CN118275023A - Semiconductor process equipment and fluid pressure measuring device thereof - Google Patents

Abstract

The application provides a semiconductor process device and a fluid pressure measuring device thereof, wherein the fluid pressure measuring device comprises a shell, a piezoelectric conversion element and a pressure transmission assembly; the shell is provided with a mounting cavity and a fluid channel, and the fluid channel is communicated with the mounting cavity and is used for introducing fluid; the piezoelectric conversion element is arranged in the mounting cavity and is used for converting pressure into an electric signal; the pressure transmission assembly is arranged between the detection end face of the piezoelectric conversion element and the fluid channel, and comprises a first pressure transmission film at the port of the fluid channel, a second pressure transmission film attached to the detection end face and a pressure transmission cavity formed between the first pressure transmission film and the second pressure transmission film, and pressure transmission media are filled in the pressure transmission cavity. The first pressure transmission film bears the pressure of the fluid and generates elastic deformation. The pressure transmission medium transmits pressure to the second pressure transmission film, and the second pressure transmission film generates elastic deformation to transmit the pressure to the detection end face. The pressure is uniformly transferred, and the accuracy of pressure measurement is improved.

Description

Semiconductor process equipment and fluid pressure measuring device thereof

Technical Field

The application relates to the field of pressure measurement equipment, in particular to a fluid pressure measuring device. The application also relates to a semiconductor process device comprising the fluid pressure measuring device.

Background

The fluid pressure measuring device is a measuring device commonly used in industry and is widely applied to various fields such as water conservancy and hydropower, railway traffic, intelligent building, production automatic control, aerospace, military industry, petrochemical industry, oil well, electric power, ships, machine tools, pipelines and the like.

The fluid pressure measuring device guides external fluid into the device and is contacted with the pressure sensing part. The pressure sensing part presses the pressure sensitive element through elastic deformation, so that the fluid pressure is measured. In the prior art, although the measurement of the fluid pressure can be realized, the measurement accuracy is lower and the sensitivity is poorer.

Therefore, how to improve the measurement accuracy of the fluid pressure measurement device is a technical problem that needs to be solved by those skilled in the art.

Disclosure of Invention

The application aims to at least solve one of the technical problems in the prior art, and provides a fluid pressure measuring device, which is provided with a pressure transmission assembly, and can improve measurement accuracy by transmitting pressure to a piezoelectric conversion element through the pressure transmission assembly. Another object of the present application is to provide a semiconductor processing apparatus including the above fluid pressure measuring device.

In order to achieve the purpose of the application, a fluid pressure measuring device is provided, which comprises a shell, a piezoelectric conversion element and a pressure transmission assembly;

the shell is provided with a mounting cavity and a fluid channel, and the fluid channel is communicated with the mounting cavity and is used for introducing fluid;

The piezoelectric conversion element is arranged in the mounting cavity and comprises a detection end face, and the detection end face is used for bearing pressure and converting the pressure into an electric signal;

The pressure transmission assembly is located between the detection end face and the fluid channel and is in sealing connection with the inner wall of the installation cavity, the pressure transmission assembly comprises a first pressure transmission film, a second pressure transmission film and a pressure transmission cavity, the first pressure transmission film faces to the port of the fluid channel, a fluid cavity communicated with the fluid channel is formed on one side, close to the fluid channel, of the first pressure transmission film, the second pressure transmission film is attached to the detection end face, the pressure transmission cavity is formed between the first pressure transmission film and the second pressure transmission film, pressure transmission media are filled in the pressure transmission cavity and are used for being in contact with fluid and generating elastic deformation when bearing the pressure of the fluid, the pressure transmission media are used for transmitting the pressure to the second pressure transmission film, and the second pressure transmission film generates elastic deformation after bearing the pressure so as to transmit the pressure to the detection end face.

In some embodiments, the pressure transmission assembly further comprises a sealing connection ring, the sealing connection ring is sealed with the inner side wall of the mounting cavity in a fitting manner, and the second pressure transmission film is formed at one end, close to the detection end face, of the sealing connection ring;

The first pressure transmission film is in sealing connection with the inner side wall of the sealing connection ring, a pressure transmission cavity is formed between the first pressure transmission film and the second pressure transmission film, and a fluid cavity communicated with the fluid channel is formed on one side, away from the second pressure transmission film, of the first pressure transmission film.

In some embodiments, the detection end surface is a plane perpendicular to the fluid channel, and the surface of the second pressure transfer membrane remote from the pressure transfer cavity is also a plane and is attached to the detection end surface.

In some embodiments, the surface area of the first pressure transfer film is greater than the orthographic projected area of the first pressure transfer film on the second pressure transfer film.

In some embodiments, the first pressure transfer film is a tab having a corrugated structure surrounding a midpoint of the tab.

In some embodiments, the lug is a titanium alloy or hastelloy, and the second pressure transmitting film is also a titanium alloy or hastelloy.

In some embodiments, the thickness of the second pressure transfer film is 0.2mm or greater and 0.27mm or less.

In some embodiments, the thickness of the tab is 0.1mm or greater and 0.8mm or less.

In some embodiments, the outer edge of the lug has reserved welding areas distributed along the circumferential direction of the lug, and the reserved welding areas have a width of 1mm or more and 2mm or less.

In some embodiments, the mounting cavity has a seal groove surrounding the fluid channel, a first seal ring is disposed in the seal groove, and an end surface of the seal connection ring remote from the piezoelectric conversion element is sealed against the first seal ring.

In some embodiments, the end face of the sealing connection ring, which is close to the piezoelectric conversion element, is provided with a first welding groove corresponding to the outer edge position of the detection end face, and the sealing connection ring is welded and fixed with the piezoelectric conversion element through the first welding groove.

In some embodiments, the housing is provided with an exhaust vent through a side wall of the mounting cavity, the exhaust vent being disposed proximate the fluid passage for venting gas in the mounting cavity upon installation of the piezoelectric conversion element and the pressure transfer assembly;

The piezoelectric conversion element is provided with a sealing step groove which is arranged around the detection end face, a second sealing ring is arranged between the sealing step groove and the inner side wall of the installation cavity, and the exhaust hole is positioned between the second sealing ring and the pressure transmission assembly.

In some embodiments, a securing assembly for securing the piezoelectric conversion element in the mounting cavity is also included;

The fixed component comprises a magnetism isolating sleeve and a rear cover;

The magnetic isolation sleeve is sleeved on the periphery of the piezoelectric conversion element and used for isolating magnetic field interference, is fixed on one side of the mounting cavity, which is far away from the fluid channel, and limits the piezoelectric conversion element;

The rear cover is sleeved on the periphery of the shell and is used for closing one side of the mounting cavity, which is far away from the fluid channel.

In some embodiments, the magnetism isolating sleeve is internally provided with a magnetism isolating cavity, the piezoelectric conversion element can penetrate into the magnetism isolating cavity, and the inner side wall of the magnetism isolating cavity is used for radially limiting the piezoelectric conversion element;

one side of the piezoelectric conversion element, which is far away from the detection end surface, is provided with a first limit groove, a second limit groove is arranged in the magnetism isolating cavity, and the second limit groove is matched with the first limit groove to axially limit the piezoelectric conversion element when the magnetism isolating sleeve is fixedly connected with the installation cavity.

In some embodiments, the inner side wall of the mounting cavity is fixed with the magnetism isolating sleeve through threads, and the outer side wall of the mounting cavity is fixed with the rear cover through threads.

In some embodiments, the rear cover further comprises a first positioning piece, wherein a first positioning hole is formed in the side wall of the rear cover, and the first positioning piece penetrates through the first positioning hole and is used for circumferentially positioning the rear cover.

In some embodiments, the magnetic shielding device further comprises a second positioning piece, wherein a second positioning hole is formed in the top of the rear cover, and the second positioning piece penetrates through the second positioning hole and is used for circumferentially positioning the magnetic shielding sleeve.

The application also provides semiconductor process equipment, which comprises a reaction chamber, a gas transmission pipeline and a fluid pressure measuring device, wherein the gas transmission pipeline is communicated with the reaction chamber, the fluid pressure measuring device is any one of the fluid pressure measuring devices, and a fluid channel of the fluid pressure measuring device is communicated with the gas transmission pipeline.

The application has the following beneficial effects:

The application provides a fluid pressure measuring device, which comprises a shell, a piezoelectric conversion element and a pressure transmission assembly, wherein the piezoelectric conversion element is arranged on the shell; the shell is provided with a mounting cavity and a fluid channel, and the fluid channel is communicated with the mounting cavity and is used for introducing fluid; the piezoelectric conversion element is arranged in the mounting cavity and comprises a detection end face, and the detection end face is used for bearing the pressure of fluid and converting the pressure into an electric signal; the pressure transmission assembly is arranged between the detection end face and the fluid channel and comprises a first pressure transmission film, a second pressure transmission film and a pressure transmission cavity, the first pressure transmission film faces the port of the fluid channel, the second pressure transmission film is attached to the detection end face, the pressure transmission cavity is formed between the first pressure transmission film and the second pressure transmission film, and the pressure transmission cavity is filled with pressure transmission media.

In the pressure measuring process, the first pressure transmitting film is contacted with the fluid, bears the pressure of the fluid and generates elastic deformation. The pressure transmission medium transmits the pressure to the second pressure transmission film, and the second pressure transmission film generates elastic deformation after bearing the pressure and transmits the pressure to the detection end face. The pressure transmission assembly can uniformly transmit pressure to the detection end face, so that the accuracy of pressure measurement is improved.

The application also provides semiconductor process equipment comprising the fluid pressure measuring device, and the semiconductor process equipment has the advantages.

Drawings

FIG. 1 is a schematic view of a fluid pressure measuring device according to an embodiment of the present application;

FIG. 2 is a schematic diagram of an application scenario of the fluid pressure measuring device of FIG. 1;

FIG. 3 is an enlarged view of A in FIG. 1;

FIG. 4 is a cross-sectional view of the housing of FIG. 1;

FIG. 5 is a cross-sectional view of the pressure transfer assembly of FIG. 1;

FIG. 6 is a cross-sectional view of the seal attachment ring and second pressure transfer membrane of FIG. 5;

FIG. 7 is a cross-sectional view of the lug of FIG. 5;

FIG. 8 is a cross-sectional view of the magnetic sheath of FIG. 1;

fig. 9 is a cross-sectional view of the piezoelectric conversion element in fig. 1;

FIG. 10 is a cross-sectional view of the rear cover of FIG. 1;

FIG. 11 is a top view of the rear cover of FIG. 10;

fig. 12 is a cross-sectional view of the rear cover of fig. 1 mated with the housing, magnetic shield.

Wherein reference numerals in fig. 1 to 12 are:

The fluid channel 1, the housing 2, the first seal ring 3, the seal connection ring 4, the soldering lug 5, the second seal ring 6, the piezoelectric conversion element 7, the magnetism isolating sleeve 8, the rear cover 9, the pressure transmitting cavity 10, the pipe 11, the pressure display 12, the reaction chamber 13, the delivery pump 14, the connector 201, the seal groove 202, the second external screw thread 203, the first internal screw thread 204, the vent 205, the connector installation cavity 206, the support table 207, the first welding groove 401, the second welding groove 402, the second pressure transmitting film 403, the first end face 404, the second end face 405, the fluid chamber 406, the reserved welding area 501, the second surface 502, the first surface 503, the detection end face 701, the first limiting groove 702, the seal step groove 703, the magnetism isolating cavity 801, the second limiting groove 802, the first through hole 803, the first external screw thread 804, the second internal screw thread 901, the second positioning hole 902, the first positioning hole 903, and the second through hole 904.

Detailed Description

In order to better understand the technical solutions of the present application, the following describes the fluid pressure measuring device provided by the present application in detail with reference to the accompanying drawings.

The fluid pressure measuring device provided by the application, as shown in fig. 1, comprises a shell 2, a piezoelectric conversion element 7 and a pressure transmission assembly. Wherein the outside of the housing 2 has a connector 201, the inside of the housing 2 has a mounting cavity and a fluid channel 1, and the diameter of the mounting cavity is larger than the diameter of the fluid channel 1. The fluid passage 1 penetrates the joint 201 along the axis of the joint 201 and communicates with the installation chamber. The piezoelectric conversion element 7 is arranged in the installation cavity, the pressure transmission component is arranged between the piezoelectric conversion element 7 and the fluid channel 1 and is in sealing connection with the inner wall of the installation cavity, the piezoelectric conversion element 7 plays a role of isolating the fluid channel 1 from the installation cavity, and a fluid chamber 406 communicated with the fluid channel 1 is formed on one side of the first pressure transmission film close to the fluid channel 1. In one embodiment of the present application, as shown in fig. 2, a fluid pressure measuring device is used in a semiconductor processing apparatus. The semiconductor processing apparatus comprises a reaction chamber 13, a transfer pump 14 and a conduit 11. The pipe 11 is connected to the reaction chamber 13 for delivering fluid to the reaction chamber 13, and the delivery pump 14 is used for pressurizing the fluid in the pipe 11. The connector 201 can be inserted into a pipeline 11 and other parts to be contacted with fluid to be detected, the fluid channel 1 can introduce the fluid to be detected into the fluid chamber 406, the pressure of the fluid acts on the pressure transmission component, the pressure transmission component transmits the pressure to the piezoelectric conversion element 7, and the piezoelectric conversion element 7 converts the pressure into an electric signal to realize pressure measurement. The piezoelectric conversion element 7 includes a detection end face 701, the pressure transmission assembly is attached to the detection end face 701, and the detection end face 701 is configured to receive the pressure transmitted by the pressure transmission assembly. The structure of the other parts of the piezoelectric conversion element 7 may refer to the piezoelectric ceramic component in the prior art, and will not be described herein.

Specifically, as shown in fig. 3, the pressure transmission assembly includes a first pressure transmission film, a second pressure transmission film 403, and a pressure transmission chamber 10. The first pressure transmission film faces to the port of the fluid channel 1, the fluid is contacted with the first pressure transmission film, and the pressure of the fluid acts on the first pressure transmission film to enable the first pressure transmission film to elastically deform. The pressure transmission cavity 10 is formed between the first pressure transmission film and the second pressure transmission film 403, and the pressure transmission cavity 10 is filled with a pressure transmission medium, and the pressure transmission medium is extruded after the first pressure transmission film is elastically deformed and transmits the pressure to the second pressure transmission film 403. The second pressure transmission film 403 is attached to the detection end face 701, and after the second pressure transmission film 403 bears the pressure, elastic deformation is generated, and the detection end face 701 is extruded, so that the pressure of the fluid is transmitted to the piezoelectric conversion element 7, and the measurement of the pressure of the fluid is realized.

Optionally, the detection end face 701 is a plane perpendicular to the fluid channel 1, and the surface of the second pressure transmitting film 403 away from the pressure transmitting cavity 10 is also a plane, and is attached to the detection end face 701. By bonding the detection end face 701 and the second pressure transmitting film 403 in this planar manner, the sensitivity of detection of the detection end face 701 can be improved more.

Alternatively, the outer periphery of the connector 201 may be provided with external threads, and connected to the pipe 11 or the like by the external threads. Of course, the user may connect the connector 201 to the pipe 11 by plugging, interference fit, or the like. As shown in fig. 2, the piezoelectric conversion element 7 is further provided with a cable, and is connected to a display device such as a pressure display 12 through the cable, so as to realize real-time display of pressure.

Optionally, the surface area of the first pressure transfer film is greater than the orthographic projected area of the first pressure transfer film on the second pressure transfer film 403. The first pressure transfer film may have a raised structure, a corrugated structure, or the like to increase its surface area. The surface area of the first pressure transmission film is larger, the contact area between the first pressure transmission film and the fluid can be increased, and even if the fluid pressure slightly fluctuates, the first pressure transmission film can bear larger pressure, so that the pressure measurement precision of the fluid pressure measurement device can be improved. In a preferred embodiment of the present application, the surface area of the first pressure transmitting film is more than 1.5 times the orthographic projection area of the first pressure transmitting film on the second pressure transmitting film 403. Of course, the user may set the structure of the first pressure transmitting film according to the need, and the ratio of the surface area of the first pressure transmitting film to the orthographic projection area of the first pressure transmitting film on the second pressure transmitting film 403 is not limited thereto.

In this embodiment, a pressure transmission assembly is disposed in the fluid pressure measuring device, and the pressure transmission assembly is hermetically connected to the mounting cavity. The first pressure transmitting membrane in the pressure transmitting assembly is in contact with the fluid for receiving the fluid pressure, and the pressure transmitting medium in the pressure transmitting assembly is capable of uniformly transmitting the pressure to the second pressure transmitting membrane 403. The second pressure transmission film 403 elastically deforms to press the detection end face 701, so that the piezoelectric conversion element 7 generates an electric signal, and measurement of fluid pressure is realized.

In some embodiments, the pressure transfer assembly further comprises a sealing connection ring 4. As shown in fig. 3 and 4, the mounting cavity is arranged coaxially with the fluid passage 1, and the diameter of the mounting cavity is larger than that of the fluid passage 1, and the mounting cavity has a stepped surface surrounding the fluid passage 1. The sealing connection ring 4 is located between the piezoelectric conversion element 7 and the fluid channel 1, the outer side wall of the sealing connection ring 4 is attached to and sealed with the inner side wall of the mounting cavity, the first end face 404 of the sealing connection ring 4 is attached to the step face, and the second end face 405 is attached to the detection end face 701.

Optionally, a second pressure transmitting membrane 403 is formed at an end of the sealing connection ring 4 near the detection end face 701. In the embodiment shown in fig. 5, the second pressure transmitting film 403 and the sealing connection ring 4 may be formed integrally, and the thickness of the second pressure transmitting film 403 may be 0.2-0.27mm. The thickness of the second pressure transmission film 403 is thinner, and the second pressure transmission film is more sensitive to pressure change, and can generate elastic deformation under smaller pressure change, so that the detection precision of the fluid pressure measuring device is improved. The second pressure transmitting film 403 is sensitive to pressure change, and changes in shape after being subjected to pressure into elastic shape. The sealing connection ring 4 and the second pressure transmitting film 403 may be made of an alloy material resistant to acid and alkali corrosion, such as titanium alloy, hastelloy, etc. When the fluid pressure measuring device is applied to corrosive media such as acid, alkali and the like, the sealing connection ring 4 and the second pressure transmission membrane 403 can normally operate, so that the application range of the fluid pressure measuring device can be improved. Of course, the thickness of the second pressure transmitting film 403 may be set by the user as needed, and is not limited herein.

Optionally, the first pressure transmitting film is connected with the inner side wall of the sealing connection ring 4 in a sealing manner, as shown in fig. 5 and 6, and a pressure transmitting cavity 10 is formed among the first pressure transmitting film, the second pressure transmitting film 403 and the inner side wall of the sealing connection ring 4. The side of the first pressure transfer membrane, which is far away from the second pressure transfer membrane 403, forms a fluid chamber 406, the fluid chamber 406 is communicated with the fluid channel 1, and fluid enters the fluid chamber 406 from the fluid channel 1, so that the first pressure transfer membrane is subjected to fluid pressure. The inner diameter of the sealing connection ring 4 can be larger than the diameter of the fluid channel 1, so that the contact area between the fluid and the first pressure transmission film is increased.

Alternatively, the first pressure-transmitting film is a soldering lug 5, and the soldering lug 5 can also be made of an alloy material resistant to acid and alkali corrosion, such as titanium alloy, hastelloy, and the like. When the fluid pressure measuring device is applied to corrosive media such as acid, alkali and the like, the welding lug 5 is directly contacted with the corrosive media, and the welding lug 5 is made of corrosion-resistant alloy materials, so that the pressure of the corrosive media can be directly measured, the application range of the fluid pressure measuring device is improved, and the service life of the fluid pressure measuring device for measuring the corrosive media is prolonged.

Alternatively, the welding tab 5 may be welded to the inner side wall of the sealing ring 4. Specifically, the welding lug 5 is provided with a reserved welding area 501 near the outer edge, the reserved welding area 501 is annular, and the reserved welding area 501 is welded and sealed with the inner side wall of the sealing connection ring 4. In one embodiment of the present application, the width of the reserved welding area 501 in the radial direction of the soldering lug 5 is 1mm or more and 2mm or less, wherein 1.6mm or less. The width of the reserved welding area 501 can ensure the connection strength between the welding lug 5 and the sealing connection ring 4, and meanwhile, the area of the reserved welding area 501 is prevented from being excessively large in the welding lug 5, so that the welding lug 5 is ensured to have enough sensitivity. The thickness of the tab 5 is 0.1mm or more and 0.8 or less, and among them, 0.2mm is preferable. The thickness of the welding lug 5 is proper, so that the welding lug 5 can be ensured to have enough strength and sensitivity, and the service life of the fluid pressure measuring device is prolonged on the premise of ensuring the detection precision of the fluid pressure measuring device. Of course, the user may set the size of the soldering lug 5 as required, and is not limited herein.

Alternatively, as shown in fig. 6, the inner side wall of the sealing connection ring 4 is provided with a second welding groove 402 around the axis thereof, and the lug 5 is welded to the sealing connection ring 4 through the second welding groove 402. Of course, the user may also connect the first pressure transmitting film with the sealing connection ring 4 in other manners, for example, a sealant with better sealing performance and corrosion resistance may be used to bond and fix the first pressure transmitting film with the sealing connection ring 4.

Optionally, the pressure transfer cavity 10 between the first pressure transfer film and the second pressure transfer film 403 is filled with a pressure transfer medium, so that good tightness between the first pressure transfer film and the inner side wall of the sealing connection ring 4 needs to be ensured. After connection, flaw detection, air tightness test or negative pressure leak detection needs to be carried out on the pressure transmission assembly to ensure no leakage. The pressure medium may be a liquid, such as hydraulic oil, or a gas, such as nitrogen, oxygen, or argon.

Optionally, the tab 5 has a corrugated structure around the midpoint of the tab 5. As shown in fig. 7, the first surface 503 of the tab 5 is for contact with a fluid and the second surface 502 is for contact with a pressure medium. The corrugated structure not only can increase the contact area between the first surface 503 and the fluid, but also can enable the soldering lug 5 to have better elasticity, be easier to elastically deform, be more accurate in capturing the change of the liquid pressure, and further can improve the detection precision of the fluid pressure measuring device. In the embodiment shown in fig. 7, the corrugated structure has a structure close to a sine wave, and the user may set the corrugated structure to a rectangular wave, a triangular wave, or the like as needed, which is not limited herein.

Optionally, the first end surface 404 of the sealing connection ring 4 is provided with a first welding groove 401, and the first welding groove 401 corresponds to the position of the outer edge of the detection end surface 701. The sealing connection ring 4 is welded to the piezoelectric conversion element 7 by the first welding groove 401. After fixing, the piezoelectric conversion element 7 and the pressure transmission component form an integrated structure, the relative positions of the pressure transmission component and the detection end face 701 are fixed, so that position deviation between the pressure transmission component and the detection end face 701 is avoided, and the accuracy and the stability of detection are further improved.

In this embodiment, the first pressure transmission film has a corrugated structure, so that not only the contact area with the fluid can be increased, but also the first pressure transmission film can be elastically deformed more easily, and further the detection precision of the fluid pressure measuring device is improved. In addition, some users need to carry out negative pressure leak detection on the fluid pressure measuring device before using, and the fluid pressure measuring device in the prior art is easy to damage in the process of negative pressure leak detection. In the application, the sealing connecting ring 4 of the pressure transmission assembly is attached to the step surface in the mounting cavity, and the step surface can support the sealing connecting ring 4, so that the pressure transmission assembly is prevented from being extracted by negative pressure during negative pressure leakage detection, and the reliability of the fluid pressure measuring device is improved. In addition, the pressure transmission component is fixedly connected with the piezoelectric conversion element 7, so that the second pressure transmission film 403 is guaranteed to always correspond to the position of the detection end face 701, and the accuracy and stability of the fluid pressure measuring device are guaranteed.

In some embodiments, the side of the mounting cavity remote from the fluid channel 1 forms an opening, into which the pressure transfer assembly and the piezoelectric conversion element 7 are fitted. The fluid pressure measuring device further comprises a fixing component which is arranged at the opening and used for fixing and sealing the pressure transmission component and the piezoelectric conversion element 7.

Optionally, the fixing assembly comprises a magnetism isolating sleeve 8 and a rear cover 9. As shown in fig. 1 and 8, the magnetism isolating sleeve 8 is fixed in the mounting chamber and is sleeved on the outer periphery of the piezoelectric conversion element 7. The magnetism isolating sleeve 8 is used for isolating interference of the magnetic field to the piezoelectric conversion element 7. The magnetism isolating sleeve 8 is fixed on one side of the installation cavity far away from the fluid channel 1, compresses the piezoelectric conversion element 7 and axially limits the piezoelectric conversion element. A first through hole 803 is arranged on one side of the magnetism isolating sleeve 8 close to the opening. The rear cover 9 of the piezoelectric conversion element 7 is sleeved on the periphery of the shell 2 and is used for closing the opening of the mounting cavity. The rear cover 9 is provided with a second through hole 904 corresponding to the position of the first through hole 803, and the piezoelectric conversion element 7 outputs a signal through a cable which is passed out of the first through hole 803 and the second through hole 904 to be connected to other devices.

Alternatively, as shown in fig. 8 and 9, the magnetism isolating sleeve 8 is internally provided with a magnetism isolating cavity 801, a second limit groove 802 surrounding the magnetism isolating cavity 801 is arranged in the magnetism isolating sleeve 8, a first limit groove 702 surrounding the piezoelectric conversion element 7 is arranged on one side, away from the detection end face 701, of the piezoelectric conversion element 7, and the first limit groove 702 and the second limit groove 802 are step grooves. The diameter of the circumference of the side wall of the first limiting groove 702 may be equal to the inner diameter of the magnetism isolating cavity 801, and the diameter of the circumference of the side wall 5 of the second limiting groove 802 may be equal to the outer diameter of the piezoelectric conversion element 7. When the magnetism isolating sleeve 8 is sleeved on the periphery of the piezoelectric conversion element 7, the piezoelectric conversion element 7 penetrates into the magnetism isolating cavity 801, the inner side wall of the magnetism isolating cavity 801 is matched with the side wall of the first limiting groove 702, and the side wall of the second limiting groove 802 is matched with the outer side wall of the piezoelectric conversion element 7, so that the piezoelectric conversion element 7 is radially positioned.

Optionally, a non-slip pad may be disposed between the bottom surface of the first limiting groove 702 and the bottom surface of the second limiting groove 802, so as to prevent relative rotation between the magnetism isolating sleeve 8 and the piezoelectric conversion element 7.

The piezoelectric conversion element 7 may be fixedly connected to the magnetism isolating sleeve 8 by adhesion, interference fit, or the like. The piezoelectric conversion element 7 is further fixed.

Optionally, the inner side wall of the installation cavity is provided with a first internal thread 204, the outer side wall of the magnetism isolating sleeve 8 is provided with a first external thread 804, and the magnetism isolating sleeve 8 is fixed in the installation cavity 5 through threaded connection with the installation cavity. The magnetism isolating sleeve 8 is gradually inserted into the installation cavity in the installation process, and when the magnetism isolating sleeve 8 is installed in place, the bottom surface of the second limiting groove 802 is attached to the bottom surface of the first limiting groove 702, so that the piezoelectric conversion element 7 is axially positioned. Of course, the manner of positioning the piezoelectric transducer 7 by the magnetism insulator 8 is not limited thereto.

Optionally, the outer side wall of the housing 2 is provided with a second external thread 203, the rear cover 9 is provided with a second 0 internal thread 901, and the rear cover 9 is screwed with the housing 2. When the magnetism isolating sleeve 8 is installed in place,

The through hole of the device can be flush with the opening of the mounting cavity. After the rear cover 9 is fixed with the shell 2, the magnetism isolating sleeve 8 is axially limited. Of course, the housing 2 may be connected to the rear cover 9 and the magnetism isolating sleeve 8 by other methods, such as a clamping connection, and the like, which is not limited herein.

Optionally, a supporting table 207 surrounding the installation cavity is further disposed in the housing 2, and a distance between the supporting table 2075 and an opening of the installation cavity is equal to a length of the magnetism isolating sleeve 8 in an axial direction. The magnetism isolating sleeve 8 is installed in the installation cavity, and when the end face of the magnetism isolating sleeve 8 far away from the opening of the installation cavity is attached to the supporting table 207, the magnetism isolating sleeve 8 is installed in place.

In this embodiment, a magnetism isolating sleeve 8 is provided in the fluid pressure measuring device. The magnetism isolating sleeve 8 not only can isolate a magnetic field, but also can protect the piezoelectric conversion element 7; but also to be able to position the piezoelectric transducer element 7 in cooperation with the mounting cavity. The magnetism isolating sleeve 8 is simple in structure, and can complete axial positioning and radial positioning of the piezoelectric conversion element 7, so that the structure of the fluid pressure measuring device is simplified, and the assembly difficulty and the production cost of the fluid pressure measuring device are reduced. Compared with the prior art, the method for fixing the piezoelectric ceramic by glue filling is simple and easy to operate, has higher production efficiency, can reduce the risk of structural deformation of the positioning component in the fluid pressure measuring device, and prolongs the service life of the fluid pressure measuring device.

The pressure transfer assembly needs to isolate the fluid channel 1 from the installation cavity, avoiding fluid entering the installation cavity. To improve the tightness, the installation space has a sealing groove 202 surrounding the fluid channel 1, a first sealing ring 3 being provided in the sealing groove 202. The end face, far away from the piezoelectric conversion element 7, of the sealing connection ring 4 compresses the first sealing ring 3, the first sealing ring 3 surrounds the fluid chamber 406, fluid in the fluid chamber 406 can be prevented from entering a gap between the sealing connection ring and the inner side wall of the installation cavity, and then the sealing effect of the fluid chamber 406 is improved.

Optionally, the housing 2 is provided with a vent hole 205 penetrating through a side wall of the mounting cavity, and as shown in fig. 1 and 4, a support table 207 is disposed around the mounting cavity, the corresponding mounting cavity of the support table 207 is a joint mounting cavity 206, and the pressure transmission assembly is disposed in the joint mounting cavity 206. The vent holes 205 extend through the side walls of the joint mounting chamber 206. When the piezoelectric conversion element 7 and the pressure transmitting assembly are mounted, the gas in the mounting chamber can be discharged through the gas discharge hole 205.

The piezoelectric transducer 7 has a seal step groove 703 provided around the detection end face 701 so that the side of the piezoelectric transducer 7 near the pressure transmitting assembly forms a detection joint, which is also inserted into the joint mounting chamber 206. The diameter of the detection joint is smaller than that of the joint installation cavity 206, and a second sealing ring 6 is arranged between the detection joint and the joint installation cavity 206, and the second sealing ring 6 is respectively attached to the side wall of the sealing step groove 703 and the inner side wall of the installation cavity. The port of the exhaust hole 205 is located between the first sealing ring 3 and the second sealing ring 6, so that a sealing space is formed between the first sealing ring 3, the second sealing ring 6, the outer side wall of the pressure transmission assembly and the outer side wall of the detection joint, and pollutants outside the shell 2 are sealed in the sealing space after passing through the exhaust hole 205, so that the pollutants are prevented from polluting the internal elements of the fluid pressure measuring device.

In this embodiment, the first sealing ring 3 and the second sealing ring 6 are disposed in the fluid pressure measuring device, and the first sealing ring 3 can block the fluid introduced by the fluid channel 1, so as to avoid the fluid from leaking into the fluid pressure measuring device and affecting the detection accuracy of the fluid pressure measuring device. The second sealing ring 6 is located between the piezoelectric conversion element 7 and the inner wall of the joint mounting chamber 206, and prevents contaminants passing through the exhaust hole 205 from affecting the accuracy of the fluid pressure measuring device. The fluid pressure measuring device is arranged through the structure of the shell 2, the piezoelectric conversion element 7 and the pressure transmission component, and is matched with the first sealing ring 3 and the second sealing ring 6 to finish sealing, so that the sealing structure is simpler, and a better sealing effect can be obtained.

In some embodiments, to avoid the rear cover 9 and the magnetism isolating sleeve 8 from being loosened, the fluid pressure measuring device further includes a first positioning member and a second positioning member. Optionally, a side wall of the rear cover 9 is provided with a first positioning hole 903. When the rear cover 9 is mounted in place, the first positioning member penetrates through the first positioning hole 903 to fix the housing 2 of the rear cover 9, and circumferential positioning of the rear cover 9 is achieved through extrusion. Specifically, the first positioning hole 903 may be a threaded hole, the first positioning member may be a positioning bolt, and the positioning bolt is in threaded connection with the positioning hole, and is fixed with the housing 2 through a bolt pretightening force to achieve fixation. Of course, the user may also use other structures to achieve positioning, for example, by matching the positioning pin and the light hole, which is not limited herein.

Optionally, a second positioning hole 902 is formed in the top of the rear cover 9, and a second positioning piece is inserted into the second positioning hole 902 to circumferentially position the magnetism isolating sleeve 8. Specifically, the second positioning hole 902 may be a threaded hole, the second positioning piece may be a positioning bolt, and the second positioning piece is in threaded fit with the second positioning hole 902, and compresses the magnetism isolating sleeve 8 through the bolt pretightening force, so that the circumferential positioning of the magnetism isolating sleeve 8 is realized. In the embodiment shown in fig. 11, the rear cover 9 is provided with 4 second positioning holes 902. Of course, the number of the positioning holes is not limited thereto.

In this embodiment, the first positioning member and the second positioning member of the fluid pressure measuring device respectively perform circumferential positioning on the rear cover 9 and the magnetism isolating sleeve 8, so that the release caused by long-term use is avoided, and the service life of the fluid pressure measuring device is prolonged.

The application also provides a semiconductor process device, as shown in fig. 2, comprising a reaction chamber 13, a gas transmission pipeline and a fluid pressure measuring device, wherein the gas transmission pipeline is communicated with the reaction chamber 13 and is used for conveying process gas to the reaction chamber. The fluid pressure measuring device is the fluid pressure measuring device in any one of the embodiments, and a fluid channel of the fluid pressure measuring device is communicated with the gas transmission pipeline and is used for measuring the pressure of the process gas in the gas transmission pipeline. The structure of other parts of the semiconductor processing apparatus may refer to the prior art, and will not be described herein. In addition, the fluid pressure measuring device provided by the present application can be used for measuring not only the gas pressure but also the liquid pressure, and is not limited herein.

It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present application, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the application, and are also considered to be within the scope of the application.

Claims (18)

1. A fluid pressure measuring device, which is characterized by comprising a shell, a piezoelectric conversion element and a pressure transmission component;

The housing has a mounting cavity and a fluid passage in communication with the mounting cavity for introducing the fluid;

The piezoelectric conversion element is arranged in the mounting cavity and comprises a detection end face, and the detection end face is used for bearing pressure and converting the pressure into an electric signal;

The pressure transmission assembly is located between the detection end face and the fluid channel and is in sealing connection with the inner wall of the installation cavity, the pressure transmission assembly comprises a first pressure transmission film, a second pressure transmission film and a pressure transmission cavity, the first pressure transmission film faces to a port of the fluid channel, one side, close to the fluid channel, of the first pressure transmission film forms a fluid cavity communicated with the fluid channel, the second pressure transmission film is attached to the detection end face, the pressure transmission cavity is formed between the first pressure transmission film and the second pressure transmission film, a pressure transmission medium is filled in the pressure transmission cavity and is used for being in contact with fluid and generating elastic deformation when bearing the pressure of the fluid, and the pressure transmission medium is used for transmitting the pressure to the second pressure transmission film and generating elastic deformation after bearing the pressure so as to transmit the pressure to the detection end face.

2. The fluid pressure measurement device of claim 1, wherein the pressure transfer assembly further comprises a sealing connection ring sealed against an inner sidewall of the mounting cavity, the second pressure transfer membrane being formed at an end of the sealing connection ring proximate the sensing end face;

the first pressure transmission film is in sealing connection with the inner side wall of the sealing connection ring, a pressure transmission cavity is formed between the first pressure transmission film and the second pressure transmission film, and a fluid cavity communicated with the fluid channel is formed on one side, away from the second pressure transmission film, of the first pressure transmission film.

3. The fluid pressure measuring device of claim 2, wherein the sensing end face is a plane perpendicular to the fluid channel, and the surface of the second pressure transfer membrane remote from the pressure transfer cavity is also a plane and is attached to the sensing end face.

4. The fluid pressure measurement device of claim 2, wherein the surface area of the first pressure transfer membrane is greater than the orthographic projected area of the first pressure transfer membrane on the second pressure transfer membrane.

5. The fluid pressure measurement device of claim 4, wherein the first pressure transfer membrane is a tab having a corrugated structure surrounding a midpoint of the tab.

6. The fluid pressure measuring device of claim 5, wherein the weld lug is a titanium alloy or hastelloy, and the second pressure transfer film is also a titanium alloy or hastelloy.

7. The fluid pressure measurement device of claim 5, wherein the second pressure transfer membrane has a thickness of 0.2mm or greater and 0.27mm or less.

8. The fluid pressure measurement device of claim 5, wherein the thickness of the tab is 0.1mm or greater and 0.8mm or less.

9. The fluid pressure measurement device of claim 5, wherein the outer edge of the lug has reserved lands circumferentially distributed along the lug, and the reserved lands have a width of 1mm or more and 2mm or less.

10. The fluid pressure measurement device of claim 2, wherein the mounting cavity has a seal groove surrounding the fluid channel, a first seal ring is disposed in the seal groove, and an end surface of the seal connection ring remote from the piezoelectric conversion element is sealed in contact with the first seal ring.

11. The fluid pressure measuring device according to claim 2, wherein the end face of the sealing connection ring, which is close to the piezoelectric conversion element, is provided with a first welding groove corresponding to the outer edge position of the detection end face, and the sealing connection ring is welded and fixed with the piezoelectric conversion element through the first welding groove.

12. A fluid pressure measurement device according to claim 2, wherein the housing is provided with a vent hole penetrating a side wall of the mounting cavity, the vent hole being provided adjacent to the fluid passage for venting gas in the mounting cavity when the piezoelectric conversion element and the pressure transfer assembly are mounted;

The piezoelectric conversion element is provided with a sealing step groove which is arranged around the detection end face, a second sealing ring is arranged between the sealing step groove and the inner side wall of the installation cavity, and the exhaust hole is positioned between the second sealing ring and the pressure transmission assembly.

13. The fluid pressure measurement device of any one of claims 1 to 12, further comprising a securing assembly for securing the piezoelectric conversion element in the mounting cavity;

The fixing component comprises a magnetism isolating sleeve and a rear cover;

The magnetic isolation sleeve is sleeved on the periphery of the piezoelectric conversion element and used for isolating magnetic field interference, is fixed on one side of the mounting cavity far away from the fluid channel and limits the piezoelectric conversion element;

the rear cover is sleeved on the periphery of the shell and is used for sealing one side, far away from the fluid channel, of the mounting cavity.

14. The fluid pressure measurement device of claim 13, wherein the magnetism isolating sleeve is internally provided with a magnetism isolating cavity, the piezoelectric conversion element can penetrate into the magnetism isolating cavity, and the inner side wall of the magnetism isolating cavity is used for radially limiting the piezoelectric conversion element;

The piezoelectric conversion element is far away from one side of the detection end face is provided with a first limit groove, a second limit groove is arranged in the magnetism isolating cavity, and when the magnetism isolating sleeve is fixedly connected with the installation cavity, the second limit groove is matched with the first limit groove to axially limit the piezoelectric conversion element.

15. The fluid pressure measurement device of claim 13, wherein the inner sidewall of the mounting cavity is threadably secured to the magnetic shield and the outer sidewall of the mounting cavity is threadably secured to the rear cover.

16. The fluid pressure measurement device of claim 15, further comprising a first positioning member, wherein a first positioning hole is formed in a sidewall of the rear cover, and the first positioning member is disposed through the first positioning hole and is configured to circumferentially position the rear cover.

17. The fluid pressure measurement device of claim 15, further comprising a second positioning member, wherein a second positioning hole is formed in the top of the rear cover, and the second positioning member is disposed through the second positioning hole and is used for circumferentially positioning the magnetism isolating sleeve.

18. A semiconductor process apparatus comprising a reaction chamber, a gas transfer line in communication with the reaction chamber, and a fluid pressure measurement device, wherein the fluid pressure measurement device is a fluid pressure measurement device according to any one of claims 1 to 17, and wherein a fluid passageway of the fluid pressure measurement device is in communication with the gas transfer line.