CN117742441A - Method for enabling high-power radio frequency power supply to output rated power in variable frequency environment - Google Patents
Method for enabling high-power radio frequency power supply to output rated power in variable frequency environment Download PDFInfo
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- CN117742441A CN117742441A CN202410171941.5A CN202410171941A CN117742441A CN 117742441 A CN117742441 A CN 117742441A CN 202410171941 A CN202410171941 A CN 202410171941A CN 117742441 A CN117742441 A CN 117742441A
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Abstract
The invention discloses a method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment.A multistage filter only comprising an inductor and a capacitor is arranged between a power amplifier and an output load in a tail end circuit of a power amplifier of the radio frequency power supply; inputting the tail end circuit of the power amplifier into simulation software, setting output impedance, bandwidth requirement, element optimization range and optimization operation times according to the requirement, executing simulation optimization by the simulation software according to the set parameters, and determining the optimization parameters of the inductance and the capacitance in the multistage filter. The invention provides a method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment, which is characterized in that a multistage filter is added in a final-stage circuit of a power amplifier of the original radio frequency power supply under the condition that the design of the original radio frequency power supply is not changed, so that the bandwidth of the radio frequency power supply is widened to adapt to the variable frequency amplitude of the radio frequency power supply, and the radio frequency power supply can realize sweep frequency matching in a wider frequency range, thereby outputting rated power.
Description
Technical Field
The invention relates to the technical field of radio frequency power supplies, in particular to a method for outputting rated power of a high-power radio frequency power supply designed for single frequency under a variable frequency environment.
Background
In semiconductor plasma applications, impedance matching is one of the key factors in ensuring stable operation of the plasma within the vacuum chamber, and if the impedance matching is poor, it may cause instability of the plasma and even damage to the equipment. In practical application, the impedance of the plasma may change due to the influence of various factors, and the impedance matching mode is adopted by the semiconductor plasma, so that the impedance matcher is increased to complete the impedance matching. The method comprises the steps of firstly enabling a radio frequency power supply to detect incident power and reflected power, then obtaining a power reflection coefficient through calculation, finally obtaining a frequency adjustment quantity, then fixing the working frequency of the radio frequency power supply, adjusting an impedance matcher, completing impedance matching, eliminating the influence of impedance change of plasma, and enabling equipment performance to be stable. However, when the impedance matching mode is used, since the output frequency of the radio frequency power supply is adjusted by judging the relationship between the power reflection coefficient and the working frequency, that is, the frequency modulation mode of the radio frequency power supply is applied to find a suitable working frequency point of the radio frequency power supply, when the radio frequency power supply performs sweep frequency matching, the power reflection coefficient in the circuit and the working frequency of the radio frequency power supply need to be ensured to be in a one-to-one corresponding change relationship.
However, in the actual impedance matching process, because the used radio frequency power supplies are designed aiming at a single fixed frequency, the load impedance of the radio frequency power supplies is fixed, when the impedance changes, the load impedance of the radio frequency power supplies is unsuitable, and the working frequency of the radio frequency power supplies can oscillate in a certain area, so that the proportional relation between the reflected power and the incident power cannot be fixed, the sweep matching of the radio frequency power supplies fails, the rated power cannot be output by the output power because of impedance mismatch, the rapid impedance matching cannot be realized in the vacuum cavity, and the instability of plasma and the reduction of the equipment performance are caused.
Specifically, in a common rf power supply, when the output impedance z_pa_o of the power amplifier of the rf power supply is conjugate matched with the external impedance z_o (typically 50 ohms) by the matching circuit, the power amplifier can output full power, so that the rf power supply can output rated power, and when they are not matched, the power of the rf power supply cannot be transmitted, and the reflected power is proportional to the square of the impedance reflection coefficient/gain (G). Especially when the matching network is a single network, as a single-frequency radio frequency power supply with a fixed design, the gain (reflection coefficient) can fade rapidly outside the central frequency point, so that in the frequency modulation process of the radio frequency power supply, the frequency point deviating from the central frequency point cannot output enough rated power.
Disclosure of Invention
In order to solve the problem that a high-power supply designed for a single frequency cannot output rated power in a variable frequency environment, the invention provides a method for enabling the high-power radio-frequency power supply to output rated power in the variable frequency environment.
The technical scheme of the invention is as follows:
a method for making high-power radio frequency power supply output rated power under frequency conversion environment, in the end circuit of power amplifier of the radio frequency power supply, set up the multistage filter comprising inductance and capacitance only between power amplifier and output load;
inputting the tail end circuit of the power amplifier into simulation software, setting output impedance, bandwidth requirement, element optimization range and optimization operation times according to the requirement, executing simulation optimization by the simulation software according to the set parameters, and determining the optimization parameters of the inductance and the capacitance in the multistage filter.
The power amplifier comprises a first field effect tube, a fourth capacitor and a fourth inductor, wherein an output port of the radio frequency power supply is connected with one end of the fourth inductor, the other end of the fourth inductor is respectively connected with a multistage filter, one end of the fourth capacitor and a drain electrode of the first field effect tube, and a source electrode of the first field effect tube is grounded with the other end of the fourth capacitor.
The multistage filter comprises a plurality of filter circuits, the filter circuits are connected in series, the filter circuits comprise an inductor and a capacitor, the inductor is grounded through the capacitor, and the inductors among the filter circuits are connected in series.
Further, the multistage filter is a three-stage filter, the multistage filter comprises three filter circuits, the power amplifier is connected with one end of a first inductor of the first filter circuit, the other end of the first inductor of the first filter circuit is respectively connected with one end of a first capacitor of the first filter circuit and one end of a second inductor of the second filter circuit, the other end of the first capacitor is grounded, the other end of the second inductor is respectively connected with one end of a second capacitor of the second filter circuit and one end of a third inductor of the third filter circuit, the other end of the second capacitor is grounded, the other end of the third inductor is respectively connected with one end of a third capacitor of the third filter circuit and one end of an output load, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
Further, the multistage filter is a three-stage filter, the multistage filter comprises three filter circuits, the tail end port of the power amplifier is respectively connected with the anode of the alternating current power supply, one end of the input load and one end of the first inductor, the other end of the first inductor is connected with one end of the third capacitor and one end of the second inductor, the other end of the third capacitor is grounded, one end of the second capacitor and one end of the third inductor are respectively connected with the other end of the second inductor, the other end of the second capacitor is grounded, the other end of the third inductor is respectively connected with one end of the first capacitor, one end of the output load and the output port, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
The method for enabling the high-power radio frequency power supply to output rated power in the variable frequency environment comprises the following steps of:
s1, opening ADS simulation software, entering a schematic diagram editing interface, building a simulation circuit according to a terminal circuit structure, placing simulation circuit elements, and setting the attributes of the elements;
s2, setting a frequency scanning range in a schematic diagram interface;
s3, selecting an optimization tab to set an optimization target;
s4, setting simulation optimization operation times;
s5, starting simulation optimization to obtain a simulation value of the target element.
Further, in step S1, a 4-pole or 6-pole filter is preferably built according to design requirements, and then pole number pruning is performed according to element simulation values.
Further, in step S1, the impedance of the output load is set to the output impedance of the radio frequency power supply.
Further, in step S2, the frequency scanning range is the bandwidth range of the rf power supply required by the design.
Further, before step S4, a target element optimization range is set according to design requirements.
According to the scheme, the invention has the beneficial effects that,
1. the multi-stage filter is added in a mode of adding instead of changing the original set radio frequency power supply circuit, and the multi-stage filter is determined to be arranged at the tail end circuit of the radio frequency circuit, so that the existing high-power radio frequency power supply designed for single frequency can be successfully changed without any change to the existing radio frequency power supply, and rated power can be output in a variable frequency environment.
2. The circuit has the advantages of simple structure, few adopted elements, high implementation feasibility and low cost.
3. The invention adopts ADS simulation software to determine the feasibility of implementation of the mode of adding the multistage filter, wherein aiming at the purpose of the invention, the frequency scanning range of the multistage filter is equal to the design bandwidth range of the radio frequency power supply, so that the final optimized and selected element parameters meet the purpose that the radio frequency power supply can output rated power in a variable frequency environment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments or the description of the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic circuit diagram of a first embodiment of the present invention.
Fig. 2 is a schematic circuit diagram of a second embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
A method for making high-power radio frequency power supply output rated power under variable frequency environment is characterized by that in the end circuit of power amplifier of radio frequency power supply a multistage filter only including inductance and capacitance is set between power amplifier and output load.
In the present embodiment, as shown in fig. 1, in the end circuit of the power amplifier, a three-stage filter is provided between the power amplifier and the output load. The terminal port of the power amplifier is respectively connected with the positive electrode of the alternating current power supply, one end of the input load and one end of the first inductor, the other end of the first inductor is connected with one end of the third capacitor and one end of the second inductor, the other end of the third capacitor is grounded, one end of the second capacitor and one end of the third inductor are respectively connected with the other end of the second inductor, the other end of the second capacitor is grounded, the other end of the third inductor is respectively connected with one end of the first capacitor, one end of the output load and the output port, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
In another embodiment, as shown in fig. 2, in an end circuit of the power amplifier, a three-stage filter is disposed between the power amplifier and the output load, the three-stage filter includes three filter circuits, the power amplifier is connected to one end of a first inductor of the first filter circuit, the other end of the first inductor of the first filter circuit is respectively connected to one end of a first capacitor of the first filter circuit and one end of a second inductor of the second filter circuit, the other end of the first capacitor is grounded, the other end of the second inductor is respectively connected to one end of a second capacitor of the second filter circuit and one end of a third inductor of the third filter circuit, the other end of the third inductor is grounded, the other end of the third inductor is respectively connected to one end of a third capacitor of the third filter circuit and one end of the output load, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
Inputting the tail end circuit of the power amplifier into simulation software, setting output impedance, bandwidth requirement, element optimization range and optimization operation times according to the requirement, executing simulation optimization by the simulation software according to the set parameters, and determining the optimization parameters of the inductance and the capacitance in the multistage filter.
The simulation software is ADS simulation software, and the using steps of the simulation software include:
s1, opening ADS simulation software, entering a schematic diagram editing interface, building a simulation circuit according to a terminal circuit structure, placing simulation circuit elements, and setting the attributes of the elements.
And opening ADS software and entering a schematic diagram editing interface. In this embodiment, three-stage filters are provided, three inductance elements and three capacitance elements are provided, and the inductance elements and the capacitance elements are placed according to the configuration of the circuit. Similarly, other electronic components are selected from the component library, and an end circuit is provided. Normally, a 4-pole or 6-pole filter is preferably built, and then the number of poles of the filter is deleted or increased through the simulation value obtained in step S5.
After the electronic components are configured according to the end circuit, each component is double-clicked to enter its attribute setting, and the value and package of each component are set. The method comprises the steps of finding and clicking a circuit parameter scanning in a tool menu in a schematic diagram editing interface, and then selecting a setting output impedance and a setting input impedance, wherein the output impedance of an input power amplifier and the output impedance of a radio frequency power supply. For the input impedance, the input impedance of the end circuit should be set as the output impedance of the power amplifier, and this value needs to be measured by itself or set according to the specification of the power amplifier; for output impedance, typically set to 50 ohms, the output impedance value may be adjusted according to the application requirements.
And S2, setting a frequency scanning range in the schematic diagram interface.
Find and click "simulation controller" in the schematic editing interface. At the simulation controller interface, find "sweep" option and set up the start frequency and end frequency. In this embodiment, the starting frequency is set to 57MHz and the ending frequency is set to 63MHz. The frequency range is the frequency scanning range of the radio frequency power supply, and is equal to the bandwidth of the multistage filter arranged at the tail end of the radio frequency power supply. If more precise control is required, this can be set by percentage adjustment, for example to 60 MHz.+ -. 5%.
And S3, selecting an optimization tab to set an optimization target.
Setting an optimization target on the simulation controller interface, selecting an 'optimization' tab, and setting the minimum value and the maximum value of the optimization target. In this embodiment, the rf power supply is set as an optimization target, and the ratio of the incident wave to the reflected wave of the first network port of the rf power supply, which is also referred to as a reflection coefficient, has a minimum value of-35 db and a maximum value of-30 db. In other embodiments, other S parameters may be used as optimization targets, such as the reflection coefficients of other network ports of the rf power supply, the forward transmission coefficients and the reverse transmission coefficients of the network ports of the rf power supply.
Prior to step S4, a target element optimization range is set according to design requirements.
To increase the optimization speed, a preliminary estimation or calculation of a rough optimization range may be performed. In the element list, LC elements that you want to optimize are selected. In the 'optimizing' tab, a 'variable' option is found and clicked, the estimated or predicted optimizing range is input, the calculated amount of the operation of simulation software is reduced, and the optimizing value is more accurate. Alternatively, the component parameter range with a limit may be input as the optimization range by selecting the component parameter range as the optimization range, or calculating other item formulas, in order to calculate the optimal solution of the selectable range.
And S4, setting simulation optimization operation times.
And setting the optimization operation times in the 'optimization' tab, and limiting the simulation optimization operation times. The setting of the operation times is determined by the convergence speed of the circuit and the strictness of the requirement target, and repeated operation is carried out if necessary. In this embodiment, since the elements of the multistage filter are simple, and the frequency sweep requirement precision is 5% of the numerical requirement, the severity is small, so that the running times are 1000 times, the simulation running time is reduced, and the calculation hardware requirement standard is reduced.
S5, starting simulation optimization to obtain a simulation value of the target element.
Clicking the "start" button starts the optimization process. In this process, the software will try to find the best component values that meet all the set conditions, and after optimization is completed, the software will provide one or more optimized component values that are the theoretical best solutions, which may require further adjustment and verification in practical applications.
Therefore, after the target element simulation value is obtained, the optimized element value is copied into the schematic diagram, the simulation is rerun to verify the performance, meanwhile, the element value is finely adjusted according to the correction value counted in the past by considering the influence of parasitic effect and PCB layout, and further testing and verification are carried out.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (10)
1. A method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment is characterized in that a multistage filter only comprising an inductor and a capacitor is arranged between a power amplifier and an output load in an end circuit of the power amplifier of the radio frequency power supply;
inputting the tail end circuit of the power amplifier into simulation software, setting output impedance, bandwidth requirement, element optimization range and optimization operation times according to the requirement, executing simulation optimization by the simulation software according to the set parameters, and determining the optimization parameters of the inductance and the capacitance in the multistage filter.
2. The method of claim 1, wherein the power amplifier comprises a first field effect transistor, a fourth capacitor and a fourth inductor, the output port of the radio frequency power supply is connected to one end of the fourth inductor, the other end of the fourth inductor is respectively connected to the multistage filter, one end of the fourth capacitor and the drain electrode of the first field effect transistor, and the source electrode of the first field effect transistor and the other end of the fourth capacitor are grounded.
3. The method of claim 1, wherein the multistage filter comprises a plurality of filter circuits connected in series, the filter circuits comprising an inductor and a capacitor, the inductor being connected to the ground through the capacitor, the inductor being connected in series with the inductor.
4. The method for enabling the high-power radio frequency power supply to output rated power in a variable frequency environment according to claim 3, wherein the multi-stage filter is a three-stage filter, the multi-stage filter comprises three filter circuits, the power amplifier is connected with one end of a first inductor of the first filter circuit, the other end of the first inductor of the first filter circuit is respectively connected with one end of a first capacitor of the second filter circuit and one end of a second inductor of the second filter circuit, the other end of the second inductor is respectively connected with one end of a second capacitor of the second filter circuit and one end of a third inductor of the third filter circuit, the other end of the third inductor is respectively connected with one end of a third capacitor of the third filter circuit and one end of an output load, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
5. The method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment according to claim 3, wherein the multi-stage filter is a three-stage filter, the multi-stage filter comprises three filter circuits, the terminal ports of the power amplifier are respectively connected with the positive pole of the alternating current power supply, one end of an input load and one end of a first inductor, the other end of the first inductor is connected with one end of a third capacitor and one end of a second inductor, the other end of the third capacitor is grounded, one end of the second capacitor is respectively connected with one end of the third inductor, the other end of the second capacitor is grounded, the other end of the third inductor is respectively connected with one end of the first capacitor, one end of an output load and the output port, the other end of the third capacitor is grounded, and the other end of the output load is grounded.
6. The method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment according to claim 1, wherein the simulation software is ADS simulation software, and the step of using the simulation software includes:
s1, opening ADS simulation software, entering a schematic diagram editing interface, building a simulation circuit according to a terminal circuit structure, placing simulation circuit elements, and setting the attributes of the elements;
s2, setting a frequency scanning range in a schematic diagram interface;
s3, selecting an optimization tab to set an optimization target;
s4, setting simulation optimization operation times;
s5, starting simulation optimization to obtain a simulation value of the target element.
7. The method for enabling a high-power radio frequency power supply to output rated power in a variable frequency environment according to claim 6, wherein in step S1, a filter with 4 poles or 6 poles is preferably built according to design requirements, and then pole number deletion is performed according to element simulation values.
8. The method of claim 6, wherein in step S1, the impedance of the output load is set to be the output impedance of the rf power supply.
9. The method of claim 6, wherein in step S2, the frequency sweep range is a bandwidth range of the rf power supply required by the design.
10. The method of claim 6, wherein the target component optimization range is set according to design requirements before step S4.
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