CN118010570A - Four-solenoid-coil oil multi-pollutant detection sensor and manufacturing method thereof - Google Patents
Four-solenoid-coil oil multi-pollutant detection sensor and manufacturing method thereof Download PDFInfo
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052802 copper Inorganic materials 0.000 claims description 20
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- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 14
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Abstract
The invention provides an oil multi-pollutant detection sensor with four solenoid coils and a manufacturing method thereof. The sensor of the present invention comprises: the chip comprises a chip main body and a sensing unit, wherein a detection micro-channel is arranged in the chip main body, and oil sample inlets and outlets are arranged at two ends of the detection micro-channel; the sensing unit comprises four solenoid coil sensors and an excitation-detection unit, wherein the four solenoid coil sensors comprise two excitation coils symmetrically wound on the detection micro-channel; the excitation-detection unit includes two induction coils symmetrically wound around the outside of the two excitation coils for electromagnetic coupling with the four-solenoid coil sensor to acquire information of the four-solenoid coil sensor and transmit energy thereto. According to the invention, voltage detection and capacitance detection are combined, the material of particles is judged according to the shape and amplitude of the signal, the detection sensitivity of the multi-parameter oil detection sensor is enhanced, and wireless detection of metal abrasive particles, water drops and bubbles in an oil pipeline can be realized through a switching mode.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to an oil multi-pollutant detection sensor with four solenoid coils and a manufacturing method thereof.
Background
The detection and analysis of wear particles in oil is a very important task in the industrial field, mainly related to the operation and maintenance of mechanical equipment and lubrication systems. It is counted that 80% of the engine failures are caused by solid abrasive particles. The existence of abrasive particles is an indication of the breakage of a mechanical component, and abnormal wear of a mechanical system can be timely found by detecting and monitoring wear particles in oil liquid, so that potential mechanical faults are predicted. By adopting corresponding maintenance measures on the basis of abrasion particle detection, the service life of the equipment can be effectively prolonged, and the reliability of the equipment can be improved. Meanwhile, abrasion particles in the oil liquid are detected regularly, a reasonable maintenance plan can be implemented, and lubricating oil and filtering equipment can be replaced in a targeted manner, so that maintenance cost is reduced.
The current oil detection technology has a plurality of technical means, and common means in the industrial field include ultrasonic detection technology, optical detection technology, energy detection technology, inductance detection and the like. Most of the embodiments do not realize integration, only can detect single pollutants, or can actively detect oil, and cannot be used under partial working conditions; some sensors can only roughly distinguish between ferromagnetic particles and non-ferromagnetic particles, and cannot finely distinguish the types of abrasive particles.
Disclosure of Invention
According to the technical problem, the oil multi-pollutant detection sensor with four solenoid coils is provided. The sensor provided by the invention realizes the integration of the voltage-capacitance sensor and the wireless extraction of data, has more signal characteristics, and can realize the output characteristic analysis of abrasive particles made of different materials when passing through the sensor, thereby realizing the purpose of wireless detection of abrasive particles in oil, and greatly improving the instantaneity and convenience of the sensor.
The invention adopts the following technical means:
an oil multi-contaminant detection sensor for a four solenoid coil, comprising: chip main part and sensing unit, wherein:
the chip main body is arranged above the glass substrate, a detection micro-channel is arranged in the chip main body, two openings are respectively formed at two ends of the detection micro-channel and are respectively used as an oil sample inlet and an oil sample outlet;
the sensing unit comprises four solenoid coil oil multi-pollutant detection sensors and an excitation-detection unit, wherein:
The four-solenoid coil oil multi-pollutant detection sensor comprises a first excitation coil and a second excitation coil which are symmetrically wound on the detection micro-channel;
The excitation-detection unit comprises a first induction coil and a second induction coil which are symmetrically wound outside the first excitation coil and the second excitation coil.
Further, the first induction coil and the second induction coil are used for being electromagnetically coupled with the four-solenoid-coil oil multi-pollutant detection sensor, acquiring information of the four-solenoid-coil oil multi-pollutant detection sensor, and transmitting energy to the four-solenoid-coil oil multi-pollutant detection sensor.
Further, the four solenoid coil oil multi-contaminant detection sensor includes a voltage detection mode and a capacitance detection mode, wherein:
In the voltage detection mode, the chip main body further comprises a voltage detection circuit and an alternating current power supply, wherein adjacent leads of the first exciting coil and the second exciting coil are connected and then connected with the voltage detection circuit; the same side lead wires of the first induction coil and the second induction coil are connected and then connected with an alternating current power supply;
in the capacitive detection mode, the chip main body further comprises an impedance analyzer, inner leads of the first induction coil and the second induction coil are not connected to form an equivalent capacitance, and outer leads of the first induction coil and the second induction coil are connected with the impedance analyzer.
Further, the first exciting coil and the second exciting coil are formed by winding copper wires with the wire diameter of 70 mu m, the number of turns of the coils is 200, and the inner diameters of the coils are 1mm.
Further, the first induction coil and the second induction coil are formed by winding copper wires with the wire diameter of 70 mu m, the number of turns of the coils is 200, and the inner diameters of the coils are 2mm.
Further, the two ends of the first exciting coil, the second exciting coil, the first induction coil and the second induction coil are connected with leads, the number of the leads is multiple, and the leads are arranged on one side of the chip main body.
The invention also provides a manufacturing method of the oil multi-pollutant detection sensor based on the four solenoid coils, which comprises the following steps:
S1, manufacturing a four-solenoid coil oil multi-pollutant detection sensor: a copper bar with the length of 7cm and the diameter of 1mm is used as a mould for manufacturing a micro-channel, the copper bar passes through inner holes of two solenoid coils and is tightly attached to the inner walls of the two solenoid coils, the concentricity of a first exciting coil and a second exciting coil is ensured, the distance between the first exciting coil and the second exciting coil is controlled to be 60 mu m, leads are arranged at two ends of the first exciting coil and the second exciting coil, and the mode is used to be switched;
s2, manufacturing an excitation-detection unit: the first induction coil and the second induction coil are fixed on a glass slide to ensure concentricity, and the manufactured four-solenoid coil oil multi-pollutant detection sensor passes through the first induction coil and the second induction coil and is fixed on a glass substrate to be arranged between the first induction coil and the second induction coil and ensure concentricity of the first induction coil and the second induction coil;
S3, mixing PDMS glue and a curing agent according to the proportion of 10:1, fully stirring the mixture by using a glass rod, and placing the obtained gel liquid into a vacuum drying oven for vacuum treatment for 40min; taking out the gel liquid after the vacuum treatment, standing until bubbles disappear, slowly pouring the gel liquid into a pouring die for molding, putting the molded sensor into a drying oven for curing treatment, wherein the temperature of the drying oven is set to 80 ℃ and the time is set to 90min;
S4, after the gel liquid is solidified, the copper rod is extracted to form a micro-channel with the diameter of 1mm, and an oil sample inlet and an oil sample outlet are processed.
Compared with the prior art, the invention has the following advantages:
1. according to the oil multi-pollutant detection sensor with the four solenoid coils, voltage detection and capacitance detection are combined, and metal pollutant abrasive particles, water drops and bubbles in an oil pipeline can be wirelessly detected through a switching mode;
2. According to the oil multi-pollutant detection sensor with the four solenoid coils, provided by the invention, the detection sensitivity of the multi-parameter oil detection sensor is enhanced on the premise that the integrity of a pipeline is not damaged and the components of the sensor are not required to be increased.
For the reasons, the invention can be widely popularized in the fields of sensors and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings may be obtained according to the drawings without inventive effort to a person skilled in the art.
FIG. 1 is a schematic diagram of a four solenoid coil oil multi-contaminant sensor according to the present invention.
FIG. 2 is a schematic diagram of a voltage detection mode of a four solenoid oil multi-contaminant detection sensor according to the present invention.
FIG. 3 is a schematic circuit diagram of the four solenoid coil oil multi-contaminant sensor of the present invention in voltage detection mode.
FIG. 4 is a schematic diagram of a capacitive sensing mode of a four solenoid oil multi-contaminant sensor according to the present invention.
FIG. 5 is a schematic circuit diagram of the four solenoid coil oil multi-contaminant sensor of the present invention in a capacitive sensing mode.
FIG. 6 is a block diagram of a four solenoid oil multi-contaminant detection sensor system in accordance with the present invention.
Fig. 7 is a graph of signals of iron particles at different excitation frequencies according to an embodiment of the present invention.
FIG. 8 is a graph showing comparison of detection signals of iron particles and copper particles according to an embodiment of the present invention
FIG. 9 is a graph showing the detection signals of iron particles with particle diameters of 70-510 μm according to the embodiment of the present invention.
FIG. 10 is a graph of the detection signal of 220-618 μm copper particles according to an embodiment of the present invention.
FIG. 11 is a graph of detection signals of 100-280 μm-diameter water droplets according to an embodiment of the present invention.
FIG. 12 is a graph of detection signals of bubbles with a particle size of 180-310 μm according to an embodiment of the present invention.
In the figure: 1. an oil sample inlet; 2. a first excitation coil; 3. detecting a micro-channel; 4. an oil sample outlet; 5. a first induction coil; 6. a chip main body; 7. a second excitation coil; 8. a second induction coil; 9. an impedance analyzer; 10. a microinjection pump; 11. a voltage detection circuit; 12. a LabVIEW data acquisition unit; 13. NI-DAQ; 14. a microscope; 15. an oil sample mixed with abrasive particles.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present invention. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be clear that the dimensions of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail, but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
In the description of the present invention, it should be understood that the azimuth or positional relationships indicated by the azimuth terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal", and "top, bottom", etc., are generally based on the azimuth or positional relationships shown in the drawings, merely to facilitate description of the present invention and simplify the description, and these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present invention: the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "upper surface on … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present invention.
As shown in fig. 1, the present invention provides an oil multi-contaminant detection sensor with four solenoid coils, comprising: chip body 6 and sensing unit, wherein:
The chip main body 6 is arranged above the glass substrate, a detection micro-channel 3 is arranged in the chip main body 6, two openings are respectively formed at two ends of the detection micro-channel 3 and are respectively used as an oil sample inlet 1 and an oil sample outlet 4;
the sensing unit comprises four solenoid coil oil multi-pollutant detection sensors and an excitation-detection unit, wherein:
The four-solenoid coil oil multi-pollutant detection sensor comprises a first exciting coil 2 and a second exciting coil 7 which are symmetrically wound on the detection micro-channel 3;
the excitation-detection unit comprises a first induction coil 5 and a second induction coil 8 symmetrically wound outside said first excitation coil 2 and second excitation coil 7.
In a specific implementation, as a preferred embodiment of the present invention, the first induction coil 5 and the second induction coil 8 are used for electromagnetic coupling with a four-solenoid oil multi-contaminant detection sensor, obtaining information of the four-solenoid oil multi-contaminant detection sensor, and transmitting energy to the four-solenoid oil multi-contaminant detection sensor. In this embodiment, the solution not only can enable the sensor to realize wireless detection, but also can further improve the sensitivity of the sensor.
In specific implementation, as a preferred embodiment of the present invention, the four solenoid coil oil multi-contaminant detection sensor includes a voltage detection mode and a capacitance detection mode, where:
In the voltage detection mode, the chip main body 6 further comprises a voltage detection circuit 11 and an alternating current power supply, and the adjacent leads of the first exciting coil 2 and the second exciting coil 7 are connected with the voltage detection circuit 11 after being connected; the same side lead wires of the first induction coil 5 and the second induction coil 8 are connected and then connected with an alternating current power supply;
In this embodiment, as shown in fig. 2, the four solenoid coil oil multi-pollutant detection sensor is disposed inside the oil pipeline, and in the voltage detection mode, the sensor can sense metal abrasive particles in the oil pipeline to be detected and generate voltage variation; the metal abrasive particles are pollutants; the four-solenoid-coil oil multi-pollutant detection sensor is placed close to the inner wall of the oil pipeline, and the sensor further comprises an oil pipeline for placing the four-solenoid-coil oil multi-pollutant detection sensor. In the voltage detection mode, the first induction coil is connected with the E, G terminal of the second induction coil, the first induction coil is connected with the F, H terminal of the second induction coil, and then leads are respectively connected with two ends of an alternating current power supply; the first exciting coil is connected with B, C terminals of the second exciting coil, and A, D terminals are respectively connected to two ends of the voltage detection circuit to collect voltage signal changes.
In the capacitive detection mode, the chip body further comprises an impedance analyzer 9, inner leads of the first induction coil 5 and the second induction coil 8 are not connected to form an equivalent capacitance, and outer leads of the first induction coil 5 and the second induction coil 8 are connected with the impedance analyzer 9.
In this embodiment, the four solenoid coil oil multi-pollutant detection sensor is disposed inside the oil pipeline, and in a capacitance detection mode, water drops and bubbles in the oil pipeline to be detected can be sensed, and capacitance changes can be generated. In the capacitive detection mode, A, D terminals of the first exciting coil 2 and the second exciting coil 7 are respectively connected to two ends of the impedance analyzer 9. The impedance analyzer 9 is connected to a computer provided with a LabVIEW data acquisition unit 12; the LabVIEW data acquisition unit 12 is a data acquisition and instrument control software that can control the application of excitation to the coil while acquiring its signal changes.
In specific implementation, as a preferred embodiment of the present invention, the first exciting coil 2 and the second exciting coil 7 are each wound by copper wires with a wire diameter of 70 μm, the number of turns of the coils is 200, and the inner diameters are both 1mm. The first induction coil 5 and the second induction coil 8 are formed by winding copper wires with the wire diameter of 70 mu m, the number of turns of the coils is 200, and the inner diameters of the coils are 2mm. In this embodiment, as shown in fig. 6, the first exciting coil and the second exciting coil 7 are not electrically connected with the first induction coil 5 and the second induction coil 8, and the exciting-detecting unit detects the signal change of the external readout coil, so as to realize wireless detection of the pollutant passing through the oil pipeline.
The invention also provides a manufacturing method of the oil multi-pollutant detection sensor based on the four solenoid coils, which comprises the following steps:
S1, manufacturing a four-solenoid coil oil multi-pollutant detection sensor: a copper bar with the length of 7cm and the diameter of 1mm is used as a mould for manufacturing a micro-channel, the copper bar passes through inner holes of two solenoid coils and is tightly attached to the inner walls of the two solenoid coils, the concentricity of a first exciting coil and a second exciting coil is ensured, the distance between the first exciting coil and the second exciting coil is controlled to be 60 mu m, leads are arranged at two ends of the first exciting coil and the second exciting coil, and the mode is used to be switched;
s2, manufacturing an excitation-detection unit: the first induction coil and the second induction coil are fixed on a glass slide to ensure concentricity, and the manufactured four-solenoid coil oil multi-pollutant detection sensor passes through the first induction coil and the second induction coil and is fixed on a glass substrate to be arranged between the first induction coil and the second induction coil and ensure concentricity of the first induction coil and the second induction coil;
S3, mixing PDMS glue (polydimethylsiloxane) and a curing agent according to the proportion of 10:1, fully stirring the mixture by using a glass rod, and placing the obtained gel liquid into a vacuum drying oven for vacuum treatment for 40min; taking out the gel liquid after the vacuum treatment, standing until bubbles disappear, slowly pouring the gel liquid into a pouring die for molding, putting the molded sensor into a drying oven for curing treatment, wherein the temperature of the drying oven is set to 80 ℃ and the time is set to 90min;
S4, after the gel liquid is solidified, the copper rod is extracted to form a micro-channel with the diameter of 1mm, and an oil sample inlet and an oil sample outlet are processed.
Example 1
As shown in fig. 7, a plot of the iron particle signal at different excitation frequencies according to the present invention is shown. The iron particles with the particle size of 350 mu m are selected to pass through the sensor, experiments are carried out under different excitation frequencies, and the signal amplitude is maximum at 1.5MHz, so that 1.5MHz is selected as the experimental excitation frequency.
Example 2
As shown in fig. 8, the sensor detection value curve is composed of six peaks, the second and fifth peaks are called main peaks, the first and sixth peaks are called secondary peaks, and the third and fourth peaks are called intermediate peaks. It can be seen that the signal curve trends of the iron particles and the copper particles are clearly compared.
Example 3
FIG. 9 shows a signal diagram of the detection of iron particles of 70-510 μm size according to the present invention. When the ferromagnetic particles pass through the detection area of the sensor, the signals are six-peak signals, and the signal directions from left to right are 'up-down-up-down', wherein the main peak value is firstly decreased and then increased, and the secondary peak value and the middle peak value are firstly increased and then decreased.
Example 4
FIG. 10 is a graph showing the detection signals of copper particles with the particle diameters of 220-618 μm according to the present invention; when copper particles pass through the sensor, the signal appears as six peak signals, the signal direction from left to right is 'down-up-down-up', wherein the main peak is first decreased and the secondary peak and the middle peak are first decreased and then increased.
Example 5
FIG. 11 is a graph showing the detection signals of water droplets having a particle size of 100 to 280. Mu.m, according to the present invention. Since the electric field lines are curved at both ends of the capacitor plate, there is a fringe effect of the capacitance. When water drops and air are mixed into the hydraulic oil, the mixed liquid has different dielectric constants, and different capacitance values are obtained according to the different dielectric constants. Wherein the dielectric constant of water is 80, the dielectric constant of oil is 2.6, and the dielectric constant of air is 1. When there is a drop of water in the oil, the dielectric constant of water is greater than that of oil, which causes the equivalent impedance of the sensor to decrease and the generated drop of water particle signals to be upward.
Example 6
As shown in FIG. 12, a graph of detection signals of bubbles having a particle size of 180 to 310 μm according to the present invention is shown. When bubbles flow through the sensor area, the dielectric constant of the bubbles is larger than that of the oil, so that the equivalent impedance of the sensor is increased, and a bubble particle signal is obtained downwards.
Because the internal induction coil of the sensor consists of two identical solenoid coils, when water drops and bubbles pass through, the sensor is in a capacitive detection mode, and a signal diagram acquired by the LabVIEW data acquisition unit 12 shows a 'single peak' image. By means of different signal characteristics, water droplets and bubbles can be clearly distinguished.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (7)
1. A four solenoid oil multi-contaminant detection sensor, comprising: chip main part (6) and sensing unit, wherein:
the chip main body (6) is arranged above the glass substrate, a detection micro-channel (3) is arranged in the chip main body (6), two openings are respectively formed at two ends of the detection micro-channel (3) and are respectively used as an oil sample inlet (1) and an oil sample outlet (4);
the sensing unit comprises four solenoid coil oil multi-pollutant detection sensors and an excitation-detection unit, wherein:
the four-solenoid coil oil multi-pollutant detection sensor comprises a first excitation coil (2) and a second excitation coil (7) which are symmetrically wound on the detection micro-channel (3);
the excitation-detection unit comprises a first induction coil (5) and a second induction coil (8) which are symmetrically wound outside the first excitation coil (2) and the second excitation coil (7).
2. The four-solenoid oil multi-contaminant detection sensor of claim 1, wherein the first induction coil (5) and the second induction coil (8) are configured to electromagnetically couple with the four-solenoid oil multi-contaminant detection sensor, obtain information from the four-solenoid oil multi-contaminant detection sensor, and transmit energy to the four-solenoid oil multi-contaminant detection sensor.
3. The four solenoid oil multi-contaminant detection sensor of claim 1, wherein the four solenoid oil multi-contaminant detection sensor includes a voltage detection mode and a capacitance detection mode, wherein:
In the voltage detection mode, the chip main body (6) further comprises a voltage detection circuit (11) and an alternating current power supply, wherein adjacent leads of the first exciting coil (2) and the second exciting coil (7) are connected and then connected with the voltage detection circuit (11); the same side lead wires of the first induction coil (5) and the second induction coil (8) are connected and then connected with an alternating current power supply;
In the capacitive detection mode, the chip main body further comprises an impedance analyzer (9), inner leads of the first induction coil (5) and the second induction coil (8) are not connected to form an equivalent capacitance, and outer leads of the first induction coil (5) and the second induction coil (8) are connected with the impedance analyzer (9).
4. The four-solenoid oil multi-pollutant detection sensor according to claim 1, wherein the first exciting coil (2) and the second exciting coil (7) are formed by winding copper wires with the wire diameter of 70 μm, the number of turns of the coils is 200, and the inner diameter of the coils is 1mm.
5. The four-solenoid oil multi-pollutant detection sensor according to claim 1, wherein the first induction coil (5) and the second induction coil (8) are formed by winding copper wires with the wire diameter of 70 μm, the number of turns of the coils is 200, and the inner diameters of the coils are 2mm.
6. The oil multi-pollutant detection sensor for four solenoid coils according to claim 1, wherein the first exciting coil (2), the second exciting coil (7), the first induction coil (5) and the second induction coil (8) are connected with leads at both ends, the number of the leads is plural, and the leads are all arranged at one side of the chip main body (6).
7. A method of manufacturing an oil multi-contaminant detection sensor based on the four solenoid coil of any one of claims 1-6, comprising:
S1, manufacturing a four-solenoid coil oil multi-pollutant detection sensor: a copper bar with the length of 7cm and the diameter of 1mm is used as a mould for manufacturing a micro-channel, the copper bar passes through inner holes of two solenoid coils and is tightly attached to the inner walls of the two solenoid coils, the concentricity of a first exciting coil and a second exciting coil is ensured, the distance between the first exciting coil and the second exciting coil is controlled to be 60 mu m, leads are arranged at two ends of the first exciting coil and the second exciting coil, and the mode is used to be switched;
s2, manufacturing an excitation-detection unit: the first induction coil and the second induction coil are fixed on a glass slide to ensure concentricity, and the manufactured four-solenoid coil oil multi-pollutant detection sensor passes through the first induction coil and the second induction coil and is fixed on a glass substrate to be arranged between the first induction coil and the second induction coil and ensure concentricity of the first induction coil and the second induction coil;
S3, mixing PDMS glue and a curing agent according to the proportion of 10:1, fully stirring the mixture by using a glass rod, and placing the obtained gel liquid into a vacuum drying oven for vacuum treatment for 40min; taking out the gel liquid after the vacuum treatment, standing until bubbles disappear, slowly pouring the gel liquid into a pouring die for molding, putting the molded sensor into a drying oven for curing treatment, wherein the temperature of the drying oven is set to 80 ℃ and the time is set to 90min;
S4, after the gel liquid is solidified, the copper rod is extracted to form a micro-channel with the diameter of 1mm, and an oil sample inlet and an oil sample outlet are processed.
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