CN117721424A - Fluorine-containing target material, functional film layer and vacuum sputtering forming method thereof - Google Patents
Fluorine-containing target material, functional film layer and vacuum sputtering forming method thereof Download PDFInfo
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- CN117721424A CN117721424A CN202311780176.9A CN202311780176A CN117721424A CN 117721424 A CN117721424 A CN 117721424A CN 202311780176 A CN202311780176 A CN 202311780176A CN 117721424 A CN117721424 A CN 117721424A
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 34
- 239000011737 fluorine Substances 0.000 title claims abstract description 34
- 239000013077 target material Substances 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000002245 particle Substances 0.000 claims abstract description 26
- 150000004756 silanes Chemical class 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 12
- 229920000728 polyester Polymers 0.000 claims abstract description 7
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 14
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 10
- 229920001225 polyester resin Polymers 0.000 claims description 7
- 239000004645 polyester resin Substances 0.000 claims description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 4
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 claims description 4
- 239000010702 perfluoropolyether Substances 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 239000004471 Glycine Substances 0.000 claims description 2
- 125000003342 alkenyl group Chemical group 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000000217 alkyl group Chemical group 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims description 2
- 239000003054 catalyst Substances 0.000 claims description 2
- 239000002270 dispersing agent Substances 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 239000000314 lubricant Substances 0.000 claims description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 238000006482 condensation reaction Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 53
- 230000000052 comparative effect Effects 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 8
- 239000007822 coupling agent Substances 0.000 description 6
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 6
- 239000004033 plastic Substances 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 6
- -1 ketone peroxide Chemical class 0.000 description 5
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- 239000004417 polycarbonate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 235000010265 sodium sulphite Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003100 immobilizing effect Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- NLSFWPFWEPGCJJ-UHFFFAOYSA-N 2-methylprop-2-enoyloxysilicon Chemical compound CC(=C)C(=O)O[Si] NLSFWPFWEPGCJJ-UHFFFAOYSA-N 0.000 description 1
- BHWUCEATHBXPOV-UHFFFAOYSA-N 2-triethoxysilylethanamine Chemical compound CCO[Si](CCN)(OCC)OCC BHWUCEATHBXPOV-UHFFFAOYSA-N 0.000 description 1
- QHQNYHZHLAAHRW-UHFFFAOYSA-N 2-trimethoxysilylethanamine Chemical compound CO[Si](OC)(OC)CCN QHQNYHZHLAAHRW-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- CPLASELWOOUNGW-UHFFFAOYSA-N benzyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)CC1=CC=CC=C1 CPLASELWOOUNGW-UHFFFAOYSA-N 0.000 description 1
- PWFXLNIJYJUPII-UHFFFAOYSA-N benzyl(triethyl)silane Chemical compound CC[Si](CC)(CC)CC1=CC=CC=C1 PWFXLNIJYJUPII-UHFFFAOYSA-N 0.000 description 1
- GQVVQDJHRQBZNG-UHFFFAOYSA-N benzyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CC1=CC=CC=C1 GQVVQDJHRQBZNG-UHFFFAOYSA-N 0.000 description 1
- MRIWRLGWLMRJIW-UHFFFAOYSA-N benzyl(trimethyl)silane Chemical compound C[Si](C)(C)CC1=CC=CC=C1 MRIWRLGWLMRJIW-UHFFFAOYSA-N 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011243 crosslinked material Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- HBWGDHDXAMFADB-UHFFFAOYSA-N ethenyl(triethyl)silane Chemical compound CC[Si](CC)(CC)C=C HBWGDHDXAMFADB-UHFFFAOYSA-N 0.000 description 1
- GCSJLQSCSDMKTP-UHFFFAOYSA-N ethenyl(trimethyl)silane Chemical compound C[Si](C)(C)C=C GCSJLQSCSDMKTP-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005543 nano-size silicon particle Substances 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention relates to a fluorine-containing target material, a functional film layer and a vacuum sputtering forming method thereof, comprising a component A, a component B, a component C and a component D, wherein the component A comprises fixed particles; component B comprises a modified silane; component C comprises a perfluoropolyester for forming a covalent bond with component a; component D comprises a reticulated material. After each component of the fluorine-containing target is deposited on the substrate, the component B can be affinitive with the surface of the substrate and can perform self-condensation reaction with water in the air and the like. The component A and the component C can form a covalent bond so as to fix the perfluorinated polyester of the component C on the target material, and the mesh of the mesh-shaped substance of the component D can contain the component C so as to prevent the component C from sliding transversely. Through the mutual cooperation of multiple effort between each component, can promote the structural strength of fluorine-containing target to increase the durability of fluorine-containing target.
Description
Technical Field
The invention relates to the technical field of fluorine-containing targets, in particular to a fluorine-containing target, a functional film layer and a vacuum sputtering forming method thereof.
Background
Touch screens are widely used in electronic products such as smart phones and tablet computers, and in order to enable the skin to slide smoothly on the touch screen, a fluorine-containing film layer is usually deposited on the surface of the screen. The fluorine-containing film layer has lower surface tension and can play roles in dewatering and oil discharge. Because water, oil and other substances exist on the surface of the skin, the skin can slide smoothly on the screen based on the characteristics of the fluorine-containing target material. However, the current fluorine-containing targets have low structural strength, and the problems of falling off easily after multiple sliding are caused to cause failure.
Disclosure of Invention
Based on the above, it is necessary to provide a fluorine-containing target, a functional film layer and a vacuum sputtering forming method thereof.
A fluorine-containing target comprising:
component a, comprising immobilized particles;
component B, comprising a modified silane;
component C, comprising a perfluoropolyester, for forming a covalent bond with component a; and
Component D, comprising a reticulate material;
wherein the weight part ratio of the component A to the component B to the component C to the component D is 1: (0.5-20): (0.1-10): (0.1 to 30), more specifically, the weight part ratio of the component A, the component B, the component C and the component D is 1: (2-5): (0.5-2): (3-6).
After each component of the fluorine-containing target is deposited on the substrate, the component A can be combined with the substrate to increase the specific surface area of the substrate, and the combination strength of the component B and the substrate is improved; the modified silane of the component B can be affinitive with the surface of the substrate and can perform self-condensation reaction with water in the air and the like so as to realize the adhesion of the fluorine-containing target and the substrate; component a and component C are capable of forming a silicofluoric covalent bond, resulting in a more stable structure; the network of the network material of component D can act as a framework structure to further prevent the film from becoming distorted. Through the mutual cooperation of various acting forces among the components, the structural strength of the fluorine-containing target can be improved, so that the durability of the fluorine-containing target is improved.
In one embodiment, a fluorine-containing target is used for deposition in the order of component a, component B, component D, and component C. Thus, component a is used to contact the substrate, increasing the bond strength of component B to the substrate. The component D is formed on the surface of the component B, and is mutually embedded with the component B and the component C through grids of the reticular structure, so that the bonding strength of the component B and the component C is improved, and the component C also forms a covalent bond with the component A, and further the component A is prevented from falling off.
In some embodiments, component a, component B, component C, and component D further independently comprise at least one of a dispersant, a binder, a solvent, a lubricant, and a catalyst. Thus, the components can be better deposited on different substrates by adding the corresponding components according to actual needs.
Specifically, the modified silane includes at least one of vinyltrimethylsilane, vinyltriethylsilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltriacetoxysilane, glycidol trimethylsilane, aminoethyltrimethoxysilane, aminoethyltriethoxysilane, benzyltrimethylsilane, benzyltriethylsilane, benzyltrimethoxysilane, benzyltriethoxysilane, thereby achieving better bonding of component B to the substrate.
In one embodiment, the network comprises a cross-link of a polyester resin with styrene. The crosslinked material has a complex and stable reticular structure, and the membrane layer is divided into a plurality of small units, so that the effect of preventing the membrane layer from falling off is achieved. In one embodiment, the reaction of the cycloethyl ketone peroxide and the sodium sulfite generates free radicals, and the double bonds of the polyester resin are promoted to be opened through the free radicals, and the free radicals are crosslinked with the double bonds of the styrene to form a network substance, wherein the weight ratio of the polyester resin to the styrene to the cycloethyl ketone peroxide to the sodium sulfite is 100: (20-50): (2-5): (1-3) thereby producing a stable net-like substance.
In one embodiment, component a includes a silane coupling agent. In one embodiment, the immobilizing particles include a silane coupling agent, thereby serving to immobilize the immobilizing particles and effecting covalent bond formation with the perfluoropolyether. In one embodiment, component a includes an immobilization particle and a silane coupling agent, wherein the immobilization particle is selected from at least one of a nano silica particle and a nano alumina particle, and in this embodiment, the effect of forming a covalent bond with component C is achieved by the silane coupling agent, and the immobilization particle is independently combined with the substrate and plays a role of supporting the modified silane. In one embodiment, component a further comprises an adhesive for better bonding the anchoring particles to the substrate.
In one embodiment, the silane coupling agent includes at least one of an aminosilane coupling agent, a vinyl silane coupling agent, and an epoxy silane coupling agent. The silane coupling agents have good comprehensive performance, can be stably coupled with the perfluorinated polyester to form fluorosilicone covalent bonds, and more fluorosilicone covalent bonds can improve the mechanical strength of the material. In other embodiments, one of a mercaptosilane coupling agent and a methacryloxy silane coupling agent may also be included.
In one embodiment, the modified silane of component B includes R' (CH) 2 ) m Si(R”) 3 Wherein R 'is one of amino, alkenyl, aryl, ether or glycine, R' is one of alkyl, alkoxy or ester, and m is any integer from 0 to 10. The modified silane can well affinity with the surface of a substrate, and can perform self-condensation reaction with water in the air and the like to bond a fluorine-containing target material with the substrate, and the modified silane can form a stable film layer on the surfaces of glass, metal, ceramic, sapphire and film, has excellent adhesive property and is not easy to fall off from the surface of the substrate.
In one embodiment, the perfluoropolyester of component C has a molecular weight of 2500 to 8000. The perfluorinated polyester with the molecular weight has better comprehensive performance, can provide smooth touch feeling, and is better suitable for electronic products such as screens.
A vacuum sputtering forming method of a functional film layer comprises the fluorine-containing target material in any embodiment, and comprises the following steps:
sequentially depositing the component A and the component B on the substrate to obtain a first film layer;
depositing a component D on the first film layer to obtain a grid layer;
and depositing the component C on the grid layer to obtain a second film layer.
In one embodiment, a functional film layer manufactured by the method is provided, which comprises a first film layer, a grid layer and a second film layer which are sequentially arranged; wherein the first film layer comprises a component A and a component B, and the component A comprises fixed particles and the component B comprises modified silane; the mesh layer comprises a component D comprising a mesh material; the second film layer comprises a component C, wherein the component C comprises a perfluorinated polyester, and the perfluorinated polyester is used for forming a covalent bond with the component A; wherein the weight part ratio of the component A to the component B to the component C to the component D is 1: (0.5-20): (0.1-10): (0.1-30). Wherein, the ratio of the thickness of the first film layer, the grid layer and the second film layer is 1: (0.1-1): (0.5-3), so that the functional film layer has better stability.
The fixed particles in the first film layer can serve as a framework to increase the overall structural strength of the first film layer, and the contact area between the screen and the first film layer can be increased, so that the bonding force of the screen and the first film layer is improved, and furthermore, the fixed particles in the first film layer can also form covalent bonds with the fluorine-containing polyester of the second film layer, so that the bonding force between the first film layer and the second film layer is increased, and the mechanical strength of the first film layer and the second film layer can be improved. The grid layer formed by the reticular materials is laid on the first film layer, and when the second film layer is deposited on the grid layer, the grid layer divides the second film layer into a plurality of small units, so that the second film layer is prevented from falling off. Through the cooperation of each component, and the order setting of first rete, grid layer and second rete, can let each material all obtain fixedly in vertical and horizontal through multiple effort to increase the overall structure intensity of functional rete, and then promote the durability of functional rete.
In one embodiment, the fixed particles are disposed on a side of the first film layer facing away from the mesh layer. In this way, the immobilized particles are better able to contact the substrate, thereby obtaining support of the substrate and thus the first film layer.
Drawings
FIG. 1 is a schematic diagram of a functional film layer disposed on a substrate according to one embodiment.
Detailed Description
In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. Preferred embodiments of the present application are shown in the accompanying drawings. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the application, the meaning of "plurality" is at least two, for example two, three, etc., unless specifically defined otherwise. In the description of the present application, the meaning of "several" means at least one, such as one, two, etc., unless explicitly defined otherwise.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
In the present application, the technical features described in an open manner include a closed technical scheme composed of the listed features, and also include an open technical scheme including the listed features.
In the present application, reference is made to numerical intervals, where the numerical intervals are considered to be continuous unless specifically stated, and include the minimum and maximum values of the range, and each value between such minimum and maximum values. Further, when a range refers to an integer, each integer between the minimum and maximum values of the range is included. Further, when multiple range description features or characteristics are provided, the ranges may be combined. In other words, unless otherwise indicated, all ranges disclosed herein are to be understood to include any and all subranges subsumed therein.
The percentage content referred to in the present application refers to mass percent for both solid-liquid and solid-solid phase mixing and volume percent for liquid-liquid phase mixing unless otherwise specified.
The percentage concentrations referred to in this application, unless otherwise indicated, refer to the final concentrations. The final concentration refers to the ratio of the additive component in the system after the component is added.
The temperature parameter in the present application is not particularly limited, and may be a constant temperature treatment or a treatment within a predetermined temperature range. The constant temperature process allows the temperature to fluctuate within the accuracy of the instrument control.
The "particles" referred to herein, or substances defining a particle size distribution, are not necessarily spherical in shape, but may be irregular, and may be primary particles or secondary particles. The irregular particle size is calculated as the average of its maximum and minimum diameters.
The fluorine-containing target in one embodiment is deposited on the substrate, so that a functional film layer 10 is obtained on the surface of the substrate 50, and the functional film layer 10 includes a first film layer 100, a grid layer 200 and a second film layer 300 which are sequentially arranged; the first film layer includes a component a and a component B, the component a includes a plurality of fixed particles 110, and the component B includes a modified silane, where each fixed particle 110 is disposed on a surface of the first film layer 100 facing away from the mesh layer 200 and is connected to the substrate 50. The mesh layer comprises a component D comprising a mesh material; the second film layer comprises component C, which comprises a perfluoropolyether, for forming covalent bonds with component a.
The following are some specific examples:
example 1: high-hardness coated plastics produced by MSK corporation of japan are used as the base material, wherein the high-hardness coated plastics include PET (polyethylene terephthalate), PC (polycarbonate) and PMMA (polymethyl methacrylate). In this example, the high hardness coated plastic was cut to a 10cm by 10cm gauge.
The above component A, component B, component C and component D are mixed in a ratio of 1:20:0.1:30 parts by weight of the silicon dioxide is mixed and deposited on a substrate, wherein the thickness of the deposited silicon dioxide is 35nm.
Example 2: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:0.5:10:0.1.
example 3: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:0.5:0.1:0.1.
example 4: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:20:10:30.
example 5: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:5:0.5:6.
example 6: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:5:0.5:3.
example 7: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:2:0.5:3.
example 8: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:5:2:6.
example 9: the difference from example 1 is that the weight ratio of component A, component B, component C and component D is 1:3:1:5.
example 10:
high-hardness coated plastics produced by MSK corporation of japan are used as the base material, wherein the high-hardness coated plastics include PET (polyethylene terephthalate), PC (polycarbonate) and PMMA (polymethyl methacrylate). In this example, the high hardness coated plastic was cut to a 10cm by 10cm gauge.
The component A of the embodiment comprises the following components in parts by weight: 1 an aminosilane coupling agent and vinyltrimethoxysilane, wherein vinyltrimethoxysilane is used as a binder.
The component B comprises vinyl trimethoxy silane and proper amount of acetone, wherein the acetone is a solvent.
The component C comprises the following components in parts by weight: 1 and vinyltrimethoxysilane. Wherein the type of the perfluoropolyether is Dow DC-2700.
Component D comprises a cross-linked product of a polyester resin and styrene. Specifically, the reaction of the cycloethyl ketone peroxide and sodium sulfite generates free radicals, and the double bonds of the polyester resin are promoted to be opened by the free radicals, and the free radicals are crosslinked with the double bonds of the styrene to form a network substance. In the embodiment, the weight ratio of the polyester resin, the styrene, the cycloethanone peroxide and the sodium sulfite is 100:30:3:1.
and sequentially depositing the component A and the component B on the substrate to obtain a first film layer. The thickness of the first film layer was 10nm.
Depositing a component D on the first film layer to obtain a grid layer; wherein the thickness of the mesh layer is 5nm.
And depositing the component C on the grid layer to obtain a second film layer. Wherein the thickness of the second film layer is 20nm.
Example 11: the difference from example 10 is that component A comprises 6 parts by weight: 2:1, an aminosilane coupling agent and vinyltrimethoxysilane, wherein the particle size of the nano silicon dioxide particles is 5nm.
Comparative example 1: the difference from example 1 is that component B and component C are combined in a ratio of 1:1, and then deposited on a substrate.
Comparative example 2: the difference from example 10 is that component B and component C are deposited only on the substrate.
The samples prepared in each example and comparative example were subjected to abrasion resistance testing:
the sample of examples 1 and 2 and comparative example 1 was fixed on a table using an eraser tester by CORETECH CORP, a weight load of 1kg was applied to the sample in the form of a cylindrical eraser having a diameter of 5mm, a round trip length of 40mm, a round trip speed of 40r/min and a round trip speed of 3000 times, contact angles of water drops on the surface of the sample were measured 1500 times and 3000 times, and the contact angles were averaged for 5 times. The contact angle (in degrees) is measured as shown in the following table:
| initial contact angle | Contact angle after 1500 rounds | Contact angle after 3000 round trips | |
| Example 1 | 100.8 | 96.7 | 93.8 |
| Example 2 | 110.5 | 100.2 | 93.5 |
| Example 3 | 101 | 98.1 | 94.4 |
| Example 4 | 110.1 | 101.5 | 94.1 |
| Example 5 | 105.3 | 100.7 | 97.3 |
| Example 6 | 105.8 | 100.1 | 97.6 |
| Example 7 | 105.5 | 101.1 | 98.1 |
| Example 8 | 110.2 | 105.9 | 100.1 |
| Example 9 | 108 | 104.4 | 101.8 |
| Example 10 | 117.1 | 115.8 | 113.2 |
| Example 11 | 116.9 | 114.1 | 112.6 |
| Comparative example 1 | 109.3 | 90.8 | 82.3 |
| Comparative example 2 | 116.8 | 101.2 | 91.1 |
As can be seen from the comparison of examples 1 to 9 and comparative example 1, the contact angle of the rubber was changed less by 1500 and 3000 rounds after the addition of the components a and D, i.e., the functional film was less detached, and thus examples 1 to 9 had better abrasion resistance than comparative example 1. Among them, examples 7 to 9 had more suitable proportions than examples 1 to 6, resulting in better wear resistance. In addition, the abrasion resistance of the embodiment 10 and the embodiment 11 in each embodiment is better, because the embodiment 10 and the embodiment 11 are sequentially deposited in the order of the first film layer, the grid layer and the second film layer, the mutual coordination among the layers is more facilitated, and the overall structural strength is increased. The examples of examples 10 and 11 showed a smaller degree of change in contact angle than comparative example 2, and it was found that the samples of examples 10 and 11 had better abrasion resistance. In contrast to comparative example 2, examples 10 and 11 incorporate component a to support component B from the physical level, and component a is also capable of interacting with component C through a chemical bond, while component D supports component C from the physical level. Thus, through the mutual cooperation of various acting forces, the structural strength of the fluorine-containing target material can be improved, and the durability of the fluorine-containing target material is improved. The example 10 has better wear resistance than the example 11, because the fixed particles in the component A directly adopt the aminosilane coupling agent, so that the content of the aminosilane coupling agent is higher, and covalent bonds can be formed with more fluorine-containing polyether, thereby improving the structural strength of the functional film layer.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. A fluorine-containing target, comprising:
component a, comprising immobilized particles;
component B, comprising a modified silane;
component C comprising a perfluoropolyester for forming a covalent bond with said component a; and
Component D, comprising a reticulate material;
wherein the weight part ratio of the component A to the component B to the component C to the component D is 1: (0.5-20): (0.1-10): (0.1-30).
2. A fluorine-containing target according to claim 1, wherein the network comprises a cross-linked of a polyester resin and styrene.
3. A fluorine-containing target according to claim 1, wherein component a comprises a silane coupling agent.
4. The fluorine-containing target according to claim 1, wherein the weight ratio of the component a, the component B, the component C and the component D is 1: (2-5): (0.5-2): (3-6).
5. The fluorine-containing target according to claim 1, wherein the molecular weight of the perfluoropolyether is 2500 to 8000.
6. The fluorine-containing target according to claim 1, wherein the modified silane comprises R' (CH 2 ) m Si(R”) 3 Wherein R 'is one of amino, alkenyl, aryl, ether or glycine, R' is one of alkyl, alkoxy or ester, and m is any integer from 0 to 10.
7. The fluorine-containing target according to claim 1, wherein the component a, the component B, the component C, and the component D further independently comprise at least one of a dispersant, a binder, a solvent, a lubricant, and a catalyst.
8. A vacuum sputtering forming method of a functional film layer, characterized by comprising the fluorine-containing target material as set forth in any one of claims 1 to 7, further comprising the steps of:
sequentially depositing the component A and the component B on a substrate to obtain a first film layer;
depositing the component D on the first film layer to obtain a grid layer;
and depositing the component C on the grid layer to obtain a second film layer.
9. The functional film layer is characterized by comprising a first film layer, a grid layer and a second film layer which are sequentially arranged; wherein the first film layer comprises a component a and a component B, and the component a comprises fixed particles, and the component B comprises a modified silane; the mesh layer comprises a component D comprising a mesh material; the second film layer comprises a component C, wherein the component C comprises a perfluorinated polyester which is used for forming a covalent bond with the component A, and the weight part ratio of the component A to the component B to the component C to the component D is 1: (0.5-20): (0.1-10): (0.1-30).
10. The functional film of claim 9, wherein the fixed particles are disposed on a side of the first film facing away from the mesh layer.
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| JP2022079332A (en) * | 2020-11-16 | 2022-05-26 | 日東電工株式会社 | Optical film with antifouling layer |
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| US20100285275A1 (en) * | 2009-05-06 | 2010-11-11 | Adra Smith Baca | Fingerprint-resistant glass substrates |
| US20120107558A1 (en) * | 2010-11-01 | 2012-05-03 | Shari Elizabeth Koval | Transparent substrate having durable hydrophobic/oleophobic surface |
| CN109486371A (en) * | 2018-10-29 | 2019-03-19 | 深圳市派恩新材料技术有限公司 | A kind of fluorochemicals coatings and preparation method thereof, application method |
| WO2022014566A1 (en) * | 2020-07-13 | 2022-01-20 | 日東電工株式会社 | Laminate |
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