CN117835688B - Automatic switching device for pick-up head - Google Patents
Automatic switching device for pick-up head Download PDFInfo
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- CN117835688B CN117835688B CN202410238646.7A CN202410238646A CN117835688B CN 117835688 B CN117835688 B CN 117835688B CN 202410238646 A CN202410238646 A CN 202410238646A CN 117835688 B CN117835688 B CN 117835688B
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- 238000001179 sorption measurement Methods 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims description 36
- 238000004891 communication Methods 0.000 claims description 13
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 230000009471 action Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention relates to the technical field of semiconductor processing equipment, in particular to an automatic switching device for a pickup head, which mainly solves the technical problems of low production efficiency and poor repeated consistency of pickup actions in manual replacement of the pickup head. The device comprises an adsorption mechanism, a pick-up head and a placement frame, wherein the adsorption mechanism comprises a connecting frame, a rotary power piece and a mounting seat, a first air cavity is formed in the mounting seat, the pick-up head comprises a main body part and a suction nozzle, an air passage is formed in the main body part and the suction nozzle, the upper end of the air passage is communicated with the first air cavity, a first check ring is arranged on the upper portion of the side wall of the main body part, a second check ring is arranged on the lower portion of the side wall of the main body part, a mounting part is reserved between the first check ring and the second check ring, the placement frame comprises a cantilever lath, and a mounting notch is formed in the cantilever lath. The device can replace manual work to realize automatic switching of the pick-up head, greatly improves the working efficiency, and can ensure the repeated consistency of the pick-up action through equipment precision, thereby meeting the patch process requirements of full-automatic multi-chip equipment.
Description
Technical Field
The invention relates to the technical field of semiconductor processing equipment, in particular to an automatic switching device of a pick-up head.
Background
The chip mounting device can absorb chips from the wafer box or the blue film disc through the pick-up head, and the chips in the wafer box and the chips on different blue film discs are different in size and variety, and especially for multi-chip products, the chip mounting device needs to replace different suction nozzles so as to adapt to product requirements.
When chips with different specifications are currently used, the pick-up head is usually replaced manually by stopping the machine to complete the suction. The method not only affects the production efficiency of the equipment, but also can be used only by calibrating the position and the precision after manually replacing the pick-up head, further affects the production efficiency, and meanwhile, the repeated consistency of the pick-up action is difficult to ensure, so that the patch technology requirements of the full-automatic multi-chip equipment cannot be met.
Disclosure of Invention
The invention provides an automatic pick-up head switching device, which aims to overcome the technical defects of low production efficiency and poor repeated consistency of pick-up actions in the manual replacement of pick-up heads of the conventional patch equipment.
The invention provides an automatic switching device of a pickup head, comprising:
The adsorption mechanism comprises a connecting frame, a rotary power piece and a mounting seat, wherein the connecting frame is suitable for being fixedly connected with a mechanical arm of the patch equipment, a fixed part of the rotary power piece is fixedly connected to the connecting frame, an output shaft of the rotary power piece is vertically downwards arranged, the mounting seat is fixedly connected with the lower end of the output shaft of the rotary power piece, and a first air cavity extending to the lower surface of the mounting seat is arranged in the mounting seat;
The pick-up head comprises a main body part and a suction nozzle, wherein the main body part is suitable for being adsorbed and connected below the mounting seat, the suction nozzle is fixedly connected below the main body part, an air passage is formed in the main body part and the suction nozzle, the lower end of the air passage extends to an air hole of the suction nozzle, the upper end of the air passage is suitable for being communicated with the first air cavity in a sealing way when the main body part is adsorbed on the mounting seat, a first check ring is arranged on the upper part of the side wall of the main body part, a second check ring is arranged on the lower part of the side wall of the main body part, and a mounting part is reserved between the first check ring and the second check ring;
The rack comprises a cantilever slat, a plurality of mounting notches are formed in the cantilever slat along the length direction of the cantilever slat, the width of each mounting notch is matched with the diameter of each mounting portion, and the height of each mounting notch is smaller than that of each mounting portion.
Optionally, the mount pad includes dabber and mounting disc, dabber fixed connection is in the output shaft lower extreme and the coaxial arrangement of rotary power member, the mounting disc is fixed in the lower extreme of dabber and be suitable for the absorption main part, absorption mechanism still includes air bearing, air bearing includes:
the inner shaft sleeve is fixedly sleeved on the outer side of the mandrel;
The outer shaft sleeve is fixedly connected with the connecting frame, and an air gap is formed between the outer shaft sleeve and the inner shaft sleeve;
the sealing ring is sleeved on the inner shaft sleeve and provided with at least one sealing ring, and the sealing ring separates the air gaps and at least forms a first closed area and a second closed area;
the first air source connector is arranged on the outer shaft sleeve and is communicated with the first closed area;
The second air source connector is arranged on the outer shaft sleeve and is communicated with the second closed area, and the second closed area is communicated with the first air cavity through a first communication hole formed in the inner shaft sleeve and the mandrel.
Optionally, the main body part is connected with the mounting plate through magnetic attraction and negative pressure adsorption to realize double adsorption.
Optionally, the main body part is sealed when adsorbing with the mounting disc and meets in order to form sealed region between the two, be equipped with the lower extreme in the mount pad and extend to the second air cavity in sealed region, the second air cavity is separated from with first air cavity, the sealing washer is equipped with at least two, the sealing washer will the air gap separates and forms first sealed region, second sealed region and third sealed region at least, the air bearing still includes the third air source joint, the third air source joint is located on the outer axle sleeve and with third sealed region intercommunication, the third sealed region is through opening in the second intercommunicating pore of inner axle sleeve and dabber top with the second air cavity intercommunication.
Optionally, the first air cavity is located the center department of mounting disc, the second air cavity is equipped with and is a plurality of and the equipartition that are annular array and distribute in the periphery of first air cavity, the lower surface of mounting disc still fixedly connected with is a plurality of magnets that annular array distributes, and a plurality of magnet equipartitions are in the periphery of second air cavity.
Optionally, a first limit structure is arranged between the main body part and the mounting seat, and a second limit structure is arranged between the main body part and the cantilever lath.
Optionally, the first limit structure includes first spacing post, first spacing breach, location step and constant head tank, first spacing post is protruding to be located the lateral wall of first retaining ring, the lower extreme of mount pad is equipped with annular and keeps off the eaves, first spacing breach is located the lower extreme of annular keeps off the eaves, first spacing post is realized with first spacing breach cooperation pick up the circumference spacing of head, the location step is protruding to be located the top surface center and the upper end lateral wall of main part are established to the conical surface, the constant head tank is located the bottom surface center of mount pad, the location step with the constant head tank cooperation is realized pick up the radial spacing of head.
Optionally, the second limit structure includes second spacing post and second spacing breach, the protruding outer lateral wall of locating of second spacing post installation department, the second spacing breach is located the edge of installation breach and with the opening orientation of installation breach is unanimous.
Optionally, a clamping groove is formed in the upper surface of the mounting notch, and the clamping groove is matched with the first check ring.
Optionally, the rotary power member is a rotary motor.
Compared with the prior art, the technical scheme provided by the invention has the following advantages:
The invention provides an automatic pick-up head switching device which comprises an adsorption mechanism, a pick-up head and a placement frame, wherein the adsorption mechanism comprises a connecting frame, a rotary power piece and a mounting seat, the pick-up head comprises a main body part and a suction nozzle, the placement frame comprises a cantilever slat, and the cantilever slat is provided with a mounting notch. When in use, a plurality of pick-up heads to be used are placed in a plurality of mounting notches; when the pick-up head needs to be replaced, the two actions of pick-up head placement and target pick-up head pick-up are divided; when the pick-up head is placed, the mechanical arm of the patch equipment controls the adsorption mechanism to move, so that the installation part of the main body part is transversely inserted into an idle installation notch, then the adsorption mechanism moves upwards, so that the pick-up head is separated from the adsorption mechanism under the hard contact of the second check ring and the cantilever lath, and then the pick-up head is hung at the strip notch through the first check ring; when the target pickup head picks up, the adsorption mechanism moves to the position right above the pickup head to be used, descends to enable the mounting seat to adsorb the connecting main body part, and then moves transversely to enable the pickup head to be separated from the mounting notch. The device can replace manual work to realize automatic switching of the pick-up head, does not need to stop operation, does not need to carry out repeated calibration of position and precision, greatly improves the working efficiency, and can ensure the repeated consistency of the pick-up action through equipment precision, thereby meeting the patch process requirements of full-automatic multi-chip equipment.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the description of the embodiments or the prior art will be briefly described below, and it will be obvious to those skilled in the art that other drawings can be obtained from these drawings without inventive effort.
FIG. 1 is a perspective view showing an assembling structure of an adsorption mechanism and a pick-up head in an embodiment of the present invention;
FIG. 2 is a cross-sectional view showing an assembling structure of an adsorption mechanism and a pick-up head in an embodiment of the present invention;
FIG. 3 is a perspective view showing the structure of a mounting base according to an embodiment of the present invention;
FIG. 4 is a perspective view showing the structure of a pickup head according to an embodiment of the present invention;
FIG. 5 is a perspective view showing the structure of a rack according to an embodiment of the present invention;
FIG. 6 shows a partial enlarged view at A in FIG. 5;
Fig. 7 shows a partial enlarged view at B in fig. 2.
In the figure:
1. An adsorption mechanism; 11. a connecting frame; 12. a rotary power member; 13. a mounting base; 131. a first air chamber; 132. a mandrel; 133. a mounting plate; 134. a second air chamber; 135. a magnet; 136. a sealing part; 14. an air bearing; 141. an inner sleeve; 142. an outer sleeve; 143. a seal ring; 144. a first enclosed region; 145. a second enclosed region; 146. a first air source connector; 147. a second air source connector; 148. a third enclosed region; 149. a third air source connector; 15. a fixing seat; 16. a coupling; 2. a pick-up head; 21. a main body portion; 211. a first retainer ring; 212. the second check ring; 213. a mounting part; 22. a suction nozzle; 23. an airway; 3. a placing rack; 31. cantilever laths; 311. a mounting notch; 312. a clamping groove; 4. a first limit structure; 41. a first limit post; 42. the first limiting notch; 43. positioning the step; 44. a positioning groove; 45. an annular blocking eave; 5. a second limit structure; 51. the second limit column; 52. and the second limiting notch.
Detailed Description
In order that the above objects, features and advantages of the invention will be more clearly understood, a further description of the invention will be made. It should be noted that, without conflict, the embodiments of the present invention and features in the embodiments may be combined with each other.
In the description, it should be noted that the terms "first," "second," and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. It should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms described above will be understood by those of ordinary skill in the art as the case may be.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced otherwise than as described herein; it will be apparent that the embodiments in the specification are only some, but not all, embodiments of the invention.
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Referring to fig. 1 and 5, the present embodiment provides an automatic pickup head switching device including an adsorption mechanism 1, a pickup head 2, and a placement frame 3.
Referring to fig. 1 and 2, the adsorption mechanism 1 includes a connecting frame 11, a rotary power member 12 and a mounting seat 13, the connecting frame 11 is suitable for being fixedly connected with a mechanical arm of a patch device, a fixing portion of the rotary power member 12 is fixedly connected to the connecting frame 11, an output shaft of the rotary power member 12 is vertically arranged downwards, the mounting seat 13 is fixedly connected with the lower end of the output shaft of the rotary power member 12, and a first air cavity 131 extending to the lower surface of the mounting seat 13 is arranged in the mounting seat 13.
It is easy to understand that the main purpose of the rotary power member 12 herein is to pick up the chip and then rotate, so the rotary power member 12 should be a rotary power member 12 with high precision and controllable angle.
Specifically, the rotary power member 12 is a rotary electric machine. It is easy to understand that, regardless of the type of rotary power member 12, the rotary power member 12 includes a fixed portion, i.e., a portion where the rotary power member 12 is relatively fixed in motion, and an output shaft, i.e., a portion where torque is output, e.g., for a rotary electric machine, the housing is the fixed portion thereof and the rotary shaft is the output shaft thereof.
Specifically, referring to fig. 1 and 2, the fixed portion of the rotary power member 12 is indirectly connected to the connection frame 11 through the fixing base 15.
Specifically, referring to fig. 1 and 2, the output shaft of the rotary power member 12 is indirectly connected to the mount 13 via a coupling 16.
Specifically, referring to fig. 3, the mounting base 13 includes a spindle 132 and a mounting plate 133, the spindle 132 is fixedly connected to the lower end of the output shaft of the rotary power member 12 and coaxially arranged, and the mounting plate 133 is fixed to the lower end of the spindle 132.
More specifically, referring to fig. 2, the first air chamber 131 is an axial column chamber formed at the center of the mandrel 132 and the mounting plate 133, the top of the axial column chamber is sealed, and the side of the axial column chamber is connected to an air source.
Further, referring to fig. 1 and 2, the adsorption mechanism 1 further includes an air bearing 14, and the air bearing 14 includes an inner sleeve 141, an outer sleeve 142, a seal ring 143, a first air source connector 146, and a second air source connector 147; the inner shaft sleeve 141 is fixedly sleeved on the outer side of the mandrel 132; the outer sleeve 142 is fixedly connected with the connecting frame 11, and an air gap is formed between the outer sleeve 142 and the inner sleeve 141; the sealing ring 143 is sleeved on the inner shaft sleeve 141 and is provided with at least one sealing ring, the sealing ring 143 separates the air gaps and at least forms a first sealing area 144 and a second sealing area 145; the first air source connector 146 is arranged on the outer shaft sleeve 142 and is communicated with the first closed area 144; the second air source connector 147 is disposed on the outer sleeve 142 and communicates with the second enclosed area 145, and the second enclosed area 145 communicates with the first air chamber 131 through a first communication hole formed on the inner sleeve 141 and the mandrel 132. In operation, the first air supply connection 146 connects to an air supply to inject high pressure air into the first enclosed region 144 as a lubricant for the air bearing 14; the second air source connection 147 is connected to a negative pressure device to sequentially pass through the second closed region 145, the first communication hole, and the first air chamber 131 so that the pickup head 2 outputs a negative pressure. The structure utilizes the structural characteristics of the air bearing 14, so that the pick-up head 2 rotates more stably, and the technical problem of keeping the air pipeline fixed when the pick-up head 2 rotates is solved skillfully.
Specifically, the first communication holes are uniformly distributed along the circumferential direction and are all communicated with the first air cavity 131.
Referring to fig. 2 and 4, the pickup head 2 includes a main body 21 and a suction nozzle 22, the main body 21 is adapted to be connected under the mounting base 13 by suction, the suction nozzle 22 is fixedly connected under the main body 21, the main body 21 and the suction nozzle 22 are provided with an air channel 23, the lower end of the air channel 23 extends to an air hole of the suction nozzle 22, the upper end of the air channel 23 is adapted to be in sealing communication with the first air cavity 131 when the main body 21 is adsorbed on the mounting base 13, a first retaining ring 211 is provided on the upper portion of the side wall of the main body 21, a second retaining ring 212 is provided on the lower portion of the side wall of the main body 21, and a mounting portion 213 is left between the first retaining ring 211 and the second retaining ring 212.
The air passage 23 is a passage structure with two open ends.
Specifically, referring to fig. 2,3 and 7, the lower end of the mandrel 132 is provided with a tapered sealing portion 136, and when the mandrel 132 is in contact with the main body portion 21, the tapered sealing portion 136 covers around the upper end opening of the air passage 23, thereby achieving sealed communication.
Specifically, the main body 21 and the mounting plate 133 are connected by magnetic attraction and negative pressure attraction to realize double attraction. During operation, the magnetic attraction is firstly absorbed, so that the mandrel 132 is in sealing communication with the main body 21, and then negative pressure absorption is started, and the dual functions of magnetic attraction and negative pressure absorption ensure the rigidity requirement of the connection of the pick-up head 2 and the absorption mechanism 1.
More specifically, referring to fig. 2, the main body 21 is in sealing contact with the mounting plate 133 when being adsorbed to form a sealed area therebetween, a second air chamber 134 is provided in the mounting seat 13, the lower end of the second air chamber 134 extends to the sealed area, the second air chamber 134 is separated from the first air chamber 131, at least two sealing rings 143 are provided, the sealing rings 143 separate the air gaps and form at least a first sealed area 144, a second sealed area 145 and a third sealed area 148, the air bearing 14 further comprises a third air source connector 149, the third air source connector 149 is provided on the outer sleeve 142 and is communicated with the third sealed area 148, and the third sealed area 148 is communicated with the second air chamber 134 through a second communication hole provided on the inner sleeve 141 and the spindle 132. In operation, the third air supply connector 149 is connected to an air supply to inject positive pressure air or draw a vacuum into the third enclosed region 148. The structure skillfully solves the technical problem of keeping the gas pipeline fixed when the pick-up head 2 rotates.
In detail, referring to fig. 2, the first air cavity 131 is located at the center of the mounting plate 133, the second air cavity 134 is provided with a plurality of magnets 135 distributed in an annular array and uniformly distributed around the first air cavity 131, and a plurality of magnets 135 distributed in an annular array are fixedly connected to the lower surface of the mounting plate 133 and uniformly distributed around the second air cavity 134. The magnetic attraction areas, the negative pressure attraction connection areas and the negative pressure attraction function areas of the pick-up head 2 are sequentially arranged from outside to inside, the layout is reasonable, and the attraction connection of the pick-up head 2 is firmer.
It should be noted that, six sealing rings 143 shown in fig. 2 are provided to divide the air gap into a first sealing region, a second sealing region, a third sealing region, a fourth sealing region and a fifth sealing region which are distributed in sequence from top to bottom; wherein seal one and seal five act as a first seal 144 and are in communication with a first air supply connection 146 adapted to provide air to the air bearing 14; the third sealing area is used as a second sealing area 145 and is communicated with a second air source joint 147 to provide air for the first air cavity 131 so that the pick-up head 2 can adsorb chips; wherein seal area four acts as a third enclosed area 148 and communicates with a third gas source connection 149 for providing gas to the second gas cavity 134. The second communication hole can be seen in fig. 2, but the first communication hole is not present in this cross-sectional angle.
Further, referring to fig. 4, a first limiting structure 4 is provided between the main body 21 and the mounting base 13, and a second limiting structure 5 is provided between the main body 21 and the cantilever lath 31. The first limiting structure 4 can ensure that the connection posture of the pick-up head 2 is kept stable, and the offset position shifting of the pick-up head 2 during rotation is avoided; the second limit structure 5 can ensure that the placing posture of the pick-up head 2 is kept consistent, and is more beneficial to the pick-up action of the adsorption mechanism 1 on the pick-up head 2.
Specifically, referring to fig. 3 and 4, the first limiting structure 4 includes a first limiting post 41, a first limiting notch 42, a positioning step 43 and a positioning groove 44, the first limiting post 41 is convexly arranged on the outer side wall of the first retainer ring 211, an annular stop eave 45 is arranged at the lower end of the mounting seat 13, the first limiting notch 42 is arranged at the lower end of the annular stop eave 45, the first limiting post 41 and the first limiting notch 42 cooperate to realize circumferential limitation of the pick-up head 2, the positioning step 43 is convexly arranged at the top surface center of the main body 21, the upper side wall is provided with a conical surface, the positioning groove 44 is arranged at the bottom surface center of the mounting seat 13, and the positioning step 43 and the positioning groove 44 cooperate to realize radial limitation of the pick-up head 2.
Specifically, referring to fig. 4 to6, the second limiting structure 5 includes a second limiting post 51 and a second limiting notch 52, the second limiting post 51 is convexly disposed on an outer sidewall of the mounting portion 213, and the second limiting notch 52 is disposed at an edge of the mounting notch 311 and is oriented in accordance with an opening of the mounting notch 311.
It is easy to understand that the second limiting notch 52 is required to be aligned with the opening of the mounting notch 311, because the pick-up head 2 needs to be moved into the mounting notch 311 transversely when being placed, that is, moved into the mounting notch 311 along the opening of the mounting notch 311 in the opposite direction, so that the second limiting post 51 can be smoothly inserted into the second limiting notch 52 only when the opening of the second limiting notch 52 is aligned with the mounting notch 311.
Referring to fig. 5 and 6, the rack 3 includes a cantilever lath 31, and the cantilever lath 31 is provided with a plurality of mounting notches 311 along a length direction thereof, a width of the mounting notch 311 is adapted to a diameter of the mounting portion 213, and a height of the mounting notch 311 is smaller than a height of the mounting portion 213.
Specifically, the main structure of the rack 3 is an L-shaped rack, and the cantilever lath 31 is disposed at the edge of the L-shaped rack.
It is easy to understand that the height of the mounting notch 311 needs to be smaller than the height of the mounting portion 213, so as to ensure that the first retaining ring 211 and the second retaining ring 212 can be respectively located at the upper side and the lower side of the mounting notch 311 when the pickup 2 moves laterally into the mounting notch 311, so that the pickup 2 is limited in the mounting notch 311.
Specifically, referring to fig. 6, a clamping groove 312 is formed on the upper surface of the mounting notch 311, and the clamping groove 312 is adapted to the first retaining ring 211. The first retainer ring 211 is matched with the clamping groove 312, so that the placement accuracy of the pick-up head 2 is higher, and the consistency of the placement posture of the pick-up head 2 is better maintained.
The working process of the automatic pick-up head switching device of the embodiment is as follows:
When the pick-up head 2 is placed, the mechanical arm of the patch device controls the adsorption mechanism 1 to move, so that the mounting part 213 of the main body part 21 is transversely inserted into the idle mounting notch 311, at this time, the first check ring 211 and the second check ring 212 are respectively positioned on the upper side and the lower side of the mounting notch 311, then the negative pressure adsorption of the second air cavity 134 is released, the adsorption mechanism 1 moves upwards, and the pick-up head 2 is separated from the adsorption mechanism 1 under the hard contact of the second check ring 212 and the cantilever lath 31, and then is hung at the mounting notch 311 through the first check ring 211;
When the target pickup head 2 is picked up, the adsorption mechanism 1 moves to the position right above the pickup head 2 to be used, then positive pressure air flow is blown out to the position above the pickup head 2 through the second air cavity 134, the mounting disc 133 is magnetically attracted to be connected with the main body part 21 under the buffer effect of the air flow, collision between the pickup head 2 and the mounting seat 13 is avoided, then the positive pressure is relieved, the negative pressure is started, the mounting disc 133 is simultaneously attracted to be connected with the negative pressure through the magnetic attraction, and finally the pickup head 2 is separated from the mounting notch 311 through transverse movement.
The foregoing is merely exemplary of embodiments of the present invention to enable those skilled in the art to understand or practice the invention. Although described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the embodiments, and they should be construed as covering the scope of the appended claims.
Claims (6)
1. An automatic pickup head switching device, comprising:
The adsorption mechanism (1) comprises a connecting frame (11), a rotary power piece (12) and a mounting seat (13), wherein the connecting frame (11) is suitable for being fixedly connected with a mechanical arm of the patch equipment, a fixing part of the rotary power piece (12) is fixedly connected to the connecting frame (11), an output shaft of the rotary power piece (12) is vertically downwards arranged, the mounting seat (13) is fixedly connected with the lower end of the output shaft of the rotary power piece (12), and a first air cavity (131) extending to the lower surface of the mounting seat (13) is arranged in the mounting seat;
Pick-up head (2), it includes main part (21) and suction nozzle (22), main part (21) are suitable for the absorption and are connected in the below of mount pad (13), suction nozzle (22) fixed connection is in the below of main part (21), air flue (23) have been seted up to main part (21) and suction nozzle (22), the lower extreme of air flue (23) extends to the gas pocket of suction nozzle (22), the upper end of air flue (23) is suitable for when main part (21) adsorb on mount pad (13) sealed intercommunication first air cavity (131), the lateral wall upper portion of main part (21) is equipped with first retaining ring (211), the lateral wall lower part of main part (21) is equipped with second retaining ring (212), leave installation department (213) between first retaining ring (211) and second retaining ring (212).
The rack (3) comprises a cantilever slat (31), wherein a plurality of mounting notches (311) are formed in the cantilever slat (31) along the length direction of the cantilever slat, the width of the mounting notches (311) is matched with the diameter of the mounting part (213), and the height of the mounting notches (311) is smaller than the height of the mounting part (213);
The mounting seat (13) comprises a core shaft (132) and a mounting disc (133), the core shaft (132) is fixedly connected to the lower end of an output shaft of the rotary power part (12) and is coaxially arranged, the mounting disc (133) is fixed to the lower end of the core shaft (132) and is suitable for adsorbing the main body part (21), the adsorption mechanism (1) further comprises an air bearing (14), the air bearing (14) comprises an inner shaft sleeve (141), an outer shaft sleeve (142), a sealing ring (143), a first air source connector (146) and a second air source connector (147), the inner shaft sleeve (141) is fixedly sleeved on the outer side of the core shaft (132), the outer shaft sleeve (142) is fixedly connected with the connecting frame (11), an air gap is formed between the outer shaft sleeve (142) and the inner shaft sleeve (141), the sealing ring (143) is sleeved on the inner shaft sleeve (141) and is provided with at least one, the air gap is separated and at least forms a first sealing zone (144) and a second sealing zone (145), the first air source connector (146) is fixedly sleeved on the outer shaft sleeve (142) and is communicated with the second sealing zone (145), the second closed area (145) is communicated with the first air cavity (131) through a first communication hole formed in the inner sleeve (141) and the mandrel (132); the main body part (21) and the mounting disc (133) are in double adsorption connection through magnetic attraction and negative pressure adsorption; the main body part (21) is in sealing connection with the mounting disc (133) when being adsorbed to form a sealed area between the main body part and the mounting disc (133), a second air cavity (134) with the lower end extending to the sealed area is arranged in the mounting seat (13), the second air cavity (134) is separated from the first air cavity (131), the sealing ring (143) is provided with at least two sealing rings, the sealing ring (143) separates the air gaps and at least forms a first sealed area (144), a second sealed area (145) and a third sealed area (148), the air bearing (14) further comprises a third air source connector (149), the third air source connector (149) is arranged on the outer sleeve (142) and is communicated with the third sealed area (148), and the third sealed area (148) is communicated with the second air cavity (134) through a second communication hole which is formed on the inner sleeve (141) and the mandrel (132); the first air cavity (131) is located in the center of the mounting disc (133), the second air cavity (134) is provided with a plurality of magnets (135) which are distributed in an annular array and uniformly distributed around the first air cavity (131), the lower surface of the mounting disc (133) is fixedly connected with a plurality of magnets (135) which are distributed in an annular array, and the plurality of magnets (135) are uniformly distributed around the second air cavity (134).
2. The automatic pickup switching device according to claim 1, wherein a first limit structure (4) is provided between the main body portion (21) and the mount (13), and a second limit structure (5) is provided between the main body portion (21) and the cantilever lath (31).
3. The automatic pick-up head switching device according to claim 2, wherein the first limiting structure (4) comprises a first limiting column (41), a first limiting notch (42), a positioning step (43) and a positioning groove (44), the first limiting column (41) is convexly arranged on the outer side wall of the first check ring (211), an annular stop eave (45) is arranged at the lower end of the mounting seat (13), the first limiting notch (42) is arranged at the lower end of the annular stop eave (45), the first limiting column (41) and the first limiting notch (42) are matched to achieve circumferential limiting of the pick-up head (2), the positioning step (43) is convexly arranged at the top surface center of the main body part (21) and the upper end side wall is arranged as a conical surface, the positioning groove (44) is arranged at the bottom surface center of the mounting seat (13), and the positioning step (43) and the positioning groove (44) are matched to achieve radial limiting of the pick-up head (2).
4. The automatic pickup switching device according to claim 2, wherein the second limiting structure (5) comprises a second limiting post (51) and a second limiting notch (52), the second limiting post (51) is convexly arranged on the outer side wall of the mounting portion (213), and the second limiting notch (52) is arranged at the edge of the mounting notch (311) and is consistent with the opening direction of the mounting notch (311).
5. The automatic pickup switching device according to claim 1, wherein a clamping groove (312) is provided on an upper surface of the mounting notch (311), and the clamping groove (312) is adapted to the first retainer ring (211).
6. The automatic pickup head switching device according to claim 1, wherein the rotary power member (12) is a rotary motor.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410238646.7A CN117835688B (en) | 2024-03-04 | 2024-03-04 | Automatic switching device for pick-up head |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410238646.7A CN117835688B (en) | 2024-03-04 | 2024-03-04 | Automatic switching device for pick-up head |
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| CN117835688A CN117835688A (en) | 2024-04-05 |
| CN117835688B true CN117835688B (en) | 2024-06-25 |
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| CN202410238646.7A Active CN117835688B (en) | 2024-03-04 | 2024-03-04 | Automatic switching device for pick-up head |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113120599A (en) * | 2021-04-02 | 2021-07-16 | 深圳市锐博自动化设备有限公司 | Automatic switching mechanism and method for suction nozzle |
| CN113226006A (en) * | 2021-05-07 | 2021-08-06 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module and using method thereof |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3920171B2 (en) * | 2002-08-22 | 2007-05-30 | 松下電器産業株式会社 | Component mounting optimization method, component mounting optimization device, component mounting optimization program, and component mounting device |
| JP5455117B2 (en) * | 2009-11-17 | 2014-03-26 | 富士機械製造株式会社 | Component mounter |
| WO2014068673A1 (en) * | 2012-10-30 | 2014-05-08 | 富士機械製造株式会社 | Nozzle managing apparatus |
| JP6246212B2 (en) * | 2013-08-08 | 2017-12-13 | 富士機械製造株式会社 | Component mounter |
| JP7053528B2 (en) * | 2019-04-10 | 2022-04-12 | 株式会社Fuji | Rotary head type component mounting machine |
| CN114222443A (en) * | 2021-11-08 | 2022-03-22 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Flexible patch head structure with high pick-up rate and capable of rotating by 360 degrees |
| KR20230130982A (en) * | 2022-03-04 | 2023-09-12 | 에스케이하이닉스 주식회사 | Picker for transferring die and die bonding apparatus comprising the same |
| CN116864439B (en) * | 2023-09-04 | 2023-12-26 | 恩纳基智能科技无锡有限公司 | Chip adsorption mechanism based on air bearing |
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2024
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113120599A (en) * | 2021-04-02 | 2021-07-16 | 深圳市锐博自动化设备有限公司 | Automatic switching mechanism and method for suction nozzle |
| CN113226006A (en) * | 2021-05-07 | 2021-08-06 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module and using method thereof |
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