CN118163314A - Injection molding method of liquid medicine valve part and liquid medicine valve - Google Patents

Injection molding method of liquid medicine valve part and liquid medicine valve Download PDF

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Publication number
CN118163314A
CN118163314A CN202410514534.XA CN202410514534A CN118163314A CN 118163314 A CN118163314 A CN 118163314A CN 202410514534 A CN202410514534 A CN 202410514534A CN 118163314 A CN118163314 A CN 118163314A
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China
Prior art keywords
injection molding
die
machine
temperature
double
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Pending
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CN202410514534.XA
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Chinese (zh)
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宣少杰
邓建龙
齐英
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Xingqi Shanghai Semiconductor Co ltd
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Xingqi Shanghai Semiconductor Co ltd
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Priority to CN202410514534.XA priority Critical patent/CN118163314A/en
Publication of CN118163314A publication Critical patent/CN118163314A/en
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Abstract

The embodiment of the specification provides a liquid medicine valve part injection molding method and a liquid medicine valve, wherein the method comprises the steps of selecting resin as a raw material, and drying the raw material by a dryer to ensure that the water content of the raw material is lower than 0.02%; adding the dried raw materials into a double-alloy screw injection machine; installing a die on a double-alloy screw injection machine, and connecting a die waterway to a die temperature machine; starting a double-alloy screw injection machine, setting the temperature of the double-alloy screw injection machine to be above 300 ℃, starting a mold temperature machine to control the temperature of a mold to be above 200 ℃, and conveying the melted material into the mold by the double-alloy screw injection machine; after the material is conveyed, the temperature of the die is controlled by a die temperature machine, so that the material is cooled and molded in the die. The liquid medicine valve has better cleanliness, roughness and light transmittance and can meet the quality requirements of the semiconductor industry.

Description

Injection molding method of liquid medicine valve part and liquid medicine valve
Technical Field
The specification relates to the technical field of liquid medicine valves, in particular to a liquid medicine valve part injection molding method and a liquid medicine valve.
Background
A liquid medicine valve for injection molding of high-purity PFA resin material. The resin can be directly processed into products by adopting a thermoplastic injection molding method. The material is suitable for manufacturing corrosion-resistant parts, antifriction and wear-resistant parts, sealing parts, insulating parts, high-temperature wire and cable insulating layers, corrosion-resistant equipment, sealing materials, pump valve bushings and chemical containers.
The medical fluid valve plays a vital role in the semiconductor industry. The semiconductor manufacturing process involves a number of complex links in which the control requirements for the purity of the material and the process are extremely high. The liquid medicine valve is used as a valve system based on pneumatic control, and the flow of liquid medicine is controlled by air pressure, so that the accurate and stable supply of the liquid medicine required in the semiconductor manufacturing process is ensured. With the continuous development of the semiconductor industry, the performance and precision requirements of the liquid medicine valve are also continuously improved.
Disclosure of Invention
In view of this, the embodiments of the present disclosure provide a method for injection molding a liquid medicine valve component and a liquid medicine valve, where the liquid medicine valve component has better cleanliness, roughness, and light transmittance, and can meet the quality requirements of the semiconductor industry.
The embodiment of the specification provides the following technical scheme: an injection molding method of a liquid medicine valve part, comprising:
selecting resin as a raw material, and drying the raw material by a dryer to ensure that the water content of the raw material is lower than 0.02%;
adding the dried raw materials into a double-alloy screw injection machine;
Installing a die on a double-alloy screw injection machine, and connecting a die waterway to a die temperature machine;
Starting a double-alloy screw injection machine, setting the temperature of the double-alloy screw injection machine to be above 300 ℃, starting a mold temperature machine to control the temperature of a mold to be above 200 ℃, and conveying the melted material into the mold by the double-alloy screw injection machine;
after the material is conveyed, the temperature of the die is controlled by a die temperature machine, so that the material is cooled and molded in the die.
Preferably, the inner surface of the mold is coated with an anti-corrosion coating.
Preferably, the method further comprises arranging a production plant, the cleanliness of which meets the ten thousand level standard.
Preferably, the method further comprises: and (3) opening the die after cooling and forming, and ejecting the product out to perform preheating, shaping and crystallization to obtain the corresponding part.
Preferably, the method further comprises the step of cleaning the parts after preheating, shaping and crystallizing to ensure the cleanliness of the parts.
Preferably, the dryer is provided with a dew point, and the dryer dries the raw material for more than 2 hours, so as to ensure that the moisture content of the dried raw material is lower than 0.02%.
Preferably, the twin alloy screw extruder delivers molten material at a first pressure into a screw channel of a die or extruder.
Preferably, the raw material includes PFA resin material.
The injection molding method is used for performing injection molding on the valve body, the bead, the locking ring and the valve nut of the liquid medicine valve.
A medical fluid valve comprising a part produced by the method of any one of the preceding claims.
Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least:
The raw material resin is dried by the drier, so that the moisture content of the raw material is lower than 0.02%, the appearance and the size of the produced part meet the requirements, the injection molding operation is carried out by adopting the double-alloy screw injection machine, the injection molding temperature of the double-alloy screw injection machine is higher than 300 ℃, the overheating or insufficient melting of the material is avoided, the temperature of the mold is controlled by the mold temperature machine during injection molding, the temperature of the mold is higher than 200 ℃, the mold is ensured to have higher temperature during injection molding, the material is prevented from solidifying in advance, and the cleanliness, roughness and light transmittance of the injected liquid medicine valve part are ensured to be better, so that the quality requirements of the semiconductor industry can be met.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a block diagram of an injection molding method of a medical fluid valve component provided by the application;
fig. 2 is a block diagram of the working procedure of the injection molding machine provided by the application.
Detailed Description
Embodiments of the present application will be described in detail below with reference to the accompanying drawings.
Other advantages and effects of the present application will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present application with reference to specific examples. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. The application may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present disclosure, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concept of the present application by way of illustration, and only the components related to the present application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
The medical fluid valve plays a vital role in the semiconductor industry. The semiconductor manufacturing process involves a number of complex links in which the control requirements for the purity of the material and the process are extremely high. The liquid medicine valve is used as a valve system based on pneumatic control, and the flow of liquid medicine is controlled by air pressure, so that the accurate and stable supply of the liquid medicine required in the semiconductor manufacturing process is ensured. With the continuous development of the semiconductor industry, the performance and precision requirements of the liquid medicine valve are also continuously improved. The liquid medicine valve used in the semiconductor industry has the characteristics of high corrosion resistance, long running time, high surface cleaning, high dimensional stability and reliability and the like.
The inventor designs a liquid medicine valve part injection molding method and a liquid medicine valve through extensive and deep experiments.
The following describes the technical scheme provided by each embodiment of the present application with reference to the accompanying drawings.
As shown in fig. 1 to 2, a method for injection molding a liquid medicine valve member includes:
selecting resin as a raw material, and drying the raw material by a dryer to ensure that the water content of the raw material is lower than 0.02%;
adding the dried raw materials into a double-alloy screw injection machine;
Installing a die on a double-alloy screw injection machine, and connecting a die waterway to a die temperature machine;
Starting a double-alloy screw injection machine, setting the temperature of the double-alloy screw injection machine to be above 300 ℃, starting a mold temperature machine to control the temperature of a mold to be above 200 ℃, and conveying the melted material into the mold by the double-alloy screw injection machine;
after the material is conveyed, the temperature of the die is controlled by a die temperature machine, so that the material is cooled and molded in the die.
The raw material resin is dried by the drier, so that the moisture content of the raw material is lower than 0.02%, the appearance and the size of the produced part meet the requirements, the injection molding operation is carried out by adopting the double-alloy screw injection machine, the injection molding temperature of the double-alloy screw injection machine is higher than 300 ℃, the overheating or insufficient melting of the material is avoided, the temperature of the mold is controlled by the mold temperature machine during injection molding, the temperature of the mold is higher than 200 ℃, the mold is ensured to have higher temperature during injection molding, the material is prevented from solidifying in advance, and the cleanliness, roughness and light transmittance of the injected liquid medicine valve part are ensured to be better, so that the quality requirements of the semiconductor industry can be met.
By adopting the double alloy screw as an injection molding machine, the double alloy screw has unique material combination and characteristics, can provide better wear resistance, corrosion resistance, fatigue resistance and high temperature resistance, and is particularly suitable for processing high-temperature, high-viscosity or corrosive plastic materials;
the wear resistance is strong: the high hardness and low friction coefficient of the double alloy material can effectively reduce friction loss between the screw and the injection molding material, and prolong the service life of equipment;
the corrosion resistance is good: specific elements in the material (such as chromium) are effective in preventing corrosion, which is particularly important when treating some corrosive plastic materials;
good fatigue resistance and elasticity: the structural design of the mutual coating of the cobalt and the iron matrix ensures that the screw has better elasticity and fatigue resistance, reduces deformation and keeps long-term stability;
High temperature resistance is good: the tungsten, molybdenum and other elements in the material have excellent high temperature resistance, and can ensure stable work in high temperature environment.
In some embodiments, the inner surface of the die is coated with an anti-corrosion coating, and the anti-corrosion performance of the die can be improved and the service life of the die is ensured by carrying out anti-corrosion special coating treatment on the part of the die, which contacts with the material, and the anti-corrosion coating accords with the metal ion precipitation standard SEMI F57-0301.
The mold steel is required to have corrosion resistance, high hardness, good dimensional stability, good mechanical properties, and surface treatment properties, thereby ensuring the life of the mold.
In some embodiments, the method further comprises arranging a production workshop, the cleanliness of the production workshop accords with the ten thousand-level standard, arranging a specific production workshop, and avoiding dust, impurities, grease and other impurities from entering a processing area, wherein the cleanliness of the production workshop accords with the ten thousand-level standard, so that the produced liquid medicine valve part can achieve no particle pollution, the risk of medium pollution is reduced, the ultra-clean requirement is met, and the method is suitable for the requirement of the semiconductor industry.
As shown in fig. 2, in some embodiments, the method further comprises: and (3) opening the die after cooling and forming, ejecting the product, preheating, shaping and crystallizing to obtain a corresponding part, opening the die after cooling and forming the part, and preheating, shaping and crystallizing the part after opening the die to ensure that the part reaches a stable size.
As shown in fig. 2, in some embodiments, the method further includes cleaning the parts after the preheating, shaping and crystallizing to ensure the cleanliness of the parts, and cleaning the parts after the preheating, shaping and crystallizing to ensure that the cleanliness of the parts of the liquid medicine valve meets the quality requirements of the semiconductor industry.
The cleaning operation of the parts can adjust the cleaning agent and the treatment time according to the actual production process.
In some embodiments, the dryer is provided with a dew point, the dryer dries the raw materials for more than 2 hours to ensure that the moisture content of the dried raw materials is lower than 0.02%, the moisture content in the air is reduced, the materials can be effectively prevented from deteriorating or generating defects due to damp in the processing or storage process, the humidity in the air is reduced, the dryer can accelerate the drying process of the materials, the lower the dew point is, the lower the moisture content is, the moisture content of the dried raw materials is lower than 0.02%, and the appearance and the size are ensured to meet the requirements.
In some embodiments, the twin-alloy screw extruder delivers molten material into a die or extruder screw channel at a first pressure, and during processing, the appropriate pressure ensures that the material fills the die or enters the extruder screw channel uniformly, thereby obtaining a high quality molded part, and the pressure level can be set according to the actual conditions.
In some embodiments, the raw materials include PFA resin materials, and the PFA resin can be directly processed into products by adopting a thermoplastic injection molding method, so that the method is suitable for the characteristics of high corrosion resistance, long running time, high surface cleaning, high dimensional stability, high reliability and the like of liquid medicine valves used in the semiconductor industry.
In some embodiments, the injection molding method is used for performing injection molding on a valve body, a bead, a locking ring and a valve nut of a liquid medicine valve, and a corresponding mold is selected to be mounted on a double alloy screw injection machine according to different production parts.
Based on the same inventive concept, embodiments of the present disclosure provide a medical fluid valve comprising a part produced by the method of any one of the above.
In the implementation, the liquid medicine valve part produced by adopting the method has good cleanliness, roughness and light transmittance, can meet the quality requirements of the semiconductor industry, and can measure the roughness data of the liquid medicine valve by using a laser confocal microscope, thereby realizing the glossiness and the cleanliness of the liquid medicine valve, and measuring the product size by using a measuring instrument.
The method is used for producing the liquid medicine valve part, the production process is simplified, the injection molding test time can be reduced by a simulation technology, in the injection molding process, the mold coating and injection molding parameters are reasonably designed, the complexity of the cleaning process is reduced, the metal residue can reach a higher cleanliness level, the manufacturing is convenient, the method has good plasticity, liquid medicine valves with different sizes can be manufactured, the process route is adjustable according to the wall thickness and the shape of the product, the size and the appearance are controllable, the liquid medicine valve is made of PFA material, can be used according to different medium types, and has strong replaceability and wide application places.
The same and similar parts of the embodiments in this specification are all mutually referred to, and each embodiment focuses on the differences from the other embodiments. In particular, for the method embodiments described later, since they correspond to the system, the description is relatively simple, and reference should be made to the description of some of the system embodiments.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present application should be included in the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims (10)

1. An injection molding method of a medical fluid valve member, comprising:
selecting resin as a raw material, and drying the raw material by a dryer to ensure that the water content of the raw material is lower than 0.02%;
adding the dried raw materials into a double-alloy screw injection machine;
Installing a die on a double-alloy screw injection machine, and connecting a die waterway to a die temperature machine;
Starting a double-alloy screw injection machine, setting the temperature of the double-alloy screw injection machine to be above 300 ℃, starting a mold temperature machine to control the temperature of a mold to be above 200 ℃, and conveying the melted material into the mold by the double-alloy screw injection machine;
after the material is conveyed, the temperature of the die is controlled by a die temperature machine, so that the material is cooled and molded in the die.
2. The injection molding method of a medical fluid valve member according to claim 1, wherein the inner surface of the mold is coated with an anticorrosive coating.
3. The injection molding method of medical valve parts according to claim 1, further comprising arranging a production plant, wherein the cleanliness of the production plant meets the ten thousand level standard.
4. The liquid medicine valve member injection molding method according to claim 1, wherein the method further comprises: and (3) opening the die after cooling and forming, and ejecting the product out to perform preheating, shaping and crystallization to obtain the corresponding part.
5. The injection molding method of a medical fluid valve member according to claim 4, further comprising cleaning the preheated, shaped and crystallized member to ensure cleanliness of the member.
6. The injection molding method of a medical fluid valve member according to claim 1, wherein a dew point is provided in the dryer, and the dryer dries the raw material for more than 2 hours to ensure that the moisture content of the dried raw material is less than 0.02%.
7. The method of injection molding a medical fluid valve member according to claim 1, wherein the twin-alloy screw injection molding machine delivers the melted material into a screw channel of a die or an extruder at a first pressure.
8. The injection molding method of a medical fluid valve member according to claim 1, wherein the raw material comprises PFA resin material.
9. The injection molding method of a medical fluid valve member according to any one of claims 1 to 8, wherein the injection molding method is used for injection molding a valve body, a bead, a lock ring, and a valve nut of a medical fluid valve.
10. A medical fluid valve comprising a part produced by the method of any one of claims 1-9.
CN202410514534.XA 2024-04-26 2024-04-26 Injection molding method of liquid medicine valve part and liquid medicine valve Pending CN118163314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410514534.XA CN118163314A (en) 2024-04-26 2024-04-26 Injection molding method of liquid medicine valve part and liquid medicine valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410514534.XA CN118163314A (en) 2024-04-26 2024-04-26 Injection molding method of liquid medicine valve part and liquid medicine valve

Publications (1)

Publication Number Publication Date
CN118163314A true CN118163314A (en) 2024-06-11

Family

ID=91356854

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410514534.XA Pending CN118163314A (en) 2024-04-26 2024-04-26 Injection molding method of liquid medicine valve part and liquid medicine valve

Country Status (1)

Country Link
CN (1) CN118163314A (en)

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