CN117964393A - Preparation method of porous ceramic for electrostatic chuck - Google Patents
Preparation method of porous ceramic for electrostatic chuck Download PDFInfo
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- CN117964393A CN117964393A CN202311683563.0A CN202311683563A CN117964393A CN 117964393 A CN117964393 A CN 117964393A CN 202311683563 A CN202311683563 A CN 202311683563A CN 117964393 A CN117964393 A CN 117964393A
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- fiber
- oxide
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- porous ceramic
- filaments
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- 239000000919 ceramic Substances 0.000 title claims abstract description 73
- 238000002360 preparation method Methods 0.000 title abstract description 10
- 239000000835 fiber Substances 0.000 claims abstract description 110
- 239000002002 slurry Substances 0.000 claims abstract description 22
- 238000005245 sintering Methods 0.000 claims abstract description 12
- 238000001035 drying Methods 0.000 claims abstract description 11
- 238000003825 pressing Methods 0.000 claims abstract description 10
- 239000011248 coating agent Substances 0.000 claims abstract description 8
- 238000000576 coating method Methods 0.000 claims abstract description 8
- 230000003068 static effect Effects 0.000 claims abstract description 7
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 25
- 239000011268 mixed slurry Substances 0.000 claims description 20
- 239000004952 Polyamide Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 229920002647 polyamide Polymers 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 238000000462 isostatic pressing Methods 0.000 claims description 8
- 239000004743 Polypropylene Substances 0.000 claims description 5
- 229920000728 polyester Polymers 0.000 claims description 5
- -1 polypropylene Polymers 0.000 claims description 5
- 229920001155 polypropylene Polymers 0.000 claims description 5
- 239000002270 dispersing agent Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 238000010345 tape casting Methods 0.000 claims description 4
- 238000011049 filling Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a preparation method of porous ceramic for an electrostatic chuck, which belongs to the technical field of ceramic preparation, and comprises the following steps: gathering the filaments together to form a bundle of filaments; uniformly coating oxide on a bundle of fiber wires; placing a plurality of bundles of fiber bundles with the surfaces coated with oxides into a mould, sealing the mould, then placing the mould into an isostatic press for pressing, and obtaining a pressed fiber bundle after the bundles of fiber bundles are pressed together; placing the pressed fiber bundles into slurry, taking out, drying, and then placing into a circular mold to be pressed again by using a static pressure machine to obtain a cylindrical ceramic green body containing fiber; sintering the ceramic green body, wherein fiber filaments are continuously raised and decomposed along with the sintering temperature, and the space occupied by the fiber filaments after the fiber filaments are decomposed forms a viewing hole, and meanwhile, the ceramic green body is sintered into a ceramic plate; the ceramic plate is cut into corresponding shapes according to the use requirement.
Description
Technical Field
The invention relates to the technical field of ceramic preparation, in particular to a preparation method of porous ceramic for an electrostatic chuck.
Background
In the field of electrostatic chucks, porous ceramics are used in the gas path of electrostatic chucks for gas transport and to prevent gas path discharge. The preparation is usually carried out by adopting a mode of extrusion molding or filling small-size ceramic particles into slurry for preparing porous ceramic. There are methods of integrally forming ceramic plates and porous ceramics, and of using separate forming and re-bonding. However, this type of method brings about a certain problem:
firstly, the size of the air hole is difficult to control, the size is different, and the air path is not smooth;
In addition, the size of the porous ceramic is limited, and the porous ceramic is difficult to further reduce;
finally, the porous ceramics have insufficient support and are easily deformed and broken.
Disclosure of Invention
The invention aims to provide a preparation method of porous ceramic for an electrostatic chuck, which can solve the problems of the background technology.
In order to solve the technical problems, the technical scheme of the invention is as follows:
a method for preparing a porous ceramic for an electrostatic chuck, the method comprising the steps of:
Step one: gathering the filaments together to form a bundle of filaments;
Step two: uniformly coating oxide on a bundle of fiber wires;
Step three: placing a plurality of bundles of fiber bundles with the surfaces coated with oxides into a mould, sealing the mould, then placing the mould into an isostatic press for pressing, and obtaining a pressed fiber bundle after the bundles of fiber bundles are pressed together;
Step four: placing the pressed fiber bundles into slurry, taking out, drying, and then placing into a circular mold to be pressed again by using a static pressure machine to obtain a cylindrical ceramic green body containing fiber;
Step five: sintering the ceramic green body, wherein fiber filaments are decomposed along with the continuous rising of the sintering temperature, the space occupied by the fiber filaments after the fiber filaments are decomposed forms a viewing hole, and meanwhile, the ceramic green body is sintered into a ceramic plate;
step six: the ceramic plate is cut into corresponding shapes according to the use requirement.
Preferably, the fiber yarn in the first step is polyamide or a combination of polyester, polyamide and polypropylene.
Preferably, the diameter of the fiber filaments in the first step is 1-100 μm.
Preferably, in the step one, the bundle of fiber filaments is 200-600 fiber filaments.
Preferably, the oxide in the second step is any one or a mixture of any two or a mixture of the three of an oxide of Si, an oxide of Mg and an oxide of Ca.
Preferably, the oxide in the second step is AL2O3, and the particle size of the AL2O3 is 2 to 10 μm.
Preferably, the method of applying oxide to the bundle of fiber filaments in the second step is as follows:
preparing the oxide into a slurry form, preparing the oxide into a slurry by a tape casting method, mixing a solvent, a dispersing agent, an organic solvent and the oxide into a mixed slurry, and preparing the oxide into a mixed slurry with proper viscosity;
Immersing a bundle of fiber wires into the mixed slurry, standing for a period of time, taking out the bundle of fiber wires stained with the mixed slurry, and drying to obtain the fiber wire.
Preferably, in the mixed slurry, the mass ratio of the oxide is 80% -99%.
Preferably, the pressurizing size in the isostatic pressing machine in the third step is 5-70 Mpa.
Preferably, in the cross section of the fiber bundle after being pressed in the third step, the area occupied by the fiber accounts for 40% -60% of the cross section area of the whole fiber bundle after being pressed.
By adopting the technical scheme, the method has the following beneficial effects:
The porous ceramic prepared by the method has the same size of fiber wires, and the size of holes left by the decomposed fiber wires during sintering is the same, so that the pore path of the sintered porous ceramic is consistent in size and cannot be bent;
The porous ceramic prepared by the method can be made small according to the requirement, and the problem that the porous ceramic prepared by the traditional method cannot be made small further is solved;
By adopting the method for preparing the porous ceramic, the slurry is coated on the surface of the fiber yarn twice, and the fiber yarn is pressed by the static pressure machine twice, so that a stable structure can be obtained, the porous ceramic has enough support degree, is not easy to deform, and solves the problems of insufficient strength and short service life of the porous ceramic.
Detailed Description
The following describes the invention in more detail. The description of these embodiments is provided to assist understanding of the present invention, but is not intended to limit the present invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
A method for preparing porous ceramic for an electrostatic chuck, comprising the steps of:
step one: the fiber filaments are gathered together to form a bundle of fiber filaments, wherein the diameter of the fiber filaments is 1 mu m, the bundle of fiber filaments is formed by gathering 200 fiber filaments, and the fiber filaments are polyamide or a combination of polyester, polyamide and polypropylene;
step two: uniformly coating oxide on a bundle of fiber wires, wherein the coated oxide is AL2O3, the particle diameter of the AL2O3 is 2-10 mu m, and in other implementation modes of the embodiment, the coated oxide can be any one of Si oxide, mg oxide and Ca oxide, or a mixture of any two or a mixture of the three, or can be a mixture of alumina and the three;
the method for uniformly coating oxide on a bundle of fiber wires is as follows:
preparing AL2O3 particles into a slurry form, wherein the slurry can be prepared according to a slurry preparation method by a tape casting method, mixing a solvent, a dispersing agent, an organic solvent and the AL2O3 particles into a mixed slurry, preparing the AL2O3 into a mixed slurry with proper viscosity, wherein the mass ratio of the AL2O3 in the mixed slurry is 80%;
preparing AL2O3 particles into mixed slurry, immersing the fiber yarn bundle into the slurry, standing for a period of time, adhering the mixed slurry on the outer side wall of the fiber yarn bundle, adhering the mixed slurry on the outer side wall of each fiber yarn, taking out the fiber yarn bundle adhered with the slurry, drying, embedding the fiber yarn in the oxide after drying, and drying for later use;
step three: placing the fiber bundles with the surfaces coated with oxides in the steps into a mould, sealing the mould, then placing the mould into an isostatic pressing machine for pressing, obtaining pressed fiber bundles after the plurality of bundles of fiber wires are pressed together, placing the plurality of fiber bundles into the mould, filling the mould, placing the mould into the isostatic pressing machine for pressing, wherein the pressure during the pressing of the isostatic pressing machine is 5Mpa, and the area occupied by the fiber wires is 40% of the cross section area of the whole pressed fiber bundle;
Step four: placing the pressed fiber bundles into slurry, taking out, drying, and then placing into a circular mold to be pressed again by using a static pressure machine to obtain a cylindrical ceramic green body containing fiber;
Step five: sintering the ceramic green body, wherein fiber bundles in the ceramic green body are decomposed along with the continuous rising of the sintering temperature, and after the fiber bundles in the fiber bundles are decomposed, the original occupied space of the fiber bundles can form a viewing hole, and meanwhile, the ceramic green body is sintered into a ceramic plate;
Step six: the ceramic plate is cut into corresponding shapes according to the use requirement, namely the porous ceramic for the electrostatic chuck is formed.
Example 2
A method for preparing porous ceramic for an electrostatic chuck, comprising the steps of:
Step one: the fiber filaments are gathered together to form a bundle of fiber filaments, wherein the diameter of the fiber filaments is 100 mu m, the bundle of fiber filaments is formed by gathering 600 fiber filaments, and the fiber filaments are polyamide or a combination of polyester, polyamide and polypropylene;
Step two: uniformly coating oxide on a bundle of fiber wires, wherein the coated oxide is AL2O3, the particle diameter of the AL2O3 is 4-8 mu m, and in other implementation modes of the embodiment, the coated oxide can be any one of Si oxide, mg oxide and Ca oxide or a mixture of any two or a mixture of the three;
the method for uniformly coating oxide on a bundle of fiber wires is as follows:
Preparing AL2O3 into a slurry form, wherein the slurry can be prepared according to a slurry preparation method by a tape casting method, mixing a solvent, a dispersing agent, an organic solvent and AL2O3 particles into a mixed slurry, preparing AL2O3 into a mixed slurry with proper viscosity, wherein the mass ratio of the AL2O3 in the mixed slurry is 99%;
After the AL2O3 particles are prepared into mixed slurry, immersing the fiber bundles into the slurry, standing for a period of time, taking out the fiber bundles stained with the slurry, drying, and keeping for later use;
Step three: placing the fiber bundles with the surfaces coated with oxides in the steps into a mould, sealing the mould, then placing the mould into an isostatic pressing machine for pressing, obtaining pressed fiber bundles after the plurality of bundles of fiber wires are pressed together, placing the plurality of fiber bundles into the mould, filling the mould, placing the mould into the isostatic pressing machine for pressing, wherein the pressure during the pressing of the isostatic pressing machine is 70Mpa, the area occupied by the fiber wires accounts for 60% of the cross section area of the whole pressed fiber bundle;
Step four: placing the pressed fiber bundles into slurry, taking out, drying, and then placing into a circular mold to be pressed again by using a static pressure machine to obtain a cylindrical ceramic green body containing fiber;
Step five: sintering the ceramic green body, wherein fiber bundles in the ceramic green body are decomposed along with the continuous rising of the sintering temperature, and after the fiber bundles in the fiber bundles are decomposed, the original occupied space of the fiber bundles can form a viewing hole, and meanwhile, the ceramic green body is sintered into a ceramic plate;
Step six: the ceramic plate is cut into corresponding shapes according to the use requirement, namely the porous ceramic for the electrostatic chuck is formed.
For porous ceramics, each fiber yarn adopts superfine fiber, and the fiber yarn is very straight and smooth for manufacturing
The porous ceramic holes can be made to be very straight cut and smooth, the fiber filaments adopt polyamide or polyester, polyamide and polypropylene combination, the diameter of the fiber filaments is between 1 and 100 mu m, and the diameter of the fiber filaments is between 5 and 10 mu m;
The porous ceramic prepared by the method has the same size of fiber wires, and the size of holes left by the decomposed fiber wires during sintering is the same, so that the pore path of the sintered porous ceramic is consistent in size and cannot be bent;
The porous ceramic prepared by the method can be made small according to the requirement, and the problem that the porous ceramic prepared by the traditional method cannot be made small further is solved;
By adopting the method for preparing the porous ceramic, the slurry is coated on the surface of the fiber yarn twice, and the fiber yarn is pressed by the static pressure machine twice, so that a stable structure can be obtained, the porous ceramic has enough support degree, is not easy to deform, and solves the problems of insufficient strength and short service life of the porous ceramic.
The embodiments of the present invention have been described in detail above, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, and yet fall within the scope of the invention.
Claims (10)
1. A method for preparing a porous ceramic for an electrostatic chuck, the method comprising the steps of:
Step one: gathering the filaments together to form a bundle of filaments;
Step two: uniformly coating oxide on a bundle of fiber wires;
Step three: placing a plurality of bundles of fiber bundles with the surfaces coated with oxides into a mould, sealing the mould, then placing the mould into an isostatic press for pressing, and obtaining a pressed fiber bundle after the bundles of fiber bundles are pressed together;
Step four: placing the pressed fiber bundles into slurry, taking out, drying, and then placing into a circular mold to be pressed again by using a static pressure machine to obtain a cylindrical ceramic green body containing fiber;
Step five: sintering the ceramic green body, wherein fiber filaments are decomposed along with the continuous rising of the sintering temperature, the space occupied by the fiber filaments after the fiber filaments are decomposed forms a viewing hole, and meanwhile, the ceramic green body is sintered into a ceramic plate;
step six: the ceramic plate is cut into corresponding shapes according to the use requirement.
2. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: the fiber yarn in the first step is polyamide or a combination of polyester, polyamide and polypropylene.
3. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: the diameter of the fiber yarn in the first step is 1-100 mu m.
4. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: in the first step, a bundle of fiber filaments is 200-600 fiber filaments.
5. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: the oxide in the second step is any one or the mixture of any two or the mixture of the three of Si oxide, mg oxide and Ca oxide.
6. The method for producing a porous ceramic for an electrostatic chuck according to claim 5, wherein: the oxide in the second step is AL2O3, and the particle diameter of the AL2O3 is 2-10 mu m.
7. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: the method for coating oxide on the bundle of fiber wires in the second step comprises the following steps:
preparing the oxide into a slurry form, preparing the oxide into a slurry by a tape casting method, mixing a solvent, a dispersing agent, an organic solvent and the oxide into a mixed slurry, and preparing the oxide into a mixed slurry with proper viscosity;
Immersing a bundle of fiber wires into the mixed slurry, standing for a period of time, taking out the bundle of fiber wires stained with the mixed slurry, and drying to obtain the fiber wire.
8. The method for producing a porous ceramic for an electrostatic chuck according to claim 7, wherein: in the mixed slurry, the mass ratio of the oxide is 80-99%.
9. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: the pressurizing size in the step three is 5-70 Mpa when the isostatic pressing machine is used for pressing.
10. The method for producing a porous ceramic for an electrostatic chuck according to claim 1, wherein: in the cross section of the fiber bundle after being pressed in the third step, the occupied area of the fiber accounts for 40% -60% of the cross section area of the whole fiber bundle after being pressed. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311683563.0A CN117964393A (en) | 2023-12-10 | 2023-12-10 | Preparation method of porous ceramic for electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311683563.0A CN117964393A (en) | 2023-12-10 | 2023-12-10 | Preparation method of porous ceramic for electrostatic chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117964393A true CN117964393A (en) | 2024-05-03 |
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|---|---|---|---|
| CN202311683563.0A Pending CN117964393A (en) | 2023-12-10 | 2023-12-10 | Preparation method of porous ceramic for electrostatic chuck |
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| Country | Link |
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| CN (1) | CN117964393A (en) |
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- 2023-12-10 CN CN202311683563.0A patent/CN117964393A/en active Pending
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