CN1238118C - Horizontal resonance low frequency vibration exciter - Google Patents
Horizontal resonance low frequency vibration exciter Download PDFInfo
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- CN1238118C CN1238118C CN 01138700 CN01138700A CN1238118C CN 1238118 C CN1238118 C CN 1238118C CN 01138700 CN01138700 CN 01138700 CN 01138700 A CN01138700 A CN 01138700A CN 1238118 C CN1238118 C CN 1238118C
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Abstract
The present invention relates to a horizontal resonance low-frequency vibration exciter which mainly comprises an eccentric mass type vibration exciting unit, a fixed supporting unit and a horizontal conducting elastic unit, wherein the eccentric mass type vibration exciting unit provides energy for low-frequency resonance vibration; the eccentric mass type vibration exciting unit is supported by the fixed supporting unit; the horizontal conducting elastic unit is arranged on one side of the eccentric mass type vibration exciting unit. Different springs can be replaced so as to conveniently adjust and achieve the vibration force resonance output of different frequencies, so vibration force with large amplitude can be obtained as long as the eccentric mass type vibration exciting unit is adjusted to output moderate vibration force.
Description
Technical field
The invention relates to a kind of resonance vibrator, especially refer to a kind of horizontal resonance low frequency vibration exciter that is applicable to low frequency research.
Background technology
In the modern industrial environment, be full of the various parameters that influence the product manufacturing, and the influence that vibration factor is made for industrial products comes into one's own more and more recently.Because for the manufacturing of sophisticated product, for example manufacturing of semiconducter IC product, the influence of ambient vibration frequency is very great.And low frequency (frequency is approximately less than 12.5Hz) vibration is subjected to the manufacturing attention of sophisticated product (for example semiconductor) recently for the influence of sophisticated product (for example semiconductor) industry.Because, very easily run into the environment that has low-frequency vibration to be full of (for example high-speed railway pass through industrial working) in sophisticated product (for example semiconductor) manufacturing environment recently because the density of transport development and the raising of energy.So sophisticated product (for example semiconductor) instrument and equipment merchant and sophisticated product (for example semiconductor) manufacturing industry, all make great efforts to reduce the harmful effect that low-frequency vibration is made sophisticated product (for example semiconductor), and be devoted to the evaluation studies that low-frequency vibration is made sophisticated product (for example semiconductor).Thereby, need a kind of low frequency vibration exciter easily and effectively, produce vibration based on low frequency, with as this low frequency environments of simulation to provide research, improvement or the purposes of testing.And the vertical vibration amplitude of general transport development is suitable with the vibration background value of general environment, and also is easier to simulation reproduction (for example, southern science park).And in the horizontal vibration aspect, also about suitable in the Oscillation Amplitude that is higher than 12.5Hz with natural environment, be easier to simulation and reappear.But be not more than the horizontal low-frequency vibration of 12.5Hz for vibration frequency, especially in the low-frequency vibration between 2Hz to 3.5Hz, the horizontal vibration amplitude of natural background value and general transport development (for example high-speed railway) differs very big, therefore sophisticated product (for example semiconductor) manufacturing industry is needed badly and is wanted a kind of horizontal low frequency vibration exciter easily and effectively, with the usefulness of testing as the research of this low frequency environments of simulation.
And traditional low frequency vibration exciter, commonly used have an electromagnetic actuator, and its frequency that is suitable for is used for high frequency more, and low-frequency vibration is little feasible and be easy to fault.And a kind of centrifugal vibrator that is used for geo-logical terrain research is arranged in addition, then because volume is very huge, combination is wasted time and energy, and is only applicable to the geology vibration simulation of outdoor large civil engineering, and is not suitable for plant area or plant laboratory test or simulation use.Another kind of electromagnetic type inertia vibration generator is suitable for high-frequency excitation, even but the low frequency exciting but because vibration force is not enough, only is applicable to small-sized generation determinand.
Summary of the invention
Main purpose of the present invention is to provide a kind of assembling easy, and horizontal resonance low frequency vibration exciter simple in structure can produce or simulate the horizontal vibration that is mainly low frequency.
Another object of the present invention is to provide a kind of horizontal resonance low frequency vibration exciter, can adjust or simulate the horizontal vibration that is mainly low frequency easily.
Another object of the present invention is to provide one can utilize resonance to reach the vibration force of good good fortune.
For achieving the above object, horizontal resonance low frequency vibration exciter provided by the invention comprises:
One eccentric mass formula exciting unit is to provide the low-frequency resonance vibrational energy;
One fixed support unit is to support this eccentric mass formula exciting unit; And
One horizontal conductive Flexible element is arranged at a side of eccentric mass formula exciting unit, and the low-frequency resonance vibrational energy that makes eccentric mass formula exciting unit be produced can conduct to the horizontal conductive Flexible element.
Wherein this fixed support unit is constituted by screw rod.
Wherein the top of eccentric mass formula exciting unit is located in the fixed support unit, makes eccentric mass formula exciting unit and surface separation.
It also comprises at least one buffer cell that is connected between this fixed support unit and ground.
Wherein this horizontal conductive Flexible element comprises spring.
Wherein also comprise a connection unit, this connection unit is located at the opposite side of horizontal conductive Flexible element.
Description of drawings
Fig. 1 is the schematic diagram of horizontal resonance low frequency vibration exciter of the present invention.
Fig. 2 is an experimental data figure of the present invention.
The specific embodiment
For further understanding technology contents of the present invention, preferable concrete especially exemplified by horizontal resonance low frequency vibration exciter
Embodiment is described as follows.
Fig. 1 comprises 11, one fixed support unit, an eccentric mass formula exciting unit, 12, one horizontal conductive Flexible elements, 13, one buffer cells 14 for the schematic diagram of horizontal resonance low frequency vibration exciter 10 of the present invention, and a connection unit 15.
Wherein eccentric mass formula exciting unit 11 provides the low-frequency resonance vibrational energy, eccentric mass formula exciting unit 11 mainly is to utilize the spill spin block of an off-centre to do the motion of rotation with vibrative effect, because eccentric mass formula exciting unit 11 is a known devices, does not repeat them here its principle.
Fixed support unit 12 is eccentric mass formula exciting unit 11 to be fixed in support put the beams in place 40 in the present embodiment, so that fixedly eccentric mass formula exciting unit 11 is in a position and with surface separation and can need according to test environment, adjustment exciting unit 11 height, fixed support unit 12 can adopt as shown in the figure, and length-adjustable plural screw rod constitutes.Other has a buffer cell 14 to be arranged at the below of eccentric mass formula exciting unit 11, buffer cell 14 adopts vapour-pressure type bolster (as air bearing formula bolster) in the present embodiment, make eccentric mass formula exciting unit 11 level of freedom to be arranged at output exciting unit horizontal direction of vibration 90, and also have and reduce the possibility that fixed support unit 12 damages because of vibration, note it is that buffer cell 14 not necessarily needs in the present invention, and be complementary element.
Horizontal conductive Flexible element 13 is arranged at a side of eccentric mass formula exciting unit 11, horizontal conductive Flexible element 13 also adopts spring in the present embodiment, the vibration that eccentric mass formula exciting unit 11 sends can conduct to horizontal conductive Flexible element 13, and carries out the energy transmission of exciting unit horizontal direction of vibration 90.Horizontal conductive Flexible element 13 is a very important unique design in the present invention, and relevant acting on hereinafter of horizontal conductive Flexible element 13 can be described in detail.
By above-mentioned structure, the vibration that horizontal resonance low frequency vibration exciter 10 is produced can reach vibro-damping mount 20, and can measure a precision equipment 30 (as semiconductor manufacturing facility) suffered influence under different vibration states.
Illustrating promptly below why the present invention can reach known technology can't reach bigger vibration force under low frequency.The present invention mainly is that what to utilize is horizontal conductive Flexible element 13.With the spring is example, for example want to survey precision equipment 30 suffered influence under the situation of 2.5Hz, and be that torsion resistance at bigger vibration force and horizontal resonance low frequency vibration exciter 10 output vibration signals maintains for example below 5%, then, then can produce the effect of resonance as long as it is identical or near 2.5Hz suitably selecting the natural frequency (relevant with the coefficient of elasticity K and the moving-mass of spring) of spring.Therefore as long as adjust the vibration force of eccentric mass formula exciting unit 11 output appropriateness, can reach the vibration force of good good fortune, please refer to the experimental result of Fig. 2, Fig. 2 measures under different vibration frequencies, the accekeration that horizontal resonance low frequency vibration exciter 10 is exported, dark strip is represented to have under the situation of resonance, and light strip is represented not have under the situation of resonance, can find that from experimental result its acceleration obviously amplifies under the situation of resonance having, therefore the user can change different springs, to adjust the vibration force resonance output that reaches different frequency easily.And support unit 12 is fixed with suspension type because eccentric mass formula exciting unit 11 is fixed, and therefore the torsion resistance of output vibration signal maintains for example below 5%.
It should be noted that above-mentioned many embodiment give an example for convenience of explanation, such as fixed support unit 12 also can be installed in below of eccentric mass formula exciting unit 11 or the like.Protection scope of the present invention should but not only limit to the foregoing description with described being as the criterion of claim of application.
Claims (5)
1, a kind of horizontal resonance low frequency vibration exciter comprises:
One eccentric mass formula exciting unit is to provide the low-frequency resonance vibrational energy;
The top of eccentric mass formula exciting unit is located in one fixed support unit, makes eccentric mass formula exciting unit and surface separation; And
One horizontal conductive Flexible element is arranged at a side of eccentric mass formula exciting unit, and the low-frequency resonance vibrational energy that makes eccentric mass formula exciting unit be produced can conduct to the horizontal conductive Flexible element.
2, horizontal resonance low frequency vibration exciter as claimed in claim 1 is characterized in that, wherein this fixed support unit is constituted by screw rod.
3, horizontal resonance low frequency vibration exciter as claimed in claim 1 is characterized in that, wherein also comprises at least one buffer cell that is connected between this fixed support unit and ground.
4, horizontal resonance low frequency vibration exciter as claimed in claim 1 is characterized in that, wherein this horizontal conductive Flexible element comprises spring.
5, horizontal resonance low frequency vibration exciter as claimed in claim 1 is characterized in that, wherein also comprises a connection unit, and this connection unit is located at the opposite side of horizontal conductive Flexible element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01138700 CN1238118C (en) | 2001-12-29 | 2001-12-29 | Horizontal resonance low frequency vibration exciter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01138700 CN1238118C (en) | 2001-12-29 | 2001-12-29 | Horizontal resonance low frequency vibration exciter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1429667A CN1429667A (en) | 2003-07-16 |
| CN1238118C true CN1238118C (en) | 2006-01-25 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01138700 Expired - Fee Related CN1238118C (en) | 2001-12-29 | 2001-12-29 | Horizontal resonance low frequency vibration exciter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1238118C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101758016B (en) * | 2010-02-11 | 2011-12-14 | 北京国电富通科技发展有限责任公司 | Vibration exciter |
| CN105689247A (en) * | 2014-11-28 | 2016-06-22 | 天津锡跃科技有限公司 | Novel electromagnetic vibrator |
| CN108144831A (en) * | 2016-12-05 | 2018-06-12 | 南京圣威惠众机电技术有限公司 | A kind of integrated dynamic force measures and the adjustable rotation vibrator of resonant frequency in real time |
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2001
- 2001-12-29 CN CN 01138700 patent/CN1238118C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN1429667A (en) | 2003-07-16 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060125 Termination date: 20111229 |