CN1206460A - Vibration gyroscope - Google Patents
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- CN1206460A CN1206460A CN 97191508 CN97191508A CN1206460A CN 1206460 A CN1206460 A CN 1206460A CN 97191508 CN97191508 CN 97191508 CN 97191508 A CN97191508 A CN 97191508A CN 1206460 A CN1206460 A CN 1206460A
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Abstract
A piezoelectric unit (80) is composed of piezoelectric elements (60 and 70). A driving electrode (22) is provided over the whole lower surface of the piezoelectric element (60). A driving electrode (21) is provided over the whole surface between the piezoelectric elements (60 and 70). The driving electrodes (21 and 22) are connected to a driving signal source (90). Detection electrodes (31-34) are provided on the upper surface (71) of the piezoelectric element (70). The detection electrodes (31 and 34) are connected to one of output terminals (50) and the detection electrodes (32 and 33) are connected to the other of the output electrodes (50). The piezoelectric element (70) is polarized upward and the piezoelectric element (60) is polarized downward. A vertical 1st order vibration is driven in a longitudinal direction and a 2nd order bending vibration is detected by the detection electrodes (31-34) and a voltage proportional to a Coriolis force (rotational angular velocity) is outputted. With this constitution, a vibration gyroscope which does not need the sticking to facilitate the cost reduction and whose thickness and width can be reduced can be realized.
Description
The present invention relates to a kind of gyrotron.Especially, relate to the gyrotron that uses in a kind of navigation at automobile etc. etc.
Shown in Figure 11, be the oblique view of existing gyrotron structure.The structure of this gyrotron is: stickup exciting piezoelectricity ceramics 3 and detection piezoelectricity ceramics 4 on the permanent elastic metallic tablet type ticker 1 of square cross section arranged.The major axes orientation of this perseverance elastic metallic tablet type ticker 1 is a Z-direction, and the normal direction on one group of relative plane is an X-axis, and the normal direction of another group is a Y-axis.Above-mentioned ticker 1 supported nail 2a, 2b, 2c, 2d are supporting.
The following describes the gyrostatic action of this structural vibrations.Electric signal excitation exciting piezoelectricity ceramics 3 by from the source driving signal (not shown) produces flexural vibrations in the X-axis face of this ticker.At this moment,, just produce compound centripetal force, and produce vibration in Y direction in the direction vertical with the X-axis face if add with the Z axle to be the angular velocity of rotation at center.At this moment, detect the vibration of Y direction with piezoelectricity ceramics 4, just can measure angular velocity of rotation by above-mentioned detection.
In existing gyrotron, owing to will be glued together permanent elastic metallic and piezoelectricity ceramics, just the high problem of manufacturing cost has appearred.
And, owing to become long shape, make when being assemblied in the electronic equipment along turning axle (Z axle) direction, be difficult to satisfy device miniaturization, the requirement of slimming.
Therefore, fundamental purpose of the present invention, provide a kind of do not need bonding, thereby the gyrotron that manufacturing cost is reduced.
Another object of the present invention is to provide a kind of and can realize slimming and the gyrotron of changing in a narrow margin.
The inventor's result of study is: on the ticker that piezoelectric element is formed excitation electrode is set, evoke along its length vibration by this excitation electrode, by the thickness direction with above-mentioned ticker is that compound centripetal force (Coriolis force) that the angular velocity of turning axle produces evokes the flexural vibrations in the face vertical with above-mentioned turning axle, and detect above-mentioned flexural vibrations by the detecting electrode that is arranged on the above-mentioned ticker, obtain angular velocity of rotation thus, this as can be seen structure has excellent characteristic.
In addition, on the contrary, when evoking flexural vibrations, the compound centripetal force that is produced by the angular velocity along above-mentioned turning axle evokes ticker vibration along its length, and detect by the detecting electrode that is arranged on the above-mentioned ticker, same reason also can be measured angular velocity of rotation.
To the electric signal of the resonant frequency of the sub-length direction of excitation electrode inputted vibration, ticker just produces extensional vibration.In this state, if add that the thickness direction with ticker is the angular velocity of rotation of turning axle, just with all vertical direction of turning axle and extensional vibration direction two directions on produce compound centripetal force.By compound centripetal force and the extensional vibration that produces, in plane, produce flexural vibrations by compound centripetal direction and the decision of extensional vibration direction.The detecting electrode that only detects this flexural vibrations is arranged on the part of above-mentioned vibrating mass, just can measures angular velocity of rotation.
According to the gyrotron of above-mentioned formation, only when on piezoelectric element etc., forming excitation electrode and detecting electrode and realize the angular velocity of rotation sensor, compare with existing gyrotron, simple in structure, manufacturing cost reduces significantly.
In addition, in the said structure, thickness direction with ticker is made turning axle, by be arranged on detecting electrode on the ticker detect with this turning axle vertical plane in flexural vibrations, shape is narrowed down, attenuation is compared with the gyrotron of existing three-dimensional structure, can realize the miniaturization of sensor.
Based on above viewpoint, according to the 1st embodiment of the present invention, provide a kind of gyrotron, it is characterized in that comprising:
The ticker of forming by piezoelectric element, be fixed on the excitation electrode that can evoke a kind of vibration in extensional vibration and flexural vibrations of above-mentioned ticker on the above-mentioned ticker and be fixed on the detecting electrode that can detect the another kind vibration of above-mentioned ticker in extensional vibration and flexural vibrations on the above-mentioned ticker.
Preferably above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration patterns.
According to the 2nd embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that comprising:
The ticker that piezoelectric element is formed, be fixed on the excitation electrode of a kind of vibration in the length direction vibration that can evoke above-mentioned ticker on the above-mentioned ticker and the flexural vibrations and be fixed on the extensional vibration that can detect above-mentioned ticker on the above-mentioned ticker and detecting electrode that the another kind in the flexural vibrations vibrates with orthogonal length and width, thickness direction.
Preferably the vibration of above-mentioned length direction is extensional vibration, and the turning axle of ticker is on thickness direction, and flexural vibrations are in the plane internal vibration vertical with thickness direction.
Preferably above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration pattern.
Further preferably above-mentioned ticker has, evokes the exciting part of ticker and detects the test section in the vibration and the above-mentioned another kind of vibration in the above-mentioned flexural vibrations of above-mentioned length direction of ticker, and excitation electrode is fixed on the above-mentioned exciting part, detecting electrode is fixed on the above-mentioned test section, and above-mentioned exciting part and test section are stacked on thickness direction.
Perhaps, above-mentioned vibrating mass has the exciting part that evokes ticker and detects the test section of ticker in the another kind vibration of the vibration of above-mentioned length direction or flexural vibrations, and above-mentioned excitation electrode is fixed on the above-mentioned exciting part, detecting electrode is fixed on the above-mentioned test section, and exciting part and test section can the parallel settings of direction in the face of length direction that comprises above-mentioned rectangular parallelepiped or Width.
In addition, in the 2nd embodiment of the present invention, preferably above-mentioned excitation electrode is being provided with the vertical substantially plane parallel of above-mentioned thickness direction ground, and the above-mentioned piezoelectric element between above-mentioned excitation electrode polarizes on above-mentioned thickness direction; Above-mentioned detecting electrode with the vertical substantially plane parallel setting of above-mentioned thickness direction, the part that above-mentioned piezoelectric element is provided with detecting electrode polarizes on above-mentioned thickness direction.
In addition, in the 2nd embodiment of the present invention, preferably above-mentioned detecting electrode is positioned opposite to each other on above-mentioned thickness direction, and the piezoelectric element between above-mentioned detecting electrode respect to one another polarizes on thickness direction.
In addition, in the 2nd embodiment of the present invention, preferably above-mentioned detecting electrode or excitation electrode with the vertical substantially plane parallel setting of above-mentioned Width, the piezoelectric element between detecting electrode or between excitation electrode polarizes on above-mentioned length direction.
In addition, in the 2nd embodiment of the present invention, preferably above-mentioned detecting electrode or excitation electrode are symmetrical arranged on above-mentioned Width.
In addition, in the 2nd embodiment of the present invention, preferably the turning axle of above-mentioned ticker is positioned on the thickness direction of ticker, and above-mentioned detecting electrode is with respect to claiming to be provided with vertical substantially the facing of the above-mentioned Width that contains turning axle.
According to the 3rd embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that comprising:
By the ticker that piezoelectric element is formed, be fixed on the exciting electrode on the above-mentioned ticker and be fixed on detecting electrode on the above-mentioned ticker with orthogonal length and width, thickness direction.
Above-mentioned exciting electrode with the vertical substantially plane parallel setting of thickness direction, the piezoelectric element between exciting electrode polarizes on thickness direction.
The turning axle of above-mentioned ticker is positioned on the thickness direction of ticker.
Above-mentioned detecting electrode is with respect to containing above-mentioned turning axle and in the face of claim be provided with parallel with length direction.
According to the 4th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that:
Have a plurality of piezoelectric element layers ticker that the piezoelectric unit of stacked formation on the thickness direction is formed, these a plurality of piezoelectric element layers in polarization on the thickness direction, on the thickness direction of the above-mentioned first stacked piezoelectric electric device, insert the above-mentioned excitation electrode that is provided with on a kind of electrode of constituting in excitation electrode and the detecting electrode, the interarea vertical and the another kind of electrode in the detecting electrode with thickness at the above-mentioned second stacked piezoelectric element, promptly on the direction of vibration of flexural vibrations, divide excitation electrode or the detecting electrode that is arranged.
According to the 5th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that:
Has the ticker that tabular piezoelectric element is formed; With vertical substantially two interareas of above-mentioned ticker thickness direction on, with the size of the length direction of above-mentioned ticker about 1/3～2/3, exciting respect to one another is set respectively or detects the excitation electrode of vibration along its length and a kind of electrode in the detecting electrode; Other parts at the length direction of above-mentioned ticker are provided with the another kind of electrode in above-mentioned excitation electrode and the detecting electrode, promptly divide the excitation electrode or the detecting electrode of the flexural vibrations that are arranged on the direction of vibration of flexural vibrations.
According to the 6th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that:
Has the ticker that tabular piezoelectric element is formed; With the center section of the Width of the vertical substantially above-mentioned ticker of interarea of above-mentioned ticker thickness direction, a kind of electrode in excitation electrode and the detecting electrode is set along its length; Another kind of electrode in above-mentioned excitation electrode and the detecting electrode is set in the both sides of the above-mentioned Width of above-mentioned excitation electrode, is the excitation electrode or the detecting electrode of flexural vibrations.
The polarised direction of the ticker that best above-mentioned piezoelectric element constitutes is parallel with its thickness direction.
According to the 7th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that:
Has the ticker that tabular piezoelectric element is formed; With a side of the length direction of vertical substantially the 1st liang of interarea of above-mentioned ticker thickness direction, above-mentioned ticker, be oppositely arranged a kind of electrode in excitation electrode and the detecting electrode, by the polarised direction of the part of the excitation electrode of above-mentioned piezoelectric element and the above-mentioned a kind of electrode clamping in the detecting electrode as thickness direction; On vertical substantially the 2nd liang of interarea of the part that excitation electrode is not set at above-mentioned ticker and ticker width, be oppositely arranged the another kind of electrode in excitation electrode and the detecting electrode respectively, be the excitation electrode or the detecting electrode of flexural vibrations, the polarised direction of the another kind of interelectrode above-mentioned piezoelectric element in the excitation electrode of above-mentioned flexural vibrations and the detecting electrode is parallel with above-mentioned length direction.
According to the 8th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that comprising:
The exciting device of ticker, the extensional vibration that can evoke above-mentioned ticker and a kind of vibration in the flexural vibrations and can detect the pick-up unit of the another kind vibration in above-mentioned extensional vibration and the flexural vibrations.
According to the 9th embodiment of the present invention, a kind of gyrotron is provided, it is characterized in that having:
Tabular ticker, can evoke a kind of exciting device in vibration on the length direction of above-mentioned ticker or the flexural vibrations and can detect vibration on the above-mentioned length direction of above-mentioned ticker and the alternative pick-up unit in the flexural vibrations.
Preferably the vibration of above-mentioned length direction be the turning axle of extensional vibration, above-mentioned ticker on the thickness direction of above-mentioned ticker, above-mentioned flexural vibrations are in the predetermined surface internal vibration vertical with above-mentioned thickness direction.
Preferably above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration pattern.
Figure 1A～1C is the figure of the gyrotron of the explanation embodiment of the invention 1, and wherein, Figure 1A is an oblique view, and Figure 1B, 1C are the plane sketches.
Fig. 2 is the performance plot that concerns between the angular velocity of gyrotron of the expression embodiment of the invention 1 and the output voltage.
Fig. 3 is the oblique view of the gyrotron of the explanation embodiment of the invention 2.
Fig. 4 is the oblique view of the gyrotron of the explanation embodiment of the invention 3.
Fig. 5 is the oblique view of the gyrotron of the explanation embodiment of the invention 4.
Fig. 6 is the oblique view of the gyrotron of the explanation embodiment of the invention 5.
Fig. 7 is the oblique view of the gyrotron of the explanation embodiment of the invention 6.
Fig. 8 A～8C is the figure of the gyrotron of the explanation embodiment of the invention 7, and wherein, Fig. 8 A is the oblique view of seeing from the gyrotron top, and Fig. 9 B is the oblique view of seeing from the gyrotron below, and Fig. 8 C is the side view of seeing from the X8-X8 direction.
Fig. 9 A, 9B is the figure of the gyrotron of the explanation embodiment of the invention 8.Fig. 9 A is the oblique view of seeing from the gyrotron top, and Fig. 8 B is the oblique view of seeing from the gyrotron below.
Figure 10 A-10C is the figure of the gyrotron of the explanation embodiment of the invention 9, and wherein, Figure 10 A is the oblique view of seeing from the gyrotron top, and Figure 10 B is the oblique view of seeing from the gyrotron below, and Figure 10 C is the side view of seeing from the X10-X10 direction.
Figure 11 is the oblique view of the existing gyrotron of explanation.
Below, with reference to the description of drawings embodiments of the invention.(embodiment 1)
Shown in Figure 1A～1C, the gyrotron 100 of present embodiment has the piezoelectric unit 80 of rectangular parallelepiped, and piezoelectric unit 80 is by two piezoelectric elements 60 and 70 stacked composition on thickness direction T.
Excitation electrode 22 is arranged on following 62 the whole bottom surface of following piezoelectric element 60.On piezoelectric element 60 61 and above the bottom surface 72 of piezoelectric element 70 between, excitation electrode 21, excitation electrode 21 that ground connection is set link to each other with source driving signal 90 with 22.
Detecting electrode 31～34 is set on 71 on piezoelectric element 70, being provided with of detecting electrode 31～34 is divided into four parts to top 71 of piezoelectric element 70.Detecting electrode 31 with 33 with respect to contain turning axle Z, parallel with length direction L, vertical plane symmetry setting with Width W.Detecting electrode 32 with 34 also with respect to containing turning axle Z, parallel with length direction L, vertical plane symmetry setting with Width W.Detecting electrode 31 links to each other by lead 41 with 34, and detecting electrode 32 links to each other by lead 42 with 33.Detecting electrode 32 links to each other with an end of output terminal 50 by output lead 52, and detecting electrode 34 links to each other with the other end of output terminal 50 by output lead 51.
Piezoelectric unit 80 forms by piezoelectric ceramics is integral sintered.The polarised direction of top piezoelectric element 70 makes progress along thickness direction T, and the polarised direction of following piezoelectric element 60 is downward along thickness direction T.
By the planimetric map of piezoelectric gyroscope 100 as can be seen, turning axle Z is located at the central authorities of length direction L and the central authorities of Width W.The support of piezoelectric gyroscope 100 can be bonded at middle body with silicon rubber and fix.
Below, the action of this piezoelectric gyroscope 100 is described.When this piezoelectric gyroscope begins to move, at first, be added on excitation electrode 21 and 22 from the drive signal of source driving signal 90, excitation piezoelectric element 60, and excitation forms whole piezoelectric element 70 with piezoelectric element 60 thus.In the present embodiment, on length direction L, evoke vertically once vibration.In the static occasion of piezoelectric gyroscope 100, shown in Figure 1B, the electric charge homophase that on detecting electrode 31～34, occurs, thus current potential is identical, and the output on the output terminal 50 just shows as zero.
When piezoelectric gyroscope 100 when turning axle Z rotates, shown in Fig. 1 C, on the direction vertical (being Width W in the present embodiment) direction vertical, produce compound centripetal force, thereby produce flexural vibrations, particularly crooked secondary vibration with turning axle Z with extensional vibration.For example, in certain moment shown in Fig. 1 C, be provided with the part elongation of detecting electrode 31,34, the part that is provided with detecting electrode 32,33 is shunk.The result makes the opposite polarity that occurs on the electric charge that occurs on the detecting electrode 31,34 and the detecting electrode 32,33, the voltage that is directly proportional with compound centripetal force (angular velocity of rotation) from output terminal 50 outputs.
In addition, at this moment, if when detecting crooked secondary vibration mould by vertical 1 mode of vibration exciting piezoelectrics, vertical 1 vibration and crooked 2 vibrations combine and can obtain very big output.In addition, a vertical vibration mode and crooked secondary vibration pattern in conjunction with the time, when piezoelectric unit 80 wide long concerned W/L=0.28, effect was good especially.This point all is same being suitable for for the piezoelectric element 10 among the embodiment 2～9 that narrates below.
Have a fling at this gyrotron 100 below, and measured its characteristic.The gyrotron 100 that has a fling at is of a size of: long L=29mm, wide W=7.5mm, thick t=1.4mm.Electrode is that the Ag-Pd sintering forms.The angular velocity of the gyrotron of making like this 100 and the relation of output voltage are as shown in Figure 2.The output voltage and the angular velocity that obtain roughly are directly proportional.(embodiment 2)
As shown in Figure 3, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape.The excitation electrode 121 of ground connection side is set, 11 the left half side excitation electrode 122 that is provided with on piezoelectric element 10 on the whole bottom surface 12 of piezoelectric element 10.Excitation electrode 121 is connected with source driving signal 90 with 122.
11 right half parts on piezoelectric element 10 are provided with detecting electrode 131 and 132.Detecting electrode 131 and the 132 right half part broad ways at piezoelectric element 10 halve and are provided with.And detecting electrode 131 with 132 with contain turning axle Z, parallel with length direction L, vertical with Width W plane is that the plane of symmetry is symmetrical arranged.Detecting electrode 131 links to each other with an end of output terminal 50 by output lead 51, and detecting electrode 132 links to each other with the other end of output terminal 50 by output lead 52.
When piezoelectric gyroscope 100 when turning axle Z rotates, similarly, thereby produce compound centripetal force and produce crooked secondary vibration.For example, in certain moment, be provided with the part elongation of detecting electrode 131, the part that is provided with detecting electrode 132 is shunk.The result makes the opposite polarity that occurs on the electric charge that occurs on the detecting electrode 131 and the detecting electrode 132, the voltage that is directly proportional with compound centripetal force (angular velocity of rotation) from output terminal 50 outputs.(embodiment 3)
As shown in Figure 4, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape.The excitation electrode 221 of ground connection side is set on the whole bottom surface 12 of piezoelectric element 10,11 length direction L center section is provided with excitation electrode 222 on piezoelectric element 10, its length is about piezoelectrics 10 in 1/3 of the length of length direction, and the width that this electrode part is set is exactly Width W whole of piezoelectric element 10.Excitation electrode 221 is connected with source driving signal 90 with 222.
On piezoelectric element 10 11 along its length the left side 1/3 part, detecting electrode 231 and 233 are set, 1/3 part on right side is provided with detecting electrode 232 and 234.Detecting electrode 231 with 233 with contain turning axle Z, parallel with length direction L, vertical with Width W plane is that the plane of symmetry is symmetrical arranged, detecting electrode 232 and 234 also is like this.Detecting electrode 231 links to each other by lead 241 with 234, and detecting electrode 232 links to each other by lead 242 with 233.Detecting electrode 232 links to each other with an end of output terminal 50 by output lead 52, and detecting electrode 234 links to each other with the other end of output terminal 50 by output lead 51.
As shown in Figure 5, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape.The excitation electrode 321 of ground connection side is set on the whole bottom surface 12 of piezoelectric element 10.The center section of 11 Width W is provided with excitation electrode 322 on piezoelectric element 10, has 1/3 size of the length of about piezoelectric element 10 Width W, and the length of this electrode part is exactly length direction L whole of piezoelectric element 10.Excitation electrode 321 links to each other with source driving signal 90 with 322.
On piezoelectric element 10, on outside 1/3 part detecting electrode 333 and 334 are set on the 11 Width W, on 1/3 part inwards, detecting electrode 331 and 332 are set.Detecting electrode 331 and 333 is to contain turning axle Z, and parallel with the length L direction, vertical with width W direction W plane is that the plane of symmetry is symmetrical arranged, and detecting electrode 332 and 334 also is like this.Detecting electrode 331 links to each other by lead 341 with 334, and detecting electrode 332 links to each other by lead 342 with 333.Detecting electrode 332 links to each other with an end of output terminal 50 by lead 52, and detecting electrode 334 links to each other with the other end of output terminal 50 by output lead 51.
As shown in Figure 6, the gyrotron in this example 100 has the piezoelectric element 10 of rectangular shape.Left-half in the bottom surface 12 of piezoelectric element 10 is provided with the excitation electrode 421 of ground connection side, and 11 left-half on piezoelectric element 10 is provided with excitation electrode 422. Excitation electrode 421 and 422 direction polarization that the thickness direction T of piezoelectric element 10 makes progress between the two.Excitation electrode 421 links to each other with source driving signal 90 with 422.
11 right half part on piezoelectric element 10 on the side 13,14 vertical with Width W, is provided with detecting electrode 431,432 respectively.Detecting electrode 431 with 432 with contain turning axle Z, parallel with length direction L, vertical with Width W plane is that the plane of symmetry is symmetrical arranged.Detecting electrode 431 and 432 length direction L direction polarizations to the right along the piezoelectric element between the two 10.Detecting electrode 431 links to each other by an end of output lead 51 and output terminal 50, and detecting electrode 432 links to each other by the other end of output lead 52 and output terminal 50.
When piezoelectric gyroscope 100 when turning axle Z rotates, similarly, produce coriolis force, thereby and produce crooked secondary vibration.For example, in certain moment, be provided with the part elongation of detecting electrode 431, the part that is provided with detecting electrode 432 is shunk.The result makes the opposite polarity that occurs on the electric charge that occurs on the detecting electrode 431 and the detecting electrode 432, the voltage that is directly proportional with compound centripetal force (angular velocity of rotation) from output terminal 50 outputs.(embodiment 6)
Represent as Fig. 7, the gyrotron 100 of present embodiment, basic identical with the structure of the gyrotron of the foregoing description 5, the action situation is also identical.In the gyrotron 100 of present embodiment; in order to prevent; leak drive signal from excitation electrode 421,422 by the distributed capacitance on the detecting electrode 431,432; be provided with banded guard electrode 423 between excitation electrode 421,422 and detecting electrode 431,432, the current potential of guard electrode 423 is identical with the excitation electrode 421 of ground connection side.(embodiment 7)
Shown in Fig. 8 A～8C, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape, and its polarised direction along thickness direction T upwards.
In the gyrotron 100 of the foregoing description 2, only on the whole bottom surface 12 of piezoelectric element 10, form the excitation electrode 121 of ground connection side, and in the gyrotron 100 of present embodiment, on top 11 and the bottom surface 12 of piezoelectric element 10, all form with embodiment 2 in top 11 identical electrode structures of gyrotron 100.Compare with the gyrotron 100 of embodiment 2, the electric charge quantitative change that obtains thus is big, the power gain height, and signal to noise ratio (S/N ratio) also improves.(embodiment 8)
Shown in Fig. 9 A, 9B, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape, and its polarised direction along thickness direction T upwards.
In the gyrotron 100 of the foregoing description 3, only on the whole bottom surface 12 of piezoelectric element 10, form the excitation electrode 221 of ground connection side, and in the gyrotron 100 of present embodiment, on top 11 and the bottom surface 12 of piezoelectric element 10, all form with embodiment 3 in top 11 identical electrode structures of gyrotron 100.Compare with the gyrotron 100 of embodiment 3, the electric charge quantitative change that obtains thus is big, the power gain height, and signal to noise ratio (S/N ratio) also improves.(embodiment 9)
Shown in Figure 10 A～10C, the gyrotron 100 of present embodiment has the piezoelectric element 10 of rectangular shape, and its polarised direction along thickness direction T upwards.
In the gyrotron 100 of the foregoing description 4, only on the whole bottom surface 12 of piezoelectric element 10, form the excitation electrode 321 of ground connection side, and in the gyrotron 100 of present embodiment, on top 11 and the bottom surface 12 of piezoelectric element 10, all form with embodiment 4 in top 11 identical electrode structures of gyrotron 100.Compare with the gyrotron 100 of embodiment 4, the electric charge quantitative change that obtains thus is big, the power gain height, and signal to noise ratio (S/N ratio) also improves.
In the various embodiments described above, although understand and to evoke extensional vibration, detect the situation of flexural vibrations, also can use same structural vibrations gyroscope, evoke flexural vibrations, detect the situation of extensional vibration, operating principle is identical with the former.
In addition, in the various embodiments described above,, be not limited to piezoelectric ceramics, LiNbO though adopt piezoelectric ceramics as piezoelectric element 10,60,70
3, LiTaO
3, monocrystal such as crystal all can adopt.Monocrystalline may form single magnetic domain when growth, the piezoelectric element 60,70 of embodiment 1 for example, embodiment, 3,4,7,8,9 piezoelectric element 10, as long as the polarised direction in each piezoelectric element all is identical, just be provided with monocrystal is cut into electrode for well, the polarization after just becoming different electrode when not needing to adopt piezoelectric ceramics and forming is handled.In addition, if the polarised direction of single crystals piezoelectric unit in this case just needn't be limited on the thickness direction and polarize can exciting, detect above-mentioned extensional vibration and flexural vibrations.
In addition, preferably to adopt Ag, Ag-Pd, Pt be the electrode that metal sintering obtains for excitation electrode, detecting electrode and guard electrode.The electrode that also available employing Au, Al evaporation or sputter form.
According to above explanation, among the present invention, only form electrode to realize angle speed at piezoelectric element The degree sensor is compared with existing vibratory gyroscope, and is simple in structure, the manufacturing cost decrease.
In addition, because shape narrows down, attenuation is compared with the vibratory gyroscope of existing three-dimensional structure, Can realize the miniaturization of sensor.
Therefore, vibratory gyroscope of the present invention is specially adapted to the upper vibrations of using of navigation such as automobile Gyroscope.
Claims (22)
1. gyrotron is characterized in that comprising:
The ticker that piezoelectrics constitute, be fixed on the excitation electrode of a kind of vibration in the extensional vibration that can evoke above-mentioned ticker on the above-mentioned ticker and the flexural vibrations and be fixed on the extensional vibration that can detect above-mentioned ticker on the above-mentioned ticker and flexural vibrations in the detecting electrode that vibrates of another kind.
2. gyrotron according to claim 1 is characterized in that:
Above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration patterns.
3. gyrotron is characterized in that comprising:
The ticker that piezoelectric element is formed with orthogonal length and width, thick direction, be fixed on the excitation electrode of a kind of vibration in the extensional vibration that can evoke above-mentioned ticker on the above-mentioned ticker and the flexural vibrations and be fixed on the extensional vibration that can detect above-mentioned ticker on the above-mentioned ticker and flexural vibrations in the detecting electrode that vibrates of another kind.
4. gyrotron according to claim 3 is characterized in that:
The vibration of above-mentioned length direction is extensional vibration, and the turning axle of above-mentioned ticker is positioned on the ticker thickness direction, and above-mentioned flexural vibrations are in the plane internal vibration vertical with above-mentioned thickness direction.
5. gyrotron according to claim 4 is characterized in that:
Above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration pattern.
6. gyrotron according to claim 5 is characterized in that:
Above-mentioned ticker comprises: evoke the exciting part of above-mentioned ticker vibration and detect the vibration of length direction of ticker or flexural vibrations in the test section of above-mentioned another kind of vibration; Above-mentioned excitation electrode is fixed on the above-mentioned exciting part, and above-mentioned detecting electrode is fixed on the above-mentioned test section; Above-mentioned exciting part and test section are stacked on thickness direction.
7. gyrotron according to claim 5 is characterized in that:
Above-mentioned ticker comprises: evoke the exciting part of above-mentioned ticker vibration and detect the vibration of length direction of ticker or flexural vibrations in the test section of above-mentioned another kind of vibration; Above-mentioned excitation electrode is fixed on the above-mentioned exciting part, and above-mentioned detecting electrode is fixed on the above-mentioned test section, and above-mentioned exciting part and test section be parallel setting on the direction in the face of length direction that comprises above-mentioned rectangular parallelepiped and Width.
8. gyrotron according to claim 3 is characterized in that:
Above-mentioned excitation electrode with the vertical plane parallel setting of thickness direction, the piezoelectric element between above-mentioned excitation electrode polarizes on thickness direction; Above-mentioned detecting electrode with the slightly vertical plane parallel setting of thickness direction, the piezoelectric element part that detecting electrode is set polarizes on thickness direction.
9. gyrotron according to claim 3 is characterized in that:
Above-mentioned detecting electrode is arranged opposite to each other on thickness direction, and the piezoelectric element between above-mentioned detecting electrode respect to one another polarizes on thickness direction.
10. gyrotron according to claim 3 is characterized in that:
Above-mentioned detecting electrode or excitation electrode with the slightly vertical plane parallel setting of Width, the piezoelectric element between above-mentioned detecting electrode or excitation electrode polarizes along its length.
11. gyrotron according to claim 3 is characterized in that:
Above-mentioned detecting electrode or excitation electrode are symmetrical arranged on Width.
12. gyrotron according to claim 3 is characterized in that:
The turning axle of above-mentioned ticker is positioned on the thickness direction of ticker, and above-mentioned detecting electrode is with respect to containing turning axle, becoming to be symmetrical arranged with the vertical substantially face of Width.
13. a gyrotron is characterized in that comprising:
The ticker that mutually perpendicular length direction is arranged that constitutes by piezoelectric element; Be fixed on the excitation electrode on the above-mentioned ticker; With the detecting electrode that is fixed on the above-mentioned ticker,
Above-mentioned excitation electrode with the vertical substantially plane parallel setting of thickness direction, the above-mentioned piezoelectric element between above-mentioned excitation electrode polarizes on thickness direction,
The turning axle of above-mentioned ticker is positioned on the thickness direction of ticker,
Above-mentioned detecting electrode contains turning axle relatively and the face parallel with length direction becomes to be symmetrical arranged.
14. a gyrotron is characterized in that:
Have by a plurality of piezoelectric element layers ticker that the stacked piezoelectrics that form rhythmo structure constitute on thickness direction, the polarised direction of these a plurality of piezoelectric element layers is parallel to thickness direction, also comprise a kind of electrode in excitation electrode and the detecting electrode, this electrode constitutes the above-mentioned piezoelectric body layer that constitutes the 1st laminate portion on above-mentioned thickness direction in the above-mentioned a plurality of piezoelectric body layers of clamping, and the exciting of flexural vibrations or detecting electrode, this electrode is the another kind of electrode in above-mentioned excitation electrode and the above-mentioned detecting electrode, be located at above-mentioned a plurality of piezoelectric body layers in constitute on the basic vertical interarea of above-mentioned thickness direction of above-mentioned piezoelectric body layer of the 2nd lamination, and on the direction of vibration of flexural vibrations, separate setting.
15. a gyrotron is characterized in that:
Has the ticker that tabular piezoelectric element constitutes; With vertical substantially two interareas of the thickness direction of above-mentioned ticker on, with the size of the lengthwise dimension of above-mentioned ticker about 1/3～2/3, exciting respect to one another is set respectively or detect the excitation electrode of above-mentioned length direction vibration and detecting electrode in a kind of electrode; On the other parts of the length direction of above-mentioned ticker, the another kind of electrode in above-mentioned excitation electrode and the detecting electrode is set, i.e. the excitation electrode of the flexural vibrations that on the direction of vibration of flexural vibrations, separate or detecting electrode.
16. a gyrotron is characterized in that:
Has the ticker that tabular piezoelectric element constitutes; With the zone line of the Width of the above-mentioned ticker of the vertical substantially interarea of the thickness direction of above-mentioned ticker, along the length direction of above-mentioned ticker a kind of electrode in excitation electrode and the detecting electrode is set; Be provided with in the above-mentioned excitation electrode in the both sides of above-mentioned excitation electrode Width and the another kind of electrode of detecting electrode, be the excitation electrode or the detecting electrode of flexural vibrations.
17. gyrotron according to claim 15 is characterized in that:
The polarised direction of the ticker that is made of above-mentioned piezoelectric element is parallel with its thickness direction.
18. a gyrotron is characterized in that:
Has the ticker that tabular piezoelectric element constitutes; With the length direction of vertical substantially the 1st liang of interarea of the thickness direction of described ticker, above-mentioned ticker on a side, a kind of electrode in excitation electrode positioned opposite to each other and the detecting electrode, making the described a kind of electrode by in excitation electrode and the detecting electrode of above-mentioned piezoelectric element be entreated the polarised direction of the part of holding is described thickness direction; On the 2nd liang of interarea that the part of institute's excitation electrode and the thickness direction of above-mentioned ticker are vertical substantially on above-mentioned ticker is not provided with, another kind of electrode in excitation electrode respect to one another and the detecting electrode is set respectively, be the excitation electrode or the detecting electrode of flexural vibrations, the polarised direction of the interelectrode piezoelectric element of above-mentioned another kind in the flexural vibrations of last institute in institute's excitation electrode and the last institute detecting electrode is parallel to institute's length direction.
19. a gyrotron is characterized in that comprising:
A kind of exciting device of vibration and can detect the pick-up unit of the another kind vibration in above-mentioned extensional vibration and the flexural vibrations in ticker, the extensional vibration that can evoke above-mentioned ticker and the flexural vibrations.
20. a gyrotron is characterized in that comprising:
Tabular ticker, can evoke the exciting device of a kind of vibration in vibration on the length direction of above-mentioned ticker or the flexural vibrations and can detect vibration on the above-mentioned length direction of above-mentioned ticker and the pick-up unit of the vibration of the another kind in the flexural vibrations.
21. the gyrotron according to claim 20 is characterized in that:
The vibration of above-mentioned length direction is extensional vibration, and the turning axle of above-mentioned ticker is positioned on the thickness direction of ticker, and above-mentioned flexural vibrations are in the in plane vibration vertical with above-mentioned thickness direction.
22. the gyrotron according to claim 21 is characterized in that:
Above-mentioned extensional vibration is a vertical vibration mode, and above-mentioned flexural vibrations are crooked secondary vibration pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97191508 CN1206460A (en) | 1996-10-29 | 1997-10-24 | Vibration gyroscope |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP303758/96 | 1996-10-29 | ||
| CN 97191508 CN1206460A (en) | 1996-10-29 | 1997-10-24 | Vibration gyroscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1206460A true CN1206460A (en) | 1999-01-27 |
Family
ID=5178998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97191508 Pending CN1206460A (en) | 1996-10-29 | 1997-10-24 | Vibration gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1206460A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101339028B (en) * | 2008-08-14 | 2010-08-18 | 上海交通大学 | All solid dual spindle gyroscopes possessing double nested square shape groove structure piezoelectric vibrator |
| CN101339026B (en) * | 2008-08-14 | 2010-09-22 | 上海交通大学 | All solid dual spindle gyroscopes possessing square through-hole piezoelectric vibrator |
| CN101339025B (en) * | 2008-08-14 | 2010-12-01 | 上海交通大学 | All solid dual spindle gyroscopes possessing square surface cuboid piezoelectric vibrator |
| CN103199733A (en) * | 2013-03-22 | 2013-07-10 | 北京大学 | Piezoelectric actuator and manufacturing method thereof |
| CN102679969B (en) * | 2002-02-06 | 2016-07-06 | 美国亚德诺半导体公司 | Gyroscope including the device of multiple resonance structures and the micro-manufactured with orthogonal suppression |
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
-
1997
- 1997-10-24 CN CN 97191508 patent/CN1206460A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679969B (en) * | 2002-02-06 | 2016-07-06 | 美国亚德诺半导体公司 | Gyroscope including the device of multiple resonance structures and the micro-manufactured with orthogonal suppression |
| CN101339028B (en) * | 2008-08-14 | 2010-08-18 | 上海交通大学 | All solid dual spindle gyroscopes possessing double nested square shape groove structure piezoelectric vibrator |
| CN101339026B (en) * | 2008-08-14 | 2010-09-22 | 上海交通大学 | All solid dual spindle gyroscopes possessing square through-hole piezoelectric vibrator |
| CN101339025B (en) * | 2008-08-14 | 2010-12-01 | 上海交通大学 | All solid dual spindle gyroscopes possessing square surface cuboid piezoelectric vibrator |
| CN103199733A (en) * | 2013-03-22 | 2013-07-10 | 北京大学 | Piezoelectric actuator and manufacturing method thereof |
| CN103199733B (en) * | 2013-03-22 | 2015-06-10 | 北京大学 | Piezoelectric actuator and manufacturing method thereof |
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
| CN107238730B (en) * | 2017-04-28 | 2023-08-25 | 苏州东菱振动试验仪器有限公司 | Piezoelectric high-frequency vibration table |
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