CN117739834A - Visual spectrum confocal measuring device - Google Patents
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Abstract
The invention discloses a visual spectrum confocal measuring device, which comprises: the device comprises a light source, a beam splitter, a dispersion lens group, a light filtering part, a spectrometer, an imaging reflecting mirror group and an imaging mechanism, wherein the beam splitter and the dispersion lens group are arranged on an incident measurement light path, the dispersion lens group, the beam splitter, the light filtering part and the spectrometer are arranged on a reflection measurement light path, and the imaging reflecting mirror group and the imaging mechanism are arranged on a reflection imaging light path. The device can realize coaxial measurement by combining with an imaging mechanism, and can quickly and accurately measure the surface of an object to be measured while observing the surface of the object to be measured, so that the measurement efficiency is improved, and the position of a measurement point can be accurately matched.
Description
Technical Field
The invention relates to the technical field of optical measurement, in particular to a visual spectrum confocal measurement device.
Background
The secondary element measuring instrument is mainly used for two-dimensional plane optical measurement, can rapidly read the displacement value of the optical ruler, and generates a graph on a screen so as to intuitively distinguish possible deviation in a measurement result. The existing two-dimensional measuring instrument can not measure height information, and 2.5-dimensional measuring instrument is additionally provided with a measuring probe on the basis of the two-dimensional measuring instrument, so that the height and a plurality of single three-dimensional functions can be measured, and when the surface roughness measuring precision is better, the precision within 0.02mm can only be achieved, for example: the measuring precision of the cylinder, the cone, the ball and the like can be generally within 0.01mm, but when the depth is measured, the diameter of the probe directly limits the size of the aperture, the smaller diameter can be generally 3mm, the depth of the aperture can be generally within 20mm, and the fact that individual workpieces and easily deformable parts cannot be measured by a contact measuring method is also considered.
In the non-contact measurement mode, if the laser displacement meter adopting the triangular reflection method is used for measurement, the measured object has different materials or the measured object inclines to cause the position deviation or waveform confusion of the sensing wave, so that the problems of larger measurement error, dislocation of measurement points and the like are generated; when the confocal laser head is used for measurement, the measuring system is not coaxial with the vision system, and after each measurement needs a lens to confirm the position, the laser head is moved to the position for measurement, so that the problems of influence on the measuring efficiency, mismatching of the positions of measuring points and the like exist.
Disclosure of Invention
The invention mainly solves the technical problem of providing a visual spectrum confocal measuring device capable of improving the measuring efficiency.
The application provides a visual spectral confocal measurement device, comprising: the device comprises a light source, a beam splitter, a dispersion lens group, a light filtering part, a spectrometer, an imaging reflecting mirror group and an imaging mechanism, wherein the beam splitter and the dispersion lens group are arranged on an incident measurement light path, the dispersion lens group, the beam splitter, the light filtering part and the spectrometer are arranged on a reflection measurement light path, and the imaging reflecting mirror group and the imaging mechanism are arranged on a reflection imaging light path;
the light source is used for emitting a measuring light beam;
the beam splitter is used for transmitting part of the measuring light beams so as to output transmission light beams;
the dispersion lens group is used for receiving the transmitted light beam and dispersing the transmitted light beam so as to form light with different wavelengths to focus to different heights; when the surface of the object to be measured is positioned in the dispersion focusing range, the dispersion lens group receives the reflected measuring beam from the surface of the object to be measured and transmits the reflected measuring beam to the beam splitter;
the beam splitter is further configured to receive the reflected measurement beam and reflect the reflected measurement beam to the filtering portion;
the filter part is used for receiving the reflected measuring light beam and filtering the reflected measuring light beam in a target wavelength range;
the spectrometer is used for receiving the reflected measuring light beam in the filtering target wavelength range, obtaining wavelength information focused on the object to be measured in the reflected measuring light beam in the filtering target wavelength range, and obtaining measurement parameter information of the object to be measured by combining the relation between the wavelength information and the position;
the imaging reflector group is used for reflecting imaging light beams reflected from the surface of the object to be detected to the imaging mechanism;
the imaging mechanism is used for receiving the reflected imaging light beam and obtaining imaging information.
As a further aspect of the visual spectral confocal measurement apparatus provided in the present application, the dispersive lens group includes: a plurality of lenses disposed in sequence, including but not limited to concave lenses with flat central areas, biconvex lenses, flat lenses.
As a further aspect of the visual spectral confocal measurement apparatus provided herein, the first lens along the reflection measurement optical path is a flat lens.
As a further aspect of the visual spectral confocal measurement apparatus provided herein, a central region of the first of the lenses along the reflection measurement optical path is flattened.
As a further scheme of the visual spectrum confocal measuring device provided by the application, an avoidance hole is formed in the middle area of the first lens along the reflection measuring light path.
As a further scheme of the visual spectrum confocal measuring device provided by the application, an avoidance hole is formed in the middle area of the lens along the first of the reflection measuring light path, and a protective lens is further arranged on one face of the lens, facing to an object to be measured.
As a further aspect of the visual spectral confocal measurement apparatus provided in the present application, the imaging mirror group includes: the first reflecting mirror is arranged between the first lens and the second lens, the second reflecting mirror is positioned on the reflecting light path of the first reflecting mirror, and the imaging mechanism is arranged on the reflecting light path of the second reflecting mirror.
As a further scheme of the visual spectrum confocal measurement device provided by the application, the second reflecting mirror is a semi-transparent semi-reflective prism.
As a further aspect of the visual spectral confocal measurement apparatus provided in the present application, the imaging mechanism includes: the imaging lens is used for receiving the reflected imaging light beam reflected by the second reflecting mirror and outputting the reflected imaging light beam to the photosensitive element, and the photosensitive element is used for receiving the reflected imaging light beam to obtain image information.
As a further aspect of the visual spectral confocal measurement apparatus provided in the present application, the apparatus further includes: the illumination light source is used for illuminating illumination light rays to the surface of the object to be measured, and the illumination light source is located on the reflection measurement light path or the reflection imaging light path.
According to the visual spectral confocal measuring device of the embodiment, the measuring beam emitted by the light source is transmitted through the beam splitter to output a transmitted beam, and the transmitted beam is dispersed through the dispersion lens group to form light with different wavelengths to be focused at different heights. The surface of the object to be measured reflects the light beam focused on the surface to the dispersion lens group, the dispersion lens group forms a reflected measuring light beam and transmits the reflected measuring light beam to the beam splitter, the beam splitter reflects the reflected measuring light beam to the filtering part to filter the reflected measuring light beam in the target wavelength range, the spectrometer obtains wavelength information focused on the object to be measured in the reflected measuring light beam in the filtered target wavelength range, and the measuring parameter information of the object to be measured can be obtained by combining the relation between the wavelength information and the position. Meanwhile, the imaging light beam reflected from the surface of the object to be measured is reflected to the imaging mechanism through the imaging reflector group, and the imaging mechanism can image the reflected imaging light beam so as to obtain the image information of the point to be measured on the surface of the object to be measured in real time. Therefore, coaxial measurement can be realized by combining an imaging mechanism, and the surface of an object to be measured is observed and simultaneously, the measurement is fast and accurately performed, so that the measurement efficiency is improved, and the position of a measurement point can be accurately matched.
Drawings
FIG. 1 is a schematic diagram of a visual spectral confocal measurement apparatus according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical path of a visual spectral confocal measurement device according to the present invention;
FIG. 3 is a schematic diagram of a lens close to an object to be measured in a dispersive lens group of a visual spectrum confocal measurement device according to the present invention;
FIG. 4 is a schematic view of an incident measurement light path in the visual spectral confocal measurement device provided by the invention;
FIG. 5 is a schematic diagram of a reflection imaging measurement light path and a reflection measurement light path in a visual spectral confocal measurement device provided by the invention;
FIG. 6 is a schematic diagram of a visual spectral confocal measurement apparatus according to a second embodiment of the present invention;
FIG. 7 is a schematic diagram of a visual spectral confocal measurement apparatus according to a third embodiment of the invention;
FIG. 8 is a schematic diagram of a visible spectrum confocal measurement apparatus according to a fourth embodiment of the present invention;
FIG. 9 is a schematic view of the lens of FIG. 8 in proximity to an object to be measured;
FIG. 10 is a schematic diagram of a visible spectrum confocal measurement apparatus according to a fifth embodiment of the present invention;
FIG. 11 is a schematic view of the lens of FIG. 10 in proximity to an object to be measured;
FIG. 12 is a schematic diagram of a visible spectrum confocal measurement apparatus according to a sixth embodiment of the invention;
FIG. 13 is a schematic view of the lens of FIG. 12 in proximity to an object to be measured;
fig. 14 is a schematic structural diagram of a visual spectral confocal measurement device according to a seventh embodiment of the present invention.
Detailed Description
The invention will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, some operations associated with the present application have not been shown or described in the specification to avoid obscuring the core portions of the present application, and may not be necessary for a person skilled in the art to describe in detail the relevant operations based on the description herein and the general knowledge of one skilled in the art.
Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated.
In the embodiment of the invention, the spectral confocal measurement technology utilizes the wavelength information of a measuring light beam to measure, emits wide-spectrum polychromatic light from a light source, forms monochromatic light with different wavelengths through dispersion, and has the advantages of high measurement precision, high efficiency and the like, wherein each wavelength focal point corresponds to a distance value, the dispersed light beam irradiates the surface of an object to be measured to be reflected, the reflected light beam is sensed by a spectrometer only by the monochromatic light meeting the confocal condition, and the wavelength of the sensed focal point can be obtained through calculation.
Embodiment 1,
Referring to fig. 1 and 2, the visual spectral confocal measurement apparatus provided in the present embodiment includes: a light source 10, a beam splitter 20, a dispersion lens group 30, a filter section 40, a spectrometer 50, an imaging mirror group 60, and an imaging mechanism 70.
The light source 10 is used to emit a measuring beam, which is a broad spectrum of complex colored light that can be dispersed to form monochromatic light of different wavelengths.
In this embodiment, the light source 10 is preferably an LED light source, and the luminous flux is continuously distributed in a wavelength band of 300nm to 800 nm. Of course, in other embodiments, the light source 10 may employ other light source configurations, such as a laser, if other ranges of light flux are desired.
The measuring beam emitted by the light source 10 can be transmitted to the dispersion lens group 30 through the beam splitter 20, and is dispersed and irradiated on the surface of the object to be measured 100 by the dispersion lens group 30, and the propagation path of the measuring beam from the light source 10, the beam splitter 20 and the dispersion lens group 30 to the surface of the object to be measured 100 is an incident measuring light path, and the path of the incident measuring light path is a1-a2 in fig. 1.
According to the principle of specular reflection, the measuring beam is reflected by the surface of the object to be measured 100, and the path traveled by the measuring beam reflected passes through the dispersive lens group 30, the beam splitter 20, the filtering portion 40 in sequence and reaches the spectrometer 50, where the propagation path of the measuring beam reflected is a reflected measuring light path, and the reflected measuring light path is b1-b2 in fig. 1.
In particular, the propagation paths of the incident measurement light paths a1 to a2 and the reflection measurement light paths b1 to b2 between the beam splitter 20 and the dispersion lens group 30 are substantially the same, except that the reflection measurement light paths b1 to b2 are reflected by the beam splitter 20 and are reflected to the filter 40.
The imaging light is reflected to the imaging mechanism 70 by the imaging mirror group 60 to image the surface of the object 100 to be measured under the illumination, so that the surface of the object 100 to be measured is observed synchronously in real time, and the propagation path of the imaging light from the surface of the object 100 to be measured to the imaging mechanism 70 by the imaging mirror group 60 is a reflection imaging light path, and the path of the reflection imaging light path is c1-c2 in fig. 1.
The beam splitter 20 and the dispersive lens group 30 are disposed in the incident measurement light paths a1-a2, the dispersive lens group 30, the beam splitter 20, the filter 40 and the spectrometer 50 are disposed in the reflection measurement light paths b1-b2, and the imaging mirror group 60 and the imaging mechanism 70 are disposed in the reflection imaging light paths c1-c2. In this embodiment, the light source 10 is located above the beam splitter 20.
On the incident measuring light path a1-a2, the beam splitter 20 is used to transmit part of the measuring beam emitted from the light source 10 to output a transmitted beam. The dispersion lens group 30 is used for receiving the transmitted light beam output by the beam splitter 20 and dispersing the transmitted light beam to form light with different wavelengths to focus to different heights. As shown in fig. 4, fig. 4 exemplarily shows three different wavelength λ1, λ2, λ3 dispersed light beams formed by the dispersion of the dispersive lens group 30, the three different wavelength λ1, λ2, λ3 dispersed light beams converging at different heights.
On the reflection measurement light paths b1-b2, when the surface of the object 100 to be measured is located within the dispersion focusing range, the dispersion lens group 30 receives the reflection measurement light beam from the surface of the object 100 to be measured and transmits the reflection measurement light beam to the beam splitter 20, the beam splitter 20 is further configured to receive the reflection measurement light beam and reflect the reflection measurement light beam to the filter 40, and the filter 40 is configured to receive the reflection measurement light beam and filter the reflection measurement light beam in the target wavelength range. The spectrometer 50 is configured to receive the reflected measurement beam in the filtered target wavelength range, obtain wavelength information focused on the object to be measured in the reflected measurement beam in the filtered target wavelength range, and obtain measurement parameter information of the object to be measured 100 by combining the wavelength information and the positional relationship.
Specifically, if the surface of the object to be measured 100 is located at a position where one of the wavelengths converges, for example, at a position where the dispersed light beam of the wavelength λ2 converges, the dispersed light beam of the wavelength λ2 is reflected, that is, the dispersed light beam of the wavelength λ2 is a reflected measurement light beam, the beam splitter 20 reflects the reflected measurement light beam of the wavelength λ2 to the filtering portion 40, and the filtering portion 40 filters light of other wavelengths in the reflected measurement light beam of the wavelength λ2 to obtain the reflected measurement light beam of the wavelength λ2 with higher purity, so that the signal-to-noise ratio of the reflected measurement light beam of the wavelength λ2 can be effectively improved, and the measurement accuracy can be improved. The spectrometer 50 then obtains measurement parameter information of the object 100 to be measured according to the relationship between the wavelength λ2 and the position of the reflected measurement beam, where the measurement parameter information may be, for example, the height, the smoothness, etc. of the surface of the object 100 to be measured.
It should be noted that, the spectrometer 50 may obtain the position information of the object 100 to be measured by analyzing the wavelength λ2 focused on the surface of the object 100 to be measured, and combining the relationship between the wavelength λ2 and the position, and may obtain the profile curve of the object 100 to be measured by integrating the information of a plurality of detection points (i.e., the points converged by the plurality of wavelengths λ2), thereby completing the measurement of parameters such as the height, the smoothness, and the like of the object 100 to be measured.
In this embodiment, the filtering portion 40 may be a slit with a preset size, and the reflected measuring beam focused on the surface of the object to be measured 100 in the target wavelength range is filtered by the filtering portion 40 and then is incident to the spectrometer 50.
On the reflected imaging light paths c1-c2, the imaging mirror group 60 is configured to reflect the imaging light beam reflected from the surface of the object to be measured 100 to the imaging mechanism 70, and the imaging mechanism 70 is configured to receive the reflected imaging light beam reflected by the imaging mirror group 60 and obtain imaging information.
Specifically, referring to FIG. 5, the reflected imaging beam is reflected by imaging mirror assembly 60 along path c1-c2 to imaging mechanism 70 for imaging.
In the visual spectral confocal measurement device provided in this embodiment, the measurement beam emitted by the light source 10 is transmitted through the beam splitter 20 to output a transmission beam, and the transmission beam is dispersed by the dispersion lens group 30 to form light with different wavelengths to be focused at different heights. The surface of the object to be measured 100 reflects the light beam focused on the surface to the dispersion lens group 30, the dispersion lens group 30 forms a reflected measuring light beam and transmits the reflected measuring light beam to the beam splitter 20, the beam splitter 20 reflects the reflected measuring light beam to the filtering part 40 to filter the reflected measuring light beam in the target wavelength range, the spectrometer 50 obtains wavelength information focused on the object to be measured in the reflected measuring light beam in the filtered target wavelength range, and the measurement parameter information of the object to be measured 100 can be obtained by combining the wavelength information and the position relation. Meanwhile, the imaging light beam reflected from the surface of the object 100 to be measured is reflected to the imaging mechanism 70 by the imaging mirror group 60, and the imaging mechanism 70 can image the reflected imaging light beam to obtain the image information of the point to be measured on the surface of the object 100 to be measured in real time. Thus, coaxial measurement can be realized by combining an imaging mechanism, and the surface of the object 100 to be measured is observed and simultaneously, the measurement is fast and accurately performed, so that the measurement efficiency is improved, and the position of a measurement point can be accurately matched.
As shown in fig. 5, the dispersion lens group 30 includes: a plurality of lenses 31 disposed in sequence, the lenses 31 including, but not limited to, concave lenses with flat central areas, biconvex lenses, flat lenses.
Referring to fig. 1 and 2, the imaging mirror group 60 includes: a first mirror 61 and a second mirror 62, the first mirror 61 being disposed between the first lens and the second lens along the reflection measuring optical path c1-c2, the second mirror 62 being located on the reflection optical path of the first mirror 61, and the imaging mechanism 70 being disposed on the reflection optical path of the second mirror 62.
It should be noted that, when the first mirror 61 is disposed between the first lens and the second lens, the working distance of the dispersive lens group is not occupied, and the image space NA is increased, so that the signal to noise ratio is effectively improved.
In the present embodiment, the reflected imaging beam reflected from the surface of the object 100 to be measured is reflected to the first reflecting mirror 61, the first reflecting mirror 61 reflects the reflected imaging beam to the second reflecting mirror 62, and the second reflecting mirror 62 reflects the reflected imaging beam to the imaging mechanism 70.
With continued reference to fig. 1 and 2, the imaging mechanism 70 includes: the imaging lens 71 and the photosensitive element 72, the imaging lens 71 is used for receiving the reflected imaging light beam reflected by the second reflecting mirror 62 and outputting to the photosensitive element 72, and the photosensitive element 72 is used for receiving the reflected imaging light beam to obtain image information.
In order to improve the measurement effect of the surface of the object to be measured 100, the visual spectrum confocal measurement device provided in this embodiment further includes: an illumination light source 80 for illuminating the surface of the object 100 to be measured with illumination light, the illumination light source 80 being located on the propagation path b1-b2 of the reflection measurement light path or the propagation path c1-c2 of the reflection imaging light path.
In this embodiment, the illumination light source 80 is located on the first lens of the plurality of lenses 31 along the propagation paths b1-b2 of the reflection measurement light path, and for convenience of description, the first lens is defined as a lens 32, and the lens 32 is a lens with a flat central area, and can function as dust protection.
Embodiment II,
Referring to fig. 6, the difference between the visual spectral confocal measurement apparatus provided in this embodiment and the first embodiment is that the illumination light source 80 is disposed on the side of the second reflecting mirror 62, so that the second reflecting mirror 62 may employ a half-mirror prism to transmit the illumination light of the illumination light source 80 to the first reflecting mirror 61 and reflect the illumination light to the surface of the object to be measured 100 via the first reflecting mirror 61.
Third embodiment,
Referring to fig. 7, the difference between the visual spectral confocal measuring apparatus provided in this embodiment and the first and second embodiments is that the positions of the light source 10 and the spectrometer 50 are exchanged.
Fourth embodiment,
Referring to fig. 8 and 9, the present embodiment provides a visual spectral confocal measurement apparatus that is different from the first to third embodiments in that the lens 32 employs a flat lens 321.
Fifth embodiment (V),
Referring to fig. 10 and 11, the difference between the visual spectral confocal measurement device provided in this embodiment and the first-fourth embodiments is that the lens is a lens 321 with a central area provided with a dodging hole.
Embodiment six,
Referring to fig. 12 and 13, the difference between the visual spectral confocal measurement device provided in the present embodiment and the first-fifth embodiments is that the lens is a lens 321 with a avoiding hole in the middle area, and a protective lens 322 is further disposed on one surface of the object 100 to be measured of the lens 321.
Embodiment seven,
Referring to fig. 14, the present embodiment provides a visual spectral confocal measurement apparatus that is different from the first to fifth embodiments in that the dispersive lens group 30 is not provided with the lens 32.
In summary, in the visual spectral confocal measurement device provided in the embodiment, the measurement beam emitted by the light source is transmitted through the beam splitter to output the transmission beam, and the transmission beam is dispersed through the dispersion lens group to form light with different wavelengths to be focused at different heights. The surface of the object to be measured reflects the light beam focused on the surface to the dispersion lens group, the dispersion lens group forms a reflected measuring light beam and transmits the reflected measuring light beam to the beam splitter, the beam splitter reflects the reflected measuring light beam to the filtering part to filter the reflected measuring light beam in the target wavelength range, the spectrometer obtains wavelength information focused on the object to be measured in the reflected measuring light beam in the filtered target wavelength range, and the measuring parameter information of the object to be measured can be obtained by combining the relation between the wavelength information and the position. Meanwhile, the imaging light beam reflected from the surface of the object to be measured is reflected to the imaging mechanism through the imaging reflector group, and the imaging mechanism can image the reflected imaging light beam so as to obtain the image information of the point to be measured on the surface of the object to be measured in real time. Therefore, coaxial measurement can be realized by combining an imaging mechanism, and the surface of an object to be measured is observed and simultaneously, the measurement is fast and accurately performed, so that the measurement efficiency is improved, and the position of a measurement point can be accurately matched.
The foregoing description of the invention has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the invention pertains, based on the idea of the invention.
Claims (10)
1. A visual spectral confocal measurement apparatus, comprising: the device comprises a light source, a beam splitter, a dispersion lens group, a light filtering part, a spectrometer, an imaging reflecting mirror group and an imaging mechanism, wherein the beam splitter and the dispersion lens group are arranged on an incident measurement light path, the dispersion lens group, the beam splitter, the light filtering part and the spectrometer are arranged on a reflection measurement light path, and the imaging reflecting mirror group and the imaging mechanism are arranged on a reflection imaging light path;
the light source is used for emitting a measuring light beam;
the beam splitter is used for transmitting part of the measuring light beams so as to output transmission light beams;
the dispersion lens group is used for receiving the transmitted light beam and dispersing the transmitted light beam so as to form light with different wavelengths to focus to different heights; when the surface of the object to be measured is positioned in the dispersion focusing range, the dispersion lens group receives the reflected measuring beam from the surface of the object to be measured and transmits the reflected measuring beam to the beam splitter;
the beam splitter is further configured to receive the reflected measurement beam and reflect the reflected measurement beam to the filtering portion;
the filter part is used for receiving the reflected measuring light beam and filtering the reflected measuring light beam in a target wavelength range;
the spectrometer is used for receiving the reflected measuring light beam in the filtering target wavelength range, obtaining wavelength information focused on the object to be measured in the reflected measuring light beam in the filtering target wavelength range, and obtaining measurement parameter information of the object to be measured by combining the relation between the wavelength information and the position;
the imaging reflector group is used for reflecting imaging light beams reflected from the surface of the object to be detected to the imaging mechanism;
the imaging mechanism is used for receiving the reflected imaging light beam and obtaining imaging information.
2. The visual spectral confocal measurement apparatus of claim 1, wherein the dispersive lens group comprises: a plurality of lenses disposed in sequence, including but not limited to concave lenses with flat central areas, biconvex lenses, flat lenses.
3. The visual spectral confocal measurement apparatus of claim 2, wherein the first lens along the reflection measurement optical path is a flat lens.
4. A visual spectral confocal measurement apparatus according to claim 2 wherein a central region of a first of said lenses along said reflection measurement path is flattened.
5. The visual spectral confocal measurement apparatus of claim 2, wherein a central region of a first of said lenses along said reflection measurement path is provided with a relief aperture.
6. The visual spectral confocal measurement apparatus according to claim 2, wherein a central region of a first lens along the reflection measurement optical path is provided with a relief hole, and a surface facing the object to be measured is further provided with a protective lens.
7. The visual spectral confocal measurement apparatus of claim 2, wherein the imaging mirror set comprises: the first reflecting mirror is arranged between the first lens and the second lens, the second reflecting mirror is positioned on the reflecting light path of the first reflecting mirror, and the imaging mechanism is arranged on the reflecting light path of the second reflecting mirror.
8. The visual spectral confocal measurement apparatus of claim 7, wherein the second mirror is a semi-transparent semi-reflective prism.
9. The visual spectral confocal measurement apparatus of claim 1, wherein the imaging mechanism comprises: the imaging lens is used for receiving the reflected imaging light beam reflected by the second reflecting mirror and outputting the reflected imaging light beam to the photosensitive element, and the photosensitive element is used for receiving the reflected imaging light beam to obtain image information.
10. The visual spectral confocal measurement apparatus of claim 1, further comprising: the illumination light source is used for illuminating illumination light rays to the surface of the object to be measured, and the illumination light source is located on the reflection measurement light path or the reflection imaging light path.
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| CN113587843A (en) * | 2021-07-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Interference confocal measurement system and measurement method |
| CN114280774A (en) * | 2021-12-30 | 2022-04-05 | 深圳立仪科技有限公司 | Multifunctional device with spectrum confocal measurement function |
| CN115597711A (en) * | 2022-12-16 | 2023-01-13 | 聚时科技（深圳）有限公司（Cn） | Spectrometer and light path design method thereof |
| CN117029717A (en) * | 2023-07-14 | 2023-11-10 | 海伯森技术（深圳）有限公司 | Workpiece morphology detection device |
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