-mentioned lasso.
Preferably, the line of action of force that passes the above-mentioned press element of above-mentioned compacting point passes the basic core by the above-mentioned cover collar region of above-mentioned first supporting slice supporting.
Above-mentioned second supporting slice can have a projection, this projection with the above-mentioned first supporting slice facing surfaces on contact with the opposite side of above-mentioned lasso.
The axis of guide that above-mentioned converter can extend along the conversion direction at above-mentioned second supporting slice moves, and the while is promoted by a pushing member and above-mentioned second supporting slice is positioned at above-mentioned clamping off-position.
Above-mentioned press element can comprise a screw shaft, this screw shaft rotatably meshes with a threaded hole that is formed in the above-mentioned supporting member, and suppress above-mentioned pressure receiving sheet, and rod element that is used to rotate above-mentioned screw shaft with a leading section with above-mentioned compacting point.
This loop clamping also can comprise a retainer that is used to limit the rotary area of above-mentioned rod element.
On the other hand, the invention provides a kind of interferometer that is used to observe interference fringe, interference fringe is to obtain by the object light of the phase information of carrying sample and with reference to the interference between the light; Above-mentioned micro-interference instrument apparatus comprises according to loop clamping of the present invention.
Description of drawings
Fig. 1 is the front view of tilt adjustment device according to an embodiment of the invention.
Fig. 2 is the cut-open view of being got along Fig. 1 center line A-A.
Fig. 3 is a cut-open view of being got along Fig. 1 center line B-B.
Fig. 4 is a cut-open view of being got along Fig. 1 center line C-C.
Fig. 5 is a cut-open view of being got along Fig. 1 center line D-D.
Fig. 6 is a cut-open view, is used to represent the operation of tilt adjustment device 100.
Fig. 7 is equipped with the tilt adjustment shown in Fig. 1 to adorn a skeleton view.
Fig. 8 is the cut-open view according to the clamping device that is used for optical plugs of first embodiment of the invention.
Fig. 9 is a skeleton view of the outside of clamping device shown in Fig. 8.
Figure 10 is the partial front elevation view of clamping device shown in Fig. 8.
Figure 11 is a skeleton view, the part of clamping device shown in the presentation graphs 8.
Figure 12 is a cut-open view, and expression is according to the loop clamping of second embodiment of the invention.
Figure 13 is the cut-open view of conventional loop clamping.
Embodiment
With reference to the accompanying drawings embodiments of the invention are described.
The micro-interference instrument apparatus
At first the one-piece construction of micro-interference instrument apparatus according to an embodiment of the invention is described with reference to Fig. 7.Fig. 7 is a skeleton view, represents micro-interference instrument apparatus according to an embodiment of the invention with part incision form.
Micro-interference instrument apparatus 1 shown in Fig. 7 comprises a main casing, this main casing is made of plate behind the base plate 2, header board 3 (illustrating in part incision mode), 4, next door 5 and a capping case 6 (illustrating in part incision mode), is provided with a power supply 7, a control enclosure 8 and a main system 10 in this main casing.
This main system 10 comprises an object lens 11, piezoelectric unit 12, one and half mirror images/light source cell 13, imaging len unit 14, a mirror image box 15 and a CCD image unit 16.Wherein imaging len unit 14, mirror image box 15 and CCD image unit 16 are connected on the static platform 17 that is anchored on the next door 5, and object lens 11, piezoelectric unit 12 and half mirror image/light source cell 13 is connected to a focus platform 18 (illustrating in part incision mode).
Focus platform 18 is supported by the 19A of the axis of guide up and down, the 19B (illustrating in part incision mode) that extend in parallel at fore-and-aft direction (arrow B and F direction in the accompanying drawing), thereby can slide front and back.A wind spring 9 is arranged between static platform 17 and the focus platform 18, thus the elasticity by wind spring 9 forward (arrow F direction in the accompanying drawings) promote focus platform 18.
Header board 3 is provided with a focal adjustments screw rod 20, thereby is used for the focal adjustments that moving focal point platform 18 is finished main system 10.This focal adjustments screw rod 20 comprises a screw shaft 21 and a knob 22 that is used for rotary screw axle 21, and this screw shaft 21 is screwed in the not shown threaded hole that is formed in the header board 3, thereby can move forward and backward around its axis rotation the time.The front end face of screw shaft 21 presses a hemispherical projections 18a who is arranged at focus platform 18 front surface portion.When changing screw shaft 21 from the outstanding length of header board 3 by rotary knob 22, focal adjustments screw rod 20 can move forward and backward focus platform 18 along axle 19A, 19B, thus the realization focal adjustments.
Interferometer main system 10 usefulness with said structure are shone a small sample (not shown) that remains on a precalculated position, object lens 11 fronts with the illumination light from a not shown light source that reference light separates, make from the object light of sample reflection and with reference to the interference of light, the interference light that produces is like this passed an imaging len system (not shown) in the imaging len unit 14, on a not shown CCD, form an interference fringe image then.After the shape and variation of the interference fringe of measuring and analyzed such acquisition, can finish the three-dimensional measurement and the physical property thereof of the surface configuration of sample and measure.There is multiple model to can be used as interferometer main system 10, as Mireau, Michelson and Linnik.
Header board 3 is provided with a tilt adjustment device 100.This tilt adjustment device 100 that will describe below comprises L shaped first seat element 110 that is fastened on the header board 3, has similar with first seat element 110 second L shaped and relative with first seat element 110 seat element 120 with one.Second seat element 120 is supported as fulcrum with support unit 130 and can tilts with respect to first seat element 110, and can be respectively by first and second regulate parts 140,150 around one from the support unit 130 along continuous straight runs axis and axis swing of vertically extending basically of extending basically from support unit 130, thereby regulate inclination with respect to first seat element 110.
A clamping device keeper 200 is connected on second seat element 120 of tilt adjustment device 100.This clamping device keeper 200 comprises a front portion 210, a rear portion 220 and the connection part 230 that they are linked up, and anterior 210 be fastened on second seat element 120 by three connecting screw rods 240.The front portion 210 of clamping device keeper 200 is positioned at the front surface side of object lens 11, and its core forms a keeper that clamping device 300 is remained on wherein and caves in 211.The lasso that clamping device 300 is used for being contained in a not shown optical plugs remains on precalculated position, object lens 11 fronts of the instrument apparatus of micro-interference shown in Fig. 71, clamping device 300 is kept by tilt adjustment device 100 by clamping device keeper 200, thereby regulates its lateral attitude with respect to micro-interference instrument apparatus 1 by tilt adjustment device 100.Also be provided with a power switch 30 on the header board 3, be used for the power supply of ON/OFF micro-interference instrument apparatus 1.
The structure of tilt adjustment device
Describe tilt adjustment device 100 in detail referring now to Fig. 1 to 6.Fig. 1 is the front view of tilt adjustment device 100 according to an embodiment of the invention.Fig. 2 is a cut-open view of being got along Fig. 1 center line A-A.Fig. 3 is a cut-open view of being got along Fig. 1 center line B-B.Fig. 4 is a cut-open view of being got along Fig. 1 center line C-C.Fig. 5 is a cut-open view of being got along Fig. 1 center line D-D.Fig. 6 is a cut-open view, is used to represent the operation of tilt adjustment device 100.Here, do not have diagram to be used to install the threaded hole of clamping device keeper 200 among Fig. 1, be used to the working hole shown in Fig. 7 of the instrument that inserts when time on the header board 3 that first seat element 110 is fastened to micro-interference instrument apparatus 1, or the like.
As mentioned above, shown tilt adjustment device 100 comprises first and second seat elements 110,120 respect to one another, support first and second seat elements 110,120 and make their relative to each other tiltable support units 130, and be used for regulating parts 140,150 as first and second of fulcrum relative tilt first and second seat elements 110,120 with support unit 130.
As shown in Fig. 2 and 3, support unit 130 comprises first supporting member 131 that is fastened on first seat element 110, be fastened to second supporting member 132 on second seat element 120, and a ball type device 133 that is arranged between first and second supporting members 131,132.
First supporting member 131 is made of following elements: an axle 131a who inserts and be fastened in the hole 111 that is formed in first seat element 110, with one with an axle 131a integrally formed ball bearing parts 131b, and ball bearing parts 131b comprises a ball bearing 131A who is formed for supporting the conical surface of ball type device 133.Second supporting member 132 is made of following elements: an axle 132a who inserts and be fastened in the hole 121 that is formed in second seat element 120, with one with an axle 132a integrally formed ball bearing parts 132b, and ball bearing parts 132b comprises a ball bearing 132A who is formed for supporting the conical surface of ball type device 133.
First and second supporting members 131,132 are arranged to make ball bearing surface 131A, 132A toward each other.Keeping ball type device 133 between ball bearing surface 131A, the 132A, thereby support unit 130 is that fulcrum supports first and second seat elements 110,120 in the tiltable mode with ball type device 133.
First and second regulate parts 140,150 (regulate parts 140 for first and see Fig. 2, regulate parts 150 for second and see Fig. 3 and 4) comprises the adjusting screw(rod) 141,151 that is arranged at second seat element, 120 1 sides; Be arranged at the ball bearing element 142,152 of first seat element, 110 1 sides; Be arranged at the rigidity ball type device 143,153 between ball bearing element 142,152 and the adjusting screw(rod) 141,151; And be used for ball type device 143,153 is remained on and each front end face 141A of adjusting screw(rod) 141,151, the holding element 160,170 of 151A position contacting.
Adjusting screw(rod) 141,151 comprises screw shaft 141a, 151a, and the knob 141b, the 152b that are used for rotary screw axle 141a, 151a, and is connected on second seat element 120 by screw rod lining 144,154 respectively.Screw rod lining 144,154 is screwed in each threaded hole 123,124 that is formed in second seat element 120 and is kept by it, and has threaded hole 144a, 154a with screw shaft 141a, the 151a engagement of adjusting screw(rod) 141,151.That is, adjusting screw(rod) 141,151 rotations are screwed in the screw rod lining 144,154 and by it and keep, thereby can change the length that screw shaft 141a, 151a stretch out from second seat element 120 by rotary knob 141b, 151b.
Ball bearing element 142,152 constitutes by axle 142a, 152a and with integrally formed ball bearing parts 142b, the 152b of axle 142a, 152a, axle 142a, 152a insert in the hole 112,113 that is formed in first seat element 110 and are fastened in it, and ball bearing parts 142b, 152b comprise ball bearing surface 142A, the 152A that is used to support ball type device 133.142A, 152A have configurations differing from one on the ball bearing surface.Promptly, the ball bearing of ball bearing element 142 surface 142A is one and is arranged essentially parallel to the center that connects ball type device 133 in the support unit 130 and regulates the plane of the axis X at the center of ball type device 143 in the parts 140 with first, and the ball bearing of ball bearing element 152 surface 152A forms and has the V-arrangement cross section and along the groove of the axis Y extension at the center of ball type device 143 in the center that connects ball type device 133 in the support unit 130 and the second adjusting parts 150.
Holding element 160,170 is shaped by bending elastic linear element, thereby produce a crank-like cross section, and their end is fastened in second seat element 120 by connecting screw rod 161,171, and this connecting screw rod 161,171 is screwed into and remains in each threaded hole 128,129 that is formed in second seat element 120.The other end of holding element 160,170 is formed with diameter respectively less than the hole 162,172 of ball type device 133,143.Under the state that ball type device 133,143 stretches out from hole 162,172 parts, holding element 160,170 remains on front end face position contacting with adjusting screw(rod) 141,151 with ball type device 133,143, and their self elasticity is pressed against ball type device 133,143 on ball bearing surface 142A, the 152A of ball bearing element 142,152 simultaneously.
As shown in fig. 1, first and second of the structure adjusting parts 140,150 are arranged on the position that 130 axis X of stretching out, Y are separated from each other along orthogonal direction from support unit like this, and can be around axis X, Y first and second seat elements 110,120 that relatively tilt, thereby, regulate the relative tilt of first and second seat elements 110,120 as below describing in detail.
As shown in Fig. 1 and 5, tilt adjustment device 100 also comprises stopping element 190, is used to prevent that first and second seat elements 110,120 from relative to each other shifting their position.As shown in fig. 1, stopping element 190 is arranged on two positions.As shown in Figure 5, an end of each stopping element 190 is screwed in the threaded hole 117 that is formed in second seat element 120 and by it and keeps, and inserts in the hole 127 that is formed in second seat element 120 with a gap around the other end 192.When forceful action was offset them on first and second seat elements 110,120 toward each other, the other end 192 contacted with the interior periphery in hole 127, thereby stopping element 190 has prevented from further to depart from their position.
The operation of tilt adjustment device
Gou Zao the tilt adjustment device tilt adjustment of finishing as described below like this.At first, when swinging second seat element 120 with respect to first seat element 110 around axis X, the adjusting screw(rod) 151 of second regulating element 150 of positioning of rotating on axis Y.In the time of adjusting screw(rod) 151 rotations, front end face 151A and ball type device 153 sliding contacts, thus change the length that screw shaft 151a stretches out from second seat element 120.In this process, ball type device 153 is remained between the front end face 151A of the ball bearing surface 152A of ball bearing element 152 and adjusting screw(rod) 151 by holding element 170.When the extension elongation of the axle 151a of adjusting screw(rod) 151 changes, be bearing in second seat element 120 on the support unit 130 around the axis X swing in the tiltable mode, thereby change its inclinations with respect to first seat element 110 as shown in Figure 6.When first seat element 110 was swung around axis X, ball type device 153 slided slightly along axis Y, and the while contacts with the surperficial 152A of the ball bearing in being formed at the groove with V-arrangement cross section.
When swinging second seat element 120 with respect to first seat element 110 around axis Y, in adjusting screw(rod) 141. adjusting screw(rod)s 141 rotations of second regulating element 140 of positioning of rotating on axis X, front end face 141A and ball type device 143 sliding contacts, thus the length that screw shaft 141a stretches out from second seat element 120 changed.When the extension elongation of axle 141a changed, second seat element 120 was swung around axis Y, thereby changes its inclination with respect to first seat element 110.In this process, when first seat element 110 is swung owing to tilt adjustment and around axis Y, ball type device 143 slides on the 142A of ball bearing surface slightly, is remained between the front end face 141A of ball bearing surface 142A and adjusting screw(rod) 141 by holding element 160 simultaneously.
Front end face forms in the adjusting screw(rod) of convex surface spherical surface in conventional tilt adjustment device, and the axis of adjusting screw(rod) can be departed from the center of convex surface spherical surface.When so eccentric convex surface spherical surface and the ball bearing surface that only allows to slide at predetermined direction (along axis Y) as ball bearing surface rotate adjusting screw(rod) when 152A contacts, can apply a pressure to this ball bearing surface in a direction that is substantially normal to this predetermined direction, make two seat elements can relative to each other be offset their position.
The front end face 151A of adjusting screw(rod) 151 presses ball bearing surface 152A by ball type device 153.The problems referred to above can not take place, because ball type device 153 and adjusting screw(rod) 151 separate construction.Therefore, tilt adjustment device 100 can high precision be finished tilt adjustment, and first and second seat elements 110,120 can relative to each other not be offset.
As mentioned above, tilting gearing 100 is arranged on the header board 3 of micro-interference instrument apparatus 1 as shown in Figure 7, and is configured to keep clamping device 300 by clamping device keeper 200.In the lasso that is kept being contained in by clamping device 300 in the optical plugs, tilt adjustment device 100 is finished tilt adjustment, thereby finishes the tilt adjustment of lasso with high precision.
The structure of clamping device (first embodiment)
Describe referring now to Fig. 8 to 11 pair of clamping device 300.Fig. 8 is the cut-open view according to the loop clamping of the first embodiment of the present invention.Fig. 9 is an one skeleton view.Figure 10 is an one partial front elevation view.Figure 11 is a skeleton view of its part.Here, Fig. 8 represents to keep a state of lasso.
The lasso 420 that shown clamping device 300 is used for being contained in a tube element 410 shown in Fig. 8 remains on a position of object lens 11 fronts of the micro-interference instrument apparatus 1 shown in Fig. 7.
As shown in Fig. 8 and 9, clamping device 300 comprises a base 310 that is essentially annular, a supporting member 320 of making the dish thicker than base 310, converter 330 that can move up and down with respect to supporting member 320 and one are used for the press element 340 of side's compacting converter 330 from it.
As shown in Figure 9, base 310 comprises three threaded holes 311 and an otch that is used to locate 312.Threaded hole 311 receives and is used for clamping device 300 is connected to screw rod (see figure 7) on the clamping device keeper 200, and otch 312 is arranged to, if clamping device 300 is set the register pin (not shown) that is provided with clamping device keeper 200 for and is inserted in the otch 312, then can be with respect to clamping device keeper 200 locating and clamping apparatus 300.A depression 313 is formed on the top of base 310.
Supporting member 320 is integrally formed with base 310, and slightly upwards is being provided with a rectangular window 321 in a position of skew from its core.The front surface of supporting member 320 is provided with a semi-cylindrical canyon 322 with window 321 bottom side adjacency, is provided with first supporting slice 323 that an axis L along clamping device 300 extends forward in depression 322.As shown in Figure 9, the outer periphery of first supporting slice 323 forms a semi-cylindrical surfaces, and its interior periphery forms the groove with V-arrangement cross section.Get along first supporting slice 323 and the position that lasso 420 contacts with each other in the cross section of first supporting slice 323 shown in Fig. 8.
More specifically, as shown in Figure 10, converter 330 can be along the vertically extending axis of guide 334A of the left and right end portions in the window 321 of supporting member 320,334B move up and down respectively.As shown in Figure 11, the wind spring 335 (only illustrating one that wherein is positioned at axis of guide 334B one side) that is used for upwards promoting converter 330 is connected respectively to two axis of guide 334A, 334B, and the spring that is formed with the upper end that is used to keep wind spring 335 on the converter 330 receives depression 336.When press element 340 is not suppressed converter 330, because the elasticity of wind spring 335, second supporting slice 333 of converter 330 is positioned at the clamping off-position that separates with a side of lasso 420, and the opposite side of lasso 420 is by first supporting slice, 323 supportings of supporting member 320.Wind spring 335 can be positioned on the position that is different from axis of guide 334A, 334B.Other flexible member such as rubber also can be used as the device that upwards promotes converter 330.
As shown in Figure 8, press element 340 comprises a screw shaft 341 that meshes with a threaded hole 324, this threaded hole 324 extends to the window 321 that is formed at the supporting member 320 from the bottom surface of the depression 313 that is formed at base 310 tops, diameter is greater than the screw rod base 342 of screw shaft 341, with a rod element 345 with a screw shaft 344, this screw shaft 344 and the threaded hole engagement that is formed in the screw rod base 342.When rod element 345 during around the axis C of screw shaft 341 rotation, press element 340 can be suppressed converter 330 downwards under the spherical front end face of screw shaft 341 and converter 330 contact conditions, thereby overcome wind spring 335 second supporting slice 333 is moved to clip position with the above-mentioned side contacts of lasso 420 from the clamping off-position.
As shown in Figure 8, converter 330 is provided with a pressure receiving sheet 337, and this pressure receiving sheet 337 extends and to stride a sidewall sections of the tube element 410 that is kept by clamping device 330 relative with second supporting slice 333.Press element 340 is arranged to, make a line of action of force (consistent) through its compacting point P (the spherical front end face of screw shaft 341 and the intersection point of pressure receiving sheet 337) pass tube element 410 and intersect, and further pass the zone (zone among Fig. 8 between a S and T) of the lasso 420 that supports by first supporting slice 323 with pressure receiving sheet 337 with above-mentioned axis C.As shown in Figure 9, the rotary area of the rod element 345 of press element 340 is by retainer 314 restrictions, and retainer 314 is made of the left and right sides wall part of the depression 313 at base 310 tops that are formed at clamping device 300.
The operation of clamping device
Gou Zao clamping device 300 keeps optic splice 400 as follows like this.At first, plug 400 presses the front surface of clamping device 300, the leading section of lasso 420 is inserted between second supporting slice 333 of first supporting slice 323 of supporting member 320 of clamping device 300 and converter 330.Rotate the rod element 345 of press element 340 subsequently, make the pressure receiving sheet 337 of front end face compacting converter 330 of the screw shaft 341 of press element 340, thereby second supporting slice 333 of well heater 330 is moved to clip position from the clamping off-position, thereby the leading section of second supporting slice 333 and first supporting slice, 323 maintenance lassos 420.Therefore, plug 400 is kept by clamping device 300 under the axis (not shown) of lasso 420 state consistent with the axis L of clamping device 300.
Under this hold mode, first supporting slice 323 of clamping device 300 and second supporting slice 333 extend to inside from the outside of tube element 410 front ends, simultaneously toward each other.Therefore, first and second supporting slices 323,333 can obtain for the long chuck edge of lasso 420.In addition, the compacting of the spherical front end face of the screw shaft 341 of press element 340 is extended and the pressure receiving sheet 337 of the converter 330 above second supporting slice 333 that dangles.As a result, the line of force of press element 340 passes tube element 410 and intersects with pressure support sheet 337, and further passes lasso 420 zones by 323 supportings of first supporting slice.Therefore, even when converter 330 is pressed element 340 compactings, also can prevent converter 330 reverse (when line of action of force at lasso 420 region exteriors that supported by first supporting slice 323 through out-of-date, along the clockwise direction rotation converter 330 among Fig. 8), thus can keep lasso 420 reliably.
When from clamping device 300, taking out plug 400, in the opposite direction rotate the rod element 345 of press element 340, so that the front end face of screw shaft 341 stops to suppress converter 330, thereby second supporting slice 333 of converter 330 is moved to the clamping off-position, make first supporting slice 323 and second supporting slice 333 stop to keep lasso 420, thereby discharge lasso 420.
The structure of clamping device (second embodiment)
Referring now to Figure 12 the loop clamping according to second embodiment of the invention is described.Figure 12 is the cut-open view according to the loop clamping of second embodiment of the invention.The only explanation and the first embodiment difference below.
Clamping device 300A shown in Figure 12 to be configured in following several respects different with the clamping device 300 of first embodiment.At first, formed pressure receiving sheet 337 is longer than first embodiment, thereby is arranged to make the line of action of force (C is consistent with axis) that passes its application point P to pass the core (zone among Figure 12 between a S and P) in lasso 420 zones of being supported by first supporting slice 323 basically pressure elements 340.But homogenizing is supported the contact condition between first supporting slice 323 and lasso 420 in the zone above-mentioned like this, thereby more stably keeps lasso 420 than the clamping device 300 of first embodiment.
The interior periphery of second supporting slice 333 (with first supporting slice 323 in the face of) be formed with a projection 338 in the position that line of action of force passes, and second supporting slice 333 only a contact point Q in projection 338 intersection point of lasso 420 (front end of projection 338 with) contact with lasso 420.Though second supporting slice 333 of converter 330 is in a side contacts of whole inside circumference and lasso 420, because in fact surface accuracy is difficult to the contact with it equably of whole surface, thereby very likely becomes a contact in first embodiment.In this case, also be difficult to see a position that contact exists.Owing to can grasp the position of the contacts side surfaces of second supporting slice 333 and lasso 420 reliably, can simulate the state that keeps lasso 420 in a second embodiment in advance, and design easily.In addition, because the interior periphery of second supporting slice 333 need not be polished into smooth surface with high precision, it is also made easily.
Though the front is described embodiments of the invention, can makes amendment to the present invention in many ways, and be not limited to the foregoing description.
For example, though first seat element 110 of tilt adjustment device 100 is fastened on the micro-interference instrument apparatus 1, and the adjusting screw(rod) 141,151 that is provided with in second seat element 120 is relative with first seat element 110, can be arranged in the fixing seat element but be in the adjusting screw(rod) that one of them seat element is fixed under the state.
Though holding element 160,170 is made of each element that is separated from each other, an also available discrete component is configured for keeping the holding element of two ball type devices.
Though finish the tilt adjustment to lasso in the above-described embodiments in the optical plugs of tilt adjustment device 100 in micro-interference instrument apparatus 1, tilt adjustment device of the present invention also can be used for finishing the tilt adjustment of other samples such as micro-interference instrument apparatus, other measurement mechanism.
Though the clamping device 300 described in the foregoing description, 300A are used to keep having the lasso 420 of PC polishing front end face, but they also can keep front end face to be polished into lasso perpendicular to the plane of optical axial, and front end face is polished into the lasso on the plane that tilts to intersect with optical axial.This lasso with front end face of the polishing of tilting is formed with character shape at the leading section of plug, thus can from the profile of the plug that keeps lasso find out the inclination front end face directed direction.When keeping such plug with clamping device 300,300A, an adaptation board that is consistent with the front end shape of plug is installed on the front end face of plug and clamping device 300, the 300A.Screw part 325 shown in Fig. 9 (not shown among Figure 10) is provided for installing this adaptation board.
Though the rod element 345 of press element 340 is made of a rigid body in the foregoing description, the part of rod element 345 also can be made of the element of an elastically deformable, thus bending when on rod element 345, applying a predetermined or bigger revolving force.An available wind spring or analog are as such elastically deformable element.
Though converter 330 separates shaping with supporting slice 320 in the above-described embodiments, converter also can be made elastically deformable wholly or in part, thereby can move when elastic deformation, thereby can be with converter and supporting slice monolithic molding.
Though only form a projection 338 in the position that the line of action of force of press element 340 passes at the interior periphery of second supporting slice 333 in a second embodiment, also can around the position that line of force passes, for example form a plurality of this projections symmetrically.
Although lasso 420 remains on its axial component by the zirconia ceramics manufacturing and with single-mode type fiber 430, lasso also can be by other made, and as stainless steel and plastics, and maintained optical fiber also can be the multi-mode type.
Describe in detail as the front, tilt adjustment device of the present invention comprises an adjusting screw(rod), rotatably is screwed among in two seat elements respect to one another and by its maintenance, stretches out a leading section from a seat element towards another seat element; A ball bearing surface is arranged on another seat element, thereby relative with the front end face of adjusting screw(rod); And the rigidity ball type device that between adjusting screw(rod) and ball bearing surface, keeps by a holding element; Thereby the effect below realizing.
That is to say, it can finish tilt adjustment with high precision, and two seat elements can relative to each other not be offset when the rotation adjusting screw(rod), can take place in the adjusting screw(rod) of this convex surface spherical surface of front end face formation in conventional tilt adjustment device, thereby the axis of the misalignment adjusting screw(rod) of convex surface spherical surface.
Because micro-interference instrument apparatus according to the present invention comprises the tilt adjustment device of the present invention with above-mentioned characteristic feature, it can finish tilt adjustment to a small sample with high precision, as is contained in a lasso in the optical plugs.Can measure and analyze this small sample with stable manner like this.
In loop clamping of the present invention, one is used for from first supporting slice of a lasso of one side bearing, and one be arranged to first supporting slice relative to and simultaneously can with lasso opposite side position contacting and a position separating with it between second supporting slice that moves, the outside of this first and second supporting slice along the axis of lasso from the tube element front end extends to inside, and the converter with second supporting slice is provided with a pressure receiving sheet, and the sidewall sections that this pressure receiving sheet is striden tube element is relative with second supporting slice.Press element makes first and second supporting slices keep lasso towards lasso pressing pressure receiving sheet.Thereby the effect below having obtained.
Because first and second supporting slices stretch in the tube element, the length that the front end from tube element can be stretched out is fastening fully than the chuck edge of short lasso.Because the pressure receiving sheet that is formed in the converter is pressed, the pressure active line can pass the cover collar region by the supporting of first supporting slice, thereby can prevent that converter from reversing, can remain on a predetermined attitude reliably with the lasso that certain stability will be contained in the tube element with high precision.
The micro-interference instrument apparatus of the present invention of the clamping device of the present invention with above-mentioned characteristic feature is housed can be reliably will be contained in the precalculated position that lasso in the tube element that constitutes optical plugs remains on the objective system front with high precision and certain stability and with predetermined attitude.Therefore can high-acruracy survey and analysis lasso.
Claims (7)
1. tilt adjustment device, comprise two seat elements respect to one another, a support unit, being used to support above-mentioned two seat elements can relative to each other tilt above-mentioned two seat elements, with adjusting parts, be used for as fulcrum above-mentioned two seat elements relative to each other being tilted with above-mentioned support unit;
Above-mentioned adjusting parts comprise:
An adjusting screw(rod), this adjusting screw(rod) rotatably is screwed among in above-mentioned two seat elements one and by its maintenance, stretch out a leading section from an above-mentioned seat element towards another seat element simultaneously, the leading section of this adjusting screw(rod) forms the convex surface spherical surface;
A ball bearing surface, this ball bearing surface is arranged in another seat element, thereby relative with the front end face of above-mentioned adjusting screw(rod);
One is arranged on the above-mentioned front end face of above-mentioned adjusting screw(rod) and the rigidity ball type device between the above-mentioned ball bearing surface;
A holding element is used for above-mentioned ball type device is remained on a position that contacts with above-mentioned ball bearing surface with above-mentioned front end face;
The above-mentioned screw rod of rotation under above-mentioned ball type device and above-mentioned front end face and above-mentioned ball bearing surface state of contact, thus above-mentioned adjusting screw(rod) changed from the above-mentioned length that seat element stretches out, thus regulate the relative tilt between above-mentioned two seat elements.
2. tilt adjustment device according to claim 1, wherein above-mentioned holding element has a hole, the internal diameter in this hole is less than the diameter of above-mentioned ball type device, and be arranged between above-mentioned front end face and the above-mentioned ball bearing surface, above-mentioned ball type device is stretched out from above-mentioned bore portion, thereby keep above-mentioned ball type device.
3. tilt adjustment device according to claim 1 also comprises a pushing member, is used for towards promoting above-mentioned two seat elements each other.
4. tilt adjustment device according to claim 1, wherein regulate parts and be arranged on each position that the mutually orthogonal directions that extend out from above-mentioned support unit are separated from each other for two, the surperficial plane that contacts with above-mentioned ball type device that forms of the above-mentioned ball bearing of one of them above-mentioned adjusting parts, another above-mentioned ball bearing surface of regulating in parts forms the upwardly extending groove in side that has the V-arrangement cross section and regulate parts and above-mentioned support unit in connection this another.
5. interferometer that is used to observe interference fringe, interference fringe is to obtain by the object light of the phase information of carrying sample and with reference to the interference between the light, the above-mentioned interference instrument apparatus comprises tilt adjustment device according to claim 1, and the power supply in a main casing, control box and interferometer main system, wherein said tilt adjustment device is arranged on the header board that constitutes main casing.
6. interferometer according to claim 5, also comprise a clamping device that is used for above-mentioned sample is remained on a precalculated position, with a clamping device keeper that is used to keep above-mentioned clamping device, above-mentioned clamping device is supported by above-mentioned tilt adjustment device by above-mentioned clamping device keeper, and the lateral attitude of above-mentioned clamping device is regulated by above-mentioned tilt adjustment device.
7. interferometer according to claim 5, wherein the above-mentioned interference instrument apparatus is a micro-interference instrument apparatus.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP167126/2002 | 2002-06-07 | ||
| JP2002167126A JP3938512B2 (en) | 2002-06-07 | 2002-06-07 | Tilt adjustment device and microscopic interferometer device having the same |
| JP2002167731A JP2004012931A (en) | 2002-06-07 | 2002-06-07 | Clamping device of ferrule, and microinterferometer device equipped with the same |
| JP167731/2002 | 2002-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1467477A CN1467477A (en) | 2004-01-14 |
| CN1247954C true CN1247954C (en) | 2006-03-29 |
Family
ID=29714362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031412130A Expired - Fee Related CN1247954C (en) | 2002-06-07 | 2003-06-06 | Tilt adjustment equipment, loop clamping equipment, interferometer for the above equipment |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7173710B2 (en) |
| CN (1) | CN1247954C (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7070338B1 (en) * | 2004-12-31 | 2006-07-04 | Schmidt Terrance J | Method of optically aligning a workholder for connector geometry control and in-line measurement capability and apparatus used therefor |
| GB2435092A (en) * | 2006-02-10 | 2007-08-15 | Taylor Hobson Ltd | Surface measurement instrument with adjustable sample support |
| US7555190B2 (en) * | 2007-09-21 | 2009-06-30 | Fujinon Corporation | Optical fiber ferrule retainer |
| FR3037665B1 (en) * | 2015-06-19 | 2018-11-02 | Data-Pixel | INTERFEROMETRY CONTROL DEVICE |
| US10197746B2 (en) * | 2015-12-18 | 2019-02-05 | US Conec, Ltd | Fiber optic ferrule and a guide pin clamp with field changeable guide pins |
| EP3293554B1 (en) * | 2016-09-13 | 2023-03-15 | Schott Ag | Device and method for aligning a light beam |
| US11602820B2 (en) * | 2018-03-06 | 2023-03-14 | Ntt Advanced Technology Corporation | Optical connector polishing jig |
| JP7299808B2 (en) * | 2019-09-19 | 2023-06-28 | 川崎重工業株式会社 | TILT ADJUSTMENT DEVICE AND ROBOT INCLUDING THE SAME |
| CN112030128A (en) * | 2020-08-21 | 2020-12-04 | 中国科学院西安光学精密机械研究所 | A coating anchor clamps for Sagnac type interferometer subassembly |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1357562A (en) * | 1920-02-05 | 1920-11-02 | Hope John | Ball-bearing screw |
-
2003
- 2003-05-19 US US10/440,359 patent/US7173710B2/en not_active Expired - Fee Related
- 2003-06-06 CN CNB031412130A patent/CN1247954C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1467477A (en) | 2004-01-14 |
| US7173710B2 (en) | 2007-02-06 |
| US20030227634A1 (en) | 2003-12-11 |
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Granted publication date: 20060329 Termination date: 20120606 |