CN1225017C - Fixing device of measuration meter for preventing measuration meter from burning - Google Patents
Fixing device of measuration meter for preventing measuration meter from burning Download PDFInfo
- Publication number
- CN1225017C CN1225017C CN 02136845 CN02136845A CN1225017C CN 1225017 C CN1225017 C CN 1225017C CN 02136845 CN02136845 CN 02136845 CN 02136845 A CN02136845 A CN 02136845A CN 1225017 C CN1225017 C CN 1225017C
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- meter
- holder
- flexible member
- shell body
- reative cell
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- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The present invention relates to a measurer fixing device which is used for fixing a measurer onto a reaction chamber covered with an outer shell. The measurer fixing device comprises a fixing plate fixed on the outer shell, a fixing seat which can be movably arranged on the fixing plate to be used for fixing the measurer and making one end of the measurer arranged between the outer shell and the reaction chamber, and a first elastic element arranged between the outer shell and the fixing seat to be used for abutting with the fixing seat in order to avoid that the measurer moves to the direction of the reaction chamber.
Description
Technical field
The present invention refers to can avoid in a kind of semiconductor processes equipment the meter fixture of meter burning especially about a kind of meter fixture.
Background technology
In semiconductor processes, can use the certain physical parameters of meter measuring process reative cell miscellaneous (chamber) to change situation usually, with the carrying out of supervision with control procedure.With a quartz reaction chamber that can carry out wafer annealing (anneal) under hot environment is example, is the variations in temperature situation of understanding reative cell, many thermometers can be set usually measuring the variations in temperature of this reative cell, and then the carrying out of supervision and control procedure.
See also Fig. 1, it is the structural representation of a conventional temperature meter fixture.As shown in Figure 1, be coated with an outer cover 12 outside this reative cell 11, the thermometer fixture then can make a thermometer 13 be fixed on the shell body 12.This thermometer fixture comprises a fixed head 21, a holder 22 and a screw 23.Wherein, fixed head 21 is fixed on the shell body 12, and 22 of holders are arranged on the fixed head 21 movably, in order to fixed thermometer 13 measuring junction of thermometer 13 are placed between shell body 12 and the reative cell 11.
See also Fig. 2, it is fixed head 21 vertical views shown in Figure 1.As shown in Figure 2, fixed head 21 has a groove 211 in contiguous its free-ended part, can slide on therebetween for screw 23.Holder 22 is arranged on the fixed head 21 movably, and can be positioned fixed head 21 by screw 23.Therefore, when the measuring junction of thermometer 13 moves to a suitable measuring position, holder 22 is fixed on the fixed head 21 screw 23 lockings, and then makes thermometer 13 location.
For a pyroreaction chamber, when thermometer 13 is located by this thermometer fixture, usually need measuring junction and the distance more than this reative cell maintenance 4-5mm with thermometer 13, this is because thermometer 13 as too near the words of this pyroreaction chamber 11, the measuring junction of thermometer 13 will Yin Gaowen and the damage of burning, can't be again for using.In addition, if the measuring junction of thermometer 13 is when reative cell 11 is too far away, the measured temperature of thermometer 13 is with incorrect, and it is very important for process device therefore how thermometer 13 to be remained secured to an appropriate location.
For traditional thermometer fixture, owing to use for a long time or the installing incorrectly of thermometer 13, can cause screw 23 to get loose usually and make thermometer 13 displacements, and then make thermometer 13 burning damages or measure inaccurate situation and take place.In addition, as shown in Figure 3, when an external force F puts on holder 22 or thermometer 13, will make thermometer 13 cause thermometer 13 burning damages toward the displacement of reative cell 11 directions.These phenomenons usually take place the pyroreaction chamber, and can't know for the operator when screw can get loose, till thermometer burning damage, therefore how to design one and can avoid the thermometer fixture of thermometer burning to be a research topic of the present invention in fact.
Summary of the invention
Main purpose of the present invention can be avoided thermometer burning damage and measure inaccurate situation generation for a kind of thermometer fixture is provided.
Another object of the present invention is for providing a kind of meter fixture, in order to fix on the reative cell that a meter to is coated with shell body.This meter fixture comprises: a fixed head, and it is fixed on this shell body; One holder, it is arranged on this fixed head movably, in order to fix this meter, an end of this meter is arranged between this shell body and this reative cell; And first flexible member, it is arranged between this shell body and this holder, avoids this meter to move to this reative cell direction in order to replace this holder, to use.
According to conception of the present invention, wherein a thermometer is counted in this measurement.
According to conception of the present invention, wherein a pressure gauge is counted in this measurement.
According to conception of the present invention, wherein this first flexible member is a spring.
According to conception of the present invention, wherein an end of this first flexible member is fixed in this shell body, and the other end is then replaced this holder.
According to conception of the present invention, wherein this meter fixture more comprises second flexible member, its be arranged at this shell body and this holder between, give this holder in order to a restoring force to be provided, use and avoid this meter to move to this reative cell direction.
According to conception of the present invention, the length that is shorter in length than this first flexible member of this second flexible member wherein.
According to conception of the present invention, wherein the rigidity of this second flexible member is stiffer than the rigidity of this first flexible member.
According to conception of the present invention, wherein an end of this second flexible member is fixed in this shell body, the other end then when this holder when this reative cell direction moves and contacts this other end, in order to replace this holder.
According to conception of the present invention, wherein this second flexible member is a spring.
According to conception of the present invention, wherein this fixed head has a groove.
According to conception of the present invention, wherein this meter fixture has more a lock member, and it passes this groove of this fixed head and locks mutually with this holder, uses so that this meter in the holder is fixed in an ad-hoc location.
Another purpose of the present invention is for providing a kind of meter structure, is applied to a reative cell that is coated with shell body, and this meter structure comprises: a fixed head, and it is fixed on this shell body; One holder has an accommodation space and is arranged at movably on this fixed head; One meter, one end are placed in this accommodation space of this holder, and the other end then places between this shell body and this reative cell, in order to measure one of this reative cell physical parameter; And one first flexible member, it is arranged between this shell body and this holder, avoids this meter to move to this reative cell direction in order to replace this holder, to use.
A further object of the present invention is for providing a kind of reaction chamber structure of avoiding the meter burning, and it comprises: a reative cell; One shell body, it is covered in outside this reative cell; One fixed head, it is connected in this shell body; One holder has an accommodation space and is arranged at movably on this fixed head; One measuring appliance, one end are placed in this accommodation space of this holder, and the other end then places between this shell body and this reative cell, in order to measure a physical parameter of this reative cell; And first flexible member, it is arranged between this shell body and this holder, avoids this meter to move and burn to this reative cell direction in order to replace this holder, to use.
According to conception of the present invention, wherein this fixed head is to be shaped in this shell body.
According to conception of the present invention, wherein this fixed head is fixed in this shell body by a jockey.
Description of drawings
The present invention must be by following accompanying drawing and detailed description, in order to do a more deep understanding:
Fig. 1: it is the structural representation of a conventional temperature meter fixture.
Fig. 2: it is a fixed head vertical view shown in Figure 1.
Fig. 3: it illustrates that an external force puts on the structural representation of thermometer fixture shown in Figure 1.
Fig. 4: it is the thermometer fixture structure schematic diagram of preferred embodiment of the present invention.
Embodiment
See also Fig. 4, it is for the thermometer fixture structure schematic diagram of preferred embodiment of the present invention.As shown in Figure 4, thermometer of the present invention and thermometer fixture are applied in the employed pyroreaction of the semiconductor process chamber 41, and in order to measure and the variations in temperature situation that monitors this reative cell 41, wherein this pyroreaction chamber 41 is covered by a shell body 42.
The thermometer fixture of thermometer burning of avoiding of the present invention comprises a fixed head 51, a holder 52 and first flexible member 54 at least.Wherein, fixed head 51 is to be fixed on the shell body 42,52 of holders are arranged on the fixed head 51 movably, make in order to fixed thermometer 43 measuring junction of thermometer 43 placed shell body 42 and reative cell 41 between, first flexible member 54 then is arranged between shell body 42 and the holder 52, move to reative cell 41 directions in order to replace holder 52, to use the measuring junction of avoiding thermometer 43.Below illustrate one by one with regard to each thin portion element of above-mentioned preferred embodiment:
Fixed head 51 is fixed in the one end on the shell body 42 by a Connection Element (not shown).Certainly, in another embodiment, fixed head 51 also can be connected with this shell body 42 one-body moldedly.In addition, fixed head 51 then has a groove (not shown) in contiguous its free-ended part, can supply a lock member 53, and the best is a screw, slides on therebetween.
52 of holders have an accommodation space (not shown) can be fixed an end of thermometer 43, and the other end (that is measuring junction) of thermometer 43 is placed between shell body 42 and the reative cell 41, in order to measure the variations in temperature situation of reative cell 41.In addition, holder 52 is to be arranged at movably on this fixed head 51, and can be positioned fixed head 51 by lock member 53.Therefore, when the measuring junction of thermometer 43 moves to a suitable measuring position, holder 52 is fixed on the fixed head 53 these lock member 53 lockings, and then makes thermometer 43 location.
One end of first flexible member 54 is fixed in shell body 42, and the other end is then replaced holder 52.By this, when lock member 53 gets loose because of use or external force intervention for a long time, first flexible member will provide an elastic force to give holder 52, damage to displacement of reative cell 41 directions and burning with the measuring junction of avoiding thermometer 43.In addition, more because the elastic force effect of first flexible member 54, thermometer 43 will be shifted toward the direction relative with reative cell 41, and the observer can discover temperature and change suddenly significantly, and then perceives lock member 53 and get loose.Therefore not only can avoid thermometer 43 burning damages by the design of first flexible member 54, also can easily discover and the situation that screw gets loose, can avoid measuring the inaccurate situation of temperature and take place.
In addition, when holder 52 is subjected to an external impacts, first flexible member 54 can provide an elastic-restoring force to give holder 52, uses the measuring junction of avoiding this thermometer 43 and is shifted to reative cell 41 directions, and cause thermometer contact pyroreaction chambers 41 43 and the burning damage.Therefore, the design of this first flexible member 54 influence that also can avoid external impacts to produce.Certainly, above-mentioned first flexible member 53 is best with the spring.
In another preferred embodiment, thermometer fixture of the present invention more can be strengthened the impact of this thermometer fixture to external force by the design of second flexible member 55.As shown in Figure 4, this second flexible member 55 is arranged between shell body 42 and the holder 52, and an end of this second flexible member 55 is fixed in shell body 42, another free end then when holder 52 because of an external force effect when reative cell 41 directions are shifted, can be in order to replace this holder 52 and to provide an elastic-restoring force that this holder is rebounded.So can avoid external impacts and cause thermometer these pyroreaction chambers 41 of contact 43 and the burning damage.In addition, for strengthening the impact of this thermometer fixture to external force, the length system of second flexible member 55 is shorter than the length of first flexible member 54, and the rigidity of second flexible member 55 more is stiffer than the rigidity of first flexible member 54.Certainly, above-mentioned second flexible member is good with spring also.
Meter fixture of the present invention is not limited to the described thermometer fixture of above-mentioned most preferred embodiment, for knowing the personage of this technology, the meter fixture of required use in any process device, for example pressure gauge fixture etc. also can be incorporated reference at this.
Indulge the above, thermometer fixture of the present invention not only can be avoided thermometer burning damage by the design of flexible member, also can easily discover the situation that screw gets loose, and takes place to avoid the measuring inaccurate situation of temperature.In addition, when holder was subjected to an external impacts, flexible member also can provide an elastic-restoring force to give holder, used the measuring junction of avoiding thermometer and was shifted to the reative cell direction, and cause thermometer contact pyroreaction chamber and the damage of burning.So value of the real tool industry of the present invention.
The present invention can make various modifications for being familiar with present technique person, and these modifications all should not break away from following claim scope.
Claims (22)
1, a kind of meter fixture, in order to fix on the reative cell that a meter to is coated with shell body, this meter fixture comprises:
One fixed head, it is fixed on this shell body, and this fixed head has a groove;
One holder, it is arranged on this fixed head movably, in order to fix this meter, an end of this meter is arranged between this shell body and this reative cell;
One lock member, it passes this groove of this fixed head and locks mutually with this holder, uses so that this meter in the holder is fixed in an ad-hoc location; And
First flexible member, it is arranged between this shell body and this holder, avoids this meter to move to this reative cell direction in order to replace this holder, to use.
2, meter fixture as claimed in claim 1 is characterized in that, a thermometer is counted in this measurement.
3, meter fixture as claimed in claim 1 is characterized in that, a pressure gauge is counted in this measurement.
4, meter fixture as claimed in claim 1 is characterized in that, this first flexible member is a spring.
5, meter fixture as claimed in claim 1 is characterized in that, an end of this first flexible member is fixed in this shell body, and the other end is then replaced this holder.
6, meter fixture as claimed in claim 1, it is characterized in that this meter fixture also comprises second flexible member, it is arranged between this shell body and this holder, avoid this meter to move in order to provide a restoring force to give this holder, to use to this reative cell direction.
7, meter fixture as claimed in claim 6 is characterized in that, the length that is shorter in length than this first flexible member of this second flexible member.
8, meter fixture as claimed in claim 6 is characterized in that, the rigidity of this second flexible member is stiffer than the rigidity of this first flexible member.
9, meter fixture as claimed in claim 6 is characterized in that, an end of this second flexible member is fixed in this shell body, the other end then when this holder when this reative cell direction moves and contacts this other end, in order to replace this holder.
10, meter fixture as claimed in claim 6 is characterized in that, this second flexible member is a spring.
11, a kind of meter structure is applied to a reative cell that is coated with shell body, and this meter structure comprises:
One fixed head, it is fixed on this shell body, and this fixed head has a groove;
One holder has an accommodation space and is arranged at movably on this fixed head; One meter, one end are placed in this accommodation space of this holder, and the other end then places between this shell body and this reative cell, in order to measure one of this reative cell physical parameter;
One lock member, it passes this groove of this fixed head and locks mutually with this holder, uses so that this meter in the holder is fixed in an ad-hoc location; And
First flexible member, it is arranged between this shell body and this holder, avoids this meter to move to this reative cell direction in order to replace this holder, to use.
12, meter structure as claimed in claim 11, it is characterized in that this meter structure comprises second flexible member, it is arranged between this shell body and this holder, avoid this meter to move in order to provide a restoring force to give this holder, to use to this reative cell direction.
13, meter structure as claimed in claim 12 is characterized in that, the length that is shorter in length than this first flexible member of this second flexible member.
14, meter structure as claimed in claim 12 is characterized in that, the rigidity of this second flexible member is stiffer than the rigidity of this first flexible member.
15, meter structure as claimed in claim 12 is characterized in that, an end of this second flexible member is fixed in this shell body, the other end then when this holder when this reative cell direction moves and contacts this other end, in order to replace this holder.
16, a kind of reaction chamber structure of avoiding the meter burning, it comprises:
One reative cell;
One shell body, it is covered in outside this reative cell;
One fixed head, it is connected on this shell body, and this fixed head has a groove;
One holder has an accommodation space and is arranged at movably on this fixed head;
One meter, one end are placed in this accommodation space of this holder, and the other end then places between this shell body and this reative cell, in order to measure a physical parameter of this reative cell;
One lock member, it passes this groove of this fixed head and locks mutually with this holder, uses so that this meter in the holder is fixed in an ad-hoc location; And
First flexible member, it is arranged between this shell body and this holder, avoids this meter to move and burn to this reative cell direction in order to replace this holder, to use.
17, the reaction chamber structure of avoiding the meter burning as claimed in claim 16 is characterized in that this fixed head is to be shaped in this shell body.
18, the reaction chamber structure of avoiding the meter burning as claimed in claim 16 is characterized in that this fixed head is fixed in this shell body by a jockey.
19, the reaction chamber structure of avoiding the meter burning as claimed in claim 16, it is characterized in that, this is avoided the reaction chamber structure of meter burning also to comprise second flexible member, it is arranged between this shell body and this holder, avoid this meter to move in order to provide a restoring force to give this holder, to use to this reative cell direction.
20, the reaction chamber structure of avoiding the meter burning as claimed in claim 19 is characterized in that the length that is shorter in length than this first flexible member of this second flexible member.
21, the reaction chamber structure of avoiding the meter burning as claimed in claim 19 is characterized in that the rigidity of this second flexible member is stiffer than the rigidity of this first flexible member.
22, the reaction chamber structure of avoiding the meter burning as claimed in claim 20, it is characterized in that, one end of this second flexible member is fixed in this shell body, the other end then when this holder when this reative cell direction moves and contacts this other end, in order to replace this holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136845 CN1225017C (en) | 2002-09-06 | 2002-09-06 | Fixing device of measuration meter for preventing measuration meter from burning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02136845 CN1225017C (en) | 2002-09-06 | 2002-09-06 | Fixing device of measuration meter for preventing measuration meter from burning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1481006A CN1481006A (en) | 2004-03-10 |
| CN1225017C true CN1225017C (en) | 2005-10-26 |
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ID=34146708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02136845 Expired - Fee Related CN1225017C (en) | 2002-09-06 | 2002-09-06 | Fixing device of measuration meter for preventing measuration meter from burning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1225017C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100490798C (en) * | 2001-11-13 | 2009-05-27 | 协和发酵麒麟株式会社 | Quick disintegrated tablet or oral cavity disintegrated tablet containing L-glutamic acid and azulene sodium sulfonate and making method thereof |
-
2002
- 2002-09-06 CN CN 02136845 patent/CN1225017C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100490798C (en) * | 2001-11-13 | 2009-05-27 | 协和发酵麒麟株式会社 | Quick disintegrated tablet or oral cavity disintegrated tablet containing L-glutamic acid and azulene sodium sulfonate and making method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1481006A (en) | 2004-03-10 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111129 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20111129 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051026 Termination date: 20180906 |
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| CF01 | Termination of patent right due to non-payment of annual fee |