CN118039544A - Centering deviation adjusting method and centering deviation adjusting assembly - Google Patents

Centering deviation adjusting method and centering deviation adjusting assembly Download PDF

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Publication number
CN118039544A
CN118039544A CN202410437304.8A CN202410437304A CN118039544A CN 118039544 A CN118039544 A CN 118039544A CN 202410437304 A CN202410437304 A CN 202410437304A CN 118039544 A CN118039544 A CN 118039544A
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China
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large disc
point
disc part
deviation
adjusting
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CN202410437304.8A
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CN118039544B (en
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周惠言
谭志亮
蒋继乐
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Beijing Tesidi Semiconductor Equipment Co ltd
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Beijing Tesidi Semiconductor Equipment Co ltd
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Abstract

The application provides a centering deviation adjusting method and a centering deviation adjusting component, which belong to the technical field of wafer processing equipment and comprise the following steps: obtaining measured values of any three points A, B and C on the circumferential edge of the large disc part when the large disc part rotates under the drive of a machine tool spindle; taking the measured value of the point A as a reference value, and judging whether the difference value between the measured values of the two points B, C and the measured value of the point A is not larger than a deviation threshold value or not; if the difference value between the measured value of one of the two B, C points and the measured value of the point A is larger than the deviation threshold value, connecting the point A with the other point to form a perpendicular bisector, wherein the intersection point of the perpendicular bisector and the circumferential edge of the large disc part is a position adjustment point D; applying an orientation to the axis to the position adjustment point D of the large disc partThrust in the direction to adjustDistance of. According to the method, three-point measurement is adopted, the position to be adjusted is calculated according to reading analysis, and the position to be adjusted is more accurate than the position with the largest reading selected by the reading of the dial indicator alone, so that the adjustment precision and the adjustment efficiency are improved.

Description

Centering deviation adjusting method and centering deviation adjusting assembly
Technical Field
The application relates to the technical field of wafer processing equipment, in particular to a centering deviation adjusting method and a centering deviation adjusting assembly.
Background
Large disc parts are an important component of wafer processing equipment. As shown in fig. 1, the dimensional accuracy of the large disc part is in the order of meters, and the accuracy requirement of the machined circular surface (the cylindrical surface of the edge of the large disc part) is in the order of micrometers, so that the large disc part and the main shaft of the machine tool have good coaxiality during the circular surface machining.
In the related art, the adjustment method is that the dial indicator rotates around the main shaft of the machine tool, the processed circular surface is measured, and the position of the large disc part is adjusted according to the rotation direction and the rotation scale value of the dial indicator until the pointer of the dial indicator is not rotated or rotated within the error requirement range, namely, the maximum value or the minimum value point is found through the scale value of the dial indicator, and then the position of the large disc part is adjusted through hammering to realize centering. However, in the actual measurement process, the maximum position of the dial indicator reading is difficult to directly determine, the dial indicator is required to be used for multiple measurements, the measured maximum position of the error is tapped each time, the measurement is finished until all errors of the final large disc are in the error threshold range, and the efficiency is low.
Secondly, because the big dish part is the metalwork, very heavy, and the traditional mode with hammering part constantly adjusts the position of part, has the uncontrollable shortcoming of hammering dynamics, and distance and the angle that leads to the position movement of part are also uncontrollable, influence adjustment efficiency to influence machining efficiency.
Disclosure of Invention
The application aims to provide a centering deviation adjusting method and a centering deviation adjusting assembly, which aim to solve the technical problem that the maximum value or minimum value point of the position deviation of a machined circular surface of a large disc part is difficult to confirm, so that the machining efficiency of the machined circular surface is low in the related art.
Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.
According to a first aspect of the present application, there is provided a centering deviation adjusting method, the center of a circle of a large disc partIs arranged corresponding to the circle center of the main shaft of the machine tool;
the centering deviation adjusting method is used for adjusting the centering of the large disc part and the machine tool spindle, and comprises the following steps:
Acquiring measured values of any three points A, B and C on the circumferential edge of the large disc part in the relative rotation process of the large disc part and a machine tool spindle;
Taking the measured value of the point A as a reference value, and judging whether the difference value between the measured values of the two points B, C and the measured value of the point A is not larger than a deviation threshold value or not;
If the difference value between the measured value of one of the B, C points and the measured value of the A point is larger than the deviation threshold value, connecting the A point with the other point to form a vertical bisector, wherein the intersection point of the vertical bisector and the circumferential edge of the large disc part is a position adjustment point D;
If the difference value between the measured values of the B, C points and the measured value of the A point is larger than the deviation threshold value, respectively making perpendicular bisectors on the connecting lines AB, AC and BC, wherein the intersection point of the three perpendicular bisectors is the circle center of the large disc part Connect the circle center/>And the axle center of the machine tool spindle/>,/>The intersection point of the extension line of the connecting line and the circumferential edge of the large disc part is a position adjustment point D;
applying a force to the position adjustment point D of the large disc part toward the shaft center Thrust in the direction to adjustDistance/>
In an exemplary embodiment of the present application, the position adjustment point D of the large disc part is applied toward the shaft centerThrust in the direction to regulate/>Before the distance, further comprising: calculation/>Distance/>
In an exemplary embodiment of the application, the calculatingDistance/>Comprising the following steps:
Connection And/>Measuring said/>And said/>Included angle of two connecting lines/>ThenDistance/>Expressed as:
Wherein R is the radius of the large disc part.
In an exemplary embodiment of the application, the calculatingDistance/>Comprising the following steps:
Measuring straight line distance between BD ,/>,/>,/>The saidDistance/>Obtained by the following equation:
wherein R is the radius of the large disc part, For the measurement of point B on the large disc part,/>Take a positive value.
In an exemplary embodiment of the application, for the followingDistance/>Is differentiated by a mathematical model of (2) to obtain said/>Distance/>Absolute deviation/>Said absolute deviation/>The calculation formula of (2) is as follows:
Wherein, Is the radius error of the large disc part.
In an exemplary embodiment of the present application, further comprising:
Obtaining the deviation of the circle center position Radius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine tools
Using at least the centre position deviationRadius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine toolsCalculating the absolute deviation/>
Determining the absolute deviationWhether an absolute deviation threshold is exceeded;
If the absolute deviation is If the absolute deviation threshold is exceeded, the circle center position deviation/>, is adjustedRelated factors of (1) radius error of large disc parts/>Related factors, angular error/>Related factors of (2) and flatness error of machine toolTo reduce the absolute deviation/>
In an exemplary embodiment of the present application, the center position deviation is obtainedRadius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine toolsComprising the following steps:
calculating the center position deviation by using the following method
Wherein,Is the straight line position deviation of the perpendicular bisector,/>Is the angular deviation;
and/or the number of the groups of groups,
Radius error of the large disc partThe diameter of the large disc part can be obtained through repeated measurement for a plurality of times;
and/or calculating uncertainty due to the flatness error by
Wherein, the flatness error of the machine tool is set to be 1 degree.
In an exemplary embodiment of the application, an adjustment assembly is used to apply an orientation to the position adjustment point D of the large disc part toward the hubThrust in the direction to regulate/>Distance/>
The adjusting assembly comprises a fixed seat, an adjusting rod, a shaft sleeve and a screw; the fixed seat is fixedly arranged on a machine tool seat; the adjusting rod, the shaft sleeve and the screw are arranged in the fixing seat, the adjusting rod is a threaded rod and is matched with the shaft sleeve to form a rough adjusting structure, and the shaft sleeve can be rotated to drive the adjusting rod to axially move; the screw is in threaded fit with the shaft sleeve, the screw and the shaft sleeve form a fine adjustment structure, and the shaft sleeve can be driven to move along the axial direction by rotating the screw;
the use of an adjustment assembly to apply an orientation to the position adjustment point D of the large disc part toward the hub Thrust in the direction to regulate/>Distance/>Comprising the following steps:
according to the position adjusting point D, the adjusting component is fixedly arranged at a proper position of the machine tool seat, so that the adjusting rod faces the axle center The direction is abutted to the position adjusting point D;
adjusting the moving distance of the shaft sleeve To regulate/>Distance/>The shaft sleeve moving distance/>The mathematical model of (a) is:
Wherein, For the shaft sleeve moving distance,/>For the rotation angle, P is the pitch,/>Is the number of threads.
In an exemplary embodiment of the application, the sleeve is moved a distanceDifferential is carried out on the mathematical model of (2) to obtain the displacement error/>, of the adjusting rodThe adjusting rod displacement error/>The calculation formula is as follows:
By using the displacement error of the adjusting rod Calculating the absolute deviation/>
Determining the absolute deviationWhether an absolute deviation threshold is exceeded;
If the absolute deviation is If the absolute deviation threshold is exceeded, adjusting the displacement error/>, of the adjusting rodTo reduce the absolute deviation/>
In an exemplary embodiment of the present application, the adjustment lever displacement errorRelated factors of (a) include adjustment lever rotation angle deviation/>Adjusting lever rotation pitch deviation/>Hertz contact deviation/>, of adjusting rod and large disc partAt least one of (a) and (b).
In an exemplary embodiment of the present application, the step of obtaining the measured values of any three points A, B and C on the circumferential edge of the large disc part when the large disc part rotates under the drive of the machine spindle includes:
At the circumferential edge of the large disc part, three points A, B and C are selected at will;
The dial indicator is arranged at the point A, the machine tool spindle is driven to rotate, the machine tool spindle drives the dial indicator to rotate around the large disc part, and measured values of the dial indicator at the point A, B and the point C are read out respectively 、/>And/>
According to a second aspect of the application. Providing a centering deviation adjusting assembly, which is applicable to the centering deviation adjusting method of the claims; the centering deviation adjusting assembly comprises a fixed seat, an adjusting rod, a shaft sleeve and a screw;
the fixed seat is fixedly arranged on a machine tool seat;
The adjusting rod, the shaft sleeve and the screw are arranged in the fixing seat, the adjusting rod is a threaded rod and is matched with the shaft sleeve to form a rough adjusting structure, and the shaft sleeve can be rotated to drive the adjusting rod to axially move; the screw is in threaded fit with the shaft sleeve, the screw and the shaft sleeve form a fine adjustment structure, and the shaft sleeve can be driven to axially move by rotating the screw.
In an exemplary embodiment of the present application, the machine tool further comprises a magnetic connector, and the fixing base is detachably mounted on the machine tool base through the magnetic connector; the fixing seat is connected with the magnetic connecting piece through a fastener.
Exemplary embodiments of the present application may have some or all of the following advantages:
in the centering deviation adjusting method provided by the example embodiment of the application, the circle center of the large disc part Is arranged corresponding to the circle center of the main shaft of the machine tool; the centering deviation adjusting method is used for adjusting the centering of the large disc part and the machine tool spindle, and comprises the following steps: acquiring measured values of any three points A, B and C on the circumferential edge of the large disc part when the large disc part rotates under the drive of a machine tool spindle;
Taking the measured value of the point A as a reference value, and judging whether the difference value between the measured values of the two points B, C and the measured value of the point A is not larger than a deviation threshold value or not;
If the difference value between the measured value of one of the B, C points and the measured value of the A point is larger than the deviation threshold value, connecting the A point with the other point to form a vertical bisector, wherein the intersection point of the vertical bisector and the circumferential edge of the large disc part is a position adjustment point D;
If the difference value between the measured values of the B, C points and the measured value of the A point is larger than the deviation threshold value, respectively making perpendicular bisectors on the connecting lines AB, AC and BC, wherein the intersection point of the three perpendicular bisectors is the circle center of the large disc part Connect the circle center/>And the axle center of the machine tool spindle/>,/>The intersection point of the extension line of the connecting line and the circumferential edge of the large disc part is a position adjustment point D;
applying a force to the position adjustment point D of the large disc part toward the shaft center Thrust in the direction to adjustDistance/>. According to the method, three-point measurement is adopted, the position to be adjusted is calculated according to reading analysis, and the position to be adjusted is more accurate than the position with the largest reading selected by the reading of the dial indicator alone, so that the adjustment precision and the adjustment efficiency are improved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application. It is evident that the drawings in the following description are only some embodiments of the present application and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a schematic diagram showing point location contrast in a method for adjusting misalignment in embodiment 1 of the present application;
FIG. 2 is a schematic diagram showing the correspondence between a spindle and a large disc part in embodiment 2 of the present application;
FIG. 3 is a schematic diagram showing a centering deviation adjusting assembly and a large disc part according to embodiment 2 of the present application;
Fig. 4 is a schematic structural view showing a misalignment adjusting apparatus in embodiment 2 of the present application.
Reference numerals illustrate:
1. A machine tool spindle; 2. large disc parts; 3. a machine tool base; 4. an adjustment assembly; 41. an adjusting rod; 42. a shaft sleeve; 43. a fixing seat; 44. a screw; 5. a magnetic connection.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted. Furthermore, the drawings are merely schematic illustrations of the present application and are not necessarily drawn to scale.
Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification for convenience only, such as in terms of the orientation of the examples in the drawings. It will be appreciated that if the device of the icon is flipped upside down, the recited "up" component will become the "down" component. When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.
The terms "a," "an," "the," and "at least one" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. in addition to the listed elements/components/etc.; the terms "first" and "second" are used merely as labels, and do not limit the number of their objects.
Example 1
The embodiment of the application provides a specific implementation mode of the centering deviation adjusting method, wherein the circle center of the large disc part 2The large disc part 2 is sleeved on the machine tool spindle 1 through the mounting hole, and the large disc part 2 is correspondingly arranged with the circle center of the machine tool spindle 1;
the centering deviation adjusting method is used for adjusting the centering of the large disc part 2 and the machine tool spindle 1 and comprises the following steps of:
obtaining measured values of any three points A, B and C on the circumferential edge of the large disc part 2 when the large disc part 2 rotates under the drive of the machine tool spindle 1;
Taking the measured value of the point A as a reference value, and judging whether the difference value between the measured values of the two points B, C and the measured value of the point A is not larger than a deviation threshold value or not;
If the difference value between the measured value of one of the B, C points and the measured value of the A point is larger than the deviation threshold value, connecting the A point with the other point to form a vertical bisector, wherein the intersection point of the vertical bisector and the circumferential edge of the large disc part is a position adjustment point D;
If the difference value between the measured values of the B, C points and the measured value of the A point is larger than the deviation threshold value, respectively making perpendicular bisectors on the connecting lines AB, AC and BC, wherein the intersection point of the three perpendicular bisectors is the circle center of the large disc part 2 Connect the circle center/>With the axis of the machine tool spindle 1/>,/>The intersection point of the extension line of the connecting line and the circumferential edge of the large disc part 2 is a position adjustment point D;
Applying a force to the position adjustment point D of the large disc part 2 toward the shaft center Thrust in the direction to adjustDistance/>
Specifically, the large disc part 2 is placed on the machine tool base 3, and three point positions with certain intervals are arbitrarily selected at the edge (namely, the machining plane position) of the large disc part 2, and are marked as A, B and C. In the process of relative rotation of the large disc part 2 and the machine tool spindle 1, the machine tool spindle 1 can rotate, and the large disc part 2 is static, so that the lever meter can be arranged on the machine tool spindle 1 through the meter frame; the large disc part 2 can also rotate, and the machine tool main shaft 1 is static, in which case, the lever meter can be arranged on the machine tool main shaft 1 through the meter frame; the main shaft 1 of the machine tool can drive the large disc part 2 to rotate, and in this case, the lever meter can be fixed at a point outside the large disc part 2, so that the large disc part 2 rotates to perform rotary motion relative to the lever meter.
Then the lever meter is arranged at the point A of the edge of the large disc part 2 to drive the large disc part 2 to rotate, and at the moment, the lever meter rotates around the large disc part 2 to read out the measured values of the dial indicator at the three points A, B and C respectively、/>And/>The value at point a may be chosen to be approximately 0 for ease of calculation.
If the absolute values of the readings of the three points are smaller than the threshold value, the fact that the circle center of the large disc part 2 is basically coincident with the axis at the moment is proved, and the accidental can be avoided by repeatedly measuring by selecting the three points; or selecting the position of the point B as 0, and verifying A, C whether the absolute value of the two points is within a threshold value or not to avoid accidental.
If one of the two points B, C is not in the threshold range, connecting the point A with the other point in the threshold to form a perpendicular bisector, and enabling the perpendicular bisector to pass through the point D of the disc, aligning the adjusting component to the position of the point D, and aligning the distance adjustment in the axis direction.
If B, C points are not in the threshold range, the perpendicular bisectors of AB, AC and BC can be respectively made, and the intersection point of the three perpendicular bisectors is the circle center of the large disc part 2. Connecting the center of a circle with the axis, and intersecting with a point D on the circumference of the large disc part. Let/>Distance of/>. The centering adjustment is achieved by calculating the value of x by moving the adjustment assembly 4 to point D, in a direction towards the axial position, and rotating the screw to move the adjustment assembly 4 x distance in that direction.
According to the triangle relation, the point D is the maximum value or the minimum value measured by the lever table.
In this embodiment, the position adjustment point D of the large disc part 2 is applied toward the shaft centerThrust in the direction to regulate/>Before the distance, further comprising: calculation/>Distance/>
In the present embodiment, calculationDistance/>Comprising the following steps:
Connection And/>Measuring said/>And said/>Included angle of two connecting lines/>ThenDistance/>Expressed as:
wherein R is the radius of the large disc part 2.
As an alternative embodiment, it is also possible to calculate byDistance/>
Calculation ofDistance/>Comprising the following steps:
Measuring straight line distance between BD ,/>,/>,/>The saidDistance/>Obtained by the following equation:
wherein R is the radius of the large disc part 2, Take a positive value.
Specifically, the following formula is also included
Simplifying and obtaining
Solving the above-mentioned equation and,Taking a positive value, and finally obtaining the moving distance of the large disc part 2.
In this embodiment, the mathematical model for determining the center distance is:
the above formula is differentiated (absolute deviation):
In the present embodiment, the adjustment assembly 4 is used to apply the orientation toward the axial center to the position adjustment point D of the large disc member 2 Thrust in the direction to regulate/>Distance/>; Wherein, the adjusting component 4 comprises a fixed seat 43, an adjusting rod 41, a shaft sleeve 42 and a screw 44; the fixed seat 43 is fixedly arranged on the machine tool seat 3, the adjusting rod 41, the shaft sleeve 42 and the screw 44 are arranged in the fixed seat 43, the adjusting rod 41 is a threaded rod and is matched with the shaft sleeve 42 to form a rough adjusting structure, and the rotating shaft sleeve 42 can drive the adjusting rod 41 to move along the axial direction; screw 44 and axle sleeve 42 screw thread fit, screw 44 and axle sleeve 42 make up the fine setting structure, the rotation screw 44 can drive axle sleeve 42 to move axially; through setting up adjusting part 4 in waiting to adjust position department, adjust the big dish part 2 through adjusting part 4, avoid causing adjustment error and redundant operation because of the uncertainty of hammering dynamics and direction.
Specifically, the adjustment assembly 4 is used to apply an axial orientation to the position adjustment point D of the large disc part 2Thrust in the direction to regulate/>Distance/>Comprising the following steps: according to the position adjustment point D, the adjustment assembly 4 is fixedly arranged at a proper position of the machine tool seat 3, so that the adjustment rod 41 faces the axle center/>The direction is abutted to the position adjusting point D; adjusting sleeve 42 distance of travel/>To adjustDistance/>Shaft sleeve 42 distance of travel/>The mathematical model of (a) is:
Wherein, For the distance of travel of sleeve 42,/>For the rotation angle, P is the pitch,/>Is the number of threads.
In this embodiment, the error sources are: obtaining the deviation of the circle center positionRadius error, angle error/>, of large disc part 2Uncertainty/>, caused by flatness errors of machine tools
Using at least the centre position deviationRadius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine toolsCalculating the absolute deviation/>
Determining the absolute deviationWhether an absolute deviation threshold is exceeded;
If the absolute deviation is If the absolute deviation threshold is exceeded, the circle center position deviation/>, is adjustedRelated factors of (1) radius error of large disc parts/>Related factors, angular error/>Related factors of (2) and flatness error of machine toolTo reduce the absolute deviation/>
Error analysis:
(1) The center position determines the error.
As mentioned above, the center of the circle of the large disc part is determined by intersecting three perpendicular bisectors. In the process of drawing the perpendicular bisectors, the position and angle deviation of the three perpendicular bisectors can influence the determination of the circle center position, so that the concentricity of the large disc part and the main shaft is finally influenced.
Setting the straight line position deviation of the perpendicular bisector asAngle deviation is/>The deviation of the center position can be expressed as:
(2) Radius error.
Radius errors are mainly due to self-roundness deviations and measurement errors during manufacturing. This error can be obtained by making 10 repeated measurements of the disk diameter.
(3) Angle error.
The angle error mainly comes from the angle error caused by the self error of the angle meter and the deviation of the point A. In the actual measurement process, since a plurality of points are all within the threshold value range, the selected point A is not necessarily the intersection point position of two circles.
The error of the angle meter is 0.1 degrees, the included angle error caused by the deviation of the point A is 0.4 degrees, and the angle meter is used for taking
(4) Flatness error.
Assuming that the flatness error of the machine tool is 1 °, the uncertainty due to the flatness error is
(5) The lever adjusts the displacement error.
As previously described, this displacement is determined by method 1. And then the displacement adjustment is carried out through an adjusting rod. The displacement of the adjusting rod, i.e. the displacement distance of the sleeve 42 is
Then
As can be seen from the above formula, the adjustment deviation of the displacement of the adjusting lever mainly comes from the following parts:
adjusting lever rotation angle deviation
Adjusting the rotation angle deviation of the rod: in the process of adjusting the rotation angle of the rod, the deviation of the rotation angle exists due to the influence of factors such as return stroke, idle stroke, resolution and the like. When the angular resolution of the adjusting lever is 1 DEG and the angular deviation caused by the idle and return errors is 2 DEG, the angular deviation/>Can be expressed as:
adjusting lever rotation pitch deviation
Adjusting the rotating pitch deviation of the rod: the rotating pitch of the adjusting rod can be directly obtained through a mechanical manual. The deviation of the pitch is:
hertz contact deviation of adjusting rod and large disc part
The hertz contact of the adjusting rod and the large disc part can be regarded as the point contact of the ball and the plane, the materials of the adjusting rod and the large disc part are the same (steel materials), namely the Young modulus is the same, and the Poisson ratio is 0.3, and the relation can be expressed by the following formula:
wherein F is the thrust between the adjusting rod and the large disc part, E is the Young's modulus of steel, Is the spherical radius of the adjusting rod.
Adjusting lever angle pair Ji Piancha(Abbe error)
Example 2
The embodiment of the application provides a specific implementation manner of the centering deviation adjusting assembly 4, and the centering deviation adjusting assembly 4 is suitable for the centering deviation adjusting method in the embodiment 1, as shown in fig. 2,3 and 4, and the centering deviation adjusting assembly 4 comprises a fixed seat 43, an adjusting rod 41, a shaft sleeve 42 and a screw 44; wherein the fixed seat 43 is fixedly arranged on the machine tool seat 3; the adjusting rod 41, the shaft sleeve 42 and the screw 44 are arranged in the fixed seat 43, the adjusting rod 41 is a threaded rod, the adjusting rod 41 and the shaft sleeve 42 are matched to form a rough adjusting structure, and the rotating shaft sleeve 42 can drive the adjusting rod 41 to move along the axial direction; screw 44 and axle sleeve 42 screw-thread fit, screw 44 and axle sleeve 42 constitute the fine setting structure, and rotatory screw 44 can drive axle sleeve 42 along axial displacement. The centering operation is carried out on the large disc part 2 through the adjusting component 4, so that errors caused by uncontrollable force and direction of hammering the large disc part 2 are avoided, and the adjusting precision and the adjusting efficiency are improved.
The adjusting component 4 is provided with a coarse adjusting structure and a fine adjusting structure respectively, can select corresponding structures according to the offset, ensures the adjusting precision of skills, and can be adjusted rapidly.
In this embodiment, the machine tool further comprises a magnetic connecting piece 5, the fixing seat 43 is detachably mounted on the machine tool seat 3 through the magnetic connecting piece 5, and the fixing seat 43 is connected with the magnetic connecting piece 5 through a fastener. Adopt magnetic connection spare 5 to fix, the installation of the regulation subassembly 4 of being convenient for can not destroy base lathe saddle 3 to magnetic connection spare 5 can dismantle, can select different magnetic connection spare 5 according to the big dish part 2 of equidimension, promotes the use universality of regulation subassembly 4.
Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.

Claims (13)

1. A centering deviation adjusting method is characterized in that the center of a circle of a large disc partIs arranged corresponding to the circle center of the main shaft of the machine tool;
the centering deviation adjusting method is used for adjusting the centering of the large disc part and the machine tool spindle, and comprises the following steps:
Acquiring measured values of any three points A, B and C on the circumferential edge of the large disc part in the relative rotation process of the large disc part and a machine tool spindle;
taking the measured value of the point A as a reference value, and judging whether the difference value between the measured values of the two points B, C and the measured value of the point A is not larger than a deviation threshold value;
if the difference value between the measured value of one of the two B, C points and the measured value of the point A is larger than the deviation threshold value, connecting the point A with the other point to form a perpendicular bisector, wherein the intersection point of the perpendicular bisector and the circumferential edge of the large disc part is a position adjustment point D;
If the difference value between the measured values of B, C and the measured value of A is larger than the deviation threshold, respectively making perpendicular bisectors on the connection lines AB, AC and BC, wherein the intersection point of the three perpendicular bisectors is the circle center of the large disc part Connect the circle center/>And the axle center of the machine tool spindle/>,/>The intersection point of the extension line of the connecting line and the circumferential edge of the large disc part is a position adjustment point D;
applying a force to the position adjustment point D of the large disc part toward the shaft center Thrust in the direction to regulate/>Distance of
2. The misalignment adjustment method according to claim 1, wherein the misalignment adjustment point D of the large disc component is applied toward the axisThrust in the direction to regulate/>Before the distance, further comprising: calculation/>Distance/>
3. The misalignment adjustment method according to claim 2, wherein the calculationDistance/>Comprising the following steps:
Connection And/>Measuring said/>And said/>Included angle of two connecting lines/>Then/>Distance/>Expressed as:
Wherein R is the radius of the large disc part.
4. The misalignment adjustment method according to claim 2, wherein the calculationDistance/>Comprising the following steps:
Measuring straight line distance between BD ,/>,/>,/>Said/>Distance/>Obtained by the following equation:
wherein R is the radius of the large disc part, For the measurement of point B on the large disc part,/>Take a positive value.
5. A method of adjusting misalignment as claimed in claim 3, wherein the alignmentDistance/>Is differentiated by a mathematical model of (2) to obtain said/>Distance/>Absolute deviation/>Said absolute deviation/>The calculation formula of (2) is as follows:
Wherein, Is the radius error of the large disc part.
6. The misalignment adjustment method according to claim 5, further comprising:
Obtaining the deviation of the circle center position Radius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine tools
Using at least the centre position deviationRadius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine toolsCalculating the absolute deviation/>
Determining the absolute deviationWhether an absolute deviation threshold is exceeded;
If the absolute deviation is If the absolute deviation threshold is exceeded, the circle center position deviation/>, is adjustedRelated factors of (1) radius error of large disc parts/>Related factors, angular error/>Uncertainty/>, caused by the related factors of the machine tool and flatness errorsTo reduce the absolute deviation/>
7. The centering deviation adjusting method as claimed in claim 6, wherein the center position deviation is obtainedRadius error of large disc part/>Angle error/>Uncertainty/>, caused by flatness errors of machine toolsComprising the following steps:
calculating the center position deviation by using the following method
Wherein,Is the straight line position deviation of the perpendicular bisector,/>Is the angular deviation;
and/or the number of the groups of groups,
Radius error of the large disc partThe diameter of the large disc part can be obtained through repeated measurement for a plurality of times;
and/or calculating uncertainty due to the flatness error by
Wherein, the flatness error of the machine tool is set to be 1 degree.
8. The misalignment adjustment method according to any one of claims 1-7, wherein an adjustment assembly is used to apply force to the position adjustment point D of the large disc part toward the hubThrust in the direction to regulate/>Distance/>
The adjusting assembly comprises a fixed seat, an adjusting rod, a shaft sleeve and a screw; the fixed seat is fixedly arranged on a machine tool seat; the adjusting rod, the shaft sleeve and the screw are arranged in the fixing seat, the adjusting rod is a threaded rod and is matched with the shaft sleeve to form a rough adjusting structure, and the shaft sleeve can be rotated to drive the adjusting rod to axially move; the screw is in threaded fit with the shaft sleeve, the screw and the shaft sleeve form a fine adjustment structure, and the shaft sleeve can be driven to move along the axial direction by rotating the screw;
the use of an adjustment assembly to apply an orientation to the position adjustment point D of the large disc part toward the hub Thrust in the direction to regulate/>Distance/>Comprising the following steps:
according to the position adjusting point D, the adjusting component is fixedly arranged at a proper position of the machine tool seat, so that the adjusting rod faces the axle center The direction is abutted to the position adjusting point D;
adjusting the moving distance of the shaft sleeve To regulate/>Distance/>The shaft sleeve moving distance/>The mathematical model of (a) is:
Wherein, For the shaft sleeve moving distance,/>For the rotation angle, P is the pitch,/>Is the number of threads.
9. The centering deviation adjusting method as claimed in claim 8, wherein the sleeve is moved by a distanceDifferential is carried out on the mathematical model of (2) to obtain the displacement error/>, of the adjusting rodThe adjusting rod displacement error/>The calculation formula is as follows:
By using the displacement error of the adjusting rod Calculate absolute deviation/>
Determining the absolute deviationWhether an absolute deviation threshold is exceeded;
If the absolute deviation is If the absolute deviation threshold is exceeded, adjusting the displacement error/>, of the adjusting rodTo reduce the absolute deviation/>
10. The centering deviation adjusting method as claimed in claim 9, wherein the adjusting lever displacement errorRelated factors of (a) include adjustment lever rotation angle deviation/>Adjusting lever rotation pitch deviation/>Hertz contact deviation/>, of adjusting rod and large disc partAt least one of (a) and (b).
11. The centering deviation adjusting method as claimed in claim 1, wherein the step of obtaining the measured values of any three points A, B and C on the circumferential edge of the large disc part when the large disc part is rotated by the spindle of the machine tool comprises:
At the circumferential edge of the large disc part, three points A, B and C are selected at will;
The dial indicator is arranged at the point A, the machine tool spindle is driven to rotate, the machine tool spindle drives the dial indicator to rotate around the large disc part, and measured values of the dial indicator at the point A, B and the point C are read out respectively 、/>And/>
12. A misalignment adjustment assembly adapted for use in a misalignment adjustment method according to any one of claims 1-11; the centering deviation adjusting assembly comprises a fixed seat, an adjusting rod, a shaft sleeve and a screw;
the fixed seat is fixedly arranged on a machine tool seat;
The adjusting rod, the shaft sleeve and the screw are arranged in the fixing seat, the adjusting rod is a threaded rod and is matched with the shaft sleeve to form a rough adjusting structure, and the shaft sleeve can be rotated to drive the adjusting rod to axially move; the screw is in threaded fit with the shaft sleeve, the screw and the shaft sleeve form a fine adjustment structure, and the shaft sleeve can be driven to axially move by rotating the screw.
13. The misalignment adjustment assembly of claim 12 further comprising a magnetic connector by which the holder is removably mounted to the machine tool base; the fixing seat is connected with the magnetic connecting piece through a fastener.
CN202410437304.8A 2024-04-12 2024-04-12 Centering deviation adjusting method and centering deviation adjusting assembly Active CN118039544B (en)

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