CN118282239A - Driving device - Google Patents

Abstract

Disclosed is a piezoelectric driving device, which in one embodiment may include a rotor and a driving module, wherein the driving module includes: a clamping mechanism in contact with at least a portion of the circumferentially outer surface of the rotor to embracingly clamp the rotor; and the piezoelectric driving element is connected with the clamping mechanism and is used for generating deformation when being driven by voltage, and the deformation enables the clamping mechanism to swing so as to drive the rotor to rotate. The driving device can precisely swing the sample in a large travel range, and can be used in extreme environments such as ultra-high vacuum and the like.

Description

Driving device

Technical Field

The present application relates generally to the field of drive machinery, and more particularly to a piezoelectric driven rotary drive.

Background

In the field of physical research, it is often necessary to study various properties of samples in various environments such as very low temperature, ultra high vacuum, strong magnetic field, etc., which requires precise feeding of samples to achieve positioning or alignment. In addition, for some optical experiments performed by using large-scale integrated equipment, the optical element needs to be precisely fed to realize functions such as optical path adjustment. These applications place high demands on the accuracy of the mobile positioning of the sample or the optical element.

At present, a more common driving scheme is a mode of using a stepping motor, a piezoelectric driver and the like, however, the modes have some defects, the stepping motor has large volume and small driving force, and the compatibility to extreme environments is poor; the existing piezoelectric actuator has the problems of poor adjustability, large friction damage, short service life and the like.

Disclosure of Invention

The present application has been made in view of the above problems. Embodiments of the present application provide a driving device that can realize a feeding function such as swing with high accuracy.

According to an exemplary embodiment, there is provided a driving apparatus including: a rotor; and a drive module, the drive module comprising: a clamping mechanism in contact with at least a portion of the circumferentially outer surface of the rotor to embracingly clamp the rotor; and the piezoelectric driving element is connected with the clamping mechanism and is used for generating deformation when being driven by voltage, and the deformation enables the clamping mechanism to swing so as to drive the rotor to rotate.

In some embodiments, the clamping mechanism is provided with a flexible clamping arm for encircling and clamping the rotor, and the angle of the flexible clamping arm is adjustable for adjusting the force for clamping the rotor.

In some embodiments, the flexible clamping arm is provided with a bolt hole for adjusting the angle of the flexible clamping arm by using a bolt, thereby adjusting the force of the clamping mechanism to clamp the rotor.

In some embodiments, the drive module further comprises a resilient mechanism connected at one end to the clamping mechanism for resetting the clamping mechanism when the voltage is removed.

In some embodiments, the position of the other end of the resilient mechanism is adjustable to adjust the preload force of the resilient mechanism.

In some embodiments, the other end of the elastic mechanism is connected to an adjusting seat, and a screw hole is formed in the adjusting seat.

In some embodiments, the drive module further comprises a first hinge member having one end connected to the clamping mechanism.

In some embodiments, the other end of the first hinge member is connected to a drive module fixed end that supports the piezoelectric drive element.

In some embodiments, the drive module further comprises a second hinge member disposed between the clamping mechanism and the piezoelectric drive element.

In some embodiments, the rotor is made of a ceramic material or cemented carbide. Preferably, the rotor is made of zirconia ceramic material.

In some embodiments, at least a portion of the outer surface of the rotor is threaded.

In some embodiments, the driving device further comprises a supporting seat with a through hole, and an inner thread matched with the thread is arranged on the inner wall of the through hole.

In some embodiments, the rotor includes a first portion having an outer surface that is not threaded and a second portion having an outer surface that is threaded, the clamping mechanism clamping the first portion of the rotor.

In some embodiments, the first portion of the rotor is made of a ceramic material or cemented carbide.

Based on some embodiments, the driving device of the application uses a piezoelectric driving mode to realize rotary feeding of a sample or an optical element, and can obtain larger driving force, realize larger driving stroke and high positioning precision. The driving device of the application can also be applied in various extreme environments (ultra-high vacuum, strong magnetic field, extremely low temperature).

The foregoing and other features and advantages of the application will be apparent from the following description of exemplary embodiments, as illustrated in the accompanying drawings. It should be understood that the illustrated embodiments may not necessarily achieve all of these advantages. Thus, the application may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught herein without necessarily achieving other advantages as may be taught or suggested herein.

Drawings

Fig. 1 is a schematic view showing the overall structure of a driving apparatus according to an embodiment of the present application;

fig. 2 shows a schematic structural view of a driving device according to an embodiment of the present application;

FIG. 3 shows a schematic structural view of a rotor according to an embodiment of the present application;

fig. 4 shows a schematic structural view of a driving apparatus according to an embodiment of the present application.

Detailed Description

Exemplary embodiments of the present application are described below with reference to the accompanying drawings. In the drawings, like reference numerals generally refer to like parts. It should be understood that the dimensions and sizes of the components shown in the drawings are not necessarily drawn to scale and they may differ from those shown in the embodiments for implementation herein. Furthermore, some embodiments may incorporate any suitable combination of features from two or more drawings.

Fig. 1 is a schematic view showing the overall structure of a driving apparatus according to an embodiment of the present application. As shown in fig. 1, the driving device mainly includes two parts: the driving module 10 and the rotor 20 can encircle and clamp the rotor 20, and the contact surface between the driving module 10 and the rotor 20 is a friction surface. In one embodiment, the driving module 10 may be driven by a piezoelectric driving element, and the rotor 20 is driven to rotate in a stepping manner by friction force. In an application scenario, the tip of the rotor 20 may be contacted with a test sample or optical component or the like, so that during the process of the rotor 20 being driven, the sample or object in contact or connection therewith is driven accordingly. By adopting the driving device with the structure of the embodiment, the complexity of an experiment system is reduced, and the functions of high-precision driving, positioning and the like can be realized.

The following describes the specific structure of the driving module and the rotor of the driving device, and fig. 2 shows a schematic structural diagram of the driving device according to an embodiment of the present application. As shown in fig. 2, the driving module 10 may include a clamping mechanism 103 and a piezoelectric driving element 101, where the clamping mechanism 103 contacts at least a part of the circumferential outer surface of the rotor 20 to clamp the rotor 20 in an encircling manner, and the piezoelectric driving element 101 may be connected to the clamping mechanism 103 and configured to generate deformation when driven by a voltage, where the deformation may cause the clamping mechanism 103 to swing, thereby driving the rotor 20 to rotate.

The clamping mechanism 103 may have an arcuate inner surface to contact the circumferential outer surface of the rotor so as to embracingly clamp the rotor 20, the radius of curvature of the arcuate inner surface being substantially the same as the radius of the rotor 20 to obtain a greater contact area. The surface of the clamping mechanism 103, which is in contact with the rotor 20, is a friction surface, when the clamping mechanism 103 is driven to swing by external force, the clamping mechanism 103 can drive the rotor 20 to rotate by a certain angle through friction force, when the driving is removed, the clamping mechanism 103 returns to the original position, the rotor 20 cannot return to the original position due to inertia, the whole process realizes the corner motion of the rotor 20, and the reciprocating cycle can drive the rotor 20 to rotate step by step.

In an example, the clamping mechanism 103 may be provided with a flexible clamping arm for encircling the rotor 20, and the angle of the flexible clamping arm may be adjusted, which may be used to adjust the force clamping the rotor 20. For example, the clamping mechanism 103 may include one or more clamping arms extending therefrom that embrace the clamping portion, the clamping arms having a flexible feature such that the angle at which they clamp the rotor 20 may be adjusted, and thus the clamping force of the clamping mechanism 103 may be adjusted as desired. In an embodiment, the connection part of the clamping arm and the encircling clamping part is provided with a notch, which can enhance the flexibility of the clamping mechanism, thereby prolonging the service life of the device.

Referring to fig. 1, the flexible clamping arms of the clamping mechanism 103 may be provided with bolt holes for adjusting the angle of the flexible clamping arms using bolts, or changing the size of the opening between the flexible clamping arms, thereby adjusting the force with which the clamping mechanism 103 clamps the rotor 20. It is understood that the present application is not limited to any particular shape or number of flexible clamping arms and threaded bores thereon, and that other means of applying clamping force to adjust the amount of force that embraces the clamping mechanism 103 to clamp the rotor 20 are within the scope of the present application.

The piezoelectric driving element 101 is supported at one end on a driving module fixed end 106, and at the other end (driving end) is connected to the clamping mechanism 103 to supply driving force thereto. In one embodiment, the piezoelectric driving element 101 may be a piezoelectric ceramic stack, which may be a stack of piezoelectric ceramic sheets. The piezoelectric ceramic can mutually convert mechanical energy and electric energy, has sensitive characteristics, and can generate telescopic deformation to extend the length when being excited by voltage, so as to push the clamping mechanism 103 to perform swinging angular motion. With the rotation driving by the piezoelectric ceramics, a large driving force and a high driving accuracy (for example, a swing angle of the sample on the rotor 20) can be obtained.

The expansion and contraction deformation of the piezoelectric ceramic stack is generally related to the number of piezoelectric ceramic sheets and the magnitude of the applied voltage, so that the expansion and contraction deformation of the piezoelectric ceramic stack can be adjusted, for example, by changing the applied voltage, and the swing angle amplitude of the clamping mechanism 103 can be controlled. In one embodiment, the driving device of the present application may be used in combination with a controller for controlling the magnitude of the voltage applied to the piezoceramic stack, so that the driving force of the driving device can be controlled to control the swing angle/displacement. The controller can be integrated in an upper computer, such as a singlechip with data operation and processing capability, a processor and the like, and can automatically execute the adjustment and control of related parameters (such as voltage, polarity and the like) based on a plurality of sensing data according to a preset program or positioning error feedback, so that the functions of sample alignment, light path adjustment and the like can be quickly realized.

In an embodiment, the drive module 10 may further be provided with a first hinge part 104, one end of the first hinge part 104 being connected to the clamping mechanism 103 and the other end being connected to the drive module fixed end 106. By providing the hinge member 104, the efficiency of the swing angle movement of the holding mechanism 103 can be improved, that is, the displacement amount of the swing angle obtained by the holding mechanism 103 driven by the piezoelectric driving element 101 can be made larger and the stability of the driving device can be maintained, compared to the case where the hinge member 104 is not provided (for example, the holding mechanism 103 is rigidly connected to the fixed end 106) in the case where the same voltage is applied to the piezoelectric driving element 101.

The hinge member 104 is connected to one side of the clamping mechanism 103, and may be of a thin-walled structure, which may impart a certain "flexibility" thereto, so that the hinge member 40 may deform under the influence of an external force, thereby making the swinging movement of the clamping mechanism 103 more efficient.

The drive module fixing end 106 may be fixed to a fixing base or a wall (not shown) on which a support platform is provided to support the piezoelectric drive element 101, and may be connected to the clamping mechanism 103 through a hinge member 104. Referring to fig. 1, in an embodiment, a flange may be formed at the bottom of the driving module fixing end 106, and a circular hole is formed in the flange, the function of which will be described later.

In an embodiment, the drive module 10 may also be provided with a second hinge part 105, which second hinge part 105 is arranged between the clamping mechanism 103 and the piezo-electric drive element 101. By providing the hinge member 105, the efficiency of the swing angle movement of the holding mechanism 103 can be improved, that is, the amount of displacement of the swing angle obtained by the holding mechanism 103 driven by the piezoelectric driving element 101 is greater than in the case where the hinge member 105 is not provided (for example, the holding mechanism 103 is directly connected to the piezoelectric driving element 101) in the case where the same voltage is applied to the piezoelectric driving element 101.

The hinge member 105 may be a metal thin plate structure having a thickness d and a length L of the hinge member 105 in the extending direction thereof, preferably L is 4 times or more d. The piezoelectric driving element 101 (e.g., a piezoelectric ceramic stack) may be connected to the hinge member 105 by bonding or the like.

In an embodiment, the components of the driving device such as the clamping mechanism 103, the first hinge part 104, the second hinge part 105, the driving module fixing end 106 and the like may be made of materials such as titanium alloy, brass, beryllium copper, stainless steel and the like, preferably, titanium alloy, beryllium copper may be used, so that the driving device may be applied to extreme environments such as high vacuum, extremely low temperature or strong magnetic field. In addition, the choice of materials also takes into account the environment in which the drive device is used, for example, experimental conditions which are sensitive to the magnetic field environment or magnetism, it being usual not to use components made of stainless steel. In one embodiment, the components of the drive device may be integrally formed, which may improve the overall stability of the device.

With continued reference to fig. 1 and 2, in one embodiment, the drive module 10 may further include a resilient mechanism 102, one end of the resilient mechanism 102 being connected to the clamping mechanism 103, which may be used to reset the clamping mechanism 103 when the voltage applied to the piezoelectric drive element 101 is removed. As described before, when the applied voltage is removed, the piezoceramic stack 101 will contract rapidly, at which time the elastic mechanism 102 may provide additional restoring force, so that the clamping mechanism 103 and the like are restored to the original state. In this process, the rotor 20 does not return to its original position due to inertia, so that the angular movement of the rotor can be achieved.

The elastic mechanism 102 is connected to the opposite side of the clamping mechanism 103 from the hinge member 104, and may be a spring, a bellows, etc., and the elastic mechanism 102 is illustratively shown in fig. 2 as a bellows-shaped elastic member, but it is understood that the elastic mechanism 102 may take other shapes such as a coil spring, etc., or a plurality of elastic members may be provided, which are all within the scope of the present application. The elastic mechanism 102 may be made of the same material as the clamp mechanism 103 and the like, and may be integrally formed therewith.

In an embodiment, one end of the elastic means 102 is connected to the clamping means 103, and the position of the other end thereof is adjustable, thereby adjusting the preload force of said elastic means 102. In an embodiment, referring to fig. 1 and 2, the other end of the elastic mechanism 102 is connected to the adjusting seat 107, and a screw hole may be provided in the adjusting seat 107. The screw hole may be aligned with the circular hole in the bottom flange of the driving module fixing end 106, and in actual operation, a bolt may be screwed into the screw hole of the adjusting seat 107 through the circular hole of the flange, and the other side of the bolt may be fastened to the driving module fixing end 106 through a nut (not shown), so that the magnitude of the pre-loading force of the elastic mechanism 102, that is, the magnitude of the pulling force thereof in the initial state of the system, may be adjusted by adjusting the distance between the driving module fixing end 106 and the adjusting seat 107. By adjusting the pre-load force or the pull force, the driving module can be more effectively restored to the initial state, thereby improving the driving efficiency of the driving device.

The rotor 20 may be made of ceramic material or cemented carbide. The ceramic material may be, for example, zirconia ceramic, alumina ceramic, or the like, and the cemented carbide may be, for example, tungsten carbide or titanium carbide-based cemented carbide. Preferably, zirconia ceramics may be used which avoid the use of lubricants and are compatible with extreme environmental applications such as ultra-high vacuum.

During operation, the outer surface of the rotor 20 and the inner wall surface of the embracing portion of the clamping mechanism 103 form a friction pair, and the friction force between the two can be adjusted by, for example, rotor material selection, roughness of the outer surface, etc. The piezoelectric driving element 101 is driven by voltage, and the clamping mechanism 103 drives the rotor 20 to realize rotary motion.

In an embodiment, the outer surface of the rotor 20 may also be provided with threads, for example the outer surface of the rotor 20 may be covered entirely by threads, so that on the basis of the rotational movement the drive device can also achieve a linear feed movement by means of the threads. Preferably, the rotor 20 may take the form of a half-thread, i.e. a part of the surface of its outer surface is provided with threads. Fig. 3 shows a schematic view of a rotor according to an embodiment of the present application, where the rotor 20 is formed of two parts, the outer surface of the first part 201 is not threaded, and the outer surface of the second part 202 is threaded, and the clamping mechanism 103 can clamp the first part 201 of the rotor 20. As previously mentioned, the first portion 201 may be made of a ceramic material or cemented carbide, preferably a ceramic material such as zirconia ceramic, so that the use of lubricants is avoided.

Fig. 4 shows a schematic structural view of a driving apparatus according to an embodiment of the present application. The driving device further comprises a supporting base 30, and the supporting base 30 can be connected to the driving module 10 through a connecting structure, for example, is elastically connected with a fixed end 106 of the driving module (allowing for the variation of the micrometer scale). The support base 30 may have a through hole therein, and an inner wall of the through hole is provided with an internal thread matching with the thread of the outer surface of the rotor 20. In operation, the rotor 20 cooperates with the internal threads of the support base 30, so that the rotor 20 rotates while being driven by the encircling clamping mechanism 103, and linear feeding movement can be realized. The unthreaded portion 201 of the rotor 20 is then in intimate contact with the encircling clamping mechanism 103 to increase the contact area, thereby improving drive efficiency and reducing frictional losses.

It will be understood that, although the terms "first" and "second," etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of example embodiments.

Herein, words such as "including," "comprising," "having," and the like are open ended terms that mean "including, but not limited to," and are used interchangeably therewith. The terms "or" and "as used herein refer to and are used interchangeably with the term" and/or "unless the context clearly indicates otherwise. The term "such as" as used herein refers to, and is used interchangeably with, the phrase "such as, but not limited to.

The foregoing description of embodiments of the application has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many combinations, modifications, and alterations will become apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims (14)

1. A driving device characterized by comprising:

a rotor; and

A drive module, the drive module comprising:

A clamping mechanism in contact with at least a portion of the circumferentially outer surface of the rotor to embracingly clamp the rotor; and

And the piezoelectric driving element is connected with the clamping mechanism and is used for generating deformation when being driven by voltage, and the deformation enables the clamping mechanism to swing so as to drive the rotor to rotate.

2. The drive device according to claim 1, wherein the clamping mechanism is provided with a flexible clamping arm for embracing and clamping the rotor, and an angle of the flexible clamping arm is adjustable for adjusting a force for clamping the rotor.

3. The driving device according to claim 2, wherein the flexible clamping arm is provided with a bolt hole for adjusting an angle of the flexible clamping arm using a bolt, thereby adjusting a force of the clamping mechanism to clamp the rotor.

4. A drive arrangement according to claim 1 or 2, wherein the drive module further comprises a resilient mechanism connected at one end to the clamping mechanism for resetting the clamping mechanism when the voltage is removed.

5. The driving apparatus as claimed in claim 4, wherein a position of the other end of the elastic mechanism is adjustable to adjust a preload force of the elastic mechanism.

6. The driving apparatus as claimed in claim 5, wherein the other end of the elastic mechanism is connected to an adjustment seat in which a screw hole is provided.

7. The drive device according to claim 1 or 2, wherein the drive module further comprises a first hinge part, one end of which is connected to the clamping mechanism.

8. The driving device according to claim 7, wherein the other end of the first hinge member is connected to a driving module fixing end that supports the piezoelectric driving element.

9. The drive device according to claim 1 or 2, wherein the drive module further comprises a second hinge part arranged between the clamping mechanism and the piezoelectric drive element.

10. A drive device according to claim 1 or 2, wherein the rotor is made of a ceramic material or cemented carbide.

11. The drive of claim 10, wherein at least a portion of an outer surface of the rotor is threaded.

12. The driving device as claimed in claim 11, further comprising a support base having a through hole, an inner wall of which is provided with an internal thread matching the thread.

13. The drive of claim 11, wherein the rotor includes a first portion having an unthreaded outer surface and a second portion having an unthreaded outer surface, the clamping mechanism clamping the first portion of the rotor.

14. The drive of claim 13, wherein the first portion is made of a ceramic material or cemented carbide.