CN118131829A - Motion control method of high-precision motion platform and high-precision motion platform - Google Patents
Motion control method of high-precision motion platform and high-precision motion platform Download PDFInfo
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Abstract
The invention relates to the technical field of motion platforms, and particularly discloses a motion control method of a high-precision motion platform and the high-precision motion platform, wherein the motion control method of the high-precision motion platform comprises the steps of obtaining motion requirements and outputting corresponding control strategies according to the motion requirements; controlling the electromagnetic driving assembly to operate according to a control strategy so that the electromagnetic driving assembly drives the platform plate to move relative to the base; judging whether the platform plate approaches to a target position in real time; when the platform plate is determined to be close to the target position, the platform plate is controlled to be driven to move by the electromagnetic driving assembly to be switched to be driven to move by the piezoelectric friction driving assembly until the platform plate moves to the target position. The technical scheme of the invention combines two driving modes of the electromagnetic driving assembly and the piezoelectric friction driving assembly, thereby improving the moving precision of the high-precision moving platform.
Description
Technical Field
The invention relates to the technical field of motion platforms, in particular to a motion control method of a high-precision motion platform and the high-precision motion platform.
Background
The electromagnetic direct-drive technology represented by the linear motor has the characteristics of high thrust and high-speed motion, but the serious magnetic field nonlinearity and the complicated current conversion technology increase the difficulty of high-precision motion control; the piezoelectric motor can realize nanoscale motion resolution and high stable positioning characteristics by utilizing micro-step motion of piezoelectric ceramics, however, a stepping motion mode causes serious tooth mark effect, smooth scanning motion cannot be realized, in addition, the friction driving force is extremely small, and the motion speed and the acceleration are even inferior to those of a stepping motor. Therefore, the existing driving technology has more defects, so that the existing precise motion platform cannot adapt to different precise motion requirements.
Disclosure of Invention
The invention mainly aims to provide a motion control method of a high-precision motion platform and the high-precision motion platform, and aims to combine two driving modes of an electromagnetic driving assembly and a piezoelectric friction driving assembly so as to improve the moving precision of the high-precision motion platform.
In order to achieve the above object, the present invention provides a motion control method for a high-precision motion platform, where the motion control method for the high-precision motion platform includes the steps of:
acquiring a motion requirement, and outputting a corresponding control strategy according to the motion requirement;
Controlling an electromagnetic driving assembly to operate according to the control strategy so that the electromagnetic driving assembly drives the platform plate to move relative to the base;
judging whether the platform plate approaches to a target position in real time;
When the platform plate is determined to be close to the target position, the platform plate is controlled to be driven to move by the electromagnetic driving assembly to be switched to be driven to move by the piezoelectric friction driving assembly until the platform plate moves to the target position.
In one embodiment, the step of determining in real time whether the platform plate is proximate to a target location comprises:
Acquiring a first dynamic distance of the platform plate, wherein the first dynamic distance is the distance between the real-time position of the platform plate and the target position of the platform plate;
Comparing the first dynamic distance with a first preset distance to output a first comparison result;
When the first comparison result is that the first dynamic distance is smaller than or equal to the first preset distance, the platform plate is confirmed to approach to a target position;
and when the first comparison result shows that the first dynamic distance is larger than the first preset distance, controlling the electromagnetic driving assembly to continuously drive the platform plate to move.
In an embodiment, when the first comparison result is that the first dynamic distance is less than or equal to the first preset distance, the step of confirming that the platform board approaches the target position further includes:
Judging whether the platform plate has a load or not;
when the load of the platform plate is determined, the electromagnetic driving assembly is controlled to drive the platform plate to move by a first preset electromagnetic force.
In an embodiment, the step of controlling the platform plate to be driven to move by the electromagnetic driving assembly to be switched to be driven to move by the piezoelectric friction driving assembly further comprises:
acquiring a second dynamic distance of the platform plate, wherein the second dynamic distance is the distance between the real-time position of the platform plate and the target position of the platform plate;
Comparing the second dynamic distance with a second preset distance to output a second comparison result;
when the second comparison result shows that the second dynamic distance is smaller than or equal to the second preset distance, the piezoelectric friction driving assembly is controlled to stop running;
And when the second comparison result shows that the second dynamic distance is larger than the second preset distance, controlling the piezoelectric friction driving assembly to continuously drive the platform plate to move.
In an embodiment, the step of obtaining the movement requirement and outputting the corresponding control strategy according to the movement requirement includes:
searching the motion requirement set by the main controller or acquiring the motion requirement input by a user;
and determining the movement type of the platform plate according to the movement requirement, and matching a control strategy corresponding to the movement type according to the movement type.
In one embodiment, the step of determining the movement type of the platform plate according to the movement requirement and matching the control strategy corresponding to the movement type comprises the following steps:
when the motion type is determined to be track motion, matching a track micro-error control strategy corresponding to the track motion;
and when the motion type is determined to be the two-point motion, matching out a shortest time control strategy corresponding to the two-point motion.
The invention also provides a high-precision motion platform, which adopts the motion control method of the high-precision motion platform, and comprises the following steps:
A base;
The main controller is arranged on the base;
the motion guide assembly is arranged on the base;
The platform plate is connected with one side of the motion guide assembly, which is opposite to the base, so that the platform plate can move relative to the base;
one end of the piezoelectric friction driving assembly is fixed on the base and is electrically connected with the main controller;
The electromagnetic driving assembly is connected with one end of the piezoelectric friction driving assembly, the other end of the electromagnetic driving assembly is connected with the platform plate, and the electromagnetic driving assembly is electrically connected with the main controller; the electromagnetic driving assembly is used for driving the platform plate to move, and the piezoelectric friction driving assembly is used for driving the platform plate to move.
In one embodiment, the electromagnetic drive assembly comprises:
The electromagnetic coils are arranged on the base, are arranged at intervals with the motion guide assembly, and are electrically connected with the main controller; the piezoelectric friction driving assembly is arranged on the base and is positioned in the electromagnetic coil;
The mounting plate is connected with one side of the piezoelectric friction driving assembly, which is opposite to the electromagnetic coil;
And the permanent magnets are connected with one side of the mounting plate, which is opposite to the piezoelectric friction driving assembly, and one side of the permanent magnets, which is opposite to the mounting plate, is connected with the platform plate.
In one embodiment, the piezoelectric friction drive assembly comprises:
the voice coil motors are arranged on the base and are positioned in one electromagnetic coil;
the plurality of shearing piezoelectric ceramics are arranged at one end of the voice coil motor, which is opposite to the electromagnetic coil, and are connected with the mounting plate; and a plurality of voice coil motors and a plurality of shearing piezoelectric ceramics are electrically connected with the main controller.
In an embodiment, the high-precision motion platform further comprises a grating displacement sensor electrically connected with the main controller, wherein the grating displacement sensor is arranged on the platform plate and is arranged at intervals with the motion guide assembly, the piezoelectric friction driving assembly and the electromagnetic driving assembly, and the grating displacement sensor is used for detecting the real-time position of the platform plate.
The motion control method of the high-precision motion platform comprises the steps of obtaining motion requirements and outputting corresponding control strategies according to the motion requirements; controlling the electromagnetic driving assembly to operate according to a control strategy so that the electromagnetic driving assembly drives the platform plate to move relative to the base; judging whether the platform plate approaches to a target position in real time; when the platform plate is determined to be close to the target position, the platform plate is controlled to be driven to move by the electromagnetic driving assembly to be switched to be driven to move by the piezoelectric friction driving assembly until the platform plate moves to the target position, so that the platform plate is driven to move by the electromagnetic force of the electromagnetic driving assembly, the defect that the movement speed of a traditional stepping motor is limited is avoided, meanwhile, the platform plate is switched to be driven to move by the variable pre-tightening friction force of the piezoelectric friction driving assembly to realize nano-scale movement precision and high-precision positioning when the platform plate is close to the target position, the defect that the movement precision of the traditional motor is low is avoided, and the platform plate is enabled to move in place more precisely under the compound coordination driving of driving forces with two characteristics, so that the movement precision of the high-precision movement platform is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic flow chart of steps of a first embodiment of a motion control method for a high-precision motion platform according to the present invention;
FIG. 2 is a schematic diagram of a refinement flow chart of step 30 of the motion control method of the high-precision motion platform of the present invention;
FIG. 3 is a flowchart illustrating a motion control method for a high-precision motion platform according to a second embodiment of the present invention;
FIG. 4 is a schematic diagram of a refinement flow chart of step 10 of the motion control method of the high-precision motion platform of the present invention;
FIG. 5 is a perspective view of the high precision motion platform of the present invention;
FIG. 6 is a top view of the high precision motion platform of the present invention;
FIG. 7 is a schematic view in section A-A of FIG. 6;
FIG. 8 is a schematic view of the structure of the high precision motion platform of the present invention after the platform plate and part of the housing are disassembled.
Reference numerals illustrate:
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.
Therefore, the invention provides a motion control method of a high-precision motion platform.
In an embodiment of the present invention, referring to fig. 1, 5 to 8, a motion control method of a high-precision motion platform includes the steps of:
s10: acquiring a motion requirement, and outputting a corresponding control strategy according to the motion requirement;
s20: controlling the electromagnetic driving assembly 50 to operate according to a control strategy, so that the electromagnetic driving assembly 50 drives the platform plate 30 to move relative to the base 10;
s30: judging whether the platform plate 30 approaches to a target position in real time;
s40: when it is determined that the platform plate 30 approaches the target position, the control of the movement of the platform plate 30 by the electromagnetic driving assembly 50 is switched to the movement by the piezoelectric friction driving assembly 40 until the platform plate 30 moves to the target position.
In this embodiment, the movement requirement refers to the movement requirement of the platform plate 30 moving relative to the base 10, and the movement requirement may be a movement mode of the platform plate 30, a movement speed of the platform plate 30, or a movement time of the platform plate 30, and the movement requirement may be set according to a size of a workpiece to be moved, and a processing requirement of the workpiece to be moved.
The high-precision motion platform has multiple motion requirements, and each motion requirement and one control strategy are in a unique mapping relation; when the master controller of the high-precision motion platform acquires the motion requirement, the master controller can output a control strategy by combining the content of the motion requirement, so that the high-precision motion platform can form different motion tracks, the high-precision motion platform can drive the workpiece to be moved to move according to the different motion tracks, and the matching degree of the high-precision motion platform to the motion tracks of different workpieces is improved.
The control strategy is specifically a reference signal of the motion track of the platform plate 30 of the high-precision motion platform, so that the master controller controls the electromagnetic driving assembly 50 and the piezoelectric friction driving assembly 40 for driving the platform plate 30 to move according to the reference signal in the control strategy, and thus the master controller forms a control instruction of the motion track which is more attached to different workpieces according to the reference signal in the control strategy, the control difficulty of the master controller is further reduced, and meanwhile, the motion precision of the high-precision motion platform is also improved.
The master controller firstly controls the electromagnetic driving assembly 50 to operate according to a control strategy, and in view of the advantages that the electromagnetic driving assembly 50 forms electromagnetic force and has large thrust, quick response and the like, the electromagnetic driving assembly 50 can drive the platform plate 30 to realize smooth high-precision track tracking, then judges whether the platform plate 30 approaches a target position in real time, when the movement of the platform plate 30 is about to be ended, namely, when the platform plate 30 is determined to approach the target position, the platform plate 30 is controlled to be switched to be moved by the piezoelectric friction driving assembly 40 by the electromagnetic driving assembly 50, and in view of the advantages that the variable pre-tightening friction force formed by the piezoelectric friction driving assembly 40 has strong controllability, high stability and the like, the platform plate 30 driven by the piezoelectric friction driving assembly 40 realizes final high-precision positioning; in this way, the platform plate 30 is driven to move by the electromagnetic force of the electromagnetic driving assembly 50, so that the defect that the movement speed of the traditional stepping motor is limited is avoided, meanwhile, the platform plate 30 is switched to be driven to move by the variable pre-tightening friction force of the piezoelectric friction driving assembly 40 when approaching to the target position to realize the nano-scale movement precision and high-precision positioning, and the defect that the movement precision of the traditional motor is low is avoided, so that the platform plate 30 moves in place more precisely under the compound coordination driving of driving forces with two characteristics, and the movement precision of the high-precision movement platform is improved.
In one embodiment, please refer to fig. 2, 5-8, S30: the step of determining whether the platform plate 30 approaches a target position includes:
S31: acquiring a first dynamic distance of the platform plate 30, wherein the first dynamic distance is a distance between a real-time position of the platform plate 30 and a target position of the platform plate 30;
s32: comparing the first dynamic distance with a first preset distance to output a first comparison result;
S33: when the first comparison result is that the first dynamic distance is less than or equal to the first preset distance, the platform plate 30 is confirmed to approach to a target position;
s34: and when the first comparison result is that the first dynamic distance is greater than the first preset distance, controlling the electromagnetic driving assembly 50 to continuously drive the platform plate 30 to move.
In the present embodiment, the master obtains the first dynamic distance of the platform board 30 in the manner of: the real-time position of the platform plate 30 is obtained from the grating displacement sensor 60, and then the real-time position of the platform plate 30 is compared with the target position of the platform plate 30, so that the distance between the real-time position of the platform plate 30 and the target position is obtained, wherein the distance between the real-time position of the platform plate 30 and the target position is the first dynamic distance of the platform plate 30. The main controller compares the first dynamic distance with a first preset distance, and the setting of the first preset distance can be determined by the movement track of the workpiece.
When the first dynamic distance is smaller than or equal to the first preset distance, the platform plate 30 is represented to be close to the target position quickly, and at the moment, the main controller controls the platform plate 30 to be moved and switched to be moved by the piezoelectric friction driving assembly 40 through the electromagnetic driving assembly 50, so that high-precision positioning of the platform plate 30 is realized, and the high-precision moving platform is moved in place.
When the first dynamic distance is greater than the first preset distance, it indicates that the platform board 30 is not approaching the target position, and the master controller controls the electromagnetic driving assembly 50 to continuously drive the platform board 30 to move, so that the distance between the platform board 30 and the target position can be shortened as soon as possible.
The first dynamic distance of the platform plate 30 is used for confirming whether the platform plate 30 approaches to the target position, so that the position of the platform plate 30 can be more intuitively and clearly determined, and the moving precision of the high-precision moving platform is improved.
In one embodiment, please refer to fig. 2, 5-8, S33: when the first comparison result is that the first dynamic distance is less than or equal to the first preset distance, the step of confirming that the platform board 30 approaches to the target position further includes:
s35: judging whether the platform plate 30 has a load or not;
s36: when it is determined that the platform plate 30 is loaded, the electromagnetic driving assembly 50 is controlled to drive the platform plate 30 to move with a first preset electromagnetic force.
In this embodiment, if the workpiece placed on the platen 30 is a workpiece with a relatively large load, that is, the platen 30 is in a heavy load state, if the platen 30 is directly driven by the electromagnetic driving assembly 50 to be driven by the piezoelectric friction driving assembly 40, the variable pre-tightening friction force formed by the piezoelectric friction driving assembly 40 will not drive the platen 30 with a relatively large load to move, so that the high-precision motion platform cannot move in place.
After the main controller determines that the platform plate 30 is close to the target position, judging whether the platform plate 30 has a load or not is performed at the moment, when the main controller determines that the platform plate 30 has the load, the main controller does not control the electromagnetic driving assembly 50 to stop running completely, and applies proper electromagnetic force to balance the load of the platform plate 30 according to the load condition of the platform plate 30, meanwhile, the main controller also controls the piezoelectric friction driving assembly 40 to drive the platform plate 30 to perform high-precision displacement, so that the situation that the piezoelectric friction driving force is too small to bear too large load force is avoided, and the high-precision motion platform can move normally is ensured.
In one embodiment, please refer to fig. 3, 5 to 8, S40: the step of controlling the switching of the movement of the platform plate 30 by the electromagnetic driving assembly 50 to the movement by the piezoelectric friction driving assembly 40 further comprises:
S50: acquiring a second dynamic distance of the platform plate 30, wherein the second dynamic distance is a distance between a real-time position of the platform plate 30 and a target position of the platform plate 30;
S60: comparing the second dynamic distance with a second preset distance to output a second comparison result;
S70: when the second comparison result is that the second dynamic distance is smaller than or equal to the second preset distance, the piezoelectric friction driving component 40 is controlled to stop running;
s80: and when the second comparison result is that the second dynamic distance is greater than the second preset distance, controlling the piezoelectric friction driving component 40 to continuously drive the platform plate 30 to move.
In this embodiment, after the platform plate 30 is switched to be moved by the piezoelectric friction driving component 40, the master controller acquires the second dynamic distance of the platform plate 30 in real time; the second dynamic distance acquisition mode of the master acquiring the platform board 30: the real-time position of the platform plate 30 is obtained from the grating displacement sensor 60, and then the real-time position of the platform plate 30 is compared with the target position of the platform plate 30, so that the distance between the real-time position of the platform plate 30 and the target position driven by the piezoelectric friction driving assembly 40 is obtained, wherein the distance between the real-time position of the platform plate 30 and the target position is the second dynamic distance of the platform plate 30. The main controller compares the second dynamic distance with a second preset distance, and the setting of the second preset distance can be determined by the movement track of the workpiece. When the second dynamic distance is less than or equal to the second preset distance, it represents that the platform plate 30 has reached the target position, and the master controller controls the piezoelectric friction driving component 40 to stop running, so that the platform plate 30 moves to the position. When the second dynamic distance is greater than the second preset distance, it indicates that the platform plate 30 is not close to the target position, and at this time, the master controller controls the piezoelectric friction driving assembly 40 to continuously drive the platform plate 30 to move, so that the distance between the platform plate 30 and the target position can be shortened as soon as possible.
In this embodiment, the movement condition of the platform plate 30 is determined by comparing the second dynamic distance with the second preset distance, so that the movement of the high-precision motion platform is more accurate.
In one embodiment, please refer to fig. 4, 5-8, S10: the step of obtaining the movement requirement and outputting the corresponding control strategy according to the movement requirement comprises the following steps:
s11: searching the motion requirement set by the main controller or acquiring the motion requirement input by a user;
s12: and determining the movement type of the platform plate 30 according to the movement requirement, and matching a control strategy corresponding to the movement type according to the movement type.
In this embodiment, the motion requirement may be obtained by searching for a motion requirement set by the master controller, or may be obtained by directly obtaining a motion requirement input by the user through the input device; of course, the manner in which the athletic demand is obtained is not limited to that disclosed above. When the master controller acquires the motion requirement, the master controller analyzes the content of the motion requirement to determine the motion type of the platform plate 30 to be moved, and the control strategy of matching the motion type with the motion track of the workpiece to be moved by the master controller can be utilized to further improve the movement precision of the high-precision motion platform.
S12: the step of determining the movement type of the platform plate 30 according to the movement requirement and matching the control strategy corresponding to the movement type comprises the following steps:
when the motion type is determined to be track motion, matching a track micro-error control strategy corresponding to the track motion;
and when the motion type is determined to be the two-point motion, matching out a shortest time control strategy corresponding to the two-point motion.
In the present embodiment, the track motion refers to that the platform board 30 moves according to each fixed point on the preset track; when the main controller analyzes the motion requirement to obtain that the motion type of the platform plate 30 is track motion, the control strategy corresponding to the track motion is a track micro-error control strategy, and the main controller outputs the corresponding track micro-error control strategy according to the current motion type of the track motion at the moment, so that the main controller controls the platform plate 30 to move according to the track micro-error control strategy, the platform plate 30 can be more suitable for the characteristic of the track motion to move, and the moving precision of the high-precision motion platform is further improved.
The two-point motion means that the table plate 30 has no preset trajectory, and only the table plate 30 is required to move from the start point to the end point in a minimum time. When the main controller analyzes the motion requirement to obtain that the motion type of the platform plate 30 is two-point motion, the control strategy corresponding to the two-point motion is the shortest time control strategy, and the main controller outputs the corresponding shortest time control strategy according to the current motion type of the two-point motion at the moment, so that the main controller controls the platform plate 30 to move according to the shortest time control strategy, the platform plate 30 can be more suitable for the characteristics of the two-point motion to move, and the moving precision of the high-precision motion platform is further improved.
The track micro error control strategy is a method for controlling track tracking errors in a system. Its goal is to make the system output as close as possible to the desired trajectory and to minimize unavoidable errors when these errors are present.
The track micro-error control strategy is to use a sliding mode control method based on an interference observer, so that the master controller moves according to the planned track.
The high precision motion platform is described as an uncertain discrete system as follows:
Wherein/> For interference, x (k+1) is the position signal at time k+1, and a and B are both parameter matrices of the spatial state equation.
The command position signal isTracking error is/>The sliding mode function is expressed as: ; wherein C is a control coefficient,/>
The disturbance observer is designed as follows:
Wherein, Are all positive real numbers,/>For the interference observer, sgn () is a sign operation function.
The following slip-form controller with interference compensation is designed:
Wherein, For control rate, u s (k) is a sliding mode control signal; u e (k) is the estimated error signal;
of course, in other embodiments, the trajectory micro-error control strategy may also be controlled in other ways, not limited to the above-described ways.
The shortest time control strategy is a common path planning strategy that is used to find a path between a given start point and end point that has the smallest total cost (typically the smallest distance).
The shortest time control strategy of the scheme: firstly, planning a motion track by using a track planning method according to use requirements (such as positions of designated path points, starting points and end points, speeds, accelerations and the like when the points pass through); the planned trajectory is then used as a reference signal for the master to control the electromagnetic drive assembly 50 and the piezoelectric friction drive assembly 40. Trajectory planning has two advantages: ① So that the sports meet the use requirements; ② The tracking error is reduced.
The specific method for track planning comprises the following steps: ① The mathematical expression type of the selected track is commonly known as a polynomial of five or seven times and higher, or spline curves and the like; the expression of the fifth order polynomial is as follows: ; ② According to the boundary condition (i.e. the above-mentioned use requirement, such as that the initial acceleration is 0), substituting the above-mentioned polynomial to solve the respective coefficients of the polynomial and thereby determine the expression (function of time t) of the polynomial. During motion control, the reference signal theta of the current time t can be obtained by inputting the current time t into the expression of the above-mentioned penta-order polynomial, and the reference signal theta is transmitted to the main controller.
Of course, in other embodiments, the shortest time control strategy may also be controlled in other ways, not limited to the above.
The invention also provides a high-precision motion platform, please refer to fig. 5 to 8, which adopts the motion control method of the high-precision motion platform, and the high-precision motion platform comprises a base 10, a master controller, a motion guiding component 20, a platform plate 30, a piezoelectric friction driving component 40 and an electromagnetic driving component 50; the main controller is arranged on the base 10, and the motion guide assembly 20 is arranged on the base 10; the platform plate 30 is connected with the side of the motion guide assembly 20, which is away from the base 10, so that the platform plate 30 can move relative to the base 10; one end of the piezoelectric friction driving component 40 is fixed on the base 10 and is electrically connected with the main controller; one end of the electromagnetic driving assembly 50 is connected with the other end of the piezoelectric friction driving assembly 40, the other end of the electromagnetic driving assembly 50 is connected with the platform plate 30, and the electromagnetic driving assembly 50 is electrically connected with the main controller; the electromagnetic driving assembly 50 is used for driving the platform plate 30 to move, and the piezoelectric friction driving assembly 40 is used for driving the platform plate 30 to move.
In this embodiment, the high-precision motion platform controls the electromagnetic driving assembly 50 and the piezoelectric friction driving assembly 40 to operate according to the motion control method by the master controller, specifically, the master controller firstly controls the electromagnetic driving assembly 50 to operate, and the electromagnetic force of the electromagnetic driving assembly 50 is utilized to drive the platform plate 30 to move at a high speed and in a large span, so that the distance between the real-time position and the target position of the platform plate 30 is shortened; and when the platform plate 30 approaches to the target position, the master controller controls the electromagnetic driving assembly 50 to stop running, and finally controls the piezoelectric friction driving assembly 40 to run, so that the variable pre-tightening friction force of the piezoelectric friction driving assembly 40 drives the platform plate 30 to move in a nano level, and the movement precision of the high-precision motion platform is improved.
The motion guiding assembly 20 comprises a first guide rail, a second guide rail and a plurality of sliding parts, the sliding parts are installed on the platform plate 30, the sliding parts are connected to the second guide rail in a sliding mode, the first guide rail is arranged on the base 10, the second guide rail is arranged on the first guide rail, the first guide rail extends along the X-axis direction, the second guide rail extends along the Y-axis direction, and the arrangement is such that the platform plate 30 can move along the directions of the first guide rail and the second guide rail.
In an embodiment, referring to fig. 5 to 8, the electromagnetic driving assembly 50 includes a plurality of electromagnetic coils 51, a mounting plate and a plurality of permanent magnets 52, wherein the plurality of electromagnetic coils 51 are disposed on the base 10 and are spaced apart from the motion guiding assembly 20, and the plurality of electromagnetic coils 51 are electrically connected with the main controller; the piezoelectric friction driving component 40 is arranged on the base 10 and is positioned in the electromagnetic coil 51; the mounting plate is connected with one side of the piezoelectric friction driving component 40, which is opposite to the electromagnetic coil 51; a plurality of permanent magnets 52 are connected to a side of the mounting plate facing away from the piezoelectric friction drive assembly 40, and a side of the plurality of permanent magnets 52 facing away from the mounting plate is connected to the platform plate 30.
Electromagnetic coil 51: the high-precision coil is adopted, so that the electromagnetic induction performance is good, and the electromagnetic induction coil is fixedly connected with the base 10. Permanent magnet 52: the rare earth permanent magnet material with high performance is adopted, so that the magnetic energy product is high and the magnetic stability is good. A technician may readily connect it to the piezo friction drive assembly 40 and platform plate 30. Piezoelectric friction drive assembly 40: the piezoelectric ceramic material is adopted, so that tiny deformation can be generated under the action of voltage, and a driving function is realized. During operation, the master controller transmits a drive signal to the electromagnetic coil 51 to cause the electromagnetic coil 51 to generate a magnetic field. The magnetic field interacts with the permanent magnet 52 such that the permanent magnet 52 produces motion. The piezoelectric friction drive assembly 40 deforms under the action of voltage, thereby pushing the permanent magnet 52 to move and further driving the platform plate 30 to achieve the required movement.
The plurality of electromagnetic coils 51 are arranged in an array on the base 10, and the plurality of permanent magnets 52 are arranged in an array on the piezoelectric friction driving component 40 and the platform plate 30; when the master controller controls the plurality of electromagnetic coils 51 to be electrified, the plurality of permanent magnets 52 excite the spatial three-dimensional magnetic field which is periodically distributed, the plurality of electromagnetic coils 51 generate electromagnetic force in the spatial three-dimensional magnetic field excited by the permanent magnets 52 through driving current, and the platform plate 30 can be driven to move by utilizing the electromagnetic force. The electromagnetic force has the characteristics of large thrust and quick response, and can be used under the conditions of large span, high speed and large load of the platform plate 30.
In one embodiment, referring to fig. 5 to 8, the piezoelectric friction driving assembly 40 includes a plurality of voice coil motors 41 and a plurality of shear piezoelectric ceramics 42; each voice coil motor 41 is disposed on the base 10 and is located in an electromagnetic coil 51; each shear piezoelectric ceramic 42 is arranged at one end of a voice coil motor 41, which is opposite to the electromagnetic coil 51, and a plurality of shear piezoelectric ceramics 42 are connected with the mounting plate; and a plurality of voice coil motors 41 and a plurality of shear piezoelectric ceramics 42 are electrically connected with the master controller.
The present embodiment is a piezoelectric friction driving assembly 40, which specifically includes the following components: voice coil motor 41: is arranged on the base 10, and the number of the base is a plurality of base plates which are uniformly distributed. Shear piezoelectric ceramic 42: is mounted to one end of each voice coil motor 41 facing away from the electromagnetic coil 51 in the same number as the voice coil motors 41. Electromagnetic coil 51: each voice coil motor 41 is located in an electromagnetic coil 51 provided on the base 10. Permanent magnet 52: the plurality of permanent magnets 52 are uniformly arranged on the mounting plate and connect the mounting plate with the plurality of shear piezoceramics 42. And (3) a master controller: is electrically connected to a plurality of voice coil motors 41 and a plurality of shear piezoelectric ceramics 42 for controlling the operation of the entire piezoelectric friction driving assembly 40.
Voice coil motor 41: as shown in fig. 7 and 8, the voice coil motor 41 is mounted on the base 10, and the number thereof can be adjusted according to actual needs. The main function of the voice coil motor 41 is to drive the shear piezoelectric ceramics 42 to vibrate. Shear piezoelectric ceramic 42: as shown in fig. 7 and 8, the shear piezoelectric ceramic 42 is mounted at an end of the voice coil motor 41 facing away from the electromagnetic coil 51. When the voice coil motor 41 is operated, the shear piezoelectric ceramics 42 are driven to vibrate, and thus the permanent magnet 52 is driven to move. Electromagnetic coil 51: as shown in fig. 7 and 8, an electromagnetic coil 51 is provided on the base 10, and when the electromagnetic coil 51 is powered on, a magnetic field is generated, and the magnetic field interacts with the permanent magnet 52, so that the permanent magnet 52 and the platen 30 can be driven to move. Permanent magnet 52: as shown in fig. 7 and 8, the permanent magnet 52 is connected to the shear piezoelectric ceramic 42, and when the shear piezoelectric ceramic 42 vibrates, the permanent magnet 52 moves accordingly, thereby achieving the function of the piezoelectric friction driving assembly 40.
In the whole working process of the piezoelectric friction driving assembly 40, the main controller is responsible for sending control signals to the voice coil motor 41 and the shearing piezoelectric ceramics 42 so as to realize the adjustment of parameters such as vibration amplitude, frequency and the like.
In another embodiment, the piezoelectric friction drive assembly 40 described above may be optimized as follows: 1. the number of the voice coil motor 41 and the shear piezoelectric ceramics 42 is increased to improve the driving capability. 2. An elastic connection is provided between the voice coil motor 41 and the shear piezoelectric ceramic 42 to reduce energy loss during vibration transmission. 3. The electromagnetic coil 51 is optimally designed to improve the driving effect while reducing power consumption.
Through the arrangement, the piezoelectric friction driving assembly 40 applies variable pre-tightening friction force on the lower surfaces of the shearing piezoelectric ceramic 42 and the motion platform by means of the voice coil motor 41, then a sawtooth voltage signal is applied to the shearing piezoelectric ceramic 42, and the shearing piezoelectric ceramic 42 drives the platform plate 30 to make stick-slip motion by means of friction force, so that the platform plate 30 is driven to generate nanoscale motion. The piezoelectric friction drive assembly 40 has the characteristics of high precision, good stability and simple motion control.
In an embodiment, referring to fig. 5 to 8, the high-precision motion platform further includes a grating displacement sensor 60 electrically connected to the master controller, where the grating displacement sensor 60 is disposed on the platform board 30 and is spaced from the motion guiding assembly 20, the piezoelectric friction driving assembly 40 and the electromagnetic driving assembly 50, and the grating displacement sensor 60 is used for detecting a real-time position of the platform board 30. By the arrangement, the high-precision motion platform detects the real-time position of the platform plate 30 by using the grating displacement sensor 60, so that the master controller can conveniently acquire the real-time position of the platform plate 30, and is more beneficial to follow-up control according to the real-time position of the platform plate 30, thereby improving the movement precision of the high-precision motion platform.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the description of the present invention and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the invention.
Claims (10)
1. The motion control method of the high-precision motion platform is characterized by comprising the following steps of:
acquiring a motion requirement, and outputting a corresponding control strategy according to the motion requirement;
Controlling an electromagnetic driving assembly to operate according to the control strategy so that the electromagnetic driving assembly drives the platform plate to move relative to the base;
judging whether the platform plate approaches to a target position in real time;
When the platform plate is determined to be close to the target position, the platform plate is controlled to be driven to move by the electromagnetic driving assembly to be switched to be driven to move by the piezoelectric friction driving assembly until the platform plate moves to the target position.
2. The motion control method of a high-precision motion platform according to claim 1, wherein the step of determining in real time whether the platform plate is close to a target position comprises:
Acquiring a first dynamic distance of the platform plate, wherein the first dynamic distance is the distance between the real-time position of the platform plate and the target position of the platform plate;
Comparing the first dynamic distance with a first preset distance to output a first comparison result;
When the first comparison result is that the first dynamic distance is smaller than or equal to the first preset distance, the platform plate is confirmed to approach to a target position;
and when the first comparison result shows that the first dynamic distance is larger than the first preset distance, controlling the electromagnetic driving assembly to continuously drive the platform plate to move.
3. The motion control method of a high-precision motion platform according to claim 2, further comprising, after the step of confirming that the platform plate approaches a target position, when the first comparison result is that the first dynamic distance is less than or equal to the first preset distance:
Judging whether the platform plate has a load or not;
when the load of the platform plate is determined, the electromagnetic driving assembly is controlled to drive the platform plate to move by a first preset electromagnetic force.
4. The motion control method of the high-precision motion platform according to claim 1, wherein the step of controlling the platform plate to be switched from the driving motion of the electromagnetic driving assembly to the driving motion of the piezoelectric friction driving assembly further comprises:
acquiring a second dynamic distance of the platform plate, wherein the second dynamic distance is the distance between the real-time position of the platform plate and the target position of the platform plate;
Comparing the second dynamic distance with a second preset distance to output a second comparison result;
when the second comparison result shows that the second dynamic distance is smaller than or equal to the second preset distance, the piezoelectric friction driving assembly is controlled to stop running;
And when the second comparison result shows that the second dynamic distance is larger than the second preset distance, controlling the piezoelectric friction driving assembly to continuously drive the platform plate to move.
5. The motion control method of a high-precision motion platform according to claim 1, wherein the step of acquiring a motion requirement and outputting a corresponding control strategy according to the motion requirement comprises:
searching the motion requirement set by the main controller or acquiring the motion requirement input by a user;
and determining the movement type of the platform plate according to the movement requirement, and matching a control strategy corresponding to the movement type according to the movement type.
6. The motion control method of a high-precision motion platform according to claim 5, wherein the step of determining a motion type of the platform plate according to the motion requirement and matching a control strategy corresponding to the motion type according to the motion type comprises:
when the motion type is determined to be track motion, matching a track micro-error control strategy corresponding to the track motion;
and when the motion type is determined to be the two-point motion, matching out a shortest time control strategy corresponding to the two-point motion.
7. A high-precision motion platform employing the motion control method of the high-precision motion platform according to any one of claims 1 to 6, characterized in that the high-precision motion platform comprises:
A base;
The main controller is arranged on the base;
the motion guide assembly is arranged on the base;
The platform plate is connected with one side of the motion guide assembly, which is opposite to the base, so that the platform plate can move relative to the base;
one end of the piezoelectric friction driving assembly is fixed on the base and is electrically connected with the main controller;
The electromagnetic driving assembly is connected with one end of the piezoelectric friction driving assembly, the other end of the electromagnetic driving assembly is connected with the platform plate, and the electromagnetic driving assembly is electrically connected with the main controller; the electromagnetic driving assembly is used for driving the platform plate to move, and the piezoelectric friction driving assembly is used for driving the platform plate to move.
8. The high precision motion platform of claim 7, wherein the electromagnetic drive assembly comprises:
The electromagnetic coils are arranged on the base, are arranged at intervals with the motion guide assembly, and are electrically connected with the main controller; the piezoelectric friction driving assembly is arranged on the base and is positioned in the electromagnetic coil;
The mounting plate is connected with one side of the piezoelectric friction driving assembly, which is opposite to the electromagnetic coil;
And the permanent magnets are connected with one side of the mounting plate, which is opposite to the piezoelectric friction driving assembly, and one side of the permanent magnets, which is opposite to the mounting plate, is connected with the platform plate.
9. The high precision motion platform of claim 8, wherein the piezoelectric friction drive assembly comprises:
the voice coil motors are arranged on the base and are positioned in one electromagnetic coil;
the plurality of shearing piezoelectric ceramics are arranged at one end of the voice coil motor, which is opposite to the electromagnetic coil, and are connected with the mounting plate; and a plurality of voice coil motors and a plurality of shearing piezoelectric ceramics are electrically connected with the main controller.
10. The high-precision motion platform of claim 7, further comprising a grating displacement sensor electrically connected to the master controller, the grating displacement sensor being disposed on the platform plate and spaced apart from the motion guide assembly, the piezoelectric friction drive assembly and the electromagnetic drive assembly, the grating displacement sensor being configured to detect a real-time position of the platform plate.
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| CN202410527425.1A CN118131829A (en) | 2024-04-29 | 2024-04-29 | Motion control method of high-precision motion platform and high-precision motion platform |
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| CN202410527425.1A CN118131829A (en) | 2024-04-29 | 2024-04-29 | Motion control method of high-precision motion platform and high-precision motion platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
| CN110941181A (en) * | 2019-08-29 | 2020-03-31 | 广东工业大学 | Rigid-flexible coupling motion platform control method for piezoelectric ceramic connection |
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- 2024-04-29 CN CN202410527425.1A patent/CN118131829A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103318839A (en) * | 2013-03-01 | 2013-09-25 | 广东工业大学 | Piezoelectric-ceramics-based high-speed high-precision macro-micro platform and switching method |
| CN110434835A (en) * | 2019-08-29 | 2019-11-12 | 华南理工大学 | A kind of macro micro- precisely locating platform device of two degrees of freedom and control method |
| CN110941181A (en) * | 2019-08-29 | 2020-03-31 | 广东工业大学 | Rigid-flexible coupling motion platform control method for piezoelectric ceramic connection |
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