CN1245904A - Optical Wavefront Sensor - Google Patents
Optical Wavefront Sensor Download PDFInfo
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- CN1245904A CN1245904A CN 98112210 CN98112210A CN1245904A CN 1245904 A CN1245904 A CN 1245904A CN 98112210 CN98112210 CN 98112210 CN 98112210 A CN98112210 A CN 98112210A CN 1245904 A CN1245904 A CN 1245904A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 210000001747 pupil Anatomy 0.000 claims abstract description 5
- 230000011218 segmentation Effects 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000005070 sampling Methods 0.000 abstract description 6
- 238000003491 array Methods 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 230000010365 information processing Effects 0.000 abstract description 2
- 230000004044 response Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
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Abstract
An optical wave-front sensor belongs to the improvement of Hartmann-shack wave-front sensor structure. The focusing array divides the optical system pupil into sub-aperture arrays and converges the incident beam to the corresponding units of the position sensitive sensor array in the focal plane. The wave-front sensor has the advantages of high response speed, small information processing amount, parallel data output and simple and convenient optical adjustment, greatly reduces the sampling delay time, greatly improves the sampling rate of the wave-front sensor, simplifies the algorithm, reduces the requirement on a subsequent computer and increases the applicability.
Description
The present invention is a kind of optical wave-front sensor, belongs to the Hartmann---the improvement of Shack wavefront sensor construction.
Hartmann---Shack (Hartmann-Shack) wavefront error mensuration is used to detect the heavy caliber astronomical telescope optical quality at first.Based on this measuring principle, combine with (little) lens arra and CCD camera and computing machine, and the dynamic Hartmann who makes---Shack Wavefront sensor has at first obtained widespread use in ADAPTIVE OPTICS SYSTEMS, be applied to the flow field kinetic measurement thereafter again.Hartmann---Shack Wavefront sensor is divided into sub-array of apertures with (little) lens arra with pupil, and incident light is converged to the target surface of CCD camera; Computing machine is calculated sub-aperture and is assembled the luminous point center of gravity and demarcate center of gravity at x from CCD camera output signal, the side-play amount on the y direction, and the wavefront slope by the focal length and the side-play amount in sub-aperture are obtained sub-aperture reconstructs wavefront by wavefront slope again.Dynamic Hartmann---wavefront error that the Shack Wavefront sensor had is obtained conveniently, speed is fast, the measurement light source degree of coherence is required advantage such as low, compact conformation, is that other Wavefront sensors are incomparable.Existing Hartmann---Shack Wavefront sensor all uses the CCD camera as photodetector.The limitation of CCD camera is: one, and its each pixel signal is exported with serial mode; Its two, ask for the algorithm of center of gravity through computing machine, could obtain the control information in each sub-aperture.Therefore the sample frequency that has limited the Hartmann wave front sensor that adopts CCD from principle improves and the reduction of sampling delay time, thereby has influenced the application of (as pneumatic effect measurement) in the measuring system of real-time control system (compensating ADAPTIVE OPTICS SYSTEMS as turbulent flow) and high time resolution of this sensor.Document: " Weont characterization with aminiaturized Shack-Hartmann Sensor. " (OptikVol.101, No.4,1996, pp.151-156, author C.Du, K.Zurl J.Schwjder.) is described in detail this sensor.
The objective of the invention is to avoid above-mentioned the deficiencies in the prior art, and provide a kind of sampling time short, sample rate is high, the optical wave-front sensor that is easy to use in real-time control system.
Purpose of the present invention can reach by following measure: form optical wave-front sensor by focusing array with sub-aperture segmentation and position sensitive device array, focusing array with sub-aperture segmentation is divided into sub-array of apertures with the optical system pupil, and converges on each the corresponding unit of position sensitive device array that places its focal plane.
Purpose of the present invention can also reach by following measure: placing the position sensitive device array on the sub-array of apertures focal plane is one-dimensional array or two-dimensional array; Position sensitive device can be the one dimension position sensitive device, also can be two-dimentional position sensitive device; Focusing array with sub-aperture segmentation is a lens arra.
Description of drawings:
Fig. 1 is embodiment 1 structural drawing;
Fig. 2 is the A view of embodiment 1 structural drawing;
Fig. 3 is embodiment 2 structural drawing;
Fig. 4 is the A view of embodiment 2 structural drawing;
Fig. 5 is embodiment 3 structural drawing
Fig. 6 is embodiment 4 structural drawing
Fig. 7 is the B view of embodiment 4 structural drawing;
Following the present invention will be described further in conjunction with the accompanying drawings:
Optical wave-front sensor is made up of lens arra (1) and position sensitive device array (2).
As depicted in figs. 1 and 2, embodiment 1, and optical wave-front sensor is made up of lens arra (1) and position sensitive device one-dimensional array (2).
As shown in Figure 3 and Figure 4, embodiment 2, and optical wave-front sensor is made up of lens arra (1) and position sensitive device two-dimensional array (2).
Lens arra (1) is divided into many sub-apertures with the pupil of optical system, and the sub-aperture lens of each on the lens arra converges at the incident light in each sub-aperture on each the corresponding unit of position sensitive device array (2) that places its focal plane.Used position sensitive device (PSD-PositionSensitive Detectors) be a kind of utilize photoelectron effect and output photocurrent intensity and luminous point on the position sensitive device sensitive area and between output electrode apart from the photodetector that is inversely proportional to.For each direction of measurement,, can obtain the light spot position data according to each electrode output photocurrent intensity of the quick sensing in position (PSD) and simple linear ratio relation.
The position of the single luminous point of single position sensitive device device energy measurement, by the array that a plurality of position sensitive device devices are formed, perhaps integrated position sensitive device linear array and face battle array just can satisfy the light spot position of sub-array of apertures and measure needs.
As shown in Figure 5, when adopting one dimension position sensitive device (promptly only to the spot displacement sensitive sensor of a direction) array, with beam splitter (3) incident light is divided into light beam (4) and light beam (5), make on light beam (4) path, place one dimension position sensitive device array (2) the displacement sensitive direction of lens arra (1) focal plane; And on light beam (5) path, place one dimension position sensitive device array (2) the displacement sensitive direction of lens arra (1) focal plane, orthogonal on direction in space (quadrature), so just can obtain two orthogonal (quadrature) direction glazing dot position information simultaneously, promptly just can replace the use of a two-dimentional position sensitive device with two one dimension position sensitive devices.Lens arra among Fig. 5 (1) and position sensitive device array (2) can be the arrays of one dimension as shown in Figure 2; It also can be two-dimensional array as shown in Figure 4.
As shown in Figure 3 and Figure 4, when adopting the two-dimentional position sensitive device position sensitive sensor of the light spot position sensitivity of two orthogonal directionss (promptly to) array, two-dimentional position sensitive device array (2) is placed lens arra (1) focal plane, and make each unit of a sensitive sensor array corresponding one by one with each sub-aperture of lens arra, just can record the information of orthogonal directions light spot position simultaneously.
As shown in Figure 6 and Figure 7, the available discrete position sensitive device device of position sensitive device array (2) is put together, select 64 of the S1743 type two dimension position sensitive device PSD discrete devices that Japanese Hamamatsu company produces for use, on a metal (as LY-12), process the mounting hole of S1743-PSD, count 8 * 8, the other end in each hole is installed the lens of φ 16, D/f=1/5, all PSD all are positioned on the focal plane of 8 * 8 lens arras, and this has just formed an optical wave-front sensor with 8 * 8 sub-array of apertures and 8 * 8 quick sensor arrays.
Position sensitive device array (2) can be the integrated device that microelectronic manufacturing technology is made, be integrated one dimensional linear array or two-dimensional array, the microlens array that lens arra (1) can adopt microelectronic manufacturing technology to make has equally so just constituted the very compact optical wave-front sensor of structure.
The present invention compares prior art and has following advantage:
Adopt the position sensitive device array as each sub-aperture slope detector, because of its response speed Hurry up (～100ps), little, the data of information processing capacity are parallel output, the optics adjustment is also For easy so that the sampling delay time greatly descend, thereby greatly improved the optical wavefront biography The sampling rate of sensor has also been simplified algorithm simultaneously, has reduced the requirement to the subsequent calculations machine, Increased applicability.
Claims (4)
1. optical wave-front sensor comprises the focusing array with sub-aperture segmentation and is positioned at focusing array focal plane detector just, it is characterized in that forming by focusing array (1) with sub-aperture segmentation and position sensitive device array (2), focusing array (1) with sub-aperture segmentation is divided into sub-array of apertures with the optical system pupil, and incident beam is converged on each the corresponding unit of position sensitive device array (2) that places its focal plane.
2. optical wave-front sensor as claimed in claim 1 is characterized in that placing the position sensitive device array (2) of sub-array of apertures focal plane is one-dimensional array or two-dimensional array.
3. optical wave-front sensor as claimed in claim 1, it is characterized in that constituting position sensitive device array (2) can be that the one dimension position sensitive device also can be two-dimentional position sensitive device.
4. optical wave-front sensor as claimed in claim 1, when it is characterized in that adopting one dimension position sensitive device array, with beam splitter (3), incident light is divided into light beam (4) and light beam (5), make on light beam (4) path, place one dimension position sensitive device array (2) the displacement sensitive direction of lens arra (1) focal plane; And on light beam (5) path, place one dimension position sensitive device array (2) the displacement sensitive direction of lens arra (1) focal plane, be mutually vertical on direction in space.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB981122108A CN1189774C (en) | 1998-08-26 | 1998-08-26 | Optical Wavefront Sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB981122108A CN1189774C (en) | 1998-08-26 | 1998-08-26 | Optical Wavefront Sensor |
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| CN1245904A true CN1245904A (en) | 2000-03-01 |
| CN1189774C CN1189774C (en) | 2005-02-16 |
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| CNB981122108A Expired - Fee Related CN1189774C (en) | 1998-08-26 | 1998-08-26 | Optical Wavefront Sensor |
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| CN100378442C (en) * | 2004-06-30 | 2008-04-02 | 中国科学院上海光学精密机械研究所 | Optical wave front detection device and detection method thereof |
| CN100405016C (en) * | 2003-09-28 | 2008-07-23 | 中国科学院光电技术研究所 | Human eye aberration Hartmann wavefront sensor based on microprism array |
| CN100440344C (en) * | 2004-05-12 | 2008-12-03 | 日本帕路斯科技株式会社 | Apparatus and method for adjusting optical pickup |
| CN100451577C (en) * | 2003-10-15 | 2009-01-14 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for pulse light beam quality detection based on microprism array |
| CN100458370C (en) * | 2003-09-28 | 2009-02-04 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for optical detection based on microprism array |
| CN100573081C (en) * | 2006-12-13 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with passive alignment function and detection method thereof |
| CN100573064C (en) * | 2006-01-16 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wave front sensor based on visual field offset of beam splitter prism |
| CN101126836B (en) * | 2007-08-20 | 2010-06-30 | 中国科学院光电技术研究所 | 100% matching circular and annular beam aperture microarray grating |
| CN101726366B (en) * | 2009-12-02 | 2011-11-23 | 山东师范大学 | Wavefront measurement method and device based on multiple-pinhole plate |
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| CN103033260A (en) * | 2012-12-14 | 2013-04-10 | 中国科学院国家天文台南京天文光学技术研究所 | Wave surface separation and defocusing based phase retrieval wavefront analyzer and analytical method thereof |
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| CN104198056A (en) * | 2014-09-25 | 2014-12-10 | 中国科学院国家天文台南京天文光学技术研究所 | Schack hartmann wavefront sensor for low contrast expansion source telescope |
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| CN105004511A (en) * | 2015-07-14 | 2015-10-28 | 中国人民解放军国防科学技术大学 | Wide-range wavefront detection device for measuring low-order aberration |
| CN105466576A (en) * | 2015-12-31 | 2016-04-06 | 中国科学院光电技术研究所 | Device and method for synchronously measuring height and angle non-isohalo wavefront errors of atmospheric turbulence |
| CN105675149A (en) * | 2016-01-12 | 2016-06-15 | 中国科学院光电技术研究所 | Pneumatic optical effect correcting device based on self-illumination wavefront sensor |
| CN114777933A (en) * | 2022-06-20 | 2022-07-22 | 中国工程物理研究院应用电子学研究所 | Mesh-free large dynamic range Hartmann wavefront measuring device and measuring method |
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- 1998-08-26 CN CNB981122108A patent/CN1189774C/en not_active Expired - Fee Related
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| CN100405016C (en) * | 2003-09-28 | 2008-07-23 | 中国科学院光电技术研究所 | Human eye aberration Hartmann wavefront sensor based on microprism array |
| CN100458370C (en) * | 2003-09-28 | 2009-02-04 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for optical detection based on microprism array |
| CN100451577C (en) * | 2003-10-15 | 2009-01-14 | 中国科学院光电技术研究所 | Hartmann wavefront sensor for pulse light beam quality detection based on microprism array |
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| CN100378442C (en) * | 2004-06-30 | 2008-04-02 | 中国科学院上海光学精密机械研究所 | Optical wave front detection device and detection method thereof |
| CN102566324A (en) * | 2005-08-31 | 2012-07-11 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method that compensates for reticle induced CDU |
| CN100573064C (en) * | 2006-01-16 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wave front sensor based on visual field offset of beam splitter prism |
| CN100573081C (en) * | 2006-12-13 | 2009-12-23 | 中国科学院光电技术研究所 | Hartmann wavefront sensor with passive alignment function and detection method thereof |
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| CN104848945B (en) * | 2015-04-01 | 2018-01-12 | 电子科技大学 | The relevant scanning wavefront sensing methods of one kind and system |
| CN105004511A (en) * | 2015-07-14 | 2015-10-28 | 中国人民解放军国防科学技术大学 | Wide-range wavefront detection device for measuring low-order aberration |
| CN105004511B (en) * | 2015-07-14 | 2017-06-30 | 中国人民解放军国防科学技术大学 | A kind of wide range Wavefront detecting device for low order aberration measurement |
| CN105466576A (en) * | 2015-12-31 | 2016-04-06 | 中国科学院光电技术研究所 | Device and method for synchronously measuring height and angle non-isohalo wavefront errors of atmospheric turbulence |
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