CN117711998A - Three generations of isostatic pressing graphite boats for semiconductor - Google Patents
Three generations of isostatic pressing graphite boats for semiconductor Download PDFInfo
- Publication number
- CN117711998A CN117711998A CN202410162575.7A CN202410162575A CN117711998A CN 117711998 A CN117711998 A CN 117711998A CN 202410162575 A CN202410162575 A CN 202410162575A CN 117711998 A CN117711998 A CN 117711998A
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- graphite
- ceramic
- graphite flake
- shaped
- sliding
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 370
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 370
- 239000010439 graphite Substances 0.000 title claims abstract description 370
- 239000004065 semiconductor Substances 0.000 title claims abstract description 18
- 238000000462 isostatic pressing Methods 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims description 79
- 239000000969 carrier Substances 0.000 claims description 32
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 16
- 238000009826 distribution Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 229910004205 SiNX Inorganic materials 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention relates to the technical field of graphite boats, in particular to an isostatic pressing graphite boat for a third-generation semiconductor, which comprises a plurality of first graphite sheets, a second graphite sheets, a supporting table, a horizontal sliding mechanism, a limiting piece, an equidistant adjusting mechanism and a plurality of groups of connecting pieces.
Description
Technical Field
The invention relates to the technical field of graphite boats, in particular to an isostatic pressing graphite boat for a third-generation semiconductor.
Background
The graphite boat is a graphite mold. The graphite mold itself is a carrier that allows the raw materials and parts that we need to locate or shape to be placed together in the graphite mold for high temperature sintering. Graphite molds are made from synthetic graphite by machining and are sometimes referred to as graphite boats or ships because they closely resemble a ship's hull.
All graphite ark is made of high-purity graphite and is widely used for rare earth smelting, electric light sources, chemical industry, medical appliances, metallurgical machinery, smelting equipment, petroleum, aerospace, electronic equipment, papermaking, material welding and the like.
The graphite boat is composed of a plurality of boat sheets, the spacing between adjacent boat sheets is the same, the boat sheets in different graphite boats have different spacing according to different production processes, if the boat sheets have different spacing, the electric field in the cavity between the adjacent boat sheets is uneven, and the uneven semiconductor coating is finally caused, so when the graphite boat is assembled, the spacing between the adjacent boat sheets is particularly important to control, in the traditional assembling process, the ceramic connecting pieces are required to be fixedly arranged between the two boat sheets while the boat sheets have the same spacing, and the two steps are simultaneously carried out, so that the boat sheets are easy to deviate in the process, the final spacing between the boat sheets cannot be ensured to conform to the current production process, and the ceramic connecting pieces are easy to cause the breakage of the ceramic connecting pieces after being hard against the two boat sheets, so that the isostatic pressing graphite boat for the third-generation semiconductor is necessary to solve the problems.
Disclosure of Invention
In view of the above, it is necessary to provide an isostatic graphite boat for three-generation semiconductors, which solves the problems of the prior art.
In order to solve the problems in the prior art, the invention adopts the following technical scheme: the utility model provides an isostatic pressing graphite boat for the third generation semiconductor, including a plurality of graphite flake and No. two graphite flake, every graphite flake and No. two graphite flake all are vertical, a graphite flake and No. two graphite flake staggered distribution, and the outermost of graphite boat is two No. one graphite flake, still include the bearing platform, horizontal sliding mechanism, the locating part, equidistant adjustment mechanism and a plurality of group connecting piece, horizontal sliding mechanism includes a plurality of pairs of graphite flake carrier, every is all along horizontal direction and bearing platform sliding connection to graphite flake carrier, every graphite flake and No. two graphite flake correspond one of them respectively, all be equipped with a plurality of accuse distance piece on every graphite flake carrier, the end of horizontal sliding mechanism is located to the locating part, the locating part is used for restricting the final displacement stroke of a plurality of graphite flake carriers, and with this makes the accuse distance piece on two adjacent graphite flake carriers contradict each other, the spacing of a graphite flake and No. two adjacent graphite flake is the same and is the minimum, equidistant adjustment mechanism locates the below of horizontal sliding mechanism, every graphite flake carrier all along horizontal direction and bearing platform sliding connection, every one pair of graphite flake and No. two graphite flake are used for locating a plurality of equal ceramic pieces to equal ceramic piece of graphite piece, a plurality of equal ceramic piece and No. two equal ceramic piece are located to the equal ceramic piece of equal distance between a plurality of graphite piece and No. two adjacent graphite piece.
Further, horizontal sliding mechanism still includes two and is symmetrical state lead the slider, every is to graphite flake carrier locates respectively on two lead the slider, every leads the slider and all includes two dead levers that are symmetrical state, every dead lever all is the level, the both ends of every dead lever all link firmly with the bearing platform through a mount pad, every graphite flake carrier is vertical U-shaped splint, the bottom shaping of U-shaped splint has two sliding sleeves that are corresponding state, two sliding sleeves are close to the both ends of U-shaped splint respectively, every sliding sleeve is all overlapped and is located on the dead lever that corresponds, all be fixed on two inner walls of U-shaped splint and be equipped with the rubber pad, a plurality of accuse distance piece evenly divide into two sets of outer walls of locating U-shaped splint both sides respectively.
Further, a plurality of jack along horizontal direction evenly distributed has all been seted up on two long limits of a graphite flake and No. two graphite flake, a jack one-to-one on a graphite flake and No. two graphite flake, and be close to a jack of four terminal angles of a graphite flake and No. two graphite flake and be the matrix distribution, the locating part includes two sets of slip that correspond respectively with a graphite flake's both ends and support the feeler lever, every group slip supports feeler lever and all includes an electric slide rail, grudging post and two horizontal branch, the grudging post passes through an electric slide rail and links to each other with the supporting bench, an electric slide rail is located the side of one of them mount pad, two horizontal branch are fixed respectively and are located the upper and lower both ends of grudging post, every horizontal branch all is perpendicular to the grudging post, and the one end of every horizontal branch all extends towards U-shaped splint, wherein, four horizontal branch respectively with be close to a jack of a graphite flake and No. two terminal angles of No. two graphite flake, every horizontal branch is close to the grudging post and all forms the annular boss that is used for with a graphite flake to contradict.
Further, the quantity of connecting piece is unanimous with the quantity of a jack in the graphite flake, every group connecting piece still includes a ceramic connecting rod and two a ceramic cap soon, a ceramic connecting rod runs through all a graphite flake and No. two graphite flakes through a plurality of a jack of one-to-one, two a ceramic cap soon locate the both ends of a ceramic connecting rod respectively, and two a ceramic cap soon contact with two graphite flakes in the outside respectively, every ceramic accuse apart from piece all includes external screw thread cover and internal thread cover, the coaxial cover of external thread cover is located on the corresponding a ceramic connecting rod, the one end of external thread cover is the outer wall for smooth form, the smooth end of external thread cover inserts in the corresponding a jack, and coaxial shaping has the spacing ring on the outer wall of the smooth end of external thread cover, the one end of internal thread cover is rotationally located on the external thread cover, coaxial shaping has the conflict ring on the other end of internal thread cover.
Further, equidistance adjustment mechanism's quantity is two sets of, every equidistance adjustment mechanism of group all includes No. two electric slide rail, strip U-shaped seat, the pivot, motor and a plurality of slider, a breach has all been seted up at the both ends of bearing platform, all be fixed in every breach be equipped with the bracket of a sunken, strip U-shaped seat is the level and links to each other with the bracket that corresponds through No. two electric slide rail, the length direction of strip U-shaped seat is parallel with the slip direction of U-shaped splint, the direction of movement perpendicular to strip U-shaped seat of No. two electric slide rail, a plurality of slider slides in strip U-shaped seat's top along strip U-shaped seat's length direction, the pivot rotates to locate in the strip U-shaped seat, the axial of pivot is parallel with strip U-shaped seat's length direction, the motor is fixed to be located on the outer wall of strip U-shaped seat, the motor is used for driving the pivot rotation, set up a plurality of spiral groove along the axial equidistance distribution of pivot on the outer wall of pivot, a plurality of spiral groove and slider one-to-one, the bottom of every slider is all moulded has a round head guide pin in the vertical downinsertion spiral groove, the top of every slider is fixed and is equipped with a vertical drive plate between two adjacent bottom that drive plate down is located between two adjacent U-shaped plates.
Further, a number of a piece is all moulded at the both ends of a graphite flake, a number of a piece is propped up near its top, a number of a piece is propped up to the both ends of No. two graphite flakes all moulding, a number of No. two jacks have all been seted up on every a piece and No. two pieces, all be equipped with a number of electrodes between two adjacent a piece, all be equipped with No. two electrodes between two adjacent No. two pieces, a plurality of No. one electrode passes the No. two ceramic connecting rods that correspond No. two jacks through a level and links to each other, a plurality of No. two electrodes pass the No. three ceramic connecting rods that correspond No. two jacks through a level and link to each other, no. two ceramic screw caps are all revolved to No. two ceramic connecting rods and No. three ceramic connecting rods's both ends.
Further, two vertical baffles which are respectively arranged at the sides of the two guide sliding pieces are fixedly arranged on the bearing seat, and the distance between the two first support sheets in the first graphite sheet and the distance between the two second support sheets in the second graphite sheet are identical to the distance between the two vertical baffles.
Further, a horizontal graduated scale is fixedly arranged at the top of one of the vertical frames, and the graduated scale is positioned right above one of the horizontal supporting rods.
Compared with the prior art, the invention has the following beneficial effects:
firstly, the device realizes free sliding of the first graphite sheet and the second graphite sheet through the graphite sheet carrier in the horizontal sliding mechanism, and limits the final displacement stroke of a plurality of pairs of graphite sheet carriers through the limiting piece, so that the spacing between the adjacent first graphite sheet and the adjacent second graphite sheet in the initial state is the same and is the minimum, and the uniform equidistant adjustment of the first graphite sheet and the second graphite sheet is convenient to follow;
secondly, the equidistant adjustment mechanism of the device can be used for equidistant adjustment of a plurality of first graphite sheets and second graphite sheets, and the first graphite sheets and the second graphite sheets can keep the current positions unchanged after the distance adjustment, so that the ceramic connecting piece can be conveniently arranged between the adjacent first graphite sheets and the adjacent second graphite sheets;
thirdly, the ceramic connecting piece of the device is installed after the distance between the first graphite flake and the second graphite flake is adjusted, so that the ceramic connecting piece cannot be broken due to the fact that the adjacent first graphite flake and the adjacent second graphite flake are mutually abutted;
fourth, when the installation ceramic connecting piece, through rotating the internal thread cover and expanding whole ceramic connecting piece's axial distance gradually until with adjacent first graphite flake and No. two graphite flake's interval unanimity, this device's ceramic connecting piece's suitability is more extensive.
Drawings
FIG. 1 is a schematic perspective view of an embodiment;
FIG. 2 is a side view of an embodiment;
FIG. 3 is an enlarged schematic view of a portion indicated by A1 in FIG. 2;
FIG. 4 is a schematic perspective view of a sliding abutment bar of an embodiment;
FIG. 5 is a schematic perspective view of an isometric adjustment mechanism of an embodiment;
FIG. 6 is an exploded view of a slider and a U-shaped bar seat in a three-dimensional configuration;
FIG. 7 is a perspective exploded view of a slider and a U-shaped bar seat according to an embodiment;
FIG. 8 is a schematic perspective view of the embodiment after the U-shaped clamping plate is pushed to limit;
FIG. 9 is a side view of the embodiment after the clevis plate has been pushed toward the stop;
FIG. 10 is an enlarged partial schematic view designated by A2 in FIG. 9;
FIG. 11 is a schematic perspective view of a graphite sheet number one of the embodiments;
FIG. 12 is a schematic perspective view of a graphite sheet No. II of the embodiment;
FIG. 13 is a schematic perspective view of a graphite boat of an embodiment;
FIG. 14 is a top view of a graphite boat of an embodiment;
FIG. 15 is a cross-sectional view taken along line A-A of FIG. 14;
fig. 16 is a partially enlarged schematic view indicated by A3 in fig. 15.
The reference numerals in the figures are: 1. a first graphite flake; 2. a graphite flake II; 3. a support table; 4. a horizontal sliding mechanism; 5. a limiting piece; 6. equidistant adjusting mechanism; 7. a distance control block; 8. a ceramic distance control member; 9. a fixed rod; 10. a mounting base; 11. u-shaped clamping plates; 12. a sliding sleeve; 13. a rubber pad; 14. a jack I; 15. sliding the contact rod; 16. a first electric slide rail; 17. a vertical frame; 18. a horizontal strut; 19. an annular boss; 20. a ceramic connecting rod I; 21. a ceramic screw cap; 22. an external thread sleeve; 23. an internal thread sleeve; 24. a limiting ring; 25. a collision ring; 26. a second electric slide rail; 27. a strip-shaped U-shaped seat; 28. a rotating shaft; 29. a motor; 30. a slide block; 31. a notch; 32. a bracket; 33. a spiral groove; 34. a round head guide pin; 35. a driving plate; 36. a driven plate; 37. a first tablet; 38. a second supporting piece; 39. a second jack; 40. a first electrode; 41. a second electrode; 42. a ceramic connecting rod II; 43. a ceramic connecting rod III; 44. ceramic screw cap number two; 45. a vertical baffle; 46. a graduated scale.
Detailed Description
The invention will be further described in detail with reference to the drawings and the detailed description below, in order to further understand the features and technical means of the invention and the specific objects and functions achieved.
Referring to an isostatic pressing graphite boat for a third generation semiconductor shown in fig. 1 to 16, including a plurality of graphite flake 1 and No. two graphite flake 2, every graphite flake 1 and No. two graphite flake 2 all are vertical, a graphite flake 1 and No. two graphite flake 2 are crisscross distributed, and the outermost side of graphite boat is two No. one graphite flake 1, still include bearing platform 3, horizontal sliding mechanism 4, spacing piece 5, equidistant adjustment mechanism 6 and a plurality of group connecting piece, horizontal sliding mechanism 4 includes a plurality of pairs of graphite flake carrier, every is all along horizontal direction and bearing platform 3 sliding connection, every graphite flake 1 and No. two graphite flake 2 respectively correspond one of them pair of graphite flake carrier, every graphite flake carrier is all equipped with a plurality of accuse distance piece 7 on the graphite flake carrier, spacing piece 5 locates the end of horizontal sliding mechanism 4, spacing piece 5 is used for restricting the final displacement of a plurality of graphite flake carrier, and make the accuse distance piece 7 on two adjacent graphite flake carriers each other, a graphite flake 1 and No. 2 adjacent graphite flake 1 and No. 2 are the same graphite flake and No. 2 and are a plurality of graphite flake 6 and are located respectively with ceramic piece 1 and No. 2 and are located equidistant adjustment piece 8 and are used for setting the ceramic piece between a plurality of adjacent graphite flake adjustment piece and No. 2, a plurality of equal distance adjustment piece 8 are located equidistant adjustment piece 1 and No. 2 and are located equidistant and are equal to ceramic piece 8.
The device is used for assembling the graphite boat, the whole graphite boat is formed by combining a plurality of staggered first graphite sheets 1 and second graphite sheets 2, and when in actual assembly, the number of the first graphite sheets 1 is one more than the number of the second graphite sheets 2, namely, the outermost side of the whole graphite boat is two first graphite sheets 1, so that the electrode is convenient to be mounted subsequently, and the specific assembly process is as follows: firstly, a first graphite flake 1 and a second graphite flake 2 are sequentially arranged on a graphite flake carrier, in the process, firstly, one of the first graphite flake 1 is arranged on a first pair of graphite flake carriers, after the arrangement is finished, the current graphite flake carrier is horizontally pushed to a limiting piece 5, then one of the second graphite flake 2 is arranged on a next pair of graphite flake carriers, after the arrangement is finished, the current graphite flake carrier is pushed to the first pair of graphite flake carriers, and the first graphite flake carrier and the second graphite flake carrier are circularly arranged until all the first graphite flake 1 and the second graphite flake 2 are arranged on the graphite flake carriers, finally, a plurality of first graphite flake 1 and the second graphite flake 2 are distributed in a staggered mode, the graphite flake carriers limit the final displacement stroke of a plurality of pairs of graphite flake carriers through the limiting piece 5 after the pushing, that is to say, the first pair of graphite flake carriers are cut off by the limiting piece 5 in the horizontal pushing process, then the following graphite flake carrier will be stopped by the previous graphite flake carrier, after the last pair of graphite flake carriers is stopped, the distance control blocks 7 on the two adjacent graphite flake carriers will be mutually abutted, at this time, the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 is the same and is the minimum, afterwards, the distance between the plurality of pairs of graphite flake carriers is equidistantly adjusted by the equidistant adjusting mechanism 6, so that the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 meets the current production requirement, after the distance adjustment is finished, the plurality of first graphite flake 1 and the adjacent second graphite flake 2 are fixed by the plurality of groups of connecting pieces, and assembled into the graphite boat, in this process, the distance between the distance-adjusted first graphite flake 1 and the distance-adjusted second graphite flake 2 can be locked by the ceramic distance control piece 8, so as to ensure that after the graphite boat is assembled, the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 is not changed.
In order to reveal the specific structure of each graphite flake carrier and how each graphite flake carrier is slidably connected to the holding table 3, the following features are provided:
the horizontal sliding mechanism 4 further comprises two guide sliding pieces in a symmetrical state, each pair of graphite flake carriers are respectively arranged on the two guide sliding pieces, each guide sliding piece comprises two fixing rods 9 in a symmetrical state, each fixing rod 9 is horizontal, two ends of each fixing rod 9 are fixedly connected with the bearing table 3 through a mounting seat 10, each graphite flake carrier is a vertical U-shaped clamping plate 11, two sliding sleeves 12 in a corresponding state are formed at the bottom of each U-shaped clamping plate 11, the two sliding sleeves 12 are respectively close to two ends of each U-shaped clamping plate 11, each sliding sleeve 12 is sleeved on each corresponding fixing rod 9, rubber pads 13 are fixedly arranged on two inner walls of each U-shaped clamping plate 11, and a plurality of distance control blocks 7 are uniformly distributed on two groups of outer walls of two sides of each U-shaped clamping plate 11.
Every U-shaped splint 11 all slides on the guide that corresponds through sliding sleeve 12, and graphite flake 1 and No. two graphite flake 2 are when the installation, with the bottom of No. one graphite flake 1 or No. two graphite flake 2 down insert two U-shaped splint 11 that correspond, and two U-shaped splint 11 correspond respectively the both ends of No. one graphite flake 1 or No. two graphite flake 2 this moment, after one graphite flake 1 or No. two graphite flake 2 inserts on one pair of U-shaped splint 11, can make corresponding one graphite flake 1 or No. two graphite flake 2 carry out horizontal displacement through pushing current a pair of U-shaped splint 11, wherein, rubber pad 13 is used for reducing the friction between the inner wall of U-shaped splint 11 and No. one graphite flake 1 or No. two graphite flake 2.
In order to reveal the specific structure of the limiting member 5, the following features are provided:
a plurality of jack 14 along the even distribution of horizontal direction has all been seted up to two long edges of a graphite flake 1 and No. two graphite flake 2, a jack 14 one-to-one on a graphite flake 1 and No. two graphite flake 2, and a jack 14 that is close to four terminal angles of a graphite flake 1 and No. two graphite flake 2 is the matrix distribution, the locating part 5 includes two sets of slip contact bars 15 that correspond respectively with the both ends of a graphite flake 1, every group slip contact bar 15 all includes an electric slide rail 16, grudging post 17 and two horizontal strut 18, the grudging post 17 links to each other with bearing platform 3 through an electric slide rail 16, an electric slide rail 16 is located the side of one of them mount pad 10, the upper and lower both ends of grudging post 17 are located to two horizontal strut 18 respectively fixed, every horizontal strut 18 all is perpendicular to grudging post 17, and the one end of every horizontal strut 18 all extends towards U-shaped 11, wherein, four horizontal strut 18 respectively with a jack 14 that is close to four terminal angles of a graphite flake 1 and No. two graphite flake 2, every horizontal strut 18 is close to an annular boss that is used for a boss that is close to 1 to a ring of a graphite flake 19 is formed.
When the first graphite sheet 1 or the second graphite sheet 2 is driven to horizontally displace by the two U-shaped clamping plates 11, four horizontal supporting rods 18 are respectively inserted into the first insertion holes 14 close to the four end angles of the first graphite sheet 1 and the second graphite sheet 2, four ends of the first graphite sheet 1 which are pushed towards the limiting piece 5 are respectively abutted against the four annular bosses 19, so that the first graphite sheet 1 is stopped and displacement of the first graphite sheet 1 is limited, when the second graphite sheet 2 is subsequently displaced, the corresponding U-shaped clamping plates 11 are stopped and displacement is limited by the first U-shaped clamping plates 11 through the distance control block 7, circulation is performed until all the U-shaped clamping plates 11 are sequentially stopped from displacing, and when the first end of each horizontal supporting rod 18 horizontally passes through the first insertion holes 14 on one end of the first graphite sheet 1 and the second graphite sheet 2, and when the first end of each second graphite sheet 2 is subjected to distance adjustment by the equidistant adjusting mechanism 6, the first graphite sheet 1 and the second graphite sheet 2 slide on the first end of each horizontal supporting rod 18 and the second end of each horizontal supporting rod 18, and the second end of each horizontal supporting rod 18 slide on the first graphite sheet 18 and the second end of each horizontal supporting rod 18 are prevented from sliding on the first end of the first graphite sheet 18 and the second end of each horizontal supporting rod 2, and the second end of each horizontal supporting rod 18 is prevented from sliding on the first end of the first horizontal supporting rod 18 and the second end of the horizontal supporting rod is greatly displaced, and the horizontal supporting rods are greatly displaced, and the first end 18 is prevented;
when the first graphite flake 1 and the second graphite flake 2 are downwards inserted into the two U-shaped clamping plates 11, each U-shaped clamping plate 11 is positioned between two adjacent first jacks 14, so that the first jacks 14 cannot be covered by the U-shaped clamping plates 11, and the subsequent assembly process cannot be affected finally.
In order to reveal the specific structure of the connection piece and the ceramic distance control piece 8, the following features are provided:
the quantity of connecting piece is unanimous with the quantity of a jack 14 in a graphite flake 1, every group connecting piece still includes a ceramic connecting rod 20 and two a ceramic cap 21 soon, a ceramic connecting rod 20 runs through all a graphite flake 1 and No. two graphite flake 2 through a plurality of a jack 14 of a one-to-one, two ceramic cap 21 soon locate the both ends of a ceramic connecting rod 20 respectively, and two ceramic cap 21 soon contradict with two graphite flake 1 of outermost respectively, every ceramic accuse distance piece 8 all includes external screw thread cover 22 and internal screw thread cover 23, the coaxial cover of external screw thread cover 22 is located on the corresponding a ceramic connecting rod 20, the one end of external screw thread cover 22 is that the outer wall is smooth form, the smooth end of external screw thread cover 22 inserts in the corresponding a jack 14, and coaxial shaping has spacing ring 24 on the outer wall of the smooth end of external screw thread cover 22, the one end of internal screw thread cover 23 soon locates on the external screw thread cover 22, coaxial shaping has conflict ring 25 on the other end of internal screw thread cover 23.
After the distance between the plurality of pairs of U-shaped clamping plates 11 is adjusted, the plurality of first graphite plates 1 and second graphite plates 2 are connected through the connecting piece, as the first jacks 14 close to the four end corners of the first graphite plates 1 and second graphite plates 2 are sleeved on the first horizontal support rod 18, the first assembly is firstly carried out on the first graphite plates 1 and second graphite plates 2 through the other first jacks 14 exposed outside, each ceramic distance control piece 8 is firstly arranged between the two adjacent first graphite plates 1 and second graphite plates 2, in the process, the smooth end of each external thread sleeve 22 is inserted into the corresponding first jack 14, the stroke of the external thread sleeve 22 inserted into the first jack 14 is limited through the limiting ring 24, then the internal thread sleeve 23 is rotated, the internal thread sleeve 23 gradually extends out, one end of the internal thread sleeve 23 is finally abutted against the corresponding first graphite plate 1 or second graphite plate 2 through the abutting ring 25, at this time, the whole ceramic distance control piece 8 is fixedly clamped between the first graphite sheet 1 and the second graphite sheet 2, the first graphite sheet 1 and the second graphite sheet 2 are locked at intervals through the ceramic distance control piece 8, after all the ceramic distance control pieces 8 are installed, each first ceramic connecting rod 20 horizontally passes through a plurality of external thread sleeves 22 overlapped along the axial direction, then two first ceramic screw caps 21 are screwed at two ends of the first ceramic connecting rod 20, the two first ceramic screw caps 21 respectively abut against the two outermost first graphite sheets 1, after the first assembly is finished, the two first electric slide rails 16 respectively drive the two stand frames 17 to retreat, so that the horizontal support rods 18 on each stand frame 17 gradually pass through corresponding first insertion holes 14 until all the horizontal support rods 18 are separated from the first insertion holes 14, at this time, the first graphite flake 1 and the second graphite flake 2 are secondarily assembled through the first jack 14 which is currently exposed, the secondary assembling process is consistent with the primary assembling process, and when the secondary assembling is finished, the first graphite flake 1 and the second graphite flake 2 are completely connected.
In order to reveal the specific structure of the equidistant adjustment mechanism 6, the following features are provided:
the quantity of equidistant adjustment mechanism 6 is two sets of, every equidistant adjustment mechanism 6 of group all includes No. two electric slide rail 26, strip U-shaped seat 27, the pivot 28, motor 29 and a plurality of slider 30, a breach 31 has all been seted up at the both ends of bearing platform 3, all fixed in every breach 31 is equipped with a sunken bracket 32, strip U-shaped seat 27 is the level and links to each other with corresponding bracket 32 through No. two electric slide rail 26, the length direction of strip U-shaped seat 27 is parallel with the slip direction of U-shaped splint 11, the direction of movement of No. two electric slide rail 26 is perpendicular to the length direction of strip U-shaped seat 27, a plurality of slider 30 slides in the top of strip U-shaped seat 27 along the length direction of strip U-shaped seat 27, in the pivot 28 rotates to locate strip U-shaped seat 27, the axial of pivot 28 is parallel with the length direction of strip U-shaped seat 27, motor 29 is fixed on the outer wall of strip U-shaped seat 27, a plurality of spiral groove 33 along the axial equidistance of pivot 28 is seted up on the outer wall of pivot 28, a plurality of spiral groove 33 and slider 30 one-to-one is equipped with the bottom of every slider 30 and is equipped with the vertical drive round pin 35 down between the adjacent bottom of two guide plates 35 and is located two vertical drive round pin 35 to the top that is located between the vertical drive plate and is fixed.
In the initial state, each strip-shaped U-shaped seat 27 is driven to be far away from the U-shaped clamping plate 11 through the corresponding second electric slide rail 26, so that when the U-shaped clamping plate 11 is pushed to the limiting piece 5, the driven plate 36 at the bottom of the U-shaped clamping plate 11 cannot collide with the driving plate 35 at the top of the sliding block 30, after all the U-shaped clamping plates 11 are pushed to the limiting piece 5, the two strip-shaped U-shaped seats 27 are respectively driven to move towards each other through the corresponding second electric slide rail 26, so that each strip-shaped U-shaped seat 27 gradually approaches the corresponding U-shaped clamping plate 11, in the process, each driven plate 36 is inserted between the adjacent two driving plates 35, the motor 29 is started, the rotating shaft 28 is driven to rotate by the motor 29, the round head guide pin 34 on each sliding block 30 is abutted against the corresponding spiral groove 33 to move, and as each sliding block 30 is connected with the strip-shaped U-shaped seat 27 in a sliding way, finally, each sliding block 30 slides along the length direction of the strip-shaped U-shaped seat 27, the distance between two adjacent sliding blocks 30 is equidistantly enlarged, when the driving plate 35 on the sliding block 30 is displaced to be in contact with the driven plate 36, each driven plate 36 is driven by the driving plate 35 to displace, because the distance between the adjacent first graphite sheet 1 and the adjacent second graphite sheet 2 is the same through the distance control block 7 before, after a plurality of U-shaped clamping plates 11 are driven to slide simultaneously, the distance between the adjacent first graphite sheet 1 and the adjacent second graphite sheet 2 is equidistantly enlarged along with the displacement of the sliding blocks 30, the equidistant adjustment of the distance between the adjacent first graphite sheet 1 and the adjacent second graphite sheet 2 is finally realized, and when the distance is required to be reduced after the distance is enlarged, the starting motor 29 drives the rotating shaft 28 to rotate reversely, so that the plurality of driving plates 35 can drive the driven plate 36 to equidistantly reduce the distance;
when the ceramic distance control member 8 is installed, the first graphite sheet 1 and the second graphite sheet 2 close to the outer end part of the first horizontal supporting rod 18 are firstly installed, and as shown in fig. 9 and 10, although the driven plate 36 is abutted against the driving plate 35, when the external thread sleeve 22 is inserted into the first insertion hole 14, the corresponding first graphite sheet 1 is displaced due to stress, the corresponding driven plate 36 is separated from the driving plate 35, the driving plate 35 is only displaced when the rotating shaft 28 rotates, at the moment, the driven plate 36 is always abutted against the driving plate 35 only by abutting the outermost first graphite sheet 1 inwards, at the moment, the expanded outermost first graphite sheet 1 is abutted inwards by an external cylinder (not shown in the drawings), then when the internal thread sleeve 23 rotates against the second graphite sheet 2, the first graphite sheet 1 and the second graphite sheet 2 are not displaced, and finally, when the ceramic distance control member 8 is installed, the distance between the first graphite sheet 1 and the second graphite sheet 2 is not changed.
In order to reveal how the electrodes are mounted, the following features are provided in particular:
two ends of the first graphite sheet 1 are respectively provided with a first supporting sheet 37 close to the top of the first graphite sheet, two ends of the second graphite sheet 2 are respectively provided with a second supporting sheet 38 close to the bottom of the second graphite sheet, two jacks 39 are respectively formed in each of the first supporting sheet 37 and the second supporting sheet 38, two electrodes 40 are respectively arranged between every two adjacent first supporting sheets 37, two electrodes 41 are respectively arranged between every two adjacent second supporting sheets 38, a plurality of first electrodes 40 are connected through a second ceramic connecting rod 42 which horizontally passes through the corresponding second jacks 39, a plurality of second electrodes 41 are connected through a third ceramic connecting rod 43 which horizontally passes through the corresponding second jacks 39, and two second ceramic screw caps 44 are respectively arranged at two ends of each of the second ceramic connecting rod 42 and the third ceramic connecting rod 43 in a rotating mode.
The electrode between the adjacent first branch sheets 37 and the electrode between the adjacent second branch sheets 38 are used as the positive electrode and the negative electrode of a power supply, so that an electric field is generated, when certain air pressure and gas exist between the adjacent first graphite sheet 1 and the adjacent second graphite sheet 2, glow discharge occurs between the adjacent first graphite sheet 1 and the adjacent second graphite sheet 2, siH4 and NH3 gas in a decomposable space of the glow discharge form Si and N ions, siNx molecules are formed by combination, and the SiNx molecules are deposited on the surface of a semiconductor, so that the film coating purpose of the SiNx film is finally achieved.
When installing a graphite flake 1 or No. two graphite flakes 2 on to every U-shaped splint 11, in order to ensure that be close to a jack 14 of No. 1 graphite flake and No. 2 four terminal angles of No. two graphite flakes is in the position that just can overlap on four horizontal struts 18, specifically set up following characteristics:
the bearing bracket 32 is fixedly provided with two vertical baffles 45 which are respectively arranged at the sides of the two guide sliding pieces, and the distance between the two first support pieces 37 in the first graphite sheet 1 and the distance between the two second support pieces 38 in the second graphite sheet 2 are the same as the distance between the two vertical baffles 45.
Every dead lever 9 all has certain length to this makes every U-shaped splint 11 all can slide to between two vertical baffles 45 through dead lever 9, and a graphite flake 1 is inserting two U-shaped splint 11's in-process downwards, and two a branch piece 37 on a graphite flake 1 can be inconsistent with the inboard of two vertical baffles 45 respectively, and No. two graphite flake 2 is the same when the installation, as shown in fig. 1, plays the positioning effect when installing a graphite flake 1 and No. two graphite flake 2 through two vertical baffles 45, with this when a graphite flake 1 and No. two graphite flake 2 insert behind locating U-shaped splint 11, be close to a jack 14 of a graphite flake 1 and No. two graphite flake 2 four terminal angles in just can the cover locate the position on four horizontal struts 18.
In order to be convenient for acquire the numerical value of interval behind adjacent graphite flake 1 and the spacing of No. two graphite flake 2, specifically set up following characteristics:
a horizontal graduated scale 46 is fixedly arranged on the top of one of the uprights 17, and the graduated scale 46 is positioned right above one of the horizontal struts 18.
The numerical value of the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 can be obtained in real time through the overlooking graduated scale 46, and the numerical value of the specific expansion distance or the specific contraction distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 can be accurately obtained through the graduated scale 46, so that the distance between the first graphite flake 1 and the adjacent second graphite flake 2 after the distance adjustment accords with the current production standard.
Working principle:
the device is used for assembling the graphite boat, the whole graphite boat is formed by combining a plurality of staggered first graphite sheets 1 and second graphite sheets 2, and when in actual assembly, the number of the first graphite sheets 1 is one more than the number of the second graphite sheets 2, namely, the outermost side of the whole graphite boat is two first graphite sheets 1, so that the electrode is convenient to be mounted subsequently, and the specific assembly process is as follows: firstly, a first graphite flake 1 and a second graphite flake 2 are sequentially arranged on a graphite flake carrier, in the process, firstly, one of the first graphite flake 1 is arranged on a first pair of graphite flake carriers, after the arrangement is finished, the current graphite flake carrier is horizontally pushed to a limiting piece 5, then one of the second graphite flake 2 is arranged on a next pair of graphite flake carriers, after the arrangement is finished, the current graphite flake carrier is pushed to the first pair of graphite flake carriers, and the first graphite flake carrier and the second graphite flake carrier are circularly arranged until all the first graphite flake 1 and the second graphite flake 2 are arranged on the graphite flake carriers, finally, a plurality of first graphite flake 1 and the second graphite flake 2 are distributed in a staggered mode, the graphite flake carriers limit the final displacement stroke of a plurality of pairs of graphite flake carriers through the limiting piece 5 after the pushing, that is to say, the first pair of graphite flake carriers are cut off by the limiting piece 5 in the horizontal pushing process, then the following graphite flake carrier will be stopped by the previous graphite flake carrier, after the last pair of graphite flake carriers is stopped, the distance control blocks 7 on the adjacent two graphite flake carriers in different pairs will mutually collide, at this time, the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 is the same and is the minimum, afterwards, the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 is equidistantly adjusted by the equidistant adjusting mechanism 6, so that the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 meets the current production requirement, after the distance adjustment is finished, the plurality of first graphite flake 1 and the adjacent second graphite flake 2 are fixed by the plurality of connecting pieces, and assembled into the graphite boat by the plurality of connecting pieces, in this process, the distance between the first graphite flake 1 and the adjacent second graphite flake 2 after the distance adjustment can be locked by the ceramic distance control piece 8, so as to ensure that the graphite boat is assembled, the distance between the adjacent first graphite flake 1 and the adjacent second graphite flake 2 is not changed.
The foregoing examples merely illustrate one or more embodiments of the invention, which are described in greater detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (8)
1. The isostatic pressing graphite boat for the third generation semiconductor comprises a plurality of first graphite sheets (1) and second graphite sheets (2), wherein each first graphite sheet (1) and second graphite sheet (2) are vertical, the first graphite sheets (1) and second graphite sheets (2) are distributed in a staggered manner, the outermost sides of the graphite boat are two first graphite sheets (1), the isostatic pressing graphite boat is characterized by further comprising a bearing table (3), a horizontal sliding mechanism (4), a limiting piece (5), an equidistant regulating mechanism (6) and a plurality of groups of connecting pieces, the horizontal sliding mechanism (4) comprises a plurality of pairs of graphite sheet carriers, each pair of graphite sheet carriers is in sliding connection with the bearing table (3) along the horizontal direction, each first graphite sheet (1) and second graphite sheet (2) are respectively corresponding to one pair of graphite sheet carriers, a plurality of distance control blocks (7) are arranged on each graphite sheet carrier, the limiting piece (5) is arranged at the tail ends of the horizontal sliding mechanism (4) and is used for limiting the final displacement of a plurality of pairs of graphite sheet carriers, the distance control blocks (6) are arranged on the adjacent graphite sheet carriers, the two adjacent graphite sheet carriers (6) are respectively equal to the two graphite sheet carriers (6) in distance regulating mechanism (4) which are equal to each other, the plurality of first graphite sheets (1) and second graphite sheets (2) are fixedly connected through the plurality of groups of connecting pieces, each group of connecting pieces comprises a plurality of ceramic distance control pieces (8), each ceramic distance control piece (8) is arranged between the adjacent first graphite sheets (1) and second graphite sheets (2), and each ceramic distance control piece (8) is used for locking the distance between the adjacent first graphite sheets (1) and second graphite sheets (2) after distance adjustment.
2. The isostatic pressing graphite boat for the third-generation semiconductors according to claim 1, wherein the horizontal sliding mechanism (4) further comprises two symmetrical sliding guide pieces, each pair of graphite sheet carriers are respectively arranged on the two sliding guide pieces, each sliding guide piece comprises two symmetrical fixing rods (9), each fixing rod (9) is horizontal, two ends of each fixing rod (9) are fixedly connected with the supporting table (3) through a mounting seat (10), each graphite sheet carrier is a vertical U-shaped clamping plate (11), two sliding sleeves (12) in corresponding states are formed at the bottom of the U-shaped clamping plate (11), the two sliding sleeves (12) are respectively close to two ends of the U-shaped clamping plate (11), each sliding sleeve (12) is sleeved on the corresponding fixing rod (9), rubber pads (13) are fixedly arranged on two inner walls of the U-shaped clamping plate (11), and a plurality of distance control blocks (7) are uniformly distributed on two groups of outer walls of the two sides of the U-shaped clamping plate (11).
3. The isostatic pressing graphite boat for the third-generation semiconductor according to claim 2, wherein the two long sides of the first graphite flake (1) and the second graphite flake (2) are respectively provided with a plurality of first jacks (14) which are uniformly distributed along the horizontal direction, the first jacks (14) on the first graphite flake (1) and the second graphite flake (2) are in one-to-one correspondence, the first jacks (14) which are close to the four end angles of the first graphite flake (1) and the second graphite flake (2) are distributed in a matrix, the limiting piece (5) comprises two groups of sliding contact rods (15) which are respectively corresponding to the two ends of the first graphite flake (1), each group of sliding contact rods (15) comprises a first electric slide rail (16), a vertical frame (17) and two horizontal support rods (18), the vertical frame (17) is connected with the supporting table (3) through the first electric slide rail (16), the first electric slide rail (16) is positioned at the side of the mounting seat (10), the two horizontal support rods (18) are respectively fixedly arranged at the upper end and the lower end of the vertical frame (17) of each vertical support rod (18) which is close to the two vertical support rods (18) of the first horizontal support rods (18) and each vertical support rod (18) which are respectively arranged at the two ends of the vertical support rods (18) and are respectively adjacent to the two vertical support rods (18), one end of each horizontal strut (18) close to the vertical frame (17) is provided with a circle of annular boss (19) which is used for abutting against the first graphite sheet (1).
4. The isostatic pressing graphite boat for the third-generation semiconductors according to claim 3, wherein the number of the connecting pieces is consistent with the number of the first jacks (14) in the first graphite sheet (1), each group of connecting pieces further comprises a first ceramic connecting rod (20) and two first ceramic screw caps (21), the first ceramic connecting rod (20) penetrates through all the first graphite sheet (1) and the second graphite sheet (2) through the first jacks (14) corresponding to the first ceramic connecting rod one by one, the two first ceramic screw caps (21) are respectively arranged at two ends of the first ceramic connecting rod (20) in a screwing mode, the two first ceramic screw caps (21) are respectively abutted against the two first graphite sheets (1) at the outermost side, each ceramic distance control piece (8) comprises an external thread sleeve (22) and an internal thread sleeve (23), one end of the external thread sleeve (22) is in a smooth shape, the smooth end of the external thread sleeve (22) is coaxially sleeved on the corresponding first ceramic connecting rod (20), the smooth end of the external thread sleeve (22) is inserted into the corresponding first jacks (14), and the other end of the external thread sleeve (22) is coaxially sleeved on the external thread sleeve (23), and the other end of the external thread sleeve (22) is coaxially screwed on the external thread sleeve (24) is in a threaded mode, and the other end of the external thread sleeve is screwed on the external thread sleeve (22 is formed.
5. The isostatic pressing graphite boat for the third-generation semiconductors according to claim 2, wherein the number of the equidistant adjusting mechanisms (6) is two, each equidistant adjusting mechanism (6) comprises a second electric slide rail (26), a strip-shaped U-shaped seat (27), a rotating shaft (28), a motor (29) and a plurality of sliding blocks (30), two ends of the supporting table (3) are respectively provided with a notch (31), a sunk bracket (32) is fixedly arranged in each notch (31), the strip-shaped U-shaped seat (27) is horizontal and is connected with the corresponding bracket (32) through the second electric slide rail (26), the length direction of the strip-shaped U-shaped seat (27) is parallel to the sliding direction of the U-shaped clamping plate (11), the moving direction of the second electric slide rail (26) is perpendicular to the length direction of the strip-shaped U-shaped seat (27), the plurality of sliding blocks (30) slide along the length direction of the strip-shaped U-shaped seat (27) at the top, the rotating shaft (28) is rotationally arranged in the strip-shaped U-shaped seat (27), the motor (28) is axially fixed with the rotating shaft (29) along the length direction of the strip-shaped U-shaped seat (27) to be fixedly arranged on the outer wall (28), a plurality of spiral grooves (33) are in one-to-one correspondence with the sliding blocks (30), round head guide pins (34) which are vertically downwards inserted into the spiral grooves (33) are formed at the bottom of each sliding block (30), a vertically upwards driving plate (35) is fixedly arranged at the top of each sliding block (30), and a vertically downwards driven plate (36) which is located between two adjacent driving plates (35) is fixedly arranged at the bottom of each U-shaped clamping plate (11).
6. The isostatic pressing graphite boat for the third-generation semiconductors according to claim 3, wherein the first branch plates (37) close to the top of the first graphite plate (1) are formed at two ends of the first graphite plate (1), the second branch plates (38) close to the bottom of the second graphite plate (2) are formed at two ends of the second graphite plate (2), the second jack (39) is formed in each of the first branch plates (37) and the second branch plates (38), the first electrode (40) is arranged between every two adjacent first branch plates (37), the second electrode (41) is arranged between every two adjacent second branch plates (38), the first electrodes (40) are connected through the second ceramic connecting rod (42) which horizontally penetrates through the corresponding second jack (39), the second electrodes (41) are connected through the third ceramic connecting rod (43) which horizontally penetrates through the corresponding second jack (39), and two second ceramic caps (44) are arranged at two ends of the second ceramic connecting rod (42) and the third ceramic connecting rod (43) in a rotating mode.
7. The isostatic pressing graphite boat for the third-generation semiconductors according to claim 6, wherein two vertical baffles (45) which are respectively arranged beside the two sliding guide pieces are fixedly arranged on the bearing seat (32), and the distance between the two first support plates (37) in the first graphite sheet (1) and the distance between the two second support plates (38) in the second graphite sheet (2) are the same as the distance between the two vertical baffles (45).
8. An isostatic pressing graphite boat for three-generation semiconductors as claimed in claim 3, wherein a horizontal graduated scale (46) is fixedly arranged at the top of one of the uprights (17), and the graduated scale (46) is positioned right above one of the horizontal struts (18).
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| CN202410162575.7A CN117711998B (en) | 2024-02-05 | 2024-02-05 | Three generations of isostatic pressing graphite boats for semiconductor |
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| CN202410162575.7A CN117711998B (en) | 2024-02-05 | 2024-02-05 | Three generations of isostatic pressing graphite boats for semiconductor |
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|---|---|---|---|---|
| US20090220793A1 (en) * | 2008-02-28 | 2009-09-03 | Polymatech Co., Ltd. | Graphite Sheet and Manufacturing Method of the Same |
| CN205406550U (en) * | 2016-03-23 | 2016-07-27 | 锦州华昌光伏科技有限公司 | Graphite boat with adjustable lock distance |
| CN107299334A (en) * | 2017-08-14 | 2017-10-27 | 通威太阳能（安徽）有限公司 | A kind of graphite boat of adjustable thickness and spacing |
| CN206985136U (en) * | 2017-07-31 | 2018-02-09 | 鹰潭市众鑫成铜业有限公司 | A kind of copper coin pusher |
| CN212705371U (en) * | 2020-08-18 | 2021-03-16 | 无锡鼎桥新能源科技有限公司 | Exempt from to wash graphite boat installation calibrating device |
| CN116180054A (en) * | 2023-04-28 | 2023-05-30 | 福建福碳新材料科技有限公司 | Reinforced graphite boat |
-
2024
- 2024-02-05 CN CN202410162575.7A patent/CN117711998B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090220793A1 (en) * | 2008-02-28 | 2009-09-03 | Polymatech Co., Ltd. | Graphite Sheet and Manufacturing Method of the Same |
| CN205406550U (en) * | 2016-03-23 | 2016-07-27 | 锦州华昌光伏科技有限公司 | Graphite boat with adjustable lock distance |
| CN206985136U (en) * | 2017-07-31 | 2018-02-09 | 鹰潭市众鑫成铜业有限公司 | A kind of copper coin pusher |
| CN107299334A (en) * | 2017-08-14 | 2017-10-27 | 通威太阳能（安徽）有限公司 | A kind of graphite boat of adjustable thickness and spacing |
| CN212705371U (en) * | 2020-08-18 | 2021-03-16 | 无锡鼎桥新能源科技有限公司 | Exempt from to wash graphite boat installation calibrating device |
| CN116180054A (en) * | 2023-04-28 | 2023-05-30 | 福建福碳新材料科技有限公司 | Reinforced graphite boat |
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| CN117711998B (en) | 2024-04-26 |
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