CN1223536C - Gas outlet end rotary connection device for PCVD deposit lathe - Google Patents
Gas outlet end rotary connection device for PCVD deposit lathe Download PDFInfo
- Publication number
- CN1223536C CN1223536C CN 02139131 CN02139131A CN1223536C CN 1223536 C CN1223536 C CN 1223536C CN 02139131 CN02139131 CN 02139131 CN 02139131 A CN02139131 A CN 02139131A CN 1223536 C CN1223536 C CN 1223536C
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- CN
- China
- Prior art keywords
- main shaft
- magnetic
- bearing
- fixed housing
- lathe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The present invention relates to a rotating joint device of an exhaust end of a lathe of PCVD deposition, which is a further improvement of the existing rotating joint device. The rotating joint device of the present invention comprises a main shaft and a supporting seat, a driving belt wheel which is connected with the main shaft is installed on one side of the supporting seat, and a fixed outer shell is arranged on the other side of the supporting seat; a bearing for supporting the main shaft is installed inside the fixed outer shell; the tail end of the fixed outer shell is a tail gas discharging outlet. The device is characterized in that a magnetic shaft which is connected with the main shaft is installed inside the fixed outer shell; the magnetic shaft is supported by the bearing; magnetic fluid which can be matched with the magnetic shaft is arranged on the side of the bearing to form magnetic fluid seal between the main shaft and the fixed outer shell. The device has the advantages of superior sealing performance of positive pressure and negative pressure, high temperature resistance, high corrosion resistance, high operating reliability and long effective service life; the normal operation of the lathe of PCVD deposition can be ensured, and consequently the processing quality of preformed rods of optical fibers can be improved; the device also has the characteristics of simple and compact structure, reasonable arrangement, small friction moment and high running efficiency.
Description
Technical field
The present invention relates to the rotary joint device of a kind of PCVD of being used for depositing lathe outlet side, is the further improvement to existing rotary joint device.
Background technology
Plasma Enhanced Chemical Vapor Deposition (PECVD) is that PCVD technology is one of main method of processing preform, and the PCVD depositing lathe then is a key equipment of implementing PCVD technology.The work piece of PCVD technology is the glass bushing pipe, add man-hour, the glass lined tube support is between inlet end swivel joint and outlet side rotary joint device, on the one hand the glass bushing pipe is at the uniform velocity rotated, be the sealing that will keep glass bushing pipe two ends and rotary joint device on the other hand, the leakage of gas prevents that simultaneously outside air from entering in the pipe in avoiding managing.Because the glass bushing pipe is at high temperature to carry out deposition process, and the gas that discharges after the deposition reaction has certain corrodibility, so just make the PCVD Deposition Lathe-side Outlet Rotary Joint Device be under a kind of state of high temperature corrosion and turn round that its sealing property is related to the processing quality of preform and the security of processing.The sealing member of the existing PCVD of being used for Deposition Lathe-side Outlet Rotary Joint Device mostly adopts the rubber o-ring structure, this sealed structure not only is easy to wearing and tearing, and high temperature resistant, poor corrosion resistance, thereby, during use, usually cause the seal failure of rotary joint device, exist work-ing life short, maintenance is frequent, the disadvantage of poor reliability.
Summary of the invention
Problem to be solved by this invention is the deficiency that exists at above-mentioned prior art and a kind of PCVD Deposition Lathe-side Outlet Rotary Joint Device that possesses the excellent sealing performance is provided that it is corrosion-and high-temp-resistant not only, and long service life, the reliability height.
The present invention for the technical scheme that problem adopted of the above-mentioned proposition of solution is: include main shaft 2 and supporting base 5, one side of supporting base is installed on the drive pulley that links with main shaft, the opposite side of supporting base is provided with fixed housing 14, be installed on the bearing 8 of supporting spindle in the fixed housing, the tail end of fixed housing is an exhaust port, its difference is to be installed in the fixed housing magnetic axle 10 that links with main shaft, the magnetic axle is supported by bearing, be provided with magnetic fluid 11 with magnetic axle phase configuration in the bearing side, constitute the magnetic current sealing between main shaft and fixed housing, be provided with an annular air cavity in the rear end of magnetic axle, annular air cavity joins by a through hole 12 and a pressure gas source.
Press such scheme,, can install watercooling jacket 1 in the anterior periphery of main shaft for the temperature of reduction discharging tail gas and the operating temperature of rotary joint device.
The present invention has brought following beneficial effect by adopting magnetic current sealing: have good positive negative-pressure sealing performance 1.; 2. high temperature resistant, corrosion resistance nature is strong, the working reliability height, acceptable life is long, can guarantee the normal operation of PCVD depositing lathe, thereby improves the processing quality of preform; 3. tightness system moves under the state that does not have the wearing and tearing low resistance, and not only moment of friction is little, running efficiency is high, and does not have the wear particle generation, has improved the cleanliness factor of system of processing; 4. simple and compact for structure, be provided with rationally, install watercooling jacket, the operating performance of device is further improved.
Description of drawings
Fig. 1 is the positive view of one embodiment of the invention.
Embodiment
Further specify embodiments of the invention below in conjunction with accompanying drawing, include main shaft 2 and supporting base 5, one side of supporting base is installed on the drive pulley of drive shaft running, drive pulley is made of the gear teeth 3 and the synchronous cog belt 4 that link with main shaft, opposite side at supporting base is installed on fixed housing 14, fixed housing front end and supporting base link, be supported with the magnetic axle 10 of shell-like in it by bearing 8, bearing shaft is to locating with back-up ring 9 and nut 6, the magnetic axle sleeve is connected to the main shaft back segment, its endoporus is provided with twice O-ring seals 7, stopping property with intensifier, perhaps the magnetic axle can be linked into one with main shaft, is provided with magnetic fluid 11 with magnetic axle phase configuration at the rear side of bearing, constitutes the magnetic current sealing between main shaft and fixed housing.Be provided with an annular air cavity in the rear end of magnetic axle, annular air cavity joins by a through hole 12 and a pressure gas source, in order to isolated corrodibility tail gas to the influence of magnetic fluid with deteriorate.The tail end of fixed housing is provided with exhaust port 13; In addition, the anterior periphery at main shaft 2 is provided with a watercooling jacket 1.Also can belt cooling water channel be set magnetic fluid 11 peripheries in fixed housing 14, go in ring cooling water channel and entery and delivery port join, with the operating temperature of further reduction rotary joint device and magnetic fluid seal.
Claims (6)
1, a kind of PCVD Deposition Lathe-side Outlet Rotary Joint Device, include main shaft (2) and supporting base (5), one side of supporting base is installed on the drive pulley that links with main shaft, the opposite side of supporting base is provided with fixed housing (14), be installed on the bearing (8) of supporting spindle in the fixed housing, the tail end of fixed housing is an exhaust port, it is characterized in that being installed in the fixed housing magnetic axle (10) that links with main shaft, the magnetic axle is supported by bearing, be provided with magnetic fluid (11) with magnetic axle phase configuration in the bearing side, constitute the magnetic current sealing between main shaft and fixed housing, be provided with an annular air cavity in the rear end of magnetic axle, annular air cavity joins by a through hole (12) and a pressure gas source.
2, by the described PCVD Deposition Lathe-side Outlet Rotary Joint Device of claim 1, it is characterized in that installing watercooling jacket (1) in the anterior periphery of main shaft.
3, by claim 1 or 2 described PCVD Deposition Lathe-side Outlet Rotary Joint Devices, it is characterized in that fixed housing front end and supporting base link, be supported with the magnetic axle (10) of shell-like in it by bearing (8).
4, by the described PCVD Deposition Lathe-side Outlet Rotary Joint Device of claim 3, it is characterized in that the magnetic axle sleeve is connected to the main shaft back segment, its endoporus is provided with twice O-ring seals (7).
5, by the described PCVD Deposition Lathe-side Outlet Rotary Joint Device of claim 3, it is characterized in that magnetic axle and main shaft are linked into one.
6, by claim 4 or 5 described PCVD Deposition Lathe-side Outlet Rotary Joint Devices, it is characterized in that magnetic fluid (11) periphery is provided with belt cooling water channel in fixed housing (14), go in ring cooling water channel and entery and delivery port join.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02139131 CN1223536C (en) | 2002-09-30 | 2002-09-30 | Gas outlet end rotary connection device for PCVD deposit lathe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02139131 CN1223536C (en) | 2002-09-30 | 2002-09-30 | Gas outlet end rotary connection device for PCVD deposit lathe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1401601A CN1401601A (en) | 2003-03-12 |
| CN1223536C true CN1223536C (en) | 2005-10-19 |
Family
ID=4749910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02139131 Expired - Lifetime CN1223536C (en) | 2002-09-30 | 2002-09-30 | Gas outlet end rotary connection device for PCVD deposit lathe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1223536C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102249532A (en) * | 2011-04-15 | 2011-11-23 | 长飞光纤光缆有限公司 | Optical fiber preform deposition lathe for PCVD (plasma chemical vapor deposition) processing |
| CN103775649B (en) * | 2014-01-15 | 2016-03-02 | 中国科学院半导体研究所 | Sealed gearing device |
| CN105221752B (en) * | 2015-08-03 | 2017-08-29 | 张海娟 | The rotating shaft tubular type piecing devices of magnet fluid sealing |
| CN112499957B (en) * | 2020-12-18 | 2021-11-23 | 长飞光纤光缆股份有限公司 | Multi-channel rotary chuck of PCVD lathe |
-
2002
- 2002-09-30 CN CN 02139131 patent/CN1223536C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1401601A (en) | 2003-03-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: FIBERHOME FUJIKURA OPTIC TECHNOLOGY Co.,Ltd. Assignor: FIBERHOME TELECOMMUNICATION TECHNOLOGIES Co.,Ltd. Contract fulfillment period: 2005.12.12 to 2011.12.11 Contract record no.: 2008420010008 Denomination of invention: Gas outlet end rotary connection device for PCVD deposit lathe Granted publication date: 20051019 License type: Exclusive license Record date: 20080926 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENCE; TIME LIMIT OF IMPLEMENTING CONTACT: 2005.12.12 TO 2011.12.11 Name of requester: FIBERHOME FUJIKURA FIBER SCIENCE AND TECHNOLOGY C Effective date: 20080926 |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20051019 |