CN117990946B - High-precision accelerometer resolution testing device and method based on amplitude modulation - Google Patents
High-precision accelerometer resolution testing device and method based on amplitude modulation Download PDFInfo
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Abstract
The invention discloses a high-precision accelerometer resolution testing device and method based on amplitude modulation. The testing device is placed on a vibration isolation foundation, the accelerometer to be tested is fixedly installed on the testing device, and the piezoelectric ceramics provides inclination angle change with controllable amplitude and frequency in the testing device; then, determining the relation between the target acceleration variation of the testing device and the target modulation dip angle and the driving voltage amplitude U at two ends of the piezoelectric ceramic by using a reference accelerometer; and under different target acceleration variation amounts, acquiring actual acceleration variation amounts of the accelerometer to be measured, further judging whether the different target acceleration variation amounts meet the standard, and finally taking the minimum value in the standard target acceleration variation amounts as the resolution of the accelerometer. The invention tests on the vibration isolation foundation, has simple structure device and low cost, can realize extremely high resolution without the help of a precise rotating device, and has strong practicability.
Description
Technical Field
The invention belongs to the field of accelerometer sensors, and relates to an accelerometer resolution testing device and method, in particular to a high-precision accelerometer resolution testing device and method based on amplitude modulation.
Background
The accelerometer is an instrument for measuring the linear acceleration of a carrier, consists of a detection mass (also called a sensitive mass), a support, a potentiometer, a spring, a damper and a shell, has the characteristics of simple structure and high precision, and has wide application in an inertial navigation system and a geodetic system. Resolution is an important indicator of an accelerometer, reflects the minimum limit of acceleration that the accelerometer can measure, and the higher the resolution, the more sensitive the accelerometer is to weak acceleration, and resolution measurement is of great importance in calibration and application of high-precision accelerometers.
In performing accelerometer resolution testing, it is necessary to artificially give a minute acceleration input to the accelerometer, and then sample and process the signal output. In order to achieve measurement of the high resolution accelerometer, the test method should be at least one order of magnitude higher than the accelerometer's resolution to be measured. Accelerometer resolution is typically tested by using mechanical structure means to change the angle between the sensitive axis and the horizontal plane or to change the spacing between the gravity mass and the acceleration. The usual test method is to subdivide the gravitational field with an optical index head, the minimum scale of which is 0.1 ", and the highest resolution of the accelerometer which can be measured is 0.5ug. The resolution can also be tested by adopting a uniform rotation modulation method, in particular to a method that an accelerometer is arranged on a deflectable uniform rotation table top, a gravity acceleration signal is divided slightly, and then the resolution of 0.1ug can be measured by utilizing a double-shaft turntable. The resolution test can also be carried out by adopting a method for generating gravitational gradient by high specific gravity materials, in particular to uniformly mounting 4 quartz flexible accelerometers on a double-shaft turntable rotating at a constant angular speed at intervals of 90 degrees, wherein the sensitive shaft direction is the tangential direction of the rotation angular speed, and the highest resolution of 0.01ug can be obtained by moving a shot to generate gravitational forces of different sizes. The resolution test method under the excitation of 1g is to test the resolution by using a precise single-axis rotating device, and to restrain common mode noise by using a reference accelerometer so as to judge whether the accelerometer to be tested has the resolution of the order of magnitude of 1X 10 -8 g. The accelerometer resolution test method using the wobble device can provide an input acceleration on the order of about 1ug. The high-resolution test method for the quartz accelerometer based on the piezoelectric deflection table is that the high-precision accelerometer is arranged on the piezoelectric deflection table, so that the piezoelectric deflection table swings at a micro angle on the milliradian level at a fixed frequency f, and the estimated test resolution can reach 1X 10 -9 g.
The existing high-resolution accelerometer test schemes all need to provide tiny acceleration signal input by means of a precise rotating device or a turntable, have high requirements on environmental equipment and high cost, and the resolution available by the common resolution test scheme is limited. For the emerging optical momentum inertial accelerometer based on the vacuum optical trap, the conventional testing method cannot be applied to the optical momentum inertial accelerometer with complicated optical path and larger volume and weight.
Disclosure of Invention
Aiming at the current situation that a high-precision turntable or a rotating device is needed to be used for testing the resolution of the high-sensitivity accelerometer, the cost is high, the installation is complicated and the requirements of testing the novel accelerometer are different from each other every day, such as the requirements of testing the optical momentum inertial accelerometer based on a vacuum optical trap, the invention aims to provide the high-precision accelerometer resolution testing device and the high-precision accelerometer resolution testing method based on amplitude modulation.
The technical scheme adopted by the invention is as follows:
1. high-precision accelerometer resolution testing device based on amplitude modulation
The device comprises an inclination angle adjustable device, an inclination angle driving module, a reference accelerometer and a signal processing module, wherein the inclination angle driving module is arranged below one side part of the inclination angle adjustable device, and the reference accelerometer and the accelerometer to be measured are fixedly arranged on a rotating shaft of the inclination angle adjustable device; in the initial state, the measuring shafts of the accelerometer to be measured and the reference accelerometer are parallel to the horizontal plane, the sensitive units of the accelerometer to be measured and the reference accelerometer are coincident with the axis of the rotating shaft of the inclination angle adjustable device, and the measuring shafts of the accelerometer to be measured and the reference accelerometer are perpendicular to the rotating shaft of the inclination angle adjustable device; the reference accelerometer and the accelerometer to be measured are connected with the signal processing module.
Further, the inclination driving module comprises piezoelectric ceramics, a voltage amplifier and a signal generator; the signal generator is connected with piezoelectric ceramics through a voltage amplifier, and the piezoelectric ceramics are arranged under one side part of the inclination angle adjustable device; and the inclination angle of the inclination angle adjustable device is changed by driving the piezoelectric ceramics, so that the reference accelerometer and the accelerometer to be measured obtain the same acceleration variation.
Further, the signal processing module comprises a signal acquisition system and a terminal computer, wherein the signal acquisition system is connected with the output ends of the accelerometer to be detected and the reference accelerometer, and the signal acquisition system is connected with the terminal computer.
Further, the inclination angle adjustable device comprises a bearing seat and a supporting platform, the supporting platform is rotatably installed on the bearing seat, the rotating axis of the supporting platform on the bearing seat is recorded as a rotating shaft of the inclination angle adjustable device, and the driving end of the inclination angle driving module is closely contacted with the center of the lower surface of one side of the rotating axis of the supporting platform.
Further, the inclination driving module is utilized to provide the acceleration variation delta a with controllable amplitude and frequency for the reference accelerometer and the accelerometer to be measured on the inclination adjustable device, and the acceleration variation delta a meets the following formula:
Δa=gα*Usinωt / l
Wherein alpha is the conversion coefficient of the voltage at two ends of the piezoelectric ceramic and the actual displacement, U is the amplitude of the driving signal at two ends of the piezoelectric ceramic, omega is the angular velocity of the driving voltage signal at two ends of the piezoelectric ceramic, t is the time, l is the horizontal distance between the position of the piezoelectric ceramic and the center of the rotating shaft of the inclination angle adjustable device, and g is the gravity acceleration.
Further, the supporting platform is a plate material such as a hard alloy plate which can bear high pressure and has high hardness and difficult deformation.
2. High-precision accelerometer resolution testing method based on amplitude modulation
S1: giving a target acceleration variation deltaa;
S2: controlling an inclination angle driving module according to the current target acceleration variation delta a, so that the inclination angle adjustable device periodically rotates under the driving voltage U at two ends of the piezoelectric ceramic, and acquiring the actual acceleration variation of the accelerometer to be measured;
S3: comparing the current target acceleration variation delta a with the corresponding actual acceleration variation, and determining whether the current target acceleration variation is the target acceleration variation reaching the standard;
S4: repeating S1-S3 for a plurality of times to obtain a plurality of standard target acceleration variable quantities, and taking the minimum value in the standard target acceleration variable quantities as the resolution of the accelerometer to be measured.
Further, the S2 specifically is:
S21: calculating the actual displacement of the piezoelectric ceramics corresponding to the accelerometer to be measured according to the current target acceleration variation delta a, and then calculating the driving voltage amplitude U of the two ends corresponding to the actual displacement of the piezoelectric ceramics according to the voltage of the two ends of the piezoelectric ceramics and the conversion coefficient alpha of the actual displacement;
S22: adjusting the signal generator and the voltage amplifier to enable the driving voltage at two ends of the piezoelectric ceramic to be a sine voltage signal with frequency f and amplitude U and the inclination angle adjustable device to periodically rotate; and then, acquiring the amplitude of the sine component of the digital electric signal of the accelerometer to be measured under the driving voltage U at two ends of the piezoelectric ceramic, and taking the amplitude as the actual acceleration variation of the accelerometer to be measured.
Further, the step S21 specifically includes:
firstly, calculating a theoretical voltage amplitude U according to a nominal voltage-deformation conversion coefficient of piezoelectric ceramics, and then adjusting a signal generator and a voltage amplifier to enable driving voltages at two ends of the piezoelectric ceramics to be sinusoidal voltage signals with frequency f and amplitude U;
Then, a terminal computer is used for controlling a signal acquisition system to obtain the amplitude of the sine component of the digital electric signal of the reference accelerometer under different voltage amplitudes U and serve as the theoretical acceleration variation of the accelerometer to be measured;
And finally, calculating to obtain the actual displacement of the piezoelectric ceramic according to the theoretical acceleration variation of the accelerometer to be measured, which is measured under different voltage amplitudes U, fitting and drawing a linear relation diagram of the two-end driving voltage amplitude and the actual displacement of the piezoelectric ceramic, so as to obtain a conversion coefficient alpha of the voltage at two ends of the piezoelectric ceramic and the actual displacement, and drawing a linear relation diagram of the target acceleration variation and the two-end driving voltage amplitude of the piezoelectric ceramic based on the conversion coefficient alpha, so as to determine the two-end driving voltage amplitude U of the piezoelectric ceramic corresponding to the current target acceleration variation delta a.
Further, in the step S3, if 50% < actual acceleration variation/target acceleration variation Δa < 150%, it indicates that the current target acceleration variation is a target acceleration variation that meets the standard; otherwise, the target acceleration variation is indicated to be the target acceleration variation which does not reach the standard.
The invention has the following beneficial effects:
1. the invention provides a resolution test method for an accelerometer, which utilizes a piezoelectric ceramic and an inclination angle adjustable device to build a set of simple and reliable measuring device, can realize the resolution test of the high-sensitivity accelerometer without an expensive and complex-operation precise turntable, and can freely regulate and control the amplitude and the frequency so as to meet the test requirements of the resolutions of various accelerometers.
2. The testing device is carried out on the vibration isolation foundation, has simple structure and low cost, can realize extremely high resolution of less than 1ug without a precise rotating device, has strong practicability, wide application environment and simple principle, and is easy to build.
Drawings
Fig. 1 is an overall installation view of the device of the present invention.
Fig. 2 is a block diagram of the testing principle of the method of the invention.
FIG. 3 is a graph showing the linear relationship between the theoretical input acceleration variation of the acceleration variation to be measured and the driving voltage at two ends of the piezoelectric ceramic, which is obtained according to the embodiment of the present invention.
FIG. 4 shows the results of a test of the inertial accelerometer with optical momentum to be measured according to the embodiment of the invention.
Fig. 5 is a test flow chart of the method of the present invention.
In the figure: 1. an inclination angle adjustable device; 2. piezoelectric ceramics; 3. a voltage amplifier; 4. a signal generator; 5. a reference accelerometer; 6. an accelerometer to be measured; 7. a signal acquisition system; 8. a terminal computer; 11. a bearing seat; 12. aluminum alloy plate.
Detailed Description
The invention will be described in detail below with respect to certain specific embodiments thereof in order to better understand the invention and thereby to more clearly define the scope of the invention as claimed. It should be noted that the following description is only some embodiments of the inventive concept and is only a part of examples of the present invention, wherein the specific direct description of the related structures is only for the convenience of understanding the present invention, and the specific features do not naturally and directly limit the implementation scope of the present invention. Conventional selections and substitutions made by those skilled in the art under the guidance of the present inventive concept, and reasonable arrangement and combination of several technical features under the guidance of the present inventive concept should be regarded as being within the scope of the present invention claimed.
As shown in fig. 1 and 2, the device comprises an inclination angle adjustable device 1, an inclination angle driving module, a reference accelerometer 5 and a signal processing module, wherein the inclination angle adjustable device 1 and the inclination angle driving module are both arranged on a vibration isolation foundation, the inclination angle driving module is arranged below one side part of a rotating shaft of the inclination angle adjustable device 1 and used for changing the inclination angle of a supporting platform, and the reference accelerometer 5 and the accelerometer 6 to be tested are fixedly arranged on the rotating shaft of the inclination angle adjustable device 1; in the initial state, the measuring axes of the accelerometer 6 to be measured and the reference accelerometer 5 are parallel to the horizontal plane, and the sensitive units of the accelerometer 6 to be measured and the reference accelerometer 5 are coincident with the axis of the rotating shaft of the inclination angle adjustable device 1, namely the reference accelerometer 5 and the accelerometer 6 to be measured are arranged at intervals in the axial direction of the rotating shaft of the inclination angle adjustable device 1, and the measuring axes of the accelerometer 6 to be measured and the reference accelerometer 5 are perpendicular to the rotating shaft of the inclination angle adjustable device 1; the output ends of the reference accelerometer 5 and the accelerometer 6 to be measured are connected with the signal processing module.
The dip angle driving module comprises piezoelectric ceramics 2, a voltage amplifier 3 and a signal generator 4; the signal generator 4 is connected with the piezoelectric ceramic 2 through the voltage amplifier 3, wherein an output signal of the signal generator 4 is connected to the input end of the voltage amplifier 3, and the output end of the voltage amplifier 3 is connected to two ends of the piezoelectric ceramic 2, so that a driving voltage is provided for the operation of the piezoelectric ceramic 2, and the voltage of the driving voltage is at least 100V. The piezoelectric ceramic 2 is arranged below one side of the supporting platform of the inclination angle adjustable device 1, and particularly, the cap-shaped end surface of the piezoelectric ceramic 2 is closely contacted with the center of the lower surface of one side of the rotation axis of the supporting platform; the inclination angle of the inclination angle adjustable device 1 is changed by driving the piezoelectric ceramics 2, so that the included angles between the measuring axes of the accelerometer to be measured and the reference accelerometer and the direction of gravitational acceleration are changed, and the same acceleration variation is obtained by the reference accelerometer 5 and the accelerometer to be measured 6.
The signal processing module comprises a signal acquisition system 7 and a terminal computer 8, wherein the signal acquisition system 7 is connected with the output ends of the accelerometer 6 to be detected and the reference accelerometer 5 and is used for acquiring output signals of the accelerometer 6 to be detected and the reference accelerometer 5, and the signal acquisition system 7 is connected with the terminal computer 8 and is used for processing the transmitted signals.
The inclination angle adjustable device 1 comprises a bearing seat 11 and a supporting platform, wherein the supporting platform is rotatably arranged on the bearing seat 11, specifically, two supporting arms are arranged on two sides of a supporting platform body, the two supporting arms and the supporting platform body are integrally formed, and the two supporting arms are respectively rotatably arranged in the corresponding bearing seat 11. The rotation axis of the support platform on the bearing seat 11 is marked as a rotation axis of the inclination angle adjustable device 1, the support platform is symmetrical about the center of the rotation axis, and the driving end of the inclination angle driving module (namely, the cap-shaped end face of the piezoelectric ceramic 2) is closely contacted with the center of the lower surface of one side of the rotation axis of the support platform. In this embodiment, the support platform is an aluminum alloy plate 12.
The high-precision accelerometer resolution test method based on amplitude modulation comprises the following steps:
S1: giving a target acceleration variation deltaa;
S2: controlling an inclination angle driving module according to the current target acceleration variation delta a to enable the inclination angle adjustable device 1 to periodically rotate under the driving voltage U at two ends of the piezoelectric ceramic 2, and obtaining the actual acceleration variation of the accelerometer 6 to be measured;
S2 specifically comprises the following steps:
S21: calculating a target modulation inclination angle theta between a measuring axis of the accelerometer 6 to be measured and a horizontal plane and the actual displacement of the piezoelectric ceramic corresponding to the target modulation inclination angle theta according to the current target acceleration variation delta a, and then calculating two-end driving voltage amplitude U corresponding to the actual displacement of the piezoelectric ceramic 2 according to the voltage at two ends of the piezoelectric ceramic 2 and a conversion coefficient alpha of the actual displacement;
S21 specifically comprises the following steps:
Firstly, calculating a theoretical voltage amplitude U according to a nominal voltage-deformation conversion coefficient of the piezoelectric ceramic 2, and then adjusting the signal generator 4 and the voltage amplifier 3 to enable driving voltages at two ends of the piezoelectric ceramic 2 to be sinusoidal voltage signals with frequency f and amplitude U;
then, a terminal computer 8 is used for controlling a signal acquisition system 7 to obtain the amplitude of the sine component of the digital electric signal of the reference accelerometer 5 under different voltage amplitudes U and serve as the theoretical acceleration variation of the accelerometer 6 to be measured;
Finally, according to the theoretical acceleration variation of the accelerometer 6 to be measured, which is measured under different voltage amplitudes U, the actual displacement of the piezoelectric ceramic is calculated, and a linear relation diagram of the two-end driving voltage amplitudes and the actual displacement of the piezoelectric ceramic 2 is fitted and drawn, so that a conversion coefficient alpha of the voltage at two ends of the piezoelectric ceramic 2 and the actual displacement is obtained, and a linear relation diagram of the target acceleration variation and the two-end driving voltage amplitudes of the piezoelectric ceramic 2 is drawn based on the conversion coefficient alpha, so that a target modulation dip angle theta corresponding to the current target acceleration variation delta a and the two-end driving voltage amplitudes U of the piezoelectric ceramic 2 are determined.
S22: the signal generator 4 and the voltage amplifier 3 are regulated, so that the driving voltage at two ends of the piezoelectric ceramic 2 is a sine voltage signal with frequency f and amplitude U, and the inclination angle adjustable device 1 periodically rotates under the target modulation inclination angle theta, and the inclination angles of the measuring shaft and the horizontal plane of the accelerometer 6 to be measured periodically change along with the periodic deformation of the piezoelectric ceramic 2; then, the terminal computer 8 is used for controlling the signal acquisition system 7 to acquire the amplitude of the sine component of the digital electric signal of the accelerometer 6 to be measured under the driving voltage U at the two ends of the piezoelectric ceramic 2 and serve as the actual acceleration variation of the accelerometer 6 to be measured. Specifically, the reference accelerometer 5 and the accelerometer 6 to be measured convert gravitational acceleration component signals periodically changed on a measuring shaft into analog electric signals, the analog electric signals are input into the signal acquisition system 7, the signal acquisition system 7 converts the input analog electric signals into digital electric signals and transmits the digital electric signals to the terminal computer 8, the terminal computer 8 is utilized to process and separate signal sinusoidal components in the digital electric signals, and the amplitude of the corresponding digital electric signal sinusoidal components under the current angle is obtained.
S3: comparing the current target acceleration variation delta a with the corresponding actual acceleration variation, and determining whether the current target acceleration variation is the target acceleration variation reaching the standard;
S3, if 50% < actual acceleration variation/target acceleration variation delta a < 150%, indicating that the current target acceleration variation is the target acceleration variation reaching the standard; otherwise, the target acceleration variation is indicated to be the target acceleration variation which does not reach the standard, wherein the target acceleration variation deltaa is an integer.
S4: repeating S1-S3 for a plurality of times to obtain a plurality of standard target acceleration variable quantities, and taking the minimum value in the standard target acceleration variable quantities as the resolution of the accelerometer 6 to be measured.
The method inputs the tiny acceleration variation quantity with controllable amplitude frequency to the accelerometer 6 to be tested and the reference accelerometer 5 through the piezoelectric ceramic 2, and obtains the corresponding acceleration variation quantity output through measurement and demodulation of specific frequency.
The invention principle of the invention is as follows:
The invention adopts a method for providing acceleration variation by modulating the dip angle through piezoelectric ceramics, the dip angle adjustable device is driven by the piezoelectric ceramics to generate dip angle variation under the voltage, the magnitude of the component of gravity acceleration on the measuring axis of the accelerometer is changed, the acceleration variation with controllable amplitude and frequency is provided for the accelerometer to be measured, and the acceleration variation is obtained by processing according to the following formula:
Δa=gsinθ=gh/ l=gα*Usinωt / l
wherein alpha is the conversion coefficient of the driving voltage at two ends of the piezoelectric ceramic and the actual displacement, the unit is mu m/V, U is the amplitude of the driving signal at two ends of the piezoelectric ceramic, omega is the angular velocity of the driving voltage signal at two ends of the piezoelectric ceramic, l is the horizontal distance between the position of the piezoelectric ceramic and the center of the rotating shaft of the inclination angle adjustable device, g is the gravity acceleration, h is the deformation quantity of the piezoelectric ceramic under the driving of the voltage, and theta is the included angle between the plane of the aluminum alloy plate of the inclination angle adjustable device and the horizontal plane.
The accelerometer to be measured and the reference accelerometer are fixedly arranged at the center of the inclination angle adjustable device, the centers of the accelerometer to be measured and the reference accelerometer sensitive unit are coincident with the axis of the rotation shaft of the inclination angle adjustable device, in the installation state, the accelerometer sensitive unit only carries out rotary motion under the inclination angle change of the inclination angle adjustable device, and translational motion on a plane does not exist, and at the moment, the accelerometer measurement shaft only detects the change of the component of the gravity acceleration on the measurement shaft.
The deformation quantity of the piezoelectric ceramics is linearly related to the drive voltage at two ends, and the reference accelerometer can measure the theoretical output acceleration variation quantity of the accelerometer to be measured, which is generated by the piezoelectric ceramics and the inclination angle adjustable device. And drawing a linear relation diagram of the theoretical input acceleration variation of the acceleration variation to be measured and the driving voltages at two ends of the piezoelectric ceramics by checking the acceleration variation actually output by the reference accelerometer under different piezoelectric ceramics driving voltages, and selecting the driving voltages at two ends of the piezoelectric ceramics according to the target acceleration variation.
In the embodiment, cap-type piezoelectric ceramics with the model PK4HQP of the Thorolabs series are selected, the full-load driving voltage is 150V, the corresponding nominal deformation amount is 20 mu m, and the conversion coefficient alpha of the driving voltage at two ends of the piezoelectric ceramics and the actual displacement is 2/15 mu m/V; the horizontal distance l between the piezoelectric ceramic position and the center of the rotating shaft of the inclination angle adjustable device is 0.75m, and the amplitude of the driving voltage is 15V, so that the acceleration variation amplitude is approximately about 2 mug according to the formula; the amplitude of the driving voltage is 1.5V, and the acceleration variation amplitude is approximately about 0.2 mug according to the formula; the amplitude of the driving voltage is 150mV, the amplitude of the acceleration change is approximately about 0.02 mug according to a formula, and a linear relation diagram of the theoretical input acceleration change of the cap-type piezoelectric ceramic and the driving voltages at two ends of the piezoelectric ceramic is shown in fig. 3. If the device is placed on an optical platform, the eigenfrequency of the optical platform is generally about 10Hz, so that the eigenfrequency of the optical platform should be avoided when the piezoelectric ceramic driving voltage frequency is selected; if the low-frequency noise of the accelerometer to be tested is large, the device can select a high driving voltage frequency when testing, and the resolution test is performed at the position where the noise of the accelerometer to be tested is flat and small.
And selecting Nanometrics TitanSMA series of strong vibration accelerometers by the reference accelerometer, measuring the output values of the acceleration variation of the reference accelerometer under different voltages at two ends of the piezoelectric ceramic, linearly fitting to obtain a linear relation diagram of the theoretical input acceleration variation of the acceleration variation to be measured shown in the following diagram and the driving voltages at two ends of the piezoelectric ceramic, and selecting the driving voltage amplitude at two ends of the piezoelectric ceramic according to the target acceleration variation.
The accelerometer to be measured is a newly developed optical momentum inertial accelerometer, a relation diagram of target acceleration variation and driving voltages at two ends of piezoelectric ceramics is obtained according to fig. 3, the actual output acceleration variation shown in fig. 4 is obtained after the accelerometer to be measured inputs the acceleration variation, a range that a value which satisfies the actual output value/theoretical output value is more than 50% and less than 150% is a range that the resolution reaches the standard, and the accelerometer to be measured reaches the resolution level of 0.1 mug.
The flow of the method is shown in figure 5, the relation between the driving voltage at two ends of the piezoelectric ceramic 2 and the target acceleration variation is verified through the reference accelerometer 5, the reference accelerometer plays a role in calibrating the device in the method, and the acceleration variation is input into the accelerometer to be measured through the calibration result.
On the basis, the amplitude of the driving voltage at two ends of the piezoelectric ceramic is changed or the horizontal distance l between the position of the piezoelectric ceramic and the center of the rotating shaft of the inclination angle adjustable device is increased, so that the amplitude of the acceleration variation is changed. The frequency of the acceleration variation signal can be selected according to the test environment and the frequency characteristic of the accelerometer.
Finally, it should be noted that the above-mentioned embodiments and descriptions are only illustrative of the technical solution of the present invention and are not limiting. It will be understood by those skilled in the art that various modifications and equivalent substitutions may be made to the present invention without departing from the spirit and scope of the present invention as defined in the appended claims.
Claims (6)
1. A method for testing the resolution of a high-precision accelerometer based on amplitude modulation, which is characterized by comprising the following steps:
S1: giving a target acceleration variation deltaa;
S2: controlling an inclination angle driving module according to the current target acceleration variation delta a, so that the inclination angle adjustable device (1) periodically rotates under the driving voltage at two ends of the piezoelectric ceramic (2), and acquiring the actual acceleration variation of the accelerometer (6) to be measured;
S3: comparing the current target acceleration variation delta a with the corresponding actual acceleration variation, and determining whether the current target acceleration variation is the target acceleration variation reaching the standard;
S4: repeating the steps S1-S3 for a plurality of times to obtain a plurality of standard target acceleration variable quantities, and taking the minimum value in the standard target acceleration variable quantities as the resolution of the accelerometer (6) to be measured;
The step S2 is specifically as follows:
S21: calculating the actual displacement of the piezoelectric ceramics corresponding to the accelerometer (6) to be measured according to the current target acceleration variation delta a, and then calculating the driving voltage amplitude U of the two ends corresponding to the actual displacement of the piezoelectric ceramics (2) according to the conversion coefficient alpha of the voltage of the two ends of the piezoelectric ceramics (2) and the actual displacement;
S22: the signal generator (4) and the voltage amplifier (3) are regulated, so that the driving voltage at two ends of the piezoelectric ceramic (2) is a sine voltage signal with frequency f and amplitude U and the inclination angle adjustable device (1) periodically rotates; then, acquiring the amplitude of the sine component of the digital electric signal of the accelerometer (6) to be measured under the driving voltage at two ends of the piezoelectric ceramic (2) and taking the amplitude as the actual acceleration variation of the accelerometer (6) to be measured;
The step S21 is specifically as follows:
Firstly, calculating a theoretical voltage amplitude according to a nominal voltage-deformation conversion coefficient of the piezoelectric ceramic (2), and then adjusting a signal generator (4) and a voltage amplifier (3) to enable driving voltages at two ends of the piezoelectric ceramic (2) to be sinusoidal voltage signals with frequency f and amplitude of the theoretical voltage amplitude;
Then, a terminal computer (8) is used for controlling a signal acquisition system (7) to obtain the amplitude of the sine component of the digital electric signal of the reference accelerometer (5) under different voltage amplitudes and serve as the theoretical acceleration variation of the accelerometer (6) to be measured;
And finally, calculating to obtain the actual displacement of the piezoelectric ceramic according to the theoretical acceleration variation of the accelerometer (6) to be measured, which is measured under different voltage amplitudes, fitting and drawing a linear relation diagram of the driving voltage amplitudes at two ends of the piezoelectric ceramic (2) and the actual displacement, so as to obtain a conversion coefficient alpha of the voltage at two ends of the piezoelectric ceramic (2) and the actual displacement, and drawing a linear relation diagram of the target acceleration variation and the driving voltage amplitudes at two ends of the piezoelectric ceramic (2) based on the conversion coefficient alpha, so as to determine the driving voltage amplitude U at two ends of the piezoelectric ceramic (2) corresponding to the current target acceleration variation delta a.
2. The method for testing the resolution of the high-precision accelerometer based on amplitude modulation according to claim 1, wherein in the step S3, if 50% < actual acceleration variation/target acceleration variation Δa < 150%, the current target acceleration variation is the target acceleration variation reaching the standard; otherwise, the target acceleration variation is indicated to be the target acceleration variation which does not reach the standard.
3. The high-precision accelerometer resolution testing device based on amplitude modulation for implementing the high-precision accelerometer resolution testing method based on amplitude modulation according to claim 1 or 2, wherein the testing device comprises an inclination angle adjustable device (1), an inclination angle driving module, a reference accelerometer (5) and a signal processing module, the inclination angle driving module is arranged below one side part of the inclination angle adjustable device (1), and the reference accelerometer (5) and the accelerometer (6) to be tested are fixedly arranged on a rotating shaft of the inclination angle adjustable device (1); in an initial state, measuring shafts of the accelerometer (6) to be measured and the reference accelerometer (5) are parallel to a horizontal plane, sensitive units of the accelerometer (6) to be measured and the reference accelerometer (5) are coincident with the axis of the rotating shaft of the inclination angle adjustable device (1), and the measuring shafts of the accelerometer (6) to be measured and the reference accelerometer (5) are perpendicular to the rotating shaft of the inclination angle adjustable device (1); the reference accelerometer (5) and the accelerometer (6) to be measured are connected with the signal processing module.
4. A high precision accelerometer resolution testing apparatus based on amplitude modulation according to claim 3, wherein the tilt driving module comprises a piezoelectric ceramic (2), a voltage amplifier (3) and a signal generator (4); the signal generator (4) is connected with the piezoelectric ceramic (2) through the voltage amplifier (3), and the piezoelectric ceramic (2) is arranged below one side part of the inclination angle adjustable device (1); the inclination angle of the inclination angle adjustable device (1) is changed by driving the piezoelectric ceramics (2), so that the reference accelerometer (5) and the accelerometer (6) to be measured obtain the same acceleration variation.
5. A high precision accelerometer resolution testing apparatus based on amplitude modulation according to claim 3, wherein the signal processing module comprises a signal acquisition system (7) and a terminal computer (8), the signal acquisition system (7) is connected with the output ends of the accelerometer (6) to be tested and the reference accelerometer (5), and the signal acquisition system (7) is connected with the terminal computer (8).
6. A high precision accelerometer resolution testing apparatus based on amplitude modulation according to claim 3, wherein the tilt angle adjustable device (1) comprises a bearing block (11) and a support platform rotatably mounted on the bearing block (11), the support platform being denoted as a rotation axis of the tilt angle adjustable device (1) at a rotation axis on the bearing block (11), the driving end of the tilt angle driving module being in close contact with a center of a lower surface of one side of the rotation axis of the support platform.
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| CN101101306B (en) * | 2007-07-21 | 2011-06-22 | 大连理工大学 | Piezoelectric ceramic sinusoidal excitation acceleration meter calibration method and device |
| CN102749477B (en) * | 2012-07-11 | 2014-04-16 | 浙江大学 | Method for measuring angular deviation between surface and rotating shaft of turntable by utilizing fiber-optic gyroscope |
| CN106990263B (en) * | 2017-04-28 | 2019-08-06 | 中国电子产品可靠性与环境试验研究所 | The test method and device of accelerometer resolution ratio |
| CN108036808A (en) * | 2017-12-04 | 2018-05-15 | 兰州空间技术物理研究所 | A kind of high-precision tilt angle Control experiment platform |
| CN109459585B (en) * | 2018-10-25 | 2021-02-09 | 北京航天计量测试技术研究所 | Accelerometer zero offset correction method |
| CN110058053B (en) * | 2018-12-11 | 2021-02-09 | 中国航空工业集团公司北京长城计量测试技术研究所 | Dynamic calibration method for linearity of accelerometer |
| CN115493688A (en) * | 2022-09-15 | 2022-12-20 | 中国计量科学研究院 | On-site calibration method for reciprocal piezoelectric accelerometer |
| CN116500301A (en) * | 2023-05-19 | 2023-07-28 | 华中科技大学 | Device and method for calibrating resolution of accelerometer |
| CN116699177A (en) * | 2023-06-06 | 2023-09-05 | 华中科技大学 | Accelerometer performance testing device, method and system |
| CN116953288A (en) * | 2023-07-26 | 2023-10-27 | 浙江大学 | Accelerometer resolution testing device and method utilizing excitation force of double eccentric motors |
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