CN1246710C - Substrate with semitransmitting mirror and semi-transmitting liquid crystal display unit - Google Patents
Substrate with semitransmitting mirror and semi-transmitting liquid crystal display unit Download PDFInfo
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- CN1246710C CN1246710C CNB028142616A CN02814261A CN1246710C CN 1246710 C CN1246710 C CN 1246710C CN B028142616 A CNB028142616 A CN B028142616A CN 02814261 A CN02814261 A CN 02814261A CN 1246710 C CN1246710 C CN 1246710C
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- 239000000758 substrate Substances 0.000 title claims abstract description 128
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 18
- 239000011521 glass Substances 0.000 claims abstract description 27
- 239000000126 substance Substances 0.000 claims abstract description 16
- 239000000203 mixture Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 12
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 8
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 7
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- 239000005368 silicate glass Substances 0.000 abstract description 3
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000002834 transmittance Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 21
- 238000002310 reflectometry Methods 0.000 description 21
- 239000007789 gas Substances 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000035699 permeability Effects 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000003475 lamination Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910018575 Al—Ti Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002265 electronic spectrum Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
- G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/26—Reflecting filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Liquid Crystal (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
Abstract
A substrate (1) with a semi-transmitting mirror having a high reflectance while retaining a high transmittance and being capable of enhancing a transmission display performance and a reflection display performance, the substrate comprising a transparent glass substrate (2) consisting of soda lime silicate glass, a substrate film (3) formed on the glass substrate (2) and consisting of silicon oxide (SiOx), a semi-transmitting reflection film (4) formed on the substrate film (3) and consisting of aluminum (Al), and a protection film (5) formed on the reflection film (4) and consisting of silicon dioxide (SiO<sb>2</sb>). The film thickness of SiOx used as the substrate film (3) is 0-8 nm, and an oxygen(O)-silicon(Si) chemical composition ratio x in SiOx is 1.5-2.0.
Description
Technical field
The present invention relates to have the substrate and the semitransparent liquid crystal display of semi-penetration mirror, particularly have the substrate that has the semi-penetration mirror and the semitransparent liquid crystal display of high permeability and reflectivity simultaneously.
Background technology
In existing semitransparent liquid crystal display, adopt the substrate semi-penetration mirror, that have the semi-penetration mirror that is formed with reflective-mode and shows required optical property through pattern.On the substrate that has the semi-penetration mirror,, need high reflecting properties and through performance for guaranteeing the display quality (mainly being briliancy) of the reflective-mode and the pattern of seeing through.
Have the silicon oxide film (SiO that the substrate of semi-penetration mirror has glass substrate, forms as substrate film on this glass substrate
2), at this SiO
2The Al film that forms as semipermeable reflection film on the film or by formed Al alloy film such as Al-Ti, Al-Nd, the SiO that on this Al film or Al alloy film, forms as diaphragm
2Film.Substrate film, semipermeable reflection film and diaphragm constitute the semi-penetration mirror, and this semi-penetration mirror has catoptrical function.The reflecting properties of semi-penetration mirror and through performance are by controlling as the thickness of Al film of semipermeable reflection film etc.
The transmitance of semipermeable reflection film generally is set at 15～20%.On the other hand, owing to the distinctive optical absorption of generation metal, so reflectivity is determined by the light quantity of deducting in whole light quantities through gained after light quantity and the absorption light quantity.Have in the display performance of semitransparent liquid crystal display of semi-penetration mirror substrate in employing, require the semi-penetration mirror to have that transmitance is more than 20%, reflectivity is the MIN quality more than 60% usually.
Method as making the semi-penetration mirror has vacuum vapour deposition or sputtering method, but from the permanance aspect, mainly adopts sputtering method.
But when improving the transmitance of semi-penetration mirror, the problem that the existing substrate that has the semi-penetration mirror exists is to obtain enough reflectivity.Particularly when the high permeability that obtains more than 15%, cause the significantly situation of decline of reflectivity.This may be owing to for increasing the optical absorption amount of semi-penetration mirror, make what the reflection strength reduction was caused.Promptly, be to improve transmitance, and make the thickness attenuate of the semipermeable reflection film that Al etc. forms, this is because the crystal lattice confusion of Al metal, caused the loose structure of Al metal itself to be changed to different structures, made the optical absorption amount of semipermeable reflection film increase to be caused.
Summary of the invention
The purpose of this invention is to provide a kind of substrate and semitransparent liquid crystal display that has the semi-penetration mirror, this substrate and display device can be kept high transmitance, and have high reflectance, can improve transmission display performance and reflection display performance simultaneously.
For achieving the above object, first mode according to the present invention provides a kind of substrate that has the semi-penetration mirror, it has glass substrate, at the substrate film that forms on the described glass substrate (basilar memebrane), and the semipermeable reflection film that on described substrate film, forms, it is characterized in that the thickness of described substrate film is 0～8nm.
In addition, in the substrate that has the semi-penetration mirror as first mode, described substrate film is preferably formed by monox (SiOx).
In addition, in the substrate that has the semi-penetration mirror as first mode, oxygen (O) chemical composition relative with silicon (Si) is preferably 1.5～2.0 than x in the described monox (SiOx).
In addition, in the substrate that has the semi-penetration mirror as first mode, described semipermeable reflection film is preferably by at least a formation the in Al and the Al alloy.
For achieving the above object, according to second mode of the present invention, the substrate that has the semi-penetration mirror is provided, have glass substrate, at the substrate film that forms on the described glass substrate, the semipermeable reflection film that on described substrate film, forms, wherein, described substrate film is made of the monox of thickness 0～8nm, and oxygen (0) is 1.5～2.0 with the chemical composition of silicon (Si) than x in the described monox (SiOx), and described semipermeable reflection film is by at least a formation the in Al and the Al alloy.
For achieving the above object, according to Third Way of the present invention, provide a kind of semitransparent liquid crystal display, it is characterized by this device and have the substrate that has the semi-penetration mirror as the present invention's second mode.
Description of drawings
Fig. 1 is the sectional view of expression as the schema construction of the substrate that has the semi-penetration mirror of an embodiment of the present invention.
Fig. 2 is the sectional view of the schema construction of semitransparent liquid crystal display one example of the substrate manufacturing that has the semi-penetration mirror of expression employing Fig. 1.
Fig. 3 is the figure of the optical characteristics of embodiment 1～embodiment 2 in the expression table 1.
Fig. 4 is the figure of the optical characteristics of embodiment 3～embodiment 6 and comparative example 1 in the expression table 1.
Fig. 5 is the figure of the optical characteristics of embodiment 7～embodiment 10 and comparative example 2 in the expression table 1.
Fig. 6 is the figure of the optical characteristics of embodiment 11～embodiment 14 and comparative example 3 in the expression table 1.
Fig. 7 is the Ar/O of embodiment 15～embodiment 22 in the expression table 2
2The figure of relation between the x value of mixed gas flow ratio and substrate film.
The figure of Fig. 8 for concerning between the x value of the substrate film of embodiment 23～embodiment 27 in the expression table 3 and comparative example 4～comparative example 6 and the optical characteristics.
Embodiment
Present inventors etc. in order to achieve the above object, specialize in, found that have substrate, in the substrate that has the semi-penetration mirror of the substrate film that forms on the described substrate, the semipermeable reflection film that on described substrate film, forms, if making the thickness of substrate film is 0～8nm, then can keep high transmitance, and the raising reflectivity, can improve transmission display performance and reflection display performance simultaneously.
In addition, if find that making substrate film be formed and be made the chemical composition that oxygen (0) is relative with silicon (Si) among the described silicon oxide sio x by monox (SiOx) is 1.5～2.0 than x, then can keep high transmitance, and the raising reflectivity, can further improve transmission display performance and reflection display performance simultaneously.
Following with reference to accompanying drawing, embodiments of the present invention are elaborated.
Fig. 1 is the sectional view of expression as the schema construction of the substrate that has the semi-penetration mirror of an embodiment of the present invention.
In Fig. 1, the substrate 1 that has a semi-penetration mirror have transparent glass substrate 2, the substrate film 3 that forms by monox (SiOx) that forms on the glass substrate 2, form on the substrate film 3 semipermeable reflection film 4 that forms by aluminium (Al) and on semipermeable reflection film 4, form by silicon dioxide (SiO
2) diaphragm 5 that forms.Lamination substrate film 3, semipermeable reflection film 4 and diaphragm 5 in turn on glass substrate 2.These substrate films 3, semipermeable reflection film 4 and diaphragm 5 constitute semi-penetration mirror 6, and this semi-penetration mirror 6 has catoptrical function.
Glass substrate 2 is preferably the soda lime silicate glass that has 1.50～1.55 degree refractive indexes at the wavelength place of 550nm or low alkalinity glass, alkali-free glass, but it is not limited to these glass, also can be the resin of transparent plastic etc.
Semipermeable reflection film 4 in the semi-penetration mirror 6 is formed by the thin metallic film that Al makes, and this film is thinned to and can sees through a part of light, but reflectance coating 4 is not limited to these films, also can be the Al alloy of Al-Ti, Al-Nd etc.The purpose of diaphragm 5 is mechanical protection semipermeable reflection films 4 and guarantees resistance to chemical reagents, water tolerance; and in the semitransparent liquid crystal display of the following stated Fig. 2, guarantee and diaphragm 5 on adaptation between the CF (chromatic filter) that forms, therefore on semipermeable reflection film 4, form.
The thickness of the substrate film 3 that is formed by SiOx is 0～8nm.This is that the optical absorption amount of Al metal itself will increase simultaneously because when the thickness of substrate film 3 surpassed 8nm, the reflectivity of semi-penetration mirror 6 reduced.And the thickness scope of preferred substrate film 3 is 3～6nm.Substrate film 3 itself has the close-burning function between alkali diffusion (alkali passivation), raising glass substrate 2 and the reflectance coating 4 that prevents from glass substrate 2 inner strippings, and be 0～8nm by the thickness that makes substrate film 3, the crystal structure of Al metal is good in the semipermeable reflection film 4 that forms on the substrate film 3, the optical absorption amount of Al metal itself does not increase, and also can improve light transmission performance and reflecting properties simultaneously.
In addition, for improving the through performance and the reflecting properties of semi-penetration mirror 6, oxygen (O) is 1.5～2.0 to the chemical composition of silicon (Si) than x in the SiOx that uses as substrate film 3.Chemical composition by making 0 couple of Si among the SiOx is 1.5～2.0 than x, and it is good to make that SiOx goes up the crystal structure of Al metal in the semipermeable reflection film 4 that forms, and the optical absorption amount of Al metal itself does not increase, and also can improve light transmission performance and reflecting properties simultaneously.
On semipermeable reflection film 4, also the reflection polylayer forest that increases of the staggered superimposed multilayer formation of layer that can form with the layer and the high-index material of low-index material formation replaces diaphragm 5.The superimposed number of plies is not particularly limited, but considers reflecting properties and cost, is preferably 2～5 layers usually.As low-index material, mainly adopt monox, magnesium fluoride, as high-index material, mainly adopt titanium dioxide, tantalum oxide, niobium oxide.For optical absorption does not take place, increasing the reflection layered product can use as the semi-transparent film of crossing suitably.
Formation method as forming substrate film 3 and diaphragm 5 mainly adopts known vacuum film formation method, ion plating and sputtering method, but also can adopt other can correctly control the method for the thickness of substrate film 3.Specially suitable substrate film 3 is by adopting Ar/O
2The dc sputtering of mixed gas forms electric conductivity Si (doping B) as target material.In addition, suitable semipermeable reflection film 4 can be by the dc sputtering that adopts Ar gas, highly purified Al is formed as target material.
The substrate 1 that has the semi-penetration mirror according to Fig. 1, thickness by substrate film 3 that SiOx is formed is set at 0～8nm, and O among the SiOx is set at 1.5～2.0 to the chemical composition of Si than x, can keep high permeability, and have high reflectance, improve through performance and reflecting properties simultaneously.
The schema construction of an example of the semitransparent liquid crystal display that the substrate 1 that sectional view shown in Figure 2 is represented to adopt Fig. 1 to have the semi-penetration mirror is made.
In Fig. 2, lamination is with the chromatic filter 7 of chimeric shape configuration on semi-penetration mirror 6, and lamination is protected the external coating 8 of chromatic filter 7 usefulness and the nesa coating 9 that is formed by ITO (IndiumThin Oxide (indium oxide thin layer thing)) successively thereon.In addition, on the outermost surface of glass substrate 2, lamination polarizer 10 and Polarizer 11 successively.
Nesa coating 9 and front glass plate 14 more on the internal layer between the nesa coating 13 of lamination clamping liquid crystal layer 12.In front on the outside of glass plate 14 successively lamination diffuser plate 15, polarizer 16 and Polarizer 17 are arranged.
By said structure, can reflective-mode and see through these two kinds of patterns of pattern and show.
According to the semitransparent liquid crystal display of Fig. 2, can improve transmission display performance and reflection display performance.As a result,, can suppress and reduce not shown briliancy backlight, make the semitransparent liquid crystal display power consumption low owing to improve light utilization efficiency.
Below specify the embodiment of the invention.
At first prepare the glass substrate of making by soda lime silicate glass 2; its first type surface has implemented grinding and thickness of slab is 0.5mm; adopt sputtering method laminated substrates film 3, semipermeable reflection film 4 and diaphragm 5 successively on glass substrate 2, form the substrate 1 that has the semi-penetration mirror.
That is, with electric conductivity Si (doping B) as target material, by adopting Ar/O
2The dc sputtering of mixed gas, on glass substrate 2 with predetermined thickness (0,3,5,8,12nm) form by
SiOxBehind the substrate film 3 that forms, with high-purity
Al(5N) as target material, by employing
ArThe dc sputtering of gas, on substrate film 3 with predetermined thickness (7.5,9,11,13nm) form by
AlThe semipermeable reflection film 4 that forms, on the semipermeable reflection film 4 further with the same method of substrate film 3 on form by SiO with predetermined thickness (25nm)
2The diaphragm 5 that forms is produced the sample shown in the table 1 (embodiment 1～14 and comparative example 1～3).
The through performance and the reflecting properties of each sample of producing for evaluation are measured the optical characteristics of each sample at light wavelength lambda=550nm place, i.e. transmitance (%), reflectivity (%) and absorptivity (%) on spectrophotometer.The results are shown in table 1.In table 1, absorptivity (%) is calculated by 100 1 (transmitances (%)+reflectivity (%)).In addition, Fig. 3～Fig. 6 shows the curve map that the measurement result by table 1 makes.
Table 1
| The thickness (nm) of substrate film (SiOx) | The thickness (nm) of reflectance coating (Al) | Diaphragm (SiO 2) thickness (nm) | Transmitance (%) [λ=550nm] | Reflectivity (%) [λ=550nm] | Absorptivity (%) [λ=550nm] | ||
| | 1 | 0 | 13 | 25 | 12.4 | 68.2 | 19.4 |
| 2 | 5 | 13 | 25 | 11.8 | 677 | 20.5 | |
| 3 | 0 | 11 | 25 | 15.2 | 669 | 17.9 | |
| 4 | 3 | 11 | 25 | 15.3 | 661 | 18.6 | |
| 5 | 5 | 11 | 25 | 14.9 | 656 | 19.5 | |
| 6 | 8 | 11 | 25 | 148 | 64.5 | 20.7 | |
| 7 | 0 | 9 | 25 | 17.9 | 62.9 | 19.2 | |
| 8 | 3 | 9 | 25 | 18.1 | 62.2 | 19.7 | |
| 9 | 5 | 9 | 25 | 18.3 | 61.2 | 20.5 | |
| 10 | 8 | 9 | 25 | 18.2 | 59.8 | 22.0 | |
| ¨ | 0 | 7.5 | 25 | 20.7 | 58.1 | 21.2 | |
| 12 | 3 | 75 | 25 | 20.9 | 57.4 | 21.7 | |
| 13 | 5 | 7.5 | 25 | 20.9 | 56.8 | 22.3 | |
| 14 | 8 | 7.5 | 25 | 21.2 | 54.9 | 23.9 | |
| Than executing example | 1 | 12 | 11 | 25 | 15.1 | 59.8 | 25.1 |
| 2 | 12 | 9 | 25 | 178 | 53.8 | 28.4 | |
| 3 | 12 | 7.5 | 25 | 21.3 | 47.8 | 30.9 |
As table 1 and Fig. 3～shown in Figure 6, can determine that if the thickness of substrate film 3 surpasses 8nm, then reflectivity sharply descends when having semi-penetration mirror substrate 1 transmitance when identical.The reason that this reflectivity descends is to be caused by the optical absorption amount increase that has semi-penetration mirror substrate 1.The thickness of substrate film 3 to the influence of optical characteristics is significantly: the transmitance that has semi-penetration mirror substrate 1 is high more, and promptly the thickness of semipermeable reflection film 4 is thin more.1 of the opposing party, transmitance was low to moderate 12% o'clock, and the optical characteristics that then has semi-penetration mirror substrate 1 does not rely on the thickness of substrate film 3, is definite value.
Below oxygen (O) in the substrate film 3 (SiOx) is studied than the relation between x and the optical property the chemical composition of silicon (Si).
At first, when on the glass substrate the same 2, forming the substrate film 3 that forms by SiOx, change Ar/O by dc sputtering with the foregoing description
2The throughput ratio of mixed gas forms glass substrate 2 and substrate film 3, makes the sample (embodiment 15～embodiment 22) shown in the table 2.
After this, adopt the electronics optical spectroscopy (ESCA: the chemical analysis electronic spectrum) measure oxygen (O) in the substrate film 3 (SiOx) of each sample of producing to the chemical composition of silicon (Si) than x, measure the thickness of substrate film 3 (SiOx) simultaneously.Its measurement result is shown in table 2.In addition, Fig. 7 shows the curve map of being made by the measurement result of table 2.
Table 2
| The sputtering condition of substrate film | The thickness of substrate film (nm) | The x value of substrate film | |||||
| Ar gas flow (sccm) | O 2Gas flow (sccm) | Ar/O 2The mixed gas flow ratio | Sputtering pressure (Pa) | ||||
| 15 | 360 | 40 | 9.00 | 40×10 -1 | 28.9 | 1.3 | |
| 16 | 350 | 50 | 7.00 | 4.0×10 -1 | 29.3 | 14 | |
| 17 | 340 | 60 | 5.67 | 4.0×10 -1 | 29.2 | 1.45 | |
| 18 | 320 | 80 | 4.00 | 4.0×10 -1 | 30.4 | 1.6 | |
| 19 | 300 | 100 | 3.00 | 4.0×10 -1 | 31.0 | 185 | |
| 20 | 250 | 150 | 1.67 | 4.0×10 -1 | 32.3 | 2 | |
| 21 | 200 | 200 | 1.00 | 4.0×10 -1 | 32.1 | 2 | |
| 22 | 100 | 300 | 0.33 | 4.0×10 -1 | 33.2 | 2 | |
As table 2 and shown in Figure 7, can confirm oxygen (O) in the substrate film 3 (SiOx) that forms by dc sputtering to the chemical composition of silicon (Si) than x according to Ar/O
2Mixed gas flow compares and changes.
After this; the sample that makes in the above-described embodiments (embodiment 15～embodiment 22) is gone up and is formed semipermeable reflection film 4 and diaphragm 5; produce the sample that has semi-penetration mirror substrate 1 shown in the table 3 (embodiment 23～embodiment 27 and comparative example 4～comparative example 6), on spectrophotometer, measure the optical characteristics of each sample.Its measurement result is shown in table 3.When forming diaphragm 5, fixing Ar/O
2Mixed gas flow is than being Ar: O
2Implement sputter at=1: 1.In addition, Fig. 8 shows the curve map of being made by the measurement result of table 3.
Table 3
| Ar/O 2The mixed gas flow ratio | The x value of substrate film | Transmitance (%) [λ=550nm] | Reflectivity (%) [λ=550nm] | Absorptivity (%) [λ=550nm] | ||
| Embodiment | 23 | 4.00 | 1.6 | 18.5 | 60.1 | 21.4 |
| 24 | 3.00 | 1.85 | 18.4 | 61.9 | 19.7 | |
| 25 | 1.67 | 2 | 18.7 | 62.3 | 19.0 | |
| 26 | 1.00 | 2 | 18.5 | 63.1 | 18.4 | |
| 27 | 0.33 | 2 | 18.5 | 62.8 | 18.7 | |
| Comparative example | 4 | 9.00 | 1.3 | 17.6 | 52.3 | 30.1 |
| 5 | 7.00 | 1.4 | 18.1 | 53.1 | 28.8 | |
| 6 | 5.67 | 1.45 | 18.3 | 54.2 | 27.5 | |
As table 3 and shown in Figure 8, can confirm when the transmitance that has semi-penetration mirror substrate 1 is identical, in the substrate film 3 (SiOx) oxygen (O) to the chemical composition of silicon (Si) during than x less than 1.5, reflectivity sharply descend (comparative example 4～comparative example 6).The decline of this reflectivity is to be caused by the optical absorption amount increase that has semi-penetration mirror substrate 1.That is, can judge that have semi-penetration mirror substrate 1 and have high reflectance for making, oxygen (O) is 1.5～2.0th to the chemical composition of silicon (Si) than x in the substrate film 3 (SiOx), effectively.
The industry utilizability
From above detailed description as can be known,,, therefore can keep high permeability and improve reflectivity, improve through performance and reflecting properties simultaneously because the thickness of substrate film is 0～8nm according to the substrate that has the semi-penetration mirror as the present invention's the 1st mode.
In addition, in the substrate that has the semi-penetration mirror,, then can protect semipermeable reflection film, make it not be subjected to the pollution of the impurity of the inner stripping of substrate if form substrate film with monox as the 1st mode.
In addition, in the substrate that has the semi-penetration mirror as the 1st mode, be 1.5～2.0 to the chemical composition of silicon (Si) than x if make the middle oxygen (O) of monox (SiOx), then can keep high permeability, improve reflectivity, improve through performance and reflecting properties simultaneously.
And, in the substrate that has the semi-penetration mirror,, then can keep high permeability, and improve reflectivity if form semipermeable reflection film with Al or Al alloy as the 1st mode.
According to the 2nd mode of the present invention, substrate film is that the monox of 0～8nm constitutes by thickness, and oxygen (O) is 1.5～2.0 with the chemical composition of silicon (Si) than x in the monox (SiOx), and semipermeable reflection film is by at least a formation the in Al and the Al alloy, then can keep high permeability, and improve reflectivity.
According to semitransparent liquid crystal display as the present invention's the 3rd mode, owing to have the substrate that has the semi-penetration mirror, so can obtain keeping high permeability, improve reflectivity, improve the semitransparent liquid crystal display of transmission display performance and reflection display performance simultaneously as the present invention's the 1st mode.
Claims (4)
1. substrate that has the semi-penetration mirror, have glass substrate, at the substrate film that forms on the described glass substrate, and the semipermeable reflection film that on described substrate film, forms, it is characterized by, the thickness of described substrate film is 0～8nm, formed by monox, oxygen (O) is 1.5～2.0 with the chemical composition of silicon (Si) than x in the described monox (SiOx).
2. the substrate that has the semi-penetration mirror as claimed in claim 1 is characterized by, and described semipermeable reflection film is by at least a formation the in Al and the Al alloy.
3. a semitransparent liquid crystal display is characterized by, and has the described substrate that has the semi-penetration mirror of claim 1.
4. a semitransparent liquid crystal display is characterized by, and has the described substrate that has the semi-penetration mirror of claim 2.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001215596A JP2003029010A (en) | 2001-07-16 | 2001-07-16 | Substrate with semitransmissive mirror and semitransmissive liquid crystal display device |
| JP215596/2001 | 2001-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1529826A CN1529826A (en) | 2004-09-15 |
| CN1246710C true CN1246710C (en) | 2006-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028142616A Expired - Fee Related CN1246710C (en) | 2001-07-16 | 2002-07-15 | Substrate with semitransmitting mirror and semi-transmitting liquid crystal display unit |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2003029010A (en) |
| KR (1) | KR20040019068A (en) |
| CN (1) | CN1246710C (en) |
| TW (1) | TW592951B (en) |
| WO (1) | WO2003009018A1 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100349047C (en) * | 2005-03-29 | 2007-11-14 | 中国科学院微电子研究所 | Passivation protection method for silicon-based liquid crystal aluminium reflection electrode |
| JP2006337770A (en) * | 2005-06-02 | 2006-12-14 | Central Glass Co Ltd | Surface mirror |
| JP2007114327A (en) * | 2005-10-19 | 2007-05-10 | Matsushita Electric Ind Co Ltd | Rotary-type reflecting mirror and rotating display |
| TW200745923A (en) * | 2005-10-20 | 2007-12-16 | Nitto Denko Corp | Transparent conductive laminate body and touch panel equipped with above |
| KR101367825B1 (en) * | 2006-06-30 | 2014-02-26 | 닛폰 이타가라스 가부시키가이샤 | Glass substrate for reflecting mirror, reflecting mirror having the glass substrate, glass substrate for liquid crystal panel, and liquid crystal panel having the glass substrate |
| TW200839304A (en) * | 2007-01-23 | 2008-10-01 | Asahi Glass Co Ltd | Light diffusion plate, light diffusion layer forming liquid, and light diffusion plate manufacturing method |
| CA2692353A1 (en) * | 2007-07-11 | 2009-01-15 | Nissha Printing Co., Ltd. | Display-protective plate for electronic apparatus and electronic apparatus therewith |
| CN102147490A (en) * | 2010-02-04 | 2011-08-10 | 陈奇康 | Environment-friendly glass mirror |
| JP5600988B2 (en) * | 2010-03-26 | 2014-10-08 | 凸版印刷株式会社 | Laminated sheet for information display panel, information display panel, and information display device |
| JP5517717B2 (en) * | 2010-04-16 | 2014-06-11 | 株式会社ジャパンディスプレイ | Liquid crystal display |
| CN101949003B (en) * | 2010-06-30 | 2013-03-27 | 苏州爱迪尔镀膜科技有限公司 | High-reflectivity nano film layer for high-power LED lamps and film coating method thereof |
| CN104280936A (en) * | 2014-10-30 | 2015-01-14 | 京东方科技集团股份有限公司 | Display panel and display device |
| CN106335236B (en) * | 2016-09-29 | 2018-09-07 | 宁波长青家居用品有限公司 | A kind of optics light transmission piece |
| CN108681143A (en) * | 2018-06-20 | 2018-10-19 | 上海天马微电子有限公司 | A kind of display panel and preparation method thereof, display device |
| JP7084031B2 (en) * | 2018-08-31 | 2022-06-14 | 北川工業株式会社 | Optical laminate |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04240802A (en) * | 1991-01-25 | 1992-08-28 | Olympus Optical Co Ltd | Rear surface reflection mirror of optical parts made of synthetic resin and production thereof |
| JP2001116912A (en) * | 1999-10-21 | 2001-04-27 | Oike Ind Co Ltd | Translucent semi-reflective diffusion film |
| JP2001296412A (en) * | 2000-04-13 | 2001-10-26 | Mitsui Chemicals Inc | Semitransmissive reflecting sheet |
-
2001
- 2001-07-16 JP JP2001215596A patent/JP2003029010A/en not_active Withdrawn
-
2002
- 2002-07-15 KR KR10-2004-7000594A patent/KR20040019068A/en not_active Application Discontinuation
- 2002-07-15 WO PCT/JP2002/007180 patent/WO2003009018A1/en active Application Filing
- 2002-07-15 CN CNB028142616A patent/CN1246710C/en not_active Expired - Fee Related
- 2002-07-16 TW TW091115841A patent/TW592951B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1529826A (en) | 2004-09-15 |
| JP2003029010A (en) | 2003-01-29 |
| WO2003009018A1 (en) | 2003-01-30 |
| TW592951B (en) | 2004-06-21 |
| KR20040019068A (en) | 2004-03-04 |
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