CN1224003C - 旋转轴的倾斜修正方法 - Google Patents
旋转轴的倾斜修正方法 Download PDFInfo
- Publication number
- CN1224003C CN1224003C CN 03124162 CN03124162A CN1224003C CN 1224003 C CN1224003 C CN 1224003C CN 03124162 CN03124162 CN 03124162 CN 03124162 A CN03124162 A CN 03124162A CN 1224003 C CN1224003 C CN 1224003C
- Authority
- CN
- China
- Prior art keywords
- turning axle
- inclination
- rotary substrate
- correction method
- conquassation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 38
- 238000012937 correction Methods 0.000 title claims abstract description 35
- 238000007514 turning Methods 0.000 claims description 128
- 239000000758 substrate Substances 0.000 claims description 37
- 230000001105 regulatory effect Effects 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000007689 inspection Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000003754 machining Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000002715 modification method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
Images
Landscapes
- Manufacture Of Motors, Generators (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002129208 | 2002-04-30 | ||
| JP2002129208A JP4080232B2 (ja) | 2002-04-30 | 2002-04-30 | 回転軸の傾き補正方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1455391A CN1455391A (zh) | 2003-11-12 |
| CN1224003C true CN1224003C (zh) | 2005-10-19 |
Family
ID=29267682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03124162 Expired - Fee Related CN1224003C (zh) | 2002-04-30 | 2003-04-30 | 旋转轴的倾斜修正方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4080232B2 (ja) |
| CN (1) | CN1224003C (ja) |
-
2002
- 2002-04-30 JP JP2002129208A patent/JP4080232B2/ja not_active Expired - Fee Related
-
2003
- 2003-04-30 CN CN 03124162 patent/CN1224003C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1455391A (zh) | 2003-11-12 |
| JP4080232B2 (ja) | 2008-04-23 |
| JP2003322169A (ja) | 2003-11-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: NIDEC SANKYO CORP. Free format text: FORMER NAME OR ADDRESS: SANKYO SEIKI MFG. SEISAKUSHO K.K. |
|
| CP03 | Change of name, title or address |
Address after: Japan, Suwa, Nagano Patentee after: Sankyo Seiki Seisakusho KK Address before: Japan, Suwa, Nagano Patentee before: Sankyo Seiki Manufacturing Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051019 Termination date: 20110430 |