CN117824533A - Active thread and contour scanning device - Google Patents
Active thread and contour scanning device Download PDFInfo
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- CN117824533A CN117824533A CN202410011971.XA CN202410011971A CN117824533A CN 117824533 A CN117824533 A CN 117824533A CN 202410011971 A CN202410011971 A CN 202410011971A CN 117824533 A CN117824533 A CN 117824533A
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- 238000005259 measurement Methods 0.000 claims abstract description 62
- 230000008713 feedback mechanism Effects 0.000 claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 37
- 238000006073 displacement reaction Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 13
- 238000012544 monitoring process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 38
- 230000008569 process Effects 0.000 abstract description 13
- 230000009194 climbing Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 241001422033 Thestylus Species 0.000 description 8
- 230000002238 attenuated effect Effects 0.000 description 8
- 230000006872 improvement Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2425—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of screw-threads
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Abstract
The invention provides an active thread and contour scanning device which comprises a measuring needle, a force measuring feedback mechanism, a measuring rod horizontally arranged, a horizontal tension detecting mechanism and a motion system, wherein the measuring needle is arranged on the force measuring feedback mechanism, the force measuring feedback mechanism is connected with the horizontal tension detecting mechanism through the measuring rod, the horizontal tension detecting mechanism is connected with the motion system, and the horizontal tension detecting mechanism reflects the tension of the measuring needle in the horizontal direction to form a specific relation by using deformation. The beneficial effects of the invention are as follows: by adjusting the force measurement in real time, the force measurement is ensured to be basically constant in the measurement process, and further the measured data is ensured to reflect the thread and the contour surface more truly; the problems of climbing and descending in the scanning process, such as the situation that the measuring needle is separated from the surface of the workpiece, and the measuring needle is blocked and damaged, are solved; the scanning speed is improved.
Description
The present application is a divisional application of patent application with application date 2017, 12, 5, 2017112682895 and entitled "active thread and profile scanning device and method".
Technical Field
The invention relates to a measuring instrument, in particular to an active thread and profile scanning device in the measuring instrument.
Background
In the thread and contour measurement process, the measuring needle and the surface to be measured are used for contact scanning, and the force measurement between the measuring needle and the surface to be measured is an important factor affecting the accuracy of the thread and the contour. In the process of scanning the threads and the contours, the force measurement of the measuring needle acting on the surface of the measured workpiece needs to be kept constant; the position of the measuring needle needs to be adjusted in time at the downhill slope, so that the measuring needle is not separated from the surface of a measured workpiece, and the position of the measuring needle needs to be adjusted in time at the steep-slope position on the uphill slope, so that the measuring needle is not clamped.
In the conventional constant force scanning scheme for the surface of the measuring needle and the profile, most of the scanning schemes are passive scanning, namely the position of the measuring needle is not actively adjusted on the surface of a vertical workpiece, but is passively adjusted along with the surface concave-convex of the scanned workpiece. The applied force values of the passive scanning device are all theoretically constant: such as by a voice coil motor or other mechanism capable of generating a constant force, to a stylus using a lever. The passive scanning device is characterized in that a complete feedback mechanism is not provided for adjusting the force measurement in the scanning process, and the force measurement is not adjusted in real time.
Passive scanning does not maintain a truly constant force when scanning a workpiece with a rugged surface. At the downhill slope of the scanning rough surface, the stylus may temporarily disengage from the workpiece surface under the influence of inertia until it again contacts the workpiece surface under the influence of the force of measurement. At the uphill slope of the scanned rough surface, the stylus is kept at the current position under the action of inertia until the horizontal pulling up gives the stylus a lifting force to continue climbing, and in the process, the force measurement of the scanned workpiece surface is not constant.
The prior passive thread scanning device mainly has the following defects:
(1) The stylus is subject to wear.
(2) When scanning the ladder-shaped thread and the contour with a large gradient, the force measurement is larger, and even the measuring needle is blocked.
(3) The needle can be easily separated from the surface when scanning the ladder-shaped thread and the large-gradient profile, so that the measured data cannot truly reflect the appearance of the thread and the large-gradient profile.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides an active thread and profile scanning device and method.
The invention provides an active thread and profile scanning device which comprises a measuring needle, a force measuring feedback mechanism, a measuring rod horizontally arranged, a horizontal tension detecting mechanism and a motion system, wherein the measuring needle is arranged on the force measuring feedback mechanism, the force measuring feedback mechanism is connected with the horizontal tension detecting mechanism through the measuring rod, and the horizontal tension detecting mechanism is connected with the motion system.
As a further improvement of the invention, the motion system comprises a measuring rod vertical axis direction motion system and a horizontal direction motion system, the horizontal tension detection mechanism is connected with the measuring rod vertical axis direction motion system, and the measuring rod vertical axis direction motion system is connected with the horizontal direction motion system.
As a further improvement of the invention, the force measurement feedback mechanism comprises an elastic device capable of swinging in the vertical direction of the measuring rod and a first displacement sensor for monitoring the deformation of the elastic device, and the elastic device is connected between the measuring needle and the measuring rod.
As a further improvement of the invention, the horizontal tension detecting mechanism comprises a horizontal direction elastic device, a second displacement sensor capable of detecting stretching deformation, and a guide rail for limiting the horizontal direction elastic device to deform only in the horizontal direction, wherein the horizontal direction elastic device is arranged on the guide rail, and the measuring rod is connected with the horizontal direction elastic device.
As a further improvement of the invention, the motion system comprises a measuring rod vertical axis direction motion system and a horizontal direction motion system, the measuring rod is connected with the measuring rod vertical axis direction motion system, the horizontal tension detection mechanism is connected with the horizontal direction motion system, a fulcrum is arranged on the measuring rod, and the horizontal tension detection mechanism is connected with the measuring rod in a swinging way through the fulcrum.
As a further improvement of the invention, one end of the measuring rod is connected with the force measuring feedback mechanism, and the other end of the measuring rod is connected with the measuring rod vertical axis direction movement system.
As a further improvement of the invention, the force measurement feedback mechanism comprises an elastic swinging piece and a first displacement sensor capable of detecting the deformation quantity of the elastic swinging piece, and the elastic swinging piece is connected between the measuring needle and the measuring rod.
As a further improvement of the present invention, the horizontal tension detecting mechanism includes a horizontal direction elastic device, a second displacement sensor capable of detecting tensile deformation, and a guide rail defining the horizontal direction elastic device to deform only in the horizontal direction, the horizontal direction elastic device being provided on the guide rail, the horizontal direction elastic device being swingably connected with the measuring bar through the fulcrum.
The invention also provides an active thread and profile scanning method based on the active thread and profile scanning device, which comprises the following steps:
s1, controlling a workpiece to be followed by constant force measurement of a measuring needle, adopting a force measurement feedback mechanism to reflect the force measurement relation between the measuring needle and the workpiece by using deformation, and controlling the speed and the direction of movement of a vertical shaft according to feedback data of the force measurement feedback mechanism to realize the workpiece to be followed by constant force measurement;
s2, limiting the horizontal scanning speed, namely adopting a horizontal tension detection mechanism to reflect the relation of tension of the measuring needle in the horizontal direction by using the deformation quantity, attenuating or stopping the scanning speed in the horizontal direction when the force measurement feedback value is smaller than a certain value, attenuating or stopping the scanning speed in the horizontal direction when the horizontal tension detection mechanism is larger than a certain value, and setting the vertical axis movement direction as the force measurement reducing direction.
As a further development of the invention, in step S1,
the constant force measurement of the measuring needle follows the workpiece control, the motion in the vertical direction with the measuring rod is controlled according to the feedback value of the force measurement feedback mechanism, the measuring needle receives the force measurement N of the vertical profile surface when the gradient of the surface of the measured workpiece is scanned at an angle theta, and the force is decomposed into: the pulling force F and the vertical acting force G of the measuring needle have the following relation
G＝N·cosθ
F＝N·sinθ
The deformation L fed back by the force measuring feedback mechanism is in direct proportion to the force value G borne by the measuring needle, the proportionality coefficient is K1, the proportionality coefficient is obtained through calibration, in the scanning process, the constant scanning force measuring is set to be N0, and when the force measuring is N0, the feedback amount of the force measuring feedback mechanism is L0:
L0＝K1·N0·cosθ
setting every T period for the feedback value of the force measuring feedback mechanism to be kept near L0, and controlling the movement direction and the speed V of the movement element perpendicular to the direction of the measuring rod once;
when the feedback value L of the force measurement feedback mechanism is larger than L0, the movement direction of the moving element perpendicular to the direction of the measuring rod is positive, namely the force measurement reducing direction, and the movement speed of the executing element is set as follows:
V＝k2·(L-L0)
wherein k2 is a proportionality coefficient, and is obtained through debugging;
when the feedback value L of the force measurement feedback mechanism is smaller than L0, the movement direction of the moving element perpendicular to the direction of the measuring rod is negative, namely the force measurement increasing direction, and the movement speed of the executing element is set as follows:
V＝k3·(L0-L)
wherein k3 is a proportionality coefficient, and is obtained through debugging;
in the step S2 of the process of the present invention,
setting a feedback value L11 of the force measurement feedback mechanism to be separated from the surface of the workpiece, wherein the feedback value is L12 when the force measurement is performed in the minimum scanning, the feedback value is L21 when the force measurement is performed in the maximum scanning, and the feedback value is L22 when the force measurement is performed in the excessive scanning; and has the following components:
0<L11<L12<L0<L21<L22
defining a movement speed of a horizontal axis by using a feedback value of the force-measuring feedback mechanism, and when the force-measuring feedback value L is within a set range L12< L < L21, operating the horizontal axis at a calculated scanning speed of the target; when the force measurement feedback force value is smaller than L11 or larger than L22, horizontal scanning is stopped; when the force feedback value is within the range of L21< L22 and L11< L12, operating at a target speed of proportional decay.
The beneficial effects of the invention are as follows: by adjusting the force measurement in real time, the force measurement is ensured to be basically constant in the measurement process, and further the measured data is ensured to reflect the thread and the contour surface more truly; the problems of climbing and descending in the scanning process, such as the situation that the measuring needle is separated from the surface of the workpiece, and the measuring needle is blocked and damaged, are solved; the scanning speed is improved.
Drawings
FIG. 1 is a schematic diagram of the force exerted by a stylus on the surface of a workpiece being measured.
FIG. 2 is a schematic diagram showing the motion speed of the horizontal axis defined by the force feedback values of an active thread and profile scanning device according to the present invention.
FIG. 3 is a schematic view of a horizontal pull limiting scan speed of an active thread and profile scanning apparatus according to the present invention.
FIG. 4 is a schematic view of an embodiment of an active thread and profile scanning apparatus according to the present invention.
FIG. 5 is a schematic diagram of a second embodiment of an active thread and profile scanning apparatus according to the present invention.
Detailed Description
The invention is further described with reference to the following description of the drawings and detailed description.
An active thread and contour scanning method comprises a control method for a measuring needle to constantly measure force and follow a workpiece and a horizontal scanning speed limiting method.
According to the control method for the constant force-measuring following workpiece of the measuring needle, the speed and the direction of the vertical axis movement are controlled at a higher frequency according to the feedback data of the force-measuring feedback mechanism, so that the constant force-measuring following workpiece is realized.
According to the horizontal scanning speed limiting method, when the force measurement feedback value is smaller than a certain value, the scanning speed in the horizontal direction is attenuated or even stopped, when the horizontal tension detection mechanism is larger than a certain value, the scanning speed in the horizontal direction is attenuated or even stopped, and meanwhile, the vertical axis movement direction is set upwards, so that the reliability of measured data is guaranteed.
In order to implement the above method, the present invention provides an active thread and profile scanning device with a feedback portion, comprising a force measuring feedback mechanism, a horizontal tension detecting mechanism, a vertical axis movement system of a measuring rod, and a horizontal direction movement system.
The force measurement feedback mechanism is characterized in that an elastic device capable of swinging in the vertical direction of the measuring rod and a set of displacement sensor for monitoring the deformation of the elastic device are arranged at the measuring needle end; the mechanism is characterized in that deformation can be used for reflecting the specific relation between the measuring needle and the workpiece.
The horizontal tension detection mechanism is characterized in that a set of sliding rod, an elastic device and a displacement sensor are arranged in the horizontal direction of the measuring rod, the tensile force applied to the horizontal direction of the measuring needle can deform on the elastic device, the sliding rod limits the elastic device to deform only in the direction parallel to the measuring rod (horizontal direction), and the displacement sensor can monitor the deformation amount of the elastic device in the horizontal direction. The mechanism is characterized in that the deformation quantity can be used for reflecting the tensile force of the measuring needle in the horizontal direction to form a specific relation.
The perpendicular to staff direction motion system includes: an actuator with micrometer-scale motion accuracy for performing a motion in a direction of a vertical axis of the stylus, and a displacement sensor for detecting the amount of motion.
The horizontal direction movement system includes: a motion actuator, high precision guide rails, and a displacement sensor capable of indicating the amount of motion.
The invention provides an active thread and profile scanning method, which comprises two main contents.
(1) The control method for the constant force measurement following workpiece of the measuring needle comprises the following steps: and controlling the speed and the direction of the vertical axis motion of the measuring rod at a higher frequency according to the feedback data of the force measuring feedback mechanism.
The basic content of the control method for the constant force measurement of the measuring needle and the following of the workpiece is to control the movement in the vertical direction of the measuring rod according to the feedback value of the force measurement feedback mechanism. As shown in fig. 1, the force N applied by the stylus to the vertical profile surface during the angle θ scan of the surface of the workpiece can be decomposed into: the tensile force F and the vertical acting force G of the measuring needle have the following relation:
G＝N·cosθ
F＝N·sinθ
the deformation L fed back by the force measuring feedback mechanism is in direct proportion to the force value G born by the measuring needle, and the proportionality coefficient is K 1 The coefficient is obtained by calibration. In the scanning process, setting constant scanning force to N 0 The force is measured as N 0 The feedback quantity of the force measurement feedback mechanism is L 0 The method comprises the following steps:
L 0 ＝K 1 ·N 0 ·cosθ
maintaining L for force feedback mechanism feedback value 0 In the vicinity, the movement direction and the speed V of the movement element perpendicular to the spindle direction are set to be controlled once every T cycles (the cycles are short).
The feedback value L of the force-measuring feedback mechanism is larger than L 0 When the movement direction of the movement element perpendicular to the measuring bar direction is positive (force-measuring decreasing direction), the movement speed of the actuator element is set as follows:
V＝k 2 ·(L-L 0 )
k in 2 Is a proportionality coefficient, and is obtained through debugging.
The feedback value L of the force-measuring feedback mechanism is smaller than L 0 At this time, the movement direction of the movement element perpendicular to the spindle direction is negative (force measurement increasing direction), and the movement speed of the actuator is set to be:
V＝k 3 ·(L 0 -L)
k in 3 Is a proportionality coefficient, and is obtained through debugging.
(2) Horizontal scanning speed limiting method: when the force measurement feedback value is not in the set range, the scanning speed in the horizontal direction is attenuated or even stopped; when the horizontal tension detecting mechanism is larger than a certain value, the scanning speed in the horizontal direction is attenuated or even stopped, and meanwhile, the moving direction of the vertical axis is the force measuring reducing direction.
The horizontal movement in thread and contour scanning is related to scanning speed, needle protection condition, data authenticity and the like. The invention utilizes the force measurement feedback mechanism and the horizontal tension feedback mechanism to limit the movement condition of the horizontal shaft.
Setting the feedback value of the force measuring feedback mechanism to be separated from the surface of the workpiece as L 11 The feedback value is L during the minimum scanning force measurement 12 The feedback value is L at the time of maximum scanning force measurement 21 The feedback value is L when the force is too large 22 The method comprises the steps of carrying out a first treatment on the surface of the And has the following components:
0<L 11 <L 12 <L 0 <L 21 <L 22
the feedback value of the force measurement feedback mechanism is utilized to limit the movement speed of the horizontal shaft, so that the measurement of the force measurement constancy and the authenticity of the result can be ensured. As shown in FIG. 2, when the force feedback value L is within the set range L 12 <L<L 21 The horizontal axis runs at the calculated scanning speed of the target; when the force measurement feedback force value is smaller than L 11 Or greater than L 22 When the horizontal scanning is stopped; when the force feedback value is L 21 <L<L 22 And L 11 <L<L 12 And when the target running speed is in the range, the target running speed is attenuated proportionally, so that the too small force measurement or the too large force measurement is prevented.
When a part of a special workpiece is scanned (such as a local 90-degree ascending slope of the surface of the workpiece, cos θ=0), the phenomenon that the top end of a probe is not contacted with the workpiece easily occurs, the feedback value of the vertical probe direction is smaller or is 0, the feedback output value of the horizontal direction is larger, and if the horizontal direction scanning is continued, the probe is possibly blocked.
Setting the value of the horizontal tension feedback mechanism as X, and setting the allowable value of the horizontal tension as X during normal scanning 0 Judging that the feedback value of the horizontal pulling force is X when the measuring needle is clamped 1 The method comprises the following steps: 0<X 0 <X 1 。
As shown in FIG. 3, when the horizontal tension feedback value is largeAt X 0 When the measuring rod moves in the vertical direction, the movement direction of the movement executing element is positive (the direction of separating from the surface of the workpiece), and the movement speed of the horizontal axis is attenuated to be very low; when the tension feedback value is greater than X 1 When the measuring rod moves in the vertical direction, the movement direction of the movement executing element is positive (the direction of separating from the surface of the workpiece), the movement of the horizontal shaft is stopped, and the damage to the measuring needle is avoided.
To implement the method of the present invention, an active thread and profile scanning device having a feedback portion is provided, the device comprising: force feedback mechanism, horizontal tension detection mechanism, vertical stylus direction motion system and horizontal direction motion system, and provides two possible implementations, but is not limited to these two implementations.
(1) Example 1
As shown in fig. 4, the force feedback mechanism 1 is composed of an elastic device 11 and a displacement sensor 12 capable of detecting the deformation amount of the elastic device. During normal scanning, the measuring needle 4 contacts the thread 7 with a constant measuring force N, the elastic device 11 can be slightly deformed, and the deformation L can be detected by the displacement sensor 12. When the measuring needle is in a horizontal plane, the deformation L is in direct proportion to the measuring force N, and the coefficient is k1, wherein k1 is obtained through calibration.
The horizontal tension detecting mechanism has a horizontal direction elastic device 21, a displacement sensor 23 capable of detecting tension deformation, and a guide rail 22 for restricting the elastic device 21 to deform only in the horizontal direction. The friction between the measuring rod 3 and the guide rail 22 is very small, the measuring needle is subjected to a horizontal tensile force F, the force F can be basically reflected in the elastic device 21, and a small tensile deformation is generated, and the deformation amount X is detected by the displacement sensor 23. The relationship between the variable X and the tensile force F of the measuring needle in the horizontal direction is as follows: x=kx·f, where kx is obtained by calibration.
The vertical stylus direction movement system consists of a movement actuator 51, a guide rail 52, and a displacement sensor 53. The rail 52 is a low friction rail, and the displacement sensor 53 is capable of measuring the amount of motion in the vertical direction of the shaft. The resolution of the motion actuator 51 is on the order of microns, the motion of the motion actuator 51 can reduce the force measurement (positive in direction) or increase the force measurement (negative in direction), and the control of the vertical stylus direction can achieve constant force measurement of the stylus contacting the workpiece surface.
The horizontal movement system consists of a movement executing element 61, a guide rail 62 and a displacement sensor 63, and the horizontal control can realize the scanning of the threads.
(2) Example two
Fig. 5 shows another embodiment of the present invention, in which the force-feedback mechanism is the same as the first embodiment, and the force-feedback mechanism 1 is composed of an elastic device 11 and a displacement sensor 12 capable of detecting the deformation amount of the elastic device. The horizontal tension detecting mechanism is also the same as the first method, and has a horizontal direction elastic device 21, a displacement sensor 23 capable of detecting tensile deformation, and a guide rail 22 for restricting the elastic device 21 to deform only in the horizontal direction. The horizontal movement system is the same as the first embodiment, and comprises a movement executing element 61, a guide rail 62 and a displacement sensor 63.
In contrast to the solution, the movement perpendicular to the measuring staff is realized by means of a pivoting movement, in which a pivot point 8 is mounted on the measuring staff 3, the movement actuator 51 being able to pivot the measuring staff within a small angle. And the current position is recorded by the displacement sensor 52.
The active thread and contour scanning device and method provided by the invention are used for ensuring that the force measurement between the measuring needle and the measured thread and the surface of the contour and the tensile force of the measuring needle are monitored and adjusted in real time when the thread and the contour are scanned, so that the appearance of the thread and the contour is reflected more truly, and the problems that the rough workpiece, the ladder-shaped thread, the inclined ladder-shaped thread and other large-gradient surfaces are inaccurate in measurement, incapacity of measurement and the like are solved in the scanning process.
The invention provides an active thread and profile scanning device and method, which have the following characteristics:
(1) An active thread and contour scanning method features that the constant force of measuring needle is used to actively follow the workpiece by the action of active thread and contour scanning method, and the speed and direction of vertical axis movement are controlled at higher frequency according to the feedback data of force-measuring feedback mechanism.
(2) An active thread and contour scanning method, wherein the force feedback limits the horizontal scanning speed, and when the force feedback value is smaller or larger than a specific value, the scanning speed in the horizontal direction is attenuated or even stopped, so as to ensure the authenticity of scanning data.
(3) An active thread and contour scanning method features that the horizontal scanning speed is limited by tension feedback, and when the feedback value of horizontal tension detecting mechanism is greater than a certain value, the horizontal scanning speed is attenuated or stopped, and the vertical axis moving direction is upward.
(4) The device comprises a force measurement feedback mechanism, a horizontal tension detection mechanism, a measuring rod vertical axis direction movement system and a horizontal direction movement system.
(5) The force measurement feedback mechanism is characterized in that an elastic device capable of swinging in the vertical direction of the measuring rod and a set of displacement sensor for monitoring the deformation of the elastic device are arranged at the measuring needle end; the mechanism is characterized in that deformation can be used for reflecting the specific relation between the measuring needle and the workpiece.
(6) The perpendicular to staff direction motion system includes: an actuator with micrometer-scale motion accuracy for performing a motion in a direction of a vertical axis of the stylus, and a displacement sensor for detecting the amount of motion.
The active thread and profile scanning device and method provided by the invention have the following advantages:
(1) The measuring force is adjusted in real time, and measured data more truly reflects the thread and the profile surface.
(2) The problems of climbing and descending in the scanning process, such as that the measuring needle is separated from the surface of the workpiece, and the measuring needle is blocked and damaged, are solved.
(3) The scanning speed is improved.
The foregoing is a further detailed description of the invention in connection with the preferred embodiments, and it is not intended that the invention be limited to the specific embodiments described. It will be apparent to those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the invention, and these should be considered to be within the scope of the invention.
Claims (10)
1. An active thread and contour scanning device, characterized in that: the device comprises a measuring needle, a force measuring feedback mechanism, a measuring rod horizontally arranged, a horizontal tension detecting mechanism and a motion system, wherein the measuring needle is arranged on the force measuring feedback mechanism, the force measuring feedback mechanism is connected with the horizontal tension detecting mechanism through the measuring rod, the horizontal tension detecting mechanism is connected with the motion system, and the horizontal tension detecting mechanism reflects tension of the measuring needle in the horizontal direction to form a specific relation by using deformation.
2. The active thread and profile scanning device as claimed in claim 1, wherein:
the force measurement feedback mechanism comprises an elastic device and a first displacement sensor, wherein the elastic device swings in the vertical direction of the measuring rod, the first displacement sensor is used for monitoring the deformation of the elastic device, and the elastic device is connected between the measuring needle and the measuring rod.
3. The active thread and profile scanning device as claimed in claim 2, wherein:
the deformation L of the elastic device is in direct proportion to the force N of the measuring needle.
4. The active thread and profile scanning device as claimed in claim 1, wherein:
the horizontal tension detection mechanism comprises a horizontal direction elastic device, a second displacement sensor for detecting stretching deformation and a guide rail for limiting the horizontal direction elastic device to deform in the horizontal direction, the horizontal direction elastic device is arranged on the guide rail, and the measuring rod is connected with the horizontal direction elastic device.
5. The active thread and profile scanning device as set forth in claim 4, wherein:
the relation between the variable X of the elastic device in the horizontal direction and the tensile force F of the measuring needle in the horizontal direction is X=kx.F, wherein kx is obtained through calibration.
6. The active thread and profile scanning device as claimed in claim 1, wherein:
the measuring rod is provided with a fulcrum, and the horizontal tension detection mechanism is connected with the measuring rod in a swinging way through the fulcrum.
7. The active thread and profile scanning device as set forth in claim 6, wherein:
the movement perpendicular to the measuring staff is achieved by means of a wobble.
8. The active thread and profile scanning device as set forth in claim 6, wherein:
the force measurement feedback mechanism comprises an elastic swing piece and a first displacement sensor capable of detecting deformation of the elastic swing piece, and the elastic swing piece is connected between the measuring needle and the measuring rod.
9. The active thread and profile scanning device as set forth in claim 6, wherein:
the horizontal tension detection mechanism comprises a horizontal direction elastic device, a second displacement sensor for detecting stretching deformation and a guide rail for limiting the horizontal direction elastic device to deform in the horizontal direction, wherein the horizontal direction elastic device is arranged on the guide rail and is in swing connection with the measuring rod through the fulcrum.
10. The active thread and profile scanning device as set forth in claim 6, wherein:
the motion system comprises a measuring rod vertical axis motion system and a horizontal motion system, the measuring rod is connected with the measuring rod vertical axis motion system, and the horizontal tension detection mechanism is connected with the horizontal motion system.
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| CN202410011971.XA CN117824533A (en) | 2017-12-05 | 2017-12-05 | Active thread and contour scanning device |
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| CN201711268289.5A CN107976156B (en) | 2017-12-05 | 2017-12-05 | Active thread and contour scanning device and method |
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| CN111457838B (en) * | 2020-04-24 | 2021-08-31 | 深圳市中图仪器股份有限公司 | Multi-sensor coordinate fusion calibration method of 3D curved surface glass measuring instrument |
| CN117006998B (en) * | 2023-10-07 | 2024-01-16 | 深圳市中图仪器股份有限公司 | Scanning mechanism with protection system |
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| CN201402121Y (en) * | 2008-12-10 | 2010-02-10 | 涂成生 | Pulse type active measurement linear displacement transducer with damper |
| CN101750008A (en) * | 2008-12-10 | 2010-06-23 | 涂成生 | Impulse sensor with damper for actively measuring linear displacement |
| CN102645169A (en) * | 2011-02-17 | 2012-08-22 | 上海泰勒精密仪器制造有限公司 | Precise thread parameter detecting system |
| CN102155902B (en) * | 2011-03-09 | 2012-05-30 | 西安工业大学 | One-dimensional scanning measurement head mechanism with constant measurement force |
| CN104697461B (en) * | 2015-03-16 | 2017-12-26 | 深圳市中图仪器股份有限公司 | Thread contour scanning means |
| CN207570498U (en) * | 2017-12-05 | 2018-07-03 | 深圳市中图仪器股份有限公司 | A kind of active screw thread and profile scan device |
-
2017
- 2017-12-05 CN CN202410015387.1A patent/CN117824534A/en active Pending
- 2017-12-05 CN CN202410011971.XA patent/CN117824533A/en active Pending
- 2017-12-05 CN CN201711268289.5A patent/CN107976156B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN117824534A (en) | 2024-04-05 |
| CN107976156A (en) | 2018-05-01 |
| CN107976156B (en) | 2023-11-10 |
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