CN117666055A - Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method - Google Patents
Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method Download PDFInfo
- Publication number
- CN117666055A CN117666055A CN202311631157.XA CN202311631157A CN117666055A CN 117666055 A CN117666055 A CN 117666055A CN 202311631157 A CN202311631157 A CN 202311631157A CN 117666055 A CN117666055 A CN 117666055A
- Authority
- CN
- China
- Prior art keywords
- adjusting
- hole
- plate
- fixing
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 140
- 239000004065 semiconductor Substances 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000000835 fiber Substances 0.000 claims abstract description 25
- 238000001514 detection method Methods 0.000 claims abstract description 24
- 238000007689 inspection Methods 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 8
- 230000003287 optical effect Effects 0.000 description 14
- 238000012634 optical imaging Methods 0.000 description 9
- 230000002457 bidirectional effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Landscapes
- Optical Couplings Of Light Guides (AREA)
Abstract
The embodiment of the invention provides an optical fiber position adjusting unit, a semiconductor detecting system and an optical fiber position adjusting method, wherein the optical fiber position adjusting unit comprises: a first mounting plate including a first adjustment aperture; the first adjusting hole is used for installing a first part of the optical fiber fixing piece; a second mounting plate including a second adjustment aperture for mounting a second portion of the fiber optic fixture; the first adjusting structure is used for adjusting the relative positions of the second adjusting hole and the first adjusting hole. By adopting the technical scheme, the adjustment of the optical fiber position can be realized, so that the deviation between the optical fiber light-emitting axis and the central axis meets the design requirement, the imaging effect is improved, and the detection quality is improved.
Description
Technical Field
The embodiment of the invention relates to the technical field of semiconductor processing, in particular to an optical fiber position adjusting unit, a semiconductor detecting system and an optical fiber position adjusting method.
Background
In the field of semiconductor processing, optical fiber detection imaging is widely used in quality control, fault analysis, process optimization, and the like. For example, the semiconductor inspection apparatus may collect an optical signal of a semiconductor device to be inspected using an optical sensor and process the optical signal to image the semiconductor device to be inspected, thereby realizing nondestructive inspection of the semiconductor device.
The semiconductor detection device uses the optical fiber detection imaging technology to transmit optical signals by using the optical fiber, if the deviation between the light-emitting axis of the optical fiber and the central axis is large, the imaging effect of the optical fiber detection imaging is affected, and the quality of semiconductor detection is reduced, so that an optical fiber position adjusting unit is needed to be provided, and the deviation between the light-emitting axis of the optical fiber and the central axis can be adjusted.
Disclosure of Invention
The invention solves the technical problem by providing an optical fiber position adjusting unit, a semiconductor detecting system and an optical fiber position adjusting method, which are used for adjusting the coaxiality of an optical fiber light-emitting axis and a central axis, improving the imaging effect of optical fiber detection and realizing the improvement of detection quality.
In view of this, an embodiment of the present invention provides an optical fiber position adjustment unit, including: a first mounting plate including a first adjustment aperture; the first adjusting hole is used for installing a first part of the optical fiber fixing piece; a second mounting plate including a second adjustment aperture for mounting a second portion of the fiber optic fixture; the first adjusting structure is used for adjusting the relative positions of the second adjusting hole and the first adjusting hole.
Optionally, the second mounting plate further comprises a first adjustment plate; the second adjusting hole is formed in the first adjusting plate; the first adjusting structure drives the first adjusting plate to move so as to adjust the relative position of the second adjusting hole and the first adjusting hole.
Optionally, the first mounting plate further comprises at least two protrusions; the at least two protrusions include a first protrusion and a second protrusion; the first bulge and the second bulge are arranged on two sides of the first adjusting plate; a first mounting through hole is formed in the first bulge, and a second mounting through hole is formed in the second bulge; the first adjusting structure comprises a first adjusting lever and a second adjusting lever; the first adjusting bar passes through the first mounting through hole to drive the first adjusting plate to move to one side; the second adjusting bar passes through the second mounting through hole to drive the first adjusting plate to move to the other side; screw thread structures are arranged in the first mounting through hole and the second mounting through hole; and the first adjusting lever and the second adjusting lever are respectively provided with a thread structure.
Optionally, the second mounting plate further includes: a first fixing plate and a first connecting bar; the first connecting bar is connected with the first adjusting plate and the first fixing plate, and the first fixing plate is used for being fixed with the first mounting plate.
Optionally, the first mounting plate further includes a first fixing hole and a second fixing hole; the first adjusting plate comprises a third fixing hole; the third fixing hole is opposite to the first fixing hole so as to fix the adjusted first adjusting plate on the first mounting plate; the first fixing plate comprises a fourth fixing hole; the fourth fixing hole is opposite to the second fixing hole so as to fix the first fixing plate on the first mounting plate.
Optionally, the method further comprises: a third mounting plate, a second adjustment structure; the third mounting plate comprises a third adjusting hole, and the third adjusting hole is used for mounting an optical fiber fixing piece; the second adjusting structure is used for adjusting the relative positions of the third adjusting hole and the second adjusting hole.
Optionally, the third mounting plate further comprises a second adjusting plate; the third adjusting hole is formed in the second adjusting plate; the second adjusting structure drives the first adjusting plate to move so as to adjust the relative position of the third adjusting hole and the second adjusting hole; the second adjusting plate includes a fifth fixing hole.
Optionally, the third mounting plate further comprises at least two protrusions; the at least two protrusions include a third protrusion and a fourth protrusion; the third bulge and the fourth bulge are arranged on two sides of the second adjusting plate; a third mounting through hole is formed in the third bulge, and a fourth mounting through hole is formed in the fourth bulge; the second adjusting structure comprises a third adjusting lever and a fourth adjusting lever; the third adjusting bar passes through the third mounting through hole to drive the first adjusting plate to move to one side; the second adjusting bar passes through the fourth mounting through hole to drive the first adjusting plate to move to the other side; screw thread structures are arranged in the third mounting through hole and the fourth mounting through hole; and the third adjusting lever and the fourth adjusting lever are respectively provided with a thread structure.
Optionally, the third mounting plate further includes: the second fixing plate and the second connecting bar; the second connecting bar is connected with a second adjusting plate and a second fixing plate, and the second fixing plate is used for being fixed with the first mounting plate; the second fixing plate includes a sixth fixing hole.
Optionally, the third mounting plate further includes a seventh fixing hole and an eighth fixing hole; the seventh fixing hole is opposite to the third fixing hole so as to fix the adjusted first adjusting plate on the third mounting plate; the eighth fixing hole is opposite to the fourth fixing hole so as to fix the adjusted first fixing plate on the third mounting plate; the fifth fixing hole is opposite to the first fixing hole so as to fix the adjusted second adjusting plate on the first mounting plate; the sixth fixing hole is opposite to the second fixing hole to fix the second fixing plate on the first mounting plate.
The embodiment of the invention also provides a semiconductor detection system, which is characterized by comprising: the optical fiber fixing piece is connected with the semiconductor detection device; the optical fiber position adjusting unit is applied to any one of the optical fiber position adjusting units described above.
Accordingly, the present invention provides an optical fiber position adjustment method, which is applied to the optical fiber position adjustment unit described in any one of the above, comprising: fixing the first fixing plate on the first mounting plate through the second fixing hole and the fourth fixing hole; the first adjusting lever and the second adjusting lever are adjusted to drive the first adjusting plate and the first connecting lever to move so as to adjust the relative positions of the first adjusting hole and the second adjusting hole; the first adjusting plate is fixed on the first mounting plate through the first fixing hole and the third fixing hole so as to mount the optical fiber fixing piece.
By adopting the technical scheme, the adjustment of the optical fiber position can be realized, so that the deviation between the optical fiber light-emitting axis and the central axis meets the design requirement, the imaging effect is improved, and the detection quality is improved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present application, and that other drawings may be obtained according to the provided drawings without inventive effort to a person skilled in the art.
FIG. 1 is a schematic view of a prior art fiber optic fixture and a fiber optic central axis;
FIG. 2 is a top view of a prior art optical fiber and fiber mount;
FIG. 3 is a schematic view of the structure of a first mounting plate according to an embodiment of the present invention;
FIG. 4 is a schematic view of the structure of a second mounting plate according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of a structure of an optical fiber position adjusting unit according to an embodiment of the present invention;
FIG. 6 is a flow chart of a method of adjusting the position of an optical fiber according to an embodiment of the present invention;
FIG. 7 is a schematic structural view of a third mounting plate according to an embodiment of the present invention;
FIG. 8 is a schematic diagram of a fiber optic bi-directional position adjustment unit according to an embodiment of the present invention;
fig. 9 is a flowchart of a method for adjusting a bidirectional position of an optical fiber according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
Referring to fig. 1 and 2, a semiconductor inspection apparatus uses an optical fiber inspection imaging technique, and it is necessary to transmit an optical signal using an optical fiber 1 and mount a fixing member 2 (e.g., a fixing ring) of the optical fiber 1 on a mounting board. Because the optical fiber belongs to a precise component, and the diameter is slim, the fixing piece 2 of the optical fiber 1 is not beneficial to being accurately arranged on the mounting plate, the optical fiber 1 is easy to deviate from the central axis 3, the imaging effect during detection is affected, and the quality of semiconductor detection is reduced. Therefore, how to provide an improved technical scheme and correct the difference between the light-emitting axis of the optical fiber 1 and the central axis 3, so that the coaxiality of the light-emitting axis of the optical fiber and the central axis 3 reaches the designed difference range, and the technical problem to be solved is urgent.
Aiming at the technical problems, the embodiment of the invention provides an optical fiber position adjusting unit, which can adjust the deviation between the light-emitting axis of an optical fiber and a central axis so as to meet the design requirements, further improve the imaging effect and realize the improvement of the detection quality.
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to fig. 3 to 5 of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments, and the following embodiments and features of the embodiments may be combined with each other without conflict.
The present embodiment provides an optical fiber position adjustment unit, as shown in fig. 1, 3, 4 and 5, including: a first mounting plate 100, the first mounting plate 100 comprising a first adjustment aperture 101; the first adjusting hole 101 is used for installing the first part 5 of the optical fiber fixing piece; a second mounting plate 200, the second mounting plate 200 comprising a second adjustment aperture 201, the second adjustment aperture 201 for mounting the second portion 6 of the fiber optic fixture;
a first adjustment structure (not shown) for adjusting the relative position of the second adjustment hole 201 and the first adjustment hole 101.
By adopting the optical fiber position adjusting unit, the optical fiber position can be adjusted in the following way:
placing the second mounting plate 200 on the first mounting plate 100, adjusting the first adjustment structure such that the second adjustment aperture 201 is opposite the first adjustment aperture 101; in an alternative implementation, when the second adjusting hole 201 is opposite to the first adjusting hole 101, a vertical line where the center of the second adjusting hole 201 is located coincides with a vertical line where the center of the first adjusting hole 101 is located; in other alternative implementations, when the second adjusting hole 201 is opposite to the first adjusting hole 101, the perpendicular line at the center of the second adjusting hole 201 and the perpendicular line at the center of the first adjusting hole 101 may not coincide, as long as the overlapping portion of the second adjusting hole 201 and the first adjusting hole 101 can pass through the optical fiber fixing member;
Passing the first portion 5 of the fiber optic mount through the first adjustment aperture 101 and the second portion 6 of the fiber optic mount through the second adjustment aperture 201;
providing a light source to the other end 4 of the optical fiber fixing member (for example, the other end 4 of the optical fiber fixing member shown in fig. 1), irradiating light emitted by the light source to the surface of an object to be detected after reaching the end of the optical fiber fixing member through the optical fiber 1, forming an object image on the optical imaging device after receiving reflected light of the surface of the object to be detected by the optical sensor, and distinguishing the deviation degree of the optical axis of the optical fiber and the central axis through the definition of the object image; in an alternative implementation, the degree of deviation of the optical axis of the optical fiber from the central axis can be distinguished by the definition of the object image; the definition of the object image can be judged by naked eyes, and the light intensity of the object image can be detected by optical detection equipment;
if the object image of the object on the optical imaging device is blurred and unclear, adjusting the second mounting plate 200 to enable the first adjusting hole 101 and the second adjusting hole 201 to simultaneously squeeze and adjust the optical fiber fixing piece until a clear object image is formed on the optical imaging device, and at the moment, the deviation degree of the optical fiber light-emitting axis and the central axis meets the design requirement;
After the deviation degree of the optical fiber light-emitting axis and the central axis meets the design requirement, in an alternative implementation, the adjusted second mounting plate 200 can be fixed on the first mounting plate 100 through quick-setting glue so as to achieve the purpose of mounting and fixing the adjusted optical fiber fixing piece on the mounting plate; in other alternative implementations, the second mounting plate 200 may be secured to the first mounting plate 100 by a welding process to achieve the mounting and securing of the adjusted fiber optic fixture to the mounting plate.
In sum, through the adjustment of optic fibre position, after making optic fibre light-emitting axis and the deviation degree of central axis satisfy the designing requirement, can improve optic fibre imaging, realize detection quality's promotion.
As an alternative embodiment, referring to fig. 4, the second mounting plate 200 further includes a first adjustment plate 202; the second adjusting hole 201 is provided on the first adjusting plate 202.
As an alternative embodiment, the first mounting plate 100 further includes at least two protrusions, including a first protrusion 102 and a second protrusion 103. The first adjustment plate 202 includes at least one first adjustment protrusion 207, and in other embodiments, the first adjustment plate 202 may not include the first adjustment protrusion 207 thereon.
According to the foregoing optical fiber position adjustment process, the first mounting plate 100 and the second mounting plate 200 may be fixed after the optical fiber position adjustment is completed, and the first protrusion 102 and the second protrusion 103 may be disposed on both sides of the first adjustment protrusion 207 of the first adjustment plate 202 as shown in fig. 5 after the first mounting plate 100 and the second mounting plate 200 are fixed.
In an alternative implementation, a gap width A1 between the first protrusion 102 and the first adjustment protrusion 207 is greater than or equal to 0mm, and a gap width A2 between the second protrusion 103 and the first adjustment protrusion 207 is greater than or equal to 0mm; the gap width A1 between the first protrusion 102 and the first adjustment protrusion 207 and the gap width A2 between the second protrusion 103 and the first adjustment protrusion 207 are equal, and in other embodiments, the gap width A1 between the first protrusion 102 and the first adjustment protrusion 207 and the gap width A2 between the second protrusion 103 and the first adjustment protrusion 207 may not be equal.
In an alternative implementation, the first protrusion 102 and the second protrusion 103 are integrally formed with the first mounting plate 100, and in other embodiments, the first protrusion 102, the second protrusion 103, and the first mounting plate 100 are each independently formed; in an alternative implementation, the first adjustment protrusion 207 is integrally formed with the second mounting plate 200, and in other embodiments, the first adjustment protrusion 207 is separately formed from the second mounting plate 200.
As an alternative embodiment, as shown in fig. 3, a first mounting through hole 104 is formed in the first protrusion 102, a second mounting through hole 105 is formed in the second protrusion 103, and screw structures are formed inside the first mounting through hole 104 and the second mounting through hole.
As an alternative embodiment, as shown in fig. 4, the second mounting plate 200 further includes a first fixing plate 203, at least one first connecting bar 204, and the first connecting bar 204 connects the first adjusting plate 202 and the first fixing plate 203; the first fixing plate 203 is used for fixing with the first mounting plate 100. In an alternative implementation, the first connecting bar 204 is integrally formed with the first fixing plate 203 and the first adjusting plate 202. In other embodiments, the first connecting bar 204, the first fixing plate 203 and the first adjusting plate 202 are formed separately, and the first connecting bar 204, the first fixing plate 203 and the first adjusting plate 202 are connected by screws. Or, the first connecting bar 204 is integrally formed with the first adjusting plate 202, and the first connecting bar 204 and the first adjusting plate 202 are connected with the first fixing plate 203 by screws. Or, the first connecting bar 204 is integrally formed with the first fixing plate 203, and the first connecting bar 204 and the first fixing plate 203 are connected with the first adjusting plate 202 by screws.
In an alternative implementation, the first connecting bar 204 material is aluminum, and in other embodiments, the first connecting bar 204 material is an aluminum alloy or copper; the first connecting rod 204 has the following material characteristics: when an external force acts on the first connecting bar 204, the first connecting bar 204 is easy to deform but not easy to break, so that the position of the first adjusting plate 202 can be flexibly adjusted, and the relative position of the second adjusting hole 201 and the first adjusting hole 101 can be adjusted conveniently.
As an alternative embodiment, as shown in fig. 3, the first mounting plate 100 further includes at least one first fixing hole 106 and at least one second fixing hole 107. The first adjustment plate 202 includes at least one third fixing hole 205, and the first fixing plate 203 includes at least one fourth fixing hole 206. The third fixing hole 205 is opposite to the first fixing hole 106, and the fourth fixing hole 206 is opposite to the second fixing hole 107. The first fixing plate 203 is fixed to the first mounting plate 100 through the fourth fixing hole 206 and the second fixing hole 107. After the first adjustment plate 202 is adjusted to achieve the adjustment of the first adjustment hole 101 and the second adjustment hole 201, the adjusted first adjustment plate 202 is fixed to the first mounting plate 100 through the third fixing hole 205 and the first fixing hole 106.
The first fixing hole 106 is circular, and in other embodiments, the first fixing hole 106 is square, triangular, or any other shape. The second fixing hole 107 is circular, and in other embodiments, the second fixing hole 107 is square, triangular, or any other shape. The third fixing hole 205 is circular, and in other embodiments, the third fixing hole 205 is square, triangular, or any other shape. The fourth fixing hole 206 is circular, and in other embodiments, the fourth fixing hole 206 is square, triangular, or any other shape.
Screw structures are arranged in the first fixing hole 106 and the second fixing hole 107, and screw structures are not arranged in the third fixing hole 205 and the fourth fixing hole 206; as shown in fig. 5, the third fixing hole 205 is connected to the first fixing hole 106 through a threaded rod 404, so as to fix the adjusted first adjusting plate 202 on the first mounting plate 100; the fourth fixing hole 206 is connected to the second fixing hole 107 through a threaded rod 404, so as to fix the first fixing plate 203 to the first mounting plate 100.
As an alternative embodiment, as shown in fig. 5, the first adjusting structure includes a first adjusting lever 603 and a second adjusting lever 604; the first adjusting lever 603 and the second adjusting lever 604 are respectively provided with a screw structure so as to be matched with the first mounting through hole 104 and the second mounting through hole 105 which are provided with the screw structures. In an optional implementation of the first adjusting structure for adjusting the first adjusting plate 202, after the first adjusting lever 603 passes through the threaded structure of the first mounting through hole 104, the first adjusting plate 202 is driven to move to one side, and after the second adjusting lever 604 passes through the threaded structure of the second mounting through hole 105, the first adjusting plate 202 is driven to move to the other side, so as to adjust the relative position between the second adjusting hole 201 and the first adjusting hole 101, thereby achieving the purpose of adjusting the position of the optical fiber fixing member.
The first adjusting lever 603 and the second adjusting lever 604 are respectively provided with a thread structure, and the first installation through hole 104 and the second installation through hole are respectively internally provided with a thread structure, so that after the first adjusting plate 202 is adjusted, the thread structures can play a role in fixing the first adjusting plate 202.
In an alternative implementation, the gap width between the first adjusting lever 603 and the first adjusting protrusion 207 is greater than or equal to 0mm; the gap width between the second adjusting bar 604 and the first adjusting protrusion 207 is more than or equal to 0mm; the gap width between the first adjusting lever 603 and the first adjusting protrusion 207 is equal to the gap width between the second adjusting lever 604 and the first adjusting protrusion 207; in other embodiments, the gap width between the first adjusting lever 603 and the first adjusting protrusion 207 is not equal to the gap width between the second adjusting lever 604 and the first adjusting protrusion 207.
As an alternative embodiment, the first mounting plate 100 is in the shape of a rectangular block, and in other embodiments, the first mounting plate 100 is in the shape of a square block or a round block or any other shape.
As an alternative embodiment, the second mounting plate 200 is in the shape of a rectangular block, and in other embodiments, the second mounting plate 200 is in the shape of a square block or a round block or any other shape.
As an alternative embodiment, the first mounting plate 100 and the second mounting plate 200 are equal in size, and in other embodiments, the first mounting plate 100 and the second mounting plate 200 are not equal in size.
As an alternative embodiment, the thicknesses of the first mounting plate 100 and the second mounting plate 200 are equal, and in other embodiments, the thicknesses of the first mounting plate 100 and the second mounting plate 200 are not equal.
As an alternative embodiment, the first adjusting hole 101 is circular, and in other embodiments, the first adjusting hole 101 is any shape such as square, triangle, etc.
As an alternative embodiment, the second adjusting hole 201 is circular, and in other embodiments, the second adjusting hole 201 is any shape such as square, triangle, etc.
As an alternative embodiment, the first adjusting hole 101 and the second adjusting hole 201 have equal pore sizes, and in other embodiments, the first adjusting hole 101 and the second adjusting hole 201 have unequal pore sizes.
As an alternative embodiment, the sum of the height of the first adjusting hole 101 and the height of the second adjusting hole 201 is greater than or equal to the length L of the optical fiber fixing member (e.g., the length L of the optical fiber fixing member shown in fig. 1).
As an alternative embodiment, the materials of the first mounting plates 100 are all aluminum, and in other embodiments, the first mounting plates 100 are aluminum alloy or copper.
As an alternative embodiment, the materials of the second mounting plates 200 are all aluminum, and in other embodiments, the second mounting plates 200 are aluminum alloy or copper.
The embodiment of the invention also provides a semiconductor detection system, which comprises: the optical fiber fixing piece is connected with the semiconductor detection device; the optical fiber position adjusting unit may be any one of the optical fiber position adjusting units described in the foregoing embodiments.
In order to make the embodiments of the present invention more clearly understood and implemented by those skilled in the art, the working principle of the optical fiber position adjusting unit will be described in detail with reference to fig. 6.
As shown in fig. 6, an embodiment of the present invention provides a method for adjusting a position of an optical fiber, which is applied to the optical fiber position adjusting unit in any of the foregoing embodiments, and includes: fixing the first fixing plate on the first mounting plate through the second fixing hole and the fourth fixing hole; the first adjusting lever and the second adjusting lever are adjusted to drive the first adjusting plate and the first connecting lever to move so as to adjust the relative positions of the first adjusting hole and the second adjusting hole; the first adjusting plate is fixed on the first mounting plate through the first fixing hole and the third fixing hole so as to mount the optical fiber fixing piece. Comprising the following steps.
Step S1: the first fixing plate is fixed on the first mounting plate.
The first fixing plate 203 of the second mounting plate is fixed to the first mounting plate, and the first adjustment structure is adjusted such that the first adjustment hole 101 and the second adjustment hole 201 are opposite.
Step S2: and installing an optical fiber fixing piece.
After passing through the first adjustment hole 101, the optical fiber fixing member passes through the second adjustment hole 201, so that the optical fiber fixing member is installed in the first adjustment hole and the second adjustment hole.
Step S3: a spot image is formed.
A light source is provided at one end of the optical fiber fixing member, the light source passes through the optical fiber to the end of the optical fiber fixing member, irradiates the surface of the wafer, and then reflects, and the reflected light forms a facula image (namely an object image) on the optical imaging equipment.
Step S4: if not, executing step S5, if not, executing step S6.
Step S5: and adjusting the first adjusting plate to enable the light spot image to be clear.
Step S6: the first adjusting plate is fixed on the first mounting plate.
For the formed light spot image, detecting the light intensity of the image by an optical detection device to judge whether the light spot image is clear or not; if the flare image is not clear, the first adjusting lever 603 and the second adjusting lever 604 are adjusted to drive the first adjusting plate 202 to move together with the first connecting lever 204, so that the relative positions of the first adjusting hole 101 and the second adjusting hole 201 are adjusted to squeeze the optical fiber fixing member until the flare image is clear on the optical imaging device, and the first adjusting plate 202 is fixed on the first mounting 100 (i.e. the first adjusting plate is fixed on the first mounting plate) through the first fixing hole 106, the third fixing hole 205 and the threaded rod 404 (e.g. the threaded rod 404 shown in fig. 5) so as to mount the optical fiber fixing member, so that the deviation between the light outlet axis and the central axis of the adjusting optical fiber meets the design requirement.
The optical fiber position adjusting unit according to the first embodiment of the present invention further includes: a third mounting plate 300, a second adjustment structure (not shown), as shown in fig. 7. The third mounting plate 300 includes a third adjustment aperture 301. In this embodiment, the first adjusting hole 101 is used for installing the first portion 5 of the optical fiber fixing member, the second adjusting hole is used for installing the third portion 7 of the optical fiber fixing member, and the third adjusting hole 301 is used for installing the second portion 6 of the optical fiber fixing member;
the second adjusting structure is used for adjusting the relative positions of the third adjusting hole 301 and the second adjusting hole 201; the first adjusting structure is used for adjusting the relative position of the third adjusting hole 301 and the first adjusting hole 101. And the first adjusting structure and the second adjusting structure are different in adjusting direction so as to realize the adjustment of the bidirectional position of the optical fiber.
By adopting the optical fiber position adjusting unit, the optical fiber bidirectional position adjustment can be realized by combining the first mounting plate 100, the second mounting plate 200, the third mounting plate 300, the first adjusting structure, the second adjusting structure, the first adjusting hole 101, the second adjusting hole 201 and the third adjusting hole 301. The bidirectional position adjustment is a first direction adjustment and a second direction adjustment, for example, the first adjusting structure can adjust the relative position of the third adjusting hole 301 and the first adjusting hole 101 in the first direction, and the second adjusting structure can adjust the relative position of the third adjusting hole and the second adjusting hole in the second direction. In an alternative embodiment, the first direction is an X-axis (X-axis, e.g., horizontal) and the second direction is a Y-axis (Y-axis, e.g., vertical). In other embodiments, the first direction is the Y-axis and the second direction is the X-axis.
When the light-emitting axes of the optical fibers in the X-axis and the Y-axis are adjusted, the third mounting plate 300 is arranged on the first mounting plate 100, and the first adjusting structure is adjusted so that the third adjusting hole 301 is opposite to the first adjusting hole 101; the second mounting plate 200 is placed on the third mounting plate 300 and the second adjustment structure is adjusted such that the third adjustment aperture 301 is opposite the second adjustment aperture 201.
In an alternative implementation, when the first adjusting hole 101, the second adjusting hole 201 and the third adjusting hole 301 are opposite, the vertical lines where the centers of the first adjusting hole 101, the second adjusting hole 201 and the third adjusting hole 301 are located coincide; in other alternative implementations, when the first adjusting hole 101, the second adjusting hole 201, and the third adjusting hole 301 are opposite, the vertical lines where the centers of the first adjusting hole 101, the second adjusting hole 201, and the third adjusting hole 301 are located do not coincide, so long as the overlapping portion of the first adjusting hole 101, the second adjusting hole 201, and the third adjusting hole 301 can pass through the optical fiber fixing member.
The first part 5 of the optical fiber fixing member passes through the first adjusting hole 101, the second part 6 of the optical fiber fixing member passes through the third adjusting hole 301 and the third part 7 into the second adjusting hole 201.
Providing a light source to the other end 4 of the optical fiber fixing member (for example, the other end 4 of the optical fiber fixing member shown in fig. 1), irradiating light emitted by the light source to the surface of an object to be detected after reaching the end of the optical fiber fixing member through the optical fiber 1, forming an object image on the optical imaging device after receiving reflected light of the surface of the object to be detected by the optical sensor, and distinguishing the deviation degree of the optical axis of the optical fiber and the central axis through the definition of the object image; in the alternative implementation, after light emitted by the light source reaches the end of the optical fiber fixing piece through the optical fiber 1, the light irradiates the surface of the wafer to be detected, and the deviation degree of the light emitting axis of the optical fiber and the central axis is distinguished through the definition of the light spots of the reflected light of the light source; the definition of the object image can be judged by naked eyes, and the light intensity of the object image can be detected by optical detection equipment;
If the object image is blurred, in the X-axis direction, adjusting the first adjusting structure to enable the first adjusting hole 101 and the third adjusting hole 301 to simultaneously extrude the optical fiber fixing piece, and in the Y-axis direction, adjusting the second adjusting structure to enable the third adjusting hole 301 and the second adjusting hole 201 to simultaneously extrude the optical fiber fixing piece until a clear object image is formed on the optical imaging equipment, wherein the deviation degree of the optical fiber emergent axis and the central axis meets the design requirement;
after the deviation degree of the optical fiber light-emitting axis and the central axis meets the design requirement, in an alternative implementation, the adjusted second mounting plate 200 can be fixed on the third mounting plate 300 through quick setting glue, and the adjusted third mounting plate 300 is fixed on the first mounting plate 100 at the same time, so that the adjusted optical fiber fixing piece is mounted and fixed on the mounting plate; in other alternative implementations, the adjusted second mounting plate 200 may be secured to the third mounting plate 300 by a welding process, while the adjusted third mounting plate 300 is secured to the first mounting plate 00, to achieve the mounting and securing of the adjusted fiber optic fixture to the mounting plate.
In sum, through the adjustment of the bidirectional position of the optical fiber, after the deviation degree of the optical fiber light-emitting axis and the central axis meets the design requirement, the optical fiber imaging effect is further improved, and better detection quality is realized.
As an alternative embodiment, referring to fig. 7, the third mounting plate 300 further includes a second adjustment plate 302; the third adjusting hole 301 is arranged on the second adjusting plate 302; the second adjusting structure drives the first adjusting plate 202 to move in the second direction, so as to adjust the relative position of the third adjusting hole 301 and the second adjusting hole 201. The first adjusting structure drives the second adjusting plate 302 to move in the first direction, so as to adjust the relative positions of the first adjusting hole 101 and the third adjusting hole 301.
As an alternative embodiment, referring to fig. 7, the third mounting plate 300 further includes at least two protrusions; the at least two protrusions include a third protrusion 303 and a fourth protrusion 304; the second adjustment plate 302 includes at least one second adjustment protrusion 305, and in other embodiments, the second adjustment plate 302 may not include the second adjustment protrusion 305. A third mounting through hole 306 is formed in the third protrusion 303, and a fourth mounting through hole 307 is formed in the fourth protrusion;
as shown in fig. 8, the second adjustment structure includes a third adjustment bar 501 and a fourth adjustment bar 502; screw structures are arranged in the third mounting through hole 306 and the fourth mounting through hole 307; the third adjusting lever 501 and the fourth adjusting lever 502 are provided with screw structures to match the third mounting through hole 306 and the fourth mounting through hole 307 which are provided with screw structures.
The third adjusting lever 501 and the fourth adjusting lever 502 are respectively provided with a thread structure, and the third installation through hole 306 and the fourth installation through hole 307 are respectively provided with a thread structure, so that after the first adjusting plate 202 is adjusted, the thread structures can play a role in fixing the first adjusting plate 202.
In an optional implementation of the first adjusting structure for adjusting the second adjusting plate 302, after the first adjusting lever 603 passes through the threaded structure of the first mounting through hole 104, the second adjusting plate 302 is driven to move to one side in the first direction, and after the second adjusting lever 604 passes through the threaded structure of the second mounting through hole 105, the second adjusting plate 302 is driven to move to the other side in the first direction. After passing through the threaded structure of the third mounting through hole 306, the third adjusting lever 501 drives the first adjusting plate 202 to move to the second direction side; after the fourth adjusting rod 502 passes through the threaded structure of the fourth mounting through hole 307, the first adjusting plate 202 is driven to move to the other side in the second direction;
according to the foregoing optical fiber bi-directional position adjustment process, after the optical fiber bi-directional position adjustment is completed, the first mounting plate 100 and the third mounting plate 300 may be fixed, and the second mounting plate 200 and the third mounting plate 300 may be fixed. After the first mounting plate 100 and the third mounting plate 300 are fixed, as shown in fig. 8, the first protrusion 102 and the second protrusion 103 are disposed at two sides of the second adjusting protrusion 305, and after the second mounting plate 200 and the third mounting plate 300 are fixed, as shown in fig. 8, the third protrusion 303 and the fourth protrusion 304 are disposed at two sides of the first adjusting protrusion 207.
In an alternative implementation, as shown in fig. 8, a gap width A3 between the first protrusion 102 and the second adjustment protrusion 305 is greater than or equal to 0mm, and a gap width A4 between the second protrusion 103 and the second adjustment protrusion 305 is greater than or equal to 0mm; the gap width A3 of the first protrusion 102 and the second adjustment protrusion 305 and the gap width A4 of the second protrusion 103 and the second adjustment protrusion 305 are equal, and in other embodiments, the gap width A3 of the first protrusion 102 and the second adjustment protrusion 305 and the gap width A4 of the second protrusion 103 and the second adjustment protrusion 305 may not be equal.
In an alternative implementation, the gap width A5 between the third protrusion 303 and the first adjustment protrusion 207 is greater than or equal to 0mm, and the gap width A6 between the fourth protrusion 304 and the first adjustment protrusion 207 is greater than or equal to 0mm; the gap width A5 of the third protrusion 303 and the first adjustment protrusion 207 and the gap width A6 of the fourth protrusion 304 and the first adjustment protrusion 207 are equal, and in other embodiments, the gap width A5 of the third protrusion 303 and the first adjustment protrusion 207 and the gap width A6 of the fourth protrusion 304 and the first adjustment protrusion 207 may not be equal.
In an alternative implementation, the gap width between the third adjusting lever 501 and the first adjusting protrusion 207 is greater than or equal to 0mm; the gap width between the fourth adjusting bar 502 and the first adjusting protrusion 207 is more than or equal to 0mm; the gap width between the third adjusting lever 501 and the first adjusting protrusion 207 is equal to the gap width between the fourth adjusting lever 502 and the first adjusting protrusion 207; in other embodiments, the third adjustment bar 501 and the first adjustment tab 207 are not equal in gap width to the fourth adjustment bar 502 and the first adjustment tab 207.
In an alternative implementation, the third protrusion 303 and the fourth protrusion 304 are integrally formed with the third mounting plate 300, and in other embodiments, the third protrusion 303, the fourth protrusion 304, and the third mounting plate 300 are each independently formed; in an alternative implementation, the second adjustment protrusion 305 is integrally formed with the third mounting plate 300, and in other embodiments, the second adjustment protrusion 305 is separately formed from the third mounting plate 300.
As an alternative embodiment, referring to fig. 7, the third mounting plate 300 further includes: a second fixing plate 308, at least one second connecting bar 309; the second connecting bar 309 connects the second adjusting plate 302 and the second fixing plate 308, and the second fixing plate 308 is used for fixing with the first mounting plate 100. In an alternative implementation, the second connecting bar 309 is integrally formed with the second fixing plate 308 and the second adjusting plate 302. In other embodiments, the second connecting bar 309, the second fixing plate 308 and the second adjusting plate 302 are formed separately, and the second connecting bar 309, the second fixing plate 308 and the second adjusting plate 302 are connected by screws. Or, the second connecting bar 309 is integrally formed with the second adjusting plate 302, and the second connecting bar 309 and the second adjusting plate 302 are connected to the second fixing plate 308 by screws. Or, the second connecting bar 309 is integrally formed with the second fixing plate 308, and the second connecting bar 309 and the second fixing plate 308 are connected with the second adjusting plate 302 by screws.
In an alternative implementation, the second connecting rod 309 is aluminum, and in other embodiments, the second connecting rod 309 is an aluminum alloy or copper; the second connecting rod 309 has the following material characteristics: when an external force is applied to the second connecting bar 309, the second connecting bar 309 is easily deformed but not easily broken, so that the position of the second adjusting plate 302 can be flexibly adjusted to adjust the relative positions of the first adjusting hole 101 and the third adjusting hole 301.
As an alternative embodiment, as shown in fig. 7, the second adjusting plate 302 further includes at least one fifth fixing hole 310, the second fixing plate 308 includes at least one sixth fixing hole 311, and the third mounting plate 300 further includes at least one seventh fixing hole 313 and at least one eighth fixing hole 312.
The first fixing hole 106 is opposite to the fifth fixing hole 310 to fix the adjusted second adjustment plate 302 to the first mounting plate 100; the second fixing hole 107 is opposite to the sixth fixing hole 311 to fix the second fixing plate 308 to the first mounting plate 100. The third fixing hole 205 is opposite to the seventh fixing hole 313 to fix the adjusted first adjustment plate 202 to the third mounting plate 300; the fourth fixing hole 206 is opposite to the eighth fixing hole 312 to fix the first fixing plate 203 to the third mounting plate 300.
The fifth fixing hole 310 is circular, and in other embodiments, the fifth fixing hole 310 is square, triangular, or any other shape. The sixth fixing hole 311 is circular, and in other embodiments, the sixth fixing hole 311 is square, triangular, or any other shape. The seventh fixing hole 313 is circular, and in other embodiments, the seventh fixing hole 313 is square, triangular, or any other shape. The eighth fixing hole 312 is circular, and in other embodiments, the eighth fixing hole 312 is square, triangular, or any other shape.
Screw structures are arranged in the seventh fixing hole 313 and the eighth fixing hole 312, and screw structures are not arranged in the fifth fixing hole 310 and the sixth fixing hole 311; as shown in fig. 8, the fifth fixing hole 310 is connected to the first fixing hole 106 through a threaded rod 503 (all 503 in fig. 8 are threaded rods), so as to fix the adjusted second adjusting plate 302 on the first mounting plate 100; the sixth fixing hole 311 is connected to the second fixing hole 107 through a threaded rod 503, and fixes the second fixing plate 308 to the first mounting plate 100.
The third fixing hole 205 is connected with the seventh fixing hole 313 through a threaded rod 503, and the adjusted first adjusting plate 202 is fixed on the third mounting plate 300; the fourth fixing hole 206 is connected to the eighth fixing hole 312 through a threaded rod 503, and fixes the first fixing plate 203 to the third mounting plate 300.
As an alternative embodiment, the third mounting plate 300 is in the shape of a rectangular block, and in other embodiments, the third mounting plate 300 is in the shape of a square block or a round block or any other shape.
As an alternative embodiment, the thickness of the third mounting plate 300 is equal to that of the second mounting plate 200, and in other embodiments, the thickness of the third mounting plate 300 is not equal to that of the second mounting plate 200. The third mounting plate 300 is of equal thickness to the first mounting plate 100, and in other embodiments, the third mounting plate 300 is of unequal thickness to the first mounting plate 100.
As an alternative embodiment, the third adjusting hole 301 is circular, and in other embodiments, the third adjusting hole 301 is square, triangular, or any other shape.
As an alternative embodiment, the third adjusting hole 301 and the second adjusting hole 201 have equal pore sizes, and in other embodiments, the third adjusting hole 301 and the second adjusting hole 201 have unequal pore sizes. The third adjusting hole 301 is equal to the first adjusting hole 101 in size, and in other embodiments, the third adjusting hole 301 is not equal to the first adjusting hole 101 in size.
As an alternative embodiment, the sum of the heights of the first adjusting hole 101, the second adjusting hole 201, and the third adjusting hole 301 is greater than or equal to the length L of the optical fiber fixing member (e.g., the length L of the optical fiber fixing member shown in fig. 1).
As an alternative embodiment, the material of the third mounting plate 300 is aluminum, and in other embodiments, the third mounting plate 300 is an aluminum alloy or copper.
In order to make the person skilled in the art more clearly understand and implement the second embodiment of the present invention, the working principle of the optical fiber bidirectional position adjusting unit is described in detail below with reference to fig. 9.
As shown in fig. 9, an embodiment of the present invention provides a method for adjusting a bidirectional position of an optical fiber, which is applied to the bidirectional position adjusting unit of any one of the foregoing embodiments, and includes the following steps.
Step S11: fixing the fixing plate on the mounting plate
The second fixing plate 308 of the third mounting plate is fixed to the first mounting plate, and the first fixing plate 203 of the second mounting plate is fixed to the third mounting plate and adjusted such that the first adjustment hole 101, the second adjustment hole 201, and the third adjustment hole 301 are opposed.
Step S21: and installing an optical fiber fixing piece.
The optical fiber fixing member passes through the first adjusting hole 101, then passes through the third adjusting hole 301, and finally passes through the second adjusting hole 201, so that the optical fiber fixing member is installed in the first adjusting hole, the third adjusting hole and the second adjusting hole.
Step S31: a spot image is formed.
And providing a light source for one end of the optical fiber fixing piece, enabling the light source to pass through the optical fiber to the end of the optical fiber fixing piece, irradiating the light source to the surface of the wafer, and then reflecting the light reflected by the light source to form a facula image on the optical imaging equipment.
Step S41: if not, step S51 is executed, and if not, step S61 is executed.
Step S51: and the adjusting plate is adjusted to enable the facula image to be clear.
And the first adjusting plate is adjusted in the first direction, and the second adjusting plate is adjusted in the second direction, so that the light spot images are clear.
Step S61: the adjusting plate is fixed on the mounting plate.
For the formed light spot image, detecting the light intensity of the image by an optical detection device to judge whether the light spot image is clear or not; if the flare image is not clear, the first adjusting lever 603 and the second adjusting lever 604 are adjusted to drive the first adjusting plate 202 to move together with the first connecting lever 204, the third adjusting lever 501 and the fourth adjusting lever 502 are adjusted to drive the second adjusting plate 302 to move together with the second connecting lever 309, so as to adjust the relative positions of the first adjusting hole 101, the second adjusting hole 201 and the third adjusting hole 301 to squeeze the optical fiber fixing member, until the flare image is clear on the optical imaging device, the second adjusting plate 302 is fixed on the first mounting plate 100 through the fifth fixing hole 310, the first fixing hole 106 and the threaded rod 503, and the first adjusting plate 202 is fixed on the third mounting plate 300 through the third fixing hole 205, the seventh fixing hole 313 and the threaded rod 503, so that the deviation of the light outgoing axis of the adjusting optical fiber from the central axis meets the design requirement.
In summary, the present invention provides an optical fiber position adjustment unit, a semiconductor inspection system, and an optical fiber position adjustment method, the optical fiber position adjustment unit including: a first mounting plate including a first adjustment aperture; the first adjusting hole is used for installing a first part of the optical fiber fixing piece; a second mounting plate including a second adjustment aperture for mounting a second portion of the fiber optic fixture; the first adjusting structure is used for adjusting the relative positions of the second adjusting hole and the first adjusting hole. By adopting the technical scheme, the adjustment of the optical fiber position can be realized, so that the deviation between the optical fiber light-emitting axis and the central axis meets the design requirement, the imaging effect is improved, and the detection quality is improved.
Although the present invention has been described in terms of the preferred embodiments, it is not intended to be limited to the embodiments, and any person skilled in the art can make any possible variations and modifications to the technical solution of the present invention by using the methods and technical matters disclosed above without departing from the spirit and scope of the present invention, so any simple modifications, equivalent variations and modifications to the embodiments described above according to the technical matters of the present invention are within the scope of the technical matters of the present invention.
Claims (12)
1. An optical fiber position adjustment unit, comprising:
a first mounting plate including a first adjustment aperture; the first adjusting hole is used for installing a first part of the optical fiber fixing piece;
a second mounting plate including a second adjustment aperture for mounting a second portion of the fiber optic fixture;
the first adjusting structure is used for adjusting the relative positions of the second adjusting hole and the first adjusting hole.
2. The fiber position adjustment unit of claim 1, wherein the second mounting plate further comprises a first adjustment plate; the second adjusting hole is formed in the first adjusting plate; the first adjusting structure drives the first adjusting plate to move so as to adjust the relative position of the second adjusting hole and the first adjusting hole.
3. The fiber position adjustment unit of claim 2, wherein the first mounting plate further comprises at least two protrusions; the at least two protrusions include a first protrusion and a second protrusion; the first bulge and the second bulge are arranged on two sides of the first adjusting plate;
a first mounting through hole is formed in the first bulge, and a second mounting through hole is formed in the second bulge;
The first adjusting structure comprises a first adjusting lever and a second adjusting lever; the first adjusting bar passes through the first mounting through hole to drive the first adjusting plate to move to one side; the second adjusting bar passes through the second mounting through hole to drive the first adjusting plate to move to the other side;
screw thread structures are arranged in the first mounting through hole and the second mounting through hole; and the first adjusting lever and the second adjusting lever are respectively provided with a thread structure.
4. The fiber position adjustment unit of claim 2, wherein the second mounting plate further comprises: a first fixing plate and a first connecting bar; the first connecting bar is connected with the first adjusting plate and the first fixing plate, and the first fixing plate is used for being fixed with the first mounting plate.
5. The fiber position adjustment unit of claim 4, wherein the first mounting plate further comprises a first securing hole and a second securing hole; the first adjusting plate comprises a third fixing hole; the third fixing hole is opposite to the first fixing hole so as to fix the adjusted first adjusting plate on the first mounting plate; the first fixing plate comprises a fourth fixing hole; the fourth fixing hole is opposite to the second fixing hole so as to fix the first fixing plate on the first mounting plate.
6. The fiber position adjustment unit according to claim 1, further comprising: a third mounting plate, a second adjustment structure;
the third mounting plate comprises a third adjusting hole, and the third adjusting hole is used for mounting an optical fiber fixing piece;
the second adjusting structure is used for adjusting the relative positions of the third adjusting hole and the second adjusting hole.
7. The fiber position adjustment unit of claim 6, wherein the third mounting plate further comprises a second adjustment plate; the third adjusting hole is formed in the second adjusting plate; the second adjusting structure drives the first adjusting plate to move so as to adjust the relative position of the third adjusting hole and the second adjusting hole; the second adjusting plate includes a fifth fixing hole.
8. The fiber position adjustment unit of claim 7, wherein the third mounting plate further comprises at least two protrusions; the at least two protrusions include a third protrusion and a fourth protrusion; the third bulge and the fourth bulge are arranged on two sides of the second adjusting plate;
a third mounting through hole is formed in the third bulge, and a fourth mounting through hole is formed in the fourth bulge;
the second adjusting structure comprises a third adjusting lever and a fourth adjusting lever; the third adjusting bar passes through the third mounting through hole to drive the first adjusting plate to move to one side; the second adjusting bar passes through the fourth mounting through hole to drive the first adjusting plate to move to the other side;
Screw thread structures are arranged in the third mounting through hole and the fourth mounting through hole; and the third adjusting lever and the fourth adjusting lever are respectively provided with a thread structure.
9. The fiber position adjustment unit of claim 7, wherein the third mounting plate further comprises: the second fixing plate and the second connecting bar; the second connecting bar is connected with a second adjusting plate and a second fixing plate, and the second fixing plate is used for being fixed with the first mounting plate; the second fixing plate includes a sixth fixing hole.
10. The fiber position adjustment unit according to claim 9, wherein the third mounting plate further includes a seventh fixing hole and an eighth fixing hole; the seventh fixing hole is opposite to the third fixing hole so as to fix the adjusted first adjusting plate on the third mounting plate; the eighth fixing hole is opposite to the fourth fixing hole so as to fix the adjusted first fixing plate on the third mounting plate; the fifth fixing hole is opposite to the first fixing hole so as to fix the adjusted second adjusting plate on the first mounting plate; the sixth fixing hole is opposite to the second fixing hole to fix the second fixing plate on the first mounting plate.
11. A semiconductor inspection system, comprising: the optical fiber fixing piece is connected with the semiconductor detection device; the optical fiber position adjustment unit is an optical fiber position adjustment unit according to any one of claims 1 to 10.
12. An optical fiber position adjusting method, characterized by being applied to the optical fiber position adjusting unit according to any one of claims 1 to 10, comprising: fixing the first fixing plate on the first mounting plate through the second fixing hole and the fourth fixing hole; the first adjusting lever and the second adjusting lever are adjusted to drive the first adjusting plate and the first connecting lever to move so as to adjust the relative positions of the first adjusting hole and the second adjusting hole; the first adjusting plate is fixed on the first mounting plate through the first fixing hole and the third fixing hole so as to mount the optical fiber fixing piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311631157.XA CN117666055A (en) | 2023-11-30 | 2023-11-30 | Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311631157.XA CN117666055A (en) | 2023-11-30 | 2023-11-30 | Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117666055A true CN117666055A (en) | 2024-03-08 |
Family
ID=90074589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311631157.XA Pending CN117666055A (en) | 2023-11-30 | 2023-11-30 | Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117666055A (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08278430A (en) * | 1995-04-07 | 1996-10-22 | Hitachi Cable Ltd | Optical element module and its assembly method |
| US20090263085A1 (en) * | 2006-10-20 | 2009-10-22 | Bornmann Volker | Device for injecting light into an optical wave guide |
| CN207019636U (en) * | 2017-05-30 | 2018-02-16 | 上海永鼎光电子技术有限公司 | Fiber end face angle measurement unit |
| CN209919711U (en) * | 2019-04-16 | 2020-01-10 | 深圳市亚派光电器件有限公司 | Fixing device and optical device detection equipment |
| CN113031176A (en) * | 2019-12-24 | 2021-06-25 | 长春长光华大智造测序设备有限公司 | Optical fiber adjusting mechanism |
| CN214409383U (en) * | 2020-11-19 | 2021-10-15 | 中国科学院西安光学精密机械研究所 | Device for coupling and debugging laser optical fiber |
| CN113534379A (en) * | 2021-07-05 | 2021-10-22 | 深圳中科飞测科技股份有限公司 | Optical fiber adjusting component |
| CN216434549U (en) * | 2021-10-26 | 2022-05-03 | 茂莱（南京）仪器有限公司 | Three-dimensional adjusting device of laser fiber connector |
| CN217878272U (en) * | 2022-06-08 | 2022-11-22 | 江苏先品光子科技有限公司 | Fine adjustment structure for optical fiber detection |
| CN218585060U (en) * | 2022-10-10 | 2023-03-07 | 深圳中科飞测科技股份有限公司 | Optical fiber adjusting device |
-
2023
- 2023-11-30 CN CN202311631157.XA patent/CN117666055A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08278430A (en) * | 1995-04-07 | 1996-10-22 | Hitachi Cable Ltd | Optical element module and its assembly method |
| US20090263085A1 (en) * | 2006-10-20 | 2009-10-22 | Bornmann Volker | Device for injecting light into an optical wave guide |
| CN207019636U (en) * | 2017-05-30 | 2018-02-16 | 上海永鼎光电子技术有限公司 | Fiber end face angle measurement unit |
| CN209919711U (en) * | 2019-04-16 | 2020-01-10 | 深圳市亚派光电器件有限公司 | Fixing device and optical device detection equipment |
| CN113031176A (en) * | 2019-12-24 | 2021-06-25 | 长春长光华大智造测序设备有限公司 | Optical fiber adjusting mechanism |
| CN214409383U (en) * | 2020-11-19 | 2021-10-15 | 中国科学院西安光学精密机械研究所 | Device for coupling and debugging laser optical fiber |
| CN113534379A (en) * | 2021-07-05 | 2021-10-22 | 深圳中科飞测科技股份有限公司 | Optical fiber adjusting component |
| CN216434549U (en) * | 2021-10-26 | 2022-05-03 | 茂莱（南京）仪器有限公司 | Three-dimensional adjusting device of laser fiber connector |
| CN217878272U (en) * | 2022-06-08 | 2022-11-22 | 江苏先品光子科技有限公司 | Fine adjustment structure for optical fiber detection |
| CN218585060U (en) * | 2022-10-10 | 2023-03-07 | 深圳中科飞测科技股份有限公司 | Optical fiber adjusting device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111257321B (en) | Cable detection device | |
| KR101409322B1 (en) | Aligning and assembling apparatus for camera module and the method using the same | |
| US6688783B2 (en) | Method of fabricating an optical module including a lens attached to a platform of the optical module | |
| KR20110027979A (en) | Mask defect testing apparatus | |
| JP6251422B2 (en) | Follow-up fixed focus system | |
| US20180217346A1 (en) | System and method for mounting and aligning optical components with respect to junction optical component | |
| KR101937747B1 (en) | Flexible display device test jig and test device using the same | |
| CN105698694A (en) | Flange screw hole detection apparatus | |
| CN117666055A (en) | Optical fiber position adjusting unit, semiconductor detecting system and optical fiber position adjusting method | |
| KR101658700B1 (en) | Optics Apparatus for Inspecting Surface of Panel and Method for Inspecting Surface | |
| CN209215736U (en) | A kind of lenticule heeling-in collimator | |
| CN202533374U (en) | Surface defect detection system for aluminum foil | |
| KR101942467B1 (en) | Test apparatus for actuator module for dual camera | |
| KR100812408B1 (en) | Apparatus for Processing Display Panel | |
| CN206057666U (en) | For the mirror mounting frame of scialyscope | |
| JP2008091843A (en) | Crimped-state inspection apparatus of substrate | |
| CN209515082U (en) | A kind of small spacing LED module mounting device of high-precision | |
| KR100562961B1 (en) | Apparatus for aligning neutron guides precisely | |
| KR101765831B1 (en) | interferometer apparatus for auto-measuring optical fiber connector | |
| KR20150046009A (en) | Flying sensor head | |
| CN215493237U (en) | Dodging rod detection fixing device and dodging rod detection system | |
| CN211784202U (en) | Telescope lens verifying attachment | |
| CN211576113U (en) | Prism parallel plane detection device | |
| CN108444388A (en) | A kind of visual apertures of large scale make-up machine CCD | |
| CN204359674U (en) | The camera adjustments device of optical detection apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |