CN1239929C - Polymer-based waveguide device and method for fabricating the same - Google Patents
Polymer-based waveguide device and method for fabricating the same Download PDFInfo
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- CN1239929C CN1239929C CN 02152004 CN02152004A CN1239929C CN 1239929 C CN1239929 C CN 1239929C CN 02152004 CN02152004 CN 02152004 CN 02152004 A CN02152004 A CN 02152004A CN 1239929 C CN1239929 C CN 1239929C
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- polymkeric substance
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Abstract
The present invention relates to a polymer-based waveguide device used as a light amplifier or a laser waveguide, which comprises a base, a polymer inner covering layer covered on the base, a channel waveguide positioned on the polymer inner covering layer and a polymer outer covering layer covered on the polymer inner covering layer and covering the channel waveguide, wherein the channel waveguide is made of at least one kind of rare-earth metal ion doped composition which can generate laser by activation. The making method of the waveguide device comprises the following steps: making the base, coating the polymer inner covering layer on the base, and drying for solidification; coating a second polymer with dissolved rare-earth metal ion doped composition on the surface of the polymer inner covering layer, and carrying out selective solidification and etching to form the channel waveguide; coating the polymer outer covering layer on the polymer inner covering layer and outside the channel waveguide, and drying for solidification. The waveguide device has excellent optical amplifying function and transmission function.
Description
[technical field]
The present invention relates to a kind of waveguide assembly and manufacture method thereof, refer to polymer-matrix waveguide assembly and manufacture method thereof especially as image intensifer or laser waveguide as image intensifer or laser waveguide.
[background technology]
In making the optical fiber process, rare earth ion is mixed in the fiber cores as gain media, use pump light directly to amplify, the gain of light is provided light signal.When making optical fiber, erbium ion is mixed the optical fiber of making in the fibre core is Er-doped fiber, its be commonly used in Erbium-Doped Fiber Amplifier (EDFA) (Erbium-Doped FiberAmplifier, EDFA) in, and can under the pump light effect, directly amplify flashlight, provide the critical piece of the gain of light.
United States Patent (USP) the 5th, 982, disclose a kind of er-doped slab type waveguide device 2 for No. 973, please refer to Fig. 3, its by a matrix 21, be formed at internal coated layer 22 on the matrix 21, cover the active guide layer 23 on the internal coated layer 22 and the outer covering layer 26 that is coated on the aforementioned active guide layer 23 constitutes.But this er-doped slab type waveguide device 2 should not be used as orthoron because of its tool is polarization correlated, and it is not only in required linear direction generation light amplification, and other direction also produces light amplification on the plane, and increases optical loss.In addition, the manufacturing cycle of this waveguide assembly is longer, thereby causes cost to increase.
[summary of the invention]
The object of the present invention is to provide and a kind ofly have that low signal-to-noise ratio, low polarization correlated, low string are scratched, the waveguide assembly as image intensifer or laser waveguide of high-gain.
Another object of the present invention is to provide a kind of method of easy, lower-cost manufacturing polymer-matrix waveguide assembly.
Polymer-matrix waveguide assembly of the present invention for achieving the above object, comprise that a matrix, covers polymkeric substance internal coated layer on the matrix, is placed in the polymkeric substance outer covering layer that channel waveguide and on this polymkeric substance internal coated layer covers on the polymkeric substance internal coated layer and coats this channel waveguide, this channel waveguide is intensified lasing rare earth ion doped and compounded thing and is made by at least a, and above-mentioned rare earth ion doped and compounded thing is rare earth ion is encapsulated in a kind of first polymkeric substance with polygamy position skeleton structure and forms.The manufacture method of this waveguide assembly comprises: prepare a matrix; Coating one polymkeric substance internal coated layer on matrix, and dry solidification; Be dissolved with second polymkeric substance of rare earth ion doped and compounded thing in this polymkeric substance internal coated layer surface applied, and carry out that selectivity is solidified and etching, and the formation channel waveguide, above-mentioned rare earth ion doped and compounded thing is rare earth ion is encapsulated in a kind of first polymkeric substance with polygamy position skeleton structure and forms; Coating one polymkeric substance outer covering layer outside polymkeric substance internal coated layer and channel waveguide, and dry solidification.
Compared to prior art, because the channel radio frequency channel and the matrix of polymer-matrix waveguide assembly of the present invention are settled abreast, and be placed on the polymkeric substance internal coated layer and be coated in the polymkeric substance outer covering layer, the rare earth ion concentration of channel waveguide improves in addition, and low signal-to-noise ratio, low polarization correlated, low string are scratched so this polymer-matrix waveguide assembly has during as image intensifer or laser waveguide, the advantage of high-gain; In addition, this polymer-matrix optical waveguide device is made material because of adopting polymkeric substance, so be easy to make, cost is lower.
[description of drawings]
Fig. 1 is the schematic cross-section of polymer-matrix waveguide assembly of the present invention.
Fig. 2 is the cut-open view of Fig. 1 along the II-II line.
Fig. 3 is the schematic cross-section of existing er-doped slab type waveguide device.
[embodiment]
Please refer to Fig. 1, polymer-matrix waveguide assembly 1 of the present invention can be used as image intensifer or laser waveguide, and it comprises a matrix 11, a polymkeric substance internal coated layer 12, a polymkeric substance outer covering layer 16 and a channel waveguide 13.Wherein this polymkeric substance internal coated layer 12 covers on the matrix 11, and channel waveguide 13 is placed on the polymkeric substance internal coated layer 12 and is coated in the polymkeric substance outer covering layer 16.Please be simultaneously with reference to Fig. 2, channel waveguide 13 in fact with matrix 11 arranged parallel.
Making this polymer-matrix waveguide assembly 1 can be undertaken by following four steps:
(1) preparation matrix 11, the material of matrix 11 can be monocrystalline silicon, polysilicon, lithium niobate monocrystal, quartz, optical glass or optical resin, and is stretched or the casting technique moulding by existing;
(2) coating forms polymkeric substance internal coated layer 12 on matrix 11, and dry solidification, and the material of polymkeric substance internal coated layer 12 is the resin that contains existing clad material, can apply as rotary spraying by existing coating method;
(3) form channel waveguide 13, at first the rare earth metal dopant ion is encapsulated in the polygamy position skeleton structure of first polymkeric substance, thereby form rare earth ion doped and compounded thing, afterwards this rare earth ion doped and compounded thing is dissolved in second polymkeric substance, and the formation coating material, then this coating material is coated in polymkeric substance internal coated layer 12 surfaces and upward forms an active layer, protect the subregion of this active layer at last, this first polymer coating is carried out selectivity solidify and etching, thereby form channel waveguide 13;
(4) coating forms polymkeric substance outer covering layer 16 outside polymkeric substance internal coated layer 12 and channel waveguide 13, and dry solidification, and the material of this polymkeric substance outer covering layer 16 is the resin that contains existing clad material, can apply as rotary spraying by existing coating method.
Wherein in step (3), compared to rare earth ion, rare earth ion is encapsulated in the compound that forms in first polymkeric substance, solubleness in second polymkeric substance improves, thereby improve the concentration of channel waveguide 13 middle rare earth metallic ions, improve the gain of light in this way, reduce signal to noise ratio (S/N ratio), polarization correlated and string is scratched.Aforementioned rare earth ion can be erbium (Er), thulium (Tm), holmium (Ho), praseodymium (Pr), samarium (Sm), cerium (Ce), ytterbium (Yb), neodymium (Nd), europium (Eu) or gadolinium (Gd) ion, and these rare earth ions can intensify generation laser.This first polymeric material can be optical resin or fluorinated polymer, and second polymeric material can be an optical resin, as polymethylmethacrylate.The method that applies this active layer can adopt prior aries such as rotary spraying, casting or RF sputter to carry out, and curing can adopt ultraviolet light polymerization, and engraving method can adopt wet etching.
Aforementioned polymer internal coated layer 12 and the 16 the most handy commaterial manufacturings of polymkeric substance outer covering layer, so that the two has identical refractive index, and be lower than the refractive index of channel waveguide 13, be beneficial to light signal and in channel waveguide 13, transmit, so after light signal inputs to this waveguide assembly, just can obtain an amplifying optical signals and transmission in channel waveguide 13.
The as above waveguide assembly of being built can be 12 of channel waveguide 13 and polymkeric substance internal coated layers, and 16 of channel waveguide 13 and polymkeric substance outer covering layers respectively acquisition have the obvious physics interfaces of refractive index classification.
When selecting unlike material, this polymer-matrix waveguide assembly 1 also can be built into has the physics interface that refractive index is successively decreased, at this moment, 12 of channel waveguide 13 and polymkeric substance internal coated layers, and essence forms the continually varying refractive index distribution of successively decreasing on the physics interface of 16 of channel waveguide 13 and polymkeric substance outer covering layers, promptly the vertical direction refractive index along channel waveguide 13 to polymkeric substance outer covering layer 21 is successively decreased, and the vertical direction refractive index along channel waveguide 13 to polymkeric substance outer covering layer 16 is successively decreased.
Be appreciated that polymer-matrix waveguide assembly 1 of the present invention also can comprise several channel waveguides 13.Under this kind situation, 13 placements parallel to each other of each channel waveguide, and parallel with matrix 11.In like manner, the differing heights place can set up the network structure of the channel waveguide 13 parallel with matrix 11 on matrix 11.
Claims (10)
1. polymer-matrix waveguide assembly, comprise a matrix, be formed at the internal coated layer on this matrix, be placed in the channel waveguide on this internal coated layer, and be coated on outer covering layer on this channel waveguide and the internal coated layer, it is characterized in that: this internal coated layer and outer covering layer are all polymer coating, and this channel waveguide is to be made by second polymkeric substance that is dissolved with rare earth ion doped and compounded thing, and this rare earth ion doped and compounded thing is rare earth ion is encapsulated in a kind of first polymkeric substance with polygamy position skeleton structure and forms.
2. polymer-matrix waveguide assembly according to claim 1 is characterized in that: the material of this matrix is selected from a kind of in monocrystalline silicon, polysilicon, lithium niobate monocrystal, quartz, optical glass and the optical resin.
3. polymer-matrix waveguide assembly according to claim 1, it is characterized in that: this rare earth ion is selected from erbium, thulium, holmium, praseodymium, samarium, cerium, ytterbium, neodymium, europium and the gadolinium ion at least a.
4. as polymer-matrix waveguide assembly as described in the claim 3, it is characterized in that: this first polymkeric substance is a fluorinated polymer.
5. polymer-matrix waveguide assembly according to claim 1 is characterized in that: the refractive index of this polymkeric substance internal coated layer and polymkeric substance outer covering layer is identical and be lower than the refractive index of channel waveguide.
6. polymer-matrix waveguide assembly according to claim 1, it is characterized in that: this channel waveguide is parallel with matrix.
7. as polymer-matrix waveguide assembly as described in the claim 6, it is characterized in that: this channel waveguide has several, and arrangement parallel to each other.
8. the manufacture method of a polymer-matrix waveguide assembly, it may further comprise the steps:
(1) preparation one matrix;
(2) coating forms a polymkeric substance internal coated layer on matrix, and dry solidification;
(3) be dissolved with second polymkeric substance of rare earth ion doped and compounded thing in aforementioned polymer internal coated layer surface applied, and carry out that selectivity is solidified and etching, and the formation channel waveguide, this rare earth ion doped and compounded thing is rare earth ion is encapsulated in a kind of first polymkeric substance with polygamy position skeleton structure and forms;
(4) coating one polymkeric substance outer covering layer outside polymkeric substance internal coated layer and channel waveguide, and dry solidification.
9. as the manufacture method of polymer-matrix waveguide assembly as described in the claim 8, it is characterized in that: this channel waveguide has several, and arrangement parallel to each other and parallel with matrix.
10. as the manufacture method of polymer-matrix waveguide assembly as described in the claim 8, it is characterized in that: this curing is to adopt ultraviolet light polymerization technology, and this etching is to adopt wet etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02152004 CN1239929C (en) | 2002-11-15 | 2002-11-15 | Polymer-based waveguide device and method for fabricating the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02152004 CN1239929C (en) | 2002-11-15 | 2002-11-15 | Polymer-based waveguide device and method for fabricating the same |
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| Publication Number | Publication Date |
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| CN1501106A CN1501106A (en) | 2004-06-02 |
| CN1239929C true CN1239929C (en) | 2006-02-01 |
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| CN 02152004 Expired - Fee Related CN1239929C (en) | 2002-11-15 | 2002-11-15 | Polymer-based waveguide device and method for fabricating the same |
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- 2002-11-15 CN CN 02152004 patent/CN1239929C/en not_active Expired - Fee Related
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Granted publication date: 20060201 Termination date: 20171115 |