CN117655511A - Multi-angle focusing control method - Google Patents
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- CN117655511A CN117655511A CN202311858718.XA CN202311858718A CN117655511A CN 117655511 A CN117655511 A CN 117655511A CN 202311858718 A CN202311858718 A CN 202311858718A CN 117655511 A CN117655511 A CN 117655511A
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- 239000002893 slag Substances 0.000 description 1
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- 230000003746 surface roughness Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
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Abstract
The invention belongs to the technical field of optical technology and laser processing, and relates to a multi-angle focusing control method, which comprises the following steps of 1) obtaining a three-dimensional model of a part to be processed and converting the three-dimensional model into machine tool coordinates; 2) Transferring the part to be processed to the bottom of the focusing mirror through the machine tool according to the machine tool coordinates; 3) Judging whether the angle adjustment of the outgoing laser of the laser is required, if so, executing the step 4); if not, directly focusing the emergent laser of the laser to the part to be processed; 4) According to the position to be processed of the part to be processed, the posture of the outgoing laser of the laser is adjusted, so that the adjusted outgoing laser can be focused on the position to be processed of the part to be processed, and then the outgoing laser with the angle adjusted is focused on the part to be processed. The invention provides a multi-angle focusing control method capable of changing the angle of a light beam and adapting to different requirements and application scenes.
Description
Technical Field
The invention belongs to the technical field of optical technology and laser processing, relates to a focusing control method, and particularly relates to a multi-angle focusing control method.
Background
The micropore is used as a common structure in precision manufacturing, and is widely applied to the fields of aviation, biology, chemical industry, new energy sources and the like. The femtosecond laser has the advantages of high processing efficiency, wide material adaptability, no pollution, good quality and the like when processing materials due to the characteristics of ultra-short pulse time, ultra-high peak power and the like, and is increasingly widely used. Meanwhile, the femtosecond laser micropore processing becomes the optimal micropore processing method due to the characteristics of non-contact and no liquid acid-base assistance in processing.
Irregular shapes, such as curved surfaces or planes, appear with complex diversification of designs and processed parts; the processed parts are converted into a plurality of interference areas by a single open cavity; the processed micropores are distributed into through holes, small spaces and complex angle wall-attached holes formed by combining a plurality of blades together; the processed micropore has dustpan holes, dovetail holes, horn holes and other special-shaped holes, special-shaped Kong Jiazhi round hole combining holes and the like. Because laser processing is special processing such as punching, cutting, welding and the like by utilizing high-power-density laser beams to irradiate a workpiece after focusing through a lens so as to melt and gasify materials, the focused focus and the hole forming angle of a processed part are particularly important when the laser processing is adopted, and particularly, the laser processing is in the aspects of interference area processing and the integrity of a processed part. If the interference area and the non-interference area of the part cannot be machined at one time, secondary positioning machining can cause angle deviation, position deviation and the like of the hole of the part, and meanwhile, focus position deviation can cause quality problems such as poor consistency of the machined and molded hole diameter, out-of-tolerance of the size of the hole, poor surface roughness of the hole and the like.
The current femto-second laser processing device has a coaxial direct focusing mirror module parallel to the Z axis as shown in fig. 1, and the beam direct focusing mirror acts on the surface of the material to punch holes. Meanwhile, along with the development trend of the integrity, compactness and the like of part casting, the part is limited by serious interference (such as hole making angle or focal position) when the femto-second laser current focusing mirror module is processed. Because the laser beam can only be focused on the surface of the workpiece vertically to remove materials under the device shown in fig. 1, the structure of the focusing module cannot deflect the laser beam and the focal length is changed, so that the limitation is greatly caused, in addition, the hole shape to be processed is more, the angle change of the processed hole is frequent, the problem that the hole making direction is required to be continuously adjusted to solve the problem that the processing cannot be performed during the processing of parts is solved, different clamps and focusing mirrors of different types are required to be designed for different angles of the same row to change the focal position is solved, and the like; meanwhile, the slag discharging capability is weakened due to different focus deviations of part casting, and the efficiency of the whole processing is reduced along with the increase of the number of holes.
Disclosure of Invention
In order to solve the technical problems in the background art, the invention provides a multi-angle focusing control method capable of changing the angle of a light beam and adapting to different requirements and application scenes.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a multi-angle focusing control method is characterized in that: the multi-angle focus control method includes the steps of:
1) Acquiring a three-dimensional model of a part to be processed and converting the three-dimensional model into machine tool coordinates;
2) Transferring the part to be processed to the bottom of the focusing mirror through the machine tool according to the machine tool coordinates;
3) Judging whether the angle adjustment of the outgoing laser of the laser is required, if so, executing the step 4); if not, directly focusing the emergent laser of the laser to the part to be processed;
4) According to the position to be processed of the part to be processed, the posture of the outgoing laser of the laser is adjusted, so that the adjusted outgoing laser can be focused on the position to be processed of the part to be processed, and then the outgoing laser with the angle adjusted is focused on the part to be processed.
The specific implementation manner of the step 4) is as follows:
4.1 Obtaining a part to be processed of a part to be processed;
4.2 Adjusting the reflecting element according to the part to be processed of the part to be processed;
4.3 Detecting the adjustment angle of the reflecting element by using detection light, so as to promote the detection light to be incident to the part to be processed of the part to be processed; the detection light is coaxial with the emergent laser of the laser;
4.4 Adjusting the detection light and focusing the detection light on a part to be processed of the part to be processed;
4.5 Starting the emergent laser of the laser to enable the emergent laser to be focused on a part to be processed of the part to be processed after passing through the reflecting element;
4.6 Focusing the part to be processed by emitting laser.
The specific implementation manner of the step 4.3) is as follows: the detection system emits detection light which is reflected by the reflection element and then enters the part to be processed of the part to be processed, the part to be processed of the part to be processed is reflected to form detection reflected light, and the detection reflected light is reflected by the reflection element and then enters the detection system until the detection system can detect the detection reflected light.
The specific implementation manner of the step 4.4) is as follows:
4.4.1 Dividing the collimated detection light into two parts to form reference light and sampling light;
4.4.2 The reference light passes through a polarization controller to adjust the phase of the reference light, and the reference light is deflected through a 45-degree reflecting mirror; then, dispersion compensation is carried out to eliminate the dispersion brought by the reflector; the reference light is converged on the reflecting mirror after passing through the positive lens; at the same time, the reflector reflects the reference light back to the coupler in the spectrum system according to the original light path;
4.4.3 After passing through the coupler, the sampling light passes through the reflecting element, so that the sampling light is converged at the part to be processed of the part to be processed; the part to be processed of the part to be processed reflects the sampling light and then transmits the sampling light to a coupler in a spectrum system in an original way; coupling the reference light reflected to the coupler and the sunlight removed reflected to the coupler on the coupler in the spectrum system, and forming interference fringes with alternate brightness through the grating;
4.4.4 The fine adjustment reflecting element is dynamically adjusted, so that the central bright stripe of the interference stripe coincides with the highest point of the wave crest, namely, the focal position of the lens focusing is positioned on the part to be processed of the part to be processed at any time, and the detection light is focused on the part to be processed of the part to be processed.
The ratio of the light intensity of the reference light to the light intensity of the sampling light is 50:50.
in the step 4), the gesture includes a focal position and an angle.
The reflecting element is a mirror, a reflecting prism and/or a reflector.
The invention has the advantages that:
the invention provides a multi-angle focusing control method, which comprises the following steps: 1) Acquiring a three-dimensional model of a part to be processed and converting the three-dimensional model into machine tool coordinates; 2) Transferring the part to be processed to the bottom of the focusing mirror through the machine tool according to the machine tool coordinates; 3) Judging whether the angle adjustment of the outgoing laser of the laser is required, if so, executing the step 4); if not, directly focusing the emergent laser of the laser to the part to be processed; 4) According to the position to be processed of the part to be processed, the posture of the outgoing laser of the laser is adjusted, so that the adjusted outgoing laser can be focused on the position to be processed of the part to be processed, and then the outgoing laser with the angle adjusted is focused on the part to be processed. According to the invention, the system can realize multi-angle focusing of the light beam by dynamically adjusting the angle of the reflecting mirror. Compared with the existing focusing lens module, the lens in the module provided by the invention can rotate in different dimensions in the circumferential direction and the radial direction, and meanwhile, the system can generate different focuses at different positions, so that different optical requirements are met. In addition, when the reflector automatically adjusts the processing angle, the invention can dynamically adjust the position of the micro-feeding, namely dynamically process the reflector to realize the optimal focusing effect. In the actual three-dimensional curved surface space, holes at different curved surface positions are processed. Different angles and focal positions of the beam focus are required for processing. The system can be used for preparing hole angles and hole position coordinates according to the actual three-dimensional model. The angle of the reflecting mirror is automatically adjusted to achieve the hole making angle, and meanwhile, the distance measurement is carried out on the target distance to change the focal length of the light beam, so that the focal point focused by the light beam is overlapped with the surface of the part, and the hole to be processed is positioned at the focal point for processing. The high consistency of each quality state of the machined holes can be ensured. The system has great flexibility and adjustability by dynamically adjusting the angle of the reflecting mirror. This free adjustment automatically changes the beam angle and direction focusing module as compared to existing focusing mirror modules. The optical system can be adjusted in real time according to specific requirements and application scenes, so that the optical system is suitable for requirements of different optical tasks. No more complex optical structure and modules are required, and the angle adjustment aspect is more accurate. Compared with the existing focusing mirror beam and processing method, the invention dynamically adjusts the processing mode of the reflecting mirror angle, and provides an independent processing method and thought. The method has great advantages in the aspects of solving the interference of narrow space angles and the interference processing of the shielding area, such as free angle adjustment of the light beam to avoid zero-order interference, reverse processing in the shielding area and the like. In summary, the invention is a method for dynamically adjusting the angle of the reflector to achieve multi-angle arbitrary focusing, which can expand focusing capability and provide better imaging effect and greater flexibility. Such systems have important applications in many optical fields, such as imaging, beam conditioning, and laser processing.
Drawings
FIG. 1 is a schematic diagram of a prior art coaxial direct focus mirror module with parallel Z-axis;
FIG. 2 is a schematic diagram of the overall structure of the arbitrary focusing method at multiple angles provided by the present invention;
FIG. 3 is a schematic view of an arbitrary focusing device at different angles according to the present invention;
FIG. 4 is an interference waveform diagram;
fig. 5 is a graph showing a one-to-one correspondence between fringes and waveforms.
Detailed Description
The invention provides a multi-angle focusing control method, which comprises the following steps:
1) Acquiring a three-dimensional model of a part to be processed and converting the three-dimensional model into machine tool coordinates;
2) Transferring the part to be processed to the bottom of the focusing mirror through the machine tool according to the machine tool coordinates;
3) Judging whether the angle adjustment of the outgoing laser of the laser is required, if so, executing the step 4); if not, directly focusing the emergent laser of the laser to the part to be processed;
4) According to the position to be processed of the part to be processed, the posture of the outgoing laser of the laser is adjusted, so that the adjusted outgoing laser can be focused on the position to be processed of the part to be processed, and then the outgoing laser with the angle adjusted is focused on the part to be processed, wherein the posture comprises a focal length position and an angle. The method specifically comprises the following steps:
4.1 Obtaining a part to be processed of a part to be processed;
4.2 Adjusting the reflecting element according to the part to be processed of the part to be processed; the present invention includes one or more specially designed reflective elements for reflecting, focusing and adjusting the light beam. These reflective elements may have special mirror, reflective prism, reflector, etc. structures to achieve precise control of the light beam.
4.3 Detecting the adjustment angle of the reflecting element by using detection light, so as to promote the detection light to be incident to the part to be processed of the part to be processed; the detection light is coaxial with the emergent laser of the laser, and specifically comprises the following steps: the detection system emits detection light which is reflected by the reflection element and then enters the part to be processed of the part to be processed, the part to be processed of the part to be processed is reflected to form detection reflected light, and the detection reflected light is reflected by the reflection element and then enters the detection system until the detection system can detect the detection reflected light.
4.4 Adjusting the detection light and focusing the detection light on a part to be processed of the part to be processed, specifically:
4.4.1 Dividing the collimated detection light into two parts to form reference light and sampling light; the ratio of the light intensity of the reference light to the light intensity of the sampled light is 50:50.
4.4.2 The reference light passes through a polarization controller to adjust the phase of the reference light, and the reference light is deflected through a 45-degree reflecting mirror; then, dispersion compensation is carried out to eliminate the dispersion brought by the reflector; the reference light is converged on the reflecting mirror after passing through the positive lens; at the same time, the reflector reflects the reference light back to the coupler in the spectrum system according to the original light path;
4.4.3 After passing through the coupler, the sampling light passes through the reflecting element, so that the sampling light is converged at the part to be processed of the part to be processed; the part to be processed of the part to be processed reflects the sampling light and then transmits the sampling light to a coupler in a spectrum system in an original way; coupling the reference light reflected to the coupler and the sunlight removed reflected to the coupler on the coupler in the spectrum system, and forming interference fringes with alternate brightness through the grating;
4.4.4 The fine adjustment reflecting element is dynamically adjusted, so that the central bright stripe of the interference stripe coincides with the highest point of the wave crest, namely, the focal position of the lens focusing is positioned on the part to be processed of the part to be processed at any time, and the detection light is focused on the part to be processed of the part to be processed. For example, in making the reflective element adjustments, this may include motors, piezo devices, hydraulic or pneumatic control devices, etc. for effecting adjustments to the reflective element position, shape or tilt angle. Such an adjustment mechanism may be precisely controlled by the control system to achieve dynamic adjustment of the light beam.
4.5 Starting the emergent laser of the laser to enable the emergent laser to be focused on a part to be processed of the part to be processed after passing through the reflecting element;
4.6 Focusing the part to be processed by emitting laser.
The invention provides a multi-angle focusing control method, the working principle of which is designed by the practical requirement of a coherent imaging technology, wherein the coherence of light means that two light waves keep the same phase difference in the transmission process, have the same frequency or have completely consistent waveforms. Such two beams of light can produce stable interference in propagation, namely constructive interference and destructive interference. And calculating the distance between interference fringes, namely the distance between the focus of the actual focusing mirror and the surface of the part. The hole making system uses a computer to control the laser to emit light beams, the light beams are collimated by a beam expander and then are emitted by a lens according to actual conditions, and finally, the micro feeding module drives the focusing mirror to move up and down so that the focus is always positioned on the upper surface of a workpiece for processing.
In order to realize the dynamic adjustment of the light beam, the device also comprises a precise control system. The control system may include sensors, actuators, and control algorithms for detecting and adjusting parameters of the reflective element in real time to control the focal position and angle of the light beam. For convenience of user or system integration, the device may further comprise a programmable interface for communication and control with external devices. Through the interface, a user can adjust the focal length position and angle of the light beam according to specific requirements, so that diversified application and flexibility are realized.
Referring to fig. 2, for example, in the present invention, when the reflective element is adjusted, the reflective element may be adjusted accordingly by a device including a micro focusing module, a focusing mirror, a driving motor, a mirror mounting frame (radial track, circumferential track), a switching structure, a transmission link, a mirror, a coherent imaging diagnosis system including (a detection light source, an imaging light source, a light path transmission system, a reference light path, a sampling light path, a spectrometer), a control system, a sample, etc., a computer, etc. The present invention overcomes the problems and limitations of the prior art direct focus system shown in fig. 1 in adjusting the reflective element, and provides a more flexible, fast, and accurate beam adjustment mechanism. By designing and implementing such a dynamically adjustable new device. The processing method can solve the technical problems of the existing processing of small cavities, multi-connected blades and hyperboloid spaces and the laser processing bottleneck of the shielding interference holes. Finally, the consistency of the aperture of the processed hole which is always at the focus after focusing the light beams with different angles is ensured.
The following describes the technical scheme provided by the invention in detail:
step S1: firstly, a designed theoretical three-dimensional model (with small cavity gaps and multiple air nozzles and beam interference) is converted into machine tool coordinates (x, y, z, a, c) after being processed and analyzed by a corresponding model of a computer, and a machine tool control program is used for transferring a part to the position below a focusing lens for punching.
Step S2: the computer quickly transmits the converted machine tool coordinates (a, c) to the driver, and the motor drives the transmission connecting rod to enable the reflector to move according to the command of the driver.
Step S3: the motor drives the transmission connecting rod connected with the adjustable reflecting mirror to move, and the transmission connecting rod drives the reflecting mirror mounting frame to move radially and circumferentially along the center point 0 of the reflecting mirror all the time. Finally, the adjustable reflecting mirror rotates to be consistent with the coordinate angle of the hole. For example, the state of mirror rotation at different angle values is different as shown in fig. 3 below:
step S4: the detection system emits a beam of laser light source which is transmitted from the center of the focusing mirror, vertically transmitted to the 0 point of the center of the focusing mirror, and directly or directly transmitted to the surface of the part to be irradiated by the reflecting mirror. The light beam is transmitted to the detection system according to the reversibility of the light and the reverse original path transmission of the light to the surface of the part.
Step S5: the imaging light source emits a beam of collimated laser beam, the laser beam passes through the optical isolator after being conducted by the optical fiber, the optical isolator divides the input laser beam into two paths by using the beam splitter, one path is a reference light path, the other path is a sampling light path, and the light intensity ratio of the two paths is 50:50;
firstly, a reference light path is transmitted by an optical fiber and passes through a polarization controller to adjust the phase, and the reference light path is folded by a 45-degree reflecting mirror; then the dispersion compensation is carried out to eliminate the dispersion brought by the reflector and other optical elements; the laser beam is finally converged on the reflecting mirror through the positive lens. And the reflector reflects the reference light path back to the coupler in the spectrum system according to the original light path. Waiting to couple with the light reflected from the sampling light path.
Secondly, the sampling light path is transmitted by the optical fiber, and the emergent light beam and the processing laser beam are adjusted to be concentric at the half-reflecting half-transmitting mirror through the coupler; and then the light beam is converged on the surface of the sample through a focusing mirror in the micro-feeding module to drill holes and the like. The sample surface has a reflecting effect on the light beam, and the light beam striking the sample surface is transmitted to a coupler in the spectrum system in an original way after being reflected. And finally, coupling the reflected light beam in the reference light path and the reflected light beam in the sampling light path on a coupler in the spectrum system, forming a coherent light beam through a grating, irradiating the coherent light beam on a camera after passing through a lens, and finally, displaying by the camera. If a coherent image cannot be formed; the optical components such as the polarization controller in the reference optical path are adjusted to match the phases as shown in the waveform of fig. 4 a.
If the path difference nλ (λ is the wavelength, N is zero or a positive integer) between the two rows of light S1 and S2, the actual combined light amplitude is the sum of the two divided amplitudes, and the light intensity is the maximum as shown in fig. 4 a. When the path difference lambda/2 (or odd multiple of the wavelength) of S1 and S2, the sum of the amplitudes of the combined light is zero as shown in fig. 4b, where the light intensity is minimal.
By utilizing the principle, the laser beam generates interference fringes with alternate brightness and darkness. The pitch deltax of the interference fringes can be found by using a correlation formula of grating calculation.
The grating equation: dsinθ=kλk=0, ±1, ±2, … d is that the grating constant k is a constant
Position of the kth stage bright print on the screen:f is the distance from the slit to the screen
Spacing of interference fringes on screen:
the interference fringes and the waveforms have a one-to-one correspondence, and the bright fringes correspond to the wave crests and the dark fringes correspond to the wave troughs. The interference fringes are alternately bright and dark and symmetrically distributed; as shown in FIG. 5, the interval between adjacent fringes is equal to Deltax, and the zero point is obtained when the central bright fringe of the interference fringe is required to coincide with the highest point of the peak.
In the spectrum detection system, there are photoelectric detector, counter, etc. the photoelectric detector converts the same black and white stripes into electric signal with positive sine wave change via photoelectric conversion, and the electric signal is amplified via amplifier and shaped by shaping circuit to obtain two paths of sine wave or square wave with 90 deg. phase difference, which are fed into grating digital display meter for counting and display. The counter records the number of wave peaks in real time, so that the displacement is detected, the moving distance is equal to the distance between adjacent stripes, and the distance is equal to deltax multiplied by the value on the counter.
And finally, sending the data collected by the camera/detector to a computer, and dynamically adjusting the micro-feeding position by the computer according to the motion position of the micro-feeding shaft (the micro-feeding shaft adopts a high-precision grating size) so that the focus position of the lens is positioned on the surface from which the material is removed at the moment, and avoiding defocusing.
Step S6: and the computer controls the laser to emit light, and starts machining according to the hole making direction of the part to be machined.
Through the technical scheme, the invention realizes a brand new dynamic reflection light beam adjusting device. The device enables a user to dynamically change the focal length position and angle of the light beam by precisely controlling the parameters of the reflecting element and the adjusting mechanism so as to adapt to different application requirements and scenes.
Claims (7)
1. A multi-angle focusing control method is characterized in that: the multi-angle focus control method includes the steps of:
1) Acquiring a three-dimensional model of a part to be processed and converting the three-dimensional model into machine tool coordinates;
2) Transferring the part to be processed to the bottom of the focusing mirror through the machine tool according to the machine tool coordinates;
3) Judging whether the angle adjustment of the outgoing laser of the laser is required, if so, executing the step 4); if not, directly focusing the emergent laser of the laser to the part to be processed;
4) According to the position to be processed of the part to be processed, the posture of the outgoing laser of the laser is adjusted, so that the adjusted outgoing laser can be focused on the position to be processed of the part to be processed, and then the outgoing laser with the angle adjusted is focused on the part to be processed.
2. The multi-angle focus control method according to claim 1, characterized in that: the specific implementation manner of the step 4) is as follows:
4.1 Obtaining a part to be processed of a part to be processed;
4.2 Adjusting the reflecting element according to the part to be processed of the part to be processed;
4.3 Detecting the adjustment angle of the reflecting element by using detection light, so as to promote the detection light to be incident to the part to be processed of the part to be processed; the detection light is coaxial with the emergent laser of the laser;
4.4 Adjusting the detection light and focusing the detection light on a part to be processed of the part to be processed;
4.5 Starting the emergent laser of the laser to enable the emergent laser to be focused on a part to be processed of the part to be processed after passing through the reflecting element;
4.6 Focusing the part to be processed by emitting laser.
3. The multi-angle focus control method according to claim 2, characterized in that: the specific implementation manner of the step 4.3) is as follows: the detection system emits detection light which is reflected by the reflection element and then enters the part to be processed of the part to be processed, the part to be processed of the part to be processed is reflected to form detection reflected light, and the detection reflected light is reflected by the reflection element and then enters the detection system until the detection system can detect the detection reflected light.
4. The multi-angle focus control method according to claim 3, wherein: the specific implementation manner of the step 4.4) is as follows:
4.4.1 Dividing the collimated detection light into two parts to form reference light and sampling light;
4.4.2 The reference light passes through a polarization controller to adjust the phase of the reference light, and the reference light is deflected through a 45-degree reflecting mirror; then, dispersion compensation is carried out to eliminate the dispersion brought by the reflector; the reference light is converged on the reflecting mirror after passing through the positive lens; at the same time, the reflector reflects the reference light back to the coupler in the spectrum system according to the original light path;
4.4.3 After passing through the coupler, the sampling light passes through the reflecting element, so that the sampling light is converged at the part to be processed of the part to be processed; the part to be processed of the part to be processed reflects the sampling light and then transmits the sampling light to a coupler in a spectrum system in an original way; coupling the reference light reflected to the coupler and the sunlight removed reflected to the coupler on the coupler in the spectrum system, and forming interference fringes with alternate brightness through the grating;
4.4.4 The fine adjustment reflecting element is dynamically adjusted, so that the central bright stripe of the interference stripe coincides with the highest point of the wave crest, namely, the focal position of the lens focusing is positioned on the part to be processed of the part to be processed at any time, and the detection light is focused on the part to be processed of the part to be processed.
5. The multi-angle focus control method according to claim 4, wherein: the ratio of the light intensity of the reference light to the light intensity of the sampling light is 50:50.
6. the multi-angle focus control method according to any one of claims 1 to 5, characterized in that: in the step 4), the gesture includes a focal position and an angle.
7. The multi-angle focus control method according to claim 6, wherein: the reflective element is a mirror, a reflective prism and/or a reflector.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311858718.XA CN117655511A (en) | 2023-12-30 | 2023-12-30 | Multi-angle focusing control method |
| CN202410563445.4A CN118305427A (en) | 2023-12-30 | 2024-05-08 | Multi-angle focusing control method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311858718.XA CN117655511A (en) | 2023-12-30 | 2023-12-30 | Multi-angle focusing control method |
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| CN117655511A true CN117655511A (en) | 2024-03-08 |
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| CN202311858718.XA Withdrawn CN117655511A (en) | 2023-12-30 | 2023-12-30 | Multi-angle focusing control method |
| CN202410563445.4A Pending CN118305427A (en) | 2023-12-30 | 2024-05-08 | Multi-angle focusing control method |
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| CN202410563445.4A Pending CN118305427A (en) | 2023-12-30 | 2024-05-08 | Multi-angle focusing control method |
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| CN (2) | CN117655511A (en) |
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- 2023-12-30 CN CN202311858718.XA patent/CN117655511A/en not_active Withdrawn
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| CN118305427A (en) | 2024-07-09 |
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Application publication date: 20240308 |