CN118068297A - On-chip integrated laser radar - Google Patents
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- CN118068297A CN118068297A CN202410215495.3A CN202410215495A CN118068297A CN 118068297 A CN118068297 A CN 118068297A CN 202410215495 A CN202410215495 A CN 202410215495A CN 118068297 A CN118068297 A CN 118068297A
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Abstract
The present disclosure provides an on-chip integrated lidar comprising: the end face coupler is used for coupling the modulated laser into the on-chip integrated laser radar, and the modulated laser is split into local oscillation light and signal light after being coupled into the on-chip integrated laser radar; the optical phased array is used for changing the phase of the signal light so as to realize beam deflection and scanning, so that the signal light acts on a target to obtain reflected signal light; and the balance receiving and processing module is used for receiving the reflected signal light focused by the optical lens and realizing multichannel balance detection in a coupling multiplexing mode.
Description
Technical Field
The disclosure relates to the technical fields of laser radar, coherent detection, silicon light integration and the like, in particular to an on-chip integrated FMCW laser radar.
Background
The laser radar utilizes an active mode to emit laser for target detection, and the accurate three-dimensional space characteristics of the target are calculated by analyzing information such as light propagation time, frequency, phase or amplitude of reflected light and the like. The frequency modulation continuous wave (Frequency Modulation Continuous Wave, FMCW) laser radar adopts coherent detection, can measure distance and speed at the same time, and is widely applied in the fields of military, civil use and the like. The construction of integrated laser radar on chip by photon integration technology is an important trend of future development.
The on-chip integrated laser radar has a plurality of scanning modes, wherein the optical phased array mode can simultaneously meet the requirements of detection distance, resolution and scanning frequency, is a preferred scheme for balancing various core indexes, realizes low cost and high reliability, has excellent performance, and is a main stream development direction of all-solid-state and miniaturization of the FMCW laser radar in the future. The optical phased array mainly comprises 3 parts of a beam splitter, a phase shifter and an antenna. The phase shifter introduces phase delay to the optical signal, and is mainly realized by a thermo-optical effect or an electro-optical effect, and the antenna usually adopts a grating coupler, an edge coupler or an end-face coupler. The optical phased array controls the shape and direction of the wave front by controlling the phase of light passing through the waveguide, thereby realizing the deflection of the light beam.
The balanced detection technology is a heterodyne coherent technology, the differential measurement is carried out after mixing signal light and local oscillation light, two photoelectric response signals are obtained through photoelectric detectors with identical parameters and subtracted, common mode noise is restrained, and therefore the sensitivity of a photoelectric detection system is greatly improved. As a core device for coherent detection, a balanced detection technique has become a research hotspot in recent years.
The scan field of view of lidar is an important indicator. While research to expand the lateral scanning range of an optical phased array has achieved a certain effect, the longitudinal scanning of the optical phased array is achieved by changing the wavelength of incident light, which means that the longitudinal scanning efficiency is completely dependent on the diffraction capability of the grating to the wavelength. The tuning range of a general tunable laser is only about 100nm, the corresponding tuning angle is about 30 degrees, if a larger longitudinal scanning angle is required, the requirement on the wavelength range of the light source is even hundreds of nanometers, and the requirement is difficult to meet.
Disclosure of Invention
Based on the above problems, the present disclosure provides an on-chip integrated laser radar to alleviate the above technical problems in the prior art.
Technical scheme (one)
The present disclosure provides an on-chip integrated lidar comprising: the end face coupler is used for coupling the modulated laser into the on-chip integrated laser radar, and the modulated laser is split into local oscillation light and signal light after being coupled into the on-chip integrated laser radar; the optical phased array is used for changing the phase of the signal light so as to realize beam deflection and scanning, so that the signal light acts on a target to obtain reflected signal light; and the balance receiving and processing module is used for receiving the reflected signal light focused by the optical lens and realizing multichannel balance detection in a coupling multiplexing mode.
According to an embodiment of the present disclosure, a balanced receiving and processing module includes: the waveguide grating array is used for receiving the reflected signal light focused by the optical lens and realizing gating reception of the reflected signal light; the multimode interference coupler is used for carrying out coherent mixing on the local oscillation light and the reflected signal light and splitting the local oscillation light and the reflected signal light into two light beat frequency signals with set phase shift; the waveguide type balance detector is used for carrying out photoelectric conversion and intermediate frequency detection on the optical beat frequency signal to obtain an intermediate frequency electric signal; and the signal processing module is used for amplifying, filtering and analog-to-digital converting the intermediate frequency electric signal to obtain a final digital signal.
According to an embodiment of the disclosure, the signal processing module includes a transimpedance amplifier, a band-pass filter, and an analog-to-digital converter.
According to an embodiment of the present disclosure, an optical phased array includes two groups of structurally symmetric optical phased arrays, each group of optical phased arrays including a plurality of sub-optical phased arrays; the two groups of optical phased array with symmetrical structures adopt an interdigital splicing mode.
According to the embodiment of the disclosure, the enabling state of each sub-optical phased array is changed through the optical switch, so that the beam deflection and the scanning angle are adjusted.
According to the embodiment of the disclosure, the grating spacing between adjacent sub-optical phased arrays in the optical phased array is optimized through a genetic algorithm and is distributed in a non-uniform manner.
According to the embodiment of the disclosure, the waveguide grating array comprises a plurality of coupling gratings, and the size of each coupling grating is set according to the spot diameter of the reflected signal light; each coupling grating is connected with an optical switch through a silicon waveguide to realize independent control, and the optical switch adopts a Mach-Zehnder optical switch.
According to the embodiment of the disclosure, modulated laser is coupled into an on-chip integrated laser radar and then split into local oscillation light and signal light through a Y branch.
According to an embodiment of the present disclosure, the multimode interference coupler has a splitting ratio of 1: and 1, performing coherent mixing on the local oscillation light and the reflected signal light, and splitting the local oscillation light and the reflected signal light into two light beat signals with 180-degree phase shift.
According to an embodiment of the present disclosure, the waveguide balanced detector includes two waveguide type PIN detectors with consistent responsivity.
(II) advantageous effects
According to the technical scheme, the on-chip integrated laser radar has at least one or a part of the following beneficial effects:
(1) The laser beam of each sub-optical phased array has a direct mapping relation with the corresponding receiving grating antenna, and signals can be gated and read out during operation, so that the processes of signal processing and data association are simplified, and the detection speed is greatly improved;
(2) An interdigital optical phased array is adopted to realize longitudinal large-angle scanning; meanwhile, a waveguide grating array based on an optical switch is adopted, the scale of the waveguide grating array is changed through an optical phased array, and switching adjustment and polling treatment of a detection view field are realized;
(3) The balanced detection is adopted, the common mode rejection ratio is improved, the number of multimode interference couplers and waveguide type balanced detectors in the array balanced detection system is reduced, the utilization rate of the balanced detectors is improved, the size of a balanced detection array is reduced, the light path structure is simple, and meanwhile, the CMOS chip and the silicon optical chip are integrated together in a photoelectric integration mode, so that high-density integration is realized.
Drawings
Fig. 1 is a schematic diagram of an on-chip integrated lidar of an embodiment of the present disclosure.
Fig. 2 is a schematic diagram of a workflow of an on-chip integrated lidar according to an embodiment of the present disclosure.
Fig. 3 is a schematic diagram of detection of an on-chip integrated lidar according to an embodiment of the present disclosure.
[ In the drawings, the main reference numerals of the embodiments of the present disclosure ]
The optical fiber array comprises a 1-optical lens, a 2-waveguide grating array, a 3-interdigital optical phased array, a 4-silicon-based waveguide, a 5-optical switch array, a 6-multimode interference coupler, a 7-waveguide type balance detector, an 8-transimpedance amplifier, a 9-metal interconnection, a 10-signal processing module, an 11-end face coupler, a 20-waveguide grating and a 30-sub optical phased array.
Detailed Description
The present disclosure provides an on-chip integrated laser radar, which is based on an interdigital optical phased array structure, and can realize two-dimensional scanning in a large angle range with a small number of grating periods by combining an optical switch; the waveguide grating can carry out gating reception on the reflected signal light, and finally, the silicon-based waveguide device, the waveguide detection device and the like are used for realizing the mixing and detection of local oscillation light and signal light in balanced detection, and the target distance information is obtained by comparing the instantaneous frequency difference of the reflected light signal and the local oscillation light signal, so that the single-point detection speed and the on-chip integration level are improved, the common mode noise interference is effectively restrained, and the system detection capability is improved; the optical phased array can complete large-angle scanning and higher-speed signal gating detection in fewer periods.
For the purposes of promoting an understanding of the principles and advantages of the disclosure, reference will now be made to the embodiments illustrated in the drawings and specific language will be used to describe the same.
In an embodiment of the present disclosure, there is provided an on-chip integrated lidar, as shown in fig. 1 to 3, including:
the end face coupler 11 is used for coupling modulated laser into the on-chip integrated laser radar, and the modulated laser is split into local oscillation light and signal light after being coupled into the on-chip integrated laser radar;
An optical phased array 3 for changing the phase of the signal light to achieve beam deflection and scanning, so that the signal light acts on a target to obtain reflected signal light; and
And the balance receiving and processing module is used for receiving the reflected signal light focused by the optical lens 1 and realizing multichannel balance detection in a coupling multiplexing mode.
According to an embodiment of the present disclosure, a balanced receiving and processing module includes:
The waveguide grating array 2 is used for receiving the reflected signal light focused by the optical lens 1 and realizing gating reception of the reflected signal light;
the multimode interference coupler 6 is used for carrying out coherent mixing on the local oscillation light and the reflected signal light and splitting the local oscillation light and the reflected signal light into two light beat frequency signals with set phase shift;
The waveguide type balance detector 7 is used for carrying out photoelectric conversion and intermediate frequency detection on the optical beat frequency signal to obtain an intermediate frequency electric signal; and
And the signal processing module is used for amplifying, filtering and analog-to-digital converting the intermediate frequency electric signal to obtain a final digital signal.
According to an embodiment of the disclosure, the signal processing module includes a transimpedance amplifier, a band-pass filter, and an analog-to-digital converter.
According to an embodiment of the present disclosure, the optical phased array 3 includes two sets of structurally symmetric optical phased arrays, each set of optical phased arrays including a plurality of sub-optical phased arrays 30; the two groups of optical phased array with symmetrical structures adopt an interdigital splicing mode.
According to the embodiment of the present disclosure, the enabling state of each sub-optical phased array 30 is changed by the optical switch, thereby adjusting the beam deflection and the scanning angle.
According to the embodiment of the present disclosure, the grating pitches between adjacent sub-optical phased arrays 30 in the optical phased array 3 are optimized by a genetic algorithm and are arranged in a non-uniform manner.
According to the embodiment of the disclosure, the waveguide grating array 2 includes a plurality of coupling gratings, and each coupling grating is set in size according to the spot diameter of the reflected signal light; each coupling grating is connected with an optical switch through a silicon waveguide to realize independent control, and the optical switch adopts a Mach-Zehnder optical switch.
According to the embodiment of the disclosure, modulated laser is coupled into an on-chip integrated laser radar and then split into local oscillation light and signal light through a Y branch.
According to an embodiment of the present disclosure, the multimode interference coupler has a splitting ratio of 1: and 1, performing coherent mixing on the local oscillation light and the reflected signal light, and splitting the local oscillation light and the reflected signal light into two light beat signals with 180-degree phase shift.
According to an embodiment of the present disclosure, the waveguide balanced detector includes two waveguide type PIN detectors with consistent responsivity.
More specifically:
In the embodiment of the disclosure, as shown in fig. 1, modulated laser is coupled into an on-chip integrated laser radar through an end-face coupler 11, and is divided into local oscillation light and signal light through a Y branch, the local oscillation light is transmitted to a multimode interference coupler 6 through a silicon-based waveguide 4 to wait for mixing, and the signal light enters an interdigital optical phased array 3.
In the embodiment of the disclosure, the optical phased array 3 changes the phase of the signal light through the phase shifter to realize beam deflection and scanning, the signal light acts on the target object and is reflected back, and in the process of beam scanning, the enabling state of each sub-optical phased array 30 is changed through the optical switch, so that the scanning angle is adjusted;
In the embodiment of the disclosure, the optical lens 1 on the waveguide grating array 2 focuses the reflected signal light on the grating array, and couples the signal light into the waveguide, and the position arrangement of each grating corresponds to the scanning angle of a single sub-optical phased array 30 in the optical phased array 3, that is, each grating only receives the signal light emitted by a specific sub-optical phased array 30;
In the embodiment of the disclosure, the optical switch is driven by an electric signal to change the enabling state of the corresponding waveguide grating 20, so as to receive light with a specific angle, realize signal light gating reception, and each enabled grating transmits the signal light to the multimode interference coupler 6 through the silicon-based waveguide 4;
In the embodiment of the disclosure, local oscillation light and signal light acquired by the waveguide grating array 2 are subjected to coherent mixing, and two light beat signals with 180-degree phase shift are output;
In the embodiment of the disclosure, after two light beat frequency signals enter a waveguide type balance detector 7, intermediate frequency electric signals are obtained through photoelectric conversion, direct current components in the signals are eliminated, and the direct current components are transmitted to a transimpedance amplifier 8 connected with the signals;
in the embodiment of the present disclosure, the transimpedance amplifier 8 amplifies the electrical signal, and the output analog signal enters the signal processing module 10 to be ADC-sampled and quantized into a digital signal.
The structure of the interdigital optical phased array and the on-chip balance receiving and processing module is adopted, the optical phased array adopts an interdigital splicing mode, and the longitudinal scanning angle which can be achieved only by 2N grating periods of the traditional optical phased array can be achieved through N grating periods. Meanwhile, the multi-channel array detection can be realized, the number of the multi-mode interference couplers and the waveguide type balance detectors is reduced, the integration level of the balance detection array is greatly improved, and the multi-channel array detection device has the characteristics of simple structure, small size, low power consumption and the like. Meanwhile, as the laser beam of each sub-optical phased array has a direct mapping relation with the corresponding receiving grating antenna, the processes of signal processing and data association can be simplified. The signal generated by each sub-optical phased array can be directly related to a specific target, so that signal information is subjected to gating readout, and the complexity of signal processing is reduced. The polling detection is realized in a time division multiplexing mode, and the detection efficiency is improved.
In summary, as shown in connection with fig. 1 to 3, the on-chip integrated laser radar system of the present disclosure mainly includes an end-face coupler, an interdigital optical phased array, and a balance receiving and processing module; the end face coupler 11 is used for coupling frequency modulation laser into an on-chip laser radar system; the interdigital optical phased array 3 is used for two-dimensional scanning, and may be composed of a plurality of sub-optical phased arrays 30, including: y branch for realizing laser beam splitting; a plurality of sub-optical phased arrays 30, which are arranged in an interdigitating manner to form an interdigital optical phased array 3 for realizing beam control; and the optical switch is used for controlling the working state of the sub-optical phased array 30. The on-chip balance receiving and processing module realizes multichannel balance detection in a coupling multiplexing mode, and the optical lens 1 is used for acquiring space light, converging and transmitting the space light to the waveguide grating array 2; the waveguide grating array 2 is connected with the optical switch array 5 through the silicon-based waveguide 4 and is used for coupling the space light into the silicon-based waveguide 4 and sending the space light to the optical switch array 5; the optical switch array 5 is connected with the multimode interference coupler 6 through the silicon-based waveguide 4 in an array manner and is used for controlling the on-off of an optical path; the multimode interference coupler 6 is connected with the waveguide balance detector array through the silicon-based waveguide 4 and is used for carrying out interference mixing on the received signal light and the local oscillation light; the waveguide balance detector is used for respectively carrying out photoelectric conversion and intermediate frequency detection on two paths of light output by the multimode interference coupler 6 and sending the light to the signal processing module 10; the signal processing module 10 is configured to amplify, filter, and analog-to-digital convert the signal output by the balance detector, and includes: a transimpedance amplifier 8, a band-pass filter, an analog-to-digital converter. The interdigital optical phased array 3 comprises two groups of optical phased arrays with symmetrical structures, and the interdigital optical phased array 3 is formed by interdigital arrangement, wherein the grating spacing of the sub-optical phased arrays 30 is optimized by a genetic algorithm, and the sub-optical phased arrays are arranged in a non-uniform mode; the waveguide grating array 2 comprises a plurality of coupling gratings, and the size of each coupling grating can be 20 μm, and can be specifically set according to the diameter of a light spot; each coupling grating is connected with one optical switch in the optical switch array 5 through a silicon waveguide, and the optical switch can adopt Mach-Zehnder type optical switches; each optical switch in the optical switch array 5 is independently controllable; the beam splitting ratio of the multimode interference coupler 6 is 1:1, and the two output beams have 180-degree phase shift, and the distance between the two output waveguides can be 10 mu m; the waveguide balance detector consists of two waveguide type PIN detectors with consistent responsivity.
Thus, embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It should be noted that, in the drawings or the text of the specification, implementations not shown or described are all forms known to those of ordinary skill in the art, and not described in detail. Furthermore, the above definitions of the elements and methods are not limited to the specific structures, shapes or modes mentioned in the embodiments, and may be simply modified or replaced by those of ordinary skill in the art.
From the above description, it should be apparent to those skilled in the art that the present disclosure is directed to an on-chip integrated lidar.
In summary, the disclosure provides an on-chip integrated laser radar, and provides an interdigital optical phased array structure, which can realize two-dimensional scanning in a large angle range with a small number of grating periods by combining an optical switch; the waveguide grating can carry out gating reception on the reflected signal light, and finally, the silicon-based waveguide device, the waveguide detection device and the like are used for realizing the mixing and detection of local oscillation light and signal light in balanced detection, and the target distance information is obtained by comparing the instantaneous frequency difference of the reflected light signal and the local oscillation light signal, so that the single-point detection speed and the on-chip integration level are improved, the common mode noise interference is effectively restrained, and the system detection capability is improved.
It should also be noted that the foregoing describes various embodiments of the present disclosure. These examples are provided to illustrate the technical content of the present disclosure, and are not intended to limit the scope of the claims of the present disclosure. A feature of one embodiment may be applied to other embodiments by suitable modifications, substitutions, combinations, and separations.
In this context, the so-called feature A "or" (or) or "and/or" (and/or) feature B, unless specifically indicated, refers to the presence of B alone, or both A and B; the feature A "and" (and) or "AND" (and) or "and" (and) feature B, means that the nail and the B coexist; the terms "comprising," "including," "having," "containing," and "containing" are intended to be inclusive and not limited to.
Furthermore, unless specifically described or steps must occur in sequence, the order of the above steps is not limited to the list above and may be changed or rearranged according to the desired design. In addition, the above embodiments may be mixed with each other or other embodiments based on design and reliability, i.e. the technical features of the different embodiments may be freely combined to form more embodiments.
While the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it will be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and that any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (10)
1. An integrated laser radar on a chip, comprising:
the end face coupler is used for coupling the modulated laser into the on-chip integrated laser radar, and the modulated laser is split into local oscillation light and signal light after being coupled into the on-chip integrated laser radar;
the optical phased array is used for changing the phase of the signal light so as to realize beam deflection and scanning, so that the signal light acts on a target to obtain reflected signal light; and
And the balance receiving and processing module is used for receiving the reflected signal light focused by the optical lens and realizing multichannel balance detection in a coupling multiplexing mode.
2. The integrated laser radar on chip of claim 1, the balanced receiving and processing module comprising:
The waveguide grating array is used for receiving the reflected signal light focused by the optical lens and realizing gating reception of the reflected signal light;
The multimode interference coupler is used for carrying out coherent mixing on the local oscillation light and the reflected signal light and splitting the local oscillation light and the reflected signal light into two light beat frequency signals with set phase shift;
The waveguide type balance detector is used for carrying out photoelectric conversion and intermediate frequency detection on the optical beat frequency signal to obtain an intermediate frequency electric signal; and
And the signal processing module is used for amplifying, filtering and analog-to-digital converting the intermediate frequency electric signal to obtain a final digital signal.
3. The integrated laser radar on chip of claim 2, the signal processing module comprising a transimpedance amplifier, a bandpass filter, an analog-to-digital converter.
4. The integrated laser radar on chip of claim 1, the optical phased array comprising two groups of structurally symmetric optical phased arrays, each group of optical phased arrays comprising a plurality of sub-optical phased arrays; the two groups of optical phased array with symmetrical structures adopt an interdigital splicing mode.
5. The integrated laser radar on a chip of claim 4, wherein the enabling state of each sub-optical phased array is changed by the optical switch, thereby adjusting the beam deflection and the scanning angle.
6. The integrated laser radar on chip according to claim 5, wherein the grating spacing between adjacent sub-optical phased arrays in the optical phased array is optimized by a genetic algorithm and arranged in a non-uniform manner.
7. The integrated laser radar on a chip according to claim 2, wherein the waveguide grating array includes a plurality of coupling gratings, each coupling grating having a size set according to a spot diameter of the reflected signal light; each coupling grating is connected with an optical switch through a silicon waveguide to realize independent control, and the optical switch adopts a Mach-Zehnder optical switch.
8. The integrated laser radar on chip of claim 1, wherein the modulated laser is coupled into the integrated laser radar on chip and split into local oscillation light and signal light through a Y-branch.
9. The integrated laser radar on chip of claim 2, the multimode interference coupler splitting ratio being 1: and 1, performing coherent mixing on the local oscillation light and the reflected signal light, and splitting the local oscillation light and the reflected signal light into two light beat signals with 180-degree phase shift.
10. The integrated laser radar on a chip of claim 2, the waveguide balanced detector comprising two waveguide type PIN detectors of uniform responsivity.
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