CN118244238A

CN118244238A - MEMS galvanometer laser radar system and electronic equipment

Info

Publication number: CN118244238A
Application number: CN202410526856.6A
Authority: CN
Inventors: 黄诗华; 莫良华; 谷立民; 李佳鹏
Original assignee: Shenzhen Fushi Technology Co Ltd
Current assignee: Shenzhen Fushi Technology Co Ltd
Priority date: 2024-04-29
Filing date: 2024-04-29
Publication date: 2024-06-25

Abstract

The application provides a MEMS galvanometer laser radar system, comprising: the device comprises a transmitting module, a receiving module, a processing module and a control module. The transmitting module comprises an MEMS galvanometer module, a light source module and a deflection angle amplifying module. The MEMS galvanometer module deflects different reflection angles of the light beam in time sharing sequence. The light source module emits light beams corresponding to the reflection angles of the scanning paths. The deflection angle amplifying module amplifies the deflection angle of the reflected and deflected light beam in the corresponding deflection direction by a preset multiple. The receiving module comprises a photoelectric sensor and a receiving optical device, wherein the receiving optical device transmits optical signals from different directions of a visual field range to corresponding photosensitive pixels on the photoelectric sensor. The processing module is used for obtaining three-dimensional information according to the light sensing signals output by the photosensitive pixels. The control module controls the corresponding photosensitive pixels to sequentially and time-sharing work according to the scanning direction of the light beam. The application also provides an electronic device comprising the MEMS galvanometer lidar system.

Description

MEMS galvanometer laser radar system and electronic equipment

Technical Field

The application belongs to the field of photoelectric detection, and particularly relates to a micro electro mechanical system (Micro Electromechanical System, MEMS) galvanometer laser radar system and electronic equipment for realizing beam deflection through an MEMS galvanometer.

Background

The ranging function of a lidar is generally based on the principle of Time of Flight (ToF) measurement, that is, by transmitting laser pulses to a measurement scene, measuring the Time of Flight of the laser pulses back and forth between the lidar and a target object to calculate three-dimensional information such as the distance of the target object. The ToF measurement has the advantages of long sensing distance, high precision, low energy consumption and the like, and is widely applied to the fields of consumer electronics, intelligent driving, unmanned aerial vehicles, AR/VR and the like.

The angle of view that the single beam of light that utilizes the detection device of TOF measurement principle to carry out range finding can cover is limited, need to obtain bigger field of view scope through the mode that changes the light beam irradiation direction constantly and scans. At present, a common mode of changing the emission direction of a light beam is mainly realized by a transmitting module and a receiving module of a mechanical structure rotation detection device, however, the mode often needs a plurality of discrete devices to be assembled into a mechanical rotation structure, the complexity of debugging and assembling a light path of emission/receiving is high, the mechanical rotation structure is easy to damage and misalign, and the appearance of terminal equipment using the mechanical rotation structure is influenced by the larger size of the mechanical rotation structure.

Disclosure of Invention

In view of the above, the present application provides a MEMS galvanometer lidar system and related electronic devices that can improve the problems of the prior art.

In a first aspect, the present application provides a MEMS galvanometer lidar system configured to sense three-dimensional information of a field of view along a preset scan path, comprising:

the transmission module includes:

The MEMS galvanometer module is configured to deflect different reflection angles of the light beam in sequence in different time periods respectively;

a light source module configured to emit a light beam corresponding to a reflection angle in which the scanning path is located; and

The deflection angle amplifying module is configured to amplify the deflection angle of the light beam reflected by the MEMS galvanometer module in the corresponding deflection direction by a preset multiple;

a receiving module configured to sense an optical signal from the field of view range, comprising:

A photosensor including a plurality of photosensitive pixels configured to respond to the light signals and output corresponding light sensing signals; and

Receiving optics configured to transmit light signals from different orientations of the field of view to corresponding photosensitive pixels, respectively;

the processing module is configured to process the light induction signals to obtain three-dimensional information; and

The control module is configured to control the MEMS galvanometer module to sequentially deflect the reflection angles of the light beams, control the light source module to emit the light beams corresponding to the reflection angles of the deflection paths, and control the corresponding photosensitive pixels to sequentially and time-sharing work according to the scanning direction of the light beams.

In a second aspect, the application provides an electronic device comprising an application module and the MEMS galvanometer lidar system described above. The application module is configured to realize corresponding functions according to the detection result of the MEMS galvanometer laser radar system.

The application has the beneficial effects that:

Compared with the method for realizing deflection of the light beam by a mechanical rotation scheme and a mixed solid state scheme, the method for realizing two-dimensional deflection scanning of the light beam by the MEMS galvanometer module in a preset deflection angle range has the advantages of being free of dependence on fragile and heavy rotating parts, good in reliability and compact in size.

Drawings

The features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.

Fig. 1 is a schematic diagram of a functional module of an electronic device according to an embodiment of the present application;

FIG. 2 is a schematic diagram of functional modules of an embodiment of the MEMS galvanometer laser radar system of FIG. 1;

FIG. 3 is a schematic view of the optical path of the transmitting module of the MEMS galvanometer laser radar system of FIG. 2;

FIG. 4 is a schematic diagram of a scanning path of a beam of a MEMS galvanometer lidar system according to an embodiment of the present application;

FIG. 5 is a schematic diagram of a scanning path of a beam of a MEMS galvanometer lidar system according to an embodiment of the present application;

FIG. 6 is a schematic diagram of a scanning path of a beam of a MEMS galvanometer lidar system according to an embodiment of the present application;

FIG. 7 is a schematic diagram of a scanning path of a beam of a MEMS galvanometer lidar system according to an embodiment of the present application;

FIG. 8 is a schematic diagram showing the frequency of the emitted beam of the MEMS galvanometer laser radar system according to an embodiment of the application as a function of the scan path;

FIG. 9 is a schematic diagram showing the power of the emitted beam of the MEMS galvanometer laser radar system according to an embodiment of the application as a function of the scan path;

FIG. 10 is a schematic view of an optical path of an embodiment of a deflection angle amplifying module of the transmitting module shown in FIG. 3;

FIG. 11 is a schematic view of an optical path of an embodiment of a deflection angle amplifying module of the transmitting module shown in FIG. 3;

fig. 12 is a schematic structural diagram of a MEMS galvanometer lidar system according to an embodiment of the present application as an automotive lidar.

Detailed Description

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application. In the description of the present application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or as implicitly indicating the number or order of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the description of the present application, it should be noted that, unless explicitly specified or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically connected, electrically connected or communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements or interaction relationship between the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

The following disclosure provides many different embodiments, or examples, for implementing different structures of the application. In order to simplify the present disclosure, only the components and arrangements of specific examples will be described below. They are, of course, merely examples and are not intended to limit the application. Furthermore, the present application may repeat use of reference numerals and/or letters in the various examples, and is intended to be simplified and clear illustration of the present application, without itself being indicative of the particular relationships between the various embodiments and/or configurations discussed. In addition, the various specific processes and materials provided in the following description of the present application are merely examples of implementation of the technical solutions of the present application, but those of ordinary skill in the art should recognize that the technical solutions of the present application may also be implemented by other processes and/or other materials not described below.

Further, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to provide a thorough understanding of embodiments of the application. It will be appreciated, however, by one skilled in the art that the inventive aspects may be practiced without one or more of the specific details, or with other structures, components, etc. In other instances, well-known structures or operations are not shown or described in detail to avoid obscuring aspects of the application.

An embodiment of the present application provides a MEMS galvanometer lidar system configured to sense three-dimensional information of a field of view along a preset scan path, comprising:

the transmission module includes:

The control module is configured to control the MEMS galvanometer module to sequentially deflect the reflection angles of the light beams, control the light source module to emit the light beams corresponding to the reflection angles of the deflection paths, and control the corresponding photosensitive pixels to sequentially and time-sharing work according to the scanning direction of the light beams. The three-dimensional information is, for example: proximity information of an object in a field of view, depth information of the surface of the object, coordinate information of the object in the field of view, corresponding distance information and the like. The three-dimensional information may be used in fields such as 3D modeling, identity recognition, autopilot, machine vision, monitoring, unmanned aerial vehicle control, augmented Reality (Augmented Reality, AR)/Virtual Reality (VR), instant location and map building (Simultaneous Localization AND MAPPING, SLAM), object proximity determination, etc., which are not limited in this application.

In some embodiments, the photosensitive pixel includes at least one photoelectric conversion device.

In some embodiments, the photoelectric conversion device may be any one or a combination of a single photon avalanche diode, an avalanche photodiode, or a silicon photomultiplier.

In some embodiments, the MEMS galvanometer module is a two-dimensional MEMS galvanometer module configured to change a reflection angle of the light beam along a first direction and a second direction, the first direction and the second direction being disposed perpendicular to each other.

In some embodiments, the first direction is a horizontal direction and the second direction is a vertical direction; or the first direction is a vertical direction, and the second direction is a horizontal direction.

In some embodiments, the deflection track of the reflection angle is defined as a reflection path of the MEMS galvanometer module to the light beam, where the reflection path includes a plurality of first sections and a plurality of second sections connected to different first sections, the first sections are line segments parallel to the first direction, and the plurality of first sections are parallel to each other and are sequentially arranged at intervals along the second direction.

In some embodiments, the second sections are line segments parallel to the second direction, the second sections are respectively connected with the end parts of the two adjacent first sections on the same side, and the deflection directions of the reflection angles of the light beams on the two adjacent first sections are opposite; or the second sections are line segments which are obliquely arranged compared with the first direction, the second sections are respectively connected with the end parts of the adjacent two first sections on different sides, and the deflection directions of the reflection angles of the light beams on the adjacent two first sections are the same.

In some embodiments, a frame detection for an entire field of view includes multiple scan periods and an intermittent period connecting adjacent two scan periods; the control module is configured to control the MEMS galvanometer module and the light source module to scan and sense along one first subsection in one scanning period, control the MEMS galvanometer module to adjust the reflecting angle of the light beam to the reflecting angle corresponding to the light beam when the scanning and sensing of the next first subsection are started in the intermittent period, and control the light source module to stop emitting the light beam in the intermittent period.

In some embodiments, the control module is configured to control the processing module to process the light sensing signal data obtained by scanning and sensing the last first subsection in an intermittent period.

In some embodiments, the first subsection includes a middle section and first and second sections on opposite sides of the middle section, respectively, and the MEMS galvanometer module is configured to deflect the beam at a higher speed at the middle section than at the first and second sections.

In some embodiments, the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit a light beam at a higher frequency when scanning the middle section than when scanning the first and second sections.

In some embodiments, the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit a light beam at a higher power when scanning the middle section than when scanning the first and second sections.

In some embodiments, the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit light beams less frequently when scanning the middle section than when scanning the first and second sections.

In some embodiments, the deflection angle amplifying module comprises a lens group having a plurality of lenses; or the deflection angle amplifying module comprises a superlens.

The embodiment of the application also provides electronic equipment, which comprises the MEMS galvanometer laser radar system. The electronic equipment realizes corresponding functions according to the three-dimensional information obtained by the MEMS galvanometer laser radar system. The electronic device is, for example: cell phones, automobiles, robots, access control/monitoring systems, intelligent door locks, unmanned mobile vehicles, aircraft, and the like. Taking an intelligent driving vehicle as an example, the MEMS galvanometer laser radar system arranged in the intelligent driving vehicle can scan the surrounding environment by rapidly and repeatedly emitting laser pulses serving as light beams so as to obtain the point cloud data of the appearance, the position and the movement condition of an object in the field of view.

Hereinafter, an embodiment of the MEMS galvanometer laser radar system applied to an electronic device will be described in detail with reference to the accompanying drawings.

Fig. 1 is a schematic diagram of functional modules of a MEMS galvanometer laser radar system according to an embodiment of the present application applied to an electronic device. Fig. 2 is a schematic diagram of a functional module of a MEMS galvanometer lidar system according to an embodiment of the present application.

Referring to fig. 1 and 2, the electronic device 1 comprises a MEMS galvanometer lidar system 10. The MEMS galvanometer lidar system 10 is configured to sense three-dimensional information along a predetermined scan path over a field of view, which may be defined as a spatial range in which the MEMS galvanometer lidar system 10 is capable of effectively detecting three-dimensional information, and may also be referred to as a field of view or a field of view range of the MEMS galvanometer lidar system 10.

The electronic device 1 may include an application module 20, where the application module 20 is configured to perform a preset operation or implement a corresponding function according to a detection result of the MEMS galvanometer lidar system 10, for example, but not limited to: judging whether an object 2 appears in a preset view field range in front of the electronic equipment 1 according to the proximity information of the object 2; or controlling the movement of the electronic equipment 1 to avoid obstacle or navigate, 3D modeling, machine vision and the like according to the distance information and the azimuth information of the object 2 in the view field range; or the identity recognition is realized according to the depth information of the surface of the object 2. That is, the application module 20 may be a collection of software that includes hardware required to perform the operations and implement the functions described above and control coordination of the hardware operations.

The electronic device 1 may further comprise a storage medium 30, which storage medium 30 may provide support for storage requirements of the electronic device 1 and/or the MEMS galvanometer lidar system 10 during operation. As shown in fig. 1, in some embodiments, the storage medium 30 may be disposed inside the electronic device 1. As shown in fig. 2, in some embodiments, the storage medium 30 may also be disposed inside the MEMS galvanometer lidar system 10.

The electronic device 1 may also include a processor 40 that may provide support for data processing requirements of the electronic device 1 and/or the MEMS galvanometer lidar system 10 during operation. As shown in fig. 1, in some embodiments, the processor 40 may be disposed internal to the electronic device 1. As shown in fig. 2, in some embodiments, the processor 40 may also be disposed internal to the MEMS galvanometer lidar system 10.

Alternatively, in some embodiments, the MEMS galvanometer lidar system 10 may perform three-dimensional information sensing based on, for example, a direct time of Flight (DIRECT TIME of Flight, dToF) principle, by transmitting a light beam into a field of view and receiving a light beam reflected back from an object 2 within the field of view, the time difference between the time of transmission and the time of receipt of the reflected light beam is referred to as the time of Flight t of the light beam, and by calculating half the distance the light beam has traveled within the time of Flight t, three-dimensional information of the object 2 may be obtainedWherein c is the speed of light.

In other embodiments, the MEMS galvanometer lidar system 10 may also perform three-dimensional information sensing based on indirect time-of-Flight (INDIRECT TIME of Flight, iToF) measurement principles by comparing the phase difference of the beam as it is transmitted with that of the beam as it is reflected back to obtain three-dimensional information of the object 2.

In other embodiments, the MEMS galvanometer lidar system 10 may also perform three-dimensional information sensing based on frequency modulated continuous wave (Frequency Modulated Continuous Wave, FMCW) measurement principles by interfering the return light with the emitted light, measuring the frequency difference between the transmitted and received light using a mixed frequency detection technique, and converting the frequency difference to a distance from the target object.

In the following embodiments of the present application, the MEMS galvanometer lidar system 10 is mainly described by way of example with reference to dToF measurement principles.

In some embodiments, as shown in FIG. 2, the MEMS galvanometer lidar system 10 includes a transmit module 12, a receive module 14, and a processing module 15. The transmitting module 12 is configured to transmit a light beam to a field of view, and deflect the irradiation direction of the light beam in a time-sharing manner according to a preset scanning path to scan the whole field of view, wherein a part of the light beam is reflected by the object 2 and returns, and the reflected light beam echo carries three-dimensional information of the object 2, and a part of the light beam echo can be sensed by the receiving module 14 to obtain the three-dimensional information of the object 2. The receiving module 14 is configured to sense the light signal from the field of view and output a corresponding light sensing signal, and by analyzing the light sensing signal, three-dimensional information detection can be performed on the object 2 in the field of view. It will be appreciated that the optical signal sensed by the receiving module 14 may include a beam echo reflected by the object 2 within the field of view, or may include ambient light within the field of view. The processing module 15 is configured to analyze and process the photo-induced signal to obtain a moment when the beam echo is sensed by the receiving module 14, for example: the photo-induced signals are processed and analyzed based on a Time-dependent single photon counting (Time-Correlated Single Photon Counting, TCSPC) technique to obtain the instants at which the beam echoes are sensed by constructing photon counting histograms. On this basis, the processing module 15 is further configured to obtain three-dimensional information of the field of view range from the time difference between the emission instant and the reflection-back sensed instant of the light beam.

The processing module 15 may be disposed on the MEMS galvanometer lidar system 10, for example, within the photosensor 140 of the receiving module 14. It will be appreciated that in other embodiments, all or part of the functional units of the processing module 15 may also be provided on the electronic device 1.

In some embodiments, the light beam may be, for example, a plurality of laser pulses that are sequentially emitted. The emission module 12 is configured to emit the laser pulses as a light beam according to a predetermined time sequence. Specifically, the transmitting module 12 scans the field of view partitions 13 located in different directions within the field of view along a preset scanning path in a time-sharing manner, and transmits a plurality of beam pulses to the scanned field of view partitions 13 according to a corresponding preset time sequence to perform three-dimensional information detection. Each time a plurality of light beam pulses are emitted to one view field partition 13, and the time distribution of the light signals sensed by the receiving module 14 is analyzed, three-dimensional information of the view field partition 13 can be correspondingly obtained, the process can be regarded as a partition detection period, the plurality of view field partitions 13 are sequentially scanned one by one and then regarded as one frame of detection is completed for the whole view field range, three-dimensional information of all view field partitions 13 in the whole view field range can be correspondingly obtained, and the process can be used for constructing point clouds of one frame of the whole view field range. That is, one detection frame of the field of view range includes a plurality of partition detection periods respectively corresponding to scans of all the field of view partitions 13 within the field of view range.

Alternatively, the light beam is, for example, visible light, infrared light, or near infrared light, with wavelengths ranging, for example, from 390 nanometers (nm) to 780nm, from 700nm to 1400nm, from 800nm to 1000nm, from 900nm to 1600nm, and the like.

It should be appreciated that the transmit module 12 is disposed side-by-side with the receive module 14 and uses an off-axis optical path for transmitting and sensing. The light emitting surface of the transmitting module 12 and the light entering surface of the receiving module 14 face the same side of the MEMS galvanometer lidar system 10, and the distance between the transmitting module 12 and the receiving module 14 may be, for example, 2 millimeters (mm) to 20mm. Because the transmitting module 12 and the receiving module 14 are relatively close to each other, the transmitting path of the light beam from the transmitting module 12 to the object 2 and the returning path of the light beam from the object 2 to the receiving module 14 after reflection are not completely equal, but are far greater than the distance between the transmitting module 12 and the receiving module 14, and can be regarded as approximately equal. Thus, the distance between the object 2 and the MEMS galvanometer lidar system 10 can be calculated from the product of half the time of flight t of the beam reflected back by the object 2 and the speed of light c.

In some embodiments, as shown in fig. 2, the receiving module 14 may include a photosensor 140 and receiving optics 144. The receiving optics 144 are disposed on the light incident side of the photosensor 140, and are configured to transmit light signals from different directions of the view field range to corresponding photosensitive pixels 142 on the photosensor 140 for sensing. For example, the receiving optics 144 may include a receiving lens (not shown). Alternatively, the receiving lens may include one lens or a plurality of lenses. The photosensor 140 is configured to sense optical signals propagating from the field of view through the receiving optics 144 and output corresponding light sensing signals.

In some embodiments, the receiving module 14 may further include a peripheral circuit (not shown) formed by one or more of a signal amplifier, an Analog-to-Digital Converter (ADC), and the like, and the peripheral circuit may be partially or fully integrated in the photosensor 140.

The photosensor 140 may include a single photosensitive pixel 142 or include a plurality of photosensitive pixels 142. The plurality of photosensitive pixels 142 may be arranged in a two-dimensional array to form a photosensitive pixel array. The field of view range of the MEMS galvanometer lidar system 10 includes a plurality of field of view partitions 13 respectively located at different orientations, a plurality of photosensitive pixels 142 are configured to have a preset correspondence with the plurality of field of view partitions 13, and an optical signal returned from one of the field of view partitions 13 may be propagated to the corresponding one or more photosensitive pixels 142 via the receiving optical device 144 for sensing. That is, the field of view partition 13 corresponding to the photosensitive pixel 142 can be regarded as the field of view formed by the photosensitive pixel 142 through the receiving optical device 144, and the field of view partition 13 corresponding to each of the photosensitive pixels 142 is spliced together to form the field of view range of the MEMS galvanometer lidar system. Thus, when the light beam emitted by the emission module 12 scans the field of view partition 13 and there is an object 2 on the field of view partition 13, the light beam echo reflected by the object 2 propagates to the corresponding photosensitive pixel 142 for sensing through the receiving optical device 144. That is, the optical signal returned from the field of view partition 13 comprises photons of ambient light from the field of view partition 13, and when an object 2 is present in the field of view partition 13 also comprises beam echoes projected to the field of view partition 13 and reflected back by the object 2. It should be appreciated that one field of view partition 13 may be configured to correspond to one photosensitive pixel 142. Or one field of view partition 13 may be configured to correspond to a plurality of photosensitive pixels 142, and when the field of view partition 13 is scanned, the corresponding one or more photosensitive pixels 142 are activated to start working for three-dimensional sensing, and the acquired light sensing signals are combined to acquire three-dimensional information of the field of view partition 13. It should be appreciated that other photosensitive pixels 142 corresponding to the field of view partition 13 not scanned by the light beam may be controlled to cease operation to reduce power consumption and reduce noise caused by ambient light.

The photosensitive pixel 142 may be a single photoelectric conversion device or include a plurality of photoelectric conversion devices. The photoelectric conversion device is configured to sense a received optical signal and convert the received optical signal into a corresponding electrical signal to be output as the photo-sensing signal. Alternatively, the photoelectric conversion device may be, for example, a single photon avalanche diode (Single Photon Avalanche Diode, SPAD), an avalanche photodiode (AVALANCHE PHOTON DIODE, APD), a silicon photomultiplier (Silicon Photomultiplier, siPM) provided in parallel by a plurality of SPADs, and/or other suitable photoelectric conversion element, or a combination of the above.

Fig. 3 is a schematic optical path perspective view of an embodiment of the transmitting module 12 shown in fig. 2. For convenience in describing the deflection scanning situation of the light beam emitted by the emission module 12, the direction in which the central angle of the light beam along the field of view is located is taken as the Y axis, the first direction is taken as the X axis, the second direction is taken as the Z axis, and an orthogonal rectangular coordinate system is established, and other light path diagrams of the present application are also described by the coordinate system. It should be appreciated that in embodiments where the first direction is a horizontal direction and the second direction is a vertical direction, the XOY plane represents a horizontal plane and the YOZ plane represents a vertical plane.

As shown in fig. 3, the emission module 12 is configured to deflect the light beam along a preset scan path to perform three-dimensional information sensing on the field of view. The emission module 12 includes a light source module 122, a MEMS galvanometer module 126, and a deflection angle amplifying module 128.

The light source module 122 is configured to emit light beams at a preset timing. The light source module 122 includes one or more light emitting units (not shown) configured to emit the light beam. The light emitting unit may be a light emitting device in the form of a vertical cavity Surface emitting Laser (VERTICAL CAVITY Surface emitting Laser EMITTING LASER, abbreviated as VCSEL, or may be translated into a vertical resonant cavity Surface emitting Laser), a side emitting Laser (EDGE EMITTING LASER, EEL), a light emitting Diode (LIGHT EMITTING Diode, LED), a Laser Diode (LD), a fiber Laser, or the like. The edge emitting laser may be a Fabry Perot (FP) laser, a distributed feedback (Distribute Feedback, DFB) laser, an Electro-absorption modulated laser (Electro-absorption Modulated, EML), or the like, which is not limited in the embodiment of the present application.

In some embodiments, the emission module 12 may further include a collimation module 121. The collimating unit 121 is configured to collimate the light beam emitted from the light source module 122 along the optical axis direction, so as to improve the collimation degree of the light beam emitted from the light source module 122. Alternatively, the collimating module 121 may employ collimating optics such as a collimating lens, a superlens, or a cylindrical lens.

The MEMS galvanometer module 126 is configured to sequentially deflect different angles of reflection of the beam at different time periods, respectively, to effect deflection scanning of the beam over a range of fields of view at different time periods. The reflection angle of the light beam may be defined as an angle of the light beam deviating from the center direction of the field of view after being reflected, and may also be referred to as a deflection angle of the light beam.

In some embodiments, the MEMS galvanometer module 126 is configured to deflect the beam of light at reflection angles in different two-dimensional directions, the plurality of reflection angles of the beam of light being defined by angles of the beam of light that deviate from a center direction of the field of view in the first and second directions, respectively. Alternatively, the first direction may be perpendicular to the second direction. For example, in some embodiments, the first direction is a horizontal direction and the second direction is a vertical direction; in other embodiments, the first direction is a vertical direction and the second direction is a horizontal direction.

In other examples, the MEMS galvanometer module 126 is configured to deflect the angle of reflection of the beam in one dimension. For example, the MEMS galvanometer module 126 is configured to deflect the angle of reflection of the beam in only the horizontal direction; or the MEMS galvanometer module 126 is configured to deflect the angle of reflection of the beam only in the vertical direction.

The deflection angle amplifying module 128 is configured to amplify the deflection angle of the light beam reflected by the MEMS galvanometer module 126 in the corresponding deflection direction by a preset multiple. For example, the deflection angle amplification module 128 amplifies the deflection angle of the light beam in the first direction and/or the second direction by a corresponding multiple. Optionally, the angle of deflection magnifying module 128 includes a lens group or a superlens having a plurality of lenses, through which the angle of deflection magnifying function of the light beam is implemented.

The control module 18 includes an emission control unit 182 and a deflection control unit 184. The deflection control unit 184 is configured to control the MEMS galvanometer module 126 to sequentially deflect the reflection angles of the light beam at different periods, respectively, where the deflection track of the reflection angles may be defined as a reflection path of the light beam by the MEMS galvanometer module 126, and it may be understood that the light spot variation track formed at a corresponding position in the field of view, which is assumed to reflect the light beam by the MEMS galvanometer module 126 when the MEMS galvanometer module 126 is in a state of different reflection angles, is independent of whether the light beam is actually reflected.

The emission control unit 182 is configured to control the light source module 122 to emit light beams corresponding to preset reflection angles in different reflection angles of the MEMS galvanometer module 126, so that the reflected light beams scan in different directions corresponding to the field of view range, forming an actual scan path of the field of view range. It should be noted that, the reflection path of the MEMS galvanometer module 126 for the light beam requires the light source module 122 to emit the light beam at the corresponding reflection angle of the reflection path to form the actual scanning path of the field of view, so the reflection path of the MEMS galvanometer module 126 for the light beam may include the actual scanning path of the light beam for the field of view, but the two paths are not required to be completely identical. The actual scan path of the beam is the portion of the beam reflected by the MEMS galvanometer module 126 that is actually emitted by the light source module 122. In an embodiment of the present application, a portion of the reflection path where the actual scanning path of the light beam is formed is indicated by a solid line, and a portion of the reflection path where the actual scanning path of the light beam is not is indicated by a broken line.

For example, in the embodiment shown in fig. 4, the reflection path 16 of the beam by the MEMS galvanometer module 126 includes a plurality of first sections 1601, where the first sections 1601 are line segments parallel to the first direction, and the plurality of first sections 1601 are parallel to each other and are sequentially spaced apart along the second direction. The area irradiated by the light beam emitted by the light source module 122 along one of the reflection angles on the reflection path 16 may be defined as a field of view partition 13 corresponding to the reflection angle, and the plurality of field of view partitions 13 arranged along the first section 1601 are sequentially irradiated correspondingly during the process that the light beam is reflected by the MEMS galvanometer module 126 and scanned along the first section 1601, where the first section 1601 may be used as an actual scanning path of the light beam. The reflected path 16 of the beam by the MEMS galvanometer module 126 also includes a plurality of second sections 1602 that connect to the different first sections 1601. In the embodiment shown in fig. 4, the second sections 1602 are line segments parallel to the second direction, and the second sections 1602 are respectively connected to the end portions of two adjacent first sections 1601 on the same side. The emission control unit 182 may be configured to control the light source module 122 to continue emitting the light beam on the second section 1602 of the beam reflection path of the MEMS galvanometer module 126 to form an actual scan path of the light beam on the second section 1602, which is shown in solid lines in fig. 4. In this case, the light beam is scanned from one end to the other end of one first section 1601 along a predetermined direction, and can be scanned onto the adjacent other first section 1601 via the joined second section 1602, wherein the scanning direction is opposite to the scanning direction of the previous first section 1601. That is, the direction of change of the beam reflection angle on the adjacent two first sections 1601 is opposite. The beam forms a field of view zone 13 along the area illuminated by each reflection angle during the scanning of the first sub 1601. The two view field sections 13 corresponding to the two adjacent reflection angles of the light beams on the same first section 1601 may be configured to be spliced or partially overlapped, so that after all the view field sections 13 on one first section 1601 are overlapped, the entire view field angle range corresponding to the first section 1601 may be covered without omission. The deflection of the beam along the second section 1602 may be switched from detecting the current field of view partition 13 at one end of one of the first sections 1601 to detecting the field of view partition 13 at the same end of the other adjacent first section 1601. The two view field partitions 13, in which the corresponding positions of the light beams on the adjacent two first sections 1601 are scanned respectively, may be configured to collectively fill the interval between the adjacent two first sections 1601, so that the light beams after sequentially scanning the plurality of first sections 1601 arranged along the second direction may cover the view angle range of the entire view field range along the second direction without omission.

In other embodiments, as shown in fig. 5, the reflection path 16 of the beam by the MEMS galvanometer module 126 includes a plurality of first sections 1601, where the first sections 1601 are line segments parallel to the first direction, and the plurality of first sections 1601 are parallel to each other and are sequentially spaced apart along the second direction. The reflection path 16 of the MEMS galvanometer module 126 for the light beam further includes a plurality of second sections 1602 connected to the different first sections 1601, where the second sections 1602 are line segments obliquely arranged compared with the first direction, and are respectively connected to the end portions of the two adjacent first sections 1601 on different sides, so as to form a "Z" type reflection path 16. The emission control unit 182 may be configured to control the light source module 122 to continue emitting the light beam on the second section 1602 of the beam reflection path of the MEMS galvanometer module 126 to form an actual scan path of the light beam on the second section 1602, which is shown in solid lines in fig. 5. In this case, the light beam is scanned from one end to the other end along a predetermined direction on one of the first sections 1601, and then scanned by the joined second section 1602 to the end of the adjacent first section 1601 on the opposite side, so that the scanning direction on the adjacent first section 1601 is the same as the scanning direction on the previous first section 1601. That is, the light beams are scanned in the same scanning direction on different first sections 1601, respectively. Similarly, the beam forms a field of view zone 13 along the area illuminated by each reflection angle during the scanning of the first sub 1601. The two view field sections 13 of the light beam, which are scanned correspondingly on the same first section 1601 at two adjacent reflection angles, may be arranged to be spliced or partially overlapped with each other, so that the entire view field angle range corresponding to the entire first section 1601 may be covered without omission after all the view field sections 13 on the first section 1601 are overlapped. The beam may be switched during deflection along the second section 1602 from detecting the field of view partition 13 currently located at one end of one of the first sections 1601 to detecting the field of view partition 13 located at the opposite end of the other, adjacent, first section 1601. The field of view partitions 13, in which the light beams are scanned at corresponding positions on the two adjacent first branches 1601, may be configured to collectively fill the space between the two adjacent first branches 1601, so that the light beams can cover the entire field of view range along the second direction without omission after sequentially scanning the plurality of first branches 1601 arranged along the second direction.

For example, in the embodiment shown in fig. 6, the reflection path 16 of the MEMS galvanometer module 126 for the light beam is the same as the embodiment shown in fig. 4, and includes a plurality of first sections 1601 parallel to the first direction and a plurality of second sections 1602 parallel to the second direction, where the plurality of first sections 1601 are spaced apart along the second direction, and the second sections 1602 are respectively connected to the ends of two adjacent first sections 1601 on the same side. In contrast to the embodiment shown in fig. 4, in the embodiment shown in fig. 6, the emission control unit 182 is configured to control the light source module 122 to emit the light beam when the MEMS galvanometer module 126 is deflected by a reflection angle along the first section 1601 of the beam reflection path 16, and to stop emitting the light beam when the MEMS galvanometer module 126 is deflected by a reflection angle along the second section 1602 of the beam reflection path 16. In this case, the emission module 12 forms a scanning path only on the first section 1601 of the beam reflection path 16 by the MEMS galvanometer module 126, which is shown in solid lines in fig. 6, and does not form an actual scanning path of the beam on the second section 1602 of the beam reflection path 16 by the MEMS galvanometer module 126, which is shown in broken lines in fig. 6. Thus, in the embodiment shown in fig. 6, the actual scanning path of the light beam formed by the emission module 12 in the field of view is a plurality of first sections 1601 of the light beam reflection path 16, which are arranged parallel to the first direction and spaced apart along the second direction by the MEMS galvanometer module 126.

For example, in the embodiment shown in fig. 7, the reflection path 16 of the MEMS galvanometer module 126 for the light beam is the same as the embodiment shown in fig. 5, and includes a plurality of first sections 1601 parallel to the first direction and a plurality of second sections 1602 disposed obliquely with respect to the first direction, where the plurality of first sections 1601 are arranged at intervals along the second direction, and the second sections 1602 are respectively connected to the ends of the adjacent two first sections 1601 on different sides thereof to form a "Z" type reflection path 16. In contrast to the embodiment shown in fig. 5, in the embodiment shown in fig. 7, the emission control unit 182 is configured to control the light source module 122 to emit the light beam when the MEMS galvanometer module 126 is deflected by a reflection angle along the first section 1601 of the beam reflection path 16, and to stop emitting the light beam when the MEMS galvanometer module 126 is deflected by a reflection angle along the second section 1602 of the beam reflection path 16. In this case, the emission module 12 forms a scanning path only on the first section 1601 of the beam reflection path 16 by the MEMS galvanometer module 126, which is shown in solid lines in fig. 6, and does not form an actual scanning path of the beam on the second section 1602 of the beam reflection path 16 by the MEMS galvanometer module 126, which is shown in broken lines in fig. 6. Thus, in the embodiment shown in fig. 6, the actual scanning path of the light beam formed by the emission module 12 in the field of view is a plurality of first sections 1601 of the light beam reflection path 16, which are arranged parallel to the first direction and spaced apart along the second direction by the MEMS galvanometer module 126.

The MEMS galvanometer laser radar system 10 detects a frame of the entire field of view including a scan period corresponding to the actual scan path of the beam, i.e., the scan period corresponds to a period of time during which the beam is emitted by the light source module 122 in synchronization with the reflected path 16 of the beam by the MEMS galvanometer module 126 to form the actual scan path of the beam. And a period of time during which the light source module 122 does not synchronously emit the light beam in the reflection path 16 of the light beam by the corresponding MEMS galvanometer module 126 is detected as an intermittent period. Since the speed of the beam deflected by the MEMS galvanometer module 126 along the first division 1601 by reflection is significantly higher than the speed of the beam deflected along the second division 1602, it takes a relatively long time for the beam to deflect via the MEMS galvanometer module 126 from the field of view partition 13 detecting the end of the current first division 1601 along the second division 1602 to the field of view partition 13 detecting the beginning of the next first division 1601. In the embodiment of fig. 6 and 7, the period of time during which the light beam scans the entire field of view partition 13 on one first section 1601 may be defined as one scanning period, and then a plurality of scanning periods are formed corresponding to the plurality of first sections 1601 of the light beam scanning path, and a plurality of intermittent periods are formed corresponding to the plurality of second sections 1602 of the light beam reflection path 16 of the MEMS galvanometer module 126, which do not emit the light beam synchronously, and the intermittent periods are connected to two adjacent scanning periods, corresponding to the connection relationship between the first sections 1601 and the second sections 1602. The emission control unit 182 controls the light source module 122 to emit a light beam along the light beam emission path 16 of the MEMS galvanometer module 126 during a scanning period to form an actual scanning path of the light beam, and the emission control unit 182 controls the light source module 122 to stop emitting the light beam during an intermittent period.

The control module 18 may further include a sensing control unit 186 configured to control the corresponding photosensitive pixels 142 to operate sequentially in time-sharing according to the scanning orientation of the light beam to receive light signals from the field of view partition 13 currently scanned by the light beam. The sensing control unit 186 is configured to control the photosensitive pixels 142 to stop operating during the intermittent period.

The plurality of field-of-view partitions 13 sequentially distributed along the first division 1601 are the same row of field-of-view partitions 13, and the plurality of photosensitive pixels corresponding to the same row of field-of-view partitions 13 may be defined as a photosensitive pixel group, and the plurality of photosensitive pixel groups respectively correspond to the plurality of rows of field-of-view partitions 13 sequentially arranged along the second direction. The sensing control unit 186 is configured to control the time-sharing operation of the photosensitive pixels 142 and the scanning direction of the light beam to be synchronized, and the time-sharing operation order of the photosensitive pixels 142 in the same photosensitive pixel group is the same as the corresponding scanning order of the same row of the field of view partition 13 along the first division 1601.

For example, in the embodiment shown in fig. 4 and 6, since the light beams are scanned in opposite scanning directions on the adjacent two first sections 1601, respectively, the two sensing pixel groups for sensing the field of view partitions 13 on the adjacent two first sections 1601 are also correspondingly and adjacently arranged on the photosensors 140, and the sensing control unit 186 controls the photosensitive pixels 142 inside each of the two adjacently arranged photosensitive pixel groups to operate in opposite order in a time-sharing manner.

For example, in the embodiment shown in fig. 5 and 7, since the light beams are scanned in the same scanning direction on the adjacent two first sections 1601, respectively, the two sensing pixel groups for sensing the field of view partitions 13 on the adjacent two first sections 1601 are also correspondingly arranged adjacently on the photosensor 140, and the sensing control unit 186 is configured to control the photosensitive pixels inside the respective two photosensitive pixel groups arranged adjacently to operate in the same order in a time-sharing manner.

The emission control unit 182 is further configured to control the light source module 122 to emit light beam pulses at a preset timing within a corresponding partition detection period detected for one field of view partition 13. The area illuminated by the beam after being reflected along the preset reflection angle of the MEMS galvanometer module 126 is the field of view zone 13 corresponding to the preset reflection angle.

In some embodiments, as shown in fig. 8, the first subsection 1601 includes a middle section and a first section and a second section on opposite sides of the middle section, respectively. The MEMS galvanometer module 126 deflects the beam at a higher speed in the middle section than in the first and second sections. Thus, the emission control unit 182 is further configured to correspondingly adjust the parameters of the light beam emitted by the light source module 122 to compensate for the total energy difference of the light beam emitted by the emission module 12 for the field of view partition 13 with different orientations due to the speed variation of the reflection angle of the deflected light beam by the MEMS galvanometer module 126 along the first partition 1601. And the detection effect of three-dimensional information detection based on dToF principle, such as: detection accuracy, detection precision, confidence, etc., are related to detecting emitted beam energy, so reducing the difference in beam energy for different orientations of field of view partitions 13 may reduce the difference in detection effect for different orientations of field of view partitions 13. Correspondingly, the sensing control unit 186 is configured to control the operation durations of the different photosensitive pixels 142 in the same photosensitive pixel group to sequentially shorten and sequentially increase according to the respective time-sharing start-up orders. That is, the sensing control unit 186 controls the operation time period of the photosensitive pixels 142 corresponding to the first and second segments within the same photosensitive pixel group to be longer than the operation time period of the photosensitive pixels 142 corresponding to the sensing middle segment.

Optionally, the parameters of the light beam emitted by the light source module 122 include, but are not limited to, the frequency of the emitted light beam, the power of the emitted light beam, and the total number of times the emitted light beam is emitted to the corresponding field of view partition 13 in one partition detection period, and the emission control unit 182 may compensate for the total energy difference of the emitted light beam of the emission module 12 for the different field of view partition 13 due to the speed variation of the deflected light beam of the MEMS galvanometer module 126 along the first partition 1601 by controlling one or more different parameters as described above.

It should be understood that the total energy of the light beam emitted by the emitting module 12 for the field of view partition 13 with different orientations on the first partition 1601 is set differently according to different application scenarios. For example, for an on-board main lidar, a relatively long measurement is required for the middle field of view partition 13, so the total energy of the emitted beam of light of the middle field of view partition 13 by the emitting module 12 is relatively high. Thus, the above-mentioned parameter adjustment of the light beam emitted by the light source module 122 by the emission control unit 182 is used for compensation, which is caused by the difference of the total energy of the light beam emitted by the emission module 12 for different field of view partitions 13 due to the speed variation of the deflected light beam by the MEMS galvanometer module 126, and does not mean that the total energy of the light beam emitted by the emission module 12 for different field of view partitions 13 is compensated to be consistent with each other.

In particular, in some embodiments as shown in fig. 8, the emission control unit 182 may be configured to correspondingly control the light source module 122 to emit light beams at a higher frequency when scanning the middle section than when scanning the first and second sections. Therefore, the difference between the number of the beam pulses emitted to the middle field-of-view partition 13 and the number of the beam pulses emitted to the first field-of-view partition 13 and the second field-of-view partition 13 due to the relatively short time of the beam emitted from the middle field-of-view partition 13 by the emission module 12 can be compensated, and the error caused by the deviation of the total energy of the emitted beam from the preset value due to the relatively short time of the beam emitted from the middle field-of-view partition 13 can be correspondingly compensated under the condition that the emission power of each beam pulse is the same, thereby being beneficial to improving the detection accuracy of the MEMS galvanometer laser radar system 10.

In particular, in some embodiments as shown in fig. 9, the emission control unit 182 may be configured to correspondingly control the light source module 122 to emit a light beam at a higher power when scanning the middle section than when scanning the first and second sections. In the case that the light source module 122 uses the same light beam emission frequency to detect the different view field partitions 13, since the time for the emission module 12 to emit the light beam to the middle view field partition 13 is relatively short, the number of light beam pulses emitted to the middle view field partition 13 is smaller than the number of light beam pulses emitted to the first and second view field partitions 13 when the detection is performed. Therefore, the power of the light beam emitted from the middle field of view partition 13 is set to be higher than the power of the light beam emitted from the first and second field of view partitions 13 when the light source module 122 detects, so that errors caused by deviation of total energy of the light beams correspondingly emitted from the different field of view partitions 13 from a preset value can be correspondingly compensated, and the detection accuracy of the MEMS galvanometer laser radar system 10 can be improved.

Optionally, in some embodiments, since the light energy loss of the light beam passing through the deflection angle amplifying module 128 is proportional to the deflection angle of the light beam passing through the deflection angle amplifying module 128, the deflection angle of the light beam passing through the deflection angle amplifying module 128 corresponding to the first field of view partition 13 and the second field of view partition 13 on the first division 1601 is greater than the deflection angle of the light beam passing through the deflection angle amplifying module 128 corresponding to the middle field of view partition 13, so that the light energy loss generated by the light beam passing through the deflection angle amplifying module 128 corresponding to the middle field of view partition 13 is greater than the light energy loss generated by the light beam passing through the deflection angle amplifying module 128 corresponding to the middle field of view partition 13. Thus, to compensate for the difference in optical energy loss caused by the deflection angle amplification module 128 to the light beams of different deflection angles to improve the detection accuracy of the MEMS galvanometer laser radar system 10, the emission control unit 182 may be configured to correspondingly control the number of times the light source module 122 emits the light beam during the detection of the one field of view partition 13 located in the middle section to be less than the number of times the light beam is emitted during the detection of the one field of view partition 13 located in the first section and the second section.

Correspondingly, in some embodiments, the control module 18 further comprises a data processing control unit 188. The data processing control unit 188 is configured to control the processing module 15 to perform analysis processing on the relevant data of the field of view partition 13 detected on the last first partition 1601 during the intermittent period, so as to obtain corresponding three-dimensional information. The data generated by detecting the field of view partition 13 of the previous first partition 1601 by the intermittent process of stopping detection can improve the data processing efficiency of the MEMS galvanometer lidar system 10, and can further reduce the storage medium 30 for caching data, thereby reducing the hardware cost of the MEMS galvanometer lidar system 10.

In some embodiments, the deflection angle amplifying module 128 may be a lens group, for example, including a first lens 1281 and a second lens 1282. The first lens 1281 and the second lens 1282 are sequentially arranged along the propagation direction of the light beam, the optical axis of the first lens 1281 and the optical axis of the second lens 1282 are coincident with the central direction of the field range, and the focal point on one side of the first lens 1281 and the focal point on one side of the second lens 1282 are mutually coincident in the section between the first lens 1281 and the second lens 1282. That is, the beam reflected and deflected by the MEMS galvanometer module 126 is converged on the focal plane of the second lens 1282 by the first lens 1281, and then deflected by the second lens 1282 to amplify the deflection angle.

For example, in the embodiment shown in fig. 10, the first lens 1281 and the second lens 1282 each have positive optical power. If the focal length of the first lens 1281 is F1 and the focal length of the second lens is F2, the angle of deflection amplifying module 128 amplifies the angle of deflection of the light beam by m=f1/F2, that is, the angle of deflection of the light beam, reflected by the MEMS galvanometer module 126 before entering the angle of deflection amplifying module 128, deviating from the center direction of the field of view is amplified by M times after passing the angle of deflection amplifying module 128.

For example, in the embodiment shown in fig. 11, the first lens 1281 has positive power, the second lens 1282 has negative power, and if the focal length of the first lens 1281 is F1 and the focal length of the second lens is F2, the angle of deflection of the beam by the deflection angle amplifying module 128 is amplified by m=f1/F2, that is, the angle of deflection of the beam reflected by the MEMS galvanometer module 126 from the center direction of the field of view before entering the deflection angle amplifying module 128 is amplified by M times after passing through the deflection angle amplifying module 128.

It should be appreciated that the first lens 1281 may be a single lens or a lens group including a plurality of lenses. Similarly, the second lens 1282 may be a single lens or a lens group including a plurality of lenses.

It should be appreciated that the first lens 1281 and the second lens 1282 may each be spherical mirrors rotationally symmetric about the optical axis configured to magnify the angle of deflection of the passing light beam in all directions by the same factor. For example, the first and second lenses 1281, 1282 magnify the angle of deflection of the passing light beam M times along both the first and second directions, the first direction being perpendicular to the second direction.

The number of beam reflection angles N1 (also referred to as the number of resolvable points) of the MEMS galvanometer module 126 deflected in the first direction, the frequency f1 of the beam reflection angles of the MEMS galvanometer module 126 deflected in the first direction, and the minimum number of beam pulses to be transmitted for one reflection angle of the MEMS galvanometer lidar system 10 in the first directionAnd the time interval DeltaT _x between two successive beam pulses is related as follows:

It should be appreciated that, because the number of beam pulses emitted by the MEMS galvanometer lidar system 10 at each of the different angles of reflection along the first direction may vary, Refers to the minimum of the number of pulses of the emitted beam at each reflection angle deflected in the first direction.

The deflection angle number N2 of the beam reflection angle deflected by the MEMS galvanometer module 126 along the second direction is related to the frequency f1 of the beam reflection angle deflected by the MEMS galvanometer module 126 along the first direction and the frequency f2 of the beam reflection angle deflected by the MEMS galvanometer module 126 along the second direction, specifically by the following relationship:

If the angle range of the beam emitted by the MEMS galvanometer lidar system 10 is θ ₁ and the angle range of the beam deflected in the second direction is θ ₂, the expression of the angular resolution δθ ₁ of the beam reflection angle of the MEMS galvanometer lidar system 10 deflected in the first direction is:

Wherein f1 is the frequency of the beam reflection angle deflected by the MEMS galvanometer module 126 along the first direction, The minimum number of beam pulses and ΔT _x required to be transmitted for a reflection angle of the MEMS galvanometer lidar system 10 in the first direction is the time interval between two consecutive beam pulses,/>The time required to complete a test for one of the reflected angles of the MEMS galvanometer lidar system 10 deflected in the first direction. The MEMS galvanometer lidar system 10 deflects the angular resolution δθ ₂ of the beam reflection angle in the second direction by the expression: /(I)

Where f1 is the frequency at which the MEMS galvanometer module 126 deflects the beam reflection angle in a first direction, and f2 is the frequency at which the MEMS galvanometer module 126 deflects the beam reflection angle in a second direction.

It should be understood that the first direction refers to a direction in which the MEMS galvanometer module 126 deflects the beam at a faster speed, which may also be referred to as a fast axis direction of the MEMS galvanometer module 126, and corresponds to the first subsection 1601 of the beam reflection path 16 by the MEMS galvanometer module 126; the second direction refers to a direction in which the MEMS galvanometer module 126 deflects the beam at a slower rate of reflection, and may also be referred to as a slow axis direction of the MEMS galvanometer module 126, corresponding to the second segment 1602 in the beam reflection path 16. The field of view partitions 13 of the field of view range, in which the light beam is time-division scanned, are arranged along the first direction. The field of view partitions 13 of different rows are arranged along the second direction; or the second direction joins the field of view partitions 13 at the ends of adjacent different rows.

Optionally, in some embodiments, the first direction is perpendicular to the second direction. For example: the first direction is a horizontal direction, and the second direction is a vertical direction; or the first direction is a vertical direction, and the second direction is a horizontal direction.

The deflection control unit 184 controls the MEMS galvanometer module 126 to sequentially change different reflection angles of the light beam along the reflection path of the light beam at different periods when the light beam is scanned. The emission control unit 182 controls the light source module 122 to emit light beams corresponding to the preset reflection angles on the reflection paths, so as to form corresponding scanning paths within the field of view. For a preset reflection angle of the light beam within the field of view, the emission control unit 182 controls the light source module 122 to emit the light beam pulse to the corresponding field of view partition 13 along the preset reflection angle according to the preset time sequence. In order to make dToF the time-dependent single-photon counting method used for measurement have a mathematical statistical significance, the emission control unit 182 controls the corresponding light source module 122 to emit a plurality of light beam pulses in a preset time sequence within a segment detection period for detecting one field of view segment 13, for example: tens, hundreds, thousands, tens of thousands, or even millions of light beam pulses are emitted corresponding to one sensing period, i.e., one divisional detection period includes a plurality of sensing periods. Correspondingly, the sensing control unit 186 controls the photosensitive pixels 142 corresponding to the currently detected field of view partition 13 to be turned on in a time-sharing manner to sense the light signals from the field of view partition 13 so as to acquire the three-dimensional information of the field of view partition 13.

In some embodiments, all or a portion of the functional elements in the control module 18 and/or processing module 15 may include firmware solidified within the storage medium 30 or computer software code stored within the storage medium 30 and executed by the corresponding one or more processors 40 to control the relevant components to implement the corresponding functions. Such as, but not limited to, an application processor (Application Processor, AP), a central processor (Central Processing Unit, CPU), a microcontroller (Micro Controller Unit, MCU), etc. The storage medium 30 includes, but is not limited to, flash Memory (Flash Memory), charged erasable programmable read-only storage medium (ELECTRICALLY ERASABLE PROGRAMMABLE READ ONLY MEMORY, EEPROM), programmable read-only storage medium (Programmable read only Memory, PROM), hard disk, and the like.

In some embodiments, the processor 40 and/or storage medium 30 may be disposed within the MEMS galvanometer laser radar system 10, such as: is integrated on the same circuit board as the transmitting module 12 or the receiving module 14. Alternatively, in other embodiments, the processor 40 and/or the storage medium 30 may be located elsewhere in the electronic device 1, such as: on the main circuit board of the electronic device 1.

In some embodiments, some or all of the functional units of the control module 18 and/or the processing module 15 may also be implemented by hardware means, for example by any one or a combination of the following techniques: discrete logic circuits having logic gates for implementing logic functions on data signals, application specific integrated circuits having suitable combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), driver circuits for specific objects, and the like.

It will be appreciated that the different functional units of the control module 18 and/or the processing module 15 may each comprise associated hardware, for example: the emission control units 182 may all include driving circuits of the light source modules 122.

It will be appreciated that the hardware described above for implementing the functions of the control module 18 and/or the processing module 15 may be provided within the MEMS galvanometer lidar system 10. The hardware described above for implementing the functions of the control module 18 and/or the processing module 15 may also be provided in other locations of the electronic device 1, such as: is provided on a main circuit board of the electronic device 1.

As shown in fig. 12, in some embodiments, the MEMS galvanometer lidar system 10 is, for example, a lidar and the electronic device 1 is, for example, an automobile. The laser radar can be arranged at a plurality of different positions on the automobile to detect the distance information of objects in the peripheral range of the automobile and realize driving control according to the distance information.

Compared with the laser radar adopting a mechanical rotation mode to realize beam scanning, the laser radar provided by the application adopts the semi-solid MEMS galvanometer module 126 to realize deflection scanning of the beam, has higher reliability and more compact structure because no mechanical rotation part is needed, is easier to pass strict vehicle specification requirements, and has less influence on the appearance of an automobile.

It should be noted that, the technical solution to be protected by the present application may only satisfy one of the embodiments described above or simultaneously satisfy the embodiments described above, that is, the embodiment formed by combining one or more embodiments described above also belongs to the protection scope of the present application.

In the description of the present specification, reference to the terms "one embodiment," "certain embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing description of the preferred embodiments of the application is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the application.

Claims

1. A MEMS galvanometer laser radar system configured to sense three-dimensional information of a field of view along a preset scan path, comprising:

the transmission module includes:

A light source module configured to emit a light beam; and

The control module is configured to control the MEMS galvanometer module to sequentially deflect the reflection angles of the light beams, control the light source module to emit the light beams corresponding to the reflection angles of the scanning paths, and control the corresponding photosensitive pixels to sequentially and time-sharing work according to the scanning directions of the light beams.

2. The MEMS galvanometer laser radar system of claim 1, wherein the photosensitive pixel includes at least one photoelectric conversion device.

3. The MEMS galvanometer laser radar system of claim 2, wherein the photoelectric conversion device is any one or a combination of a single photon avalanche diode, an avalanche photodiode, or a silicon photomultiplier.

4. The MEMS galvanometer laser radar system of claim 1, wherein the MEMS galvanometer module is a two-dimensional MEMS galvanometer module configured to deflect a reflection angle of the beam in the first direction and the second direction.

5. The MEMS galvanometer laser radar system of claim 4, wherein the first direction and the second direction are disposed perpendicular to each other, the first direction being a horizontal direction and the second direction being a vertical direction; or alternatively

The first direction is a vertical direction, and the second direction is a horizontal direction.

6. The MEMS galvanometer laser radar system of claim 4, wherein the deflection trajectory of the reflection angle is defined as a reflection path of the beam by the MEMS galvanometer module, the reflection path including a plurality of first sections and a plurality of second sections connected to the different first sections, the first sections being line segments parallel to the first direction, the plurality of first sections being parallel to each other and being sequentially spaced apart along the second direction.

7. The MEMS galvanometer laser radar system of claim 6, wherein the second section is a line segment parallel to the second direction, the second section is connected to the ends of two adjacent first sections on the same side, and the deflection directions of the reflection angles of the light beams on the two adjacent first sections are opposite; or alternatively

The second branch is a line segment which is obliquely arranged relative to the first direction, the second branch is respectively connected with the end parts of the two adjacent first branches at different sides, and the deflection directions of the reflection angles of the light beams on the two adjacent first branches are the same.

8. The MEMS galvanometer laser radar system of claim 6, wherein one frame of detection of the entire field of view includes a plurality of scan periods and an intermittent period connecting adjacent two scan periods; the control module is configured to control the MEMS galvanometer module and the light source module to scan and sense along one first subsection in one scanning period, control the MEMS galvanometer module to adjust the reflecting angle of the light beam to the reflecting angle corresponding to the light beam when the scanning and sensing of the next first subsection are started in the intermittent period, and control the light source module to stop emitting the light beam in the intermittent period.

9. The MEMS galvanometer laser radar system of claim 8, wherein the control module is configured to control the processing module to process the photo-induced signal data obtained from scanning the last first subsection during the intermittent period.

10. The MEMS galvanometer laser radar system of claim 6, wherein the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, the MEMS galvanometer module being configured to deflect the beam at a higher velocity at the middle section than at the first and second sections.

11. The MEMS galvanometer laser radar system of claim 10, wherein the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit a light beam at a higher frequency when scanning the middle section than when scanning the first and second sections.

12. The MEMS galvanometer laser radar system of claim 6, wherein the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit a light beam at a higher power when scanning the middle section than when scanning the first and second sections.

13. The MEMS galvanometer laser radar system of claim 6, wherein the first subsection includes a middle section and first and second sections located on opposite sides of the middle section, respectively, and the control module is configured to control the light source module to emit a light beam less frequently when scanning the middle section than when scanning the first and second sections.

14. The MEMS galvanometer laser radar system of claim 1, wherein the deflection angle amplifying module includes a lens group having a plurality of lenses; or alternatively

The deflection angle amplifying module comprises a superlens.

15. An electronic device comprising the MEMS galvanometer lidar system of any of claims 1-14, the electronic device further comprising an application module configured to implement a corresponding function based on a detection result of the MEMS galvanometer lidar system.