CN118032698A - Fourier transform spectrometer based on graphene photoelectric spectrum and measuring and preparing method thereof - Google Patents
Fourier transform spectrometer based on graphene photoelectric spectrum and measuring and preparing method thereof Download PDFInfo
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Abstract
The invention relates to the technical field of spectrum measurement, in particular to a Fourier transform spectrometer based on graphene photoelectric spectrum and a measurement and preparation method thereof, and aims to realize efficient, rapid and accurate broadband spectrum measurement in situ. The spectrometer fully utilizes the broadband absorption characteristic and the quick response capability of graphene, adopts an integrated graphene photoelectric detection system, and realizes the simplification of a system structure by optimizing the layout of a sample to be detected and the graphene photoelectric detector. According to the system, the sample to be detected is placed above the graphene detector, and the light current is excited in the graphene detector after the sample to be detected is transmitted by the broad spectrum light, so that the spectrum data can be extracted efficiently, rapidly and accurately. The invention has the advantages of simplifying the system structure and optimizing the distance between the sample and the detector, remarkably improving the signal to noise ratio, realizing high-efficiency, rapid and accurate in-situ spectrum detection and representing a great progress in the technical field of Fourier transform spectrometers.
Description
Technical Field
The invention relates to the technical field of spectrum measurement, in particular to a Fourier transform spectrometer based on graphene photoelectric spectrum, and a measurement method and a preparation method thereof.
Background
Infrared spectroscopy is widely used in the fields of chemistry, biology, material science, etc., and is a key technology in spectroscopic measurement. The technology can provide important information about the structure, the components and the like of the sample, and has the remarkable advantages of simplicity in sample preparation, high sensitivity, nondestructive detection and the like. In infrared spectroscopy, internal vibrations of crystal lattices, molecules, functional groups, etc. (including modes of stretching, bending, torsion, etc.) can selectively absorb photons of specific energy in the infrared band, thereby forming a unique infrared spectrum. By measuring and analyzing the absorption bands and peaks of the spectra, chemical bonds, functional groups and molecular environments in the sample can be identified, and qualitative and quantitative analysis of the structure and components of the sample can be realized. Thus, infrared spectroscopy is often regarded as a "fingerprint" of a sample, playing an irreplaceable role in sample analysis.
Fourier transform infrared spectroscopy (FTIR) is a key device to perform such analysis, but has some limitations in its application. Firstly, the complicated light path design leads to light loss and signal to noise ratio reduction, and influences measurement accuracy; secondly, a photoelectric detector used in the Fourier transform spectrometer is sensitive to the environment and is easily influenced by environmental factors such as temperature, humidity and the like, so that the measurement precision and stability are reduced; thirdly, the detector of the fourier transform spectrometer generally has the problems of low response speed, low conversion efficiency, narrow spectral response range and the like. The above difficulties limit the application of fourier transform infrared spectrometers in the field of low signal intensity high precision infrared spectrometry.
Chinese patent CN116148203a discloses a fourier transform photoluminescence spectrometer, which uses laser to excite a sample to be measured to generate a photoluminescence spectrum, then performs spectral spectroscopy and interference by a michelson interferometer, and finally transmits an interference beam to a detector for signal detection. The core principle of the method still belongs to the excitation, interference, collection and detection modes of the traditional Fourier transform spectrometer. In the mode, the signal light transmission distance is overlong and is easily influenced by environmental interference, so that the signal to noise ratio is reduced; meanwhile, signal light excitation, collection and detection separation lead to complex equipment structure.
Disclosure of Invention
The invention aims to overcome the difficulties of more external interference, low response speed, low conversion efficiency, narrow spectral response range and the like faced by the existing Fourier transform spectrometer measurement technology, and provides a practical novel in-situ broadband spectrum measurement technology based on a graphene photoelectric spectrum and a Fourier transform principle. To achieve the object, the present invention adopts the following technical scheme:
As a first aspect of the present invention, there is provided a graphene-photoelectric-spectrum-based fourier transform spectrometer for measuring a spectrum of an unknown material to be measured, the spectrometer comprising: graphene photoelectric detection system, measurement system and data processing system, the material that awaits measuring set up on graphene photoelectric detection system, measurement system includes light source, test light path and signal extraction device, wherein:
The graphene photoelectric detection system comprises a graphene photoelectric detection device;
The test light path is used for modulating incident light from the light source to form continuously changed interference light, and the interference light excites the graphene photoelectric detection device to generate photocurrent;
the signal extraction device is used for collecting a photocurrent interference pattern generated in the graphene photoelectric detection device;
And the data processing system is used for calculating spectral information of the material to be measured based on the obtained photocurrent interference spectrum.
As a second aspect of the present invention, there is provided a spectrum measurement method of a fourier transform spectrometer based on graphene photoelectric spectrum, the method adopting the fourier transform spectrometer based on graphene photoelectric spectrum as described above to perform spectrum measurement, comprising the specific steps of:
modulating incident light from a light source by using an optical modulator, and adjusting the optical path difference between light beams by using a Michelson interferometer moving mirror to form interference light;
Irradiating modulated interference light on a graphene photoelectric detection device, and collecting a reference photocurrent interference spectrum of the graphene photoelectric detection device on a broadband light source;
placing a material to be tested on a graphene photoelectric detection device, and recording a test photocurrent interference pattern generated by the graphene photoelectric detection device after modulated interference light is transmitted through the material to be tested;
performing Fourier transform on the reference photocurrent interference pattern and the reference photocurrent interference pattern to obtain a reference photoelectric spectrum of the graphene photoelectric detection device and a test photoelectric spectrum after the material to be tested is placed;
And combining the reference photoelectric spectrum and the test photoelectric spectrum before and after the material to be measured is placed, so as to obtain the transmission spectrum and the absorption spectrum of the material to be measured.
As a third aspect of the present invention, there is provided a method for preparing a fourier transform spectrometer based on graphene photoelectric spectrum as described above, comprising the steps of:
Preparing graphene on a substrate material;
Preparing an extraction electrode for graphene and arranging an electrode lead, wherein the electrode comprises a source electrode and a drain electrode; packaging the graphene, the source electrode and the drain electrode by using a dielectric isolation layer;
The Michelson interferometer comprising a displacement table, a spectroscope, a movable mirror and a fixed mirror is built, and the movable mirror is carried on the displacement table;
The broadband light source, the optical modulator, the Michelson interferometer, the graphene photoelectric detector and the lock-in amplifier are sequentially connected, and the displacement table is used for adjusting the position of the movable mirror to change the optical path difference between the light beams so as to generate interference light.
Compared with the prior art, the invention has the following beneficial effects:
1) In-situ detection of an ultrathin sample: according to the Fourier transform spectrometer based on the graphene photoelectric spectrum, the photoelectric spectrum of graphene is utilized, the layout of a sample to be measured and a graphene photoelectric detector is optimized, the simplification of a system structure is realized, signal light does not need to be transmitted in space, and the absorption spectrum of the sample can be measured by placing a material to be measured near the graphene. Compared with the prior art, the method realizes in-situ detection of the absorption spectrum of the ultrathin sample, greatly reduces the influence of environmental factors, and thus, the signal-to-noise ratio of spectrum measurement is remarkably improved.
2) Broadband spectral measurement: the graphene adopted by the invention has the characteristic of high-speed uniform response of broadband spectrum, so that the instrument can measure any unknown spectrum in a broadband range without replacing a photoelectric detector, thereby improving the convenience and efficiency of measurement.
3) Simplifying the system structure: the Michelson interferometer part adopts the high-precision nanoscale piezoelectric displacement platform to control the position of the movable mirror, so that the accurate displacement of the movable mirror can be realized, reference beams required in the traditional Fourier transform spectrometer are eliminated, the design structure of equipment is simplified, and the reliability of the equipment is improved.
4) High signal-to-noise ratio data acquisition: the invention uses the data acquisition mode of combining the optical modulator, the pre-amplifier and the phase-locked amplifier, and the pre-amplifier and the phase-locked amplifier demodulate the real photocurrent signal when the optical modulator modulates the incident light, thereby improving the signal to noise ratio of the system under multiple tubes.
Drawings
FIG. 1 is a schematic diagram of a Fourier transform spectrometer system with a graphene device as a core;
FIG. 2 is a graph of an infrared spectrum measured in one embodiment of the present invention; a) A graphene photocurrent spectrogram, b) an infrared spectrum after Fourier transform;
FIG. 3 is a schematic diagram of the operation of the integrated graphene photodetector system of the present invention;
The reference numerals in the figures indicate: 1.2 parts of graphene, 3 parts of substrate material, 3 parts of source electrode, 4 parts of drain electrode, 5 parts of material to be tested, 6 parts of nano-scale piezoelectric displacement platform, 7 parts of dielectric isolation layer
Detailed Description
The invention will now be described in detail with reference to the drawings and specific examples. The present embodiment is implemented on the premise of the technical scheme of the present invention, and a detailed implementation manner and a specific operation process are given, but the protection scope of the present invention is not limited to the following examples.
Example 1
In order to solve the problems of the existing Fourier transform spectrometer, the invention provides a novel in-situ broadband spectrum measurement spectrometer based on a graphene photoelectric spectrum and a Fourier transform principle, and a measurement method and a preparation method thereof.
The technical problem faced by the Fourier transform spectrometer can be effectively solved by the characteristics of the graphene photoelectric spectrum technology. Firstly, graphene has uniform and wide spectral response characteristics spanning from visible light to far infrared band, and has the advantage of wide spectral response range; secondly, the graphene carrier has high mobility characteristic, has higher-speed photocurrent response compared with the traditional detector, and has the advantages of high response speed, high conversion efficiency and the like; thirdly, the two-dimensional structure of the graphene leads to that the graphene is easier to couple with various materials to be measured for spectrum measurement than the traditional bulk material. The characteristics enable the photoelectric spectrum technology based on the graphene to have great application potential in a Fourier transform spectrometer, and the efficiency, the speed and the signal-to-noise ratio of optical signal acquisition can be greatly improved by taking the graphene as a photoelectric current detection material, and the accuracy and the stability of measurement are improved. However, the sensitivity of the existing graphene photoelectric device in the aspect of low-signal-intensity infrared spectrum measurement is poor, the signal-to-noise ratio of the system is still to be further improved, and the service life of the detector with a complex instrument structure is short. The invention provides a Fourier transform spectrometer based on a graphene photoelectric device, which utilizes the effect of generating photocurrent under the action of broadband light excitation and bias voltage of graphene to realize broadband, efficient and high-speed detection from visible light to far infrared light. Meanwhile, the Michelson interferometer is adopted to modulate light, and continuously changed interference light is formed along with the change of the optical path difference of the two beams of light, so that a photocurrent interference pattern is formed. Further, a material to be measured is placed on the packaged graphene device, so that the spectral distribution of the material incident to the graphene photoelectric device is changed, and the photocurrent interference pattern in the graphene photoelectric device is influenced. And comparing the reference photoelectric spectrum with the test photoelectric spectrum to obtain the absorption spectrum of the material to be tested. Therefore, the invention realizes in-situ, high-precision, high signal-to-noise ratio and broadband detection of the absorption spectrum of the material to be detected.
The method of the invention is based on the following physical principles: graphene has response capability to light in the wavelength bands from visible light to far infrared and the like, and the absorptivity of the graphene is approximately the same in each wavelength band, so that the graphene becomes a full spectrum detector. When graphene absorbs photons, electrons in the valence band thereof will jump to the conduction band, and a loop is formed under the action of the source electrode 3, the drain electrode 4 and the built-in electric field, and photocurrent is generated. After the material 5 to be measured is placed, the influence of the material 5 to be measured causes the light absorption of the graphene 1 to be changed in different wavebands, and further causes the change of the photocurrent intensity, as shown in fig. 3. The light is modulated by using a Michelson interferometer, and the photocurrent of the graphene 1 is excited, so that the change can be reflected on a photoelectric spectrum, and further, the change conditions of absorption rates of different wave bands are obtained, thereby realizing in-situ measurement of the absorption spectrum of the material 5 to be measured.
As a first aspect of the present invention, in this embodiment, there is provided a composition structure of a fourier transform spectrometer based on graphene photoelectric spectrum, including the following aspects:
Specifically, as shown in fig. 1, the integrated graphene photoelectric detection system, the light source, the optical modulator, the michelson interferometer and the measurement circuit are included, as shown in fig. 1. The integrated graphene photoelectric detection system comprises graphene 1, a substrate material 2, a source electrode 3, a drain electrode 4, a dielectric isolation layer 7 and a material to be detected 5. The graphene 1 is arranged on one side of the substrate material 2, the dielectric isolation layer 7 is used for packaging the graphene 1, the source electrode 3 and the drain electrode 4 are used for protecting devices, the repeated use of the graphene photoelectric detection device is realized, and the interference light modulated by the optical modulator and the Michelson interferometer excites photocurrent of a coupling structure of the graphene 1 and the material 5 to be tested. The optical modulator and the Michelson interferometer are used for modulating interference light and changing the optical path difference of two beams of light, and the measuring circuit realizes accurate reading of graphene photocurrent by combining a transimpedance amplifier and a phase-locked amplifier based on the modulation of the optical modulator. Fig. 1 shows in detail the constitution of the fourier transform spectrometer and the interactions between the components of the parts.
In the integrated graphene photodetection system described above, electrode materials used for the source electrode 3 and the drain electrode 4 include, but are not limited to, gold and the like. Wherein the substrate material 2 includes, but is not limited to, silicon oxide, boron nitride, etc., and the graphene 1 sample includes, but is not limited to, graphene of various configurations such as single-layer graphene. A dielectric isolation layer 7 is positioned on the graphene 1, the source electrode 3 and the drain electrode 4, and a material 5 to be measured is placed on the dielectric isolation layer.
According to the scheme, the material to be detected is directly coupled to the graphene device, and the graphene device is used as a detector. After the excitation light is subjected to spectrum light splitting and interference by the Michelson interferometer, the excitation light directly acts on the coupling structure of the material to be detected and the graphene device, so that the integration of excitation, collection and detection and the in-situ detection of the spectrum of the material to be detected are realized. The design not only simplifies the equipment structure, but also reduces the distance of signal light in space propagation, and effectively reduces environmental interference, thereby improving the signal-to-noise ratio and greatly improving the performance and reliability of the instrument.
Based on the photocurrent interference pattern, the invention also provides an independently developed data processing system, and the collected photocurrent interference pattern is subjected to Fourier transformation to obtain a photoelectric spectrum; the change amounts of the graphene photoelectric detection systems before and after the material to be detected 5 is placed are analyzed by comparing the photoelectric spectrums of the graphene photoelectric detection systems, so that the absorption spectrum of the material to be detected 5 is calculated. Further, after the graphene photoelectric device is calibrated by utilizing the data processing system, accurate measurement of any unknown spectrum can be realized.
As a second aspect of the present invention, in this embodiment, there is also provided a method of measuring using the fourier transform spectrometer based on graphene photoelectric spectrum as described above, comprising the steps of:
the optical modulator is used for modulating the incident light from the light source, and the Michelson interferometer is used for adjusting the optical path difference between the two beams of light to form interference light.
The modulated interference light is irradiated on the graphene 1. When graphene 1 absorbs photons, electrons therein may transition from a valence band to a conduction band, generating photocurrent. The change of the moving mirror position can cause the broadband interference light spectrum to change, so as to change the photocurrent intensity of the graphene 1, and form a photocurrent interference spectrum, as shown in fig. 2. By performing fourier transform on the photoelectric interference pattern, a photoelectric spectrum of graphene can be obtained.
After the incident light is modulated by the optical modulator, only the photocurrent signal matching the frequency of the optical modulator is considered as the true signal. These signals are amplified, demodulated and collected by a transimpedance amplifier and a lock-in amplifier to exclude the effects of environmental factors and circuit noise.
The material 5 to be measured is placed on the integrated graphene photoelectric detection system, and the incident light is absorbed when passing through the material to be measured, as shown in fig. 3.A, so that the photocurrent generated by the graphene 1 is changed. By measuring the photocurrent interferogram after placement of the material 5 to be measured, as shown in fig. 3.b, and performing fourier transform, a photoelectric spectrum can be obtained, as shown in fig. 3.c. By combining the photoelectric spectrum of the graphene 1 and the photoelectric spectrum of the material 5 to be measured after being placed, the transmission spectrum and the absorption spectrum of the material 5 to be measured can be calculated, as shown in fig. 3. D-e.
Further, after calibration of the graphene photoelectric device, the invention can realize accurate measurement of any unknown spectrum:
When the device is used for the first time, the integrated graphene photoelectric detection system which is not placed with a sample to be measured is directly excited by using the interference light modulated by the optical modulator, and a photocurrent interference spectrum is collected as a calibration reference. And carrying out Fourier transform on the interference spectrum and comparing the interference spectrum with an incident light spectrum to obtain a reference photoelectric spectrum of the integrated graphene photoelectric detection system.
In the subsequent normal use, a sample to be measured is transferred to the upper part of the dielectric isolation layer by using a sample transfer technology after the sample to be measured is prepared according to the requirement, and after the interference light is modulated to transmit the sample to be measured, the photocurrent of the integrated graphene photoelectric detection system is excited, and a test photocurrent interference pattern is acquired. And carrying out Fourier transform on the interference patterns to obtain a photoelectric spectrum after the sample to be measured is placed. After the test is completed, the sample to be tested is removed by using a sample transfer technology, and the surface of the dielectric isolation layer is cleaned for subsequent use.
In this method, the resolution of the spectrum is determined by the range of motion of the moving mirror in the michelson interferometer. The larger the moving mirror movement range is, the higher the resolution of the absorption spectrum obtained by the photoelectric spectrum is. The measurement range of the spectrum is affected by the signal acquisition step size.
As a third aspect of the present invention, there is further provided a preparation technology of the above-mentioned fourier transform spectrometer based on graphene photoelectric spectrum, including the steps of:
Preparing graphene: graphene 1 samples are prepared on a substrate material 2, and the preparation method can comprise mechanical stripping, chemical vapor deposition, two-dimensional material transfer and the like. The substrate material 2 may be selected from silicon oxide, boron nitride, and the like. Preparing a graphene photoelectric device: the source electrode 3 and the drain electrode 4 are prepared on the graphene 1 sample and the substrate material 2 by using technologies including but not limited to evaporation and the like; preparing extraction electrodes on two sides of the graphene 1, extracting by using metal wires as electrode leads, wherein the electrodes can be made of conductive materials such as gold, and the metal wires are used as the electrode leads; the device is encapsulated after fabrication using dielectric isolation layer 7. The means for fabrication of dielectric isolation layer 7 include, but are not limited to, thermal evaporation dielectrics such as aluminum oxide and transfer layered dielectrics such as hexagonal boron nitride.
Building a Michelson interferometer: comprises a high-precision nanoscale piezoelectric displacement table 6, a broadband spectroscope, a movable mirror and a fixed mirror. The Michelson interferometer has the function of dividing incident light into two beams by a spectroscope, and then converging the two beams again by reflection of a movable mirror and a fixed mirror to generate interference light. The high-precision nanoscale piezoelectric displacement table 6 is used for adjusting the position of the movable mirror, so that the optical path difference of two beams of light is changed.
Connect integrated graphite alkene photoelectric detection system and measuring device: according to the wiring mode in fig. 1, the integrated graphene photoelectric detection system is connected with a michelson interferometer and a measurement circuit. The michelson interferometer is used to provide interference light and excite photocurrent of the graphene device by changing the optical path difference.
Using an optical modulator and a lock-in amplifier: the optical modulator is used for modulating incident light, and the measuring circuit extracts source-drain current of the graphene device in real time based on a reference signal output by the optical modulator through the transimpedance amplifier and the phase-locked amplifier.
The foregoing describes in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the invention by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.
Claims (10)
1. A fourier transform spectrometer based on graphene photoelectric spectroscopy for measuring the spectrum of an unknown material (5) to be measured, characterized in that it comprises: graphene photoelectric detection system, measurement system and data processing system, material (5) to be measured set up on graphene photoelectric detection system, measurement system includes light source, test light path and signal extraction device, wherein:
The graphene photoelectric detection system comprises a graphene photoelectric detection device;
The test light path is used for modulating incident light from the light source to form continuously changed interference light, and the interference light excites the graphene photoelectric detection device to generate photocurrent;
the signal extraction device is used for collecting a photocurrent interference pattern generated in the graphene photoelectric detection device;
The data processing system calculates spectral information of the material (5) to be measured based on the obtained photocurrent interference pattern.
2. The fourier transform spectrometer based on graphene photoelectric spectroscopy according to claim 1, wherein the graphene photoelectric detection device comprises graphene (1), a substrate material (2), a source (3), a drain (4);
the graphene (1) is arranged on one side of the substrate material (2) and is used for receiving interference light generated by a test light path and inducing photocurrent;
The source electrode (3) and the drain electrode (4) are arranged on the graphene (1) and the substrate material (2) and are used for applying bias voltage and extracting photocurrent.
3. The fourier transform spectrometer based on graphene photoelectric spectrum according to claim 2, wherein the graphene photoelectric detection device further comprises a dielectric isolation layer (7), and the dielectric isolation layer (7) and the graphene (1) are arranged on one side of the substrate material (2) and used for packaging the graphene (1), the source electrode (3) and the drain electrode (4).
4. The graphene-based optical-electrical-fluidic-spectrum fourier transform spectrometer of claim 1, wherein the light source employs a broadband light source for generating and providing broadband light.
5. The fourier transform spectrometer based on graphene photoelectric spectrum according to claim 1, wherein the test optical path comprises a michelson interferometer, the michelson interferometer comprises a broadband beam splitting plate, a fixed mirror, a moving mirror and a displacement table (6), the moving mirror is mounted on the displacement table (6), and the test optical path adjusts the position of the moving mirror through the displacement table (6) so as to change the interference light spectrum.
6. The graphene-based photoelectric spectrum fourier transform spectrometer of claim 1, wherein the signal extraction device comprises an optical modulator and a phase-locked amplifier for extracting a photocurrent signal;
the optical modulator is used for periodically modulating the incident light from the light source;
the phase-locked amplifier is used for demodulating and collecting photocurrent signals matched with the frequency of the optical modulator.
7. A method for measuring a spectrum of a fourier transform spectrometer based on graphene photoelectric spectrum, wherein the method uses the fourier transform spectrometer based on graphene photoelectric spectrum according to any one of claims 1 to 6 to measure a spectrum, and the method comprises the following specific steps:
modulating incident light from a light source by using an optical modulator, and adjusting the optical path difference between light beams by using a Michelson interferometer moving mirror to form interference light;
Irradiating modulated interference light on a graphene photoelectric detection device, and collecting a reference photocurrent interference spectrum of the graphene photoelectric detection device on a broadband light source;
Placing a material to be tested (5) on a graphene photoelectric detection device, and recording a test photocurrent interference pattern generated by the graphene photoelectric detection device after modulated interference light transmits the material to be tested (5);
Performing Fourier transform on the reference photocurrent interference pattern and the test photocurrent interference pattern to obtain a reference photoelectric spectrum of the graphene photoelectric detection device and a test photoelectric spectrum after the material (5) to be detected is placed;
and combining the reference photoelectric spectrum and the test photoelectric spectrum before and after the material (5) to be tested is placed, so as to obtain the transmission spectrum and the absorption spectrum of the material (5) to be tested.
8. The method for measuring the spectrum of the Fourier transform spectrometer based on the graphene photoelectric spectrum according to claim 7, wherein the measuring method applies an optical modulator to periodically modulate the incident light of the light source and utilizes a lock-in amplifier to extract a photoelectric current signal matched with the frequency of the optical modulator.
9. The spectrum measurement method of a fourier transform spectrometer based on graphene photoelectric spectrum according to claim 7, wherein the method performs calibration on a graphene photoelectric detection device, and the calibrated graphene photoelectric detection device can measure spectrum information of any unknown optical signal, and the specific calibration step includes:
directly exciting a graphene photoelectric detection device without a material (5) to be detected by using interference light, and collecting a photocurrent interference pattern as a calibration reference;
And carrying out Fourier transform on the collected calibration reference photocurrent interference spectrum and comparing the Fourier transform with an incident light spectrum to obtain a reference photocurrent spectrum of the graphene photoelectric detection device.
10. A method of preparing a graphene-based optical spectrum fourier transform spectrometer as recited in any one of claims 1-6, comprising the steps of:
preparing graphene (1) on a substrate material (2);
Preparing an extraction electrode for graphene (1) and arranging an electrode lead, wherein the electrode comprises a source electrode (3) and a drain electrode (4); packaging the graphene (1), the source electrode (3) and the drain electrode (4) by using a dielectric isolation layer (7);
The Michelson interferometer comprising a displacement table (6), a spectroscope, a moving mirror and a fixed mirror is built, and the moving mirror is carried on the displacement table (6);
The broadband light source, the optical modulator, the Michelson interferometer and the graphene photoelectric detector are sequentially connected with the lock-in amplifier, and the displacement table (6) is used for adjusting the position of the movable mirror to change the optical path difference between the light beams so as to generate interference light.
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