CN117821919A - Multi-dimensional rotary vacuum coating workpiece frame - Google Patents
Multi-dimensional rotary vacuum coating workpiece frame Download PDFInfo
- Publication number
- CN117821919A CN117821919A CN202311858960.7A CN202311858960A CN117821919A CN 117821919 A CN117821919 A CN 117821919A CN 202311858960 A CN202311858960 A CN 202311858960A CN 117821919 A CN117821919 A CN 117821919A
- Authority
- CN
- China
- Prior art keywords
- gear
- fixed
- shaft
- support frame
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 21
- 238000005192 partition Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009504 vacuum film coating Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-dimensional rotary vacuum coating workpiece frame, and belongs to the technical field of vacuum coating machines. The support frame mainly comprises a support frame, a plurality of shaft sleeves are circumferentially fixed at the bottom of the outer wall of the support frame, a plurality of support plates are fixedly sleeved at one end, close to the support frame, of each shaft sleeve, a plurality of support shafts are circumferentially distributed at the shaft sleeves, one ends of the support shafts penetrate through the support plates, the support shafts are rotationally connected with the support plates, and the shaft sleeves and the support shafts are all suitable for being rotated under external driving. The support shaft is a workpiece mounting position, and the workpiece can rotate around the shaft sleeve through the rotation of the shaft sleeve, so that all the workpieces face one side of the film plating equipment in sequence, and film plating is carried out on all the workpieces; the workpiece is driven to rotate by the rotation of the supporting shaft, so that the whole outer wall of the workpiece can be coated by the rotation of the supporting shaft when the workpiece faces one side of the coating equipment. The multidimensional rotary vacuum coating workpiece frame achieves the effect of accelerating coating efficiency.
Description
Technical Field
The invention relates to the technical field of vacuum coating machines, in particular to a multi-dimensional rotary vacuum coating workpiece frame.
Background
The vacuum coating is an important aspect of the vacuum application field, and is a new technology for preparing a film for scientific research and actual production by taking vacuum technology as a basis, utilizing a physical or chemical method, absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like.
When hollow structural parts such as an optical glass tube and a polygon cylindrical mirror are coated, only a small number of workpieces can be coated at one time due to the fact that the workpieces are required to be coated in all directions, and machining efficiency is reduced.
It is therefore desirable to provide a multi-dimensional rotary vacuum coated workpiece holder that addresses the above-described issues.
Disclosure of Invention
Based on the above-mentioned problems existing in the prior art, an object of an embodiment of the present application is to: the multi-dimensional rotary vacuum coating workpiece frame has the advantage of accelerating coating efficiency.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides a multidimensional rotation formula vacuum coating work piece frame, includes the fixed plate, the downside fixed support frame of fixed plate, the outer wall bottom circumference of support frame is fixed with a plurality of axle sleeves, the axle sleeve is close to the fixed cover of one end of support frame and is equipped with a plurality of backup pads, axle sleeve circumference evenly distributed has a plurality of back shafts, the one end that the back shaft is close to the support frame all runs through the backup pad, the back shaft rotates with the backup pad to be connected, axle sleeve and back shaft all are suitable for rotating under external drive.
Further, a plurality of fixed gears corresponding to shaft sleeve positions are fixed at the bottom of the outer wall of the support frame, a plurality of planetary gears corresponding to the number of the support shafts are uniformly distributed in the circumferential direction of the fixed gears, and one end of the support shaft, which is close to the support frame, is fixed with one planetary gear.
Further, the outer wall bottom of support frame rotates and is connected with a plurality of gear shafts that correspond with fixed gear position, fixed gear cover is located on the gear shaft, the fixed cover of axle sleeve is located on the gear shaft.
Further, the bottom of the inner side of the fixed plate is rotationally connected with a sun gear, one end of the gear shaft stretches into the support frame to be fixedly connected with a driven gear, and the driven gears are meshed with the sun gear.
Further, a main shaft is rotatably connected between the bottom of the inner side of the fixed plate and the supporting frame, and the sun gear is fixedly sleeved at the bottom of the main shaft.
Further, a driving gear is fixedly sleeved on the top of the main shaft, a driving gear is meshed with one side of the driving gear, a driver corresponding to the driving gear in position is fixed on the upper side of the fixing plate, and an output shaft of the driver is fixed with the driving gear.
Furthermore, the shaft sleeve is uniformly fixed with the partition plates corresponding to the number of the supporting shafts, and the partition plates are respectively positioned between two adjacent supporting shafts.
The beneficial effects of the invention are as follows:
the support shaft is a workpiece mounting position, and the workpiece can rotate around the shaft sleeve through the rotation of the shaft sleeve, so that all the workpieces face one side of the film plating equipment in sequence, and film plating is carried out on all the workpieces; the workpiece is driven to rotate by the rotation of the supporting shaft, so that the whole outer wall of the workpiece can be coated by the rotation of the supporting shaft when the workpiece faces one side of the coating equipment.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is an overall schematic view of a multi-dimensional rotary vacuum coating workpiece holder of the present application;
FIG. 2 is an overall schematic view of the gear shaft of FIG. 1;
in the figure:
1. a fixing plate; 11. a support frame; 12. a main shaft; 13. a drive gear; 14. a drive gear; 15. a driver; 16. a sun gear; 17. a fixed gear;
2. a gear shaft; 21. a driven gear; 22. a shaft sleeve; 23. a support plate; 24. a planetary gear; 25. a support shaft; 26. a partition board.
Detailed Description
It should be noted that, without conflict, the embodiments and features of the embodiments in the present application may be combined with each other. The invention will be described in detail below with reference to the drawings in connection with embodiments.
It is noted that all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless otherwise indicated.
In the present invention, unless otherwise indicated, the terms "upper" and "lower" are used generally with respect to the directions shown in the drawings, or with respect to the vertical, vertical or gravitational directions; also, for ease of understanding and description, "left, right" is generally directed to the left, right as shown in the drawings; "inner and outer" refer to inner and outer relative to the outline of the components themselves, but the above-described orientation terms are not intended to limit the present invention.
As shown in fig. 1-2, the application provides a multi-dimensional rotary vacuum coating work piece frame, including fixed plate 1, fixed support frame 11 of downside of fixed plate 1, rotate between the bottom of fixed plate 1 inboard and support frame 11 and be connected with main shaft 12, the fixed cover in top of main shaft 12 is equipped with driving gear 13, and driving gear 14 has been meshed to one side of driving gear 13, and the upside of fixed plate 1 is fixed with the driver 15 that corresponds with driving gear 14 position, and in this embodiment, driver 15 is the motor. The output shaft of the driver 15 is fixed to the drive gear 14.
The bottom of the main shaft 12 is fixedly sleeved with a sun gear 16. The outer wall bottom circumference of support frame 11 evenly rotates and is connected with a plurality of gear shafts 2, and the one end of gear shaft 2 stretches into the inside passive gear 21 of fixedly connected with of support frame 11, and passive gear 21 all meshes with sun gear 16.
One side of the gear shaft 2 far away from the support frame 11 is fixedly sleeved with a shaft sleeve 22, and one end of the shaft sleeve 22 close to the support frame 11 is fixedly sleeved with two support plates 23.
The gear shaft 2 is movably sleeved with a fixed gear 17, and the fixed gear 17 is fixedly connected with the outer wall of the supporting frame 11. A plurality of planetary gears 24 are uniformly distributed on the circumference of the fixed gear 17, and the planetary gears 24 are meshed with the fixed gear 17.
The side of the planetary gear 24 far away from the support frame 11 is fixed with a support shaft 25, and one end of the support shaft 25 far away from the planetary gear 24 penetrates through the two support plates 23. The support shaft 25 is rotatably connected to the support plate 23.
The shaft sleeve 22 is uniformly fixed with the partition plates 26 corresponding to the number of the support shafts 25, and the partition plates 26 are respectively positioned between two adjacent support shafts 25.
It can be understood that the fixing plate 1 is fixed in a vacuum coating machine (not shown), and the top of the fixing plate 1 is fixed with an output shaft of a motor in the vacuum coating machine, so that the fixing plate 1 can rotate, and then the multi-dimensional rotary vacuum coating workpiece frame is driven during coating, so that coating and part loading and unloading are facilitated.
It will be appreciated that a hollow workpiece (not shown), such as a test tube, is sleeved on the end of the support shaft 25 remote from the planet gear 24 prior to coating.
During film coating, the workpiece rotates around the main shaft 12 through the rotation of the whole multi-dimensional rotary vacuum film coating workpiece frame, so that the rotation of the first dimension is realized.
The driver 15 can drive the main shaft 12 to rotate in the supporting frame 11 through the driving gear 14 and the driving gear 13, the main shaft 12 drives the gear shaft 2 to rotate through the sun gear 16 and the driven gear 21, at the moment, the workpiece can rotate around the gear shaft 2, the rotation of the second dimension of the workpiece is realized, and all the workpieces face one side of the film plating equipment in sequence, so that film plating is carried out on all the workpieces.
When the gear shaft 2 rotates, the planetary gear 24 also rotates around the fixed gear 17, the fixed gear 17 is fixedly connected with the outer wall of the support frame 11, so that the fixed gear 17 cannot rotate, the planetary gear 24 is meshed with the fixed gear 17, the planetary gear 24 rotates, the workpiece rotates around the support shaft 25, and the third dimension of the workpiece is rotated, so that when the workpiece faces one side of the film plating equipment, the workpiece is matched with the rotation of the support shaft 25, and the whole outer wall of the workpiece can be plated.
By supporting the support shaft 25 by the two support plates 23, it is possible to avoid the inclination of the support shaft 25 and ensure a smooth rotation of the support shaft 25.
The baffle 26 can block unstable coating materials and avoid uneven coating of the workpiece.
In conclusion, the multi-dimensional rotary vacuum coating effect is achieved, the method is suitable for thin film preparation processes of hollow structural parts such as optical glass tubes and polygonal cylindrical lenses under vacuum conditions, the workpiece frame has larger loading capacity, the prepared thin film is better in uniformity, and the production efficiency is increased.
It will be apparent that the embodiments described above are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or described herein.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (7)
1. The utility model provides a multidimension rotation type vacuum coating work piece frame which characterized in that: including fixed plate (1), fixed support frame (11) of downside of fixed plate (1), the outer wall bottom circumference of support frame (11) is fixed with a plurality of axle sleeves (22), the fixed cover of one end that axle sleeve (22) is close to support frame (11) is equipped with a plurality of backup pads (23), axle sleeve (22) circumference evenly distributed has a plurality of back shaft (25), the one end that back shaft (25) is close to support frame (11) all runs through backup pad (23), back shaft (25) are connected with backup pad (23) rotation, axle sleeve (22) and back shaft (25) all are suitable for under external drive and rotate.
2. A multi-dimensional rotating vacuum coating work-piece holder as set forth in claim 1 wherein: the outer wall bottom of support frame (11) is fixed with a plurality of fixed gears (17) that correspond with axle sleeve (22) position, the circumference evenly distributed of fixed gear (17) has a plurality of planetary gear (24) that correspond with back shaft (25) quantity, the one end wind that back shaft (25) are close to support frame (11) is fixed with the rotation center of a planetary gear (24).
3. A multi-dimensional rotating vacuum coated workpiece holder as defined in claim 2, wherein: the outer wall bottom of support frame (11) rotates and is connected with a plurality of gear shafts (2) that correspond with fixed gear (17) position, fixed gear (17) cover is located on gear shaft (2), axle sleeve (22) fixed cover is located on gear shaft (2).
4. A multi-dimensional rotating vacuum coated workpiece holder as defined in claim 3, wherein: the bottom of the inner side of the fixed plate (1) is rotationally connected with a sun gear (16), one end of the gear shaft (2) stretches into the supporting frame (11), a driven gear (21) is fixedly connected with the inside of the supporting frame, and the driven gears (21) are meshed with the sun gear (16).
5. The multi-dimensional rotating vacuum coating work-piece holder of claim 4, wherein: a main shaft (12) is rotatably connected between the bottom of the inner side of the fixed plate (1) and the supporting frame (11), and the sun gear (16) is fixedly sleeved at the bottom of the main shaft (12).
6. The multi-dimensional rotating vacuum coating work-piece holder of claim 5, wherein: the top of main shaft (12) is fixed to be overlapped and is equipped with drive gear (13), one side meshing of drive gear (13) has driving gear (14), the upside of fixed plate (1) is fixed with driver (15) that correspond with driving gear (14) position, the output shaft and the driving gear (14) of driver (15) are fixed.
7. A multi-dimensional rotating vacuum coating work-piece holder as set forth in claim 1 wherein: and the shaft sleeve (22) is uniformly fixed with the partition plates (26) corresponding to the support shafts (25), and the partition plates (26) are respectively positioned between two adjacent support shafts (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311858960.7A CN117821919A (en) | 2023-12-30 | 2023-12-30 | Multi-dimensional rotary vacuum coating workpiece frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311858960.7A CN117821919A (en) | 2023-12-30 | 2023-12-30 | Multi-dimensional rotary vacuum coating workpiece frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117821919A true CN117821919A (en) | 2024-04-05 |
Family
ID=90523767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311858960.7A Pending CN117821919A (en) | 2023-12-30 | 2023-12-30 | Multi-dimensional rotary vacuum coating workpiece frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117821919A (en) |
-
2023
- 2023-12-30 CN CN202311858960.7A patent/CN117821919A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107601038B (en) | It is a kind of for build detection materials handling intelligent robot | |
| CN111809159B (en) | Rotating frame device | |
| CN105112880A (en) | Lens coating method | |
| CN110760808B (en) | Curved surface screen magnetron sputtering assembly | |
| CN201587977U (en) | Film coating fixture for film coating machine | |
| CN117821919A (en) | Multi-dimensional rotary vacuum coating workpiece frame | |
| CN215103524U (en) | Three-dimensional turntable structure applied to vacuum tool coating equipment | |
| CN211497775U (en) | Workpiece mounting mechanism for horizontal vacuum coating machine | |
| CN216972667U (en) | Overhead revolution and rotation vacuum coating machine | |
| CN210215536U (en) | Hanger revolution mechanism of film plating machine | |
| CN110814979A (en) | Four-side multi-station synchronous gear transmission polishing mechanism | |
| CN219053846U (en) | Guide mark design processing edging equipment | |
| CN115261808B (en) | Multi-dimensional rotary workpiece frame and vacuum coating machine with same | |
| CN111890082A (en) | Transmission equipment is used in processing of polygon section of thick bamboo spare part | |
| CN213003095U (en) | Rotary storage device of numerical control gear milling machine | |
| CN211305966U (en) | Four-side multi-station synchronous gear transmission polishing mechanism | |
| CN211412433U (en) | Rotary table convenient to operate | |
| CN113699500A (en) | Vacuum coating monomer machine work piece frame | |
| CN212192128U (en) | Turntable type processing platform system | |
| CN210906801U (en) | Storage structure of color-coated aluminum roller coating line | |
| CN219907838U (en) | Rotary disc for lens coating | |
| CN117888071A (en) | Vacuum coating work piece frame with upset function | |
| CN108642455B (en) | Vacuum coating sample table | |
| CN220952024U (en) | All-round rotatory vacuum evaporation coating machine work piece frame | |
| CN219255937U (en) | Ceramic gold drawing processing automation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |