CN1247644A - Pulse power source appts. - Google Patents
Pulse power source appts. Download PDFInfo
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- CN1247644A CN1247644A CN 97181932 CN97181932A CN1247644A CN 1247644 A CN1247644 A CN 1247644A CN 97181932 CN97181932 CN 97181932 CN 97181932 A CN97181932 A CN 97181932A CN 1247644 A CN1247644 A CN 1247644A
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Abstract
A pulse power source apparatus which quickly discharges the charged voltage of a capacitor by closing a switch. First and second serial circuits are connected in series between the output terminals of a DC voltage source. The first serial circuit is composed of a first reactor and a first forward diode and the second serial circuit is composed of a second forward diode and the switch. A third serial circuit composed of the capacitor, a second reactor , and discharge tube and the discharge tube is connected in parallel with the second serial circuit. When the switch is closed, the discharge tube emits light, but the discharged current from the capacitor becomes an oscillating current and a voltage of the opposite polarity to that of the voltage generated at the initial charging time is generated in the capacitor. Since the oscillating voltage is superposed upon the power supply voltage and utilized at the next charging cycle time, an extremely efficient pulse power source apparatus can be obtained.
Description
Technical field
The present invention relates to make for example Pulased power supply unit of the excitation energy generation of copper-vapor laser, excimer laser, carbon dioxide laser isopulse laser.
Background technology
Copper-vapor laser, excimer laser, carbon dioxide laser isopulse laser need provide the discharge tube of excitation energy and make the luminous Pulased power supply unit of this discharge tube it.
Laser illustrates power in case become big, and the electrical power of this Pulased power supply unit is also very big, and its consumed power is also big, therefore is desirable to provide its operating efficiency.
Figure 10 is the existing Pulased power supply unit shown in the Japanese patent laid-open 4-349677 communique for example.In the drawings, 1 provides the AC power of electric power, the 2nd, with AC power 1 as direct voltage source input, that high direct voltage takes place, the 3rd, be connected in parallel in direct voltage source 2 outlet side, store high-tension capacitor, the 4th, the switch that the energy discharge that be connected in capacitor 3, capacitor 3 is stored discharges, the 5th, be series at switch 4, be arranged at the reactor on the discharge path of capacitor 3, the 6th, be arranged at the capacitor between the utmost point of the outlet side of reactor 5 and direct voltage source 2.7 and 8 is supersaturation reactor and peaking (peaking) capacitors that are arranged on the discharge path of capacitor 6.The 9th, the discharge tube that on peaking capacitor, is connected in parallel.The 11st, with the reverse voltage rectification of capacitor 6 two ends generation and the diode of input transformer 10 usefulness, the 12nd, the high-frequency bypass capacitor that is provided with at the outlet side of transformer 10, the 13rd, with the voltage at capacitor 12 two ends as input, the inverter that be output as the input of direct voltage source 2, promptly is connected in parallel with AC power I.
Action to the Pulased power supply unit of Figure 10 is illustrated according to the sequential chart of Figure 11 below.
At first, utilization provides the direct voltage source 2 of electric power to carry out high-voltage charge to capacitor 3 by AC power 1.Then, in a single day connect at time t1 switch, the electric charge of capacitor 3 is via reactor 5 discharges, and capacitor 6 charges rapidly.The charging of peaking capacitor 8 is subjected to the prevention of saturable reactor 7 in this charging process, but saturated at time t2 saturable reactor 7 in the near future, circuit inductance significantly reduces, so capacitor 6 discharges begin from capacitor 6 to peaking capacitor 8 chargings.In a single day the voltage of peaking capacitor 8 reaches setting at time t3, discharge tube promptly discharges, becomes Low ESR, peaking capacitor 8 discharges.Switch 4 is roughly disconnection in 0 o'clock at the voltage of capacitor 3.Pulse takes place repeatedly to carry out above-mentioned action repeatedly.
In above-mentioned action, the electric current that flows to capacitor 6, peaking capacitor 8, discharge tube 9 is that the electric current that resonance phenomena that capacitance and the circuit inductance by capacitor causes produces provides, the capacitor of back level is done more for a short time, with this its resonance frequency is slowly raise (in a word, along with the time width of pulse narrows down, crest voltage is raise), last, the current spikes that flows to discharge tube 9 becomes big.
Such circuit is called (being called narrowing circuit later on) such as magnetic compression circuit, narrowing circuits.In this narrowing circuit, when the level capacitor shifts backward from preceding stage capacitor with energy, owing to utilize oscillation phenomenon like this, if circuit constant is improper, when the impedance discharge of each circuit does not match, the discharge back has voltage residual at capacitor 6 and peaking capacitor 8, so the residual little problem of trying one's best of wanting to make this energy is always arranged.Therefore the ratio of the capacitance of level capacitors is 1: 0.7～1 situation before and after disclosing in Japanese patent laid-open 4-200281 communique for example.
In the situation of Figure 10, after making diode 11 conductings, the voltage of the opposite polarity that takes place at the two ends of capacitor 6 owing to vibrate (resonance) phenomenon is added on the input terminal of transformer 10.So, electric current flows by diode 11, transformer 10 from capacitor 6 or peaking capacitor 8, to capacitor 12 chargings of the outlet side that is connected in transformer 10, the energy that does not disappear because of the resistance composition in the circuit in resonance phenomena is stored in capacitor 12.The energy of storage is transformed to alternating voltage by inverter 13 in the capacitor 12, is utilized again as the input of direct voltage source 2.
In the mode via aforesaid alternating current circuit recuperated energy, exist in the big problem of ac-dc conversion stage energy loss.
Therefore, as the 2nd background technology shown in Japanese patent laid-open 9-148657 communique, be that saturation transformer (saturable reactor 7 that is equivalent to Figure 10) in DC circuit is provided with the secondary winding coil, the energy regeneration circuit by being connected in this secondary winding coil is at the device of the DC side recuperated energy of direct voltage source 2.
Therefore not existing Pulased power supply unit has aforesaid structure, and the reuse of used up unnecessary electric power is undertaken by alternating current equipments such as transformer, inverters in discharge tube, and therefore device is big, cost is high.And to exchange input side reuse electric power, then the output capacity of direct voltage source causes maximizing owing to needing to contain this dump power, owing to will carry out reuse by plurality of devices such as direct voltage source, transformer, inverters, power consumption takes place in circuit, just exists the problem that is difficult to raise the efficiency.
Again, the reuse energy is to regenerate at the direct current outlet side of direct voltage source in the 2nd background technology, therefore though do not take place on the efficient that causes by alternating current circuit recited above, loss economically, but, exist the problem that loss is big, efficient is not high owing to be the device that makes the electric current reuse that flows into the supersaturation reactor by the secondary winding coil.
The present invention makes in order to eliminate aforesaid problem, its purpose is, for voltage energy residual in the capacitor of DC circuit, can not use alternating current equipments such as inverter and transformer, and only carry out high efficiency electric power reuse, and not need to use the secondary winding coil of reactor at the outlet side of direct voltage source, reduce the output capacity of DC power supply, improve the efficient of Pulased power supply unit, make its miniaturization, reduce its price.
Again, its purpose also is, has used the pulse duration compressor circuit in the Pulased power supply unit according to the above-mentioned purpose invention, under the further situation about raising of the voltage of the pulse that takes place, shows more suitably circuit constant range of choice.
Summary of the invention
Pulased power supply unit of the present invention is to comprise direct voltage source and be connected in series in the 1st and the 2nd series circuit between positive-negative output end of this direct voltage source, described the 1st series circuit is the series circuit of the 1st reactor and the 1st forward diode, described the 2nd series circuit is the Pulased power supply unit of the series circuit of the 2nd forward diode and switch formation, at described the 2nd series circuit the 3rd series circuit that is connected in parallel, described the 3rd series electrical routing capacitor and the 2nd reactor and discharge tube are connected in series and form.The electric current that the oscillatory that capacitor and the 2nd reactor cause flows makes the voltage of residual opposite polarity on the capacitor, make this voltage and supply voltage overlapping, when charging, be used next time.
Again, Pulased power supply unit of the present invention is the device that the 2nd series circuit that the 2nd forward diode and switch constitute has the supersaturation reactor that is connected in series.The supersaturation reactor prevents reverse direction current flow during diode recovery.
Again, Pulased power supply unit of the present invention is the device that the 2nd forward diode has the resistance that is connected in parallel.Resistance shortens the recovery time of the 2nd forward diode.
Again, Pulased power supply unit of the present invention constitutes the order of connection of described each series circuit inside in the following manner, promptly be connected the 1st forward diode, the 2nd forward diode and capacitor on the tie point of the 1st series circuit, the 2nd series circuit and the 3rd series circuit, and the 3 terminal T shape circuit that described the 1st forward diode, described the 2nd forward diode and described capacitor constitute are to be made of a plurality of being connected in parallel of 3 terminal T shape circuit that 2 diodes and capacitor constitute.Utilize a plurality of 3 terminal T shape circuit, can make the balance of electric current better.
Again, Pulased power supply unit of the present invention, the 2nd series circuit that the 2nd forward diode and switch the constitute a plurality of formations that are connected in series of assembly that to be the diode that is connected in series constitute with semiconductor switch device.
Again, Pulased power supply unit of the present invention is, the assembly that constitutes the 2nd forward diode that is connected in series of the 2nd series circuit and semiconductor device is arranged in parallel the device that surge voltage that the series circuit of capacitor and resistance constitutes suppresses means.
Again, Pulased power supply unit of the present invention is to comprise direct voltage source and be connected in series in the 1st and the 2nd series circuit between positive-negative output end of this direct voltage source, described the 1st series circuit is the series circuit of the 1st reactor and the 1st forward diode, described the 2nd series circuit is the Pulased power supply unit of the series circuit of the 2nd forward diode and switch formation, be to be arranged in parallel the 1st supersaturation reactor at described the 2nd series circuit, the series circuit of the 1st capacitor and the 2nd capacitor, and described the 2nd capacitor is arranged in parallel the narrowing circuit of the 2nd saturable reactor and the 3rd capacitor formation, and described the 3rd capacitor of this narrowing circuit is arranged in parallel the device of discharge tube.
Again, Pulased power supply unit of the present invention is compared the capacitance of the 2nd capacitor with the capacitance of the 1st capacitor, or the capacitance of the 3rd capacitor is compared with the capacitance of the 2nd capacitor, and ratio is more than 0.25, below 0.75.Adopt such capacitance ratio, can improve voltage effectively.
Summary of drawings
Fig. 1 is the circuit diagram of the Pulased power supply unit of the present invention the 1st embodiment.
Fig. 2 is the sequential chart of action of the circuit of key diagram 1.
Fig. 3 is the circuit diagram of the Pulased power supply unit of the present invention the 2nd embodiment.
Fig. 4 is the circuit diagram of the Pulased power supply unit of the present invention the 3rd embodiment.
Fig. 5 is the circuit diagram of the Pulased power supply unit of the present invention the 4th embodiment.
Fig. 6 is the circuit diagram of the Pulased power supply unit of the present invention the 5th embodiment.
Fig. 7 is the circuit diagram of the Pulased power supply unit of the present invention the 6th embodiment.
Fig. 8 is the circuit diagram of the Pulased power supply unit of the present invention the 7th embodiment.
Fig. 9 is the relation curve that is used for the capacitance ratio of circuit of key diagram 8 and step-up ratio etc.
Figure 10 is the circuit diagram of existing Pulased power supply unit.
Figure 11 is the sequential chart that is used to illustrate the action of Figure 10.
Best example of the present invention
According to Fig. 1 and Fig. 2 the embodiment of the invention 1 is illustrated below.
Fig. 1 is the circuit diagram of the Pulased power supply unit of the embodiment of the invention 1.In the figure, 1 provides the AC power of electric power, the 2nd, as input the direct voltage source of high direct voltage takes place with AC power 1, the 14th, be connected in the 1st reactor of the direct current outlet side of direct voltage source, the 15th, be connected in series in the 1st forward diode of the 1st reactor according to forward.The 1st reactor and the 1st forward diode constitute the 1st series circuit 51.
The 16th, forward is connected in series in the 2nd forward diode on the 1st forward diode, and the 24th, be connected in series on the 2nd forward diode 16, the other end is connected in the switch on the direct voltage source 2.The 2nd forward diode 16 constitutes the 2nd series circuit 52 with switch 24.
The 23rd, be connected in the capacitor on the tie point of the 1st forward diode 15 and the 2nd forward diode 16.The 25th, be connected in series in the 2nd reactor of capacitor 23, the 9th, be connected in series in the 2nd reactor 25, the other end is connected in the discharge tube of direct voltage source 2.Charging reactor LG is being connected in parallel on the discharge tube 9.Capacitor 23 and the 2nd reactor 25 and discharge tube 9 constitute the 3rd series circuit 53.
Utilize sequential chart Fig. 2 that the action of the circuit of Fig. 1 is illustrated below.
For the convenience that illustrates, time of Fig. 2 is divided into pattern 1～pattern 5 describes.The longitudinal axis of Fig. 2 is represented the voltage waveform of capacitor 23, the current waveform of switch 24, the current waveform of the 1st reactor 14, the current waveform of discharge tube 9, and the state of the 1st forward diode 15, the state of the 2nd forward diode 16, the open and-shut mode of switch 24.
Again, according to extremely low the describing of discharge tube 9 impedance when discharging.
In case provide voltage by AC power 1, electric current promptly by the path flow of the 1st reactor the 14, the 1st forward diode 15, capacitor the 23, the 2nd reactor 25, charging reactor LG, carries out the charging of 3V voltage to capacitor.Its polarity is positive pole with a side that is connected with the 1st forward diode 15.
In the stage that capacitor 23 fully charges, in case switch 24 is connected, the electric charge of capacitor 23 is promptly via the 2nd series circuit 52 and 53 discharges of the 3rd series circuit.Promptly discharge with the path of the 2nd forward diode 16, switch 24, discharge tube the 9, the 2nd reactor 25.
This circuit is the series connection oscillating circuit of L, C, R, therefore, is satisfying under the situation of following formula, as is generally known electric current has become oscillating current.
R＜2·(L/C)
1/2
Wherein, C is the electrostatic capacitance amount of capacitor 23, and L is the inductance value of the 2nd reactor 25, and R is the resistance value of discharge tube 9 when discharge.
That is it is also intact with energy consumption to drop to 0 back discharge tube 9 at the voltage of capacitor 23, and electric current continues to flow, soon, and the i.e. voltage VR charging of opposite polarity with charging time of capacitor 23.
Electric current such as Fig. 2 of flowing into switch 24 lose, and roughly become sinusoidal wave half-wave at peak I P, and the voltage of capacitor 23 polarity when charging is opposite.
Mode 3
Then, because the effect of the voltage of the reversed polarity of capacitor 23, at discharge tube 9 reverse current flows is arranged, but owing to exist the 2nd forward diode 16, electric current with the path of the 3rd series circuit 53, direct voltage source the 2, the 1st series circuit 51, be the path discharge of capacitor the 23, the 2nd reactor 25, discharge tube 9, direct voltage source the 2, the 1st reactor the 14, the 1st forward diode 15.
Resistance in the described path of the impedance ratio of the 1st reactor 14 is big to be got under the abundant situation, under vibration condition roughly by the inductance value decision of the electrostatic capacitance amount of capacitor 23 and the 1st reactor 14, the reverse voltage of capacitor 23 reduces, and on the other hand, continue to increase at electric current, the voltage of capacitor 23 is 0 the moment, and the electric current that flows into the 1st reactor 14 reaches maximum I1.
At this moment, the electrostatic energy of storing in the capacitor 23 all is transformed to the electromagnetic energy of the 1st reactor 14.
In case the reverse voltage of capacitor 23 drops to 0, the 2 forward diode 16 conducting once again, therefore the electric current that is flowing up to now flows on the path of the 1st reactor the 14, the 1st forward diode the 15, the 2nd forward diode 16, switch 24.This electric current is owing to the voltage with direct voltage source 2 is power supply, so become the dull electric current that increases.
Then, force switch 24 is cut off when the electric current of reactor 14 is increased to setting I2, then along with electric current transfers to reduce, the two ends of the 1st reactor 14 produce voltage.On this voltage, the superpose resulting voltage of voltage of direct voltage source 2 of utilization, the electric current initialization of the 1st reactor 14 will be flowed into, electric current flows to capacitor 23 1 sides from the 1st reactor 14, and capacitor 23 charges, boosts to the above voltage of output voltage of direct voltage source 2.
The electric current that this action proceeds to the 1st reactor 14 becomes the 0, the 1st forward diode 15 end till.In case the 1st forward diode 15 is ended, the action of capacitor 23 chargings is finished, i.e. the state of backtrack mode 1.V3 was a certain value when just I2 was certain value, but the time that big more reactor 14 electric currents of I1 increase (time that the output current of direct voltage source 2 increases) is short more, and the output capacity of direct voltage source 2 is also smaller just much of that.
Carry out action recited above repeatedly, then after the electrostatic energy that connection switch 24 is stored capacitor 23 offers discharge tube 9, the energy that does not run out of is after temporarily being stored in capacitor 23 with opposite polarity, make it be transformed to the electromagnetic energy of the 1st reactor 14, follow cut-off switch 24, with this this electromagnetic energy is transformed to voltage, when implementing charging, can be superimposed on the voltage of direct voltage source 2 next time and utilizes once more.
Adopt this Pulased power supply unit, produce by the oscillating current in loop, reversed polarity remains in the direct current outlet side that voltage on the capacitor is overlapped in direct voltage source, when charging next time, capacitor utilizes once more, therefore alternating current equipments such as transformer, inverter are not passed through in the reuse of the excrescent electric power that is not consumed on discharge tube, and carry out in DC circuit.Thereby the output capacity of direct voltage source (peak value) can be got littler than the energy of capacitor stores, can raise the efficiency, the miniaturization of implement device, reduce cost.
In the above description, the order of connection of each circuit element of the inside of the 1st series circuit the 51, the 2nd series circuit the 52, the 3rd series circuit 53 is not as shown in Figure 1 can certainly.It not is other loads (but must satisfy above-mentioned impedance conditions) replacement of discharge tube that discharge tube 9 also can use.
Use Fig. 3 that the Pulased power supply unit of the embodiment of the invention 2 is described below.In Fig. 3, the 17th, series connection insert the 2nd series circuit 52, i.e. series connection inserts the supersaturation reactor of 16 of switch 24 and the 2nd forward diode.Also have, in following accompanying drawing, be marked with the parts of the parts same-sign of Fig. 1 and represent the parts identical or suitable, therefore omit its detailed description with it.
In the pattern 2 of embodiment 1 narration, connect after the switch 24, electric current will flow through the loop that is formed by current capacitor the 23, the 2nd forward diode 16, supersaturation reactor 17, switch 24, discharge tube the 9, the 2nd reactor 25, but because supersaturation reactor 17 forms high impedance, therefore on supersaturation reactor 17, still apply voltage, stoped flowing of electric current.
Thereafter, in case the voltage time long-pending time of supersaturation reactor 17 through reaching capacity, supersaturation reactor 17 is owing to the saturated phenomenon of magnetic characteristic becomes low impedance state, therefore the positive direction of the 2nd forward diode 16 has half-sinusoid shape electric current to flow after, the same with the pattern 2 of embodiment 1, capacitor 23 charges with opposite polarity.
Electric current is 0 o'clock, because this reverse voltage, the 2nd forward diode 16 is ended, and described half-sinusoid shape current impulse time width is very short, when having only hundreds of ns, the 2nd forward diode 16 must be the diode that its recovery characteristics is exceedingly fast.Even but the diode of the excellent that use usually can be in one's hands, under the big situation of the rising of restoring current, the electrostatic energy of the reverse voltage of capacitor 23 can not keep fully, and the situation that charge stored is discharged as the restoring current of diode quickly fully takes place.If but insert supersaturation reactor 17, even then for reverse current, in the saturated time, also demonstrate high impedance, can prevent that electric current from taking place to flow.
That is, saturated supersaturation reactor 17 afterwards uprises with respect to its impedance of reverse current owing to the forward current of the 2nd forward diode 16, the electric charge that sharply leaks when diode 16 recovers is suppressed, the reverse voltage time of capacitor 23 is long-pending reach above-mentioned level before, utilize the leakage current of supersaturation reactor 17 when high impedance that the 2nd forward diode 16 is ended.
Utilize to insert supersaturation reactor 17 as mentioned above, can irrespectively, roughly keep the reverse voltage of capacitor 23 fully with the quality of the recovery characteristics of the 2nd forward diode 16.Also not influence of action to energy recuperation illustrated among the embodiment 1.
The present invention does not use the secondary winding of reactor when making regenerated energy regeneration owing to the direct current outlet side at direct voltage source, so can further raise the efficiency.
Embodiment 3
Utilize Fig. 4 that the Pulased power supply unit of the embodiment of the invention 3 is illustrated below.18 is the resistance that is connected in parallel with the 2nd forward diode 16 in Fig. 4.Also have, though do not put down in writing charging reactor LG for illustrated convenience in the following description, use same as in figure 1.
For than more reliable in Fig. 3 of embodiment 2, quickly the 2nd forward diode 16 is ended, while when supersaturation reactor 17 high impedances, utilize the recovery electric charge of 18 pairs of diodes 16 of resistance to limit to make it to flow.
Stop with supersaturation reactor 17 capacitors 23 opposite polarity electric charge fast, emit in large quantities, on the other hand, by means of except the leakage current of supersaturation reactor, making converse at diode 16 of the electric current that is subjected to resistance limits, make diode 16 as soon as possible, end more reliably to flowing.
Utilize Fig. 5 that the Pulased power supply unit of the present invention the 4th embodiment is illustrated below.
Loop voltage, electric current that the circuit of Fig. 5 is represented to be added on the discharge tube are big, are necessary the situation that is connected in series and constitutes with a plurality of diodes.
The 1st forward diode 15 of the circuit of Fig. 1 of embodiment 1 and the 2nd forward diode 16 and capacitor 23 constitute 3 terminal T shape loops.In Fig. 5, this 3 terminal T shape loop uses the diode of connecting/being connected in parallel to constitute.
In Fig. 5,15a1,15a2 are the diodes that multistage (just expressing 2 grades in the drawings) is connected in series, and 16a1,16a2 are the diode that plural serial stage connects equally, and all the 1st forward diode 15 with Fig. 1 of embodiment 1 is suitable with the 2nd forward diode 16.
15b1,15b2,16b1,16b2 are the diode of multistage connection too.
15c1,15c2,16c1,16c2 are the diode of multistage connection too.
Also have, 23a, 23b, 23c have a terminal to link to each other with each diode tie point of 16a1,15b2 and 16b1,15c2 and 16c1 with 15a2 respectively, are connected in the capacitor of the 2nd reactor 25 after another terminal is connected in parallel.Forward diode and capacitor constitute 3 terminal T shape loops 55.
To capacitor 23a, 23b, 23c respectively from each diode 15a1 and 15a2, diode 15b1 and 15b2, and the forward of diode 15c1 and 15c2 charge, connect switch 24, by diode 16a1 and 16a2, diode 16b1 and 16b2, and diode 16c1 and 16c2 make each capacitor 23a, 23b, 23c discharge.
In Fig. 5, the number that diode is connected in series is 4, and the number that is connected in parallel is got the capacitor that 3 correspondences will discharge and recharge usefulness and is split up into 3 parts, the many more easy more even shuntings that obtain electric current of the number that is connected in series of diode.
Constitute the loop like this, not only can handle high voltages, big electric current, and in the compact structure of can be shown in embodiment 7 diode section, capacitor part all being packed into.
Utilize Fig. 6 that the Pulased power supply unit of the embodiment of the invention 5 is illustrated below.
In Fig. 6,24a1,24a2,24a3,24b1,24b2,24b3,24c1,24c2,24c3 are the switches that is made of semiconductor device.
And 16a1,16a2,16a3,16b1,16b2,16b3,16c1,16c2,16c3 are the diodes that is connected in series on each semiconductor device.
A plurality of again being connected in parallel constitutes under the situation of switch means after the semiconductor device plural serial stage is connected, and corresponding with each semiconductor device, diode thereon is connected in series respectively.
Even when the switch means are cut off, also half and half conductor device 16a1～16c3 all by the time, the charging voltage of capacitor 23 is shared by the semiconductor device of each series-connected stage.
Thereafter, in case make each semiconductor device 16a1～16c3 conducting simultaneously, then the discharging current of capacitor 23 roughly evenly flows in each and joint group.
In case capacitor is used when the voltage of opposite polarity charges when charging, even each semiconductor device keeps original conducting situation, also owing on each diode, be added with reverse biased, each diode ends, the reverse charging voltage of capacitor 23 is held, and maintains the reverse biased of approximate equality dividing potential drop on each diode.
Constitute the loop like this, not only can handle high voltages, big electric current, and can diode section, capacitor part all be packed in the compact structure as embodiment 7 is illustrated.
Embodiment 6
Utilize Fig. 7 that the Pulased power supply unit of the embodiment of the invention 6 is illustrated below.
In Fig. 7,24a, 24b, 24c are the switches that is made of semiconductor device.And 16a, 16b, 16c are the diodes that is connected in series on each semiconductor device 24a, 24b, the 24c, and the diode that semiconductor device is connected with series connection with it constitutes one group.
19a and 20a, 19b and 20b, and 19c and 20c be capacitor and resistance, constitute buffer circuit (snubber), be surge absorber.
For one group semiconductor device and diode, additional buffer circuit that constitutes by capacitor and resistance.
For example diode 16a and semiconductor device 24a are connected in series, and the circuit that capacitor 19a and resistance 20a are connected in series is connected in anode one side of diode 16a, and a terminal of resistance is connected in semiconductor device 24a.
When capacitor 23 chargings, capacitor 19a is also by resistance 20a charging.
Capacitor 19b, 19c are also identical.
That is to say, when capacitor 23 chargings, make the voltage homogenizing that is added in semiconductor device 24a～24c by capacitor 19a～19c, suppress the situation generation that voltage sharply rises simultaneously.
Make semiconductor device 24a～24c conducting simultaneously, after capacitor 23 discharge, in case capacitor 23 is charged by opposite polarity with charging the time, diode 16a～16c ends, and is carried out voltage in the reverse bias direction.Because capacitor 19a～19c is with the direction charging opposite with above-mentioned action, it is impartial that the voltage that applies on diode 16a～16c keeps, and rapid voltage risen suppressed simultaneously.
For one group of semiconductor device and diode; additional surge suppresses the buffer circuit that means, for example capacitor and resistance constitute; semiconductor device with this during to forward voltage in addition and in addition the diode during reverse voltage carry out overvoltage protection, make the voltage homogenizing of sharing.
Embodiment 7
In the Pulased power supply unit of described each embodiment, also can use the illustrated narrowing circuit of Figure 10 of background technology in the above.Such narrowing circuit is used in situation of the present invention is shown in Fig. 8.
In Fig. 8, the 17th, be connected in series in the 1st supersaturation reactor of capacitor 23, the 26th, be connected in the 2nd capacitor of the back level of capacitor 23,27 is the 2nd supersaturation reactors, 28 is the 3rd capacitors.
The 2nd supersaturation reactor 27 and the 3rd capacitor 28 are connected in series, and form the discharge loop of the 2nd capacitor 26.
The discharge tube 9 that is connected in parallel on the 3rd capacitor 28, the charging reactor LG that also the is connected in parallel bypass path during as charging.
Connect at switch 24, in the big moment of the electrorheological of reactor 14 switch 24 is ended, then the induced voltage of the voltage of direct voltage source 2 and reactor 14 two ends generation is charged to high voltage with capacitor 23.
Then, in case switch 24 conductings, capacitor 23 promptly discharges, and the 2nd capacitor 26 i.e. charging rapidly.In this charging process, the 2nd supersaturation reactor 27 has stoped the charging to the 3rd capacitor 28, but the 2nd supersaturation reactor 27 reaches capacity soon, and its impedance sharply reduces, so 26 discharges of the 2nd capacitor begin from the 2nd capacitor 26 to 28 chargings of the 3rd capacitor.
In a single day the voltage of the 3rd capacitor 28 reach setting, and discharge tube 9 promptly discharges, the impedance step-down, 28 discharges of the 3rd capacitor.Therefore, electric current flows to discharge tube 9, and electric power is supplied.The charging current that flows to the 2nd capacitor the 26, the 3rd capacitor 28 in above-mentioned action is provided by the electric current that the capacitance and the oscillatory occurences that resistance value determined in the loop of each capacitor causes.The ratio of the electrostatic capacitance amount of the 26, the 3rd capacitor 28 of capacitor the 23, the 2nd capacitor is designated as C3: C6: C8, and the loop loss is ignored, and the theoretic stable state charging voltage of each capacitor is designated as V3, V6, V8, then has following relation:
V6＝V3×2/(1+C6/C3)
V8＝V6×2/(1+C8/C6)
For example, at C3: C6: C8=4: under 2: 1 the situation, V8=1.33 * V6=1.33 * 1.33 * V3=1.77 * V3
The charging voltage of each capacitor along with from prime to back level move and voltage rises step by step, each level rises 1.33 times.Here, the capacitance of capacitor reduces down, so the frequency of oscillation change is big, and voltage, current waveform become precipitous.On the other hand, remaining voltage in capacitor 23 and the 2nd capacitor 26 is designated as V3 ' and V6 ', then V3 ' and V6 ' are expressed from the next:
V3’＝V3×(1-C6/C3)/(1+C6/C3)
V6’＝V6×(1-C8/C6)/(1+C8/C6)
For example at C3: C6: C8=4: under 2: 1 the situation,
V3’＝0.33×V3
V6’＝0.33×V6
1/3 voltage in other words, just 1/9 electrostatic energy remains in respectively in capacitor 23 and the capacitor 26.Owing to utilize oscillatory occurences like this, after 28 discharges of the 3rd capacitor, do not taken place at for example the 3rd capacitor 28 again as reverse voltage by the used up energy of resistance composition of discharge tube, make an addition on the above-mentioned residual energy.
This electrostatic energy major part in closed-loop path that the 3rd capacitor the 28, the 2nd saturable reactor 27, capacitor the 23, the 1st saturable reactor 17 the 2nd forward diode 16 and switch 24 form along the forward discharge of forward diode 16, capacitor 23 opposite polarity charging with the time with charging.
The remaining energy of capacitor 23 in closed-loop path that capacitor the 23, the 1st supersaturation reactor the 17, the 2nd forward diode 16, switch 24, the discharge tube 9 that is in low impedance state and the 2nd supersaturation reactor 27 form along the forward discharge of forward diode 16, capacitor 23 opposite polarity charging with the time with charging.
The remaining energy of the 2nd capacitor 26 at the 2nd capacitor 26, be in the closed-loop path that discharge tube the 9, the 1st saturable reactor 17 of low impedance state forms and cause that electric current flows, the charging voltage of the 2nd capacitor 26 is reverse, after changeabout polarity is stored, in closed-loop path that the 2nd capacitor 26, capacitor the 23, the 1st saturable reactor the 17, the 2nd forward diode 16, switch 24 forms along the forward discharge of forward diode 16, capacitor 23 opposite polarity charging with the time with charging.
As mentioned above, cause the electric current of the forward flow of the 2nd forward diode 16 at the remaining electrostatic energy of each capacitor on the path by the 2nd forward diode 16, switch 24, most energy is to capacitor 23 opposite polarity charging when charging with the initial stage.All along the 1st supersaturation reactor 17 and the 2nd supersaturation reactor 27 saturated directions are flowed, reverse current is stoped by high impedance these operating currents.Again, the path by discharge tube 9 is that Low ESR is a prerequisite with discharge tube 9, but under the situation that is in the state that impedance component can not ignore, and electric current flows as bypass with the charging reactor LG that is connected in parallel with discharge tube 9.
Thereafter, supersaturation reactor 17 and 27 reverse voltages by capacitor 23 cause oppositely saturated before, the reverse voltage of capacitor 23 becomes the reverse bias power supply of diode 16, the 2nd forward diode 16 is ended.
Thereby, electric current flows in the closed-loop path that capacitor the 23, the 2nd supersaturation reactor 27, discharge tube 9, direct voltage source 2, reactor the 14, the 1st forward diode 15 and the 1st supersaturation reactor 17 form, when the reverse voltage of capacitor 23 is zero, the electric current of reactor 14 reaches maximum, and remaining electrostatic energy is transformed to the electromagnetic energy of reactor 14 in each capacitor.
In a single day the reverse voltage of capacitor 23 disappears, and the 2nd forward diode 16 is conducting, and by keeping the switch 24 of conducting, the electric current of increase flows through direct voltage source 2, and the electromagnetic energy of reactor 14 further increases.
In case reach moment of setting at this electric current, switch 24 ends, electric current that then will this moment carries out once more repeatedly as the charging action of the capacitor 23 of initial value.
Adopt aforesaid action, the load of the pulse power by the narrowing circuit that combines by capacitor and supersaturation reactor under the situation of discharge tube power supply, can reclaim remaining energy.
Therefore, for example under the situation of 2 grades of compressions, the ratio of the 1st, the 2nd, the 3rd capacitor just is not necessary that very much the energy remaining quantity to reduce capacitor is that main target determines.
In a word, can mainly be conceived to boosted voltage, therefore the capacitance decision back level capacitance with respect to each preceding stage capacitor can make the charging voltage of for example elementary capacitor be lower than in the past, and the desired withstand voltage properties of switch is reduced greatly.
Below above-mentioned main points are further described quantitatively.Represent voltage rising ratio (voltage boost ratio) with V6/V3=K from capacitor 23 to the 2nd capacitors 26, P=(V3 '/V3)
2The remaining energy incidence of expression capacitor 23, C6/C3=α represents the capacitance ratio, then has the relation shown in the following formula:
K＝2/(1+α)
P＝((1-α)/(1+α))
2
During the rising of consideration from C3 to C6 voltage, α can select in the scope of 0＜α＜1, and α is little, can access big voltage rising ratio, and it is big that remaining energy becomes on the contrary.α becomes greatly then remaining energy and tails off, and voltage rising ratio α diminishes.
Again, for C6 being provided identical electric power, capacitor 23 required input powers are provided by 1/ (1-P) than W, and wherein, a some W gets 1 in α=1.
Voltage rising ratio K, energy residual rate P, input power with respect to the α value under the situation that does not have the loop loss are shown in table 1 than the numerical value of W.
Table 1
| Capacitance than α 0.125 0.250 0.500 0.625 0.750 0.875 1.000 voltage rising ratio K 1.778 1.600 1.333 1.231 1.143 1.067 1.000 energy remnant rate P 0.605 0.360 0.111 0.053 0.020 0.004 0.000 input power than W 2.531 1.563 1.125 1.056 1.021 1.004 1.000 |
This result with curve representation as shown in Figure 9.
The above results shows, if the α value, then can obtain bigger voltage rising ratio K less than 0.25, but input power is than sharply increasing.This electrostatic capacitance amount that will cause capacitor 23 increases considerably, and causes the increasing considerably of current capacity of switch 24.But owing to most of electric power can both reclaim, so no longer need unnecessary electric power.
Again, consider that side circuit loss has several percentage points at least, deduct this part from voltage rising ratio K after, if the α value is bigger than 0.75, then almost can not get the effect of boosting.
Therefore, make selected α value in the scope more than 0.25, below 0.75, or (by means of the known technologies such as coiling of overstriking reactor) is below 0.625 in the time circuitous resistance can being designed to lower numerical value, or under opposite situation, be below 0.875, can be boosted effect significantly with this and do not caused the increase with capacitance of increasing considerably of electric current.
According to identical principle, obvious 8 boost too from capacitor 6 to capacitor.
Adopt the present invention, when using the pulse duration compressor circuit that the voltage of the pulse of generation is risen, prime is set at 0.25～0.75 with the capacitance ratio of the capacitor of next stage, even, also can access big voltage rising ratio so the size of the capacitance of capacitor, the electric current that flows through does not increase significantly.
Industrial applicability
Pulased power supply unit involved in the present invention, as the excitation power source of laser to the device of discharge tube as load Be illustrated, but also can be as such as the drive source of xenon lamp photophore, X-ray tube etc., can also as from High-tension inverter power supply takes place in the direct voltage source of low-voltage expeditiously.
Claims (8)
1. Pulased power supply unit, comprise direct voltage source and be connected in series in the 1st and the 2nd series circuit between positive-negative output end of this direct voltage source, described the 1st series circuit is the series circuit of the 1st reactor and the 1st forward diode, described the 2nd series circuit is the series circuit that the 2nd forward diode and switch constitute, it is characterized in that
At described the 2nd series circuit the 3rd series circuit that is connected in parallel, described the 3rd series electrical routing capacitor and the 2nd reactor and discharge tube are connected in series and form.
2. Pulased power supply unit according to claim 1 is characterized in that, the 2nd series circuit that the 2nd forward diode and switch constitute has the supersaturation reactor that is connected in series.
3. Pulased power supply unit according to claim 2 is characterized in that the 2nd forward diode has the resistance that is connected in parallel.
4. Pulased power supply unit according to claim 1, it is characterized in that, constitute the order of connection of described each series circuit inside in the following manner, promptly be connected the 1st forward diode, the 2nd forward diode and capacitor on the tie point of the 1st series circuit, the 2nd series circuit and the 3rd series circuit, and the 3 terminal T shape circuit that described the 1st forward diode, described the 2nd forward diode and described capacitor constitute are to be made of a plurality of being connected in parallel of 3 terminal T shape circuit that 2 diodes and capacitor constitute.
5. Pulased power supply unit according to claim 1 is characterized in that, the 2nd series circuit that the 2nd forward diode and switch constitute is to be made of a plurality of being connected in series of assembly that diode that is connected in series and semiconductor switch device constitute.
6. Pulased power supply unit according to claim 5, it is characterized in that the assembly that constitutes the 2nd forward diode that is connected in series of the 2nd series circuit and semiconductor device is arranged in parallel the surge voltage that the series circuit by capacitor and resistance constitutes and suppresses means.
7. Pulased power supply unit, comprise direct voltage source and be connected in series in the 1st and the 2nd series circuit between positive-negative output end of this direct voltage source, described the 1st series circuit is the series circuit of the 1st reactor and the 1st forward diode, described the 2nd series circuit is the series circuit that is made of the 2nd forward diode and switch, it is characterized in that
Be arranged in parallel the series circuit of the 1st supersaturation reactor, the 1st capacitor and the 2nd capacitor at described the 2nd series circuit, and be arranged in parallel the narrowing circuit that constitutes by the 2nd saturable reactor and the 3rd capacitor on described the 2nd capacitor, be arranged in parallel discharge tube on described the 3rd capacitor of this narrowing circuit.
8. Pulased power supply unit according to claim 7, it is characterized in that, the capacitance of the 2nd capacitor is compared with the capacitance of the 1st capacitor, or the capacitance of the 3rd capacitor is compared with the capacitance of the 2nd capacitor, ratio is more than 0.25, below 0.75.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97181932 CN1247644A (en) | 1997-12-25 | 1997-12-25 | Pulse power source appts. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97181932 CN1247644A (en) | 1997-12-25 | 1997-12-25 | Pulse power source appts. |
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| Publication Number | Publication Date |
|---|---|
| CN1247644A true CN1247644A (en) | 2000-03-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97181932 Pending CN1247644A (en) | 1997-12-25 | 1997-12-25 | Pulse power source appts. |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1929282B (en) * | 2006-09-19 | 2010-05-12 | 常州市创捷防雷电子有限公司 | Inductance energy-releasing swashing current-generator |
| CN107078653A (en) * | 2014-10-20 | 2017-08-18 | 株式会社岛津制作所 | Mass spectrometer |
| CN107367701A (en) * | 2017-08-11 | 2017-11-21 | 国网江西省电力公司电力科学研究院 | A kind of alternating-current charging pile electric fault analogy method |
| CN108223165A (en) * | 2016-12-12 | 2018-06-29 | 罗伯特·博世有限公司 | For heating gas valve, the especially method and apparatus of fuel injector and there is the motor vehicle of the equipment |
| CN112715057A (en) * | 2018-09-13 | 2021-04-27 | 罗瓦克有限责任公司 | Method and apparatus for flash control |
-
1997
- 1997-12-25 CN CN 97181932 patent/CN1247644A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1929282B (en) * | 2006-09-19 | 2010-05-12 | 常州市创捷防雷电子有限公司 | Inductance energy-releasing swashing current-generator |
| CN107078653A (en) * | 2014-10-20 | 2017-08-18 | 株式会社岛津制作所 | Mass spectrometer |
| CN107078653B (en) * | 2014-10-20 | 2019-07-23 | 株式会社岛津制作所 | Mass spectrometer |
| CN108223165A (en) * | 2016-12-12 | 2018-06-29 | 罗伯特·博世有限公司 | For heating gas valve, the especially method and apparatus of fuel injector and there is the motor vehicle of the equipment |
| CN108223165B (en) * | 2016-12-12 | 2022-11-25 | 罗伯特·博世有限公司 | Method and device for heating a gas valve, in particular a fuel injector, and motor vehicle having said device |
| CN107367701A (en) * | 2017-08-11 | 2017-11-21 | 国网江西省电力公司电力科学研究院 | A kind of alternating-current charging pile electric fault analogy method |
| CN112715057A (en) * | 2018-09-13 | 2021-04-27 | 罗瓦克有限责任公司 | Method and apparatus for flash control |
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