CN117790326A - Ultrasonic welding method for aluminum-coated ceramic lining plate - Google Patents
Ultrasonic welding method for aluminum-coated ceramic lining plate Download PDFInfo
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- CN117790326A CN117790326A CN202311836621.9A CN202311836621A CN117790326A CN 117790326 A CN117790326 A CN 117790326A CN 202311836621 A CN202311836621 A CN 202311836621A CN 117790326 A CN117790326 A CN 117790326A
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- ultrasonic welding
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- copper
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- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 162
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 162
- 239000000919 ceramic Substances 0.000 title claims abstract description 114
- 238000003466 welding Methods 0.000 title claims abstract description 96
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 111
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 77
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 66
- 229910052802 copper Inorganic materials 0.000 claims abstract description 64
- 239000010949 copper Substances 0.000 claims abstract description 64
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000005543 nano-size silicon particle Substances 0.000 claims abstract description 32
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 22
- 229910052709 silver Inorganic materials 0.000 claims abstract description 18
- 239000004332 silver Substances 0.000 claims abstract description 18
- 239000000243 solution Substances 0.000 claims description 47
- 239000011248 coating agent Substances 0.000 claims description 37
- 238000000576 coating method Methods 0.000 claims description 37
- 238000001035 drying Methods 0.000 claims description 33
- 238000005488 sandblasting Methods 0.000 claims description 31
- 238000005406 washing Methods 0.000 claims description 30
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 24
- 238000010288 cold spraying Methods 0.000 claims description 24
- 238000005507 spraying Methods 0.000 claims description 23
- 238000003756 stirring Methods 0.000 claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 20
- 239000007864 aqueous solution Substances 0.000 claims description 16
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 15
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 12
- HAAYBYDROVFKPU-UHFFFAOYSA-N silver;azane;nitrate Chemical compound N.N.[Ag+].[O-][N+]([O-])=O HAAYBYDROVFKPU-UHFFFAOYSA-N 0.000 claims description 12
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 10
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 10
- 229910021641 deionized water Inorganic materials 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000002244 precipitate Substances 0.000 claims description 10
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 10
- 238000001132 ultrasonic dispersion Methods 0.000 claims description 10
- 239000003513 alkali Substances 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 9
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 229910017604 nitric acid Inorganic materials 0.000 claims description 8
- 239000003921 oil Substances 0.000 claims description 8
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 claims description 5
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 claims description 5
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 claims description 5
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 5
- 235000019400 benzoyl peroxide Nutrition 0.000 claims description 5
- 239000008103 glucose Substances 0.000 claims description 5
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 235000006408 oxalic acid Nutrition 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 5
- 239000012279 sodium borohydride Substances 0.000 claims description 5
- 229910000033 sodium borohydride Inorganic materials 0.000 claims description 5
- 238000005238 degreasing Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 239000004576 sand Substances 0.000 claims description 2
- 238000005336 cracking Methods 0.000 abstract description 4
- 239000002086 nanomaterial Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
The invention relates to the technical field of power semiconductor manufacturing, in particular to an ultrasonic welding method for an aluminum-coated ceramic lining plate. According to the ultrasonic welding method for the aluminum-coated ceramic lining plate, copper is sprayed at the welding position of the aluminum surface terminal in a cold mode, a copper layer is formed at the aluminum surface terminal, on one hand, the hardness of the aluminum surface is improved through the formed copper layer, deformation of the aluminum surface during ultrasonic welding is reduced, and the pressure of a welding head on the lower-layer ceramic substrate is reduced, so that the cracking problem of the ceramic substrate during welding is reduced. On the other hand, the introduction of copper improves the weldability of the aluminum surface and the copper terminal. And simultaneously, the load of the micro silver and the nano silicon dioxide can form a layer of compact micro-nano structure on the aluminum nitride aluminum-coated ceramic substrate, so that the interfacial adhesion between the aluminum layer and the copper layer sprayed subsequently can be improved.
Description
Technical Field
The invention relates to the technical field of power semiconductor manufacturing, in particular to an ultrasonic welding method for an aluminum-coated ceramic lining plate.
Background
In the packaging process of the power semiconductor device, the connection between the substrate and the terminal is connected through a lead or the terminal is directly welded on the substrate, and the traditional welding between the substrate and the terminal is the welding between the copper terminal and the copper surface. The common welding method is ultrasonic welding, and the ultrasonic welding has the advantages of small heat, no pollution, high welding speed and the like. The aluminum face welded copper terminal belongs to welding of dissimilar metals relative to the copper face welded copper terminal. Because the melting point and hardness of aluminum are lower than those of copper, the difficulty in welding the aluminum face and the copper terminal is increased. And because the hardness of aluminum is lower than that of copper, the problems of aluminum surface deformation and ceramic substrate cracking caused by pressure generated by a welding head on the lower ceramic substrate are easily caused in the welding process.
In order to solve the problems, the invention provides a method for ultrasonic welding of an aluminum-coated ceramic lining plate, which enhances the ultrasonic welding effect of a copper terminal on the ceramic aluminum-coated lining plate.
Disclosure of Invention
The invention aims to provide an ultrasonic welding method for an aluminum-coated ceramic lining plate, which aims to solve the problems in the background technology.
In order to solve the technical problems, the invention provides the following technical scheme: an ultrasonic welding method for an aluminum-coated ceramic lining plate.
An ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: taking an aluminum nitride aluminum-coated ceramic substrate, deoiling the aluminum nitride aluminum-coated ceramic substrate by using alkali liquor, and then cleaning the aluminum nitride aluminum-coated ceramic substrate by using acid liquor to obtain a treated aluminum nitride aluminum-coated ceramic substrate;
step two: taking the treated aluminum nitride aluminum-coated ceramic substrate, and carrying out sand blasting on the welding part of the aluminum surface terminal to obtain a sand blasted aluminum nitride aluminum-coated ceramic substrate;
step three: spraying a copper layer on the welded part of the aluminum surface terminal to obtain the aluminum nitride aluminum-coated ceramic substrate subjected to cold copper spraying;
step four: and taking the aluminum nitride aluminum-coated ceramic substrate after cold spraying copper, and performing ultrasonic welding of the terminal on the cold spraying copper part to obtain the aluminum-coated ceramic lining plate after ultrasonic welding.
More optimally, in the first step, the thickness of the aluminum layer on the surface of the aluminum nitride aluminum-coated ceramic substrate is 0.2-0.6 mm.
More preferably, in the first step, the degreasing step is as follows: preparing 10-20% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkali washing for 3-5 min, taking out and washing;
the cleaning steps are as follows: preparing 10-20% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate after oil removal into acid washing for 90-100 s, taking out, cleaning, and drying at 80-120 ℃ to obtain the treated aluminum nitride aluminum-coated ceramic substrate.
More optimally, in the second step, the spraying pressure is 0.2-0.3 MPa, and the particle size of the alumina powder is 10-50 mu m during sand blasting.
More optimally, in the third step, when copper is sprayed in a cold way, the original gas pressure is 0.4-1.0 MPa, and the particle size of copper powder is 1-5 mu m.
More optimally, in the step four, the pressure is 90-100N, the power is 150-200W and the amplitude is 90-100 mu m during ultrasonic welding.
More optimally, in the second step, the roughness of the aluminum surface obtained after sand blasting is Ra0.7-1.0 mu m.
More optimally, in the third step, after copper is sprayed by cooling, the thickness of the copper layer is 35-45 mu m.
More optimally, in the third step, the surface of the aluminum nitride aluminum-coated ceramic substrate before cold copper spraying is also coated, and the treatment method comprises the following steps:
s1: taking silver nitrate solution, dropwise adding ammonia water to enable the solution to generate white precipitate, and continuously dropwise adding ammonia water to enable the white precipitate to disappear to obtain diammine silver nitrate solution; coating a diammine silver nitrate solution on the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and drying to obtain a substrate A;
s2: taking glucose solution, sodium borohydride solution and hydrogen peroxide water solution, and uniformly stirring to obtain solution A; coating a solution A on a substrate A, and drying to obtain a substrate B loaded with micro silver;
s3: and (3) coating the nano silicon dioxide coating material on the substrate B loaded with the micro silver, and drying to obtain a substrate C.
More optimally, the preparation method of the nano silicon dioxide coating material comprises the following steps: taking ethanol and deionized water, uniformly stirring, adding nano silicon dioxide, and performing ultrasonic dispersion to obtain nano silicon dioxide dispersion liquid; mixing oxalic acid, ethanol and deionized water, adding a silane coupling agent KH-570, stirring, adding the mixture into nano silicon dioxide dispersion, heating to 70-80 ℃, stirring for 3-5 h, centrifuging, drying, adding N, N-dimethylformamide, performing ultrasonic dispersion, adding methyl methacrylate and dibenzoyl peroxide, heating to 55-65 ℃, reacting for 3-4 h, centrifuging, and drying at 55-60 ℃ for 8-10 h to obtain the nano silicon dioxide coating material.
Compared with the prior art, the invention has the following beneficial effects:
(1) According to the ultrasonic welding method for the aluminum-coated ceramic lining plate, copper is sprayed at the welding position of the aluminum surface terminal in a cold mode, a copper layer is formed at the aluminum surface terminal, on one hand, the hardness of the aluminum surface is improved through the formed copper layer, deformation of the aluminum surface during ultrasonic welding is reduced, and the pressure of a welding head on the lower-layer ceramic substrate is reduced, so that the cracking problem of the ceramic substrate during welding is reduced. On the other hand, the introduction of copper improves the weldability of the aluminum surface and the copper terminal. The contact resistance of the welded joint when the device is in use is reduced.
(2) According to the invention, a layer of diammine silver nitrate solution is coated on an aluminum nitride coated aluminum ceramic substrate subjected to roughening treatment on an aluminum surface, then the aluminum nitride coated aluminum ceramic substrate is reduced into micrometer silver, a layer of nano silicon dioxide coating material is further coated on the aluminum nitride coated aluminum ceramic substrate, and then cold copper spraying treatment is carried out on a welding position of an aluminum surface terminal. The load of the micro silver and the nano silicon dioxide can form a layer of compact micro-nano structure on the aluminum nitride aluminum-coated ceramic substrate, so that the interfacial adhesion between the aluminum layer and the subsequently sprayed copper layer can be improved, and the possibility of interfacial loosening caused by factors such as thermal expansion in the use process is reduced. The load of the micron silver can improve the heat conductivity of the surface of the aluminum layer, effectively promote the heat transfer and heat dissipation, and improve the heat resistance of the aluminum-coated ceramic lining plate after ultrasonic welding.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is an SEM topography of a copper layer after cold spraying according to example 1 of the present invention;
fig. 2 is a schematic view of ultrasonic welding of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1: an ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: oil removal of aluminum surfaces: preparing 15% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkaline washing for 4min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing 15% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 95s, taking out, washing with pure water, and drying at 100 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the grain diameter of 20 mu m and the spraying pressure of 0.2MPa;
step four: cold spraying copper: taking the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and carrying out cold copper spraying on the welding part of the aluminum surface terminal by using cold spraying equipment; the cold spraying process comprises the following steps: the air source pressure is 0.5MPa, the grain diameter of the copper powder is 3 mu m, and the thickness of the copper layer is 35 mu m;
step five: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate subjected to cold copper spraying in the fourth step, and performing ultrasonic welding on a terminal at the cold copper spraying position by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 95N, the power is 170W, the amplitude is 95 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Example 2: an ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: oil removal of aluminum surfaces: preparing 10% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkali washing for 3min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing a 10% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 90s, taking out, washing with pure water, and drying at 80 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the particle diameter of 10 mu m and the spraying pressure of 0.2MPa;
step four: cold spraying copper: taking the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and carrying out cold copper spraying on the welding part of the aluminum surface terminal by using cold spraying equipment; the cold spraying process comprises the following steps: the air source pressure is 0.4MPa, the grain diameter of the copper powder is 1 mu m, and the thickness of the copper layer is 45 mu m;
step five: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate subjected to cold copper spraying in the fourth step, and performing ultrasonic welding on a terminal at the cold copper spraying position by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 90N, the power is 150W, the amplitude is 90 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Example 3: an ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: oil removal of aluminum surfaces: preparing a 20% sodium hydroxide aqueous solution, immersing the aluminum nitride coated ceramic substrate in alkali washing for 5min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing a 20% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 100s, taking out, washing with pure water, and drying at 120 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the particle diameter of 50 mu m and the spraying pressure of 0.3MPa;
step four: preparation of a substrate C:
taking 0.01M silver nitrate solution, dropwise adding ammonia water to enable the solution to generate white precipitate, and continuously dropwise adding ammonia water to enable the white precipitate to disappear to obtain a diammine silver nitrate solution; coating a diammine silver nitrate solution on the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and drying to obtain a substrate A, wherein the coating thickness is 0.02 mm;
taking 0.01M glucose solution, 0.01M sodium borohydride solution and 1% hydrogen peroxide water solution, and uniformly stirring to obtain solution A; coating solution A on a substrate A with the coating thickness of 0.02mm, and drying to obtain a substrate B loaded with micro silver;
taking 20mL of ethanol and 80mL of deionized water, uniformly stirring, adding 5g of nano silicon dioxide, and performing ultrasonic dispersion to obtain nano silicon dioxide dispersion liquid; taking 0.5g of oxalic acid, 10mL of ethanol and 10mL of deionized water, uniformly stirring, adding 2g of silane coupling agent KH-570, uniformly stirring, then adding the mixture into nano silicon dioxide dispersion liquid, heating to 75 ℃, stirring for 4 hours, centrifuging, drying, adding 200g of N, N-dimethylformamide, performing ultrasonic dispersion, adding 5g of methyl methacrylate and 0.04g of dibenzoyl peroxide, heating to 60 ℃, reacting for 3.5 hours, centrifuging, and drying at 57 ℃ for 9 hours to obtain nano silicon dioxide coating material;
coating nano silicon dioxide coating material on a substrate B loaded with micro silver, wherein the coating thickness is 0.02mm, and drying to obtain a substrate C;
step five: cold spraying copper: taking the substrate C in the step four, and carrying out cold spraying copper on the welding part of the aluminum surface terminal by using cold spraying equipment; the cold spraying process comprises the following steps: the air source pressure is 0.7MPa, the grain diameter of the copper powder is 3 mu m, and the thickness of the copper layer is 35 mu m;
step six: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate treated in the fifth step, and performing ultrasonic welding of the terminal on the cold spray copper part by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 95N, the power is 170W, the amplitude is 95 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Example 4: an ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: oil removal of aluminum surfaces: preparing 10% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkali washing for 3min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing a 10% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 90s, taking out, washing with pure water, and drying at 80 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the particle diameter of 10 mu m and the spraying pressure of 0.2MPa;
step four: preparation of a substrate C:
taking 0.01M silver nitrate solution, dropwise adding ammonia water to enable the solution to generate white precipitate, and continuously dropwise adding ammonia water to enable the white precipitate to disappear to obtain a diammine silver nitrate solution; coating a diammine silver nitrate solution on the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, wherein the coating thickness is 0.02mm, and drying to obtain a substrate A;
taking 0.01M glucose solution, 0.01M sodium borohydride solution and 1% hydrogen peroxide water solution, and uniformly stirring to obtain solution A; coating solution A on a substrate A with the coating thickness of 0.02mm, and drying to obtain a substrate B loaded with micro silver;
taking 20mL of ethanol and 80mL of deionized water, uniformly stirring, adding 5g of nano silicon dioxide, and performing ultrasonic dispersion to obtain nano silicon dioxide dispersion liquid; taking 0.5g of oxalic acid, 10mL of ethanol and 10mL of deionized water, uniformly stirring, adding 2g of silane coupling agent KH-570, uniformly stirring, then adding the mixture into nano silicon dioxide dispersion liquid, heating to 70 ℃, stirring for 3 hours, centrifuging, drying, adding 200g of N, N-dimethylformamide, performing ultrasonic dispersion, adding 5g of methyl methacrylate and 0.04g of dibenzoyl peroxide, heating to 55 ℃, reacting for 3 hours, centrifuging, and drying at 55 ℃ for 8 hours to obtain nano silicon dioxide coating material;
coating nano silicon dioxide coating material on a substrate B loaded with micro silver, wherein the coating thickness is 0.02mm, and drying to obtain a substrate C;
step five: cold spraying copper: taking the substrate C in the step four, and carrying out cold spraying copper on the welding part of the aluminum surface terminal by using cold spraying equipment; the cold spraying process comprises the following steps: the air source pressure is 0.4MPa, the grain diameter of the copper powder is 1 mu m, and the thickness of the copper layer is 35 mu m;
step six: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate treated in the fifth step, and performing ultrasonic welding of the terminal on the cold spray copper part by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 90N, the power is 150W, the amplitude is 90 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Example 5: an ultrasonic welding method of an aluminum-coated ceramic lining plate comprises the following steps:
step one: oil removal of aluminum surfaces: preparing 10% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkali washing for 3min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing a 10% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 90s, taking out, washing with pure water, and drying at 80 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the particle diameter of 10 mu m and the spraying pressure of 0.2MPa;
step four: preparation of a substrate C:
taking 0.01M silver nitrate solution, dropwise adding ammonia water to enable the solution to generate white precipitate, and continuously dropwise adding ammonia water to enable the white precipitate to disappear to obtain a diammine silver nitrate solution; coating a diammine silver nitrate solution on the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and drying to obtain a substrate A;
taking 0.01M glucose solution, 0.01M sodium borohydride solution and 1% hydrogen peroxide water solution, and uniformly stirring to obtain solution A; coating solution A on a substrate A with the coating thickness of 0.02mm, and drying to obtain a substrate B loaded with micro silver;
taking 20mL of ethanol and 80mL of deionized water, uniformly stirring, adding 5g of nano silicon dioxide, and performing ultrasonic dispersion to obtain nano silicon dioxide dispersion liquid; taking 0.5g of oxalic acid, 10mL of ethanol and 10mL of deionized water, uniformly stirring, adding 2g of silane coupling agent KH-570, uniformly stirring, then adding the mixture into nano silicon dioxide dispersion liquid, heating to 80 ℃, stirring for 5 hours, centrifuging, drying, adding 200g of N, N-dimethylformamide, performing ultrasonic dispersion, adding 5g of methyl methacrylate and 0.04g of dibenzoyl peroxide, heating to 65 ℃, reacting for 4 hours, centrifuging, and drying at 60 ℃ for 10 hours to obtain nano silicon dioxide coating material;
coating nano silicon dioxide coating material on a substrate B loaded with micro silver, wherein the coating thickness is 0.02mm, and drying to obtain a substrate C;
step five: cold spraying copper: taking the substrate C in the step four, and carrying out cold spraying copper on the welding part of the aluminum surface terminal by using cold spraying equipment; the cold spraying process comprises the following steps: the air source pressure is 1.0MPa, the grain diameter of the copper powder is 5 mu m, and the thickness of the copper layer is 35 mu m;
step six: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate treated in the fifth step, and performing ultrasonic welding of the terminal on the cold spray copper part by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 100N, the power is 200W, the amplitude is 100 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Comparative example 1: only the surface of the aluminum nitride-coated ceramic substrate was subjected to blasting treatment, and the rest was the same as in example 1:
step one: oil removal of aluminum surfaces: preparing a 20% sodium hydroxide aqueous solution, immersing the aluminum nitride coated ceramic substrate in alkali washing for 5min, taking out and washing with pure water;
step two: cleaning aluminum surfaces: preparing a 20% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate treated in the first step into acid washing for 100s, taking out, washing with pure water, and drying at 120 ℃;
step three: coarsening an aluminum surface: taking the aluminum nitride aluminum-coated ceramic substrate treated in the second step, and carrying out sand blasting treatment on the welding part of the aluminum surface terminal by using sand blasting equipment; the sand blasting abrasive is alumina with the particle diameter of 50 mu m and the spraying pressure of 0.3MPa;
step four: ultrasonic welding: taking the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and performing ultrasonic welding of the terminal on the cold sprayed copper part by using ultrasonic welding equipment; the ultrasonic welding process comprises the following steps: the pressure is 100N, the power is 200W, the amplitude is 100 mu m, and the welded aluminum-coated ceramic lining plate is obtained.
Experiment 1:
the welded aluminum-coated ceramic liners prepared in example 1, example 2 and comparative example 1 were subjected to performance test, the surface hardness of the aluminum-coated ceramic substrate was tested by using vickers hardness, the load was 0.2kg, and the pressure was maintained for 10s, and the obtained data are shown in the following table:
| copper layer thickness (μm) | Surface hardness (HV 0.2) | |
| Example 1 | 35 | 45 |
| Example 2 | 45 | 50 |
| Comparative example 1 | / | 15 |
Conclusion: as can be seen from comparison of data on the surface, in the embodiment 1 to the embodiment 3, copper is sprayed at the welding position of the aluminum surface terminal in a cold manner, a copper layer is formed at the aluminum surface terminal part, on one hand, the hardness of the aluminum surface is improved, the deformation of the aluminum surface during ultrasonic welding is reduced, the problem of cracking of the substrate caused by the pressure of a welding head on the substrate at the lower layer during welding is reduced, the weldability of the aluminum surface and the copper terminal is improved due to the introduction of copper metal, at the moment, the surface hardness of the aluminum-coated ceramic substrate is higher, the copper spraying treatment is not performed in the comparative example 1, and at the moment, the surface hardness of the aluminum-coated ceramic substrate is only 15 and is greatly reduced.
Experiment 2:
taking the welded aluminum-coated ceramic liners prepared in the examples 1 to 5, carrying out a cold-hot cycle test, and observing the appearance: the temperature is increased from 25 ℃ to 280 ℃ and the cold and hot cycle is carried out for 1200 times, so that the heat pump is excellent without damage, separation and bulge; 1000 times of cold and hot circulation, no damage, no separation and no bulge, and the obtained data are shown in the following table:
| example 1 | Example 2 | Example 3 | Example 4 | Example 5 | |
| Cold and hot circulation | Qualified product | Qualified product | Excellent quality | Excellent quality | Excellent quality |
Conclusion: according to the invention, in the embodiment 3 to the embodiment 5, a layer of diammine silver nitrate solution is coated on an aluminum nitride coated aluminum ceramic substrate after roughening treatment of an aluminum surface, then the aluminum nitride coated aluminum ceramic substrate is reduced into micro silver, a layer of nano silicon dioxide coating material is further coated on the micro silver, and then cold copper spraying treatment is carried out at a welding position of an aluminum surface terminal. The load of the micro silver and the nano silicon dioxide can form a layer of compact micro-nano structure on the aluminum nitride aluminum-coated ceramic substrate, so that the interfacial adhesion between the aluminum layer and the subsequently sprayed copper layer can be improved, and the possibility of interfacial loosening caused by factors such as thermal expansion in the use process is reduced. The load of the micron silver can improve the heat conductivity of the surface of the aluminum layer, effectively promote the heat transfer and heat dissipation, and improve the heat resistance of the aluminum-coated ceramic lining plate after ultrasonic welding. Therefore, the aluminum-coated ceramic lining plates of the examples 3 to 5 are free from damage, separation and bulge after being subjected to cold and hot circulation for 1200 times.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for ultrasonic welding of an aluminum-coated ceramic lining plate is characterized by comprising the following steps of: the method comprises the following steps:
step one: taking an aluminum nitride aluminum-coated ceramic substrate, deoiling the aluminum nitride aluminum-coated ceramic substrate by using alkali liquor, and then cleaning the aluminum nitride aluminum-coated ceramic substrate by using acid liquor to obtain a treated aluminum nitride aluminum-coated ceramic substrate;
step two: taking the treated aluminum nitride aluminum-coated ceramic substrate, and carrying out sand blasting on the welding part of the aluminum surface terminal to obtain a sand blasted aluminum nitride aluminum-coated ceramic substrate;
step three: spraying a copper layer on the welded part of the aluminum surface terminal to obtain the aluminum nitride aluminum-coated ceramic substrate subjected to cold copper spraying;
step four: and taking the aluminum nitride aluminum-coated ceramic substrate after cold spraying copper, and performing ultrasonic welding of the terminal on the cold spraying copper part to obtain the aluminum-coated ceramic lining plate after ultrasonic welding.
2. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the first step, the thickness of the aluminum layer on the surface of the aluminum nitride aluminum-coated ceramic substrate is 0.2-0.6 mm.
3. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the first step, the degreasing step is as follows: preparing 10-20% sodium hydroxide aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate into alkali washing for 3-5 min, taking out and washing;
the cleaning steps are as follows: preparing 10-20% nitric acid aqueous solution, immersing the aluminum nitride aluminum-coated ceramic substrate after oil removal into acid washing for 90-100 s, taking out, cleaning, and drying at 80-120 ℃ to obtain the treated aluminum nitride aluminum-coated ceramic substrate.
4. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the second step, the spraying pressure is 0.2-0.3 MPa, and the particle size of the alumina powder is 10-50 mu m.
5. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the third step, when copper is sprayed in a cold way, the original gas pressure is 0.4-1.0 MPa, and the particle size of copper powder is 1-5 mu m.
6. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the fourth step, the pressure is 90-100N, the power is 150-200W, and the amplitude is 90-100 μm during ultrasonic welding.
7. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the second step, the roughness of the aluminum surface obtained after sand blasting is Ra0.7-1.0 mu m.
8. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps: in the third step, after cold spraying copper, the thickness of the copper layer is 35-45 mu m.
9. The method for ultrasonic welding of the aluminum-clad ceramic lining plate according to claim 1, wherein the method comprises the following steps:
in the third step, the surface of the aluminum nitride aluminum-coated ceramic substrate before cold copper spraying is also coated, and the treatment method comprises the following steps:
s1: taking silver nitrate solution, dropwise adding ammonia water to enable the solution to generate white precipitate, and continuously dropwise adding ammonia water to enable the white precipitate to disappear to obtain diammine silver nitrate solution; coating a diammine silver nitrate solution on the aluminum nitride aluminum-coated ceramic substrate subjected to sand blasting in the third step, and drying to obtain a substrate A;
s2: taking glucose solution, sodium borohydride solution and hydrogen peroxide water solution, and uniformly stirring to obtain solution A; coating a solution A on a substrate A, and drying to obtain a substrate B loaded with micro silver;
s3: and (3) coating the nano silicon dioxide coating material on the substrate B loaded with the micro silver, and drying to obtain a substrate C.
10. The method for ultrasonic welding of aluminum-clad ceramic liners according to claim 9, characterized in that: the preparation method of the nano silicon dioxide coating material comprises the following steps: taking ethanol and deionized water, uniformly stirring, adding nano silicon dioxide, and performing ultrasonic dispersion to obtain nano silicon dioxide dispersion liquid; mixing oxalic acid, ethanol and deionized water, adding a silane coupling agent KH-570, stirring, adding the mixture into nano silicon dioxide dispersion, heating to 70-80 ℃, stirring for 3-5 h, centrifuging, drying, adding N, N-dimethylformamide, performing ultrasonic dispersion, adding methyl methacrylate and dibenzoyl peroxide, heating to 55-65 ℃, reacting for 3-4 h, centrifuging, and drying at 55-60 ℃ for 8-10 h to obtain the nano silicon dioxide coating material.
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