CN117823803A - Source bottle air supply system and source bottle air supply system protection method - Google Patents

Source bottle air supply system and source bottle air supply system protection method Download PDF

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Publication number
CN117823803A
CN117823803A CN202311596419.3A CN202311596419A CN117823803A CN 117823803 A CN117823803 A CN 117823803A CN 202311596419 A CN202311596419 A CN 202311596419A CN 117823803 A CN117823803 A CN 117823803A
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CN
China
Prior art keywords
pressure
air
safety
valve
source bottle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311596419.3A
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Chinese (zh)
Inventor
陈春河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhuhai Gree Electronic Components Co ltd
Gree Electric Appliances Inc of Zhuhai
Original Assignee
Zhuhai Gree Electronic Components Co ltd
Gree Electric Appliances Inc of Zhuhai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhuhai Gree Electronic Components Co ltd, Gree Electric Appliances Inc of Zhuhai filed Critical Zhuhai Gree Electronic Components Co ltd
Priority to CN202311596419.3A priority Critical patent/CN117823803A/en
Publication of CN117823803A publication Critical patent/CN117823803A/en
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F17C13/123—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures for gas bottles, cylinders or reservoirs for tank vehicles or for railway tank wagons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0332—Safety valves or pressure relief valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0335—Check-valves or non-return valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/036—Control means using alarms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The invention relates to a source bottle air supply system and a source bottle air supply system protection method, and relates to the technical field of semiconductors. The source bottle air supply system comprises a source bottle, an air inlet pipeline and an air outlet pipeline; the source bottle is used for storing materials to be used; the air inlet pipeline is connected with the source bottle, and an air inlet safety bypass is arranged on the air inlet pipeline; the air outlet pipeline is connected with the source bottle, and an air outlet safety bypass is arranged on the air outlet pipeline; the release pressure of the air inlet safety bypass is larger than that of the air outlet safety bypass. The technical scheme disclosed by the invention can solve the problem that the pressure in the source bottle is too high to cause the explosion of the bottle due to the conditions of ageing and blocking of a valve element of the source bottle air supply system, bending of a pipeline or blockage of the pipeline by foreign matters, manual forgetting to open a valve and the like in the prior art.

Description

Source bottle air supply system and source bottle air supply system protection method
Technical Field
The invention relates to the technical field of semiconductors, in particular to a source bottle air supply system and a source bottle air supply system protection method.
Background
In the manufacture of integrated circuits, high temperature oxidation furnace tubes, which are a device for performing diffusion, oxidation or low pressure chemical vapor deposition on silicon wafers in a high temperature environment, are widely used in integrated circuit production lines.
The high-temperature oxidation furnace tube needs to use various air sources, wherein dichloroethylene can play a role in purifying the environment of the high-temperature oxidation furnace tube, and dichloroethylene is in a liquid state at normal temperature and normal pressure and cannot be directly connected into the high-temperature oxidation furnace tube, nitrogen is needed to be used for carrying dichloroethylene steam into the high-temperature oxidation furnace tube through a source bottle air supply system, and when nitrogen is used for carrying dichloroethylene steam into the high-temperature oxidation furnace tube through the source bottle air supply system, the conditions that a valve element of the source bottle air supply system is aged and blocked, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open manually and the like can occur, so that the pressure in a source bottle is excessively high, and an explosion bottle accident is caused.
Disclosure of Invention
The embodiment of the invention provides a source bottle air supply system and a source bottle air supply system protection method, which can solve the problem that the pressure in a source bottle is too high to cause the explosion of the bottle due to the conditions that a valve element of the source bottle air supply system is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open manually and the like in the prior art.
In a first aspect, an embodiment of the present invention provides a source bottle air supply system, including:
the source bottle is used for storing materials to be used;
the air inlet pipeline is connected with the source bottle, and an air inlet safety bypass is arranged on the air inlet pipeline; and
The gas outlet pipeline is connected with the source bottle, and a gas outlet safety bypass is arranged on the gas outlet pipeline;
the release pressure of the air inlet safety bypass is larger than that of the air outlet safety bypass.
In one embodiment, the air intake line includes:
an air intake duct;
the air inlet valve is arranged at one end, far away from the source bottle, of the air inlet pipeline;
the hand inlet valve is arranged at one end, close to the source bottle, of the air inlet pipeline; and
the air inlet one-way valve is arranged between the air inlet valve and the hand inlet valve; the air inlet safety bypass is arranged between the air inlet valve and the air inlet one-way valve.
In one embodiment, the air inlet pipeline comprises a pressure sensor and a flowmeter, wherein the pressure sensor is arranged between the air inlet one-way valve and the air inlet valve, and the flowmeter is arranged at one end, far away from the source bottle, of the air inlet pipeline.
In one embodiment, the outlet line comprises:
an air outlet pipeline is arranged on the air outlet pipeline,
the air outlet valve is arranged at one end, far away from the source bottle, of the air outlet pipeline; and
the hand outlet valve is arranged at one end, close to the source bottle, of the air outlet pipeline; the air outlet safety bypass is arranged between the air outlet valve and the hand outlet valve.
In one embodiment, the air inlet safety bypass comprises an air inlet safety pipeline and an air inlet safety valve arranged on the air inlet safety pipeline, and the air inlet safety pipeline is connected between the air inlet valve and the air inlet one-way valve.
In one embodiment, the air outlet safety bypass comprises an air outlet safety pipeline and an air outlet safety valve arranged on the air outlet safety pipeline, and the air outlet safety pipeline is connected between the air outlet valve and the hand outlet valve; the pressure-resistant value of the source bottle is larger than the discharge pressure of the air inlet safety valve, and the discharge pressure of the air inlet safety valve is larger than the discharge pressure of the air outlet safety valve.
In one embodiment, the source bottle air supply system comprises a pressure relief pipeline and a pressure relief check valve arranged on the pressure relief pipeline, and the pressure relief pipeline is connected with the air inlet safety bypass and the air outlet safety bypass.
In a second aspect, an embodiment of the present invention provides a protection method for a source bottle air supply system, including:
opening an air inlet pipeline and an air outlet pipeline for air supply;
if the working pressure of the air outlet pipeline reaches the release pressure of the air outlet safety bypass, releasing pressure through the air outlet safety bypass;
And if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, releasing pressure through the air inlet safety bypass, wherein the release pressure of the air inlet safety bypass is greater than the release pressure of the air outlet safety bypass.
In one embodiment, if the working pressure of the air outlet pipeline reaches the relief pressure of the air outlet safety bypass, before the pressure relief is performed through the air outlet safety bypass, the method includes: detecting the working pressure of the air inlet pipeline through a pressure sensor; and if the working pressure of the air inlet pipeline is greater than or equal to the alarm pressure, closing the air inlet valve and sending out a safety alarm.
In one embodiment, if the working pressure of the air outlet pipeline reaches the relief pressure of the air outlet safety bypass, the air outlet safety bypass is used for pressure relief, specifically: if the working pressure of the air outlet pipeline reaches the release pressure of the air outlet safety bypass, opening an air outlet safety valve on the air outlet safety bypass, and releasing pressure through a pressure release pipeline; if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, releasing pressure through the air inlet safety bypass, specifically: if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, opening an air inlet safety valve on the air inlet safety bypass, releasing pressure through a pressure release pipeline, and preventing the materials to be used in the source bottle from flowing backwards through an air inlet one-way valve.
Compared with the prior art, the embodiment of the invention has the advantages that by arranging the air inlet safety bypass on the air inlet pipeline, the pressure can be relieved through the air inlet safety bypass when the working pressure of the air inlet pipeline reaches the relief pressure of the air inlet safety bypass; by arranging the air outlet safety bypass on the air outlet pipe, the pressure can be relieved through the air outlet safety bypass when the working pressure of the air outlet pipe reaches the release pressure of the air outlet safety bypass; the two-stage pressure relief can be realized by enabling the pressure relief of the air inlet safety bypass to be larger than that of the air outlet safety bypass, so that the problems of the source bottle air supply system that the pressure in the source bottle is too large to cause the bottle explosion accident due to the conditions that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open by people and the like in the prior source bottle air supply system are solved, and the safety of the source bottle air supply system is improved.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings.
FIG. 1 is a schematic view of a source bottle plenum according to an embodiment of the present invention;
fig. 2 is a flowchart of a protection method of a source bottle air supply system according to another embodiment of the present invention.
Reference numerals:
10. a source bottle;
20. an air intake line; 210. an air intake duct; 220. an intake valve; 230. an air inlet one-way valve; 240. a hand inlet valve; 250. a pressure sensor; 260. a flow meter;
30. an intake safety bypass; 310. an air inlet safety pipeline; 320. an intake safety valve;
40. an air outlet pipeline; 410. an air outlet pipe; 420. an air outlet valve; 430. a hand valve;
50. a gas outlet safety bypass; 510. an air outlet safety pipeline; 520. an air outlet safety valve;
610. a pressure relief conduit; 620. a pressure relief one-way valve.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
In the manufacture of integrated circuits, high temperature oxidation furnace tubes, which are a device for performing diffusion, oxidation or low pressure chemical vapor deposition on silicon wafers in a high temperature environment, are widely used in current integrated circuit production lines. The high-temperature oxidation furnace tube needs to use various air sources, wherein dichloroethylene plays a role in purifying the environment of the furnace tube, is in a liquid state at normal temperature and normal pressure, cannot be directly connected into the high-temperature furnace tube, and can enter the high-temperature oxidation furnace tube only by using nitrogen to carry dichloroethylene steam through a source bottle air supply system.
The safety device of the existing source bottle air supply system is a single safety valve air supply system, the single safety valve system can only ensure that the safety pressure release function is realized when an air valve fails, the safety pressure release function cannot be ensured when an inlet valve and an outlet valve are blocked, and potential safety hazards exist when certain faults occur, such as the source liquid is discharged in a backflow mode due to the action of the safety valve when a pipeline is bent and blocked, so that safety risks are caused.
Example 1
As shown in fig. 1, the present embodiment provides a source bottle air supply system, including:
a source bottle 10 for storing a material to be used;
an air inlet pipeline 20 connected with the source bottle 10, and an air inlet safety bypass 30 arranged on the air inlet pipeline;
an air outlet pipeline 40 connected with the source bottle 10, and an air outlet safety bypass 50 arranged on the air outlet pipeline;
wherein the bleed pressure of the inlet safety bypass 30 is greater than the bleed pressure of the outlet safety bypass 50.
It should be noted that, the material of the source bottle 10 may be carbon steel, stainless steel, alloy steel, etc., and the material to be used may be dichloroethylene, trichloroethylene, etc., and the material of the source bottle 10 and the specific type of the material to be used are not particularly limited in this embodiment.
The intake safety bypass 30 is used for releasing pressure through the intake safety bypass 30 when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the vent safety bypass 50 is used for releasing pressure through the vent safety bypass 50 when the working pressure of the vent pipeline 40 reaches the release pressure of the vent safety bypass 50, and the release pressure of the vent safety bypass 30 is larger than the release pressure of the vent safety bypass 50, so that two-stage pressure release can be realized, the problems that the pressure in the source bottle 10 is too large to cause the bottle explosion accident due to the fact that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, the valve is forgotten to open manually and the like in the prior source bottle gas supply system are solved, and the safety of the source bottle gas supply system is improved.
In some embodiments, the intake conduit 20 includes: an air intake duct 210; an intake valve 220 provided at one end of the intake pipe 210 remote from the source bottle 10; the hand inlet valve 240 is arranged at one end of the air inlet pipeline 210 close to the source bottle 10; an intake check valve 230 provided between the intake valve 220 and the intake valve 240; wherein, the intake safety bypass 30 is provided between the intake valve 220 and the intake check valve 230.
It should be noted that, the material of the air intake pipe 210 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the air intake pipe 210 is connected to an air source, such as a nitrogen air source, the other end (e.g., the right end in fig. 1) of the air intake pipe 210 extends into the source bottle 10 and below the liquid level of the material to be used in the source bottle 10, so that the air source can carry the material to be used stored in the source bottle 10 through the source bottle 10, the air intake valve 220 is used for controlling the on-off of the air intake pipe 210, the hand valve 240 is used for opening or closing the connection between the source bottle 10 and the air intake pipe 210, and the air intake check valve 230 is used for preventing the material to be used in the source bottle 10 from flowing backwards into the air intake pipe 210.
It should be noted that, by disposing the intake safety bypass 30 between the intake valve 220 and the intake check valve 230, on the one hand, it can be ensured that the intake safety bypass 30 can release pressure from the intake pipe 210; on the other hand, when the pressure is released through the intake safety bypass 30, the material to be used in the source bottle 10 can be prevented from flowing back into the intake safety bypass 30 through the intake check valve 230.
In some embodiments, air intake conduit 20 includes a pressure sensor 250 and a flow meter 260, pressure sensor 250 being disposed between air intake check valve 230 and air intake valve 220, flow meter 260 being disposed on an end of air intake conduit 210 remote from source bottle 10.
The pressure sensor 250 may detect the working pressure in the air intake pipe 210, the flow meter 260 may be used to detect the flow rate of the gas or the liquid flowing through the air intake pipe 210, and the flow meter 260 may calculate the amount of the mixed gas flowing into the high-temperature oxidation furnace, so as to monitor the flow rate of the source bottle air supply system and the amount of the mixed gas flowing into the high-temperature oxidation furnace.
In some embodiments, outlet line 40 comprises: the gas outlet pipeline 410 and the gas outlet valve 420 are arranged at one end, far away from the source bottle 10, of the gas outlet pipeline 410; a hand valve 430 disposed at one end of the gas outlet pipe 410 near the source bottle 10; wherein the air outlet safety bypass 50 is disposed between the air outlet valve 420 and the hand outlet valve 430.
It should be noted that, the material of the gas outlet pipe 410 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the gas outlet pipe 410 is connected to a device, such as a high-temperature oxidation furnace tube, the other end (e.g., the right end in fig. 1) of the gas outlet pipe 410 extends into the source bottle 10 and above the liquid level of the material to be used in the source bottle 10, so that the gas entering the source bottle 10 through the gas inlet pipe 210 and after mixing the gas source with the material to be used in the source bottle 10 can be conveyed to the device through the gas outlet pipe 410, wherein the gas outlet valve 420 is used for controlling the on-off of the gas outlet pipe 410, and the hand valve 430 is used for opening or closing the connection between the source bottle 10 and the gas outlet pipe 410.
The gas outlet safety bypass 50 is disposed between the gas outlet valve 420 and the hand outlet valve 430, and can be depressurized by the gas outlet safety bypass 50 when the working pressure of the gas outlet pipe 410 is greater than the relief pressure of the gas outlet safety bypass 50 due to the blockage of the gas outlet pipe 410 or the failure of the gas outlet valve 420.
It should be noted that, the air inlet valve 220 and the air outlet valve 420 may be electric valves, the source bottle air supply system includes a controller, the controller is connected with the air inlet valve 220, the air outlet valve 420, the flowmeter 260, and the pressure sensor 250, and may set the alarm pressure P1 of the pressure sensor 250, when the working pressure of the air inlet pipe 210 is greater than the alarm pressure P1, the air inlet valve 220 and the flowmeter 260 are closed by the controller, and a safety alarm is sent, and the safety alarm may be an acoustic alarm, a light alarm, etc. The alarm pressure P1 is less than the relief pressure of the vent safety bypass 50 to act as a pre-hazard alarm.
In some embodiments, the intake safety bypass 30 includes an intake safety conduit 310 and an intake safety valve 320 disposed on the intake safety conduit 310, the intake safety conduit 310 being connected between the intake valve 220 and the intake check valve 230.
In summary, compared with the prior art, the embodiment of the present invention has the advantages that by providing the intake safety bypass 30 on the intake pipe 20, the pressure can be relieved through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the relief pressure of the intake safety bypass 30; by arranging the air outlet safety bypass 50 on the air outlet pipeline 40, pressure relief can be performed through the air outlet safety bypass 50 when the working pressure of the air outlet pipeline 40 reaches the relief pressure of the air outlet safety bypass 50; by making the relief pressure of the air inlet safety bypass 30 greater than the relief pressure of the air outlet safety bypass 50, two-stage pressure relief can be realized, so that the problems of the source bottle air supply system that the pressure in the source bottle 10 is too high to cause the bottle explosion accident due to the conditions that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open by people and the like are solved, and the safety of the source bottle air supply system is improved.
Example two
As shown in fig. 1, the present embodiment provides a source bottle air supply system, including:
a source bottle 10 for storing a material to be used;
an air inlet pipeline 20 connected with the source bottle 10, and an air inlet safety bypass 30 arranged on the air inlet pipeline;
an air outlet pipeline 40 connected with the source bottle 10, and an air outlet safety bypass 50 arranged on the air outlet pipeline;
wherein the bleed pressure of the inlet safety bypass 30 is greater than the bleed pressure of the outlet safety bypass 50.
It should be noted that, the material of the source bottle 10 may be carbon steel, stainless steel, alloy steel, etc., and the material to be used may be dichloroethylene, trichloroethylene, etc., and the material of the source bottle 10 and the specific type of the material to be used are not particularly limited in this embodiment.
The intake safety bypass 30 is used for releasing pressure through the intake safety bypass 30 when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the vent safety bypass 50 is used for releasing pressure through the vent safety bypass 50 when the working pressure of the vent pipeline 40 reaches the release pressure of the vent safety bypass 50, and the release pressure of the vent safety bypass 30 is larger than the release pressure of the vent safety bypass 50, so that two-stage pressure release can be realized, the problems that the pressure in the source bottle 10 is too large to cause the bottle explosion accident due to the fact that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, the valve is forgotten to open manually and the like in the prior source bottle gas supply system are solved, and the safety of the source bottle gas supply system is improved.
In some embodiments, the intake conduit 20 includes: an air intake duct 210; an intake valve 220 provided at one end of the intake pipe 210 remote from the source bottle 10; the hand inlet valve 240 is arranged at one end of the air inlet pipeline 210 close to the source bottle 10; an intake check valve 230 provided between the intake valve 220 and the intake valve 240; wherein, the intake safety bypass 30 is provided between the intake valve 220 and the intake check valve 230.
It should be noted that, the material of the air intake pipe 210 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the air intake pipe 210 is connected to an air source, such as a nitrogen air source, the other end (e.g., the right end in fig. 1) of the air intake pipe 210 extends into the source bottle 10 and below the liquid level of the material to be used in the source bottle 10, so that the air source can carry the material to be used stored in the source bottle 10 through the source bottle 10, the air intake valve 220 is used for controlling the on-off of the air intake pipe 210, the hand valve 240 is used for opening or closing the connection between the source bottle 10 and the air intake pipe 210, and the air intake check valve 230 is used for preventing the material to be used in the source bottle 10 from flowing backwards into the air intake pipe 210.
It should be noted that, by disposing the intake safety bypass 30 between the intake valve 220 and the intake check valve 230, on the one hand, it can be ensured that the intake safety bypass 30 can release pressure from the intake pipe 210; on the other hand, when the pressure is released through the intake safety bypass 30, the material to be used in the source bottle 10 can be prevented from flowing back into the intake safety bypass 30 through the intake check valve 230.
In some embodiments, air intake conduit 20 includes a pressure sensor 250 and a flow meter 260, pressure sensor 250 being disposed between air intake check valve 230 and air intake valve 220, flow meter 260 being disposed on an end of air intake conduit 210 remote from source bottle 10.
The pressure sensor 250 may detect the working pressure in the air intake pipe 210, the flow meter 260 may be used to detect the flow rate of the gas or the liquid flowing through the air intake pipe 210, and the flow meter 260 may calculate the amount of the mixed gas flowing into the high-temperature oxidation furnace, so as to monitor the flow rate of the source bottle air supply system and the amount of the mixed gas flowing into the high-temperature oxidation furnace.
In some embodiments, outlet line 40 comprises: the gas outlet pipeline 410 and the gas outlet valve 420 are arranged at one end, far away from the source bottle 10, of the gas outlet pipeline 410; a hand valve 430 disposed at one end of the gas outlet pipe 410 near the source bottle 10; wherein the air outlet safety bypass 50 is disposed between the air outlet valve 420 and the hand outlet valve 430.
It should be noted that, the material of the gas outlet pipe 410 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the gas outlet pipe 410 is connected to a device, such as a high-temperature oxidation furnace tube, the other end (e.g., the right end in fig. 1) of the gas outlet pipe 410 extends into the source bottle 10 and above the liquid level of the material to be used in the source bottle 10, so that the gas entering the source bottle 10 through the gas inlet pipe 210 and after mixing the gas source with the material to be used in the source bottle 10 can be conveyed to the device through the gas outlet pipe 410, wherein the gas outlet valve 420 is used for controlling the on-off of the gas outlet pipe 410, and the hand valve 430 is used for opening or closing the connection between the source bottle 10 and the gas outlet pipe 410.
The gas outlet safety bypass 50 is disposed between the gas outlet valve 420 and the hand outlet valve 430, and can be depressurized by the gas outlet safety bypass 50 when the working pressure of the gas outlet pipe 410 is greater than the relief pressure of the gas outlet safety bypass 50 due to the blockage of the gas outlet pipe 410 or the failure of the gas outlet valve 420.
It should be noted that, the air inlet valve 220 and the air outlet valve 420 may be electric valves, the source bottle air supply system includes a controller, the controller is connected with the air inlet valve 220, the air outlet valve 420, the flowmeter 260, and the pressure sensor 250, and may set the alarm pressure P1 of the pressure sensor 250, when the working pressure of the air inlet pipe 210 is greater than the alarm pressure P1, the air inlet valve 220 and the flowmeter 260 are closed by the controller, and a safety alarm is sent, and the safety alarm may be an acoustic alarm, a light alarm, etc. The alarm pressure P1 is less than the relief pressure of the vent safety bypass 50 to act as a pre-hazard alarm.
In some embodiments, the intake safety bypass 30 includes an intake safety conduit 310 and an intake safety valve 320 disposed on the intake safety conduit 310, the intake safety conduit 310 being connected between the intake valve 220 and the intake check valve 230.
In some embodiments, the outlet safety bypass 50 includes an outlet safety pipe 510 and an outlet safety valve 520 disposed on the outlet safety pipe 510, the outlet safety pipe 510 being connected between the outlet valve 420 and the outlet valve 430; the pressure resistance value P0 of the source bottle 10 is greater than the relief pressure P2 of the inlet relief valve 320, and the relief pressure P2 of the inlet relief valve 320 is greater than the relief pressure P3 of the outlet relief valve 520.
It should be noted that, the air inlet safety valve 320 is used for providing a safety pressure relief function for the air inlet safety bypass 30, the air outlet safety valve 520 is used for providing a safety pressure relief function for the air outlet safety bypass 50, and by setting the alarm pressure P1 of the pressure sensor 250, the amount of the gas introduced into the source bottle air supply system can be regulated and the working pressure of the source bottle air supply system can be reduced under the condition that the pressure is not relieved through the air inlet safety bypass 30 and the air outlet safety bypass 50; if the working pressure of the gas outlet pipe 410 increases due to the failure of the gas outlet valve 420 or the blockage of the gas outlet pipe 410, the gas outlet pipe 410 can be decompressed through the gas outlet safety bypass 50; if the operating pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the pressure relief can be performed through the intake safety bypass 30.
In actual use, the alarm pressure p1=the discharge pressure P2/2 of the air intake safety valve 320, the discharge pressure p2=the pressure-proof value p0×3/4 of the source bottle 10, and the discharge pressure p3= (the alarm pressure p1+the discharge pressure P)/2 of the air intake safety valve 320 of the pressure sensor 250) of the pressure sensor 250 may be adjusted according to actual needs.
In summary, compared with the prior art, the embodiment of the present invention has the advantages that by providing the intake safety bypass 30 on the intake pipe 20, the pressure can be relieved through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the relief pressure of the intake safety bypass 30; by arranging the air outlet safety bypass 50 on the air outlet pipeline 40, pressure relief can be performed through the air outlet safety bypass 50 when the working pressure of the air outlet pipeline 40 reaches the relief pressure of the air outlet safety bypass 50; by making the relief pressure of the air inlet safety bypass 30 greater than the relief pressure of the air outlet safety bypass 50, two-stage pressure relief can be realized, so that the problems of the source bottle air supply system that the pressure in the source bottle 10 is too high to cause the bottle explosion accident due to the conditions that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open by people and the like are solved, and the safety of the source bottle air supply system is improved.
Example III
As shown in fig. 1, the present embodiment provides a source bottle air supply system, including:
a source bottle 10 for storing a material to be used;
an air inlet pipeline 20 connected with the source bottle 10, and an air inlet safety bypass 30 arranged on the air inlet pipeline;
an air outlet pipeline 40 connected with the source bottle 10, and an air outlet safety bypass 50 arranged on the air outlet pipeline;
Wherein the bleed pressure of the inlet safety bypass 30 is greater than the bleed pressure of the outlet safety bypass 50.
It should be noted that, the material of the source bottle 10 may be carbon steel, stainless steel, alloy steel, etc., and the material to be used may be dichloroethylene, trichloroethylene, etc., and the material of the source bottle 10 and the specific type of the material to be used are not particularly limited in this embodiment.
The intake safety bypass 30 is used for releasing pressure through the intake safety bypass 30 when the working pressure of the intake pipeline 20 reaches the release pressure of the intake safety bypass 30; the vent safety bypass 50 is used for releasing pressure through the vent safety bypass 50 when the working pressure of the vent pipeline 40 reaches the release pressure of the vent safety bypass 50, and the release pressure of the vent safety bypass 30 is larger than the release pressure of the vent safety bypass 50, so that two-stage pressure release can be realized, the problems that the pressure in the source bottle 10 is too large to cause the bottle explosion accident due to the fact that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, the valve is forgotten to open manually and the like in the prior source bottle gas supply system are solved, and the safety of the source bottle gas supply system is improved.
In some embodiments, the intake conduit 20 includes: an air intake duct 210; an intake valve 220 provided at one end of the intake pipe 210 remote from the source bottle 10; the hand inlet valve 240 is arranged at one end of the air inlet pipeline 210 close to the source bottle 10; an intake check valve 230 provided between the intake valve 220 and the intake valve 240; wherein, the intake safety bypass 30 is provided between the intake valve 220 and the intake check valve 230.
It should be noted that, the material of the air intake pipe 210 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the air intake pipe 210 is connected to an air source, such as a nitrogen air source, the other end (e.g., the right end in fig. 1) of the air intake pipe 210 extends into the source bottle 10 and below the liquid level of the material to be used in the source bottle 10, so that the air source can carry the material to be used stored in the source bottle 10 through the source bottle 10, the air intake valve 220 is used for controlling the on-off of the air intake pipe 210, the hand valve 240 is used for opening or closing the connection between the source bottle 10 and the air intake pipe 210, and the air intake check valve 230 is used for preventing the material to be used in the source bottle 10 from flowing backwards into the air intake pipe 210.
It should be noted that, by disposing the intake safety bypass 30 between the intake valve 220 and the intake check valve 230, on the one hand, it can be ensured that the intake safety bypass 30 can release pressure from the intake pipe 210; on the other hand, when the pressure is released through the intake safety bypass 30, the material to be used in the source bottle 10 can be prevented from flowing back into the intake safety bypass 30 through the intake check valve 230.
In some embodiments, air intake conduit 20 includes a pressure sensor 250 and a flow meter 260, pressure sensor 250 being disposed between air intake check valve 230 and air intake valve 220, flow meter 260 being disposed on an end of air intake conduit 210 remote from source bottle 10.
The pressure sensor 250 may detect the working pressure in the air intake pipe 210, the flow meter 260 may be used to detect the flow rate of the gas or the liquid flowing through the air intake pipe 210, and the flow meter 260 may calculate the amount of the mixed gas flowing into the high-temperature oxidation furnace, so as to monitor the flow rate of the source bottle air supply system and the amount of the mixed gas flowing into the high-temperature oxidation furnace.
In some embodiments, outlet line 40 comprises: the gas outlet pipeline 410 and the gas outlet valve 420 are arranged at one end, far away from the source bottle 10, of the gas outlet pipeline 410; a hand valve 430 disposed at one end of the gas outlet pipe 410 near the source bottle 10; wherein the air outlet safety bypass 50 is disposed between the air outlet valve 420 and the hand outlet valve 430.
It should be noted that, the material of the gas outlet pipe 410 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the gas outlet pipe 410 is connected to a device, such as a high-temperature oxidation furnace tube, the other end (e.g., the right end in fig. 1) of the gas outlet pipe 410 extends into the source bottle 10 and above the liquid level of the material to be used in the source bottle 10, so that the gas entering the source bottle 10 through the gas inlet pipe 210 and after mixing the gas source with the material to be used in the source bottle 10 can be conveyed to the device through the gas outlet pipe 410, wherein the gas outlet valve 420 is used for controlling the on-off of the gas outlet pipe 410, and the hand valve 430 is used for opening or closing the connection between the source bottle 10 and the gas outlet pipe 410.
The gas outlet safety bypass 50 is disposed between the gas outlet valve 420 and the hand outlet valve 430, and can be depressurized by the gas outlet safety bypass 50 when the working pressure of the gas outlet pipe 410 is greater than the relief pressure of the gas outlet safety bypass 50 due to the blockage of the gas outlet pipe 410 or the failure of the gas outlet valve 420.
It should be noted that, the air inlet valve 220 and the air outlet valve 420 may be electric valves, the source bottle air supply system includes a controller, the controller is connected with the air inlet valve 220, the air outlet valve 420, the flowmeter 260, and the pressure sensor 250, and may set the alarm pressure P1 of the pressure sensor 250, when the working pressure of the air inlet pipe 210 is greater than the alarm pressure P1, the air inlet valve 220 and the flowmeter 260 are closed by the controller, and a safety alarm is sent, and the safety alarm may be an acoustic alarm, a light alarm, etc. The alarm pressure P1 is less than the relief pressure of the vent safety bypass 50 to act as a pre-hazard alarm.
In some embodiments, the intake safety bypass 30 includes an intake safety conduit 310 and an intake safety valve 320 disposed on the intake safety conduit 310, the intake safety conduit 310 being connected between the intake valve 220 and the intake check valve 230.
In some embodiments, the outlet safety bypass 50 includes an outlet safety pipe 510 and an outlet safety valve 520 disposed on the outlet safety pipe 510, the outlet safety pipe 510 being connected between the outlet valve 420 and the outlet valve 430; the pressure resistance value P0 of the source bottle 10 is greater than the relief pressure P2 of the inlet relief valve 320, and the relief pressure P2 of the inlet relief valve 320 is greater than the relief pressure P3 of the outlet relief valve 520.
It should be noted that, the air inlet safety valve 320 is used for providing a safety pressure relief function for the air inlet safety bypass 30, the air outlet safety valve 520 is used for providing a safety pressure relief function for the air outlet safety bypass 50, and by setting the alarm pressure P1 of the pressure sensor 250, the amount of the gas introduced into the source bottle air supply system can be regulated and the working pressure of the source bottle air supply system can be reduced under the condition that the pressure is not relieved through the air inlet safety bypass 30 and the air outlet safety bypass 50; if the working pressure of the gas outlet pipe 410 increases due to the failure of the gas outlet valve 420 or the blockage of the gas outlet pipe 410, the gas outlet pipe 410 can be decompressed through the gas outlet safety bypass 50; if the operating pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the pressure relief can be performed through the intake safety bypass 30.
In actual use, the alarm pressure p1=the discharge pressure P2/2 of the air intake safety valve 320, the discharge pressure p2=the pressure-proof value p0×3/4 of the source bottle 10, and the discharge pressure p3= (the alarm pressure p1+the discharge pressure P)/2 of the air intake safety valve 320 of the pressure sensor 250) of the pressure sensor 250 may be adjusted according to actual needs.
In some embodiments, the source bottle plenum includes a pressure relief conduit 610 and a pressure relief check valve 620 disposed on the pressure relief conduit 610, the pressure relief conduit 610 being connected to the inlet safety bypass 30 and the outlet safety bypass 50.
It should be noted that, one end of the pressure release pipeline 610 is connected to the air inlet safety pipeline 310 and the air outlet safety pipeline 510, and the other end of the pressure release pipeline 610 is connected to the pressure release device, so that the length of the pressure release pipeline 610 can be reduced, materials can be saved, and the pressure release check valve 620 can further prevent the material to be used in the source bottle 10 from flowing backwards into the pressure release device.
In summary, compared with the prior art, the embodiment of the present invention has the advantages that by providing the intake safety bypass 30 on the intake pipe 20, the pressure can be relieved through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the relief pressure of the intake safety bypass 30; by arranging the air outlet safety bypass 50 on the air outlet pipeline 40, pressure relief can be performed through the air outlet safety bypass 50 when the working pressure of the air outlet pipeline 40 reaches the relief pressure of the air outlet safety bypass 50; by making the relief pressure of the air inlet safety bypass 30 greater than the relief pressure of the air outlet safety bypass 50, two-stage pressure relief can be realized, so that the problems of the source bottle air supply system that the pressure in the source bottle 10 is too high to cause the bottle explosion accident due to the conditions that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open by people and the like are solved, and the safety of the source bottle air supply system is improved.
Example IV
As shown in fig. 2, the present embodiment provides a protection method for a source bottle air supply system, including:
s101: opening the air inlet pipeline 20 and the air outlet pipeline 40 to feed air;
in order to perform air supply by the source bottle air supply system, the air inlet line 20 and the air outlet line 40 are opened, and the source bottle air supply system includes: a source bottle 10 for storing a material to be used; an air inlet pipeline 20 connected with the source bottle 10, and an air inlet safety bypass 30 arranged on the air inlet pipeline; an air outlet pipeline 40 connected with the source bottle 10, and an air outlet safety bypass 50 arranged on the air outlet pipeline; wherein the bleed pressure of the inlet safety bypass 30 is greater than the bleed pressure of the outlet safety bypass 50.
It should be noted that, the material of the source bottle 10 may be carbon steel, stainless steel, alloy steel, etc., and the material to be used may be dichloroethylene, trichloroethylene, etc., and the material of the source bottle 10 and the specific type of the material to be used are not particularly limited in this embodiment.
The intake safety bypass 30 is configured to perform pressure relief through the intake safety bypass 30 when the working pressure of the intake pipe 20 reaches the relief pressure of the intake safety bypass 30; the vent safety bypass 50 is used for releasing pressure through the vent safety bypass 50 when the working pressure of the vent pipeline 40 reaches the release pressure of the vent safety bypass 50, and the release pressure of the vent safety bypass 30 is larger than the release pressure of the vent safety bypass 50, so that two-stage pressure release can be realized, the problems that the pressure in the source bottle 10 is too high to cause the bottle explosion accident due to the fact that the valve is aged and stuck, the pipeline is bent or blocked by foreign matters, the valve is forgotten to open by people and the like in the prior source bottle air supply system are solved, and the safety of the source bottle air supply system is improved.
The intake pipe 20 includes: an air intake duct 210; an air inlet valve 220 provided at an end of the air inlet pipe 210 remote from the source bottle 10; a hand inlet valve 240 disposed at one end of the air inlet pipe 210 near the source bottle 10; an intake check valve 230 disposed between the intake valve 220 and the intake valve 240; wherein the intake safety bypass 30 is provided between the intake valve 220 and the intake check valve 230.
It should be noted that, the material of the air intake pipe 210 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the air intake pipe 210 is connected to an air source, such as a nitrogen air source, the other end (e.g., the right end in fig. 1) of the air intake pipe 210 extends into the source bottle 10 and below the liquid level of the material to be used in the source bottle 10, so that the air source can carry the material to be used stored in the source bottle 10 through the source bottle 10, the air intake valve 220 is used for controlling the on-off of the air intake pipe 210, the hand valve 240 is used for opening or closing the connection between the source bottle 10 and the air intake pipe 210, and the air intake check valve 230 is used for preventing the material to be used in the source bottle 10 from flowing backwards into the air intake pipe 210.
It should be noted that, by disposing the intake safety bypass 30 between the intake valve 220 and the intake check valve 230, on the one hand, it can be ensured that the intake safety bypass 30 can release pressure from the intake pipe 210; on the other hand, when the pressure is released through the intake safety bypass 30, the material to be used in the source bottle 10 can be prevented from flowing back into the intake safety bypass 30 through the intake check valve 230.
The air intake pipe 20 includes a pressure sensor 250 and a flow meter 260, the pressure sensor 250 is disposed between the air intake check valve 230 and the air intake valve 220, and the flow meter 260 is disposed at an end of the air intake pipe 210 remote from the source bottle 10.
The pressure sensor 250 may detect the working pressure in the air intake pipe 210, the flow meter 260 may be used to detect the flow rate of the gas or the liquid flowing through the air intake pipe 210, and the flow meter 260 may calculate the amount of the mixed gas flowing into the high-temperature oxidation furnace, so as to monitor the flow rate of the source bottle air supply system and the amount of the mixed gas flowing into the high-temperature oxidation furnace.
S102: if the working pressure of the air outlet pipeline 40 reaches the release pressure of the air outlet safety bypass 50, releasing pressure through the air outlet safety bypass 50;
it should be noted that the air outlet pipe 40 includes: an air outlet pipe 410, an air outlet valve 420, and a control unit, wherein the air outlet pipe 410 is arranged at one end far away from the source bottle 10; a hand valve 430 disposed at one end of the outlet pipe 410 near the source bottle 10; wherein the outlet safety bypass 50 is disposed between the outlet valve 420 and the outlet valve 430.
It should be noted that, the material of the gas outlet pipe 410 may be carbon steel, stainless steel, alloy steel, plastic, etc., one end (e.g., the left end in fig. 1) of the gas outlet pipe 410 is connected to a device, such as a high-temperature oxidation furnace tube, the other end (e.g., the right end in fig. 1) of the gas outlet pipe 410 extends into the source bottle 10 and above the liquid level of the material to be used in the source bottle 10, so that the gas entering the source bottle 10 through the gas inlet pipe 210 and after mixing the gas source with the material to be used in the source bottle 10 can be conveyed to the device through the gas outlet pipe 410, wherein the gas outlet valve 420 is used for controlling the on-off of the gas outlet pipe 410, and the hand valve 430 is used for opening or closing the connection between the source bottle 10 and the gas outlet pipe 410.
The gas outlet safety bypass 50 is disposed between the gas outlet valve 420 and the hand outlet valve 430, and can be depressurized by the gas outlet safety bypass 50 when the working pressure of the gas outlet pipe 410 is greater than the relief pressure of the gas outlet safety bypass 50 due to the blockage of the gas outlet pipe 410 or the failure of the gas outlet valve 420.
In some embodiments, if the working pressure of the outlet pipe 40 reaches the relief pressure of the outlet safety bypass 50, before the pressure relief through the outlet safety bypass 50, the method includes: detecting an operating pressure of the intake line 20 by a pressure sensor 250; if the working pressure of the air inlet pipeline 20 is greater than or equal to the alarm pressure, the air inlet valve 220 is closed, and a safety alarm is sent out.
It should be noted that, the air inlet valve 220 and the air outlet valve 420 may be electric valves, the source bottle air supply system includes a controller, the controller is connected with the air inlet valve 220, the air outlet valve 420, the flowmeter 260, and the pressure sensor 250, and may set the alarm pressure P1 of the pressure sensor 250, when the working pressure of the air inlet pipe 210 is greater than the alarm pressure P1, the air inlet valve 220 and the flowmeter 260 are closed by the controller, and a safety alarm is sent, and the safety alarm may be an acoustic alarm, a light alarm, etc. The alarm pressure P1 is less than the relief pressure of the vent safety bypass 50 to act as a pre-hazard alarm.
The intake safety bypass 30 includes an intake safety pipe 310 and an intake safety valve 320 provided on the intake safety pipe 310, and the intake safety pipe 310 is connected between the intake valve 220 and the intake check valve 230.
It should be noted that, the air outlet safety bypass 50 includes an air outlet safety pipe 510 and an air outlet safety valve 520 disposed on the air outlet safety pipe 510, and the air outlet safety pipe 510 is connected between the air outlet valve 420 and the hand outlet valve 430; the pressure resistance value P0 of the source bottle 10 is greater than the relief pressure P2 of the inlet safety valve 320, and the relief pressure P2 of the inlet safety valve 320 is greater than the relief pressure P3 of the outlet safety valve 520.
It should be noted that, the air inlet safety valve 320 is used for providing a safety pressure relief function for the air inlet safety bypass 30, the air outlet safety valve 520 is used for providing a safety pressure relief function for the air outlet safety bypass 50, and by setting the alarm pressure P1 of the pressure sensor 250, the amount of the gas introduced into the source bottle air supply system can be regulated and the working pressure of the source bottle air supply system can be reduced under the condition that the pressure is not relieved through the air inlet safety bypass 30 and the air outlet safety bypass 50; if the working pressure of the gas outlet pipe 410 increases due to the failure of the gas outlet valve 420 or the blockage of the gas outlet pipe 410, the gas outlet pipe 410 can be decompressed through the gas outlet safety bypass 50; if the operating pressure of the intake pipe 210 increases due to a malfunction of the intake valve 240 or a blockage of the intake pipe 210, the pressure relief can be performed through the intake safety bypass 30.
In actual use, the alarm pressure p1=the discharge pressure P2/2 of the air intake safety valve 320, the discharge pressure p2=the pressure-proof value p0×3/4 of the source bottle 10, and the discharge pressure p3= (the alarm pressure p1+the discharge pressure P)/2 of the air intake safety valve 320 of the pressure sensor 250) of the pressure sensor 250 may be adjusted according to actual needs.
S103: if the working pressure of the air inlet pipeline 20 reaches the relief pressure of the air inlet safety bypass 30, the air inlet safety bypass 30 is used for relieving pressure, wherein the relief pressure of the air inlet safety bypass 30 is greater than the relief pressure of the air outlet safety bypass 50.
In some embodiments, if the working pressure of the outlet pipe 40 reaches the relief pressure of the outlet safety bypass 50, the pressure is relieved through the outlet safety bypass 50, specifically: if the working pressure of the air outlet pipeline 40 reaches the relief pressure of the air outlet safety bypass 50, opening an air outlet safety valve 520 on the air outlet safety bypass 50, and releasing pressure through a pressure release pipeline 610; if the working pressure of the air intake pipeline 20 reaches the relief pressure of the air intake safety bypass 30, the air intake safety bypass 30 is used for relieving the pressure, specifically: if the working pressure of the air intake pipeline 20 reaches the discharge pressure of the air intake safety bypass 30, the air intake safety valve 320 on the air intake safety bypass 30 is opened, the pressure is released through the pressure release pipeline 610, and the material to be used in the source bottle 10 is prevented from flowing backwards through the air intake check valve 230.
In summary, in the embodiment of the present application, the air supply is performed by opening the air inlet pipeline 20 and the air outlet pipeline 40; if the working pressure of the air outlet pipeline 40 reaches the release pressure of the air outlet safety bypass 50, releasing pressure through the air outlet safety bypass 50; if the working pressure of the air inlet pipeline 20 reaches the relief pressure of the air inlet safety bypass 30, the air inlet safety bypass 30 is used for relieving pressure, wherein the relief pressure of the air inlet safety bypass 30 is greater than the relief pressure of the air outlet safety bypass 50, two-stage pressure relief can be realized, the problems that the pressure in the source bottle 10 is too high to cause the detonation bottle accident due to the fact that a valve member is aged and stuck, a pipeline is bent or blocked by foreign matters, a valve is forgotten to open by people and the like in the prior source bottle air supply system are solved, and the safety of the source bottle air supply system is improved.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the respective embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions falling within the scope of the claims.

Claims (10)

1. A source bottle plenum, comprising:
the source bottle is used for storing materials to be used;
the air inlet pipeline is connected with the source bottle, and an air inlet safety bypass is arranged on the air inlet pipeline; and
the gas outlet pipeline is connected with the source bottle, and a gas outlet safety bypass is arranged on the gas outlet pipeline;
the release pressure of the air inlet safety bypass is larger than that of the air outlet safety bypass.
2. The source bottle plenum of claim 1, wherein the air intake line comprises:
an air intake duct;
the air inlet valve is arranged at one end, far away from the source bottle, of the air inlet pipeline;
the hand inlet valve is arranged at one end, close to the source bottle, of the air inlet pipeline; and
The air inlet one-way valve is arranged between the air inlet valve and the hand inlet valve;
the air inlet safety bypass is arranged between the air inlet valve and the air inlet one-way valve.
3. The source bottle plenum of claim 2, wherein the air intake conduit includes a pressure sensor and a flow meter, the pressure sensor being disposed between the air intake check valve and the air intake valve, the flow meter being disposed on an end of the air intake conduit remote from the source bottle.
4. The source bottle plenum of claim 3, wherein the outlet line comprises:
an air outlet pipeline is arranged on the air outlet pipeline,
the air outlet valve is arranged at one end, far away from the source bottle, of the air outlet pipeline; and
the hand outlet valve is arranged at one end, close to the source bottle, of the air outlet pipeline;
the air outlet safety bypass is arranged between the air outlet valve and the hand outlet valve.
5. The source bottle plenum of claim 4, wherein the air intake safety bypass comprises an air intake safety conduit and an air intake safety valve disposed on the air intake safety conduit, the air intake safety conduit being connected between the air intake valve and the air intake check valve.
6. The source bottle plenum of claim 5, wherein the outlet safety bypass comprises an outlet safety conduit and an outlet safety valve disposed on the outlet safety conduit, the outlet safety conduit being connected between the outlet valve and the outlet valve;
The pressure-resistant value of the source bottle is larger than the discharge pressure of the air inlet safety valve, and the discharge pressure of the air inlet safety valve is larger than the discharge pressure of the air outlet safety valve.
7. The source bottle plenum of any one of claims 1-6, wherein the source bottle plenum comprises a pressure relief conduit and a pressure relief check valve disposed on the pressure relief conduit, the pressure relief conduit being connected to the inlet safety bypass and the outlet safety bypass.
8. A source bottle plenum protection method, comprising:
opening an air inlet pipeline and an air outlet pipeline for air supply;
if the working pressure of the air outlet pipeline reaches the release pressure of the air outlet safety bypass, releasing pressure through the air outlet safety bypass;
and if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, releasing pressure through the air inlet safety bypass, wherein the release pressure of the air inlet safety bypass is greater than the release pressure of the air outlet safety bypass.
9. The method according to claim 8, wherein if the working pressure of the air outlet pipe reaches the relief pressure of the air outlet safety bypass, the method comprises, before the air outlet safety bypass is used for pressure relief:
Detecting the working pressure of the air inlet pipeline through a pressure sensor;
and if the working pressure of the air inlet pipeline is greater than or equal to the alarm pressure, closing the air inlet valve and sending out a safety alarm.
10. The protection method of the source bottle air supply system according to claim 8, wherein if the working pressure of the air outlet pipeline reaches the relief pressure of the air outlet safety bypass, the pressure is relieved through the air outlet safety bypass, specifically:
if the working pressure of the air outlet pipeline reaches the release pressure of the air outlet safety bypass, opening an air outlet safety valve on the air outlet safety bypass, and releasing pressure through a pressure release pipeline;
if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, releasing pressure through the air inlet safety bypass, specifically:
if the working pressure of the air inlet pipeline reaches the release pressure of the air inlet safety bypass, opening an air inlet safety valve on the air inlet safety bypass, releasing pressure through a pressure release pipeline, and preventing the materials to be used in the source bottle from flowing backwards through an air inlet one-way valve.
CN202311596419.3A 2023-11-27 2023-11-27 Source bottle air supply system and source bottle air supply system protection method Pending CN117823803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311596419.3A CN117823803A (en) 2023-11-27 2023-11-27 Source bottle air supply system and source bottle air supply system protection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311596419.3A CN117823803A (en) 2023-11-27 2023-11-27 Source bottle air supply system and source bottle air supply system protection method

Publications (1)

Publication Number Publication Date
CN117823803A true CN117823803A (en) 2024-04-05

Family

ID=90506781

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311596419.3A Pending CN117823803A (en) 2023-11-27 2023-11-27 Source bottle air supply system and source bottle air supply system protection method

Country Status (1)

Country Link
CN (1) CN117823803A (en)

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