CN1245646C - Automatic coupling package and angle compensated scan technique and system for waveguide device - Google Patents
Automatic coupling package and angle compensated scan technique and system for waveguide device Download PDFInfo
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Abstract
The present invention designs automatic coupling package and angle compensated scan technique and a system for a waveguide device. Waveguide optical passages on a waveguide device align to optical fibers in an optical fiber array. The present invention particularly solves the problem of the collision of the waveguide device and the optical fiber array in the scanning process, namely the present invention uses an angle compensated scanning mode in the process of fine alignment, and a tilt angle theta of the left or right end face of the waveguide device is used as a reference to compensate an angle of an array optical fiber scanning route. When a Y value is increased by delta Y, array optical fibers move along a Z axis along the direction deviating from the waveguide device, and delta Z is equal to delta Y ctg theta, wherein theta is the tilt angle of the left or right end face of the waveguide device. When the Y value is reduced by delta Y, the array optical fibers move along the Z axis along the direction approaching to the waveguide device, and delta Z is equal to delta Y ctgtheta. The present invention has the other method that in the process of the fine alignment, when the optical fiber array scans along the X and the Y direction, a fine adjustment frame is adjusted so that the Y axis of the fine adjustment frame deviates from the vertical direction to be Y', and a deviating angle of the Y axis is equal to the tilt angle theta of the end face of the waveguide device.
Description
Technical field
The present invention relates to a kind of waveguide device be coupled automatically the encapsulation and the angle compensated scan method and system, it is the coupling encapsulation that is applied to fiber waveguide device, soon each leaded light path (also being waveguide) on the waveguide device and the optical fiber in the fiber array are aimed at one by one, adopt optical cement (normally epoxy glue) with its technology that bonds together again.
Background technology
Packaging technology accounts for the significant proportion of optical device cost.In recent years, the robotization encapsulation has become a significant development trend of optical device.In the discrete optical device of tradition field, the packaging technology of robotization (or semi-automatic) is developed application just gradually; In optical waveguide integrated device field, the trend of robotization encapsulation is particularly remarkable.
Compare with manual encapsulation, the robotization coupling encapsulation technology of waveguide device has many advantages.The robotization encapsulation technology can be enhanced productivity, and accomplishes scale production; The robotization encapsulation of waveguide device is little to people's dependence, and the Waveguide Product that encapsulates out has littler insertion loss and very high repeatability.But the encapsulation of robotization at present is at the early-stage, does not still have desirable method and apparatus.The method of patented claim 99801271 alignment light fibre arrays has provided state-of-the-art technology, but no matter is that alignment precision and scanning process all exist some technical matterss.
Summary of the invention
The objective of the invention is to design and a kind of optical fiber in each leaded light path on the waveguide device (also being waveguide) and the fiber array is aimed at one by one, particularly solve the collision problem of waveguide device and fiber array in the scanning process, adopt optical cement (normally epoxy glue) again its technology that bonds together.Solve the accurate aligning of waveguide device and fiber array, make the Waveguide Product that encapsulates out have the technology of littler insertion loss and very high repeatability.
Technical scheme of the present invention is: waveguide device of the present invention is coupled automatically and encapsulates the angle compensated scan method that adopted, with the industrial computer that has image collection card and data collecting card, the electronic control module of two electronic sextuple micropositioning stages and micropositioning stage, charge coupled device ccd and adaptive camera lens thereof, the sextuple micropositioning stage 2-1 upper end on the left side is fixed with the fiber array 1-1 as input end, the sextuple micropositioning stage 2-2 upper end on the right is fixed with the fiber array 1-2 as output terminal, fiber array 1-1, the output optical fibre of 1-2 all faces waveguide device, the optic fibre input end of fiber array 1-1 links to each other with wideband light source, the optic fibre input end of fiber array 1-2 links to each other with each passage of power meter, the position of waveguide device remains unchanged in whole coupling encapsulation process, the power that computing machine is surveyed according to power meter, judgement interchannel difference power is compared with predefined value as value of feedback, controlling micropositioning stage 2-2 moves along X and Y scanning direction, till value of feedback changes to predefined value, make the input waveguide of the output optical fibre aligning waveguide device of input end, the output optical fibre of output terminal is aimed at the output waveguide of waveguide device, realizes that device is coupled and aligned.In the fine alignment process, adopt the angle compensated scan mode, promptly the tiltangle with a waveguide device left side or right side is that benchmark carries out angle compensation to array optical fiber scanning route.The angle compensated scan method be when array fibre in setting range by setting step-length when X and Y direction scan, when the Y value increases Δ Y, array fibre is just along deviating from the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ, wherein θ is the pitch angle of a waveguide device left side or right side, when the Y value reduces Δ Y, array fibre just along near the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ.Wherein X is vertical with optical fiber, and is parallel with optic array surface; Y is vertical with optic array surface; Z is parallel with optical fiber.
Described waveguide device is coupled automatically and encapsulates and the angle compensated scan method, in coarse alignment process Shen, at first computer control motorized precision translation stage motion, make beam coupling device CCD1 camera lens move to the left end of waveguide device earlier, display is observed the left end upper surface of waveguide device and the upper surface of input array optical fiber, by observation to the image that amplified, angle between the end face of processing judgement fiber array 1-1 and the end face of waveguide device input end, compare with setting value, regulate fiber array 1-1, make the input end face of its end face and waveguide device parallel, the output terminal of waveguide device adopted use the same method, it is the coarse alignment of waveguide input end then: the image that the upper surface of observing waveguide input end and fiber array 1-1 by charge coupled device ccd 1 has amplified, the image that has amplified the side of observing waveguide input ends and fiber array 1-1 by charge coupled device ccd 2, utilize these picture information to read coordinate figure and setting value comparison, computer control micropositioning stage 2-1 the move input end of realizing waveguide device and the coarse alignment of fiber array 1-1, again fiber array 1-2 is removed, utilize the display of computing machine to observe hot spot by CCD3 through waveguide device, when hot spot becomes when the brightest, just think that the coarse alignment of waveguide input end finishes, carry out the coarse alignment of waveguide output terminal again, the image that the upper surface of observing waveguide input end and fiber array 1-2 by charge coupled device ccd 1 has amplified, the image that has amplified the side of observing waveguide input ends and fiber array 1-2 by charge coupled device ccd 2, utilize these picture information, computer control micropositioning stage 2-2 the move output terminal of realizing waveguide device and the aligning of fiber array 1-2, when showing on the power meter that first passage or K passage have the part luminous energy, just think that the coarse alignment of waveguide output terminal finished.
Described waveguide device is coupled automatically and encapsulates and the angle compensated scan method, it is in the fine alignment process, realize the aligning of whole wave guide device by aiming at two preassigned passages, elder generation's any one dedicated tunnel of fine alignment, as select first passage for use, after configuring sweep limit and step-length, the computer control micropositioning stage drives array fibre along X and Y scanning direction, gather the energy value on power meter or the photodetector simultaneously, micropositioning stage is along X, and the Y direction is predefined by the scope of step scanning, after scanning is finished, computing machine will be drawn the three-dimensional energy distribution plan along X and Y direction with the performance number of noting, find out the position of energy maximum then, and command micropositioning stage drive fiber array to move to this position, this position is actually the maximum position of relative energy, the maximum position of non-absolute energy, maximum position with this relative energy is a starting point, determines an X, the sweep limit of Y direction again, repeat top step, find the maximum position of another relative energy; Repeat this process once more, up to finding absolute energy P
1Maximum position till, the first passage of waveguide device is aimed at and has just been finished like this, computer control micropositioning stage 2-2 begins to rotate along the Z direction then, and the output waveguide N of waveguide device and the output optical fibre N of fiber array are aimed at, and N passage reading value on the power meter is P like this
N, computing machine is by gathering the performance number P on the power meter
NAnd command micropositioning stage 2-2 to rotate as feedback information it, up to finding P
NBe peaked position.Because rotation axis is not necessarily at the center of fiber array, so when micropositioning stage 2 rotated, the first passage of fiber array may depart from the optimum position, makes P
1Value diminishes, so micropositioning stage 2 also needs to move along X and Y direction simultaneously when rotating, and to keep the optimum position of fiber array first passage, makes P
1And P
NKeep maximal value simultaneously, realize the fine alignment of waveguide input end, find out the position of relative maximum energy value or setting energy value, repeat said process,, realize the fine alignment of a passage of waveguide input end up to the position of finding absolute maximum energy value.
In the fine alignment process, at first aim at any one dedicated tunnel in first passage or the preceding N/2 passage, and then aim at any one dedicated tunnel in N/2 passage of last passage or back, the aligning of any one dedicated tunnel in N/2 passage of last passage or back is to realize by rotating around the Z axle, when rotating, by continuing to keep the energy value of any one dedicated tunnel in first passage or the preceding N/2 passage constant along the scanning of X and Y direction.
Described waveguide device is coupled automatically and encapsulates and the angle compensated scan method, and the function expression of the track during its fiber array motion is:
Or expression formula is:
Y=y
0+ kx is the T of mT＜x＜(m+1) wherein,
y
0Be the setting constant with T.
Or function expression can be written as polar coordinates:
R=r
0+ k θ is r wherein
0With k be constant.
Described waveguide device be coupled the automatically encapsulation and the system of angle compensated scan method, its light source adopts wideband light source or tunable laser.
Description of drawings
Fig. 1 is be coupled the automatically structural system figure of package system of waveguide device.Used critical piece has: the computing machine (industrial computer) that has image collection card and data collecting card, two electronic sextuple micropositioning stage 2-1,2-2, charge coupled device ccd and adaptive camera lens thereof, video display, UV cure lamp, automatic glue-dropping device, wideband light source (or tunable laser), the multichannel light power meter, motorized precision translation stage, support.Fig. 2 is sidelong the proper supporting thing in the bottom one of two micropositioning stages, makes the Y-axis of micropositioning stage depart from vertical direction and becomes Y ' synoptic diagram.Fig. 3 and 4 is synoptic diagram of waveguide device.Fig. 5 and 6 has provided the synoptic diagram of fiber array.Fig. 7 is a function
Track, Fig. 8 is function y=y
0+ kx, the T of mT＜x＜(m+1),
Track, y
0Be the setting constant with T, Fig. 9 is that function expression is polar coordinates r=r
0+ k θ is r wherein
0With k be the constant trajectory diagram.Figure 10 has provided the FB(flow block) of whole automatic aligning encapsulation process.Figure 11 is the coarse alignment FB(flow block).Figure 12 is the fine alignment FB(flow block).Figure 13 is the balanced FB(flow block) of each channel energy.Figure 14 is an angle process of feedback block diagram.
Embodiment
Fig. 1 is the synoptic diagram that waveguide device and fiber array are aimed at adhesive system automatically, this system mainly is made of machine vision subsystem and automation fine setting control subsystem, as can be seen from Figure, with the industrial computer that has image collection card and data collecting card, the electronic control module of two electronic sextuple micropositioning stages and micropositioning stage, charge coupled device ccd and adaptive camera lens thereof, the sextuple micropositioning stage 2-1 upper end on the left side is fixed with the fiber array 1-1 as input end, the sextuple micropositioning stage 2-2 upper end on the right is fixed with the fiber array 1-2 as output terminal, fiber array 1-1, the output optical fibre of 1-2 all faces waveguide device, the optic fibre input end of fiber array 1-1 links to each other with wideband light source, the optic fibre input end of fiber array 1-2 links to each other with each passage of power meter, the position of waveguide device remains unchanged in whole coupling encapsulation process, the power that computing machine is surveyed according to power meter, judgement interchannel difference power is compared with predefined value as value of feedback, controlling micropositioning stage 2-2 moves along X and Y scanning direction, till value of feedback changes to predefined value, make the input waveguide of the output optical fibre aligning waveguide device of input end, the output optical fibre of output terminal is aimed at the output waveguide of waveguide device, realizes that device is coupled and aligned.Wherein X is vertical with optical fiber, and is parallel with optic array surface; Y is vertical with optic array surface; Z is parallel with optical fiber.
Detailed process is: waveguide chip be placed on fix on the support motionless, two fiber arrays are separately fixed on two six little Precision trimming framves, the input optical fibre array is connected with light source, the output optical fibre array is connected with the multi-channel power meter, CCD and adaptive camera lens thereof, electronic glue device and UV cure lamp are fixed on the motorized precision translation stage, and two micropositioning stages, power meter, CCD and adaptive camera lenses thereof, electronic glue device, UV cure lamp and motorized precision translation stage are controlled by computing machine respectively.Figure 10 has provided the FB(flow block) of whole automatic aligning encapsulation process.The course of work of system is:
1) coarse alignment process: as Figure 11.The computer control motorized precision translation stage, make the CCD camera lens move to the left end of waveguide device earlier, observe the left end upper surface of waveguide device and the upper surface of input array optical fiber by display, by observation to the image that amplified, the micropositioning stage on the mobile left side is aimed at the optical fiber of array fibre and the corresponding waveguide channels on the waveguide device.The right-hand member of coarse alignment waveguide device in the same way then.Generally speaking, after coarse alignment finishes, there is the part optically-coupled to enter waveguide device.
2) fine alignment: as Figure 12.Computing machine commander micropositioning stage is pressed Fig. 7, coordinate system shown in 8 or 9 (but or other type track while scans of setting range and step-length) is along X, the Y direction be by moved further (step-length in per step can be set according to actual conditions), whenever moves to move a step, and computing machine is just gathered the performance number on the power meter; Micropositioning stage is along X, the Y direction is predefined by the scope of step scanning, after scanning is finished, computing machine will be drawn the three-dimensional energy distribution plan along X and Y direction with the performance number of noting, find out the position of energy maximum then, and command micropositioning stage drive fiber array to move to this position, this position is actually the maximum position of relative energy, the maximum position of non-absolute energy; Maximum position with this relative energy is a starting point, determines an X again, and the sweep limit of Y direction repeats top step, finds the maximum position of another relative energy; Repeat this process once more, till the maximum position that finds absolute energy, the first passage of waveguide device is aimed at and has just been finished like this.Computer control micropositioning stage 2-2 begins to rotate along the Z direction then, and the output waveguide N of waveguide device and the output optical fibre N of fiber array are aimed at, and N passage reading value on the power meter is P like this
N, computing machine is by gathering the performance number P on the power meter
NAnd command micropositioning stage 2-2 to rotate as feedback information it, up to finding P
NBe peaked position.Because rotation axis is not necessarily at the center of fiber array, so when micropositioning stage 2-2 rotated, the first passage of fiber array may depart from the optimum position, makes P
1Value diminishes, so micropositioning stage 2-2 also needs to move along X and Y direction simultaneously when rotating, to keep the optimum position of fiber array first passage.At last, make P
1And P
NKeep maximal value simultaneously.Keep micropositioning stage 2-2 motionless, as stated above fiber array 1-1 is carried out the scanning of X and Y direction, realize the fine alignment of waveguide input end, after this process was finished, the first passage of waveguide device was aimed at and has just been finished.
3) equilibrium of each channel energy: as Figure 13.Computer control micropositioning stage 2-2 is along X and Y scanning direction, and meanwhile, computing machine is judged that the difference of energy value of the energy value of first passage and another dedicated tunnel is whether minimum or is setting value; Or judge whether the maximum energy value in all passages and the difference of minimum value are minimum or setting value, if just finish the scanning motion of micropositioning stage 2-2, otherwise continue scanning, till satisfying above-mentioned condition.
4) angle compensated scan mode: as Figure 14.In the auto-alignment process, fiber array under the drive of micropositioning stage in a certain scope autoscan be very important.In order to reduce return loss, two end faces of waveguide device are generally all made the shiny surface with certain pitch angle, shown in the waveguide device among Fig. 2.As can be seen from Figure 1, if array fibre 1-1 or 1-2 along the scope of X and Y scanning direction when big, fiber array just might be piled up with waveguide device, may cause the damage of waveguide device.In order to solve this contradiction, can take system's setting shown in Figure 2, put the proper supporting thing in the bottom of two micropositioning stages, make the Y-axis of micropositioning stage depart from vertical direction and become Y ', and OY ' is parallel with AB for axle, the scanning of array fibre has become along X and Y ' scanning direction like this, therefore can not exist fiber array to run into the danger of waveguide chip.The difficulty of doing like this with deficiency is: be difficult to make OY ' parallel with AB by placing the proper supporting thing, and because the placement of micropositioning stage bottom support thing, must under the anchor clamps of array fibre, put the proper supporting thing, can make the bad stability of total system like this, influence overall system efficiency to a certain extent.
In system shown in Figure 1, in order to overcome when fiber array during along X and Y scanning direction, fiber array might and waveguide device collide together contradiction, also can take following way: when array fibre in setting range by setting step-length when X and Y direction scan, when the Y value increases Δ Y, array fibre is just along deviating from the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ, wherein θ is the pitch angle of a waveguide device left side (right side) end face, when the Y value reduces Δ Y, array fibre just along near the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ, fiber array and waveguide device just can not collide together like this, and the scanning that this Z of having axle participates in motion is called angle compensated scan.
In order to prevent the problem of fiber array and waveguide device collision, also can take to make the Y-axis of micropositioning stage depart from vertical direction and become Y ', make an OY ' parallel with optical fiber one end face AB with the side that stilt is propped micropositioning stage.Fig. 2 is sidelong the proper supporting thing in the bottom one of two micropositioning stages, makes the Y-axis of micropositioning stage depart from vertical direction and becomes Y ' synoptic diagram.
5) UV solidifies.The computer control motorized precision translation stage makes electronic glue device move to two end faces of waveguide device and the epoxy glue (or being used to be stained with the glue that connects) of the predetermined amount of dripping respectively, and then make the UV cure lamp move to two end faces of waveguide device, under the control of computing machine, carry out the UV exposure of set amount.
Claims (6)
1. a waveguide device is coupled automatically and encapsulates and the angle compensated scan method, comprise coarse alignment, fine alignment, with the industrial computer that has image collection card and data collecting card, the electronic control module of two electronic sextuple micropositioning stages and micropositioning stage, first charge-coupled image sensor (CCD1), second charge-coupled image sensor (CCD2), tricharged coupled apparatus (CCD3) and adaptive camera lens thereof, the first electronic sextuple micropositioning stage (2-1) upper end on the left side is fixed with first fiber array (1-1) as input end, the second electronic sextuple micropositioning stage (2-2) upper end on the right is fixed with second fiber array (1-2) as output terminal, fiber array (1-1), output optical fibre (1-2) all faces waveguide device, the optic fibre input end of first fiber array (1-1) links to each other with wideband light source, the optic fibre input end of second fiber array (1-2) links to each other with each passage of power meter, the position of waveguide device remains unchanged in whole coupling encapsulation process, the power that computing machine is surveyed according to power meter, judgement interchannel difference power is compared with predefined value as value of feedback, controlling the second electronic sextuple micropositioning stage (2-2) moves along X and Y scanning direction, till value of feedback changes to predefined value, make the input waveguide of the output optical fibre aligning waveguide device of input end, the output optical fibre of output terminal is aimed at the output waveguide of waveguide device, the realization device is coupled and aligned, it is characterized in that in the fine alignment process, adopt the angle compensated scan mode, promptly the tiltangle with a waveguide device left side or right side is that benchmark carries out angle compensation to array optical fiber scanning route, when array fibre in setting range by setting step-length when X and Y direction scan, when the Y value increases Δ Y, array fibre is just along deviating from the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ, wherein θ is the pitch angle of a waveguide device left side or right side, when the Y value reduces Δ Y, array fibre just along near the direction of waveguide device along the mobile Δ Z=of Z axle Δ Yctg θ, wherein X is vertical with optical fiber, and is parallel with optic array surface; Y is vertical with optic array surface; Z is parallel with optical fiber.
2. waveguide device according to claim 1 is coupled automatically and encapsulates and the angle compensated scan method, it is characterized in that in the coarse alignment process it being the motorized precision translation stage motion that at first computer control is positioned at electronic sextuple micropositioning stage top, observe and show the charge-coupled image sensor and the display of waveguide device and fiber array joint face figure, electronic glue device and UV cure lamp are fixed on the motorized precision translation stage, make first charge-coupled image sensor (CCD1) camera lens move to the left end of waveguide device earlier, display is observed the left end upper surface of waveguide device and the upper surface of input array optical fiber, by observation to the image that amplified, judge the angle between the end face of the end face of first fiber array (1-1) and waveguide device input end, compare with setting value, move by the computer control micropositioning stage, regulate first fiber array (1-1), make the input end face of its end face and waveguide device parallel, the output terminal of waveguide device adopted use the same method, it is the coarse alignment of waveguide input end then: the image that the upper surface of observing waveguide input end and first fiber array (1-1) by first charge-coupled image sensor (CCD1) has amplified, the image that has amplified the side of observing waveguide input end and first fiber array (1-1) by second charge-coupled image sensor (CCD2), utilize these picture information to read coordinate figure and setting value comparison, the motion of the computer control first electronic sextuple micropositioning stage (2-1) realizes the input end of waveguide device and the coarse alignment of first fiber array (1-1), again second fiber array (1-2) is removed, utilize the display of computing machine to observe hot spot by tricharged coupled apparatus (CCD3) through waveguide device, when hot spot becomes when the brightest, just think that the coarse alignment of waveguide input end finishes, carry out the coarse alignment of waveguide output terminal again, the image that the upper surface of observing waveguide input end and second fiber array (1-2) by first charge-coupled image sensor (CCD1) has amplified, the image that has amplified the side of observing waveguide input end and second fiber array (1-2) by second charge-coupled image sensor (CCD2), utilize these picture information, the motion of the computer control second electronic sextuple micropositioning stage (2-2) realizes the output terminal of waveguide device and the aligning of second fiber array (1-2), when showing that first passage or K passage have the part luminous energy on the power meter, just think that the coarse alignment of waveguide output terminal finished, the K passage is any passage beyond the first passage.
3. waveguide device according to claim 1 and 2 is coupled automatically and encapsulates and the angle compensated scan method, it is characterized in that in the fine alignment process, realize the aligning of whole wave guide device by aiming at two preassigned passages, during elder generation fine alignment any one dedicated tunnel, after configuring sweep limit and step-length, the computer control micropositioning stage drives fiber array along X and Y scanning direction, gather the energy value on power meter or the photodetector simultaneously, micropositioning stage is along X, the Y direction is predefined by the scope of step scanning, after scanning was finished, computing machine will be drawn the three-dimensional energy distribution plan along X and Y direction with the performance number of noting, and finds out the position of energy maximum then, and commander's micropositioning stage drive fiber array moves to this position, this position is actually the maximum position of relative energy, and the maximum position of non-absolute energy is a starting point with the maximum position of this relative energy, determine an X again, the sweep limit of Y direction repeats top step, finds the maximum position of another relative energy; Repeat this process once more, till the maximum position that finds absolute energy, the first passage of waveguide device is aimed at and has just been finished like this, the beginning of the computer control second electronic sextuple micropositioning stage (2-2) is rotated along the Z direction then, the output waveguide N of waveguide device and the output optical fibre N of fiber array are aimed at, and N passage reading value on the power meter is P like this
N, N is the another one passage except that first passage, computing machine is by gathering the performance number P on the power meter
NAnd command the second electronic sextuple micropositioning stage (2-2) to rotate as feedback information it, up to finding P
NBe peaked position, when the second electronic sextuple micropositioning stage (2-2) rotated, the first passage of fiber array may depart from the optimum position, makes P
1Value diminishes, and when the second electronic sextuple micropositioning stage (2-2) rotates, needs to move along X and Y direction simultaneously, to keep the optimum position of fiber array first passage, makes P
1And P
NKeep maximal value simultaneously, realize the fine alignment of waveguide input end, find out the position of relative maximum energy value or setting energy value, repeat said process,, realize the fine alignment of a passage of waveguide input end up to the position of finding absolute maximum energy value.
4. waveguide device according to claim 3 is coupled automatically and encapsulates and the angle compensated scan method, it is characterized in that in the fine alignment process, what at first aim at is any one dedicated tunnel in first passage or the preceding N/2 passage, and then what aim at is any one dedicated tunnel in N/2 passage of last passage or back, the aligning of any one dedicated tunnel in N/2 passage of last passage or back is to realize by rotating around the Z axle, when rotating, by continuing to keep the energy value of any one dedicated tunnel in first passage or the preceding N/2 passage constant along the scanning of X and Y direction.
5. waveguide device according to claim 3 is coupled automatically and encapsulates and the angle compensated scan method, and the function expression of the track when it is characterized in that the fiber array motion is:
Or expression formula is: y=y
0+ kx is the T of mT＜x＜(m+1) wherein,
The integer of m 〉=1, y
0Be the setting constant with T;
Or function expression can be written as polar coordinates: r=r
0+ k θ is r wherein
0With k be normal.
6. waveguide device according to claim 3 is coupled automatically and encapsulates and the angle compensated scan method, it is characterized in that computing machine judges that the difference of the difference of a channel energy value and another dedicated tunnel energy value or maximum energy value in all passages and minimum energy value is whether minimum or be setting value, the scanning motion of controlling the second electronic sextuple micropositioning stage (2-2) reaches the equilibrium of each channel energy.
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2002
- 2002-06-13 CN CN 02115962 patent/CN1245646C/en not_active Expired - Lifetime
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| CN110727056A (en) * | 2019-09-05 | 2020-01-24 | 国科光芯(海宁)科技股份有限公司 | Full-automatic PLC chip coupling device, system and method |
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